CN102645739A - Phase microscopic device for transmission type samples and phase microscopic method - Google Patents

Abstract

The invention discloses a phase microscopic device for transmission type samples and a phase microscopic method. Based on a coaxial holographic light path, an amplified real image of a transmission type object, after being scanned by using a small hole, is taken as object light, scattering spots are formed on a target surface of a detector at a distance and interfered with plane waves in the same direction, the light intensity distributions formed when the scattering spots exist separately and the scattering spots are interfered with reference light are respectively recorded when the small hole is located at different positions, meanwhile, a situation that the reference light is not changed is ensured, and the light intensity distribution of the reference light is recorded once. A reproductive image (including amplitude and phase) with a size far larger than the size of the target surface of the detector is obtained in a mode of carrying out an iterative operation by using a computer. A reproductive image produced in the invention not only has the interference of zero-order images and conjugate images, but also can carry out phase microscopic imaging on a transmission type sample with a size far larger than the size of the target surface of the detector because a mode of small-hole scanning and prevention is adopted; and because of the introduction of the reference light, compared with a common iterative algorithm, the convergence speed is faster.

Description

Transmission-type sample phase place microscope equipment and phase place microscopic method

Technical field

The present invention relates to the imaging and the phase measurement of transmission-type sample, particularly a kind of transmission-type sample phase place microscope equipment and phase place microscopic method.

Background technology

Because the image that microscope obtained is a combination that focuses on picture and other defocused image clearly often, in order farthest to utilize microscopical resolution characteristic, need sample be made very thin section; But along with the sample attenuation; Light transmission has tangible enhancing, and the contrast of the image that simple microscope observed will decrease simultaneously, after sample is thinned to a certain degree; In the whole visual field that basic a slice is even, be difficult to observe the detailed structure of object.The Ze Nike phasecontrast microscope has solved the observation problem of phase object and has promoted the progress of related science to a great extent.Though phasecontrast microscope has solved the observation problem of phase object, for the field that need accurately measure phase place, the phase contrast micro-imaging technique is then powerless, because the image that is observed is not real light field PHASE DISTRIBUTION on mathematics.

At present really can have only this technology of digital hologram to what phase object carried out the precise phase imaging; But the shortcoming of this technology is the existence of zero order light and conjugate image has occupied the very big visual field of reconstructed image; Simultaneously can only utilize 1/4th of CCD bandwidth, though phase-shifting technique can address this problem in theory, its structure is quite complicated; And owing to thing light scattering spot intensity is that zero place is difficult to utilize phase-shifting technique to carry out phase calculation, and often be easy to generate severe noise.

Coherent diffraction imaging (Coherent Diffraction Imaging; Abbreviating CDI as) algorithm is a kind of method that directly from the scattering spot intensity of light field, obtains the phase information of sample; It is a kind of ' reconstruction ' method of directly approaching target one by one with alternative manner; This method was proposed by people such as Hoppe before and after 1970, after improving of people such as Fienup progressively grows up (referring to J.R.Fienup.Phase retrieval algorithms:a comparison [J], Appl.Opt.; 1982,21 (15): 2758～2769).This method is, places the eclipser that space distribution with holes is known on the back surface near sample, with the coherent source irradiating object and make object have only a fraction of light transmission notion aperture by the CCD record at place separated by a distance.The CDI algorithm is following:

Suppose that the light intensity that CCD writes down is I, then corresponding process of reconstruction is:

(a) at first give an O of conjecture value arbitrarily of sample (r);

(b) utilize fresnel diffraction to calculate its COMPLEX AMPLITUDE G (x) when small holes arrives CCD;

(c) keep the position of G (x) mutually constant, but, obtain a G ' after the renewal (x) with its amplitude of square root sqrt (I) amplitude replacement of the light field I of actual measurement;

(d) utilize once more fresnel diffraction calculate G ' (x) backpropagation return on the object plane complex amplitude O ' (r);

(e) make O ' (r) value outside light hole be forced zero, repeating step (b)～(d) is rebuild the inner transmission function that divides object that portals then.

The CDI algorithm has simple in structure; Can reach the resolution of diffraction limit in theory; But it is isolated objects that this formation method requires sample; Simultaneously its convolution that can not distinguish out object self and the conjugation of himself and self and other function makes up in theory, often is difficult to obtain desirable reconstructed image for complex objects a little, has greatly limited its range of application.

Usually face three picture overlap problems in the digital hologram, especially in in-line holographic.The reason that produces mainly is the restriction of the spatial resolution of detecting element CCD; The angle of thing light and reference light often is limited in about 2 °-3 °; When reproducing through hologram; The real image, conjugate image and the zero-order term that reproduce tend to overlap, and zero-order term intensity is often greater than the intensity of other two pictures.

Therefore aspect precise phase imaging and measurement, diffraction imaging method (CDI) and digital hologram method all also face a lot of problems at present.

