CN102707577A - Servo-controlling system of macro-micro mechanism and control method thereof - Google Patents
Servo-controlling system of macro-micro mechanism and control method thereof Download PDFInfo
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Abstract
The invention discloses a servo-controlling system of a macro-micro mechanism and a control method of the servo-controlling system, which belongs to the technical field of module building and control of a precision servo-motion platform and solves the problems that the mechanical resonance of a micro-motion platform in the control of the servo system of the double mechanism is high, the processing difficulty is large and the control is not easy. The servo-controlling system of the macro-micro mechanism comprises a sub-control system of the micro-motion platform and a sub-control system of a macro-motion platform. A control model of the servo-controlling system of the macro-micro mechanism which has clear physical meaning is built by adopting the relative velocity vr of the macro-motion platform and the micro-motion platform as the source of the counter electromotive force of a micro motor M1, adopting the relative displacement yr of the macro-motion platform and the micro-motion platform as the feedback which is applied to the micro-motion platform part, applying the reference command R to a subsystem of the micro-motion platform, adopting the reference command of zero input as the input of the macro-motion platform, finally directly applying the inertia force F of the micro-motion platform on the macro-motion platform. The servo-controlling system and the control method are suitable for the servo-control of the macro-micro mechanism.
Description
Technical field
The present invention relates to a kind of grand little two-shipper structure servo-control system and control method thereof, belong to modeling of elaborate servo motion platform and control technology field.
Background technology
Along with improving constantly of high-tech product performance, the processor of faster travelling speed for example, more the hard disk of high storage density is had higher requirement to the line that forms a complete production network of product, and high precision, high efficiency processing and manufacturing equipment more and more come into one's own.In field of semiconductor manufacture; Lithographic equipment is a wherein the most key part; It has determined the performance of integrated chip to a great extent; Lithographic equipment will reach 45nm even higher production node, requires the main composition part silicon chip platform and the mask stage of lithographic equipment to have very high location and tracking accuracy.For guaranteeing the work efficiency of lithographic equipment, require silicon chip platform and mask stage to have the very short adjustment time again.Rely on the resonance frequency that improves physical construction to reach the performance more and more difficult of wanting; Usually adopt grand little two-shipper structure servo-drive system to reach the dual raising of precision and speed; Guarantee the precision and the rapidity of system by micropositioner; And guarantee the stroke of system by grand moving platform, increased the control difficulty and the complicacy of system like this.
In grand little two-shipper construction system, the volume of micropositioner is less, and stroke is short, lighter weight, and suitable design has high precision, high-speed control system.Usually require the micropositioner mechanical resonant to do highly, cause mechanical processing difficulty to increase thus.
Current, in the control strategy research to two-shipper structure servo-drive system, practical and that use in practice few both at home and abroad.Literature search through to prior art is found; Yang Yibo etc. have set up corresponding department pattern in " thick smart moving ultraprecise motion platform system modelling and analysis and research ", wherein only comprise object part; Yet its model is the equivalent model of setting up through mechanical analysis; The proportionate relationship that has wherein added some quality shows loaded down with trivial details slightly, and physical significance is clear and definite inadequately.
Summary of the invention
The present invention is in order to solve in the control of two-shipper structure servo-drive system, requires the mechanical resonant of micropositioner high, and the big and uppity problem of difficulty of processing provides a kind of grand little two-shipper structure servo-control system and control method thereof.
