CN102692544A - Electrostatic voltage measurement device and method - Google Patents

Abstract

The invention provides an electrostatic voltage measurement device, which comprises an electrode, a vibrator, a voltage source, a current sampling device and a processor, wherein the voltage source outputs alternating current-direct current superposed voltage to a measured electrostatic body; the processor controls the vibrator to vibrate and drive the electrode to vibrate; the electrode is close to the measured electrostatic body; coupling capacitance between the electrode and the measured electrostatic body is alternated due to the vibration of the electrode; the current sampling device samples a current signal of the measured electrostatic body which is coupled by the electrode, and transmits the sampled current signal to the processor; and the processor extracts a current component from the sampled current signal, and acquires an electrostatic voltage parameter of the measured electrostatic body according to the extracted current component. According to the electrostatic voltage measurement device, the area of the electrode, area amplitude, a distance between the electrode and the measured electrostatic body and distance amplitude are not required to be corrected, comparison voltage with amplitude the same as that of measured electrostatic voltage is also not required to be generated, and the influence of the shape, mounting position and angle of the electrode on a measurement result is avoided.

Description

A kind of electrostatic potential measurement mechanism and method

Technical field

The present invention relates to electronic measuring technology field, relate in particular to a kind of electrostatic potential measurement mechanism and method.

Background technology

Electrostatic measurement is widely used in fields such as scientific research, petrochemical complex, national defense and military, Ferrous Metallurgy, environmental protection, semiconductor manufacturing.At present, common electrostatic measurement technology is the capacitance-type vibration non-contact measurement.The capacitance-type vibration non-contact measurement is to adopt an electrode near tested static body; Through distance periodicity alternation or the electrode induction area periodicity alternation that makes electrode and tested static body; Promptly change the coupling capacitance amount between electrode and tested static body; The alternating current of electrode is flow through in measurement, records the voltage of tested static body indirectly.The capacitance-type vibration non-contact measurement is divided into again: correction type capacitance-type vibration non-contact measurement and balanced type capacitance-type vibration non-contact measurement.

Correction type capacitance-type vibration non-contact measurement needs the mean distance and the Range Amplitude of correcting electrode area and electrode and tested static body; The distance that perhaps needs correcting electrode area amplitude and electrode and tested static body; Simultaneously, correction type capacitance-type vibration electrostatic measurement is had relatively high expectations to electrode installation site, setting angle.Balanced type capacitance-type vibration electrostatic measurement is with capacitance-type vibration, auxiliary program-controlled voltage source, tested static body equivalent series; Through polarity that changes auxiliary program-controlled voltage source and the voltage of regulating auxiliary program-controlled voltage source; Making the electric current that flows through capacitance-type vibration is zero, thereby records the voltage of tested static body.Balanced type capacitance-type vibration non-contact measurement need produce and the identical voltage of tested static bulk voltage amplitude, measures occasion for high-pressure electrostatic, realizes relatively difficulty.

Summary of the invention

In view of this; The invention provides a kind of electrostatic potential measurement mechanism and method; Need the distance and the Range Amplitude of correcting electrode area, area amplitude, electrode and tested static body in order to solve existing capacitance-type vibration non-contact measurement; The comparative voltage that needs generation and the equal amplitude of tested static bulk voltage, shape, installation site and the setting angle of electrode influence the problem of measurement result simultaneously, and its technical scheme is following:

A kind of electrostatic potential measurement mechanism comprises: electrode, Vib., voltage source, current sampling device and processor;

Voltage to the tested static body of said voltage source output AC/DC stack;

Said processor is controlled said Vib. vibration to drive the said electrode vibration that is connected with said Vib.; Wherein, Said electrode is provided with near said tested static body, and the coupling capacitance between said electrode and the said tested static body is because of the vibration alternation of said electrode;

Said voltage source, said tested static body, said electrode, said current sampling device form series loop; Said current sampling device is taken a sample through the electric current of said electrode coupling to tested static body; Obtain sampling current, and the sampling current signal that will include said sampling current is sent to said processor;

Said processor extracts current component and obtains the electrostatic potential parameter of said tested static body according to the current component that extracts from said sampling current signal.

Said sampling current is specially: the electric current of said voltage source, said tested static body, said electrode and the formed series loop of said current sampling device.

Said processor obtains the electrostatic potential parameter of said tested static body from said sampling current signal extraction current component and according to the current component that extracts, and is specially:

Said processor extracts j primary current component amplitude from said sampling current signal; And extraction j+i, j-i or i-j primary current component amplitude; And obtain the electrostatic potential amplitude and the electrostatic potential polarity of said tested static body according to the current component amplitude of extracting, wherein, j is the positive integer more than or equal to 1; I is the positive integer more than or equal to 1, and j is not equal to i.

