CN102700017B - For the filter vat flusher of silicon wafer processing equipment - Google Patents

For the filter vat flusher of silicon wafer processing equipment Download PDF

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Publication number
CN102700017B
CN102700017B CN201210185874.XA CN201210185874A CN102700017B CN 102700017 B CN102700017 B CN 102700017B CN 201210185874 A CN201210185874 A CN 201210185874A CN 102700017 B CN102700017 B CN 102700017B
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China
Prior art keywords
filter vat
flusher
strutting arrangement
bracing
slurry
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CN201210185874.XA
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CN102700017A (en
Inventor
付海洋
王康
崔盛杰
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Tianjin Yingli New Energy Resource Co Ltd
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Tianjin Yingli New Energy Resource Co Ltd
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Abstract

The invention discloses a kind of filter vat flusher for silicon wafer processing equipment, comprise support, be arranged at the slurry recovery device of described frame bottom, be arranged at described support middle and upper part the transmission system be connected with described bracing or strutting arrangement for the bracing or strutting arrangement supporting filter vat to be rinsed, be arranged on the broken silicon wafers retracting device between described slurry recovery device and described bracing or strutting arrangement and the giant for rinsing described filter vat; Filter screen is provided with in described broken silicon wafers retracting device; Described transmission system is provided with the handle being positioned at described bracket outer, described handle can drive described bracing or strutting arrangement and described filter vat to rotate.Filter vat flusher provided by the present invention achieves the recycling of broken silicon wafers and slurry, contribute to reducing production cost, and flushing process is simple and convenient, operating personnel are not needed directly to contact with filter vat, only need the flushing that turning handle just can realize filter vat, significantly reduce the amount of labour of operating personnel.

