CN102692829B - Aligning method based on double-light source multicycle marker and aligning system - Google Patents
Aligning method based on double-light source multicycle marker and aligning system Download PDFInfo
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Abstract
The invention discloses an aligning method based on a double-light source multicycle marker, which comprises the following steps: obtaining all order signals of the multicycle marker irradiated by different light sources, setting a crude capture range and a fine capture range, performing aligning order weight setting of the all order signals, and calculating the weight of orders that participate the aligning position calculating; calculating the aligning position according to the weight setting, order average screening setting, and the set crude capture and fine capture ranges.
Description
Technical field
The present invention relates to a kind of integrated circuit equipment manufacture field, relate in particular to a kind of alignment methods based on two light source multi-period marks and alignment system that is applicable to lithographic equipment.
Background technology
Lithographic equipment is the major equipment of manufacturing integration circuit, and its effect is to make different mask patterns be imaged onto successively the position of the accurate aligning in substrate (as semi-conductor silicon chip or LCD plate).Yet this aligned position but changes because of the physical and chemical changes that row graph experiences, therefore need an alignment system, to guarantee that the aligned position of the corresponding mask of silicon chip can both be aimed at accurately at every turn.Along with the growth of number of electronic components on substrate per unit surface area and the size of electronic component are synthesized more and more less, accuracy requirement to integrated circuit improves day by day, therefore mask is imaged on suprabasil position and must fixes more and more accurately successively, and during to photoetching, the requirement of alignment precision is also more and more higher.
United States Patent (USP) discloses a kind of alignment system No. 5243195 and has wherein mentioned alignment so on a kind of axle, the advantage of this alignment so is that mask and substrate can directly be aligned, but its shortcoming is to be difficult to be improved to higher preci-sion and accuracy, and various processing steps can cause that alignment mark changes, thereby introduce the variation of the groove significant depth of asymmetry and substrate grating marker.This phenomenon causes technique to can't detect grating marker, or only provides faint signal in other cases, and alignment system stability reduces.
In order to address this problem, Chinese patent application discloses a kind of dual wavelength alignment system No. 03164858, comprises the aligning radiation source with the first wavelength and second wave length; The detection system with first wave long-channel and second wave length passage, first wave long-channel receives the aligning radiation of alignment mark first wave strong point, and second wave length passage receives the aligning radiation of alignment mark Second Wave strong point; And a positioning unit, in order to determine the position of alignment mark with respect to the relative intensity of the aligning radiation detecting in Second Wave strong point according to the aligning radiation detecting in first wave strong point.From said system, can find out, this system be in fact used two independently wavelength irradiate and detect the position of suprabasil alignment mark, thereby can select dynamically to aim at laser, to obtain better alignment result.But, in existing dual-wavelength laser measuring system, after once Pointing strategy is set and is fixed, in strategy execution process, once there is the situation that certain one-level time does not meet the demands, cannot modify, thereby cause aiming at unsuccessfully, and then have influence on the whole efficiency of alignment system, cause the sheet rate of refusing of etching system to improve.
Summary of the invention
For overcoming the defect existing in prior art, the invention provides a kind of alignment methods and alignment system based on two light source multi-period marks, this alignment methods and alignment system can be used in various alignment mark.
For achieving the above object, the present invention discloses a kind of alignment methods based on two light source multi-period marks, comprise: obtain the whole level time signals of this multi-period mark under Different Light is irradiated, set slightly catch and smart capture range after to this all level time signals carry out the weight setting of alignment stage time, and calculate and participate in the level time weight that aligned position calculates; According to weight setting and level time, on average screen slightly catching and smart capture range of setting and set, calculate aligned position.
Further, this multi-period mark comprises binary cycle mark or three cycle marks.This light source comprises red laser light source and green laser light source.
Further, this thick capture range refers to that the aligned position in a big way need to be used the one-level light source information of two different cycles sizes of same mark to aim at.Essence capture range refers to use the arbitrary number of level secondary reflection light source information of the same period of same mark to aim in more among a small circle.
Further, this weight is set to changeable weight setting.This changeable weight is set and is comprised: these whole level time signal strength informations are sorted and set and need to, for calculating the level time number of aligned position, the signal intensity after sorting and the signal intensity of benchmark be compared.The level time weight that this calculating participation aligned position calculates further comprises: add up grade inferior number up to standard, if number up to standard is not less than the number of selecting setting, confirm to pass through, and calculate the inferior weight of light source level that participates in aligned position calculating; If number up to standard is less than the number of selecting setting, enter two kinds of mechanism of fault-tolerant and non-fault-tolerant.This enters after fault-tolerant mechanism and further comprises and judge whether to belong to thick capture range or smart capture range.Whether the level time number that this thick capture range judges by checking is zero, as be zero, stops fault-tolerant and processes; It is time only no available that the one-level of required different cycles is caught in inspection, as unavailable, stop fault-tolerant and process; Meet after above-mentioned condition, the calculating number that user is arranged is arranged to actual in the level time number of checking.
