CN102768475A - Alignment restoring system and method for exposure machines - Google Patents
Alignment restoring system and method for exposure machines Download PDFInfo
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- CN102768475A CN102768475A CN2012102615073A CN201210261507A CN102768475A CN 102768475 A CN102768475 A CN 102768475A CN 2012102615073 A CN2012102615073 A CN 2012102615073A CN 201210261507 A CN201210261507 A CN 201210261507A CN 102768475 A CN102768475 A CN 102768475A
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Abstract
The invention relates to the electronic information technology, in particular to alignment restoring system and method for exposure machines. The alignment restoring system comprises upper slide glass, lower slide glass, an image acquisition device, a stepping motor and a processing unit. The processing unit is connected with the stepping motor and the image acquisition device respectively. The stepping motor is further connected with the upper slide glass or the lower slide glass. The alignment restoring method includes the following steps of acquiring an image including both the center of upper film and the center of lower film by the image acquisition device; acquiring a horizontal position deviation value according to the image by the processing unit; sending a moving instruction to the stepping motor when the horizontal position deviation value is discovered to be larger than a setting value; and driving the upper slide glass or the lower slide glass to move toward the reducing direction of the horizontal position deviation value according to the moving instruction by the stepping motor. Workers need not to participate in the whole alignment restoring process of the alignment restoring system and method for the exposure machines, the films also need not to be taken down, and a large amount of time is saved.
Description
Technical field
The present invention relates to electronic information technology, be specifically related to a kind of exposure machine contraposition repair system and method.
Background technology
When using exposure machine to carry out pcb board (printed circuit board) operation, guarantee constantly that the horizontal level deviate between the center of center and following film of film is no more than setting value.In case above just causing product quality to descend even scrapping.So at first will carry out the center-aligned of film, could begin to carry out pcb board production after the completion.Also require the horizontal level deviate between the center of two films can not surpass setting value all the time in the production run.In case the contraposition reparation just will be carried out with the horizontal level deviate between the center of following film above setting value in the center of going up film, the horizontal level deviate between the center of center and following film of film is remained in the setting value again.
Because upper and lower two object carriers of existing exposure machine all can not move; So can only be earlier when carrying out contraposition and repair the film of a side be taken off from object carrier; Move film through manual work then the horizontal level deviate between the center of two films is remained in the setting value again, again film is fixed afterwards.Cause production efficiency low like this.
Summary of the invention
The invention provides a kind of exposure machine contraposition repair system.
In addition, the present invention also provides a kind of hand exposure machine contraposition restorative procedure.
Exposure machine contraposition repair system of the present invention and method can be carried out the contraposition reparation automatically.
In order to achieve the above object, technical scheme of the present invention is achieved in that exposure machine contraposition repair system, comprises object carrier, following object carrier, image acquiring device, stepper motor and treating apparatus; Said treating apparatus is connected with image acquiring device with said stepper motor respectively; Said stepper motor also is connected with said upward object carrier or following object carrier;
The said object carrier of going up is used for: film in the placement;
Said object carrier down is used for: place film down;
Said image acquiring device is used for: the image that obtains the center of containing film simultaneously and the center of following film; And said image is sent to treating apparatus;
Said treating apparatus is used for: will analyze said image, and obtain the horizontal level deviate between the center of said center of going up film and said time film; Said horizontal level deviate and setting value are compared,, send move to stepper motor when said horizontal level deviate during greater than said setting value;
Said stepper motor is used for: move to the direction that the horizontal level deviate is dwindled according to connected upward object carrier of this move drive or said object carrier down.
Further, said monitoring arrangement is a ccd image sensor.
Further, said monitoring arrangement is arranged on the top of object carrier or the below of following object carrier.
Further, also comprise input media; Said input media is connected with said treating apparatus;
Said input media is used for: receive the setting value of user's input, and this setting value is sent to treating apparatus;
Said treating apparatus is further used for: the setting value according to current reception is upgraded the setting value of being preserved.
Further, also comprise display device; Said display device is connected with said input media;
Said input media is further used for: said setting value is sent to display device;
Said display device is used for: show received setting value.
Exposure machine contraposition restorative procedure based on above-mentioned any one exposure machine contraposition repair system, comprises the following steps:
Said image acquiring device obtains the image at the center of containing film simultaneously and the center of following film; And said image is sent to treating apparatus;
Said treating apparatus is analyzed said image, obtains the horizontal level deviate between the center of said center of going up film and said time film;
Said horizontal level deviate and setting value are compared, when finding said horizontal level deviate, send move to stepper motor greater than said setting value;
Said stepper motor receives said move, and moves to the direction that the horizontal level deviate is dwindled according to connected upward object carrier of this move drive or said object carrier down.
