CN102692544A

CN102692544A - Electrostatic voltage measurement device and method

Info

Publication number: CN102692544A
Application number: CN2012101891517A
Authority: CN
Inventors: 彭磊
Original assignee: Individual
Current assignee: Pinghu Sitong Power Supply Factory
Priority date: 2012-06-08
Filing date: 2012-06-08
Publication date: 2012-09-26
Anticipated expiration: 2032-06-08
Also published as: CN102692544B

Abstract

The invention provides an electrostatic voltage measuring device, comprising: an electrode, a vibrator, a voltage source, a current sampling device and a processor; the voltage source outputs the voltage superimposed by AC and DC to the electrostatic body under test; the processor controls the vibration of the vibrator to drive The electrode vibrates, the electrode is close to the electrostatic body under test, and the coupling capacitance between the electrode and the electrostatic body under test changes due to the vibration of the electrode; the current sampling device samples the current signal coupled by the electrostatic body under test through the electrode, and the sampled The current signal is sent to the processor; the processor extracts a current component from the sampled current signal and acquires electrostatic voltage parameters of the electrostatic body under test according to the extracted current component. The electrostatic voltage measurement device provided by the present invention does not need to correct the electrode area, area amplitude, distance and distance amplitude between the electrode and the electrostatic body to be measured, and does not need to generate a comparison voltage with the same amplitude as the measured electrostatic voltage. At the same time, the shape of the electrode, installation Position and angle have no effect on the measurement result.

Description

An electrostatic voltage measuring device and method

技术领域 technical field

本发明涉及电子测量技术领域，尤其涉及一种静电电压测量装置及方法。The invention relates to the technical field of electronic measurement, in particular to an electrostatic voltage measuring device and method.

背景技术 Background technique

静电测量广泛应用于科学研究、石油化工、国防军事、钢铁冶金、环境保护、半导体制造等领域。目前，常见的静电测量技术为振动电容非接触式测量。振动电容非接触式测量是采用一个电极靠近被测静电体，通过使电极与被测静电体的距离周期性交变或电极感应面积周期性交变，即改变电极与被测静电体间的耦合电容量，测量流过电极的交流电流，间接测得被测静电体的电压。振动电容非接触式测量又分为：校正型振动电容非接触式测量和平衡型振动电容非接触式测量。Electrostatic measurement is widely used in scientific research, petrochemical industry, national defense and military, iron and steel metallurgy, environmental protection, semiconductor manufacturing and other fields. At present, the common electrostatic measurement technology is non-contact measurement of vibration capacitance. Vibration capacitance non-contact measurement is to use an electrode close to the measured static body, by periodically changing the distance between the electrode and the measured static body or periodically changing the electrode induction area, that is, changing the coupling capacitance between the electrode and the measured static body , measure the alternating current flowing through the electrode, and indirectly measure the voltage of the electrostatic body under test. Vibration capacitance non-contact measurement is divided into: correction vibration capacitance non-contact measurement and balance vibration capacitance non-contact measurement.

校正型振动电容非接触式测量需要校正电极面积及电极与被测静电体的平均距离和距离振幅，或者需要校正电极面积振幅及电极与被测静电体的距离，同时，校正型振动电容静电测量对电极安装位置、安装角度要求较高。平衡型振动电容静电测量将振动电容、辅助程控电压源、被测静电体等效串联，通过改变辅助程控电压源的极性和调节辅助程控电压源的电压，使流过振动电容的电流为零，从而测得被测静电体的电压。平衡型振动电容非接触式测量需要产生与被测静电体电压幅度相同的电压，对于高压静电测量场合，实现比较困难。Correction-type vibration capacitance non-contact measurement needs to correct the electrode area and the average distance and distance amplitude between the electrode and the measured electrostatic body, or need to correct the electrode area amplitude and the distance between the electrode and the measured electrostatic body. At the same time, the correction-type vibration capacitance electrostatic measurement There are higher requirements on the installation position and angle of the electrode. Equivalent series connection of vibration capacitor, auxiliary program-controlled voltage source, and measured electrostatic body in balanced vibration capacitance electrostatic measurement, by changing the polarity of the auxiliary program-controlled voltage source and adjusting the voltage of the auxiliary program-controlled voltage source, the current flowing through the vibration capacitor is zero , so as to measure the voltage of the electrostatic body under test. The non-contact measurement of balanced vibration capacitance needs to generate a voltage with the same magnitude as the voltage of the measured electrostatic body, which is difficult to realize in the case of high-voltage electrostatic measurement.

发明内容 Contents of the invention

有鉴于此，本发明提供了一种静电电压测量装置及方法，用以解决现有的振动电容非接触式测量需要校正电极面积、面积振幅、电极与被测静电体的距离以及距离振幅，需要产生与被测静电体电压同等幅度的比较电压，同时电极的形状、安装位置和安装角度影响测量结果的问题，其技术方案如下：In view of this, the present invention provides an electrostatic voltage measurement device and method to solve the existing vibration capacitance non-contact measurement needs to correct the electrode area, the area amplitude, the distance between the electrode and the electrostatic body to be measured, and the distance amplitude. To generate a comparison voltage with the same amplitude as the measured electrostatic body voltage, and the shape, installation position and installation angle of the electrode affect the measurement results. The technical solution is as follows:

一种静电电压测量装置，包括：电极、振动器、电压源、电流取样装置和处理器；An electrostatic voltage measuring device, comprising: an electrode, a vibrator, a voltage source, a current sampling device and a processor;

所述电压源输出交直流叠加的电压至被测静电体；The voltage source outputs a voltage superimposed by alternating current and direct current to the static body under test;

所述处理器控制所述振动器振动以带动与所述振动器连接的所述电极振动，其中，所述电极靠近所述被测静电体设置，所述电极与所述被测静电体之间的耦合电容因所述电极的振动而交变；The processor controls the vibration of the vibrator to drive the electrode connected to the vibrator to vibrate, wherein the electrode is arranged close to the static body under test, and there is a gap between the electrode and the static body under test. The coupling capacitance of is alternated due to the vibration of the electrodes;

所述电压源、所述被测静电体、所述电极、所述电流取样装置形成串联回路，所述电流取样装置对被测静电体通过所述电极耦合的电流进行取样，得到取样电流，并将包含有所述取样电流的取样电流信号发送至所述处理器；The voltage source, the measured electrostatic body, the electrode, and the current sampling device form a series loop, and the current sampling device samples the current coupled by the measured electrostatic body through the electrode to obtain a sampling current, and sending a sampled current signal including the sampled current to the processor;

所述处理器从所述取样电流信号中提取电流分量并根据提取的电流分量获取所述被测静电体的静电电压参数。The processor extracts a current component from the sampled current signal and acquires an electrostatic voltage parameter of the measured electrostatic body according to the extracted current component.

