CN102749706A - Optical scanning apparatus and imaging apparatus - Google Patents
Optical scanning apparatus and imaging apparatus Download PDFInfo
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Abstract
The present invention relates to an optical scanning apparatus and an imaging apparatus, in order to overcome the defect of unequal scanning line space and increase image quality under the condition that the subsidiary scanning image surface curves. The optical scanning apparatus (100) comprises a light source (1), a pillar mirror (4) and a scanning mirror (6), and when the main and subsidiary scanning directions of a rotation polygonal mirror are respectively a first direction and a second direction, the relations are satisfied that alpha2<alpha1 and alpha3 and beta2<beta1 and beta3, or, alpha2>alpha1 and alpha3, in a third direction perpendicular to the first and second directions, wherein the alpha1, alpha2 and alpha3 respectively represents a distance from a rotation center to a reflection position at the beginning, middle and end of scanning, and beta1,beta2, beta3 respectively represents a distance from an imaging surface to a paraxial focus converged by light beams in the second direction at the beginning, middle and end of scanning.
Description
Technical field
The present invention relates to light scanning apparatus and imaging device, be specifically related to can be used for the light scanning apparatus of imaging devices such as laser digital duplicating machine, laser printer or facsimile recorder.
Background technology
Widely-used optical imaging device when utilizing electrofax mode document image, and in such imaging device, be typically provided with the light scanning apparatus that carries out photoscanning with laser.Light scanning apparatus adopts following mode usually when forming sub-image, promptly launch laser with LASER Light Source, this light through polarizer deflections such as polygonal rotating mirrors after; Incide on the photosensitive drums that outer surface has photosensitive property; At this moment, polarizer is along the main scanning direction scanning photosensitive drums that is parallel to photosensitive drum shaft, meanwhile; This photosensitive drums is that rotate along sub scanning direction at the center with the axle, thereby on the photosensitive drums outer surface, forms sub-image.
Trace interval is one of key property of above-mentioned light scanning apparatus.So-called sweep trace is meant the track while scan that luminous point forms, and trace interval is meant the distance between the adjacent scanning lines.If trace interval is indefinite, that is to say, if trace interval is unequal, then on the image that writes with photoscanning, can deform.
Obtain preferable image and write, it is unequal to reduce trace interval as far as possible.The unequal main cause of trace interval is that the polygonal rotating mirror minute surface that is used for as light deflector tilts.Specifically; It is exactly the rotation axis that the deflecting reflecting face of polygonal rotating mirror not exclusively is parallel to polygonal rotating mirror; Deflected beam moves on sub scanning direction with different deflecting reflecting faces; Thereby make to be changed along sub scanning direction, cause trace interval unequal by the luminous point image space on the scanning plane.
To the problems referred to above, for example in patent documentation 1 (the clear 63-313113 communique of TOHKEMY), recorded and narrated and a kind ofly make collimating mirror make minute movement with the method that moves of compensation optical axis with piezoelectricity mode element.In addition; Patent documentation 2 (the clear 61-212818 communique of TOHKEMY) also discloses a kind of technical scheme; This scheme constitutes a sweep trace with the two bundle laser that two LASER Light Sources take place; Through changing this two bundle laser power separately, the center of gravity of controlling synthetic light beam changes along with the change of trace interval.
And then, recorded and narrated a kind of tilt data of certain reflecting surface based on polygonal rotating mirror in the patent documentation 3 (TOHKEMY is put down the 4-200065 communique) and come the laser light quantity is finely tuned the method with the compensation density unevenness.In addition; The technical scheme that patent documentation 4 (TOHKEMY 2006-150772 communique) is recorded and narrated does; Irradiation interval data and input image data according to expression irradiate light location interval are obtained an interval; Carry out the light quantity compensation based on this interval data, the compensation of this light quantity only limits to the light-emitting component light-emitting component in addition that correspondence is clamped in the input image data between the non-light-emitting data more than 2.
Yet; Above-mentioned patent documentation 1 and 2 described polygonal rotating mirror minute surface tilt compensation methods need elements such as piezoelectric element or light source; Can bring problems such as manufacturing cost rising and increase element; The control system that also needs the minute surface slope compensation in addition, this not only can make structure become complicated, but also can cause discontinuous
Problems such as line of (constituting) image or some instability with isolated point or line.
Summary of the invention
In view of the above problems, the present invention provides a kind of does not need to import in addition optical element or control system, just can overcome that the trace interval that minute surface tilts to be caused is unequal, light scanning apparatus that can operating stably and the imaging device that possesses this light scanning apparatus.
In order to achieve the above object, the present invention provides and has following technical scheme.
(1) at first, the present invention provides a kind of light scanning apparatus, comprising: light source; First optical system is used for the light beam of said light emitted is formed images with the line picture on polygonal rotating mirror; And; Second optical system; Be used for passing through light beam after the said polygonal rotating mirror deflection on imaging surface with a picture imaging, it is characterized in that, when the main scanning direction sub scanning direction that carries out deflection scanning with said polygonal rotating mirror is respectively first direction and second direction; And when simultaneously being third direction perpendicular to the direction of this first direction and this second direction, this light scanning apparatus satisfies following relational expression:
Wherein, α 1, α 2, α 3 be respectively the scanning of polygonal rotating mirror when carrying out deflection scanning begin, scan in the middle of, during the end of scan from the center of rotation of polygonal rotating mirror to the distance the beam reflection position of polygonal rotating mirror, β 1, β 2, β 3 be respectively the scanning of polygonal rotating mirror when carrying out deflection scanning when beginning, scan centre, the end of scan from the imaging surface to the sub scanning direction on distance between the paraxial foci position of beam convergence.
(2) characteristic according to above-mentioned (1) described light scanning apparatus also is, following relational expression is set up in this light scanning apparatus,
Wherein, γ 1, γ 2, γ 3 be respectively described scanning begin, scan in the middle of, the degree of depth of said second direction during the end of scan.