Further, said treating apparatus is analyzed said image, and the step that obtains the horizontal level deviate between the center of said center of going up film and said time film is specially:
The pixel count at interval between the center of the center of film and following film on said treating apparatus calculates in the said image;
According to said image acquiring device apart from the said film or the distance of film down of going up, with said pixel count be scaled said center of going up film with said under horizontal level deviate between the center of film.
Further, said move is a pulse signal, and said step to stepper motor transmission move is specially:
According to the parameter of the said stepper motor of importing in advance and quantity and the frequency that said horizontal level deviate calculates the pulse signal of required transmission;
Send the pulse signal of this quantity, this frequency to said stepper motor.
Further, when also comprising input media, the said step that said horizontal level deviate and setting value are compared further comprises:
Input media receives the setting value of user's input, and this setting value is sent to treating apparatus;
Setting value according to current reception is upgraded the setting value of being preserved;
Setting value after said horizontal level deviate and the renewal is compared.
Further, said setting value is 10～20 μ m.
Compared with prior art; Exposure machine contraposition repair system of the present invention and method are through being provided with image acquiring device and stepper motor; Can monitor the horizontal level deviate between the center of center and said down film of film in process of production in real time, after the horizontal level deviate surpassed setting value, the may command stepper motor moved object carrier or time object carrier; And then movable sizing sheet or following film, thereby accomplish the step that contraposition is repaired.Whole contraposition repair process no longer needs artificial the participation, also need not take off film, has saved great amount of time.
Description of drawings
In order to be illustrated more clearly in the specific embodiment of the invention or technical scheme of the prior art; To do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art below; Obviously, the accompanying drawing in describing below is embodiments more of the present invention, for those of ordinary skills; Under the prerequisite of not paying creative work, can also obtain other accompanying drawing according to these accompanying drawings.
The structural representation of the exposure machine contraposition repair system that Fig. 1 provides for the specific embodiment of the invention 1;
The process flow diagram of the exposure machine contraposition restorative procedure that Fig. 2 provides for the specific embodiment of the invention 2;
The process flow diagram of the exposure machine contraposition restorative procedure that Fig. 3 provides for the specific embodiment of the invention 3;
The process flow diagram of the exposure machine contraposition restorative procedure that Fig. 4 provides for the specific embodiment of the invention 4;
The process flow diagram of the exposure machine contraposition restorative procedure that Fig. 5 provides for the specific embodiment of the invention 5.
The last object carrier of Reference numeral: 1-, object carrier under the 2-, 3-image acquiring device, 4-stepper motor, 5-treating apparatus, the last film of 6-, film under the 7-, 8-input media, 9-display device.
Embodiment
For making the object of the invention, technical scheme and advantage clearer; To carry out clear, complete description to technical scheme of the present invention below; Based on the embodiment among the present invention; Those of ordinary skills are resulting all other embodiments under the prerequisite of not making creative work, the scope that all belongs to the present invention and protected.
Exposure machine contraposition repair system comprises object carrier, following object carrier, image acquiring device, stepper motor and treating apparatus; Said treating apparatus is connected with image acquiring device with said stepper motor respectively; Said stepper motor also is connected with said upward object carrier or following object carrier;
The said object carrier of going up is used for: film in the placement;
Said object carrier down is used for: place film down;
Said image acquiring device is used for: the image that obtains the center of containing film simultaneously and the center of following film; And said image is sent to treating apparatus;
Said treating apparatus is used for: will analyze said image, and obtain the horizontal level deviate between the center of said center of going up film and said time film; Said horizontal level deviate and setting value are compared,, send move to stepper motor when said horizontal level deviate during greater than said setting value;
Said stepper motor is used for: move to the direction that the horizontal level deviate is dwindled according to connected upward object carrier of this move drive or said object carrier down.
Can monitor the horizontal level deviate between the center of center and said down film of film so in process of production in real time; After the horizontal level deviate surpasses setting value; The may command stepper motor moves object carrier or following object carrier; And then movable sizing sheet or following film, thereby accomplish the step that contraposition is repaired.Whole contraposition repair process no longer needs artificial the participation, also need not take off film, has saved great amount of time.
In each embodiment of the present invention, as preferred version, said monitoring arrangement is a ccd image sensor.The precision of images that obtains like this is higher, can better meet micron-sized production requirement.