Whether the level time number that this essence capture range judges by checking is zero, as be zero, stops fault-tolerant and processes; It is time only no available that the one-level of required different cycles is caught in inspection, as unavailable, stop fault-tolerant and process; Meet after above-mentioned condition, the calculating number that user is arranged is arranged to actual in the level time number of checking.This enters after non-fault-tolerant mechanism, as a level time signal intensity for selected participation aligning all confirms the validity, does not stop this time aiming at, and declaration is aimed at unsuccessfully.
Further, time average screening of this level is set and is further comprised fault-tolerant and two kinds of mechanism of non-fault-tolerant.This non-fault-tolerant mechanism further comprises: calculate the inferior mean place of existing level; Obtain the difference of existing level time position and at different levels mean places; At different levels position differences that obtain are compared with the level time mean place screening scope setting; Inferior being discarded of level that exceeds average range do not used; If be zero by level time, finish this aligning; If last level time does not meet and slightly catches needs, finish this aligning.This fault-tolerant mechanism further comprises: calculate the inferior mean place of existing level; Obtain the difference of existing level time position and at different levels mean places; At different levels position differences that obtain are compared with the level time mean place screening scope setting; The level time that exceeds average range will be abandoned not using; Slightly/essence is caught in situation the inferior screening of level; By level time, be zero, finish this aligning.Enter after fault-tolerant mechanism and further comprise and judge whether to belong to thick capture range or smart capture range.Should comprise for the processing of slightly catching: when only having large period one-level light (L-1) and middle cycle one-level light (M-1) this function should regard as invalid; Judge that large period one-level light (L-1) and middle cycle one-level light (M-1) are whether in one-level light, if, continuation; If do not existed, large period one-level light (L-1) and middle cycle one-level light (M-1) are not disallowable.The processing that should catch for essence comprises: to exceeding the level minor sort of average range; When last level time is zero, continue to employ the minimum level time that goes beyond the scope, but go beyond the scope, be not more than two times of sensing range; When last level is time non-vanishing, abandon off-limits level time.
The present invention discloses a kind of alignment system simultaneously, comprises alignment light source, with reference to grating, alignment mark and optical element, adopts as above-mentioned disclosed alignment methods.
Compared with prior art, this alignment system and alignment methods thereof not only can provide multiple aligning Selective type, strengthen Technological adaptability, obtain more accurate aligned position, and in the situation that manufacturability is poor, by fault-tolerant, apply, improve the aligning percent of pass of mark, and then guarantee the aligning efficiency of alignment system.
Accompanying drawing explanation
Can be by following detailed Description Of The Invention and appended graphic being further understood about the advantages and spirit of the present invention.
Figure 1 shows that the schematic diagram of the dual light sources and multilevel alignment system of known technology;
Figure 2 shows that the structural representation of kind alignment mark involved in the present invention;
Figure 3 shows that the waveform schematic diagram that alignment mark involved in the present invention gathers;
Figure 4 shows that the process flow diagram of alignment methods involved in the present invention.
Embodiment
Below in conjunction with accompanying drawing, describe specific embodiments of the invention in detail.
Figure 1 shows that the schematic diagram of the dual light sources and multilevel alignment system of known technology.As shown in Figure 1, dual light sources and multilevel alignment system comprise light source module 11,12, with reference to grating 2, optical fiber 13,23, prism 14,24, polariscope 3, object lens 4, mark 5, level time wedge 15,25, catoptron 16,26, object lens 17,27, as plane 18,28 and detector 19,29.The specific works principle of dual light sources and multilevel alignment system is common practise for the person of ordinary skill of the art, does not repeat them here.
Figure 2 shows that the structural representation of kind alignment mark involved in the present invention.Wherein a figure is three cycle alignment marks, and the cycle of this alignment mark is L > M > S.B figure is binary cycle alignment mark, and the cycle of this alignment mark is L > M.The specific works principle of above-mentioned two kinds of alignment marks is common practise for the person of ordinary skill of the art, does not repeat them here.
Figure 3 shows that the waveform schematic diagram that alignment mark involved in the present invention gathers, wherein a figure is the waveform schematic diagram that three cycle alignment marks obtain after green wavelength is irradiated, and b figure is the waveform schematic diagram that binary cycle alignment mark obtains after green wavelength is irradiated.