所述取样电流具体为：所述电压源、所述被测静电体、所述电极和所述电流取样装置所形成的串联回路的电流。The sampling current is specifically: the current of the series loop formed by the voltage source, the electrostatic body under test, the electrode and the current sampling device.

所述处理器从所述取样电流信号提取电流分量并根据提取的电流分量获取所述被测静电体的静电电压参数，具体为：The processor extracts a current component from the sampled current signal and obtains an electrostatic voltage parameter of the electrostatic body under test according to the extracted current component, specifically:

所述处理器从所述取样电流信号中提取j次电流分量幅值，并提取j+i、j-i或i-j次电流分量幅值，并根据提取的电流分量幅值获取所述被测静电体的静电电压幅值和静电电压极性，其中，j为大于等于1的正整数，i为大于等于1的正整数，且j不等于i。The processor extracts j-time current component amplitudes from the sampled current signal, and extracts j+i, j-i or i-j-time current component amplitudes, and obtains the measured static body according to the extracted current component amplitudes Electrostatic voltage amplitude and electrostatic voltage polarity, where j is a positive integer greater than or equal to 1, i is a positive integer greater than or equal to 1, and j is not equal to i.

所述电压源、所述被测静电体、所述电极和所述电流取样装置所形成的串联回路的电流为：The current of the series loop formed by the voltage source, the electrostatic body under test, the electrode and the current sampling device is:

${i i}_{c c} = = {C C}_{c c} \frac{{dU U}_{c c}}{dt dt} + + {U u}_{c c} \frac{{dC c}_{c c}}{dt dt}$

其中，C_c为所述电极与所述被测静电体之间的耦合电容，U_c为所述电极与所述被测静电体之间的总电压，t为时间。Wherein, C _c is the coupling capacitance between the electrode and the electrostatic body under test, U _c is the total voltage between the electrode and the electrostatic body under test, and t is time.

所述电极与所述被测静电体之间的耦合电容为：The coupling capacitance between the electrode and the measured electrostatic body is:

${C C}_{c c} = = {C C}_{00} + + {Σ Σ}_{j j = = 11}^{N N} {C C}_{j j} sin sin (({ω ω}_{j j} t t + + {α α}_{j j})),,$

其中，C₀为所述电极与所述被测静电体之间耦合电容的平均值，N为大于等于1的正整数，j为大于等于1小于等于N的正整数，C_j为第j次谐波分量的电容变化幅值，ω_j为第j次谐波分量的电容变化角频率，α_j为第j次谐波分量的电容变化量的相位，t为时间。Wherein, C ₀ is the average value of the coupling capacitance between the electrode and the measured electrostatic body, N is a positive integer greater than or equal to 1, j is a positive integer greater than or equal to 1 and less than or equal to N, and C _j is the jth The amplitude of the capacitance change of the harmonic component, ω _j is the angular frequency of the capacitance change of the jth harmonic component, α _j is the phase of the capacitance change of the jth harmonic component, and t is time.

所述电压源输出的电压为：The voltage output by the voltage source is:

${U u}_{r r} = = {U u}_{dc dc} + + {Σ Σ}_{i i = = 11}^{M m} {U u}_{i i} sin sin (({ω ω}_{i i} t t + + {β β}_{i i})),,$

所述电极与所述被测静电体之间的总电压U_c为所述被测静电体所带的静电电压U_s与所述电压源输出的电压U_r之和；The total voltage _Uc between the electrodes and the measured electrostatic body is the sum of the electrostatic voltage _Us carried by the measured electrostatic body and the voltage _Ur output by the voltage source;

其中，U_dc直流电压，M为大于等于1的正整数，i为大于等于1、小于等于M的正整数，U_i为第i次谐波分量的电压变化幅值，ω_i为第i次谐波分量的电压变化角频率，β_i为第i次谐波分量的电压相位，t为时间。Among them, U _dc DC voltage, M is a positive integer greater than or equal to 1, i is a positive integer greater than or equal to 1 and less than or equal to M, U _i is the voltage change amplitude of the i-th harmonic component, ω _i is the i-th harmonic component The angular frequency of the voltage change of the harmonic component, β _i is the voltage phase of the i-th harmonic component, and t is the time.

所述j次电流分量幅值为角频率为ω_j的电流分量幅值，j+i次电流分量幅值为角频率为ω_j+ω_i的电流分量幅值，j-i次电流分量幅值为角频率为ω_j-ω_i的电流分量幅值，i-j次电流分量幅值为ω_i-ω_j的电流分量幅值。The amplitude of the j current component is the amplitude of the current component with an angular frequency of ω _j , the amplitude of the j+i current component is the amplitude of the current component with an angular frequency of ω _j + ω _i , and the amplitude of the j current component is The angular frequency is the amplitude of the current component of ω _j -ω _i , and the amplitude of the ij-time current component is the amplitude of the current component of ω _i -ω _j .