In each embodiment of the present invention, as preferred version, said monitoring arrangement is arranged on the top of object carrier or the below of following object carrier.Can observe the center of two films so the most intuitively, obtain more clear, image accurately.
In each embodiment of the present invention,, also comprise input media as preferred version; Said input media is connected with said treating apparatus;
Said input media is used for: receive the setting value of user's input, and this setting value is sent to treating apparatus;
Said treating apparatus is further used for: the setting value according to current reception is upgraded the setting value of being preserved.
Can let the user that setting value is changed like this, to satisfy of the requirement of different pcb boards to precision.
In each embodiment of the present invention,, also comprise display device as preferred version; Said display device is connected with said input media;
Said input media is further used for: said setting value is sent to display device;
Said display device is used for: show received setting value.
The user can check the setting value of oneself input like this, if with own required inconsistent can in time the change.
Exposure machine contraposition restorative procedure based on said exposure machine contraposition repair system comprises the following steps:
Said image acquiring device obtains the image at the center of containing film simultaneously and the center of following film; And said image is sent to treating apparatus;
Said treating apparatus is analyzed said image, obtains the horizontal level deviate between the center of said center of going up film and said time film;
Said horizontal level deviate and setting value are compared, when finding said horizontal level deviate, send move to stepper motor greater than said setting value;
Said stepper motor receives said move, and moves to the direction that the horizontal level deviate is dwindled according to connected upward object carrier of this move drive or said object carrier down.
So just, can accomplish the contrast repair process automatically, method is simple, and the time spent is short.
In each embodiment of the present invention, as preferred version, said treating apparatus is analyzed said image, and the step that obtains the horizontal level deviate between the center of said center of going up film and said time film is specially:
The pixel count at interval between the center of the center of film and following film on said treating apparatus calculates in the said image;
According to said image acquiring device apart from the said film or the distance of film down of going up, with said pixel count be scaled said center of going up film with said under horizontal level deviate between the center of film.
The image that image acquiring device obtained rearranges through a large amount of pixels, and the size of each pixel can be set as required.In addition, image acquiring device is far away more apart from captured object, and the physical size scope of a pixel representative is just big more.But when distance one timing of image acquiring device with the object that is taken, the physical size scope of its each pixel representative also is certain.Therefore the pixel count at interval calculates the horizontal level deviate between center that for these reasons can be through going up film in the image and the center of following film.
In each embodiment of the present invention, as preferred version, said move is a pulse signal, and said step to stepper motor transmission move is specially:
According to the parameter of the said stepper motor of importing in advance and quantity and the frequency that said horizontal level deviate calculates the pulse signal of required transmission;
Send the pulse signal of this quantity, this frequency to said stepper motor.
Stepper motor is to be that first stepper motor spare is controlled in the open loop of angular displacement or displacement of the lines with shift pulse signal.Under the situation of non-overload; The frequency and the umber of pulse of pulse signal only depended in rotating speed of motor, the position that stops; And do not receive the influence of load variations, when step actuator receives a pulse signal, it rotates a fixing angle with regard to drive stepping motor by the direction of setting; Be called " step angle ", its rotation is to move step by step with fixing angle.Can come the pilot angle displacement through the quantity of control wave, thereby reach the purpose of accurate location; Can control speed and the acceleration that motor rotates through the gating pulse frequency simultaneously, thereby reach the purpose of speed governing.Therefore as long as the quantity and the frequency that calculate the pulse signal of required transmission according to the parameter and the said horizontal level deviate of stepper motor just can realize the accurate control to displacement and translational speed, accomplish the contrast reparation rapidly, accurately.
In each embodiment of the present invention, as preferred version, when also comprising input media, the said step that said horizontal level deviate and setting value are compared further comprises:
Input media receives the setting value of user's input, and this setting value is sent to treating apparatus;
Setting value according to current reception is upgraded the setting value of being preserved;
Setting value after said horizontal level deviate and the renewal is compared.
Can let the user that setting value is changed like this, to satisfy of the requirement of different pcb boards to precision.
In each embodiment of the present invention, as preferred version, said setting value is 10～20 μ m.This scope can satisfy the production requirement of most pcb boards, and can not cause the significantly increase of cost because of precision is too high.