Adopt in the present invention red and green double-wavelength light illumination to select mark pattern as shown in Figure 2, the alignment system detecting structure through Fig. 1, can obtain waveform P as shown in Figure 3
greenL-1, P
greenM-1, P
greenM-2, P
greenM-3, P
greenM-4, P
greenM-5, P
greenM-6, P
greenM-7, P
greenS-1; P
redL-1, P
redM-1, P
redM-2, P
redM-3, P
redM-4, P
redM-5, P
redM-6, P
redM-7, P
redS-1, wherein: P represents the aligned position of at different levels light signals; Green/red represents light source colour; The grating cycle of large-size in L expressive notation, middle-sized grating cycle in M expressive notation, the grating cycle of reduced size in S expressive notation; Arabic numeral represent that the corresponding cycle is by the inferior information of level of the obtainable light signal of alignment system institute.Owing to only showing the waveform schematic diagram obtaining in Fig. 3 after green wavelength is irradiated, so P
greenL-1corresponding to the P in Fig. 3
l-1, the like.
The corresponding signal intensity measuring at different levels times is S with it
survey greenL-1, S
survey greenM-1, S
survey greenM-2, S
survey greeM-3, S
survey greenM-4, S
survey greenM-5, S
survey greenM-6, S
survey greenM-7, S
survey greenS-1; S
survey redL-1, S
survey redM-1, S
survey redM-2, S
survey redM-3, S
survey redM-4, S
survey redM-5, S
survey redM-6, S
survey redM-7, S
survey redS-1, wherein: S
surveyrepresent waveform signal intensity at different levels times; Green/red represents light source colour; The grating cycle of large-size in L expressive notation, middle-sized grating cycle in M expressive notation, the grating cycle of reduced size in S expressive notation; Arabic numeral represent that the corresponding cycle is by the inferior information of level of the obtainable light signal of alignment system institute.
To the mode of combination, introduce the present invention with a plurality of embodiment below:
embodiment mono-
Alignment system selects the form of slightly catching to obtain aligned position (adopting the level time of two different cycles to aim at calculating) in aligned position computation process in Pointing strategy in the present embodiment, permission use to some extent level time not by the situation that use fault-tolerant treatment mechanism, in changeable weight setting up procedure, at different levels signal intensities sequences of different wave length are S
survey greenL-1, S
survey greenM-1, S
survey greenM-2, S
survey greenM-3, S
survey greenM-4, S
survey greenM-5, S
survey greenM-6, S
survey greenM-7, S
survey greenS-1; S
survey redL-1, S
survey redM-1, S
survey redM-2, S
survey redM-3, S
survey redM-4, S
survey redM-5, S
survey redM-6, S
survey redM-7, S
survey redS-1; Set to be 7 for calculating a level time number for aligned position; By the signal intensity after sequence and the signal intensity S of benchmark
markcompare, concrete outcome is as follows:
S
survey greenL-1> S
mark, S
survey greenM-1> S
mark, S
survey greenM-3> S
mark, S
survey greenM-5> S
mark, S
survey greenS-1> S
mark, S
survey greenM-7> S
mark, S
survey greenM-2< S
mark, S
survey greenM-4< S
mark, S
survey greenM-6< S
mark; S
survey redL-1> S
mark, S
survey redM-1> S
mark, S
survey redM-3> S
mark, S
survey redM-5> S
mark, S
survey redS-1> S
mark, S
survey redM-7> S
mark, S
survey redM-2< S
mark, S
survey redM-4< S
mark, S
survey redM-6< S
mark; Adding up number up to standard is 6, is less than the number 7 of original setting, does not meet original requirement of setting.
Set in the present embodiment and use fault-tolerant to process, because fault-tolerant treatment mechanism is to process respectively at different levels signals of the light source of different wave length, so sentence green glow, it is example, whether the number that first checks the level time light of the participation alignment applications that meets setting signal requirement of strength is zero, after testing, non-vanishing; Secondly owing to adopting, slightly catch form, need to have the one-level light signal in different size cycle to participate in aiming at, after testing, the signal intensity of the actual acquisition of L-1 and M-1 is greater than the signal strength range of standard, up to standard, meets the demands; Again, the COUNT number that user is arranged is arranged to actual in the level time number of checking, is exactly that use level number of times is set to 6 from 7.
Finally, finally recalculate weights W at different levels times
greenL-1, W
greenM-1, W
greenM-3, W
greenM-5, W
greenM-7, W
greenS-1recalculate weight at different levels times
W
greenL-1＝100％*W
greenL-1
/(W
greenL-1+W
greenM-1+W
greenM-3+W
greenM-5+W
greenM-7+W
greenS-1)；
W
greenM-1＝100％*W
greenM-1
/(W
greenL-1+W
greenM-1+W
greenM-3+W
greenM-5+W
greenM-7+W
greenS-1)；
W
greenM-3＝100％*W
greenM-3
/(W
greenL-1+W
greenM-1+W
greenM-3+W
greenM-5+W
greenM-7+W
greenS-1)；
W
greenM-5＝100％*W
greenM-5
/(W
greenL-1+W
greenM-1+W
greenM-3+W
greenM-5+W
greenM-7+W
greenS-1)；
W
greenM-7＝100％*W
greenM-7
/(W
greenL-1+W
greenM-1+W
greenM-3+W
greenM-5+W
greenM-7+W
greenS-1)；
W
greenS-1＝100％*W
greenS-1
/(W
greenL-1+W
greenM-1+W
greenM-3+W
greenM-5+W
greenM-7+W
greenS-1)；
In like manner, can calculate the inferior weight of at different levels alignment stage of ruddiness.