Description

For the filter vat flusher of silicon wafer processing equipment
Technical field
The present invention relates to photovoltaic art, particularly a kind of filter vat flusher for silicon wafer processing equipment.
Background technology
In silicon chip working process, need to consume a large amount of slurry, utilize slurry to complete cutting action to silico briquette, slurry is generally mixed into by carborundum and suspension; In process, and slurry generally all recycles, slurry circulates in the slurry cylinder of storing slurry and the cutting chamber of processing silicon chip, in cutting silico briquette process, broken silicon wafers under silicon ingot cuts mixes in slurry, makes in slurry containing normal cutting operations of impurity effect such as more broken silicon wafers; Therefore, in slurry cylinder, be provided with filter vat to filter slurry, to ensure the purity of slurry, and the effect of the purity of slurry and filtration directly affects machining accuracy and the quality of silicon chip, therefore, need regularly to rinse to ensure its filter effect to filter vat.
At present, the normal filter vat backwashing manner adopted is generally artificial flushing, and operating personnel hold filter vat on the other hand, another hand-held giant, rotate through lauter tub, while utilize water under high pressure to rinse filter vat.
In flushing process, due to without any safeguard measure, the water electrode mixing the slurry that filter vat adheres to easily splashes with it operating personnel, and whole flushing process is consuming time longer, and water consumption is larger; In addition, the impurity such as the slurry be rinsed and broken silicon wafers are directly flushed in trench, cause larger waste and environmental pollution; Meanwhile, often need to add new slurry in process of production with the slurry of supplementary deficiency, add production cost.
Therefore, how more effective to rinse filter vat, realize the recovery to slurry, reduce the amount of labour of operating personnel, enhancing productivity is those skilled in the art's technical issues that need to address.
Summary of the invention
The object of this invention is to provide a kind of filter vat flusher for silicon wafer processing equipment, this filter vat flusher can realize the recycling of slurry, significantly reduces the amount of labour of operating personnel, enhances productivity.
For achieving the above object, the invention provides a kind of filter vat flusher for silicon chip production equipment, comprise support, be arranged at the slurry recovery device of described frame bottom, be arranged at the transmission system be connected with described bracing or strutting arrangement for the bracing or strutting arrangement supporting filter vat to be rinsed of described support middle and upper part and the broken silicon wafers retracting device be arranged between described slurry recovery device and described bracing or strutting arrangement; The filter screen for filtering slurry is connected with in the bottom of described broken silicon wafers retracting device; Described transmission system is provided with the handle being positioned at described bracket outer, to drive described bracing or strutting arrangement and described filter vat to rotate by rotating described handle; Described filter vat flusher comprises the giant for rinsing described filter vat further.
Preferably, described bracket outer is provided with baffle plate, spills to prevent water under high pressure.
Preferably, it is characterized in that, described baffle plate is transparent plastic baffle plate.
Preferably, it is characterized in that, described transmission system comprises drive pulley, driven pulley and belt, described drive pulley and described driven pulley are arranged in same level, described handle is connected on described drive pulley, described driven pulley is connected with the rotating shaft vertically arranged.
Preferably, described rotating shaft is provided with at least one bearing, and the both sides of bearing are provided with axle sleeve, so that the axial location of fixing described bearing; Described bearing has positioning sleeve in outer cover, and described positioning sleeve is fixedly connected with described support.
Preferably, the pivot center of described handle is vertical with the pivot center of described rotating shaft, between described handle and described drive pulley, be provided with transfer further.
Preferably, described bracing or strutting arrangement comprises the pallet that middle part has hole and the gantry be arranged on above described pallet, and described gantry is fixedly connected with described rotating shaft, and the rotary centerline of described gantry and described rotating shaft overlaps.
Preferably, described broken silicon wafers retracting device is drawer, is connected with the flat board with multiple hole in the below of described filter screen.
Preferably, described slurry recovery device is the box of opening upwards, and bottom is provided with wheel, to facilitate movement.
Preferably, described support is formed by multiple steel-pipe welding.
When utilizing filter vat flusher provided by the present invention to rinse filter vat, be first upside down on described gantry by filter vat to be rinsed, described filter vat is by described tray support; When carrying out flushing operation, first described handle is rotated, under the transmission of described transmission system, described gantry is driven to rotate, thus drive the described filter vat be placed on described gantry to rotate, under the flushing of described giant, be attached to slurry on described filter vat and broken silicon wafers is rinsed; The water mixing slurry and broken silicon wafers flows to the described broken silicon wafers retracting device be arranged in below described bracing or strutting arrangement, under the effect of described filter screen, broken silicon wafers is filtered and stays in described broken silicon wafers retracting device, and the mixture of impure relatively less slurry and water flows to the described slurry recovery device being arranged in described frame bottom after filtering; After described filter vat flushing terminates, described filter vat is taken off.
Filter vat flusher provided by the present invention is respectively arranged with described broken silicon wafers retracting device and described slurry recovery device, achieve the recycling of broken silicon wafers and slurry, contribute to reducing production cost, and whole flushing process is simple and convenient, operating personnel are not needed directly to contact with filter vat, only need the flushing that turning handle just can realize filter vat, significantly reduce the amount of labour of operating personnel.