Summary of the invention

The objective of the invention is for solving the deficiency of above-mentioned prior art; A kind of transmission-type sample phase place microscope equipment and phase place microscopic method are proposed; These apparatus and method merge the technical advantage of digital hologram and diffraction imaging method; Avoid the existing issue in present Digital Holography and the CDI technology, removed zero order light and conjugate image, can carry out phase imaging to sample easily.

Technical solution of the present invention is following:

A kind of transmission-type sample phase place microscope equipment; Characteristics are: this device is made up of coherent source, beam splitter, first catoptron, first baffle plate, second baffle, first spatial filter, first lens, testing sample, aperture, real image, prism, detector, computing machine, imaging lens group, second spatial filter, second lens and second catoptron, and the position of above-mentioned component concerns as follows:

The light that coherent source sends is divided into transmitted light beam and folded light beam through beam splitter; Described transmitted light beam becomes directional light light as a reference after described second mirror reflects through second spatial filter and second lens; Described folded light beam becomes directional light and is radiated on the transmission-type testing sample as illumination light behind first catoptron, first spatial filter and first lens; Become the real image of amplification in a distance through imaging lens group through the thing light that should see through testing sample; The aperture known with space distribution at this real image place scans in the plane perpendicular to the thing optical propagation direction; Emergent light after described aperture scanning is along same optical axis direction propagation and as thing light light wave, and this thing light light wave and reference light are propagated along equidirectional after the overcoupling prism-coupled, and is distributed by detector record hot spot; Described aperture by computer controlled built in plane (x perpendicular to thing light optical axis; Y) carry out in the plane line by line or by column scan, the described detector record hot spot input computing machine that distributes is stored, and first baffle plate and second baffle conduct respectively are positioned at the switch of the light path of described transmitted light beam and folded light beam.

Utilize the phase place microscopic method of above-mentioned transmission-type sample phase place microscope equipment, this method comprises the following steps:

(1) data recording: the computer control aperture is lined by line scan to the real image after amplifying; The capable j row of i place in scanning process, the light distribution H of the interference pattern when recording illumination light and reference light with detector through controlling first baffle plate and second baffle _{I, j}Diffractional field distribution I when only illumination light being arranged _{I, j}Light distribution R when record once only has reference light; Wherein i is the positive integer of 1～a, and j is the positive integer of 1～b, and a, b represent total line number and total columns of aperture scan matrix respectively; All data of described detector record deposit described computing machine in;

(2) the phase place micro-image data is handled:

Described computing machine at first provides a conjecture value guess at random initial value as image COMPLEX AMPLITUDE obj to the image complex amplitude, promptly thinks initial image COMPLEX AMPLITUDE obj=guess, and

guess＝E*rand(m，n)*exp(i*rand(m，n)*π)，

Wherein: E is an amplitude, and (m n) is the function that produces the random number of the capable n row of m to rand; Form with matrix in computing machine exists, and matrix size is by the decision of factors such as the scanning times of detector target surface resolution, number of pixels, aperture and size, detector matrix be expressed as p capable * the q row; The each moving step length of aperture is l, and by p capable * its transmittance functions of matrix representation of q row, the light transmission part is 1; Lightproof part is 0, and the movement matrix of diaphragm be a capable * b row, obj be m capable * the n row; M=p+ (a-1) * l wherein, n=q+ (b-1) * l brings in constant renewal in obj the logical light part at place, position according to the scanning sequencing of aperture; The transmitance of aperture is used has only 0 and 1 screen function cir to represent, and uses identical scanning aperture, therefore identical at the screen function cir of all positions; Aperture scanning position (i, the obj step of updating of j) locating is:

(a) according to the light wave diffraction principle calculate object wave see through aperture scanning position (i, the communication process of j) locating:

At first need respective apertures diaphragm (9) position (i; J) locate to get the p of obj capable * q is listed as as sample real image (10) outgoing wave function; 1+ (i-1) the * l that is obj is capable capable to p+ (i-1) * l; 1+ (j-1) * l is listed as q+ (j-1) * l row, and the transmittance function matrix cir that is multiplied by aperture (9) simultaneously is exactly the outgoing wave function (14) under precondition, is expressed as obj _{I, j}If sample place Z=0 place (x, y) the emergent light distribution of amplitudes on plane is E (x, y, 0), Z=L be COMPLEX AMPLITUDE that detector (12) is located be E (x, y, L):

$E(x,y,L)=\underset{\&infin;}{\&Integral;\&Integral;}A(\frac{\mathrm{\&alpha;}}{\mathrm{\&lambda;}},\frac{\mathrm{\&beta;}}{\mathrm{\&lambda;}},0)\exp \left(\mathrm{<figure-callout\; id="2"\; label="i"\; filenames="HDA0000145037100000011.png"\; state="\{\{state\}\}">i</figure-callout>}\frac{2\mathrm{\&pi;}}{\mathrm{\&lambda;}}\sqrt{1-{\mathrm{\&alpha;}}^2-{\mathrm{\&beta;}}^2}L\right)\exp \left[\mathrm{<figure-callout\; id="2"\; label="i"\; filenames="HDA0000145037100000011.png"\; state="\{\{state\}\}">i</figure-callout>}2\mathrm{\&pi;}(\frac{\mathrm{\&alpha;}}{\mathrm{\&lambda;}}x+\frac{\mathrm{\&beta;}}{\mathrm{\&lambda;}}y)\right]d\frac{\mathrm{\&alpha;}}{\mathrm{\&lambda;}}d\frac{\mathrm{\&beta;}}{\mathrm{\&lambda;}}$