(3) characteristic according to above-mentioned (1) described light scanning apparatus is that also this light scanning apparatus satisfies following relational expression,
(4) characteristic according to above-mentioned (1) described light scanning apparatus also is; When the light going direction with said third direction is a positive dirction; And when being negative direction with the opposite direction, said scanning begin and the said second direction during the said end of scan on the said second direction of paraxial foci position than in the middle of the said scanning time on the paraxial foci position be positioned at positive dirction one side more.
(5) characteristic according to above-mentioned (4) described light scanning apparatus is that also the paraxial foci position on the said second direction when the paraxial foci position on the said second direction when said scanning begins and the said end of scan is consistent.
(6) characteristic according to above-mentioned (1) described light scanning apparatus also is, the ratio paraxial foci position separately, beam waist position when the said scanning beginning of said second direction and the end of scan is more near imaging surface one side.
(7) characteristic according to above-mentioned (1) described light scanning apparatus also is, said second optical system constitutes with an optical element, and this optical element has energy on said first direction and said second direction.
(8) characteristic according to above-mentioned (1) described light scanning apparatus also is to have two the above light sources at least.
(9) characteristic according to above-mentioned (1) described light scanning apparatus also is, said second optical system has meniscus shape, and this meniscus shape protrudes towards said light going direction on said second direction.
(10) secondly; The present invention provides a kind of imaging device; Carry comprising a plurality of pictures and to put body and light scanning apparatus; This light scanning apparatus uses the light beam that carries after the image information of putting on the body is modulated according to said a plurality of pictures to scan, and it is characterized in that this optical scanning device is changed to any described light scanning apparatus of technical scheme in above-mentioned (1)～(9).
Imaging device of the present invention is characterised in that the light scanning apparatus comprising the invention described above, and this light scanning apparatus can carry to different pictures to be put body and different picture and carry the image information of putting body and come modulated beam of light, and scans with this light beam through ovennodulation.
Effect of the present invention improves image quality for can in the scope that the decline of beam diameter quality does not take place, improving the subscan curvature of the image unequal with respect to trace interval.
Description of drawings
Fig. 1 is the primary structure synoptic diagram of the embodiment of example light scanning apparatus involved in the present invention.
Fig. 2 is the primary structure synoptic diagram of the embodiment of another example light scanning apparatus involved in the present invention.
Fig. 3 is the primary structure synoptic diagram of example imaging device involved in the present invention.
Fig. 4 is used for explaining that the sagging synoptic diagram of image space takes place polygonal rotating mirror.
Fig. 5 A and Fig. 5 B are the positions of deflecting reflecting face and by the synoptic diagram that concerns between the position of scanning plane; Wherein Fig. 5 A is image space and the example that is consistent by scanning plane, and Fig. 5 B is the sagging example that causes the unequal generation of trace interval of the image space of polygonal rotating mirror.
The synoptic diagram of the relation of distance (sag of chain) between the rotation axis of image height and polygonal rotating mirror and the reflection spot in Fig. 6 A reading scan optical system, Fig. 6 B is the curvature of the image performance plot of sub scanning direction.
Fig. 7 A and Fig. 7 B are respectively the central image height of scanning optics on main scanning direction and the sub scanning direction of embodiment 1 and the depth curve figure of peripheral image height.
Fig. 8 is by the contrast table of the incident angle on the scanning plane in the scanning optics of comparative example 1 and comparative example 1.
Fig. 9 is the optical texture synoptic diagram of light scanning apparatus.
Figure 10 is at polygonal rotating mirror and by the catalog data of the scanning optics between the scanning plane among the embodiment 1.
Figure 11 is main scanning direction and the coefficient complete list of sub scanning direction of the scanning mirror plane of incidence of embodiment 1.
Figure 12 is main scanning direction and the coefficient complete list of sub scanning direction of the scanning mirror surface of emission of embodiment 1.
Figure 13 A is the curvature of the image performance plot of embodiment 1, and Figure 13 B is the uniform velocity performance plot.
Figure 14 is at polygonal rotating mirror and by the catalog data of the scanning optics between the scanning plane in the comparative example 1.
Figure 15 is main scanning direction and the coefficient complete list of sub scanning direction of the scanning mirror plane of incidence of comparative example 1.
Figure 16 is main scanning direction and the coefficient complete list of sub scanning direction of the scanning mirror surface of emission of comparative example 1.
Figure 17 A is the curvature of the image performance plot of comparative example 1, and Figure 17 B is the uniform velocity performance plot.
Figure 18 A and Figure 18 B are respectively the central image height of scanning optics on main scanning direction and the sub scanning direction of comparative example 1 and the depth curve figure of peripheral image height.
Description of symbols:
1 light source, 2 coupling mirrors, 3 apertures, 4 cylindricality mirrors, 5 polygonal rotating mirrors, 5a deflecting reflecting face; The 5b rotation axis, 6 scanning mirrors, 7 catoptrons, 8 photoreceptors (by scanning plane), 9 catoptrons, 10 imaging mirrors; 11 photo detectors, 100 light scanning apparatuss, 1000 imaging devices, 1110 pictures carry puts body, 1121 charging rollers, 1131 developing apparatuss; 1141 transfer rolls, 1151 cleaning devices, 1161 fixing devices, 1171 light scanning apparatuss, 1181 paper feeding cassettes, 1191 registration rollers are right; 1201 paper feed rollers, 1211 transfer paper transport paths, 1221 exit rollers are right, 1231 storehouse dishes, LB laser beam, P transfer paper.
Embodiment
Below utilize embodiment shown in the drawings to specify structure of the present invention.