In an advantageous embodiment, filter vat flusher provided by the present invention comprises the baffle plate being arranged on described bracket outer further, and in the described filter vat process of flushing, described baffle plate can effectively prevent spray from splashing on the body of operating personnel.
Accompanying drawing explanation
Fig. 1 is the structural representation in a kind of detailed description of the invention of filter vat flusher provided by the present invention;
Fig. 2 is the supporting structure schematic diagram of the flusher of filter vat shown in Fig. 1;
Fig. 3 is the structural representation of a kind of detailed description of the invention of slurry recovery device provided by the present invention;
Fig. 4 is the structural representation of a kind of detailed description of the invention of broken silicon wafers retracting device provided by the present invention;
Fig. 5 is the structural representation of the rotating shaft of the flusher of filter vat shown in Fig. 1;
Fig. 6 is the structural representation of the transfer of the flusher of filter vat shown in Fig. 1;
Fig. 7 is the structural representation of the bracing or strutting arrangement of the flusher of filter vat shown in Fig. 1.
Detailed description of the invention
Core of the present invention is to provide a kind of filter vat flusher for silicon wafer processing equipment, and this filter vat flusher achieves the recycling of slurry, significantly reduces the amount of labour of operating personnel, improves production efficiency.
In order to make those skilled in the art person understand the present invention program better, below in conjunction with the drawings and specific embodiments, the present invention is described in further detail.
Please refer to Fig. 1, Fig. 1 is the structural representation in a kind of detailed description of the invention of filter vat flusher provided by the present invention.
In a kind of detailed description of the invention, filter vat flusher provided by the present invention comprises support 1, this support 1 can be multiple steel-pipe welding, steel pipe can be square steel tube further, comprise the vertical rack, the horizontal support of horizontally set and the longitudinal carrier of longitudinally setting that vertically arrange, the monnolithic case of support 1 can be cuboid, as shown in Figure 2, substantially can be divided into three sheaf spaces by steel pipe therein.
The bottom of the bottom i.e. support 1 is provided with the slurry recovery device 14 for reclaiming slurry, and this slurry recovery device 14 opening upwards, has four sides and a bottom surface, as shown in Figure 3; Because support 1 is made up of multiple steel pipe, therefore, it is possible to slurry recovery device 14 is pulled out from any one side of support 1; Slurry recovery device 14 can adopt Plate Welding to form, and the concrete angle iron that can adopt welds to increase bonding strength, in order to prevent slurry to the corrosion of steel plate, can stainless-steel sheet be adopted further to be welded; Slurry recovery device 14 size in the horizontal direction can be unanimous on the whole with support 1 size in the horizontal direction; Conveniently move slurry recovery device 14, handle 142 can be provided with on the side of slurry recovery device 14, two groups, front and back wheel 141 can also be provided with bottom it, such as, adopt Universal wheel, conveniently turn in moving process.
The broken silicon wafers retracting device 13 for reclaiming broken silicon wafers is provided with in intermediate layer, broken silicon wafers retracting device 13 has four sides and a bottom surface, equally, broken silicon wafers retracting device 13 can pull out from any one side of support 1, for convenience of pull, the vertical side of broken silicon wafers retracting device 13 arranges handle 132; The bottom surface of broken silicon wafers retracting device 13 is filter screen, and because the size of broken silicon wafers is relatively little, it is also relatively close that the filter bores on filter screen is arranged, and also can adopt two-layer filter screen, to ensure that broken silicon wafers retracting device 13 has good filter effect; In order to strengthen the intensity of broken silicon wafers retracting device 13, its four sides can adopt Plate Welding to form, the flat board 131 with the relatively large hole of multiple size is welded further in the below of filter screen, as shown in Figure 4, like this, not only increase the intensity of broken silicon wafers retracting device 13, also the filter effect of filter screen can not be affected, broken silicon wafers retracting device 13 can adopt stainless steel to process, to reduce the degree of mixed liquor to the corrosion of broken silicon wafers retracting device 13, extend the service life of broken silicon wafers retracting device 13.
Above the superiors i.e. broken silicon wafers retracting device 13, being provided with the bracing or strutting arrangement for supporting filter vat to be rinsed and being connected with bracing or strutting arrangement and the transmission system that bracing or strutting arrangement can be driven to rotate.
For transmission system, the multiple kind of drive can be adopted, such as adopt belt transmission, specifically, transmission system comprises drive pulley 6, driven pulley 7 and is arranged between drive pulley 6 and driven pulley 7 for transmitting the belt 5 of rotation, drive pulley 6 and driven pulley 7 are all horizontally disposed with, and that is, the pivot center of two belt pulleys is all at vertical direction; Drive pulley 6 is provided with the handle 4 being positioned at support 1 outside, vertically in the cardinal principle centre position of driven pulley 7 is fixedly connected with rotating shaft 11, the pivot center of rotating shaft 11 overlaps with the pivot center of driven pulley 7; By turning handle 4, under the transmission of belt 5, the rotation of rotating shaft 11 can be driven.
In order to fixed conveyor system, in rotating shaft 11, bearing 8 can be installed, in the both sides of bearing 8, axle sleeve is installed, to carry out axial location to bearing 8, there is positioning sleeve 9 in the outer cover of bearing 8, as shown in Figure 5, this positioning sleeve 9 can adopt metal material to process, positioning sleeve 9 is fixedly connected with support 1 by fastening bolt, for increasing bonding strength, the positioning sleeve 9 that can arrange two bearings 8 and match with it in rotating shaft 11; And drive pulley 6 and driven pulley 7 can be supported by the horizontal support on support 1 or longitudinal carrier, if when the bonding strength of rotating shaft 11 is relatively large, can fix driven pulley 7 again, only need fix drive pulley 6; Also similar fixed form can be adopted to be fixed drive pulley 6, the positioning sleeve that namely can at least one group of bearing is set between driven pulley 7 and handle 4 and match with this bearing.