As shown in Figure 1, exposure machine contraposition repair system comprises object carrier 1, following object carrier 2, image acquiring device 3, stepper motor 4 and treating apparatus 5; Said treating apparatus 5 is connected with image acquiring device 3 with said stepper motor 4 respectively; Said stepper motor 4 also is connected with said upward object carrier 1 or following object carrier 2;
The said object carrier 1 of going up is used for: film 6 in the placement;
Said object carrier 2 down is used for: place film 7 down;
Said image acquiring device 3 is used for: the image that obtains the center of containing film 6 simultaneously and the center of following film 7; And said image is sent to treating apparatus 5;
Said treating apparatus 5 is used for: will analyze said image, and obtain the horizontal level deviate between the center of said center of going up film 6 and said time film 7; Said horizontal level deviate and setting value are compared,, send moves to stepper motor 4 when said horizontal level deviate during greater than said setting value;
Said stepper motor 4 is used for: move to the direction that the horizontal level deviate is dwindled according to connected upward object carrier 1 of this move drive or said object carrier 2 down.
Said monitoring arrangement 3 is a ccd image sensor.
Said monitoring arrangement 3 is arranged on down the below of object carrier 2.
This exposure machine contraposition repair system also comprises input media 8; Said input media 8 is connected with said treating apparatus 5;
Said treating apparatus 5 is further used for: the setting value according to current reception is upgraded the setting value of being preserved.
This exposure machine contraposition repair system also comprises display device 9; Said display device 9 is connected with said input media 8;
Said display device 9 is used for: show received setting value.
As shown in Figure 2, exposure machine contraposition restorative procedure comprises the following steps:
201) image acquiring device obtains the image at the center of containing film simultaneously and the center of following film; And said image is sent to treating apparatus;
202) treating apparatus is analyzed said image, obtains the horizontal level deviate between the center of said center of going up film and said time film;
203) said horizontal level deviate and setting value are compared, when finding said horizontal level deviate, send move to stepper motor greater than said setting value;
204) stepper motor receives said move, and moves to the direction that the horizontal level deviate is dwindled according to connected upward object carrier of this move drive or said object carrier down.The stepper motor stepper motor.
As shown in Figure 3, exposure machine contraposition restorative procedure comprises the following steps:
301) image acquiring device obtains the image at the center of containing film simultaneously and the center of following film; And said image is sent to treating apparatus;
302) pixel count at interval between the center of the center of film and following film on said treating apparatus calculates in the said image;
303) according to said image acquiring device apart from the said film or the distance of film down of going up, with said pixel count be scaled said center of going up film with said under horizontal level deviate between the center of film;
304) said horizontal level deviate and setting value are compared, when finding said horizontal level deviate, send move to stepper motor greater than said setting value;
305) stepper motor receives said move, and moves to the direction that the horizontal level deviate is dwindled according to connected upward object carrier of this move drive or said object carrier down.The stepper motor stepper motor.
As shown in Figure 4, exposure machine contraposition restorative procedure comprises the following steps:
401) image acquiring device obtains the image at the center of containing film simultaneously and the center of following film; And said image is sent to treating apparatus;
402) treating apparatus is analyzed said image, obtains the horizontal level deviate between the center of said center of going up film and said time film;
403) said horizontal level deviate and setting value are compared; When finding said horizontal level deviate, according to the parameter of the said stepper motor of importing in advance and quantity and the frequency that said horizontal level deviate calculates the pulse signal of required transmission greater than said setting value; And send the pulse signal of this quantity, this frequency to said stepper motor;
404) stepper motor receives said move, and moves to the direction that the horizontal level deviate is dwindled according to connected upward object carrier of this move drive or said object carrier down.The stepper motor stepper motor.
As shown in Figure 5, exposure machine contraposition restorative procedure comprises the following steps:
501) image acquiring device obtains the image at the center of containing film simultaneously and the center of following film; And said image is sent to treating apparatus;
502) treating apparatus is analyzed said image, obtains the horizontal level deviate between the center of said center of going up film and said time film;
503) input media receives the setting value of user's input, and this setting value is sent to treating apparatus; Setting value according to current reception is upgraded the setting value of being preserved; Setting value after said horizontal level deviate and the renewal is compared; When finding said horizontal level deviate, send move to stepper motor greater than said setting value;
504) stepper motor receives said move, and moves to the direction that the horizontal level deviate is dwindled according to connected upward object carrier of this move drive or said object carrier down.The stepper motor stepper motor.
What should explain at last is: above embodiment and embodiment be only in order to explaining technical scheme of the present invention, but not to its restriction; Although the present invention has been carried out detailed explanation with reference to aforementioned embodiments and embodiment; Those of ordinary skill in the art is to be understood that: it still can be made amendment to aforementioned embodiments or technical scheme that embodiment put down in writing, perhaps part technical characterictic wherein is equal to replacement; And these are revised or replacement, do not make the essence disengaging embodiment of the present invention of relevant art scheme or the spirit and the scope of embodiment technical scheme.