The light scanning apparatus 100 of this embodiment comprises light source 1, first optical system and second optical system.First optical system is that line is as imaging optical system; Constitute with cylindrical mirror 4; The light beam that is used for light emitted is to form images with the line picture on the polygonal rotating mirror 5 rotating polygonal rotating mirror; Second optical system is a scanning optics, constitutes with scanning mirror 6, is used for forming images with a picture on image planes through the light beam behind the rotation polygonal rotating mirror deflection scanning.Be first direction in this light scanning apparatus 100 through the main scanning direction behind the polygonal rotating mirror deflection scanning; Sub scanning direction is a second direction; When simultaneously being third direction perpendicular to the direction of first direction and second direction; This light scanning apparatus satisfies following relational expression: α 2＜α 1, α 3 and β 2＜β 1, β 3; Perhaps; α 2＞α 1, α 3 and β 2＞β 1, β 3; At this, α 1, α 2, α 3 be respectively the scanning of polygonal rotating mirror 5 when carrying out deflection scanning begin, scan in the middle of, during the end of scan from the center of rotation of polygonal rotating mirror to the distance the beam reflection position of polygonal rotating mirror, β 1, β 2, β 3 be respectively the scanning of polygonal rotating mirror 5 when carrying out deflection scanning when beginning, scan centre, the end of scan from the imaging surface to the sub scanning direction on distance between the paraxial foci position of beam convergence.In this embodiment, main scanning direction refers to the direction of the deflection scanning of polygonal rotating mirror 5, and sub scanning direction refers to the direction of the center of rotation of polygonal rotating mirror 5, is that the irradiate light direction refers to third direction with the main scanning direction direction vertical with sub scanning direction simultaneously.
" light scanning apparatus 1 "
Fig. 1 is the synoptic diagram of primary structure of the embodiment of example light scanning apparatus involved in the present invention.What Fig. 1 showed is single beam mode light scanning apparatus 100, is light source 1 emission diverging light from semiconductor laser, and this light beam is converted into weak diversity light beam through coupling mirror 2 back light beam forms.
The light beam that sees through coupling mirror 2 is when the peristome through aperture 3, and the light beam peripheral part is blocked and by shaping, then inciding line is cylindricality mirror 4 as imaging optical system.
The constant speed that receives the deflection plane beam reflected accompanying rotation polygonal mirror 5 of polygonal rotating mirror 5 is rotated and by after the constant angular velocity deflection; See through a slice scanning mirror 6 that constitutes scanning optics; After then receiving catoptron 7 bending light paths; Converge to formation by on the photoconductivity photoreceptor 8 of scanning plane entity (by scanning plane 8), form luminous point (some picture), scanning is by scanning plane.
Deflected beam converging on the photo detector 11 through imaging mirror 10 through catoptron 9 reflection backs before beginning that photoreceptor 8 surfaces are carried out photoscanning.Photo detector 11 receives to export signal behind the light, according to the output of this photo detector 11, decides the zero hour that writes of photoscanning.
Scanning optics be used for through the beam convergence after light deflector 5 deflections to being formed luminous point on the scanning plane 8, in example shown in Figure 1 with a slice scanning mirror formation scanning optics.
" light scanning apparatus 2 "
Fig. 2 shows that the embodiment of the light scanning apparatus that another example is involved in the present invention is a multiple beam mode light scanning apparatus 100.
Light source among the embodiment shown in Figure 2 is a semiconductor laser array, constitutes with four a row light emitting source ch1 who equidistantly arranges～ch4.Four light emitting sources at the semiconductor laser array of this demonstration are arranged along sub scanning direction, the semiconductor laser array that also can adopt orientation to tilt with respect to sub scanning direction.
Four light beams of four light source radiation shape emissions are the long axis direction diversity light beam consistent with main scanning direction of oval far-field pattern.Four light beams are through inciding in the optical system after this after same coupling mirror 2 couplings.Each light beams form after being coupled can become according to the optical characteristics of after this optical system weak diversity light beam or a little less than bringing together property light beam, can also become parallel beam.
Four light beams receive the beam shaping of aperture 3 after through coupling mirror 2; Be under the effect of cylindricality mirror 4 as imaging optical system then at same line; Bring together on the sub scanning direction separately; At light deflector is near the deflecting reflecting face of polygonal rotating mirror 5, each light beams separate imaging, shape growth line picture on main scanning direction respectively on the sub scanning direction.
Polygonal rotating mirror 5 is activated and after rotating; The deflecting reflecting face that receives this polygonal rotating mirror 5 is with constant angular velocity deflection four light beams, and the scanning optics that four light beams transmissions constitute with a slice scanning mirror 6 behind overshoot is after then the light path of light beam receives catoptron 9 bendings; Shine by scanning plane 8 is the outer surface of photoreceptor 8; On sub scanning direction, assemble respectively, form four luminous points separately, four sweep traces scan by scanning plane 8 simultaneously.
Above-mentioned four beam steering light beams see through after the scanning mirror 26, and a light beams wherein received the reflection of catoptron 9 before arriving scanning photoreceptor 8 surfaces, see through eyeglass 10 and converge on the photo detector 11.Photo detector 11 receives output detection signal behind the light, and the photoscanning separately of four light beams writes and just depends on this output signal the zero hour.
" imaging device "
Next explains the embodiment of the imaging device that an example is involved in the present invention.Fig. 3 is the synoptic diagram of the primary structure of imaging device.
Imaging device 1000 shown in Figure 3 possesses photonasty and looks like to carry and put body 1110, and it is in order to as cylindrical shape photoconductivity photoreceptor.
Above-mentioned picture is provided with charging roller 1121, developing apparatus 1131, transfer roll 1141, cleaning device 1151 around carrying and putting body 1110.Use charging roller to be charging device at this, in addition, can also use corona charging device as charging device.
Picture carry put body 1110 and charging roller 1121 above light scanning apparatus 1171 is set, this light scanning apparatus 1171 is the light scanning apparatus 100 of this embodiment, carries out photoscanning with laser beam LB.Light writes between charging roller 1121 and developer roll 1131, makes public.