In level time average screening, set link, setting mean place screening scope is that Δ P is used fault-tolerant mechanism, and calculating and obtaining inferior average aligned positions at different levels is P
flat(alphabetical P represents position, and symbol " is put down " and represented mean place) (P
flat=(P
greenL-1+ P
greenM-1+ P
greenM-3+ P
greenM-5+ P
greenM-7+ P
greenS-1)/6)
Take green glow as example, the level of verifying by Dynamic Selection time for L-1, M-1, M-3, M-5, M-7, position corresponding to S-1 phase be P
greenL-1, P
greenM-1, P
greenM-3, P
greenM-5, P
greenM-7, P
greenS-1; At different levels times is Δ P with the absolute value of the difference of mean place
greenL-1=abs (P
greenL-1-P
flat), Δ P
greenM-1=abs (P
greenM-1-P
flat), Δ P
greenM-3=abs (P
greenM-3-P
flat), Δ P
greenM-5=abs (P
greenM-5-P
flat), Δ P
greenM-7=abs (P
greenM-7-P
flat), Δ P
greenS-1=abs (P
greenS-1-P
flat); By the absolute value of difference of at different levels time and mean place and the mean place of setting screen range delta P compare known,
ΔP
greenL-1＞ΔP，ΔP
greenM-1＜ΔP，ΔP
greenM-3＜ΔP，ΔP
greenM-5＜ΔP，
ΔP
greenM-7＞ΔP，ΔP
greenS-1＜ΔP；
This is slightly caught, and detects known aligning and has used the light source level time except large period one-level light (L-1) and middle cycle one-level light (M-1), therefore link is set in level time average screening, can use, and thinks effective;
More known with the absolute value of difference and the mean place of the setting screening scope of mean place by different levels times, L-1, the corresponding aligned position of M-7 level secondary light source has exceeded mean place screening scope, residue level time meets the requirements, but slightly catch because adopt, therefore the aligned position of L-1 level time is still available, only gives up the corresponding aligned position of M-7 level light, therefore P
greenL-1, P
greenM-1, P
greenM-3, P
greenM-5, P
greenS-1five inferior aligned positions of level participate in the calculating of final alignment position
Calculate final alignment position.
embodiment bis-
Alignment system selects the essence form of catching to obtain aligned position (adopting the level time of two different cycles to aim at calculating) in aligned position computation process in Pointing strategy in the present embodiment, permission use to some extent level time not by the situation that use fault-tolerant treatment mechanism, in changeable weight setting up procedure, at different levels signal intensities sequences of different wave length are S
survey greenL-1, S
survey greenM-1, S
survey greenM-2, S
survey greenM-3, S
survey greenM-4, S
survey greenM-5, S
survey greenM-6, S
survey greenM-7, S
survey greenS-1; S
survey redL-1, S
survey redM-1, S
survey redM-2, S
survey redM-3, S
survey redM-4, S
survey redM-5, S
survey redM-6, S
survey redM-7, S
survey redS-1; Set to be 7 for calculating a level time number for aligned position; By the signal intensity after sequence and the signal intensity S of benchmark
markcompare, concrete outcome is as follows:
S
survey greenL-1> S
mark, S
survey greenM-1> S
mark, S
survey greenM-3> S
mark, S
survey greenM-5> S
mark, S
survey greenS-1> S
mark, S
survey greenM-7> S
mark, S
survey greenM-2< S
mark, S
survey greenM-4< S
mark, S
survey greenM-6< S
mark; S
survey redL-1> S
mark, S
survey redM-1> S
mark, S
survey redM-3> S
mark, S
survey redM-5> S
mark, S
survey redS-1> S
mark, S
survey redM-7> S
mark, S
survey redM-2< S
mark, S
survey redM-4< S
mark, S
survey redM-6< S
mark; Adding up number up to standard is 6, is less than the number 7 of original setting, does not meet original requirement of setting.
