CN102732971A - Heating device for crystal growing furnace and corundum single crystal growing furnace - Google Patents
Heating device for crystal growing furnace and corundum single crystal growing furnace Download PDFInfo
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- CN102732971A CN102732971A CN2012102451919A CN201210245191A CN102732971A CN 102732971 A CN102732971 A CN 102732971A CN 2012102451919 A CN2012102451919 A CN 2012102451919A CN 201210245191 A CN201210245191 A CN 201210245191A CN 102732971 A CN102732971 A CN 102732971A
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Abstract
The invention relates to a heating device for a crystal growing furnace. The heating device comprises two electrodes, which are located at the top of the heating device and are annularly distributed. The heating device further comprises at least two U-shaped tungsten belts; each U-shaped tungsten belt comprises two connection arms; each U-shaped tungsten belt is located blow the electrode, and the two connection arms of each U-shaped tungsten belt are respectively detachably and fixedly connected on the corresponding electrodes through fixing mechanisms; the connection arms fixedly arranged on the same electrode are fixedly connected to be a whole body through high-temperature resistance connection strips; and the high-temperature resistance connection strips are fixedly connected with the corresponding connection arms through middle high-temperature resistance bolts and middle high-temperature resistance nuts. The invention further relates to a corundum single crystal growing furnace. The heating device and the corundum single crystal growing furnace provided by the invention are firm and stable in a fixed connection manner; no relative movement phenomenon can be generated among the components, so that difficulty of deformation and damage and long service life can be realized; and furthermore, the heating device can be conveniently and partially dismounted after the heating device is deformed and damaged, so that the problems that the heating device in the prior art is easy to deform and damage, and the component with partial deformation and damage cannot be replaced can be solved.
Description
Technical field
The present invention relates to crystal growing furnace and use electro-heat equipment, also relate to corundum crystal reactors with this electro-heat equipment.
Background technology
Colourless boule monocrystal is widely used in photoelectron and the microelectronic industry, and it has excellent optical property and physical strength, is the base mateiral in domestic and international advanced person and the sciemtifec and technical sphere; 2050 ℃ of colourless boule monocrystal fusing points, very responsive to the growing environment temperature, the geometrical shape of lagging material in the environment and exothermic material there is strict restriction; Application publication number is to be the heating unit that the one Chinese patent application file of 2012.02.08 discloses a kind of crystal growing furnace CN102345161A Shen Qing Publication day, and well heater is tubular, comprises a plurality of electrodes that an end distributes ringwise, the shack of the other end; Be equipped with tungsten silk screen on each electrode, the other end of each tungsten silk screen is connected on the shack, and the tungsten net is formed by thin tungsten filament or tungsten bar braiding; Intensity is low; Since tungsten silk screen, the electro-heat equipment easy deformation of this structure, breakage, easy and even electricity sparking and the winding of other tungsten silk screens of the tungsten silk screen of distortion, breakage; Cause equipment control circuit to damage; Because the mode of connection of tungsten silk screen and electrode and shack is welding, in a single day so have tungsten silk screen distortion or breakage to need integral replacing, cost is high.
Summary of the invention
The object of the present invention is to provide crystal growing furnace to use electro-heat equipment, to solve electro-heat equipment easy deformation of the prior art, damage and can't change local deformaton, damage the problem of parts, the present invention also provides the boule monocrystal reactors.
In order to address the above problem; Crystal growing furnace of the present invention is used electro-heat equipment; Comprise at least two electrodes that are positioned at the device top along annular spread; This device also comprises at least two U type tungsten bands, and each said U type tungsten band includes two connecting arms, and two connecting arms that each said U type tungsten band is positioned at electrode below and each said U type tungsten band are removably fixed with on the said electrode of correspondence through fixed mechanism respectively; Each the said connecting arm that is fixed on the same said electrode is fixed into an integral body through high temperature resistant connecting strip, and said high temperature resistant connecting strip is realized being connected with the cooperation through high temperature resistant bolt in middle part and the high temperature resistant nut in middle part of corresponding said connecting arm.
Described fixed mechanism comprises the slot that the corresponding said connecting arm of the confession of being located on the electrode axial end inserts and radially said connecting arm is held out against at said slot cell wall to realize fixed high temperature resistant stainless steel jackscrew.
The high temperature resistant nut of high temperature resistant bolt in said end and end is processed by tungsten or metal molybdenum or high temperature alloy.
The high temperature resistant nut of high temperature resistant bolt in said middle part and middle part is processed by tungsten or metal molybdenum or high temperature alloy.