Grand little two-shipper structure servo-control system according to the invention, it comprises micropositioner sub-control system and grand moving estrade control system:
The micropositioner sub-control system is: the track R that will follow the tracks of instructs the absolute displacement y with micropositioner as a reference
wDo to input to first memory Mem1 after the difference; First memory Mem1 outputs signal to learning algorithm device L; What input to low-pass filter Q low-pass filter Q behind the output signal of learning algorithm device L and the output signal plus of second memory Mem2 outputs signal to second memory Mem2, the output signal of low-pass filter Q also with the reference instruction addition after again with the absolute displacement y of micropositioner
wDo to input to micropositioner positioner C after the difference
1, micropositioner positioner C
1The current signal and the fine motion motor M of output
1The working current signal do to input to micropositioner current controller C after the difference
2, micropositioner current controller C
2The voltage signal and the micropositioner counter electromotive force of motor coefficient E of output
1The voltage signal of unit output is done to input to the fine motion motor M after the difference
1, the fine motion motor M
1Output drive strength is given micropositioner P
w, micropositioner P
wMicropositioner P is gathered in motion under the effect of said driving force
wRate signal give micropositioner integral element
Micropositioner integral element
The absolute displacement y of output micropositioner
w
Grand moving estrade control system is: with the input of zero input instruction as grand moving estrade control system, with the relative displacement y of zero input instruction and grand moving platform and micropositioner
rAfter making difference, input to grand moving platform positioner C
5, grand moving platform positioner C
5The rate signal of output adds feedforward controller C
FFBehind the rate signal of output, again with the grand moving platform P that gathers acquisition
hRate signal input to grand moving platform speed control C after subtracting each other
3, grand moving platform speed control C
3The current signal and the grand moving motor M of output
2The working current signal subtraction after, input to grand moving platform current controller C
4, grand moving platform current controller C
4The voltage signal and the grand moving platform counter electromotive force of motor coefficient E of output
2The voltage signal of unit output is done to input to grand moving motor M after the difference
2, grand moving motor M
2Output drive strength is given grand moving platform P
h, this grand moving platform P
hSaid driving force and fine motion motor M
1The acting in conjunction of the driving force of output produces motion down, gathers grand moving platform P
hRate signal give grand moving platform integral element
Grand moving platform integral element
The absolute displacement y of the moving platform of output macro
h
The relative displacement y of grand moving platform and micropositioner
rAbsolute displacement y by grand moving platform
hAbsolute displacement y with micropositioner
wSubtract each other acquisition;
Feedforward controller C
FFInput end connect micropositioner integral element
Output terminal;
Micropositioner counter electromotive force of motor coefficient E
1The voltage signal of unit output is by gathering the micropositioner P that obtains
wRate signal and grand moving platform P
hRate signal subtracts each other back and micropositioner counter electromotive force of motor coefficient E
1The micropositioner counter electromotive force of motor coefficient E of unit
1The acquisition of multiplying each other;
Grand moving platform counter electromotive force of motor coefficient E
2The voltage signal of unit output is by gathering the grand moving platform P that obtains
hRate signal and grand moving platform counter electromotive force of motor coefficient E
2The grand moving platform counter electromotive force of motor coefficient E of unit
2The acquisition of multiplying each other.
Based on grand little two-shipper structure method of servo-controlling of above-mentioned grand little two-shipper structure servo-control system,
First memory Mem1 preserves the reference instruction R in present instruction cycle and the absolute displacement y of micropositioner
wDifference; This difference and learning algorithm device L obtain the Learning Control amount in present instruction cycle through off-line learning; After the instruction correction addition of the adjacent last instruction cycle of storing among the Learning Control amount of this current instruction cycle and the second memory Mem2, handle, obtain the instruction correction in present instruction cycle through low-pass filter Q; Deposit among the second memory Mem2; The instruction correction of this current instruction cycle and reference instruction R addition affact in the closed-loop system of micropositioner sub-control system, and this closed-loop system is by micropositioner positioner C
1, micropositioner current controller C
2, the fine motion motor M
1With micropositioner P
wForm;
Relative displacement y with grand moving platform and micropositioner
rAs grand moving platform P
hFeedback, with zero input signal as grand moving platform P
hInstruction, carry out grand moving platform P
hFollow micropositioner P
wControl; Absolute displacement y with micropositioner
wAffact grand moving estrade control system as feed-forward signal;
With micropositioner P
wRate signal and grand moving platform P
hRate signal make difference after, the relative velocity v of acquisition
rAs the fine motion motor M
1Back electromotive force source; With the fine motion motor M
1The driving force of output is applied directly to grand moving platform P as micropositioner inertial force F
hOn.
Advantage of the present invention is: the invention solves the control problem of grand little two-shipper structure servo-drive system, control system adopts the mode modeling of explicit physical meaning, and is simple, directly perceived, and taken into full account the coupling factor of grand little two-shipper structure servo-drive system.The present invention adopts appropriate control strategy that cost of hardware design is controlled, and is less demanding to the physical construction of grand moving platform and micropositioner, can on the basis of low resonant frequency, realize the control effect of high precision and whole time of minor.