The electric current of said voltage source, said tested static body, said electrode and the formed series loop of said current sampling device is:

$i_c=C_c\frac{{\mathrm{dU}}_c}{\mathrm{dt}}+U_c\frac{{\mathrm{dC}}_c}{\mathrm{dt}}$

Wherein, C _cBe the coupling capacitance between said electrode and the said tested static body, U _cBe the total voltage between said electrode and the said tested static body, t is the time.

Coupling capacitance between said electrode and the said tested static body is:

$C_c=C_0+\underset{j=1}{\overset{N}{\mathrm{\Σ}}}{C}_j\sin ({\mathrm{\ω}}_{j}t+{\mathrm{\α}}_j),$

Wherein, C ₀Be the mean value of coupling capacitance between said electrode and the said tested static body, N is the positive integer more than or equal to 1, and j is more than or equal to 1 positive integer smaller or equal to N, C _jBe the capacitance variations amplitude of j order harmonic components, ω _jBe the capacitance variations angular frequency of j order harmonic components, α _jBe the phase place of the capacitance change of j order harmonic components, t is the time.

The voltage of said voltage source output is:

$U_r=U_{\mathrm{dc}}+\underset{i=1}{\overset{M}{\mathrm{\Σ}}}{U}_i\sin ({\mathrm{\ω}}_{i}t+{\mathrm{\β}}_i),$

Total voltage U between said electrode and the said tested static body _cFor said tested static body with electrostatic potential U _sVoltage U with said voltage source output _rSum;

Wherein, U _DcDC voltage, M are the positive integer more than or equal to 1, and i is more than or equal to 1, smaller or equal to the positive integer of M, U _iBe the change in voltage amplitude of i order harmonic components, ω _iBe the change in voltage angular frequency of i order harmonic components, β _iBe the voltage-phase of i order harmonic components, t is the time.

Said j primary current component amplitude is that angular frequency is ω _jThe current component amplitude, j+i primary current component amplitude is that angular frequency is ω _j+ ω _iThe current component amplitude, j-i primary current component amplitude is that angular frequency is ω _j-ω _iThe current component amplitude, i-j primary current component amplitude is ω _i-ω _jThe current component amplitude.

Said j primary current component amplitude is:

I ₀=C _jω _j(U _s+U _dc)；

Said j+i primary current component amplitude is:

$I_1=\frac{1}{2}{C}_j{U}_i({\mathrm{\ω}}_j+{\mathrm{\ω}}_i);$

Said j-i or i-j primary current component amplitude are:

$I_2=\frac{1}{2}{C}_j{U}_i|{\mathrm{\ω}}_j-{\mathrm{\ω}}_i|.$

Said amplitude according to the current component that extracts is obtained the electrostatic potential amplitude and the electrostatic potential polarity of said tested static body, is specially:

Work as U _DcMore than or equal to 0 o'clock, if j primary current component amplitude I ₀With U _DcIncrease and increase, then said tested static body institute static electrification voltage is for just, said electrostatic potential amplitude is:

$U_{\mathrm{sam}}=\frac{({\mathrm{\ω}}_j+{\mathrm{\ω}}_i)I_0}{2{\mathrm{\ω}}_j{I}_1}{U}_i-U_{\mathrm{dc}},$

Perhaps,

$U_{\mathrm{sam}}=\frac{|{\mathrm{\ω}}_j-{\mathrm{\ω}}_i|I_0}{2{\mathrm{\ω}}_j{I}_2}{U}_i-U_{\mathrm{dc}};$

Work as U _DcMore than or equal to 0 o'clock, if j primary current component amplitude I ₀With U _DcIncrease and reduce, then said tested static body institute static electrification voltage is for negative, said electrostatic potential amplitude is:

$U_{\mathrm{sam}}=\frac{({\mathrm{\ω}}_j+{\mathrm{\ω}}_i)I_0}{2{\mathrm{\ω}}_j{I}_1}{U}_i+U_{\mathrm{dc}},$

Perhaps,

$U_{\mathrm{sam}}=\frac{|{\mathrm{\ω}}_j-{\mathrm{\ω}}_i|I_0}{2{\mathrm{\ω}}_j{I}_2}{U}_i+U_{\mathrm{dc}};$

Work as U _DcLess than 0 o'clock, if j primary current component amplitude I ₀With U _DcReduce and increase, then said tested static body institute static electrification voltage is for negative, said electrostatic potential amplitude is:

$U_{\mathrm{sam}}=\frac{({\mathrm{\ω}}_j+{\mathrm{\ω}}_i)I_0}{2{\mathrm{\ω}}_j{I}_1}{U}_i-\left|U_{\mathrm{dc}}\right|,$

Perhaps,

$U_{\mathrm{sam}}=\frac{|{\mathrm{\ω}}_j-{\mathrm{\ω}}_i|I_0}{2{\mathrm{\ω}}_j{I}_2}{U}_i-\left|U_{\mathrm{dc}}\right|;$

Work as U _DcLess than 0 o'clock, if j primary current component amplitude I ₀With U _DcReduce and reduce, then said tested static body institute static electrification voltage is for just, said electrostatic potential amplitude is:

$U_{\mathrm{sam}}=\frac{({\mathrm{\ω}}_j+{\mathrm{\ω}}_i)I_0}{2{\mathrm{\ω}}_j{I}_1}{U}_i+\left|U_{\mathrm{dc}}\right|,$

Perhaps,

$U_{\mathrm{sam}}=\frac{|{\mathrm{\ω}}_j-{\mathrm{\ω}}_i|I_0}{2{\mathrm{\ω}}_j{I}_2}{U}_i+\left|U_{\mathrm{dc}}\right|.$

A kind of electrostatic potential measuring method is applied to comprise comprise the electrostatic potential measurement mechanism of electrode, Vib., voltage source, current sampling device and processor:

Voltage to the tested static body of said voltage source output AC/DC stack;

Said processor is controlled said Vib. vibration to drive said electrode vibration, and wherein, said electrode is provided with near said tested static body, and the coupling capacitance between said electrode and the said tested static body is because of the vibration alternation of said electrode;

Said current sampling device is taken a sample through the electric current of said electrode coupling to tested static body, obtains sampling current, and the sampling current signal that will include said sampling current is sent to said processor;

Said processor extracts current component and obtains the electrostatic potential parameter of said tested static body according to the current component that extracts from said sampling current signal.

In the electrostatic potential measurement mechanism provided by the invention; Voltage to the tested static body of voltage source output AC/DC stack; The vibration of processor control Vib. is to drive electrode vibration; Electrode is provided with near tested static body, and the coupling capacitance between electrode and the tested static body is because of the vibration alternation of electrode, and voltage source, tested static body, electrode and current sampling device form series loop; Current sampling device is taken a sample through the current signal of electrode coupling to tested static body, and processor extracts current component and obtains the electrostatic potential parameter of tested static body according to the current component of extraction from the current signal of said sampling.Compare with measurement mechanism of the prior art; Electrostatic potential measurement mechanism provided by the invention and method; The distance and the Range Amplitude that do not need correcting electrode area, area amplitude and electrode and tested static body; Also need not produce the comparative voltage with the equal amplitude of tested electrostatic potential, the shape of electrode, installation site, angle are to not influence of measurement result, as long as electrode is near tested static body simultaneously.

Description of drawings

In order to be illustrated more clearly in the embodiment of the invention or technical scheme of the prior art; To do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art below; Obviously, the accompanying drawing in describing below only is embodiments of the invention, for those of ordinary skills; Under the prerequisite of not paying creative work, can also obtain other accompanying drawing according to the accompanying drawing that provides.

The structural representation of a kind of electrostatic potential measurement mechanism that Fig. 1 provides for the embodiment of the invention.

Embodiment

To combine the accompanying drawing in the embodiment of the invention below, the technical scheme in the embodiment of the invention is carried out clear, intactly description, obviously, described embodiment only is the present invention's part embodiment, rather than whole embodiment.Based on the embodiment among the present invention, those of ordinary skills are not making the every other embodiment that is obtained under the creative work prerequisite, all belong to the scope of the present invention's protection.

The embodiment of the invention provides a kind of electrostatic potential measurement mechanism, and Fig. 1 is the structural representation of this device, and this device comprises: processor 101, Vib. 102, electrode 103, voltage source 104 and current sampling device 105.

Voltage to the tested static body 100 of voltage source 104 output AC/DCs stack; 102 vibrations of processor 101 control Vib.s are to drive electrode 103 vibrations that are connected with Vib. 102; Wherein, Electrode 103 is provided with near tested static body 100, and the coupling capacitance between electrode 103 and the tested static body 100 is because of the vibration alternation of electrode 103, and voltage source 104, tested static body 100, electrode 103 and current sampling device 105 form series loop; Current sampling device 105 voltages reduce to zero or the voltage of 103 at tested static body 100 and electrode ignore; 105 pairs of tested static bodies 100 of current sampling device are taken a sample through the electric current of electrode 103 coupling, obtain sampling current, and the sampling current signal that will include sampling current is sent to processor 101; Processor 101 extracts current component and obtains the electrostatic potential parameter of tested static body 100 according to the current component that extracts from the sampling current signal.