Mark 1161 expression fixing devices; Mark 1181 expression paper feeding cassettes, a pair of registration roller of mark 1191 expressions, mark 1201 expression paper feed rollers; Mark 1211 expression transfer paper transport paths; The a pair of exit roller of mark 1221 expressions, mark 1231 indicating panels, mark P representes the transfer paper as the recording medium sheet.
The picture of photoconductivity photoreceptor carries and puts body 1110 and make the CW constant speed and rotate in when imaging, and its surface receives charging roller 1121 chargings and uniform charged.Light scanning apparatus 1171 emission laser beam LB carry to put at charged after image and carry out light on body 1110 surfaces and write, and the exposure back forms electrostatic latent image.Electrostatic latent image is negative sub-image, and its image section is made public.1131 pairs of these electrostatic latent image transfer printings of developing apparatus, thus toner image formed as carrying to put on the body 1110.
The paper feeding cassette 1181 that is used to place transfer paper P can load and unload on the main frame of imaging device 1000, and is as shown in the figure, is under the state of being installed on the main frame paper feed roller 1201 sucking-offs uppermost transfer paper P that is placed in one when paper feeding cassette 1181.This front end by the transfer paper P of sucking-off is clamped among a pair of registration roller 1191.
This carries the toner image of putting on the body 1110 to registration roller 1191 cooperation pictures and moves to the moment on the transfer position, and transfer paper P is sent into the transfer roll 1141 as transfer roll.The transfer paper P and the toner image that are admitted to transfer printing portion are overlapping, receive transfer roll 1161 effects, and this toner image is electrostatically transferred on the transfer paper P.Then, transfer paper P is sent to fixing device 1161, and toner image is fixed on the transfer paper P in fixing device, and then this transfer paper P is rejected on the storehouse dish 1231 by a pair of exit roller 1221 through carrying road 1211.
In transfer printing after the toner image, cleaning device 1151 cleaning pictures carry puts body 1110 surfaces, removes residual toner or paper powder etc.At this, can obtain the imaging of excellence as light scanning apparatus 1171 with the light scanning apparatus 100 of this embodiment.
And then can constitute the color image forming apparatus of serial connection mode; Promptly arrange and a plurality of photonasty are set look like to carry and put body; Carry the light scanning apparatus of putting body with corresponding each picture and carry out photoscanning, form sub-image of all kinds, and with developing apparatus that these sub-images are visual; And then overlapping being transferred on the transfer paper etc., obtain coloured image.Adopt above-mentioned light scanning apparatus 100 as each scanister in this color image forming apparatus, the imaging of the excellence that can obtain to be described below.
" scanning optics "
As stated, trace interval is the key property of light scanning apparatus.The main cause of the unequal generation of trace interval is to be used for the scanning plane inclination as the polygonal rotating mirror 5 of light deflector.That is to say; If the deflecting reflecting face 5a of polygonal rotating mirror 5 is not exclusively parallel with respect to the rotation axis of this polygonal rotating mirror 5; Then deflected beam will be followed each deflection side and penetrated face 5a and be moved at sub scanning direction; Make and moved along sub scanning direction, thereby cause trace interval unequal by the image space of the luminous point on the scanning plane 8.
About prevent the generation that trace interval is unequal with optical means; There is following minute surface tilt compensation method; Promptly make light emitted light beam near the deflecting reflecting face 5a of polygonal rotating mirror 5 along the main sweep counterparty to (from the direction of light source 1 corresponding main sweep face on) imaging by the light path of scanning plane 8; Shape growth line picture makes near the deflecting reflecting face 5a and upwards is conjugate relation by the scanning plane position the subscan counterparty with scanned imagery optical system.This method can provide a kind of stable light scanning apparatus with solution minute surface tilt problem, and need not introduce new optical element and control system etc.
But; The rotation axis 5b of deflecting reflecting face departs from deflecting reflecting face mutually in the polygonal rotating mirror 5, and for this reason along with the rotation of deflecting reflecting face, the image space of above-mentioned line picture can depart from deflecting reflecting face; The problem of so-called image space sagging (sag, below also abbreviate as sagging) promptly takes place.
Specify the problems referred to above referring to Fig. 4.Fig. 4 shows the deflecting reflecting face 5a of polygonal rotating mirror 5 and concerns from the position between light beam (chief ray of the light beam) L of light source.The deflecting reflecting face 5a of polygonal rotating mirror 5 changes from 5a (1) to 5b (1) and then to 5c along with clockwise rotating of this polygonal rotating mirror 5a (1); To the variation of deflecting reflecting face that should polygonal rotating mirror 5, the reflection position of the chief ray of light beam L is from M (-) to M (0) and then change to M also (+).
Light beam L from light source upward forms images with the line picture at reflection position M (0)., when this light beam L incides reflection position M (-) and M (+), depart from also not imaging of light beam when incidence reflection position M (-) and M (+) between the image space of deflecting reflecting face 5a and line picture for this reason.
It is sagging that the departing from of above-mentioned deflecting reflecting face and reflection position is image space; Its both sides that asymmetricly occur in reflection position M (0) shown in Figure 4 usually are (in Fig. 4; The sag of chain that is positioned at M (-) is greater than the sag of chain of M (+)); But can learn the position relation between system's (cylindricality mirror) through adjustment polygonal rotating mirror 5 and incident one sidelight, the sagging symmetry that is adjusted into that reflection position M (0) both sides are taken place takes place.In addition, to be set to usually sag of chain be that 0 reflection position M (0) goes up the chief ray of beam reflected and the optical axis of scanned imagery optical system is consistent to scanned imagery optical system.
Fig. 5 shows through scanning mirror 6, the position of deflecting reflecting face 5a and be the state of conjugate relation between the position of scanning plane 8.
Shown in Fig. 5 A, receive beam reflected (on corresponding main scanning direction, long line picture and p (0) are consistent) because of above-mentioned conjugate relation at reflection position p (0), image space q (0) be consistent by scanning plane 8.