Control system of the present invention combines the model structure and the multiple control modes of explicit physical meaning, mixes control.Through relative velocity v with grand moving platform and micropositioner
rAs the fine motion motor M
1The source of back electromotive force is with the relative displacement y of grand moving platform and fine motion
rBe applied to grand moving platform part as feedback; Reference instruction R is imposed on the micropositioner subsystem; And with the input of zero input reference instruction as grand moving platform; The inertial force F of micropositioner is applied directly on the grand moving platform, sets up the controlling models of grand little two-shipper structure servo-drive system, so that carry out system design and analysis with clear and definite physical significance.On this basis, apply following control strategy, micropositioner is applied a kind of micropositioner positioner C
1With the two degrees of freedom control strategy that the iterative learning control strategy of being accomplished by learning algorithm device L combines, realize a kind of low cost, low bandwidth, high precision, the control of whole time of minor; Grand moving platform is applied general control strategy, but with the output y of micropositioner
wThrough an intersection feedforward controller C
FFBe applied on the grand moving platform, to guarantee the relative displacement y of grand moving platform and micropositioner
rThe distance of relative movement that does not exceed micropositioner.
The present invention can carry out under the lower situation of micropositioner mechanical resonant frequency; The Machine Design and the processing cost of micropositioner have been reduced; The high frequency uncertain factor that exists to micropositioner is simultaneously carried out bandwidth optimization to micropositioner, and the control ability of micropositioner is optimized.
Description of drawings
Fig. 1 is the theory diagram of the grand little two-shipper structure servo-control system of the present invention;
Fig. 2 is the structural representation of grand little two-shipper structure servo-drive system; A is grand moving platform motor stator among the figure, and B is grand moving platform electric mover and stage body, and C is the micropositioner motor stator, and D is micropositioner electric mover and stage body, F
sBe the fine motion motor M
1The driving force of output, k is a stiffness coefficient, and ξ is a ratio of damping, and for example, under air floating structure, parameter k and ξ can ignore; Y
sBe the position of micropositioner, Y
LBe the position of grand moving platform, m is the quality of micropositioner motion parts, and M is the quality of grand moving platform motion parts;
Fig. 3 is the frequency characteristic of grand moving platform;
Fig. 4 is the frequency characteristic of micropositioner;
Fig. 5 is the frequency characteristic of micropositioner positioner;
The target velocity curve that Fig. 6 will follow the tracks of by the present invention;
Fig. 7 is tracing positional curve of the present invention and partial enlarged drawing thereof; Run1 representes to adopt traditional feedback system not learn the control curve of output that obtains among the figure; It is the curve of output that obtains first period of motion; Run10 representes to apply the control curve of output that the integrated learning algorithm obtains after through 10 periods of motion, representes local position and the enlarged drawing that amplifies with A among the figure;
Fig. 8 is a tracking error curve of the present invention; The graph of errors that Ree1 is corresponding among the figure is that the reference instruction R that the curve of output of Run1 deducts among Fig. 7 among Fig. 7 obtains, and the graph of errors that Ree10 is corresponding is that the reference instruction R that the curve of output of Run10 deducts among Fig. 7 among Fig. 7 obtains;
Fig. 9 is the relative displacement curve of grand moving platform and micropositioner;
Figure 10 is the frequency characteristic of learning algorithm device L.
Embodiment
Embodiment one: below in conjunction with Fig. 1 and Fig. 2 this embodiment is described, the said grand little two-shipper structure servo-control system of this embodiment, it comprises micropositioner sub-control system and grand moving estrade control system:
The micropositioner sub-control system is: the track R that will follow the tracks of instructs the absolute displacement y with micropositioner as a reference
wDo to input to first memory Mem1 after the difference; First memory Mem1 outputs signal to learning algorithm device L; Input to low-pass filter Q behind the output signal of learning algorithm device L and the output signal plus of second memory Mem2; Low-pass filter Q outputs signal to second memory Mem2, the output signal of low-pass filter Q also with the reference instruction addition after again with the absolute displacement y of micropositioner
wDo to input to micropositioner positioner C after the difference
1, micropositioner positioner C
1The current signal and the fine motion motor M of output
1The working current signal do to input to micropositioner current controller C after the difference
2, micropositioner current controller C
2The voltage signal and the micropositioner counter electromotive force of motor coefficient E of output
1The voltage signal of unit output is done to input to the fine motion motor M after the difference
1, the fine motion motor M
1Output drive strength is given micropositioner P
w, micropositioner P
wMicropositioner P is gathered in motion under the effect of said driving force
wRate signal give micropositioner integral element
Micropositioner integral element
The absolute displacement y of output micropositioner
w
Grand moving estrade control system is: with the input of zero input instruction as grand moving estrade control system, with the relative displacement y of zero input instruction and grand moving platform and micropositioner
rAfter making difference, input to grand moving platform positioner C