Voltage to the tested static body 100 of the output AC/DC stack under processor 101 controls of the voltage source 104 in the present embodiment; Certainly; Present embodiment not stop voltage source 104 receives processor 101 controls, as long as voltage to the tested static body that the required alternating current-direct current of the voltage source 104 output embodiment of the invention superposes all is the scope that the present invention protects.

In the present embodiment, current sampling device 105 can be resistance, also can be current sensor, also can be trsanscondutance amplifier, and wherein, current sensor can be AC current transformer, also can be Hall current sensor.105 pairs of tested static bodies 100 of current sampling device are taken a sample through the current signal of electrode 103 couplings, and the sampling current that obtains is the electric current that voltage source 104, tested static body 100, electrode 103 and current sampling device 105 form series loop.

If 100 static electrification voltages of tested static body are U _s, the coupling capacitance that electrode 103 and tested static body are 100 is C _c, and the voltage drop of establishing current sampling device 105 is ignored.

In the present embodiment, the vibration of Vib. 102 makes the coupling capacitance between electrode 103 and the tested static body 100 be:

$C_c=C_0+\underset{j=1}{\overset{N}{\mathrm{\Σ}}}{C}_j\sin ({\mathrm{\ω}}_{j}t+{\mathrm{\α}}_j)---\left(1\right)$

Wherein, C ₀Be the mean value of coupling capacitance between electrode 103 and the tested static body 100, N is the positive integer more than or equal to 1, and j is more than or equal to 1 positive integer smaller or equal to N, C _jBe the capacitance variations amplitude of j order harmonic components, ω _jBe the capacitance variations angular frequency of j order harmonic components, α _jBe the phase place of the capacitance change of j order harmonic components, t is the time.

The voltage of the alternating current-direct current stack of setting voltage source 104 outputs is:

$U_r=U_{\mathrm{dc}}+\underset{i=1}{\overset{M}{\mathrm{\Σ}}}{U}_i\sin ({\mathrm{\ω}}_{i}t+{\mathrm{\β}}_i)---\left(2\right)$

Wherein, U _DcDC voltage, M are the positive integer more than or equal to 1, and i is more than or equal to 1, smaller or equal to the positive integer of M, U _iBe the change in voltage amplitude of i order harmonic components, ω _iBe the change in voltage angular frequency of i order harmonic components, β _iBe the voltage-phase of i order harmonic components, t is the time.

Total voltage between tested static body 100 and the electrode 103 is:

$U_c=U_s+U_r=U_s+U_{\mathrm{dc}}+\underset{i=1}{\overset{M}{\mathrm{\Σ}}}{U}_i\sin ({\mathrm{\ω}}_{i}t+{\mathrm{\β}}_i).---\left(3\right)$

The electric current of voltage source 104, tested static body 100, electrode 103 and current sampling device 105 formed series loops, promptly sampling current is:

$i_c=C_c\frac{{\mathrm{dU}}_c}{\mathrm{dt}}+U_c\frac{{\mathrm{dC}}_c}{\mathrm{dt}}---\left(4\right)$

$=[C_0+\underset{j=1}{\overset{N}{\mathrm{\Σ}}}{C}_j\sin ({\mathrm{\ω}}_{j}t+{\mathrm{\α}}_j)]\×\underset{i=1}{\overset{M}{\mathrm{\Σ}}}{U}_i{\mathrm{\ω}}_i\cos ({\mathrm{\ω}}_{i}t+{\mathrm{\β}}_i)$

$+\underset{j=1}{\overset{N}{\mathrm{\Σ}}}{C}_j{\mathrm{\ω}}_j\cos ({\mathrm{\ω}}_{j}t+{\mathrm{\α}}_j)\×[U_s+U_{\mathrm{dc}}+\underset{i=1}{\overset{M}{\mathrm{\Σ}}}{U}_i\sin ({\mathrm{\ω}}_{i}t+{\mathrm{\β}}_i)]$