If minute surface takes place to tilt; Promptly when deflecting reflecting face 5a tilts with respect to rotation axis 5b when (with mark 5a ' expression); From the position of deflecting reflecting face 5a and by the conjugate relation between the position of scanning plane 8, deflecting reflecting face 5a beam reflected roughly can be assembled on by scanning plane 8.At this moment, requirement position (optical axis of Fig. 5) can not departed from the position that receives the sub scanning direction of light beam irradiates.
To this, shown in Fig. 5 B, owing to receive the sagging influence of image space that takes place in the polygonal rotating mirror 5, in a single day assemble behind the deflecting reflection in r (1) position in reflection position p (1) beam reflected.
In existing optical system,, make light beam on by scanning plane 8, assemble to each image height design main sweep shape.For this reason, will assemble by the q on the scanning plane 8 (1) from the divergent beams of r (1).
At this moment, the conjugate points of the reflection position p (1) of polygonal rotating mirror 5 is positioned at by the front s (1) of scanning plane 8, like this, when the minute surface inclination takes place, that is to say, when deflecting reflecting face 5a tilts with respect to rotation axis 5b
When (with mark 5a ' expression), though image space on by scanning plane 8 with that the q (1) of minute surface before tilting do not take place is identical,, then move to+direction the position on the subscan face of light beam irradiates.
This is that the unequal problem of the sagging caused scan light spacing of image space takes place polygonal rotating mirror 5.In the optical system of multiple beam mode, be more prone to further add at a certain angle incident imaging surface in than single beam optical system with the light beam of right angle incident imaging surface.This tendency is particularly remarkable in receiving the single lens optical system that keeps within bounds of design parameter.
Specifically, for example identical with prior art in the multiple beam optical system, be under the situation of 0.5mm setting subscan image planes sag of chain, the trace interval when the minute surface tilt quantity of polygonal rotating mirror 5 is 90s is unequal to be reached more than the 70 μ m.And write fashionablely at 1200dpi, because trace interval is 21 μ m, image quality issues such as density unevenness will take place in 1/3 change of spacing in such structure.And in order to reduce density unevenness, preferred sweep span is unequal to be below the 6 μ m.
As stated, the minute surface of the polygonal rotating mirror 5 unequal sagging influence of image space that receives polygonal rotating mirror to a great extent of trace interval of tilting and to cause.In order between image height, to obtain the sagging balance in imaging surface position, need incident light be incided near the main sweep center of polygonal rotating mirror minute surface usually, to obtain left and right sides balance.Near central image height, polygonal rotating mirror minute surface and imaging surface become conjugate relation, tilt even if this moment minute surface takes place, and trace interval is unequal also not obvious.Yet in peripheral image height, because sagging influence, imaging surface one side's conjugate points is left the imaging surface position, like this, if occur minute surface in the polygonal rotating mirror 5, just can cause sweep trace unequal.
To this, the light scanning apparatus 100 of this embodiment changes the paraxial foci position of each image height according to the sag of chain of polygonal rotating mirror 5, and is sagging in order to reduce the image space that polygonal rotating mirror 5 takes place.
That is to say; Center of rotation from polygonal rotating mirror when the scanning when setting polygonal rotating mirror 5 carries out deflection scanning begins, scans centre, the end of scan is respectively α 1, α 2, α 3 to the distance the beam reflection position of polygonal rotating mirror; And the scanning when setting polygonal rotating mirror 5 and carrying out deflection scanning when beginning, scan centre, the end of scan from the imaging surface to the sub scanning direction on distance between the paraxial foci position of beam convergence when being respectively β 1, β 2, β 3; Satisfy following relational expression: α 2＜α 1, α 3 and β 2＜β 1, β 3; Perhaps, α 2＞α 1, α 3 and β 2＞β 1, β 3.
Above-mentioned light scanning apparatus 100 can be through changing the subscan curvature of the image that the image height peripheral part takes place in the scanning optics; And the trace interval when reducing minute surface and tilt is unequal; In the scope that the bad change of beam diameter does not take place; With respect to the unequal subscan curvature of the image that improves of sweep trace, improve image quality.Fig. 6 A has shown the relation of distance (sag of chain) between rotation axis 5b and the reflection spot of image height and polygonal rotating mirror 5 in the scanning optics of the light scanning apparatus 100 of this embodiment.Fig. 6 B shows the curvature of the image characteristic of sub scanning direction.
Can know that from Fig. 5 and Fig. 6 to be the center near the image height 0, along with trending towards the image height peripheral part, sag of chain also is tending towards becoming big gradually with the distance that converges to the imaging surface on the sub scanning direction.In example shown in Figure 6; When image height be-when 163.5mm, 0,163.5mm; The rotation axis and the distance between the reflecting surface of polygonal rotating mirror 5 are changed to 18.703mm respectively, 18.096mm, 18.096mm, 19.491mm, at this moment; Curvature of the image amount on the sub scanning direction also changes, and is respectively 0.97mm, 0.11mm, 1.26mm.
At this, curvature of the image departs from the paraxial foci position for+value representation paraxial converged position towards the light beam direct of travel.As stated; In order between image height, to obtain the balance of curvature of the image, usually incident light is incided near the main sweep center of polygonal rotating mirror reflecting surface, to obtain left and right sides balance; At this moment; As shown in Figure 5, in peripheral image height, imaging surface one side's conjugate points s (1) is arranged in by the place ahead of scanning plane 8 (distance of peripheral image height till from the center of polygonal rotating mirror 5 to reflection spot is greater than the distance of central image height till from the center of polygonal rotating mirror 5 to reflection spot).If promptly with light going direction be+, in the other direction be-, then s (1) is positioned at-direction.