5, grand moving platform positioner C
5The rate signal of output adds feedforward controller C
FFBehind the rate signal of output, again with the grand moving platform P that gathers acquisition
hRate signal input to grand moving platform speed control C after subtracting each other
3, grand moving platform speed control C
3The current signal and the grand moving motor M of output
2The working current signal subtraction after, input to grand moving platform current controller C
4, grand moving platform current controller C
4The voltage signal and the grand moving platform counter electromotive force of motor coefficient E of output
2The voltage signal of unit output is done to input to grand moving motor M after the difference
2, grand moving motor M
2Output drive strength is given grand moving platform P
h, this grand moving platform P
hSaid driving force and fine motion motor M
1The acting in conjunction of the driving force of output produces motion down, gathers grand moving platform P
hRate signal give grand moving platform integral element
Grand moving platform integral element
The absolute displacement y of the moving platform of output macro
h
The relative displacement y of grand moving platform and micropositioner
rAbsolute displacement y by grand moving platform
hAbsolute displacement y with micropositioner
wSubtract each other acquisition;
Feedforward controller C
FFInput end connect micropositioner integral element
Output terminal;
Micropositioner counter electromotive force of motor coefficient E
1The voltage signal of unit output is by gathering the micropositioner P that obtains
wRate signal and grand moving platform P
hRate signal subtracts each other back and micropositioner counter electromotive force of motor coefficient E
1The micropositioner counter electromotive force of motor coefficient E of unit
1The acquisition of multiplying each other;
Grand moving platform counter electromotive force of motor coefficient E
2The voltage signal of unit output is by gathering the grand moving platform P that obtains
hRate signal and grand moving platform counter electromotive force of motor coefficient E
2The grand moving platform counter electromotive force of motor coefficient E of unit
2The acquisition of multiplying each other.
The said control system of this embodiment is with the fine motion motor M
1Exert oneself and directly be added to grand moving platform P as bonding force
hOn, come the coupling effect in the transaction module.With the displacement difference of grand moving platform and the micropositioner feedback as grand moving platform, this displacement difference can be measured through corresponding sensor, with the input instruction of zero instruction as grand moving platform.
In existing grand little two-shipper construction system, the volume of micropositioner is less, and stroke is short, lighter weight, and suitable design has high precision, high-speed control system.Usually require the micropositioner mechanical resonant to do highly, for making mechanical processing difficulty big, for reducing its Machine Design cost, the present invention improves from control.The two degrees of freedom control strategy that micropositioner adopts robust control and iterative learning control to constitute is controlled, by micropositioner positioner C
1Accomplish the position servo FEEDBACK CONTROL of micropositioner; Can be designed with the control system of low bandwidth, on the one hand can reduce the mechanical property requirement of system, on the other hand as a kind of means of bandwidth optimization micropositioner; Make the micropositioner system robust stable, and obtain the performance of optimization.Accomplishing the adjusting of robust closed-loop control system through the iterative learning control strategy, mainly is on the basis that guarantees system stability, improves the performance of system, for example reduces the adjustment time, improves precision, strengthens the inhibition ability to repeated disturbance.
In order to guarantee the stroke of total system, the volume of grand moving platform and fair bigger, the mechanical resonant of grand moving platform is generally lower; Need design low bandwidth controller; Grand moving platform is being applied on the basis of traditional control method, the physical location of micropositioner is being exported as the feedforward amount, constituting intersection feedforward control grand moving platform; Make grand moving platform follow micropositioner, exceed sensor measurement stroke and micropositioner movement travel with the relative displacement that prevents grand moving platform and micropositioner.
Shown in Figure 2 is the structured flowchart of existing grand little two-shipper structure servo-drive system; Bottommost is pedestal and vibration-isolating platform; The motor stator part and the grand moving platform stage body base of grand moving platform are fixed on the vibration-isolating platform; The mover part of grand moving platform motor connects together with grand moving platform stage body motion parts, and the stage body motion parts reduces the resistance of motion through air floating structure.The fixed part of the motion parts of grand moving platform stage body and the base of micropositioner and fine motion motor connects together, and the electric mover of micropositioner and micropositioner stage body connect together, and the stage body part also is to adopt air floating structure.This structure often is used in the work stage of lithographic equipment, mask stage system; Both can guarantee through this structure that there were enough bandwidth and precision in system; Guarantee the efficient and the quality of wafer photolithography, can guarantee that again there are enough strokes in system, useful for changing platform with exposure large scale wafer.Fig. 2 is work stage or the mask stage system rough schematic view on some direction of motion, and an electromagnetic force through air film resistance and motor interrelates between grand moving platform and the micropositioner.