Set in the present embodiment and use fault-tolerant to process, because fault-tolerant treatment mechanism is to process respectively at different levels signals of the light source of different wave length, so sentence green glow, it is example, whether the number that first checks the level time light of the participation alignment applications that meets setting signal requirement of strength is zero, after testing, non-vanishing; Secondly, the COUNT number that user is arranged is arranged to actual in the level time number of checking, is exactly that use level number of times is set to 6 from 7; Finally, finally recalculate weights W at different levels times
greenL-1, W
greenM-1, W
greenM-3, W
greenM-5, W
greenM-7, W
greenS-1recalculate weight at different levels times
W
greenL-1＝100％*W
greenL-1
/(W
greenL-1+W
greenM-1+W
greenM-3+W
greenM-5+W
greenM-7+W
greenS-1)；
W
greenM-1＝100％*W
greenM-1
/(W
greenL-1+W
greenM-1+W
greenM-3+W
greenM-5+W
greenM-7+W
greenS-1)；
W
greenM-3＝100％*W
greenM-3
/(W
greenL-1+W
greenM-1+W
greenM-3+W
greenM-5+W
greenM-7+W
greenS-1)；
W
greenM-5＝100％*W
greenM-5
/(W
greenL-1+W
greenM-1+W
greenM-3+W
greenM-5+W
greenM-7+W
greenS-1)；
W
greenM-7＝100％*W
greenM-7
/(W
greenL-1+W
greenM-1+W
greenM-3+W
greenM-5+W
greenM-7+W
greenS-1)；
W
greenS-1＝100％*W
greenS-1
/(W
greenL-1+W
greenM-1+W
greenM-3+W
greenM-5+W
greenM-7+W
greenS-1)；
In like manner, can calculate the inferior weight of at different levels alignment stage of ruddiness.
In level time average screening, set link, setting mean place screening scope is that Δ P is used fault-tolerant mechanism, and calculating and obtaining inferior average aligned positions at different levels is P
flat(alphabetical P represents position, and symbol " is put down " and represented mean place) (P
flat=(P
greenL-1+ P
greenM-1+ P
greenM-3+ P
greenM-5+ P
greenM-7+ P
greenS-1)/6)
Take green glow as example, the level of verifying by Dynamic Selection time for L-1, M-1, M-3, M-5, M-7, position corresponding to S-1 phase be P
greenL-1, P
greenM-1, P
greenM-3, P
greenM-5, P
greenM-7, P
greenS-1; At different levels times is Δ P with the absolute value of the difference of mean place
greenL-1=abs (P
greenL-1-P
flat), Δ P
greenM-1=abs (P
greenM-1-P
flat), Δ P
greenM-3=abs (P
greenM-3-P
flat), Δ P
greenM-5=abs (P
greenM-5-P
flat), Δ P
greenM-7=abs (P
greenM-7-P
flat), Δ P
greenS-1=abs (P
greenS-1-P
flat); By the absolute value of difference of at different levels time and mean place and the mean place of setting screen range delta P compare known,
ΔP
greenL-1＞ΔP，ΔP
greenM-1＞ΔP，ΔP
greenM-3＞ΔP，ΔP
greenM-5＞ΔP，
ΔP
greenM-7＞ΔP，ΔP
greenS-1＞ΔP；
To deviates at different levels time known P that sorts
greenL-1> Δ P
greenM-1> Δ P
greenM-3> Δ P
greenM-5> Δ P
greenM-7> Δ P
greenS-1;
This is aimed at and adopts essence to catch, and by different levels inferior more known with the absolute value of difference and the mean place of the setting screening scope of mean place, the position deviations of at different levels times all exceed mean place screening scope;
Further compare Δ P
greenS-1< 2 Δ P;
Therefore assert that S-1 level time corresponding aligned position is effective, so use Δ P
greenS-1participate in the calculating of final alignment position.
Calculate final alignment position.
embodiment tri-
Alignment system selects the form of slightly catching to obtain aligned position (adopting the level time of two different cycles to aim at calculating) in aligned position computation process in Pointing strategy in the present embodiment, permission use to some extent level time not by the situation that use fault-tolerant treatment mechanism, in changeable weight setting up procedure, at different levels signal intensities sequences of different wave length are:
S
survey greenL-1, S
survey greenM-1, S
survey greenM-2, S
survey greenM-3, S
survey greenM-4, S
survey greenM-5, S
survey greenM-6, S
survey greenM-7, S
survey greenS-1; S
survey redL-1, S
survey redM-1, S
survey redM-2, S
survey redM-3, S
survey redM-4, S
survey redM-5, S
survey redM-6, S
survey redM-7, S
survey redS-1.
Set to be 7 for calculating a level time number for aligned position; By the signal intensity after sequence and the signal intensity S of benchmark
markcompare, concrete outcome is as follows:
S
survey greenM-1> S
mark, S
survey greenM-3> S
mark, S
survey greenM-5> S
mark, S
survey greenS-1> S
mark, S
survey greenM-7> S
mark, S
survey greenL-1< S
mark,, S
survey greenM-2< S
mark, S
survey greenM-4< S
mark, S
survey greenM-6< S
mark; S
survey redL-1> S
mark, S
survey redM-1> S
mark, S
survey redM-3> S
mark, S
survey redM-5> S
mark, S
survey redS-1> S
mark, S
survey redM-7> S
mark, S
survey redM-2< S
mark, S
survey redM-4< S
mark, S
survey redM-6< S
mark.Adding up number up to standard is 6, is less than the number 7 of original setting, does not meet original requirement of setting.