To this, be in by on the scanning plane in order to make conjugate points s (1), and the sweep trace that reduces in the peripheral image height is unequal, need make convergent point (being the paraxial foci position on the sub scanning direction) from being moved to light beam direct of travel (+direction) by scanning plane 8.
Like this, when increasing with respect to the sag of chain of central image height, can change to+direction with respect to central image height through making the subscan curvature of the image, it is unequal to reduce trace interval.Utilize such structure, when for example the minute surface tilt quantity of polygonal rotating mirror 5 was 90s, trace interval is unequal to be reduced to below the 5.8 μ m.Can not feel the bad change of significant image quality when at this moment, people's eyes are observed image.
In addition, the light scanning apparatus 100 of this embodiment preferably constitutes its scanning optics, is generally that 0 reflection position M (0) goes up the chief ray of beam reflected and the optical axis of scanning optics is consistent in that image space is sagging.
And then because near the sag of chain the central image height is minimum, and the sag of chain of peripheral image height is maximum, and therefore, the subscan curvature of the image of preferred peripheral image height is shaped as bigger quadric surface.
Greater than the beam diameter degree of depth of peripheral image height, for this reason, if secondary image face curved shape is the quadric surface shape, in the time of then on the focal position that imaging surface is coupled to peripheral image height, the focus of central image height is outstanding easily usually for the beam diameter degree of depth of central authorities' image height.That is to say, can in whole image height, avoid the bad change of beam diameter and improve trace interval unequal.
Moreover; As stated; In order between image height, to obtain the sagging balance of image planes, need incident light be incided near the main sweep center of polygonal rotating mirror minute surface usually, to obtain left and right sides balance; Polygonal rotating mirror 5 centers when at this moment, most cases is for distance and the end of scan between reflection spot of polygonal rotating mirror 5 centers in when beginning scanning roughly are consistent to the distance between the reflection spot.Like this, when the trace interval that reduces peripheral image height was unequal, the paraxial image planes position of the peripheral image height when the scanning beginning and the end of scan just was consistent.Such structure can be avoided the bad change of beam diameter takes place in whole image height, and it is unequal to improve trace interval.
Fig. 7 A and Fig. 7 B show the central image height of scanning optics on main scanning direction and the sub scanning direction and the depth curve of peripheral image height.Transverse axis among the figure is for leaving the distance (defocusing (mm)) of imaging surface on optical axis direction, the longitudinal axis is the beam diameter (μ m) of sub scanning direction.
In carrying the imaging device 1000 of light scanning apparatus 100, stipulated to be used to form the needed beam diameter size of image, the degree of depth of representing with L among Fig. 7 is meant and satisfies the not distance of the optical axis direction in the whole image height of the following condition of prescribed level of beam diameter.
In addition, this embodiment with the amount of the locational beam diameter of beam waist+below the 10 μ m as the degree of depth.As shown in Figure 7; Usually, because the degree of depth of central image height is greater than the degree of depth of peripheral image height, therefore strengthening the subscan curvature of the image means that promptly overstriking is by the beam diameter on the imaging surface on the scanning plane; But; If the subscan curvature of the image is a quadric surface, then imaging surface is located on the beam waist position of peripheral image height, the beam diameter of central image height is difficult for chap because of meeting greatly because of the degree of depth.In other words, can avoid the bad change of beam diameter takes place in whole image height, it is unequal to improve trace interval.
Moreover, when strengthening peripheral image height, do not hope that both depth curves intersect with respect to the subscan curvature of the image of central image height, the degree of depth of whole image height narrows down.Usually, the degree of depth of central image height is greater than the degree of depth of peripheral image height.For this reason, if make the depth curve of peripheral image height be positioned at the depth curve inboard of central image height, then can avoid the degree of depth of whole image height to narrow down.
The subscan curvature of the image that in other words, can allow peripheral image height is the value of difference of the degree of depth of peripheral image height and central image height greater than the difference of the subscan curvature of the image of central image height.For example, be β 1, β 2, β 3 when setting the subscan curvature of the image amount begin from imaging surface, and set in the middle of scanning beginning, the scanning, when the sub scanning direction degree of depth on the scan end position is γ 1, γ 2, γ 3, preferred following two relational expressions are set up.
And
If β 1-β 2 and β 3-β 2 are less than (γ 2-γ 1)/2; The unequal effect of trace interval then is difficult to be improved; For this reason; Unequal and the beam diameter for the balance trace interval, the curvature of the image variation of preferred peripheral image height with respect to the image planes variation of central image height greater than (γ 2-γ 1)/2.
For example, in the scanning optics (referring to embodiment 1) of this embodiment, with respect to β 10.97mm, β 12=0.11mm, β 3=1.26mm, γ 1=14.5mm, γ 2=16mm, γ 3=14.5mm all satisfies terms and conditions.
In addition, if strengthen the subscan curvature of the image of peripheral image height, then the degree of depth will reduce on the image planes of whole image height, for this reason, and imaging surface one side (minus side) of the paraxial image planes position shown in the beam waist of preferred peripheral image height is positioned at before.
For example shown in Fig. 7 B, image height is+and paraxial foci position during 161.5mm is+1mm, and at this moment, the beam waist position is positioned at-2mm.So, make the degree of depth of peripheral image height as much as possible, help being held in beam diameter on the image planes stable under the situation that has the product error with respect to the imaging surface left-right symmetric.
Adopt the scanning optics of two above scan mirror 6 many because of design parameter; Can consider do not causing the unequal method of minimizing trace interval under the situation that the bad change of subscan curvature of the image (increase) takes place; It is unequal that yet the less single lens optical system of design parameter is difficult to reduce trace interval, and therefore the scanning optics in the so far described light scanning apparatus 100 is particularly useful for possessing the light scanning apparatus of single lens optical system.
The scan mirror 6 preferred meniscus lens sheets that adopt the plane of incidence and the surface of emission all to protrude to light going direction.