所述j次电流分量幅值为：The amplitude of the j times current component is:

I₀=C_jω_j(U_s+U_dc)；I ₀ =C _j ω _j (U _s +U _dc );

所述j+i次电流分量幅值为：The amplitude of the j+i times current component is:

${I I}_{11} = = \frac{11}{22} {C C}_{j j} {U u}_{i i} (({ω ω}_{j j} + + {ω ω}_{i i}));;$

所述j-i或i-j次电流分量幅值为：The magnitude of the j-i or i-j current component is:

${I I}_{22} = = \frac{11}{22} {C C}_{j j} {U u}_{i i} | | {ω ω}_{j j} - - {ω ω}_{i i} | | . .$

所述根据提取的电流分量的幅值获取所述被测静电体的静电电压幅值和静电电压极性，具体为：The acquisition of the electrostatic voltage amplitude and electrostatic voltage polarity of the measured electrostatic body according to the amplitude of the extracted current component is specifically:

当U_dc大于等于0时，如果j次电流分量幅值I₀随U_dc的增大而增大，则所述被测静电体所带静电电压为正，所述静电电压幅值为：When _Udc is greater than or equal to 0, if the j current component amplitude I increases with the increase of _Udc , then the electrostatic voltage carried by the measured electrostatic body is positive, and the electrostatic voltage amplitude _is :

${U u}_{sam sam} = = \frac{(({ω ω}_{j j} + + {ω ω}_{i i})) {I I}_{00}}{22 {ω ω}_{j j} {I I}_{11}} {U u}_{i i} - - {U u}_{dc dc},,$

或者，or,

${U u}_{sam sam} = = \frac{| | {ω ω}_{j j} - - {ω ω}_{i i} | | {I I}_{00}}{22 {ω ω}_{j j} {I I}_{22}} {U u}_{i i} - - {U u}_{dc dc};;$

当U_dc大于等于0时，如果j次电流分量幅值I₀随U_dc的增大而减小，则所述被测静电体所带静电电压为负，所述静电电压幅值为：When _Udc is greater than or equal to 0, if the j current component amplitude _I0 decreases with the increase of _Udc , the electrostatic voltage carried by the measured electrostatic body is negative, and the electrostatic voltage amplitude is:

${U u}_{sam sam} = = \frac{(({ω ω}_{j j} + + {ω ω}_{i i})) {I I}_{00}}{22 {ω ω}_{j j} {I I}_{11}} {U u}_{i i} + + {U u}_{dc dc},,$

或者，or,

${U u}_{sam sam} = = \frac{| | {ω ω}_{j j} - - {ω ω}_{i i} | | {I I}_{00}}{22 {ω ω}_{j j} {I I}_{22}} {U u}_{i i} + + {U u}_{dc dc};;$

当U_dc小于0时，如果j次电流分量幅值I₀随U_dc的减小而增大，则所述被测静电体所带静电电压为负，所述静电电压幅值为：When _Udc is less than 0, if the j current component amplitude I increases with the _decrease of _Udc , then the electrostatic voltage carried by the measured electrostatic body is negative, and the electrostatic voltage amplitude is:

${U u}_{sam sam} = = \frac{(({ω ω}_{j j} + + {ω ω}_{i i})) {I I}_{00}}{22 {ω ω}_{j j} {I I}_{11}} {U u}_{i i} - - | | {U u}_{dc dc} | |,,$

或者，or,

${U u}_{sam sam} = = \frac{| | {ω ω}_{j j} - - {ω ω}_{i i} | | {I I}_{00}}{22 {ω ω}_{j j} {I I}_{22}} {U u}_{i i} - - | | {U u}_{dc dc} | |;;$

当U_dc小于0时，如果j次电流分量幅值I₀随U_dc的减小而减小，则所述被测静电体所带静电电压为正，所述静电电压幅值为：When _Udc is less than 0, if the j current component amplitude _I0 decreases with the reduction of _Udc , the electrostatic voltage carried by the measured electrostatic body is positive, and the electrostatic voltage amplitude is:

${U u}_{sam sam} = = \frac{(({ω ω}_{j j} + + {ω ω}_{i i})) {I I}_{00}}{22 {ω ω}_{j j} {I I}_{11}} {U u}_{i i} + + | | {U u}_{dc dc} | |,,$

或者，or,

${U u}_{sam sam} = = \frac{| | {ω ω}_{j j} - - {ω ω}_{i i} | | {I I}_{00}}{22 {ω ω}_{j j} {I I}_{22}} {U u}_{i i} + + | | {U u}_{dc dc} | | . .$

一种静电电压测量方法，应用于包括电极、振动器、电压源、电流取样装置和处理器的静电电压测量装置，包括：A static voltage measuring method applied to a static voltage measuring device comprising an electrode, a vibrator, a voltage source, a current sampling device and a processor, comprising:

所述处理器控制所述振动器振动以带动所述电极振动，其中，所述电极靠近所述被测静电体设置，所述电极与所述被测静电体之间的耦合电容因所述电极的振动而交变；The processor controls the vibration of the vibrator to drive the electrode to vibrate, wherein the electrode is arranged close to the electrostatic body under test, and the coupling capacitance between the electrode and the electrostatic body under test is caused by the electrode The vibration alternates;

所述电流取样装置对被测静电体通过所述电极耦合的电流进行取样，得到取样电流，并将包含有所述取样电流的取样电流信号发送至所述处理器；The current sampling device samples the current coupled by the electrostatic body under test through the electrodes to obtain a sampling current, and sends a sampling current signal including the sampling current to the processor;

本发明提供的静电电压测量装置中，电压源输出交直流叠加的电压至被测静电体，处理器控制振动器振动以带动电极振动，电极靠近被测静电体设置，电极与被测静电体之间的耦合电容因电极的振动而交变，电压源、被测静电体、电极和电流取样装置形成串联回路，电流取样装置对被测静电体通过电极耦合的电流信号进行取样，处理器从所述取样的电流信号中提取电流分量并根据提取的电流分量获取被测静电体的静电电压参数。与现有技术中的测量装置相比，本发明提供的静电电压测量装置和方法，不需要校正电极面积、面积振幅及电极与被测静电体的距离和距离振幅，也不需要产生与被测静电电压同等幅度的比较电压，同时电极的形状、安装位置、角度对测量结果没有影响，只要电极靠近被测静电体即可。In the electrostatic voltage measurement device provided by the present invention, the voltage source outputs the voltage superimposed by AC and DC to the electrostatic body under test, and the processor controls the vibrator to vibrate to drive the electrode to vibrate. The electrode is arranged close to the electrostatic body under test. The coupling capacitance between them alternates due to the vibration of the electrodes. The voltage source, the electrostatic body under test, the electrode and the current sampling device form a series loop. The current sampling device samples the current signal coupled by the electrostatic body under test through the electrode. The current component is extracted from the sampled current signal, and the electrostatic voltage parameter of the electrostatic body under test is obtained according to the extracted current component. Compared with the measuring device in the prior art, the electrostatic voltage measuring device and method provided by the present invention do not need to correct the electrode area, the area amplitude, the distance and the distance amplitude between the electrode and the electrostatic body to be measured, and do not need to generate a The comparison voltage of the same magnitude as the electrostatic voltage, and the shape, installation position, and angle of the electrode have no effect on the measurement results, as long as the electrode is close to the electrostatic body to be measured.