Claims (10)
1. exposure machine contraposition repair system is characterized in that, comprises object carrier, following object carrier, image acquiring device, stepper motor and treating apparatus; Said treating apparatus is connected with image acquiring device with said stepper motor respectively; Said stepper motor also is connected with said upward object carrier or following object carrier;
The said object carrier of going up is used for: film in the placement;
Said object carrier down is used for: place film down;
Said image acquiring device is used for: the image that obtains the center of containing film simultaneously and the center of following film; And said image is sent to treating apparatus;
Said treating apparatus is used for: will analyze said image, and obtain the horizontal level deviate between the center of said center of going up film and said time film; Said horizontal level deviate and setting value are compared,, send move to stepper motor when said horizontal level deviate during greater than said setting value;
Said stepper motor is used for: move to the direction that the horizontal level deviate is dwindled according to connected upward object carrier of this move drive or said object carrier down.
2. exposure machine contraposition repair system as claimed in claim 1 is characterized in that said monitoring arrangement is a ccd image sensor.
3. exposure machine contraposition repair system as claimed in claim 1 is characterized in that, said monitoring arrangement is arranged on the top of object carrier or the below of following object carrier.
4. exposure machine contraposition repair system as claimed in claim 1 is characterized in that, also comprises input media; Said input media is connected with said treating apparatus;
Said input media is used for: receive the setting value of user's input, and this setting value is sent to treating apparatus;
Said treating apparatus is further used for: the setting value according to current reception is upgraded the setting value of being preserved.
5. exposure machine contraposition repair system as claimed in claim 4 is characterized in that, also comprises display device; Said display device is connected with said input media;
Said input media is further used for: said setting value is sent to display device;
Said display device is used for: show received setting value.
6. exposure machine contraposition restorative procedure is characterized in that, based on any described exposure machine contraposition repair system in the claim 1 to 5, comprises the following steps:
Said image acquiring device obtains the image at the center of containing film simultaneously and the center of following film; And said image is sent to treating apparatus;
Said treating apparatus is analyzed said image, obtains the horizontal level deviate between the center of said center of going up film and said time film;
Said horizontal level deviate and setting value are compared, when finding said horizontal level deviate, send move to stepper motor greater than said setting value;
Said stepper motor receives said move, and moves to the direction that the horizontal level deviate is dwindled according to connected upward object carrier of this move drive or said object carrier down.
7. exposure machine contraposition restorative procedure as claimed in claim 6 is characterized in that said treating apparatus is analyzed said image, and the step that obtains the horizontal level deviate between the center of said center of going up film and said time film is specially:
The pixel count at interval between the center of the center of film and following film on said treating apparatus calculates in the said image;
According to said image acquiring device apart from the said film or the distance of film down of going up, with said pixel count be scaled said center of going up film with said under horizontal level deviate between the center of film.
8. exposure machine contraposition restorative procedure as claimed in claim 7 is characterized in that said move is a pulse signal, and said step to stepper motor transmission move is specially:
According to the parameter of the said stepper motor of importing in advance and quantity and the frequency that said horizontal level deviate calculates the pulse signal of required transmission;
Send the pulse signal of this quantity, this frequency to said stepper motor.
9. exposure machine contraposition restorative procedure as claimed in claim 6 is characterized in that, when also comprising input media, the said step that said horizontal level deviate and setting value are compared further comprises:
Input media receives the setting value of user's input, and this setting value is sent to treating apparatus;
Setting value according to current reception is upgraded the setting value of being preserved;
Setting value after said horizontal level deviate and the renewal is compared.
10. like any described exposure machine contraposition restorative procedure in the claim 6 to 9, it is characterized in that said setting value is 10～20 μ m.
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| KR102378079B1 (en) | 2017-10-31 | 2022-03-24 | 상하이 마이크로 일렉트로닉스 이큅먼트(그룹) 컴퍼니 리미티드 | Substrate alignment method and apparatus, and mask aligner |
| CN109976086A (en) * | 2017-11-30 | 2019-07-05 | 株式会社阿迪泰克工程 | Mask is to, double-side exposal device and mask replacing options |
| CN109976086B (en) * | 2017-11-30 | 2024-04-19 | 株式会社阿迪泰克工程 | Mask pair, double-sided exposure apparatus, and mask replacement method |
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Application publication date: 20121107 |