When the deflecting reflecting face 5a of existence shown in Fig. 5 B tilts in the polygonal rotating mirror 5; If the shape of the plane of incidence of scan mirror 6 is protruded towards light going direction; Then the influence that change brought of angle of incidence of light degree is less; It is unequal that it can further reduce trace interval than the biconvex shape, helps image quality improving.
Above-mentioned scanning optics is especially effective to the light scanning apparatus (referring to Fig. 2) that possesses the multiple beam optical system.After having shown, Fig. 8 states in the middle scanning optics of embodiment 1 and comparative example 1 (single beam optical system) by the contrast table of the incident angle on the scanning plane 8.
Under the situation of single beam mode, light beam can be with respect to by scanning plane incident image planes generally perpendicularly, and under the situation of multiple beam mode, peripheral light beam is respectively to come incident image planes separately with vertical direction state at an angle.This expression polygonal rotating mirror 5 have minute surface when tilting, the amount of movement of the sub scanning direction that is taken place on the imaging surface in the multiple beam optical system is more than what take place in the single beam optical system.Being specially, is 0 ° by the incident angle of scanning plane 8 in comparative example 1, and by contrast, maximum incident angle incident with 0.03 ° is by scanning plane 8 in the multiple beam optical system of embodiment 1.
In addition, above-mentioned embodiment only is to be suitable for the example that the present invention implements, and the present invention is not constituted any limit value, so long as in the scope that does not break away from aim of the present invention, can the present invention carry out various improvement.
< embodiment 1 >
The embodiment of the scanning optics of light scanning apparatus of the present invention below is shown.The optical arrangement of the light scanning apparatus 100 of present embodiment is as shown in Figure 9.
Following formula is represented the scan mirror shape of embodiment 1 etc.At first, with the non-circular shape in known polynomial expression (3) the expression main sweep cross section.
At this, X is the degree of depth of this scanning mirror at optical axis direction, and R representes the paraxial radius-of-curvature in the main sweep cross section, and Y is illustrated in the distance on the main scanning direction and between the optical axis, and K representes the circular cone coefficient, and A1, A2, A3, A4, A5, A6 represent high power coefficient.
Be not equal to 0 but be that 1 main scanning direction when above is asymmetrical shape as coefficient A1, A3, the A5 of odd number power in the above-mentioned formula (3).
Curvature (inverse of radius-of-curvature) in main scanning direction (coordinate when Y representes to be initial point with the optical axis position) is taken in the subscan cross section is represented the curvature C (Y) in the scanning mirror subscan cross section with following formula (4) when changing.
At this, r (0) representes this scan mirror radius-of-curvature on the optical axis in the subscan cross section, and B1, B2, B3 represent high power coefficient.
Be not equal to 0 but be that 1 main scanning direction when above is asymmetrical shape as coefficient B 1, B3, the B5 of the odd number power of Y in the above-mentioned formula (4), and when these coefficients were 0, scan mirror curvature was certain.
Be not limited to formulate about special toric lens with above-mentioned form, and available various formulate.
The light source 1 of embodiment 1 is 4ch-LDA, and its wavelength is 655nm, be spaced apart 30 μ m, the light source rotational angle is 82.511 °.The focal length of coupling mirror 2 is 27mm, and this coupling mirror 2 is used for light source 1 emitted light beams is formed parallel beam.The sub scanning direction focal length of cylindricality mirror 4 is 48mm.
Incident direction and the angle between the scanning optics optical axis that the deflecting reflecting face quantity of polygonal rotating mirror 5 is 6, inradius is the light beam of 18mm, light emitted are 68 °.
Figure 10 shows at polygonal rotating mirror 5 and by the data of the optical system between the scanning plane 8.Wherein, R representes the radius-of-curvature of main scanning direction, the radius-of-curvature of r vice direction of scanning, and n representes refractive index.At this, R and r are the paraxial radius-of-curvature.
X among Figure 10 and Y represent to be numbered between the minute surface summit of i～i+1 at optical axis direction to remember the distance of direction of scanning.For example; The X=55.077 and the Y=-0.892 that are numbered 0 (deflecting reflecting face) represent; With respect to deflecting reflection point position (giving reflection position) with image height 0; The summit of the plane of incidence of scanning mirror 6 (minute surface numbering 1) respectively at optical axis direction (directions X) at a distance of 55.077mm, and at sub scanning direction (Y direction) at a distance of-0.892mm.
The X=21.0 of minute surface numbering 1 representes the thickness of scanning mirror 6 on optical axis.The curvature of the plane of incidence (minute surface numbering i=1) is certain, and, be shaped as the non-circular arc of representing with above-mentioned formula (4) in main sweep the cross section in.Figure 11 shows the main scanning direction of the plane of incidence and the coefficient of sub scanning direction.
The surface of emission (minute surface numbering i=2) is special, and the shape in its main sweep cross section is asymmetric circular arc with respect to optical axis.Figure 12 shows the main scanning direction of the surface of emission and the coefficient of sub scanning direction.In the scanning optics of embodiment 1, horizontal magnification β=3.05 of the sub scanning direction of center image height.
Figure 13 A shows the curvature of the image characteristic of embodiment 1, wherein realizes vice scanning curvature of the image, and the main sweep curvature of the image is represented in the virtual image, and Figure 13 B shows uniform velocity characteristic (linear characteristic).In addition, the accompanying drawing after Figure 13 all shows the optical characteristics of the ch1 that is positioned at the end among the 4ch-LDA.
Fig. 7 has shown the depth curve (spot diameter is followed the variation that defocuses) of the spot diameter of each luminous point image height among the embodiment 1, and it mainly is meant the spot diameter that the uses line spread function 1/e2 intensity definition luminous point as main sweep 65 ± 10 μ m and subscan 80 ± 10 μ m.