附图说明 Description of drawings

为了更清楚地说明本发明实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据提供的附图获得其他的附图。In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings that need to be used in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are only It is an embodiment of the present invention, and those skilled in the art can also obtain other drawings according to the provided drawings without creative work.

图1为本发明实施例提供的一种静电电压测量装置的结构示意图。FIG. 1 is a schematic structural diagram of an electrostatic voltage measuring device provided by an embodiment of the present invention.

具体实施方式 Detailed ways

下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

本发明实施例提供了一种静电电压测量装置，图1为该装置的结构示意图，该装置包括：处理器101、振动器102、电极103、电压源104和电流取样装置105。An embodiment of the present invention provides an electrostatic voltage measurement device. FIG. 1 is a schematic structural diagram of the device, which includes: a processor 101 , a vibrator 102 , an electrode 103 , a voltage source 104 and a current sampling device 105 .

电压源104输出交直流叠加的电压至被测静电体100，处理器101控制振动器102振动以带动与振动器102连接的电极103振动，其中，电极103靠近被测静电体100设置，电极103与被测静电体100之间的耦合电容因电极103的振动而交变，电压源104、被测静电体100、电极103和电流取样装置105形成串联回路，电流取样装置105电压降为零或被测静电体100与电极103间的电压忽略不计，电流取样装置105对被测静电体100通过电极103耦合的电流进行取样，得到取样电流，并将包含有取样电流的取样电流信号发送至处理器101；处理器101从取样电流信号中提取电流分量并根据提取的电流分量获取被测静电体100的静电电压参数。The voltage source 104 outputs the voltage superimposed by alternating current and direct current to the electrostatic body 100 under test, and the processor 101 controls the vibrator 102 to vibrate to drive the electrode 103 connected to the vibrator 102 to vibrate, wherein the electrode 103 is arranged close to the electrostatic body 100 under test, and the electrode 103 Due to the vibration of the electrode 103, the coupling capacitance between the measured electrostatic body 100 is alternated, the voltage source 104, the measured electrostatic body 100, the electrode 103 and the current sampling device 105 form a series loop, and the voltage drop of the current sampling device 105 is zero or The voltage between the measured electrostatic body 100 and the electrode 103 is negligible, and the current sampling device 105 samples the current coupled by the measured electrostatic body 100 through the electrode 103 to obtain a sampling current, and sends the sampling current signal containing the sampling current to the processing The device 101; the processor 101 extracts the current component from the sampled current signal and obtains the electrostatic voltage parameter of the electrostatic body 100 under test according to the extracted current component.

本实施例中的电压源104在处理器101控制下输出交直流叠加的电压至被测静电体100，当然，本实施例并不限定电压源104受处理器101控制，只要电压源104输出本发明实施例所需的交直流叠加的电压至被测静电体都是本发明保护的范围。The voltage source 104 in this embodiment is under the control of the processor 101 to output the superimposed voltage of AC and DC to the electrostatic body 100 under test. Of course, this embodiment does not limit the voltage source 104 to be controlled by the processor 101, as long as the voltage source 104 outputs this The superimposed voltage of AC and DC required by the embodiments of the invention to the static body under test is within the protection scope of the invention.

在本实施例中，电流取样装置105可以为电阻，也可为电流传感器，还可为跨导放大器，其中，电流传感器可以为交流电流互感器，也可为霍尔电流传感器。电流取样装置105对被测静电体100通过电极103耦合的电流信号进行取样，得到的取样电流为电压源104、被测静电体100、电极103和电流取样装置105形成串联回路的电流。In this embodiment, the current sampling device 105 can be a resistor, a current sensor, or a transconductance amplifier, wherein the current sensor can be an AC current transformer or a Hall current sensor. The current sampling device 105 samples the current signal coupled by the electrostatic body 100 under test through the electrode 103 , and the obtained sampling current is the current in a series circuit formed by the voltage source 104 , the electrostatic body 100 under test, the electrode 103 and the current sampling device 105 .

设被测静电体100所带静电电压为U_s，电极103与被测静电体100间的耦合电容为C_c，并设电流取样装置105的电压降忽略不计。Let U _s be the static voltage of the electrostatic object under test 100 , C _c be the coupling capacitance between the electrode 103 and the electrostatic object under test 100 , and assume that the voltage drop of the current sampling device 105 is negligible.

在本实施例中，振动器102的振动使电极103和被测静电体100之间的耦合电容为：In this embodiment, the vibration of the vibrator 102 makes the coupling capacitance between the electrode 103 and the measured electrostatic body 100 be:

${C C}_{c c} = = {C C}_{00} + + {Σ Σ}_{j j = = 11}^{N N} {C C}_{j j} sin sin (({ω ω}_{j j} t t + + {α α}_{j j})) - - - - - - ((11))$

其中，C₀为电极103与被测静电体100之间耦合电容的平均值，N为大于等于1的正整数，j为大于等于1小于等于N的正整数，C_j为第j次谐波分量的电容变化幅值，ω_j为第j次谐波分量的电容变化角频率，α_j为第j次谐波分量的电容变化量的相位，t为时间。Wherein, _C0 is the average value of the coupling capacitance between the electrode 103 and the measured electrostatic body 100, N is a positive integer greater than or equal to 1, j is a positive integer greater than or equal to 1 and less than or equal to N, and C _j is the jth harmonic ω _j is the capacitance change angular frequency of the jth harmonic component, α _j is the phase of the capacitance change of the jth harmonic component, and t is time.