Said high temperature resistant connecting strip is processed by tungsten or metal molybdenum or high temperature alloy.
The boule monocrystal reactors; Comprise that crystal growing furnace uses electro-heat equipment; This device comprises at least two electrodes along annular spread that are positioned at the device top; This device also comprises at least two U type tungsten bands, and each said U type tungsten band includes two connecting arms, and two connecting arms that each said U type tungsten band is positioned at electrode below and each said U type tungsten band are removably fixed with on the said electrode of correspondence through fixed mechanism respectively; Each the said connecting arm that is fixed on the same said electrode is fixed into an integral body through high temperature resistant connecting strip, and said high temperature resistant connecting strip is realized being connected with the cooperation through high temperature resistant bolt in middle part and the high temperature resistant nut in middle part of corresponding said connecting arm.
Described fixed mechanism comprises the slot that the corresponding said connecting arm of the confession of being located on the electrode axial end inserts and radially said connecting arm is held out against at said slot cell wall to realize fixed high temperature resistant stainless steel jackscrew.
The high temperature resistant nut of high temperature resistant bolt in said end and end is processed by tungsten or metal molybdenum or high temperature alloy.
The high temperature resistant nut of high temperature resistant bolt in said middle part and middle part is processed by tungsten or metal molybdenum or high temperature alloy.
Said high temperature resistant connecting strip is processed by tungsten or metal molybdenum or high temperature alloy.
The present invention; Detachably be fixed on the electrode at U type tungsten band, the connecting arm of U type tungsten band is fixed into an integral body through the high temperature resistant connecting strip in middle part through screw bolt and nut, and is firm, stable; Can not produce the phenomenon that relatively moves between each original paper; Electro-heat equipment is difficult for deforming, breakage, long service life, and after electro-heat equipment produces the distortion breakage; Can conveniently carry out local dismounting, solve electro-heat equipment easy deformation, damage in the prior art and can't change local deformaton, damage the problem of parts.
Description of drawings
Fig. 1 is the structural representation of electro-heat equipment in the embodiment of the invention.
Embodiment
Below in conjunction with accompanying drawing the embodiment of the invention is done detailed description:
Crystal growing furnace is with the embodiment of electro-heat equipment; As shown in Figure 1; This device has the tubular profile; Comprise two 1,7 and six U type tungsten of electrode bands 2 that are positioned at the device top along annular spread; Two electrode 1,7 recesses over against, electrode can be processed (electrode is processed by the red copper material of TU1 label in the present embodiment) by the red copper material of T1, T2, TU2 or TU1 label, each U type tungsten band 2 includes connection section two connecting arms and that be wholely set with the same end of two connecting arms; Each U type tungsten band 2 be positioned at electrode below homonymy and each U type tungsten band two connecting arms respectively through fixed mechanism be removably fixed with corresponding electrode 1,7 on; For the uniform heating environment is provided, connecting arm is uniform distribution on the electrode of correspondence, and fixed mechanism comprises the slot (not shown) of the corresponding connecting arm insertion of the confession of being located on electrode 1,7 axial ends and along electrode 1,7 radial direction connecting arm held out against on the slot cell wall to realize fixed high temperature resistant stainless steel jackscrew 4; The stainless steel jackscrew by 304,361 or the stainless steel of model such as 361L process; Be fixed on each connecting arm on the same electrode 1,7 through all being fixed into an integral body through two high temperature resistant connecting strips 3, supply to use four high temperature resistant connecting strips 3 on each connecting arm on two electrodes 1,7, high temperature resistant connecting strip is processed by tungsten; High temperature resistant connecting strip 3 is realized being connected with the cooperation through high temperature resistant bolt 5 in middle part and the high temperature resistant nut 6 in middle part of corresponding connecting arm, and the high temperature resistant nut of high temperature resistant bolt in middle part and middle part is processed by tungsten.
In other embodiments of the invention; Different with the foregoing description is; Described fixed mechanism comprises the high temperature resistant nut of high temperature resistant bolt in end and end; This high temperature resistant bolt radially passes said electrode and screws to cooperate with corresponding said connecting arm and with nut and realize connecting arm fixing on electrode, and the high temperature resistant nut of high temperature resistant bolt in said end and end is processed by tungsten or metal molybdenum or high temperature alloy; In other embodiments of the invention, different with the foregoing description is that the high temperature resistant nut of high temperature resistant bolt in said middle part and middle part can also be processed by metal molybdenum or high temperature alloy; In other embodiments of the invention, different with the foregoing description is, high temperature resistant connecting strip can be symmetrical set 6,8 etc. as required on the two side of electro-heat equipment, and U type tungsten band also can be provided with 2,8,10 or the like as required; In other embodiments of the invention, different with the foregoing description is that said high temperature resistant connecting strip is processed by metal molybdenum or high temperature alloy, has in the high temperature alloy prior art a lot, such as high-temperature alloy steel, does not enumerate one by one at this.