Set in the present embodiment and use fault-tolerant to process, because fault-tolerant treatment mechanism is to process respectively at different levels signals of the light source of different wave length, so sentence green glow, it is example, whether the number that first checks the level time light of the participation alignment applications that meets setting signal requirement of strength is zero, after testing, non-vanishing; Secondly owing to adopting the form of slightly catching, need to there is the one-level light signal in different size cycle to participate in aiming at, after testing, the signal intensity of the actual acquisition of M-1 is greater than the signal strength range of standard, up to standard, the signal intensity of the actual acquisition of L-1 is not greater than the signal strength range of standard, and below standard meeting the demands, therefore finish this time to aim at.
embodiment tetra-
Alignment system selects the form of slightly catching to obtain aligned position (adopting the level time of two different cycles to aim at calculating) in aligned position computation process in Pointing strategy in the present embodiment, permission use to some extent level time not by the situation that use fault-tolerant treatment mechanism, in changeable weight setting up procedure, at different levels signal intensities sequences of different wave length are:
S
survey greenL-1, S
survey greenM-1, S
survey greenM-2, S
survey greenM-3, S
survey greenM-4, S
survey greenM-5, S
survey greenM-6, S
survey greenM-7, S
survey greenS-1; S
survey redL-1, S
survey redM-1, S
survey redM-2, S
survey redM-3, S
survey redM-4, S
survey redM-5, S
survey redM-6, S
survey redM-7, S
survey redS-1.
Set to be 7 for calculating a level time number for aligned position; By the signal intensity after sequence and the signal intensity S of benchmark
markcompare, concrete outcome is as follows:
S
survey greenM-1> S
mark, S
survey greenM-3> S
mark, S
survey greenM-5> S
mark, S
survey greenS-1> S
mark, S
survey greenM-7> S
mark, S
survey greenL-1< S
mark, S
survey greenM-2< S
mark, S
survey greenM-4< S
mark, S
survey greenM-6< S
mark; S
survey redL-1> S
mark, S
survey redM-1> S
mark, S
survey redM-3> S
mark, S
survey redM-5> S
mark, S
survey redS-1> S
mark, S
survey redM-7> S
mark, S
survey redM-2< S
mark, S
survey redM-4< S
mark, S
survey redM-6< S
mark.
Adding up number up to standard is 6, is less than the number 7 of original setting, does not meet original requirement of setting.Do not set and use fault-tolerant to process in the present embodiment, therefore stop this aligning.
Accompanying drawing 4 is process flow diagrams of alignment methods involved in the present invention.This alignment methods mainly comprises the following steps:
S101-arranges slightly-essence and catches.Aim at thick smart capture range setting, arranging in conjunction with aiming at of this scope needs in a big way and more among a small circle, to obtain aligned position.This thick capture range refers to obtain aligned position in a big way and need to use the one-level light source information of two different cycles sizes of same mark to aim at.Essence capture range refers to use the arbitrary number of level secondary reflection light source information of the same period of same mark to aim in more among a small circle.Select different cycles can in different range, obtain aligned position, when selecting L, M, in the time of two cycles, can obtain aligning scope according to the method for lowest common multiple, when only selecting one-period, within the scope of one-period, can obtain aligned position.
S201-changeable weight arranges.This strategy comprises the aligned position calculating weight setting mode to different cycles secondary light source signals at different levels, comprises static weight setting means and changeable weight setting means.In weight setting mode arbitrarily, comprise two kinds of situations of fault-tolerant pattern and non-fault-tolerant pattern.
Under this tactful changeable weight set-up mode, changeable weight is set and is comprised:
Alignment system arranges that at different levels signal strength informations are sorted and set need to be for calculating the level time number of aligned position, signal intensity after sequence and the signal intensity of benchmark are compared to (determining of secondary standard signals at different levels can be used different values at different levels times, also can use identical value, setting prerequisite is at different levels signals and is greater than signal noise, in subsequent embodiment, set secondary standard signal intensities at different levels consistent), add up number up to standard, if number up to standard is not less than the number of selecting setting, confirm to pass through, and calculating participates in the inferior weight of light source level that aligned position calculates.
Number the backlog demand of the level time signal intensity of aiming at as selected participation under this tactful changeable weight set-up mode, need minute fault-tolerant pattern and two kinds of situations of non-fault-tolerant pattern to be processed.
Number the backlog demand of the level time signal intensity of aiming at as selected participation under this tactful changeable weight set-up mode, and under fault-tolerant pattern, under thick capture range and smart capture range condition, processing links there are differences.