If the pivot center of handle 4 is parallel to horizontal plane, time vertical with the pivot center of rotating shaft 11, need to arrange transfer 3 between handle 4 and drive pulley 6, as shown in Figure 6, this transfer 3 is utilized the rotation on vertical direction to be converted to rotation in horizontal direction, the rotation of handle 4 is enable to drive the rotation of rotating shaft 11, this transfer 3 can be fixed on support 1 by fastening bolt, because transfer 3 is fixedly connected with driven pulley 7, when transfer 3 constant intensity is enough, secondary can be carried out to driven pulley 7 again and fix; The concrete form of transfer 3 is more, and wherein comparatively simple mode can adopt two bevel gears setting up and down to complete, and the angle between two bevel gears is 90 °.
What bracing or strutting arrangement was concrete can comprise the pallet 10 that middle part has hole and the gantry 12 be arranged on above this pallet 10, and gantry 12 is fixedly connected with pallet 10, can adopt the connected mode of welding, gantry 12 is by least one round steel ring 121, the vertical steel pipe 123 that at least two length is identical and horizontal steel pipe 122 are welded, as shown in Figure 7, specifically, vertical steel pipe 123 is welded on the edge of perforate on pallet 10 uniformly, the top being welded on vertical steel pipe 123 of round steel ring 121 level, round steel ring 121 inner horizontal be welded with horizontal steel pipe 122, this horizontal steel pipe 122 also welds with rotating shaft 11, specifically, the hole that this rotating shaft 11 can run through in the middle part of pallet 10 is welded with the horizontal steel pipe 122 be positioned at above pallet 10, and the length of rotating shaft 11 had better not exceed horizontal steel pipe 122, like this, gantry 12 and pallet 10 can with rotating shaft 11 synchronous axial system, two horizontal steel pipes 122 can be connected in round steel ring 121 inside, to increase and rotating shaft 11 bonding strength, the horizontal steel pipe 122 that can also weld two round steel rings 121 uniformly again in the centre of vertical steel pipe 123 and be connected with round steel ring 121, to increase the intensity of gantry 12, the diameter of round steel pipe 121 should be less than filter vat, and equally, the length of vertical steel pipe 123 also should be less than the height of filter vat, the diameter of pallet 10 than filter vat diameter more greatly, filter vat is placed on pallet 10 in an inverted manner, and gantry 12 is then positioned at filter vat inside, to prevent the phenomenon of filter vat run-off the straight in rotation process.
Filter vat flusher provided by the present invention also comprises the giant 2 for flushed lauter tub, giant 2 can be vertical be arranged near filter vat, giant 2 is provided with multiple delivery port distributed up and down, and the angle of each delivery port is different, to carry out omnibearing flushing to each position of filter vat, angular range is preferably disposed between 45 °-90 °; In addition, giant 2 can adopt steel wire rope to be fastened on support 1, rocks to prevent the giant 2 when rinsing; When rinsing, hydraulic pressure is arranged on about 0.4kpa.
When needing to rinse filter vat, first filter vat is placed in an inverted manner on pallet 10; Turning handle 4, the motion mode of rotation is delivered to rotating shaft 11 through transmission system, and the bracing or strutting arrangement be then connected in rotating shaft 11 rotates with its filter vat supported thereupon; Open giant 2, filter vat rotates under the support of bracing or strutting arrangement, while by the water slug in giant 2, makes to be attached to slurry on filter vat and broken silicon wafers is rinsed; The current direction mixing slurry and broken silicon wafers is arranged in the broken silicon wafers retracting device 13 below bracing or strutting arrangement, and under the filtration of filter screen, broken silicon wafers is filtered and stays in broken silicon wafers retracting device 13; The mixed liquor of impure relatively less slurry and water flows into the slurry recovery device 14 being arranged in support 1 bottom; After filter vat flushing terminates, close giant 2, it is taken off from bracing or strutting arrangement, utilizes pressure-air to dry up or dry, filter vat can be reused and carry out silicon processing operation.
Filter vat flusher provided by the present invention is respectively arranged with broken silicon wafers retracting device 13 and slurry recovery device 14, achieve the recycling of broken silicon wafers and slurry, contribute to reducing production cost, and whole flushing process is simple and convenient, the washing time water yield short, used also reduces relatively, do not need operating personnel directly to contact with filter vat in flushing process, only need the flushing that turning handle 4 just can realize filter vat, significantly reduce the amount of labour of operating personnel.
In order to prevent water under high pressure from splashing with it operating personnel, have baffle plate in the outer setting of support 1, except handle 4, whole filter vat flusher is all wrapped in baffle interior, the spray produced when effectively can intercept flushing like this; Can adopt transparent plastic baffle plate further, operating personnel can be made on the one hand to understand inner flushing situation, and its processing cost is lower on the other hand; Certainly, baffle plate also can adopt steel plate or iron plate.
Above the filter vat flusher for silicon chip production equipment provided by the present invention is described in detail.Apply specific case herein to set forth principle of the present invention and embodiment, the explanation of above embodiment just understands method of the present invention and core concept thereof for helping.It should be pointed out that for those skilled in the art, under the premise without departing from the principles of the invention, can also carry out some improvement and modification to the present invention, these improve and modify and also fall in the protection domain of the claims in the present invention.