设定电压源104输出的交直流叠加的电压为：Set the AC and DC superimposed voltage output by the voltage source 104 as:

${U u}_{r r} = = {U u}_{dc dc} + + {Σ Σ}_{i i = = 11}^{M m} {U u}_{i i} sin sin (({ω ω}_{i i} t t + + {β β}_{i i})) - - - - - - ((22))$

被测静电体100和电极103之间的总电压为：The total voltage between the measured electrostatic body 100 and the electrode 103 is:

${U u}_{c c} = = {U u}_{s the s} + + {U u}_{r r} = = {U u}_{s the s} + + {U u}_{dc dc} + + {Σ Σ}_{i i = = 11}^{M m} {U u}_{i i} sin sin (({ω ω}_{i i} t t + + {β β}_{i i})) . . - - - - - - ((33))$

电压源104、被测静电体100、电极103和电流取样装置105所形成的串联回路的电流，即取样电流为：The current of the series loop formed by the voltage source 104, the electrostatic body 100 under test, the electrode 103 and the current sampling device 105, that is, the sampling current is:

${i i}_{c c} = = {C C}_{c c} \frac{{dU U}_{c c}}{dt dt} + + {U u}_{c c} \frac{{dC c}_{c c}}{dt dt} - - - - - - ((44))$

$= = [[{C C}_{00} + + {Σ Σ}_{j j = = 11}^{N N} {C C}_{j j} sin sin (({ω ω}_{j j} t t + + {α α}_{j j}))]] \times \times {Σ Σ}_{i i = = 11}^{M m} {U u}_{i i} {ω ω}_{i i} cos cos (({ω ω}_{i i} t t + + {β β}_{i i}))$

$+ + {Σ Σ}_{j j = = 11}^{N N} {C C}_{j j} {ω ω}_{j j} cos cos (({ω ω}_{j j} t t + + {α α}_{j j})) \times \times [[{U u}_{s the s} + + {U u}_{dc dc} + + {Σ Σ}_{i i = = 11}^{M m} {U u}_{i i} sin sin (({ω ω}_{i i} t t + + {β β}_{i i}))]]$

$= = {C C}_{00} {Σ Σ}_{i i = = 11}^{M m} {U u}_{i i} {ω ω}_{i i} cis cis (({ω ω}_{i i} t t + + {β β}_{i i})) + + \frac{11}{22} {Σ Σ}_{j j = = 11}^{N N} {Σ Σ}_{i i = = 11}^{M m} {C C}_{j j} {U u}_{i i} {ω ω}_{i i} {{sin sin [[(({ω ω}_{j j} + + {ω ω}_{i i})) t t + + {α α}_{j j} + + {β β}_{i i}]]$

$+ + sin sin [[(({ω ω}_{j j} - - {ω ω}_{i i})) t t + + {α α}_{j j} - - {β β}_{i i}]]}} + + (({U u}_{s the s} + + {U u}_{dc dc})) {Σ Σ}_{j j = = 11}^{N N} {C C}_{j j} {ω ω}_{j j} cos cos (({ω ω}_{j j} t t + + {α α}_{j j})) + +$

$\frac{11}{22} {Σ Σ}_{j j = = 11}^{N N} {Σ Σ}_{i i = = 11}^{M m} {C C}_{j j} {U u}_{i i} {ω ω}_{j j} {{sin sin [[(({ω ω}_{j j} + + {ω ω}_{i i})) t t + + {α α}_{j j} + + {β β}_{i i}]] - - sin sin [[(({ω ω}_{j j} - - {ω ω}_{i i})) t t + + {α α}_{j j} - - {β β}_{i i}]]}}$

在本实例中，处理器101从取样电流信号提取电流分量并根据提取的电流分量获取被测静电体100的静电电压参数，具体为：处理器101从取样电流信号中获取取样电流i_c，然后从取样电流i_c中提取j次电流分量幅值，并提取j+i、j-i或i-j次电流分量幅值，然后根据提取的电流分量幅值获取被测静电体100的静电电压参数，其中，j为大于等于1的正整数，i为大于等于1的正整数，且j不等于i。被测静电体100的静电电压参数包括：静电电压幅值和静电电压极性。In this example, the processor 101 extracts the current component from the sampled current signal and obtains the electrostatic voltage parameter of the electrostatic body 100 under test according to the extracted current component, specifically: the processor 101 obtains the sampled current _ic from the sampled current signal, and then Extract j-time current component amplitudes from the sampling current _ic , and extract j+i, ji or ij-time current component amplitudes, and then obtain electrostatic voltage parameters of the electrostatic body 100 under test according to the extracted current component amplitudes, wherein, j is a positive integer greater than or equal to 1, i is a positive integer greater than or equal to 1, and j is not equal to i. The electrostatic voltage parameters of the electrostatic body 100 to be tested include: electrostatic voltage amplitude and electrostatic voltage polarity.

处理器101从取样电流i_c中提取j次电流分量幅值，即从取样电流i_c中提取角频率为ω_j的电流分量幅值，根据式(4)可得知，角频率为ω_j的电流分量幅值为：The processor 101 extracts the amplitude of the j-time current component from the sampling current _ic , that is, extracts the amplitude of the current component with an angular frequency ω _j from the sampling current _ic . According to formula (4), it can be known that the angular frequency is ω _j The magnitude of the current component of is:

I₀=C_jω_j(U_s+U_dc) (5)I ₀ =C _j ω _j (U _s +U _dc ) (5)

处理器101从取样电流i_c中提取j+i次电流分量幅值，即从取样电流i_c中提取角频率为ω_j+ω_i的电流分量幅值，根据式(4)可得知，角频率为ω_j+ω_i的电流分量幅值为：The processor 101 extracts the j+i times current component amplitude from the sampled current _ic , that is, extracts the current component amplitude with an angular frequency of ω _j + ω _i from the sampled current _ic . According to formula (4), it can be known that The magnitude of the current component at angular frequency ω _j + ω _i is:

${I I}_{11} = = \frac{11}{22} {C C}_{j j} {U u}_{i i} (({ω ω}_{j j} + + {ω ω}_{i i})) - - - - - - ((66))$

处理器101从取样电流i_c中提取j-i或i-j次电流分量幅值，即从取样电流i_c中提取角频率为ω_j-ω_i或ω_i-ω_j的电流分量幅值，根据式(4)可得知，角频率为ω_j-ω_i或ω_i-ω_j的电流分量幅值为：The processor 101 extracts ji or ij current component amplitudes from the sampled current _ic , that is, extracts the current component amplitude with an angular frequency of ω _j −ω _i or ω _i −ω _j from the sampled current _ic , according to the formula ( 4) It can be known that the amplitude of the current component with angular frequency ω _j -ω _i or ω _i -ω _j is:

${I I}_{22} = = \frac{11}{22} {C C}_{j j} {U u}_{i i} | | {ω ω}_{j j} - - {ω ω}_{i i} | | - - - - - - ((77))$

在本实施例中，处理器101根据提取的电流分量幅值获取被测静电体100的静电电压参数具体为：In this embodiment, the processor 101 acquires the electrostatic voltage parameters of the electrostatic body 100 under test according to the extracted current component amplitude, specifically:

当U_dc大于等于0时，如果取样电流i_c的j次电流分量幅值I₀随U_dc的增大而增大，则被测静电体100所带静电电压U_s为正，根据式(5)和(6)可得静电电压幅值为：When _Udc is greater than or equal to 0, if the amplitude _I0 of the j-time current component of the sampling current ic increases with the increase of _Udc , _the electrostatic voltage _Us carried by the electrostatic body 100 under test is positive, according to the formula ( 5) and (6) the available electrostatic voltage amplitude is:

${U u}_{sam sam} = = \frac{(({ω ω}_{j j} + + {ω ω}_{i i})) {I I}_{00}}{22 {ω ω}_{j j} {I I}_{11}} {U u}_{i i} - - {U u}_{dc dc} - - - - - - ((88))$

或者，根据式(5)和(7)可得静电电压幅值为：Alternatively, according to equations (5) and (7), the magnitude of the electrostatic voltage can be obtained as:

${U u}_{sam sam} = = \frac{| | {ω ω}_{j j} - - {ω ω}_{i i} | | {I I}_{00}}{22 {ω ω}_{j j} {I I}_{22}} {U u}_{i i} - - {U u}_{dc dc} - - - - - - ((99))$

当U_dc大于等于0时，如果取样电流i_c的j次电流分量幅值I₀随U_dc的增大而减小，则被测静电体100所带静电电压U_s为负，根据式(5)和(6)可得静电电压幅值为：When _Udc is greater than or equal to 0, if the amplitude _I0 of the j-time current component of the sampling current ic decreases with the increase of _Udc , the electrostatic voltage _Us carried by the electrostatic _body 100 under test is negative, according to the formula ( 5) and (6) the available electrostatic voltage amplitude is:

${U u}_{sam sam} = = \frac{(({ω ω}_{j j} + + {ω ω}_{i i})) {I I}_{00}}{22 {ω ω}_{j j} {I I}_{11}} {U u}_{i i} + + {U u}_{dc dc} - - - - - - ((1010))$

${U u}_{sam sam} = = \frac{| | {ω ω}_{j j} - - {ω ω}_{i i} | | {I I}_{00}}{22 {ω ω}_{j j} {I I}_{22}} {U u}_{i i} + + {U u}_{dc dc} - - - - - - ((1111))$

当U_dc小于0时，如果取样电流i_c的j次电流分量幅值I₀随U_dc的减小而增大，则被测静电体100所带静电电压U_s为负，根据式(5)和(6)可得静电电压幅值为：When _Udc is less than 0, if the amplitude _I0 of the j-time current component of the sampling current _ic increases with the decrease of _Udc , the electrostatic voltage _Us carried by the electrostatic body 100 under test is negative, according to the formula (5 ) and (6) the electrostatic voltage amplitude can be obtained as:

${U u}_{sam sam} = = \frac{(({ω ω}_{j j} + + {ω ω}_{i i})) {I I}_{00}}{22 {ω ω}_{j j} {I I}_{11}} {U u}_{i i} - - | | {U u}_{dc dc} | | - - - - - - ((1212))$

${U u}_{sam sam} = = \frac{| | {ω ω}_{j j} - - {ω ω}_{i i} | | {I I}_{00}}{22 {ω ω}_{j j} {I I}_{22}} {U u}_{i i} - - | | {U u}_{dc dc} | | - - - - - - ((1313))$

当U_dc小于0时，如果取样电流i_c的j次电流分量幅值I₀随U_dc的减小而减小，则被测静电体100所带静电电压U_s为正，根据式(5)和(6)可得静电电压幅值为：When _Udc is less than 0, if the amplitude _I0 of the j-time current component of the sampling current _ic decreases with the decrease of _Udc , the electrostatic voltage _Us carried by the electrostatic body 100 under test is positive, according to the formula (5 ) and (6) the electrostatic voltage amplitude can be obtained as:

${U u}_{sam sam} = = \frac{(({ω ω}_{j j} + + {ω ω}_{i i})) {I I}_{00}}{22 {ω ω}_{j j} {I I}_{11}} {U u}_{i i} + + | | {U u}_{dc dc} | | - - - - - - ((1414))$

${U u}_{sam sam} = = \frac{| | {ω ω}_{j j} - - {ω ω}_{i i} | | {I I}_{00}}{22 {ω ω}_{j j} {I I}_{22}} {U u}_{i i} + + | | {U u}_{dc dc} | | - - - - - - ((1515))$

本发明实施例还提供了一种静电电压测量方法，应用于包括电极、振动器、电压源、电流取样装置和处理器的静电电压测量装置，该方法包括：The embodiment of the present invention also provides an electrostatic voltage measurement method, which is applied to an electrostatic voltage measurement device including an electrode, a vibrator, a voltage source, a current sampling device, and a processor. The method includes:

S11：电压源输出交直流叠加的电压至被测静电体。S11: The voltage source outputs the superimposed voltage of AC and DC to the electrostatic object under test.

S12：处理器控制振动器振动以带动所述电极振动，其中，电极靠近被测静电体设置，电极与被测静电体之间的耦合电容因电极的振动而交变。S12: The processor controls the vibrator to vibrate to drive the electrode to vibrate, wherein the electrode is arranged close to the static body under test, and the coupling capacitance between the electrode and the static body under test changes due to the vibration of the electrode.