$=C_0\underset{i=1}{\overset{M}{\mathrm{\Σ}}}{U}_i{\mathrm{\ω}}_i\mathrm{cis}({\mathrm{\ω}}_{i}t+{\mathrm{\β}}_i)+\frac{1}{2}\underset{j=1}{\overset{N}{\mathrm{\Σ}}}\underset{i=1}{\overset{M}{\mathrm{\Σ}}}{C}_j{U}_i{\mathrm{\ω}}_i\left\{\sin \right[({\mathrm{\ω}}_j+{\mathrm{\ω}}_i)t+{\mathrm{\α}}_j+{\mathrm{\β}}_i]$

$+\sin [({\mathrm{\ω}}_j-{\mathrm{\ω}}_i)t+{\mathrm{\α}}_j-{\mathrm{\β}}_i]\}+(U_s+U_{\mathrm{dc}})\underset{j=1}{\overset{N}{\mathrm{\Σ}}}{C}_j{\mathrm{\ω}}_j\cos ({\mathrm{\ω}}_{j}t+{\mathrm{\α}}_j)+$

$\frac{1}{2}\underset{j=1}{\overset{N}{\mathrm{\Σ}}}\underset{i=1}{\overset{M}{\mathrm{\Σ}}}{C}_j{U}_i{\mathrm{\ω}}_j\left\{\sin \right[({\mathrm{\ω}}_j+{\mathrm{\ω}}_i)t+{\mathrm{\α}}_j+{\mathrm{\β}}_i]-\sin [({\mathrm{\ω}}_j-{\mathrm{\ω}}_i)t+{\mathrm{\α}}_j-{\mathrm{\β}}_i\left]\right\}$

In this example, processor 101 obtains the electrostatic potential parameter of tested static body 100 from sampling current signal extraction current component and according to the current component that extracts, and be specially: processor 101 obtains sampling current i from the sampling current signal _c, then from sampling current i _cMiddle extraction j primary current component amplitude, and extract j+i, j-i or i-j primary current component amplitude, obtain the electrostatic potential parameter of tested static body 100 then according to the current component amplitude of extracting; Wherein, J is the positive integer more than or equal to 1, and i is the positive integer more than or equal to 1, and j is not equal to i.The electrostatic potential parameter of tested static body 100 comprises: electrostatic potential amplitude and electrostatic potential polarity.

Processor 101 is from sampling current i _cThe middle j primary current component amplitude that extracts is promptly from sampling current i _cMiddle extraction angular frequency is ω _jThe current component amplitude, can learn that according to formula (4) angular frequency is ω _jThe current component amplitude be:

I ₀=C _jω _j(U _s+U _dc) (5)

Processor 101 is from sampling current i _cThe middle j+i primary current component amplitude that extracts is promptly from sampling current i _cMiddle extraction angular frequency is ω _j+ ω _iThe current component amplitude, can learn that according to formula (4) angular frequency is ω _j+ ω _iThe current component amplitude be:

$I_1=\frac{1}{2}{C}_j{U}_i({\mathrm{\ω}}_j+{\mathrm{\ω}}_i)---\left(6\right)$

Processor 101 is from sampling current i _cMiddle j-i or the i-j primary current component amplitude of extracting is promptly from sampling current i _cMiddle extraction angular frequency is ω _j-ω _iOr ω _i-ω _jThe current component amplitude, can learn that according to formula (4) angular frequency is ω _j-ω _iOr ω _i-ω _jThe current component amplitude be:

$I_2=\frac{1}{2}{C}_j{U}_i|{\mathrm{\ω}}_j-{\mathrm{\ω}}_i|---\left(7\right)$

In the present embodiment, the processor 101 electrostatic potential parameter of obtaining tested static body 100 according to the current component amplitude of extracting is specially:

Work as U _DcMore than or equal to 0 o'clock, if sampling current i _cJ primary current component amplitude I ₀With U _DcIncrease and increase 100 static electrification voltage U of then tested static body _sFor just, can get the electrostatic potential amplitude according to formula (5) and (6) and be:

$U_{\mathrm{sam}}=\frac{({\mathrm{\ω}}_j+{\mathrm{\ω}}_i)I_0}{2{\mathrm{\ω}}_j{I}_1}{U}_i-U_{\mathrm{dc}}---\left(8\right)$

Perhaps, can get the electrostatic potential amplitude according to formula (5) and (7) is:

$U_{\mathrm{sam}}=\frac{|{\mathrm{\ω}}_j-{\mathrm{\ω}}_i|I_0}{2{\mathrm{\ω}}_j{I}_2}{U}_i-U_{\mathrm{dc}}---\left(9\right)$

Work as U _DcMore than or equal to 0 o'clock, if sampling current i _cJ primary current component amplitude I ₀With U _DcIncrease and reduce 100 static electrification voltage U of then tested static body _sFor negative, can get the electrostatic potential amplitude according to formula (5) and (6) and be:

$U_{\mathrm{sam}}=\frac{({\mathrm{\ω}}_j+{\mathrm{\ω}}_i)I_0}{2{\mathrm{\ω}}_j{I}_1}{U}_i+U_{\mathrm{dc}}---\left(10\right)$

Perhaps, can get the electrostatic potential amplitude according to formula (5) and (7) is:

$U_{\mathrm{sam}}=\frac{|{\mathrm{\ω}}_j-{\mathrm{\ω}}_i|I_0}{2{\mathrm{\ω}}_j{I}_2}{U}_i+U_{\mathrm{dc}}---\left(11\right)$

Work as U _DcLess than 0 o'clock, if sampling current i _cJ primary current component amplitude I ₀With U _DcReduce and increase 100 static electrification voltage U of then tested static body _sFor negative, can get the electrostatic potential amplitude according to formula (5) and (6) and be:

$U_{\mathrm{sam}}=\frac{({\mathrm{\ω}}_j+{\mathrm{\ω}}_i)I_0}{2{\mathrm{\ω}}_j{I}_1}{U}_i-\left|U_{\mathrm{dc}}\right|---\left(12\right)$

Perhaps, can get the electrostatic potential amplitude according to formula (5) and (7) is:

$U_{\mathrm{sam}}=\frac{|{\mathrm{\ω}}_j-{\mathrm{\ω}}_i|I_0}{2{\mathrm{\ω}}_j{I}_2}{U}_i-\left|U_{\mathrm{dc}}\right|---\left(13\right)$

Work as U _DcLess than 0 o'clock, if sampling current i _cJ primary current component amplitude I ₀With U _DcReduce and reduce 100 static electrification voltage U of then tested static body _sFor just, can get the electrostatic potential amplitude according to formula (5) and (6) and be:

$U_{\mathrm{sam}}=\frac{({\mathrm{\ω}}_j+{\mathrm{\ω}}_i)I_0}{2{\mathrm{\ω}}_j{I}_1}{U}_i+\left|U_{\mathrm{dc}}\right|---\left(14\right)$

Perhaps, can get the electrostatic potential amplitude according to formula (5) and (7) is:

$U_{\mathrm{sam}}=\frac{|{\mathrm{\ω}}_j-{\mathrm{\ω}}_i|I_0}{2{\mathrm{\ω}}_j{I}_2}{U}_i+\left|U_{\mathrm{dc}}\right|---\left(15\right)$

The embodiment of the invention also provides a kind of electrostatic potential measuring method, is applied to comprise the electrostatic potential measurement mechanism of electrode, Vib., voltage source, current sampling device and processor, and this method comprises:

S11: voltage to the tested static body of voltage source output AC/DC stack.

S12: the vibration of processor control Vib. is to drive said electrode vibration, and wherein, electrode is provided with near tested static body, and the coupling capacitance between electrode and the tested static body is because of the vibration alternation of electrode.

S13: current sampling device is taken a sample through the current signal of electrode coupling to tested static body, obtains sampling current, and the sampling current signal that will include sampling current is sent to processor.

S14: processor extracts current component and obtains the electrostatic potential parameter of tested static body according to the current component that extracts from the sampling current signal.

In the present embodiment; Processor extracts current component and obtains the electrostatic potential parameter of tested static body according to the current component that extracts from the sampling current signal, be specially: processor obtains sampling current from the sampling current signal, from sampling current, extracts j primary current component amplitude then; And extraction j+i, j-i or i-j primary current component amplitude; Obtain the electrostatic potential parameter of tested static body then according to the current component amplitude of extracting, wherein, j is the positive integer more than or equal to 1; I is the positive integer more than or equal to 1, and j is not equal to i.The electrostatic potential parameter of tested static body 100 comprises: electrostatic potential amplitude and electrostatic potential polarity.

In the electrostatic potential measurement mechanism provided by the invention; Voltage to the tested static body of voltage source output AC/DC stack; The vibration of processor control Vib. is to drive electrode vibration; Electrode is provided with near tested static body; Coupling capacitance between electrode and the tested static body is because of the vibration alternation of electrode, and voltage source, tested static body, electrode, current sampling device form series loop, and current sampling device voltage is reduced to zero or the interelectrode voltage of tested static body is ignored; Current sampling device is taken a sample through the current signal of electrode coupling to tested static body, and processor extracts current component and obtains the electrostatic potential parameter of tested static body according to the current component of extraction from the current signal of said sampling.Compare with measurement mechanism of the prior art; Electrostatic potential measurement mechanism provided by the invention and method; The distance and the Range Amplitude that do not need correcting electrode area, area amplitude and electrode and tested static body need not produce the comparative voltage with the equal amplitude of tested electrostatic potential yet, and shape, installation site and the angle of electrode are to not influence of measurement result simultaneously; As long as electrode near tested static body, has guaranteed the consistance of electrostatic potential measurement products.