Obtain the model of control system shown in Figure 1 by structure shown in Figure 2, can design corresponding each controller through this model, rationally convenient and have the model of concrete physical significance the controller of system is adjusted and to be used helpful.Shown in Figure 1, through the analysis to micropositioner motor and whole structure, the control system that obtains has following characteristics:
The track R that at first will follow the tracks of is as the command signal of micropositioner, and reference instruction R can send through industrial computer, the absolute displacement y of micropositioner
w, promptly micropositioner obtains through laser interferometer etc. with respect to the displacement of pedestal; Secondly, the coupling effect of grand moving platform and micropositioner is through the relative velocity v with grand moving platform and micropositioner
rFeed back to the micropositioner motor-driven and set up contact, avoided loaded down with trivial details mechanical relationship conversion; The 3rd, with the relative displacement y of grand moving platform and micropositioner
rAs the feedback of grand moving platform, and with the instruction of zero input signal as grand moving platform, carry out the motion control that grand moving platform is followed micropositioner, the relative displacement of grand moving platform and micropositioner and speed can obtain through relative displacement transducers such as Hall elements; The 4th, the output of micropositioner is affacted grand moving platform system as feed-forward signal, design intersects feedforward controller C
FF, the relative displacement that reduces grand moving platform and micropositioner is no more than distance of relative movement and transducer range; The 5th, the design of Controller of micropositioner, C
1Adopt robust designs, a kind of effective ways as the micropositioner bandwidth optimization obtain optimal performance to a certain controlled device, and the object here is not limited to have the micropositioner of high resonance frequency, can be the micropositioner with low-frequency resonant frequency; The 6th, by learning algorithm device L, the iterative learning control that low-pass filter Q and second memory Mem2 form is restrained the robust closed-loop system of adjusting and being made up of robust controller, reaches the high precision of tracking, and guarantees the convergence of iterative learning control law.Even can guarantee under the low frequency object structure, also can obtain enough good tracking characteristics, and effectively reduce the cost that design has high-frequency resonant frequency micropositioner at the 5th by and the 6th two degrees of freedom control structure that constitutes.
Grand moving platform motor range is bigger, generally select linear electric motors for use, and the micropositioner motor range is little, and it is big to exert oneself, and generally selects voice coil motor or planar motor etc. for use.Grand moving platform speed control C
3Feedback signal can on the basis of not extra increase sensor, from motor-driven, extract.
Embodiment two: below in conjunction with Fig. 1 to Figure 10 this embodiment is described, this embodiment is the grand little two-shipper structure method of servo-controlling based on embodiment one said grand little two-shipper structure servo-control system,
First memory Mem1 preserves the reference instruction R in present instruction cycle and the absolute displacement y of micropositioner
wDifference; This difference and learning algorithm device L obtain the Learning Control amount in present instruction cycle through off-line learning; After the instruction correction addition of the adjacent last instruction cycle of storing among the Learning Control amount of this current instruction cycle and the second memory Mem2, handle, obtain the instruction correction in present instruction cycle through low-pass filter Q; Deposit among the second memory Mem2; The instruction correction of this current instruction cycle and reference instruction R addition affact in the closed-loop system of micropositioner sub-control system, and this closed-loop system is by micropositioner positioner C
1, micropositioner current controller C
2, the fine motion motor M
1With micropositioner P
wForm;
Relative displacement y with grand moving platform and micropositioner
rAs grand moving platform P
hFeedback, with zero input signal as grand moving platform P
hInstruction, carry out grand moving platform P
hFollow micropositioner P
wControl; Absolute displacement y with micropositioner
wAffact grand moving estrade control system as feed-forward signal;
With micropositioner P
wRate signal and grand moving platform P
hRate signal make difference after, the relative velocity v of acquisition
rAs the fine motion motor M
1Back electromotive force source; With the fine motion motor M
1The driving force of output is applied directly to grand moving platform P as micropositioner inertial force F
hOn.