S13：电流取样装置对被测静电体通过电极耦合的电流信号进行取样，得到取样电流，并将包含有取样电流的取样电流信号发送至处理器。S13: The current sampling device samples the current signal coupled to the electrostatic object under test through the electrodes to obtain a sampled current, and sends the sampled current signal including the sampled current to the processor.

S14：处理器从取样电流信号中提取电流分量并根据提取的电流分量获取被测静电体的静电电压参数。S14: The processor extracts a current component from the sampled current signal, and acquires an electrostatic voltage parameter of the electrostatic body under test according to the extracted current component.

在本实施例中，处理器从取样电流信号中提取电流分量并根据提取的电流分量获取被测静电体的静电电压参数,具体为：处理器从取样电流信号中获取取样电流，然后从取样电流中提取j次电流分量幅值，并提取j+i、j-i或i-j次电流分量幅值，然后根据提取的电流分量幅值获取被测静电体的静电电压参数，其中，j为大于等于1的正整数，i为大于等于1的正整数，且j不等于i。被测静电体100的静电电压参数包括：静电电压幅值和静电电压极性。In this embodiment, the processor extracts the current component from the sampled current signal and obtains the electrostatic voltage parameter of the electrostatic body under test according to the extracted current component, specifically: the processor obtains the sampled current from the sampled current signal, and then obtains the static voltage parameter from the sampled current Extract j times of current component amplitudes, and extract j+i, j-i or i-j times of current component amplitudes, and then obtain the electrostatic voltage parameters of the measured electrostatic body according to the extracted current component amplitudes, where j is greater than or equal to 1 Positive integer, i is a positive integer greater than or equal to 1, and j is not equal to i. The electrostatic voltage parameters of the electrostatic body 100 to be tested include: electrostatic voltage amplitude and electrostatic voltage polarity.

本发明提供的静电电压测量装置中，电压源输出交直流叠加的电压至被测静电体，处理器控制振动器振动以带动电极振动，电极靠近被测静电体设置，电极与被测静电体之间的耦合电容因电极的振动而交变，电压源、被测静电体、电极、电流取样装置形成串联回路，电流取样装置电压降为零或被测静电体电极间的电压忽略不计，电流取样装置对被测静电体通过电极耦合的电流信号进行取样，处理器从所述取样的电流信号中提取电流分量并根据提取的电流分量获取被测静电体的静电电压参数。与现有技术中的测量装置相比，本发明提供的静电电压测量装置和方法，不需要校正电极面积、面积振幅及电极与被测静电体的距离和距离振幅，也不需要产生与被测静电电压同等幅度的比较电压，同时电极的形状、安装位置和角度对测量结果没有影响，只要电极靠近被测静电体即可，保证了静电电压测量产品的一致性。In the electrostatic voltage measurement device provided by the present invention, the voltage source outputs the voltage superimposed by AC and DC to the electrostatic body under test, and the processor controls the vibrator to vibrate to drive the electrode to vibrate. The electrode is arranged close to the electrostatic body under test. The coupling capacitance between them alternates due to the vibration of the electrodes. The voltage source, the electrostatic body under test, the electrodes and the current sampling device form a series loop. The voltage drop of the current sampling device is zero or the voltage between the electrodes of the electrostatic body under test is negligible. The device samples the current signal coupled by the electrodes of the static body under test, and the processor extracts a current component from the sampled current signal and obtains electrostatic voltage parameters of the static body under test according to the extracted current component. Compared with the measuring device in the prior art, the electrostatic voltage measuring device and method provided by the present invention do not need to correct the electrode area, the area amplitude, the distance and the distance amplitude between the electrode and the electrostatic body to be measured, and do not need to generate a The comparison voltage of the same magnitude as the electrostatic voltage, and the shape, installation position and angle of the electrode have no effect on the measurement results, as long as the electrode is close to the electrostatic body under test, it ensures the consistency of the electrostatic voltage measurement product.

对所公开的实施例的上述说明，使本领域专业技术人员能够实现或使用本发明。对这些实施例的多种修改对本领域的专业技术人员来说将是显而易见的，本文中所定义的一般原理可以在不脱离本发明的精神或范围的情况下，在其它实施例中实现。因此，本发明将不会被限制于本文所示的这些实施例，而是要符合与本文所公开的原理和新颖特点相一致的最宽的范围。The above description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the present invention will not be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. An electrostatic voltage measuring device is characterized in that, comprising: an electrode, a vibrator, a voltage source, a current sampling device and a processor;

The voltage source outputs a voltage superimposed by alternating current and direct current to the static body under test;

The processor controls the vibration of the vibrator to drive the electrode connected to the vibrator to vibrate, wherein the electrode is arranged close to the static body under test, and there is a gap between the electrode and the static body under test. The coupling capacitance of is alternated due to the vibration of the electrodes;

The voltage source, the electrostatic body under test, the electrode and the current sampling device form a series loop, and the current sampling device samples the current coupled by the electrostatic body under test through the electrode to obtain a sampling current, and sending a sampled current signal including the sampled current to the processor;

The processor extracts a current component from the sampled current signal and acquires an electrostatic voltage parameter of the measured electrostatic body according to the extracted current component.

2. The device according to claim 1, wherein the sampling current is specifically:

The current of the series loop formed by the voltage source, the electrostatic body under test, the electrode and the current sampling device.

3. The device according to claim 2, wherein the processor extracts a current component from the sampled current signal and obtains the electrostatic voltage parameter of the measured electrostatic body according to the extracted current component, specifically:

The processor extracts j times of current component amplitudes from the sampled current signal, and extracts j+i, j-i or i-j times of current component amplitudes, and then obtains the measured static body according to the extracted current component amplitudes Electrostatic voltage amplitude and electrostatic voltage polarity, where j is a positive integer greater than or equal to 1, i is a positive integer greater than or equal to 1, and j is not equal to i.

4. The device according to claim 2 or 3, wherein the current of the series loop formed by the voltage source, the electrostatic body under test, the electrode and the current sampling device is:

{i i}_{c c} = = {C C}_{c c} \frac{{dU U}_{c c}}{dt dt} + + {U u}_{c c} \frac{{dC c}_{c c}}{dt dt}

Wherein, C _c is the coupling capacitance between the electrode and the measured static body, the U _c is the total voltage between the electrode and the measured static body, and t is time.