To the above-mentioned explanation of the disclosed embodiments, make this area professional and technical personnel can realize or use the present invention.Multiple modification to these embodiment will be conspicuous concerning those skilled in the art, and defined General Principle can realize under the situation that does not break away from the spirit or scope of the present invention in other embodiments among this paper.Therefore, the present invention will can not be restricted to these embodiment shown in this paper, but will meet and principle disclosed herein and features of novelty the wideest corresponding to scope.

Claims (10)

1. an electrostatic potential measurement mechanism is characterized in that, comprising: electrode, Vib., voltage source, current sampling device and processor;

Voltage to the tested static body of said voltage source output AC/DC stack;

Said processor is controlled said Vib. vibration to drive the said electrode vibration that is connected with said Vib.; Wherein, Said electrode is provided with near said tested static body, and the coupling capacitance between said electrode and the said tested static body is because of the vibration alternation of said electrode;

Said voltage source, said tested static body, said electrode and said current sampling device form series loop; Said current sampling device is taken a sample through the electric current of said electrode coupling to tested static body; Obtain sampling current, and the sampling current signal that will include said sampling current is sent to said processor;

Said processor extracts current component and obtains the electrostatic potential parameter of said tested static body according to the current component that extracts from said sampling current signal.

2. device according to claim 1 is characterized in that, said sampling current is specially:

The electric current of said voltage source, said tested static body, said electrode and the formed series loop of said current sampling device.

3. device according to claim 2 is characterized in that, said processor obtains the electrostatic potential parameter of said tested static body from said sampling current signal extraction current component and according to the current component that extracts, and is specially:

Said processor extracts j primary current component amplitude from said sampling current signal; And extraction j+i, j-i or i-j primary current component amplitude; Obtain the electrostatic potential amplitude and the electrostatic potential polarity of said tested static body then according to the current component amplitude of extracting, wherein, j is the positive integer more than or equal to 1; I is the positive integer more than or equal to 1, and j is not equal to i.

4. according to claim 2 or 3 described devices, it is characterized in that the electric current of said voltage source, said tested static body, said electrode and the formed series loop of said current sampling device is:

$i_c=C_c\frac{{\mathrm{dU}}_c}{\mathrm{dt}}+U_c\frac{{\mathrm{dC}}_c}{\mathrm{dt}}$

Wherein, C _cBe the coupling capacitance between said electrode and the said tested static body, said U _cBe the total voltage between said electrode and the said tested static body, t is the time.

5. device according to claim 4 is characterized in that, the coupling capacitance between said electrode and the said tested static body is:

$C_c=C_0+\underset{j=1}{\overset{N}{\mathrm{\Σ}}}{C}_j\sin ({\mathrm{\ω}}_{j}t+{\mathrm{\α}}_j),$

Wherein, C ₀Be the mean value of coupling capacitance between said electrode and the said tested static body, N is the positive integer more than or equal to 1, and j is more than or equal to 1 positive integer smaller or equal to N, C _jBe the capacitance variations amplitude of j order harmonic components, ω _jBe the capacitance variations angular frequency of j order harmonic components, α _jBe the phase place of j order harmonic components capacitance change, t is the time.

6. device according to claim 5 is characterized in that, the voltage of said voltage source output is:

$U_r=U_{\mathrm{dc}}+\underset{i=1}{\overset{M}{\mathrm{\Σ}}}{U}_i\sin ({\mathrm{\ω}}_{i}t+{\mathrm{\β}}_i),$

Total voltage U between said electrode and the said tested static body _cFor said tested static body with electrostatic potential U _sVoltage U with said voltage source output _rSum;

Wherein, U _DcDC voltage, M are the positive integer more than or equal to 1, and i is more than or equal to 1, smaller or equal to the positive integer of M, U _iBe the change in voltage amplitude of i order harmonic components, ω _iBe the change in voltage angular frequency of i order harmonic components, β _iBe the voltage-phase of i order harmonic components, t is the time.