The present invention is with the relative velocity v of grand microstructure
rAs the source of the inverse electromotive force of micropositioner motor, give micropositioner with target instruction target word, and with the absolute displacement y of micropositioner
wPosition feedback as micropositioner; Simultaneously with the relative displacement y between grand moving platform and the micropositioner
rPosition feedback as grand moving platform is applied on the grand moving platform; With of the input of zero input instruction as grand moving platform; Make grand moving platform follow micropositioner; And make its relative displacement be tending towards target instruction target word zero, and constitute the control system that a kind of explicit physical meaning is convenient to control, on the basis of this control system, realize integrating the mixing control method of different control methods.
The present invention carries out bandwidth optimization to micropositioner under the lower situation of micropositioner mechanical resonant frequency, the control ability of micropositioner is optimized, and this is the first step of integrated control strategy.
Adopt the iterative learning control closed loop robust control system of adjusting; Constitute a kind of two degrees of freedom control strategy, cooperate the convergence of low-pass filter assurance Robust Iterative Learning system, further improve the tracking performance of micropositioner; Reduce the adjustment time, this is second step of integrated control strategy.
The absolute displacement of micropositioner is affacted grand moving platform as grand little intersection feedforward amount, the corresponding feedforward controller C that intersects of design
FF, guarantee that the relative displacement of grand little two-shipper structure servo-drive system does not exceed sensor measurement and micropositioner movement travel.And the two closed-loop control designs through the grand moving platform of long stroke guarantee that total system has enough big movement travel, and this is the 3rd step of integrated control strategy.
Verify in the face of control method of the present invention down:
Fig. 3 and Fig. 4 are respectively the object frequency characteristic of grand moving platform and micropositioner, and grand moving platform quality is bigger, and mechanical resonant frequency is 50Hz, and the quality of micropositioner is lighter relatively, and its mechanical resonant frequency is 250Hz.Usually through operation or environmental change for a long time; The mechanical resonant frequency of controlled device can change within the specific limits; And damping also can change, if adopt traditional control method, for example PID or lead-lag means; The capital changes the control effect of system, even makes system become unstable.This is because for high-accuracy kinetic control system, usually for the dynamic indicator that satisfies system with the situation that the proximity energy limit is accomplished by system, cause system that the sensitivity of uncertain factor is promoted, and the robustness of system self reduces.The Robust Controller Design method can make system have under the deterministic scarcely situation, still guarantees the performance that stability is constant.Concrete design is earlier grand moving platform to be carried out independent design, again micropositioner is carried out independent design, at last control strategy is carried out comprehensively, and does suitable adjustment.The requirement of grand moving platform is often not high; It is just in order to guarantee that system has certain movement travel; So carry out traditional design of Controller to grand moving platform, the relative displacement loop bandwidth that obtains grand moving platform is 21Hz, and can suppress the mechanical resonant of grand moving platform effectively.Micropositioner is carried out robust designs, and system bandwidth is about 75Hz, and system has robustness to having the probabilistic system of certain property taken advantage of.The systematic sampling cycle is 4kHz; Through the robust designs method, the for example design of Mixed Sensitivity, the frequency characteristic of the feedback controller that obtains is shown in 5; Controller has high-gain in low-frequency range, can guarantee that micropositioner keeps robust stability having under the 250Hz resonance frequency.The control system that obtains through robust designs also can't guarantee that system has enough good dynamic property, and the iterative learning control that design has a feedforward characteristic is restrained and revised the robust feedback control system, constitutes a kind of two degrees of freedom Robust Iterative Learning Control rule.Can make full use of the cyclical movement characteristics of system in the scan exposure process like this; Utilize the movable information that obtains in last period of motion scanning, the exposure process; Like tracking error etc. and controlled quentity controlled variable information, constitute the control information of the current period of motion; Form a kind of control strategy of similar human study, improve scanning, the exposure accuracy of system effectively.For guaranteeing the convergence of iterative learning system, designed wave filter with low-pass characteristic.