5. The device according to claim 4, wherein the coupling capacitance between the electrodes and the measured electrostatic body is:

{C C}_{c c} = = {C C}_{00} + + {Σ Σ}_{j j = = 11}^{N N} {C C}_{j j} sin sin (({ω ω}_{j j} t t + + {α α}_{j j})),,

Wherein, C ₀ is the average value of the coupling capacitance between the electrode and the measured electrostatic body, N is a positive integer greater than or equal to 1, j is a positive integer greater than or equal to 1 and less than or equal to N, and C _j is the jth The amplitude of the capacitance change of the harmonic component, ω _j is the angular frequency of the capacitance change of the jth harmonic component, α _j is the phase of the capacitance change of the jth harmonic component, and t is time.

6. The device according to claim 5, wherein the voltage output by the voltage source is:

{U u}_{r r} = = {U u}_{dc dc} + + {Σ Σ}_{i i = = 11}^{M m} {U u}_{i i} sin sin (({ω ω}_{i i} t t + + {β β}_{i i})),,

The total voltage _Uc between the electrodes and the measured electrostatic body is the sum of the electrostatic voltage _Us carried by the measured electrostatic body and the voltage _Ur output by the voltage source;

Among them, U _dc DC voltage, M is a positive integer greater than or equal to 1, i is a positive integer greater than or equal to 1 and less than or equal to M, U _i is the voltage change amplitude of the i-th harmonic component, ω _i is the i-th harmonic component The angular frequency of the voltage change of the harmonic component, β _i is the voltage phase of the i-th harmonic component, and t is the time.

7. The device according to claim 6, characterized in that, the j current component amplitude is the current component amplitude with an angular frequency of ω _j , and the j+i current component amplitude is an angular frequency of ω _j + The amplitude of the current component of ω _i , the amplitude of the jith current component is the amplitude of the current component whose angular frequency is ω _j -ω _i , and the amplitude of the current component of the ij order is the amplitude of the current component of ω _i -ω _j .

8. The device according to claim 7, wherein the magnitude of the j current component is:

I ₀ =C _j ω _j (U _s +U _dc );

The amplitude of the j+i times current component is:

{I I}_{11} = = \frac{11}{22} {C C}_{j j} {U u}_{i i} (({ω ω}_{j j} + + {ω ω}_{i i}));;

The magnitude of the j-i or i-j current component is:

{I I}_{22} = = \frac{11}{22} {C C}_{j j} {U u}_{i i} | | {ω ω}_{j j} - - {ω ω}_{i i} | | . .

9. The device according to claim 8, wherein the electrostatic voltage amplitude and electrostatic voltage polarity of the electrostatic body under test are obtained according to the amplitude of the extracted current component, specifically:

When _Udc is greater than or equal to 0, if the j current component amplitude I increases with the increase of _Udc , then the electrostatic voltage carried by the measured electrostatic body is positive, and the electrostatic voltage amplitude _is :

{U u}_{sam sam} = = \frac{(({ω ω}_{j j} + + {ω ω}_{i i})) {I I}_{00}}{22 {ω ω}_{j j} {I I}_{11}} {U u}_{i i} - - {U u}_{dc dc},,

or,

{U u}_{sam sam} = = \frac{| | {ω ω}_{j j} - - {ω ω}_{i i} | | {I I}_{00}}{22 {ω ω}_{j j} {I I}_{22}} {U u}_{i i} - - {U u}_{dc dc};;

When _Udc is greater than or equal to 0, if the j current component amplitude _I0 decreases with the increase of _Udc , the electrostatic voltage carried by the measured electrostatic body is negative, and the electrostatic voltage amplitude is:

{U u}_{sam sam} = = \frac{(({ω ω}_{j j} + + {ω ω}_{i i})) {I I}_{00}}{22 {ω ω}_{j j} {I I}_{11}} {U u}_{i i} + + {U u}_{dc dc},,

or,

{U u}_{sam sam} = = \frac{| | {ω ω}_{j j} - - {ω ω}_{i i} | | {I I}_{00}}{22 {ω ω}_{j j} {I I}_{22}} {U u}_{i i} + + {U u}_{dc dc};;

When _Udc is less than 0, if the j current component amplitude I increases with the _decrease of _Udc , then the electrostatic voltage carried by the measured electrostatic body is negative, and the electrostatic voltage amplitude is:

{U u}_{sam sam} = = \frac{(({ω ω}_{j j} + + {ω ω}_{i i})) {I I}_{00}}{22 {ω ω}_{j j} {I I}_{11}} {U u}_{i i} - - | | {U u}_{dc dc} | |,,

or,

{U u}_{sam sam} = = \frac{| | {ω ω}_{j j} - - {ω ω}_{i i} | | {I I}_{00}}{22 {ω ω}_{j j} {I I}_{22}} {U u}_{i i} - - | | {U u}_{dc dc} | |;;

When _Udc is less than 0, if the j current component amplitude _I0 decreases with the reduction of _Udc , the electrostatic voltage carried by the measured electrostatic body is positive, and the electrostatic voltage amplitude is:

{U u}_{sam sam} = = \frac{(({ω ω}_{j j} + + {ω ω}_{i i})) {I I}_{00}}{22 {ω ω}_{j j} {I I}_{11}} {U u}_{i i} + + | | {U u}_{dc dc} | |,,

or,

{U u}_{sam sam} = = \frac{| | {ω ω}_{j j} - - {ω ω}_{i i} | | {I I}_{00}}{22 {ω ω}_{j j} {I I}_{22}} {U u}_{i i} + + | | {U u}_{dc dc} | | . .

10. A method for measuring electrostatic voltage, characterized in that it is applied to an electrostatic voltage measuring device comprising electrodes, vibrators, voltage sources, current sampling devices and processors, comprising:

The voltage source outputs the superimposed voltage of AC and DC to the electrostatic body under test;

The processor controls the vibration of the vibrator to drive the electrode to vibrate, wherein the electrode is arranged close to the measured static body, and the coupling capacitance between the electrode and the measured static body is due to the electrode The vibration alternates;

The current sampling device samples the current coupled by the electrostatic body under test through the electrodes to obtain a sampling current, and sends a sampling current signal including the sampling current to the processor;