< comparative example 1 >
Next illustrates a routine existing scanning optics (single beam optical system, single lens optical system).At this; Light source is single LD, and its wavelength is 655nm, and the focal length of coupling mirror is 15mm; The focal length of the sub scanning direction of cylindricality mirror is 48mm; The deflecting reflecting face quantity of polygonal rotating mirror is 6, and the inradius of this polygonal rotating mirror is 18mm, and the angle between the incident direction of the light beam of light emitted and the optical axis of scanning optics is 68 °.
Figure 14 shows at the polygonal rotating mirror of comparative example 1 and by the data of the optical system between the scanning plane.Wherein, R representes the radius-of-curvature of main scanning direction, the radius-of-curvature of r vice direction of scanning, and n representes refractive index.At this, R and r are the paraxial radius-of-curvature.X among the figure and Y represent to be numbered between the minute surface summit of i～i+1 at optical axis direction to remember the distance of direction of scanning.
The curvature of the plane of incidence (minute surface numbering i=1) is certain, and is shaped as the non-circular arc of representing with above-mentioned formula (4) in main sweep the cross section in.Figure 15 shows the main scanning direction of the plane of incidence and the coefficient of sub scanning direction.The surface of emission (minute surface numbering i=2) is special, and the shape in its main sweep cross section is asymmetric circular arc with respect to optical axis.Figure 15 shows the main scanning direction of the surface of emission and the coefficient of sub scanning direction.In the scanning optics of comparative example 1, horizontal magnification β=3.73 of the sub scanning direction of center image height.
Figure 17 A shows the curvature of the image characteristic of comparative example 1, wherein realizes vice scanning curvature of the image, and the main sweep curvature of the image is represented in the virtual image, and Figure 17 B shows uniform velocity characteristic (linear characteristic).
Figure 18 has shown the depth curve (spot diameter is followed the variation that defocuses) of the spot diameter of each luminous point image height in the comparative example 1, and wherein, Figure 18 A is a main scanning direction, and Figure 18 B is a sub scanning direction.
Can know that with reference to Figure 17 and Figure 18 the paraxial foci position and the beam waist position of the sub scanning direction of comparative example 1 all are about ± 1mm, both are consistent.
Comparative example 1 can know that with comparative example 1 scanning mirror 6 of the foregoing description 1 is for example as shown in Figure 7, all has the good degree of depth at main scanning direction and sub scanning direction, to ° higher by the permission of the positional precision of scanning plane 8.In addition, shown in figure 13, the position that defocuses of the peripheral image height of embodiment 1 increases to "+" direction, successfully makes conjugate points approaching by scanning plane 8.In view of the above, validity of the present invention has obtained confirmation.
Claims (10)
1. light scanning apparatus, comprising: light source; First optical system is used for the light beam of said light emitted is formed images with the line picture on polygonal rotating mirror; And; Second optical system; Be used for passing through light beam after the said polygonal rotating mirror deflection on imaging surface with a picture imaging, it is characterized in that, when the main scanning direction sub scanning direction that carries out deflection scanning with said polygonal rotating mirror is respectively first direction and second direction; And when simultaneously being third direction perpendicular to the direction of this first direction and this second direction, this light scanning apparatus satisfies following relational expression:
α 2＜α 1, α 3 and β 2＜β 1, β 3, perhaps,
α 2＞α 1, α 3 and β 2＞β 1, β 3,
Wherein, α 1, α 2, α 3 be respectively the scanning of polygonal rotating mirror when carrying out deflection scanning begin, scan in the middle of, during the end of scan from the center of rotation of polygonal rotating mirror to the distance the beam reflection position of polygonal rotating mirror, β 1, β 2, β 3 be respectively the scanning of polygonal rotating mirror when carrying out deflection scanning when beginning, scan centre, the end of scan from imaging surface to said second direction on distance the paraxial foci position of beam convergence.
2. light scanning apparatus according to claim 1 is characterized in that, following relational expression is set up in this light scanning apparatus,
And,
Wherein, γ 1, γ 2, γ 3 be respectively described scanning begin, scan in the middle of, the degree of depth of said second direction during the end of scan.
3. light scanning apparatus according to claim 1 is characterized in that this light scanning apparatus satisfies following relational expression,
α 2＜α 1, α 3 and β 2＜β 1, β 3.
4. light scanning apparatus according to claim 1; It is characterized in that; When the light going direction with said third direction is a positive dirction; And when being negative direction with the opposite direction, said scanning begin and the said second direction during the said end of scan on the said second direction of paraxial foci position than in the middle of the said scanning time on the paraxial foci position be positioned at positive dirction one side more.
5. light scanning apparatus according to claim 4 is characterized in that, the paraxial foci position on the said second direction when the paraxial foci position on the said second direction when said scanning begins and the said end of scan is consistent.
6. light scanning apparatus according to claim 1 is characterized in that, the ratio paraxial foci position separately, beam waist position when the said scanning beginning of said second direction and the end of scan is more near imaging surface one side.
7. light scanning apparatus according to claim 1 is characterized in that, said second optical system constitutes with an optical element, and this optical element has energy on said first direction and said second direction.
8. light scanning apparatus according to claim 1 is characterized in that, has two the above light sources at least.
9. light scanning apparatus according to claim 1 is characterized in that, said second optical system has meniscus shape, and this meniscus shape protrudes towards said light going direction on said second direction.
10. imaging device; Carry comprising a plurality of pictures and to put body and light scanning apparatus; This light scanning apparatus uses the light beam that carries after the image information of putting on the body is modulated according to said a plurality of pictures to scan; It is characterized in that this optical scanning device is changed to any described light scanning apparatus in the claim 1～9.
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| CN106575032A (en) * | 2014-07-31 | 2017-04-19 | 佳能株式会社 | Optical scanning device and image forming apparatus |
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| JP6123706B2 (en) * | 2014-02-28 | 2017-05-10 | ブラザー工業株式会社 | Scanning optical device, image forming apparatus, and scanning lens manufacturing method |
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