Claims (9)

1. the filter vat flusher for silicon wafer processing equipment, is characterized in that, comprise support, be arranged at the slurry recovery device of described frame bottom, the transmission system be connected with described bracing or strutting arrangement for the bracing or strutting arrangement supporting filter vat to be rinsed being arranged at described support middle and upper part and the broken silicon wafers retracting device be arranged between described slurry recovery device and described bracing or strutting arrangement; The filter screen for filtering slurry is connected with in the bottom of described broken silicon wafers retracting device; Described transmission system is provided with the handle being positioned at described bracket outer, the belt that described transmission system comprises drive pulley, driven pulley and matches, described drive pulley and described driven pulley are arranged in same level, described handle is connected on described drive pulley, described driven pulley is connected with the rotating shaft vertically arranged, described bracing or strutting arrangement is sleeved on the outside of described rotating shaft, and coaxially arrange with described rotating shaft, to drive described bracing or strutting arrangement and described filter vat to rotate by rotating described handle; Described filter vat flusher comprises the giant for rinsing described filter vat further.
2. filter vat flusher according to claim 1, is characterized in that, described bracket outer is provided with the baffle plate that anti-sealing spills.
3. filter vat flusher according to claim 2, is characterized in that, described baffle plate is transparent plastic baffle plate.
4. filter vat flusher according to claim 1, it is characterized in that, described rotating shaft is provided with at least one bearing, and the both sides of bearing are provided with axle sleeve, so that the axial location of fixing described bearing, the outer cover of described bearing has positioning sleeve, and described positioning sleeve is fixedly connected with described support.
5. filter vat flusher according to claim 1, is characterized in that, the pivot center of described handle is vertical with the pivot center of described rotating shaft, between described handle and described drive pulley, be provided with transfer further.
6. filter vat flusher according to claim 1, is characterized in that, described bracing or strutting arrangement comprises the pallet that middle part has hole, and the top of described pallet is connected with gantry, and the perforate that described rotating shaft runs through described pallet is fixedly connected with described gantry.
7. filter vat flusher according to claim 1, is characterized in that, described broken silicon wafers retracting device is drawer, is connected with the flat board with multiple hole in the below of described filter screen.
8. filter vat flusher according to claim 1, is characterized in that, the opening upwards of described slurry recovery device is provided with wheel in the bottom of described slurry recovery device.
9. filter vat flusher according to claim 1, is characterized in that, described support is formed by multiple steel-pipe welding.
CN201210185874.XA 2012-06-07 2012-06-07 For the filter vat flusher of silicon wafer processing equipment Active CN102700017B (en)

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CN103657426B (en) * 2014-01-03 2016-04-20 成都大学 A kind of domestic sewage in rural areas ultrafiltration back purge system
CN105252663A (en) * 2015-10-30 2016-01-20 江苏美科硅能源有限公司 Pretreatment device for recycling sizing on surface of crystal bar
CN108554313A (en) * 2018-05-22 2018-09-21 金结娥 A kind of pharmaceutical purpose rotary granulator

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