Number the backlog demand of the level time signal intensity of aiming at as selected participation under this tactful changeable weight set-up mode, and in fault-tolerant pattern, whether the level time number of looking under thick capture range condition by checking is zero (need possess), as is zero, stops fault-tolerant and processes; The one-level time only no available (needing available) of required different cycles is caught in inspection, as unavailable, stop fault-tolerant and processes; Meet after above-mentioned condition, the COUNT number that user is arranged is arranged to actual in the level time number of checking.According to sequence, recalculate weight, calculate aligned position, enter S301.
Number the backlog demand of the level time signal intensity of aiming at as selected participation under this tactful changeable weight set-up mode, and in fault-tolerant pattern, under essence capture range condition and in fault-tolerant pattern, whether the level time number of looking under thick capture range condition by checking is zero (need possess), as be zero, stop fault-tolerant and process; Check that different cycles has some levels time only no available (needing available) at least, as unavailable, stop fault-tolerant and processes; Meet after above-mentioned condition, the COUNT number that user is arranged is arranged to actual in the level time number of checking.According to sequence, recalculate weight, calculate aligned position, enter S301.
Under this tactful changeable weight set-up mode, a signal intensity as inferior in the level of selected participation aligning does not all confirm the validity, and under non-fault-tolerant pattern, stops this time aiming at, and declaration is aimed at unsuccessfully, enters S401.
Time average range screening of S301-level is set.This strategy, after arranging by weight, can be used level time average screening to set mechanism.The level that this Pointing strategy comprises time average screening setting mechanism comprises fault-tolerant and two kinds of patterns of non-fault-tolerant.Non-fault-tolerant pattern comprises: calculate the inferior mean place of existing level; Obtain the difference of existing level time position and at different levels mean places; At different levels position differences that obtain are compared with the level time mean place screening scope setting; Inferior being discarded of level that exceeds average range do not used; If be zero by level time, finish this and aim at, enter S401; If last level time does not meet and slightly catches needs, finish this aim at (and the position difference of large period one-level light or middle cycle one-level light simultaneously or any one not in average level time setting range).
The fault-tolerant pattern that this Pointing strategy on average screens in setting mechanism comprises: calculate the inferior mean place of existing level; Obtain the difference of existing level time position and at different levels mean places; At different levels position differences that obtain are compared with the level time mean place screening scope setting; Inferior being discarded of level that exceeds average range do not used; Slightly/essence is caught in situation the inferior screening of level; By level time, be zero, finish this and aim at, enter S401.
This Pointing strategy on average screens to be set in machine-processed fault-tolerant pattern, for the processing of slightly catching, comprises: when only having large period one-level light (L-1) and middle cycle one-level light (M-1) this function should regard as invalid; Judge that large period one-level light (L-1) and middle cycle one-level light (M-1) are whether in one-level light, if, continuation; If do not existed, large period one-level light (L-1) and middle cycle one-level light (M-1) are not disallowable.
This Pointing strategy on average screens to be set in machine-processed fault-tolerant pattern, and the processing of catching for essence comprises: to exceeding the level minor sort of average range; When last level time is zero, continue to employ the minimum level time that goes beyond the scope, but go beyond the scope, be not more than two times of sensing range; When last level is time non-vanishing, discard off-limits level time.
Complete S301 and do not enter in the situation of S401, calculating and obtain alignment mark position S402.
Described in this instructions is preferred embodiment of the present invention, and above embodiment is only in order to illustrate technical scheme of the present invention but not limitation of the present invention.All those skilled in the art, all should be within the scope of the present invention under this invention's idea by the available technical scheme of logical analysis, reasoning, or a limited experiment.
Claims (17)
1. the alignment methods based on two light source multi-period marks, obtain the whole level time signals of described multi-period mark under Different Light is irradiated, it is characterized in that: set slightly catch and smart capture range after described whole level time signals are carried out to the weight setting of alignment stage time, and calculate and participate in the level time weight that aligned position calculates; That according to weight setting, level time average screening, sets and set slightly catches and smart capture range, calculate aligned position, wherein, described thick capture range refers to that the aligned position in a big way need to be used the one-level light source information of two different cycles sizes of same mark to aim at, and described smart capture range refers to use the arbitrary number of level secondary reflection light source information of the same period of same mark to aim in more among a small circle.
2. the alignment methods based on two light source multi-period marks as claimed in claim 1, is characterized in that, described multi-period mark comprises binary cycle mark or three cycle marks.
3. the alignment methods based on two light source multi-period marks as claimed in claim 1, is characterized in that, described light source comprises red laser light source and green laser light source.
4. the alignment methods based on two light source multi-period marks as claimed in claim 1, is characterized in that, described weight is set to changeable weight setting.