7. device according to claim 6 is characterized in that, said j primary current component amplitude is that angular frequency is ω _jThe current component amplitude, j+i primary current component amplitude is that angular frequency is ω _j+ ω _iThe current component amplitude, j-i primary current component amplitude is that angular frequency is ω _j-ω _iThe current component amplitude, i-j primary current component amplitude is ω _i-ω _jThe current component amplitude.

8. device according to claim 7 is characterized in that, said j primary current component amplitude is:

I ₀=C _jω _j(U _s+U _dc)；

Said j+i primary current component amplitude is:

$I_1=\frac{1}{2}{C}_j{U}_i({\mathrm{\ω}}_j+{\mathrm{\ω}}_i);$

Said j-i or i-j primary current component amplitude are:

$I_2=\frac{1}{2}{C}_j{U}_i|{\mathrm{\ω}}_j-{\mathrm{\ω}}_i|.$

9. device according to claim 8 is characterized in that, said amplitude according to the current component that extracts is obtained the electrostatic potential amplitude and the electrostatic potential polarity of said tested static body, is specially:

Work as U _DcMore than or equal to 0 o'clock, if j primary current component amplitude I ₀With U _DcIncrease and increase, then said tested static body institute static electrification voltage is for just, said electrostatic potential amplitude is:

$U_{\mathrm{sam}}=\frac{({\mathrm{\ω}}_j+{\mathrm{\ω}}_i)I_0}{2{\mathrm{\ω}}_j{I}_1}{U}_i-U_{\mathrm{dc}},$

Perhaps,

$U_{\mathrm{sam}}=\frac{|{\mathrm{\ω}}_j-{\mathrm{\ω}}_i|I_0}{2{\mathrm{\ω}}_j{I}_2}{U}_i-U_{\mathrm{dc}};$

Work as U _DcMore than or equal to 0 o'clock, if j primary current component amplitude I ₀With U _DcIncrease and reduce, then said tested static body institute static electrification voltage is for negative, said electrostatic potential amplitude is:

$U_{\mathrm{sam}}=\frac{({\mathrm{\ω}}_j+{\mathrm{\ω}}_i)I_0}{2{\mathrm{\ω}}_j{I}_1}{U}_i+U_{\mathrm{dc}},$

Perhaps,

$U_{\mathrm{sam}}=\frac{|{\mathrm{\ω}}_j-{\mathrm{\ω}}_i|I_0}{2{\mathrm{\ω}}_j{I}_2}{U}_i+U_{\mathrm{dc}};$

Work as U _DcLess than 0 o'clock, if j primary current component amplitude I ₀With U _DcReduce and increase, then said tested static body institute static electrification voltage is for negative, said electrostatic potential amplitude is:

$U_{\mathrm{sam}}=\frac{({\mathrm{\ω}}_j+{\mathrm{\ω}}_i)I_0}{2{\mathrm{\ω}}_j{I}_1}{U}_i-\left|U_{\mathrm{dc}}\right|,$

Perhaps,

$U_{\mathrm{sam}}=\frac{|{\mathrm{\ω}}_j-{\mathrm{\ω}}_i|I_0}{2{\mathrm{\ω}}_j{I}_2}{U}_i-\left|U_{\mathrm{dc}}\right|;$

Work as U _DcLess than 0 o'clock, if j primary current component amplitude I ₀With U _DcReduce and reduce, then said tested static body institute static electrification voltage is for just, said electrostatic potential amplitude is:

$U_{\mathrm{sam}}=\frac{({\mathrm{\ω}}_j+{\mathrm{\ω}}_i)I_0}{2{\mathrm{\ω}}_j{I}_1}{U}_i+\left|U_{\mathrm{dc}}\right|,$

Perhaps,

$U_{\mathrm{sam}}=\frac{|{\mathrm{\ω}}_j-{\mathrm{\ω}}_i|I_0}{2{\mathrm{\ω}}_j{I}_2}{U}_i+\left|U_{\mathrm{dc}}\right|.$

10. an electrostatic potential measuring method is characterized in that, is applied to comprise the electrostatic potential measurement mechanism of electrode, Vib., voltage source, current sampling device and processor, comprising:

Voltage to the tested static body of said voltage source output AC/DC stack;

Said processor is controlled said Vib. vibration to drive said electrode vibration, and wherein, said electrode is provided with near said tested static body, and the coupling capacitance between said electrode and the said tested static body is because of the vibration alternation of said electrode;

Said current sampling device is taken a sample through the electric current of said electrode coupling to tested static body, obtains sampling current, and the sampling current signal that will include said sampling current is sent to said processor;

Said processor extracts current component and obtains the electrostatic potential parameter of said tested static body according to the current component that extracts from said sampling current signal.