Fig. 7 to Fig. 9 mixes the control design sketch under the control strategy effect in the inventive method.According to the target velocity curve, as shown in Figure 6, plan corresponding target location curve, be to guarantee the efficient of photoetching, system is 450mm/s in the speed of section at the uniform velocity.Given target location curve, i.e. position input instruction, shown in solid line R among Fig. 7, in etching system, wafer carries out scan exposure in section at the uniform velocity usually.Shown in the Ree1 in Fig. 7 aircraft pursuit course Run1 and Fig. 8 graph of errors, under the situation that does not have other control laws to cooperate, because the bandwidth constraints of micropositioner, the micropositioner system that is made up of the robust feedback controller is difficult to the performance that reaches desired.Through iterative learning control law the robust closed-loop system is adjusted; For example adopt based on the contrary iterative learning control rule of object; Shown in figure 10; Cooperate control effect that corresponding low-pass filter obtains shown in the Ree10 among Run10 among Fig. 7 and Fig. 8, this moment, the tracking performance of system was much better than to have only the situation of feedback controller.In section at the uniform velocity, micropositioner makes tracking accuracy reach 30nm through the adjustment of 33ms, and in ensuing 3ms, converges to rapidly in the 5nm scope.As shown in Figure 9, grand little two-shipper structure servo-drive system is being intersected feedforward controller C
FFEffect under, the relative displacement of grand moving platform and micropositioner in ± 1mm, can not exceed distance of relative movement (± 1.5mm) with the range of sensor (± 2mm).
In the concrete implementation process of control strategy; Can be according to the requirement of system index; In conjunction with the controlling object self characteristics; Select suitable robust control strategy, iterative learning control rule and the feedforward controller that intersects, concrete software is realized and can in industrial computer or in the control corresponding integrated circuit board, be implemented.Enforcement is convenient feasible, and is low to the machining requirement of micropositioner through this control strategy, helps reducing cost of hardware design.
Control method according to the invention is through the analysis to physical model; Carry out rational modeling, make and realize effective macro/micromotion decoupling zero on the The whole control system structure, do not have extra coefficient cross term; Be convenient to analyze; On this control system basis, designed the control corresponding method, explicit physical meaning is convenient to realize.
Good control strategy is to the benefit that is designed with of control system, and the system control method that the two-shipper structure drives mainly is made up of the control strategy of the control strategy of micropositioner, grand moving platform and intersection control strategy between the two.Micropositioner has determined the output performance index of The whole control system, and the control strategy of micropositioner is the emphasis of entire method; Whether grand moving platform is influential to micropositioner; The model analysis of passing through to be set up finds that the performance index of grand moving platform are little to the performance index influence of micropositioner; Micropositioner affacts the micropositioner system to the influence of grand moving platform through the back electromotive force path; Can suppress through the electric current loop design of micropositioner, so grand moving platform adopts traditional control strategy to get final product.The control strategy that intersects is also simplified thereupon, and is main with the relative displacement constraint that solves grand moving platform and micropositioner.
In view of above-mentioned analysis, the control of grand moving platform can realize through technological means such as traditional correction or PID.The micropositioner subsystem is an emphasis of design, the output y of instruction R and micropositioner
wDifference be kept among the first memory Mem1; The effect of micropositioner positioner is to realize the feedback bandwidth optimization; Current controller designs the high bandwidth current inner loop through feedback means such as bearing calibration or PID, improves system response time and eliminates the influence of grand moving platform to the micropositioner system.
Above-mentioned learning strategy can realize through multiple learning method, comprises based on the contrary learning method of object, optimizes learning method etc.For example, comprise following design procedure based on the contrary Learning Control rule of object:
1) according to plant characteristic design micropositioner positioner C
1, micropositioner positioner C
1The realization means comprise methods such as sensitivity design or loop shaping;
2) design low-pass filter Q chooses suitable bandwidth Ω, owing to be off-line learning, filter form can be the wave filter of cause and effect or non-causal;
3) law of learning of learning algorithm device
T
0Be the approximate object model P that obtains by identification
w, controller C
1, C
2And motor M
1The closed-loop system that constitutes, given α initial value makes α
00=0, α
01=1;
4) order
Judge || Q (I-α
1T
0 -1T
Δ) ||
∞Whether less than 1, to guarantee the convergence of iteration system, T
ΔIt is actual object closed loop characteristic;
5) if condition can't satisfy in the step 4), make α
01=α
1, return step 4); If condition satisfies, then make α
00=α
1, return step 4), condition is near 1 in step 4); If all can't satisfy, return step 2), reduce bandwidth Ω;
6) if control performance meets the demands, then design finishes; If can't satisfy, then get back to step 2), improve bandwidth Ω, design again is up to meeting design requirement.