Heating unit can use direct current and two, three-phase alternating current, when using direct current or two-phase alternating current, on the electrode on connecting arm of U type tungsten band, connects positive electricity, on the motor on another connecting arm, connects negative electricity; When using three-phase alternating current, such as six electrodes are set, are divided into three groups and connect A, B, C phase respectively, the connection section of each U type tungsten band intersects at the center of bottom of device and is electrically connected, thereby realizes that run duration does not have harmonic wave and do not have drift, and electrical network zero is polluted.
Crystal growing furnace of the present invention is applicable to the preparation of the colourless boule monocrystal body of 18kg to 300kg with electro-heat equipment, also can be used for other crystal that need heat preparations.
The embodiment of boule monocrystal reactors, as shown in Figure 1, comprise that crystal growing furnace uses electro-heat equipment, this electro-heat equipment and crystal growing furnace are described consistent with the embodiment of electro-heat equipment, no longer be repeated in this description at this.
Claims (10)
1. crystal growing furnace is used electro-heat equipment; Comprise at least two electrodes that are positioned at the device top along annular spread; It is characterized in that: this device also comprises at least two U type tungsten bands; Each said U type tungsten band includes two connecting arms; Two connecting arms that each said U type tungsten band is positioned at electrode below and each said U type tungsten band are removably fixed with on the said electrode of correspondence through fixed mechanism respectively, and each the said connecting arm that is fixed on the same said electrode is fixed into an integral body through high temperature resistant connecting strip, and said high temperature resistant connecting strip is connected with the cooperation realization through high temperature resistant bolt in middle part and the high temperature resistant nut in middle part of corresponding said connecting arm.
2. crystal growing furnace according to claim 1 is used electro-heat equipment, it is characterized in that: described fixed mechanism comprises the slot that the corresponding said connecting arm of the confession of being located on the electrode axial end inserts and radially said connecting arm is held out against at said slot cell wall to realize fixed high temperature resistant stainless steel jackscrew.
3. crystal growing furnace according to claim 2 is used electro-heat equipment, it is characterized in that: the high temperature resistant nut of high temperature resistant bolt in said end and end is processed by tungsten or metal molybdenum or high temperature alloy.
4. use electro-heat equipment according to claim 1 or 2 or 3 described crystal growing furnaces, it is characterized in that: the high temperature resistant nut of high temperature resistant bolt in said middle part and middle part is processed by tungsten or metal molybdenum or high temperature alloy.
5. crystal growing furnace according to claim 4 is used electro-heat equipment, it is characterized in that: said high temperature resistant connecting strip is processed by tungsten or metal molybdenum or high temperature alloy.
6. boule monocrystal reactors; Comprise that crystal growing furnace uses electro-heat equipment; This device comprises at least two electrodes along annular spread that are positioned at the device top; It is characterized in that: this device also comprises at least two U type tungsten bands; Each said U type tungsten band includes two connecting arms; Two connecting arms that each said U type tungsten band is positioned at electrode below and each said U type tungsten band are removably fixed with on the said electrode of correspondence through fixed mechanism respectively, and each the said connecting arm that is fixed on the same said electrode is fixed into an integral body through high temperature resistant connecting strip, and said high temperature resistant connecting strip is connected with the cooperation realization through high temperature resistant bolt in middle part and the high temperature resistant nut in middle part of corresponding said connecting arm.
7. boule monocrystal reactors according to claim 6 is characterized in that: described fixed mechanism comprises the slot that the corresponding said connecting arm of the confession of being located on the electrode axial end inserts and radially said connecting arm is held out against at said slot cell wall to realize fixed high temperature resistant stainless steel jackscrew.
8. boule monocrystal reactors according to claim 7 is characterized in that: the high temperature resistant nut of high temperature resistant bolt in said end and end is processed by tungsten or metal molybdenum or high temperature alloy.