5. the alignment methods based on two light source multi-period marks as claimed in claim 4, it is characterized in that, described changeable weight setting comprises: described whole level time signal strength informations are sorted and set and need to, for calculating the level time number of aligned position, the signal intensity after sequence and the signal intensity of benchmark be compared.
6. the alignment methods based on two light source multi-period marks as claimed in claim 1, it is characterized in that, the level time weight that described calculating participates in aligned position calculating further comprises: add up level time number up to standard, if number up to standard is not less than the number of selecting setting, confirm to pass through, and calculate the inferior weight of light source level that participates in aligned position calculating; If number up to standard is less than the number of selecting setting, enter two kinds of mechanism of fault-tolerant and non-fault-tolerant.
7. the alignment methods based on two light source multi-period marks as claimed in claim 6, is characterized in that, described in enter after fault-tolerant mechanism and further comprise and judge whether to belong to thick capture range or smart capture range.
8. the alignment methods based on two light source multi-period marks as claimed in claim 7, is characterized in that, whether the level time number that described thick capture range judges by checking is zero, as be zero, stops fault-tolerant and processes; It is time only no available that the one-level of required different cycles is caught in inspection, as unavailable, stop fault-tolerant and process; Meet after above-mentioned condition, the calculating number that user is arranged is arranged to actual in the level time number of checking.
9. the alignment methods based on two light source multi-period marks as claimed in claim 7, is characterized in that, whether the level time number that described smart capture range judges by checking is zero, as be zero, stops fault-tolerant and processes; It is time only no available that the one-level of required different cycles is caught in inspection, as unavailable, stop fault-tolerant and process; Meet after above-mentioned condition, the calculating number that user is arranged is arranged to actual in the level time number of checking.
10. the alignment methods based on two light source multi-period marks as claimed in claim 6, is characterized in that, described in enter after non-fault-tolerant mechanism, a level time signal intensity of aiming at as selected participation all confirms the validity and does not stop this time aiming at, and announces to aim at unsuccessfully.
11. 1 kinds of alignment methods based on two light source multi-period marks as claimed in claim 1, is characterized in that, time average screening of described level is set and further comprised fault-tolerant and two kinds of mechanism of non-fault-tolerant.
12. alignment methods based on two light source multi-period marks as claimed in claim 11, is characterized in that, described non-fault-tolerant mechanism further comprises: calculate the inferior mean place of existing level; Obtain the difference of existing level time position and at different levels mean places; At different levels position differences that obtain are compared with the level time mean place screening scope setting; Inferior being discarded of level that exceeds average range do not used; If be zero by level time, finish this aligning; If last level time does not meet and slightly catches needs, finish this aligning.
13. alignment methods based on two light source multi-period marks as claimed in claim 11, is characterized in that, described fault-tolerant mechanism further comprises: calculate the inferior mean place of existing level; Obtain the difference of existing level time position and at different levels mean places; At different levels position differences that obtain are compared with the level time mean place screening scope setting; Inferior being discarded of level that exceeds average range do not used; Slightly/essence is caught in situation the inferior screening of level; By level time, be zero, finish this aligning.
14. alignment methods based on two light source multi-period marks as claimed in claim 11, is characterized in that, described in enter after fault-tolerant mechanism and further comprise and judge whether to belong to thick capture range or smart capture range.
15. alignment methods based on two light source multi-period marks as claimed in claim 14, it is characterized in that, for described processing of slightly catching, comprise: when only having large period one-level light (L-1) and middle cycle one-level light (M-1) this function should regard as invalid; Judge that large period one-level light (L-1) and middle cycle one-level light (M-1) are whether in one-level light, if, continuation; If do not existed, large period one-level light (L-1) and middle cycle one-level light (M-1) are not disallowable.
16. alignment methods based on two light source multi-period marks as claimed in claim 14, is characterized in that, the processing of catching for described essence comprises: to exceeding the level minor sort of average range; When last level time is zero, continue to employ the minimum level time that goes beyond the scope, but go beyond the scope, be not more than two times of sensing range; When last level is time non-vanishing, abandon off-limits level time.
17. 1 kinds of alignment systems, comprise alignment light source, with reference to grating, alignment mark and optical element, it is characterized in that, adopt the alignment methods as described in claim 1 to 16 any one.
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| CN101587306A (en) * | 2009-04-09 | 2009-11-25 | 上海微电子装备有限公司 | Alignment signal processing method in photoetching technology |
| CN101634815A (en) * | 2009-08-31 | 2010-01-27 | 上海微电子装备有限公司 | Alignment method based on a plurality of different wavelengths |
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| CN101587306A (en) * | 2009-04-09 | 2009-11-25 | 上海微电子装备有限公司 | Alignment signal processing method in photoetching technology |
| CN101634815A (en) * | 2009-08-31 | 2010-01-27 | 上海微电子装备有限公司 | Alignment method based on a plurality of different wavelengths |
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