Claims (2)
1. grand little two-shipper structure servo-control system, it is characterized in that: it comprises micropositioner sub-control system and grand moving estrade control system:
The micropositioner sub-control system is: the track R that will follow the tracks of instructs the absolute displacement y with micropositioner as a reference
wDo to input to first memory Mem1 after the difference; First memory Mem1 outputs signal to learning algorithm device L; Input to low-pass filter Q behind the output signal of learning algorithm device L and the output signal plus of second memory Mem2; Low-pass filter Q outputs signal to second memory Mem2, the output signal of low-pass filter Q also with the reference instruction addition after again with the absolute displacement y of micropositioner
wDo to input to micropositioner positioner C after the difference
1, micropositioner positioner C
1The current signal and the fine motion motor M of output
1The working current signal do to input to micropositioner current controller C after the difference
2, micropositioner current controller C
2The voltage signal and the micropositioner counter electromotive force of motor coefficient E of output
1The voltage signal of unit output is done to input to the fine motion motor M after the difference
1, the fine motion motor M
1Output drive strength is given micropositioner P
w, micropositioner P
wMicropositioner P is gathered in motion under the effect of said driving force
wRate signal give micropositioner integral element
Micropositioner integral element
The absolute displacement y of output micropositioner
w
Grand moving estrade control system is: with the input of zero input instruction as grand moving estrade control system, with the relative displacement y of zero input instruction and grand moving platform and micropositioner
rAfter making difference, input to grand moving platform positioner C
5, grand moving platform positioner C
5The rate signal of output adds feedforward controller C
FFBehind the rate signal of output, again with the grand moving platform P that gathers acquisition
hRate signal input to grand moving platform speed control C after subtracting each other
3, grand moving platform speed control C
3The current signal and the grand moving motor M of output
2The working current signal subtraction after, input to grand moving platform current controller C
4, grand moving platform current controller C
4The voltage signal and the grand moving platform counter electromotive force of motor coefficient E of output
2The voltage signal of unit output is done to input to grand moving motor M after the difference
2, grand moving motor M
2Output drive strength is given grand moving platform P
h, this grand moving platform P
hSaid driving force and fine motion motor M
1The acting in conjunction of the driving force of output produces motion down, gathers grand moving platform P
hRate signal give grand moving platform integral element
Grand moving platform integral element
The absolute displacement y of the moving platform of output macro
h
The relative displacement y of grand moving platform and micropositioner
rAbsolute displacement y by grand moving platform
hAbsolute displacement y with micropositioner
wSubtract each other acquisition;
Feedforward controller C
FFInput end connect micropositioner integral element
Output terminal;
Micropositioner counter electromotive force of motor coefficient E
1The voltage signal of unit output is by gathering the micropositioner P that obtains
wRate signal and grand moving platform P
hRate signal subtracts each other back and micropositioner counter electromotive force of motor coefficient E
1The micropositioner counter electromotive force of motor coefficient E of unit
1The acquisition of multiplying each other;
Grand moving platform counter electromotive force of motor coefficient E
2The voltage signal of unit output is by gathering the grand moving platform P that obtains
hRate signal and grand moving platform counter electromotive force of motor coefficient E
2The grand moving platform counter electromotive force of motor coefficient E of unit
2The acquisition of multiplying each other.
2. based on grand little two-shipper structure method of servo-controlling of the said grand little two-shipper structure servo-control system of claim 1, it is characterized in that:
First memory Mem1 preserves the reference instruction R in present instruction cycle and the absolute displacement y of micropositioner
wDifference; This difference and learning algorithm device L obtain the Learning Control amount in present instruction cycle through off-line learning; After the instruction correction addition of the adjacent last instruction cycle of storing among the Learning Control amount of this current instruction cycle and the second memory Mem2, handle, obtain the instruction correction in present instruction cycle through low-pass filter Q; Deposit among the second memory Mem2; The instruction correction of this current instruction cycle and reference instruction R addition affact in the closed-loop system of micropositioner sub-control system, and this closed-loop system is by micropositioner positioner C
1, micropositioner current controller C
2, the fine motion motor M
1With micropositioner P
wForm;
Relative displacement y with grand moving platform and micropositioner
rAs grand moving platform P
hFeedback, with zero input signal as grand moving platform P
hInstruction, carry out grand moving platform P
hFollow micropositioner P
wControl; Absolute displacement y with micropositioner
wAffact grand moving estrade control system as feed-forward signal;
With micropositioner P
wRate signal and grand moving platform P
hRate signal make difference after, the relative velocity v of acquisition
rAs the fine motion motor M
1Back electromotive force source; With the fine motion motor M
1The driving force of output is applied directly to grand moving platform P as micropositioner inertial force F
hOn.
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