9. according to claim 6 or 7 or 8 described boule monocrystal reactors, it is characterized in that: the high temperature resistant nut of high temperature resistant bolt in said middle part and middle part is processed by tungsten or metal molybdenum or high temperature alloy.
10. boule monocrystal reactors according to claim 9 is characterized in that: said high temperature resistant connecting strip is processed by tungsten or metal molybdenum or high temperature alloy.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012102451919A CN102732971A (en) | 2012-07-16 | 2012-07-16 | Heating device for crystal growing furnace and corundum single crystal growing furnace |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012102451919A CN102732971A (en) | 2012-07-16 | 2012-07-16 | Heating device for crystal growing furnace and corundum single crystal growing furnace |
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| CN102732971A true CN102732971A (en) | 2012-10-17 |
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| CN2012102451919A Pending CN102732971A (en) | 2012-07-16 | 2012-07-16 | Heating device for crystal growing furnace and corundum single crystal growing furnace |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106498496A (en) * | 2016-11-02 | 2017-03-15 | 苏州恒嘉晶体材料有限公司 | A kind of heating element of tungsten processing method |
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| US5135047A (en) * | 1989-10-05 | 1992-08-04 | Flavio Dobran | Furnace for high quality and superconducting bulk crystal growths |
| JP2003109722A (en) * | 2001-09-28 | 2003-04-11 | Matsushita Electric Ind Co Ltd | Heating element |
| CN2848884Y (en) * | 2005-12-21 | 2006-12-20 | 北京有色金属研究总院 | Device having symmetrical thermal field central axis |
| CN1993504A (en) * | 2004-08-05 | 2007-07-04 | 贝尔纳德·普施 | Apparatus for growing monocrystals from melt |
| CN201411510Y (en) * | 2009-06-26 | 2010-02-24 | 哈尔滨工大奥瑞德光电技术有限公司 | Birdcage-structured resistance heating element of single crystal furnace for growth of big size sapphire |
| CN101760782A (en) * | 2009-09-25 | 2010-06-30 | 上海元亮光电科技有限公司 | Metallic heating body |
| JP2011126738A (en) * | 2009-12-17 | 2011-06-30 | Showa Denko Kk | Apparatus for pulling single crystal, and method for pulling single crystal |
| CN202279872U (en) * | 2011-10-13 | 2012-06-20 | 刘世全 | High-temperature furnace heating body |
| CN202297877U (en) * | 2011-09-22 | 2012-07-04 | 庄育丰 | Heating device of crystal growth furnace |
| CN202809007U (en) * | 2012-07-16 | 2013-03-20 | 登封市蓝天石化光伏电力装备有限公司 | Heating device for crystal growing furnace and corundum single crystal growing furnace |
-
2012
- 2012-07-16 CN CN2012102451919A patent/CN102732971A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5135047A (en) * | 1989-10-05 | 1992-08-04 | Flavio Dobran | Furnace for high quality and superconducting bulk crystal growths |
| JP2003109722A (en) * | 2001-09-28 | 2003-04-11 | Matsushita Electric Ind Co Ltd | Heating element |
| CN1993504A (en) * | 2004-08-05 | 2007-07-04 | 贝尔纳德·普施 | Apparatus for growing monocrystals from melt |
| CN2848884Y (en) * | 2005-12-21 | 2006-12-20 | 北京有色金属研究总院 | Device having symmetrical thermal field central axis |
| CN201411510Y (en) * | 2009-06-26 | 2010-02-24 | 哈尔滨工大奥瑞德光电技术有限公司 | Birdcage-structured resistance heating element of single crystal furnace for growth of big size sapphire |
| CN101760782A (en) * | 2009-09-25 | 2010-06-30 | 上海元亮光电科技有限公司 | Metallic heating body |
| JP2011126738A (en) * | 2009-12-17 | 2011-06-30 | Showa Denko Kk | Apparatus for pulling single crystal, and method for pulling single crystal |
| CN202297877U (en) * | 2011-09-22 | 2012-07-04 | 庄育丰 | Heating device of crystal growth furnace |
| CN202279872U (en) * | 2011-10-13 | 2012-06-20 | 刘世全 | High-temperature furnace heating body |
| CN202809007U (en) * | 2012-07-16 | 2013-03-20 | 登封市蓝天石化光伏电力装备有限公司 | Heating device for crystal growing furnace and corundum single crystal growing furnace |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106498496A (en) * | 2016-11-02 | 2017-03-15 | 苏州恒嘉晶体材料有限公司 | A kind of heating element of tungsten processing method |
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Application publication date: 20121017 |