Wherein:

is the E (x of Z=0 place; Y; 0) angular spectrum, λ is the illumination light wavelength;

Calculate the COMPLEX AMPLITUDE E at detector place this moment _{I, j}=abs (E _{I, j}) exp (i φ _{I, j}), keep its phase invariant also with described diffractional field distribution I _{I, j}Square root sqrt (I _{I, j}) replace its amplitude to become E ' _{I, j}=sqrt (I _{I, j}) exp (i φ _{I, j}); Calculate the COMPLEX AMPLITUDE obj ' that the aperture place is gone back in its reverse propagation again _{I, j}, according to the transmittance function of aperture here the outer value of light hole is forced to zero and obtains new obj ' _{I, j}

(b) obj ' after utilization is upgraded _{I, j}Situation when it exists with reference light simultaneously as the calculation of thing photometry; Because the reference light that uses is plane wave; Its phase place is a constant, and amplitude is sqrt (R), so reference light is that amplitude is sqrt (R); Phase place is the plane wave of constant 0, so the COMPLEX AMPLITUDE at detector place does when thing light and reference light exist simultaneously

And with sqrt (H _{I, j}) replace its amplitude and phase place remains unchanged, obtain new

According to the complex amplitude superposition principle, the thing light at detector place distributes can use G ' _{I, j}-sqrt (R) calculates, with G ' _{I, j}-sqrt (R) locates to obtain obj against propagating into aperture (9) " _{I, j}While obj _{I, j}In the light transmission part of aperture with obj " _{I, j}Replace obj _{I, j}The constant sample outgoing wave COMPLEX AMPLITUDE that obtains this calculating of other parts be obj " ' _{I, j}:

obj″′ _i，j＝obj _i，j*～cir+obj″ _i，j*cir，

Wherein :～cir is the inversion operation of aperture transmittance function matrix, and promptly 0 becomes 1,1 and becomes 0; Use obj again " ' _{I, j}Replace the capable q column matrix of corresponding with it p among the obj, obj is once upgraded in the distribution that aperture (9) is located;

(c) repeating step (a) and (b) calculating (i, j+1) sample outgoing wave COMPLEX AMPLITUDE is obj " ' _{I, j+1}, all upgrade completion once in order until the obj at all aperture position places;

(d) computational accuracy function S SE and judging:

When SSE is close to 0, when perhaps reaching accuracy requirement, get into step (e), otherwise, begin repeating step (a)～(d) from first aperture position again;

(e) finish; The obj that finally obtains is that the amplitude that deducts illumination light (16) of the COMPLEX AMPLITUDE of sample real image (10) is the illu amplitude transmittance function that is sample (8) and phase place for the phase change value of illumination light (16) after through sample (8), has promptly realized a position phase micrometering.

The computing method of described precision function S SE are following:

If the thing light light distribution of CCD place record is by matrix I _{I, j}Expression, and reproduce light distribution that wave function propagates into the CCD place accordingly by matrix E _{I, j}Expression, then

I=1 wherein, 2..., j=1,2....

Technique effect of the present invention is following:

The present invention is a kind of method of utilizing coaxial optical interference circuit to realize transmission-type phase place micro-imaging; Overcome through the mode of introducing the scanning of coaxial interferogram and aperture that speed of convergence in the CDI algorithm is slow, to require sample be the shortcoming that isolated simple objects and simple microscope are difficult to accurate Measurement Phase information; Be the iterative feedback algorithm of successive approximation and the spatial domain ways to restrain of aperture owing to what use simultaneously, the three picture overlap problems that digital hologram usually faces in imaging process, can not occur;

Aperture scanning of the present invention can be extended to the sample scope of picture again; Make full use of the resolution of detector; The high more imaging precision of detector resolution is high more simultaneously; Consider the amplification of lens combination simultaneously, can realize having wide applications much larger than the micro-imaging of detector target surface size sample.

Description of drawings

Fig. 1 is the device index path that the present invention realizes transmission-type phase place micro-imaging.

Fig. 2 is that the present invention carries out in the image wave function process of reconstruction scanning holes at (i, j) the computation process process flow diagram of position.

1. arrive among the figure and be that 7. execution sequence, arrow indication are to carry out direction.

Embodiment

Below in conjunction with embodiment and accompanying drawing the present invention is described further, but should limit protection scope of the present invention with this.

See also Fig. 1 earlier, Fig. 1 is that the present invention utilizes coaxial optical interference circuit to realize transmission-type phase place microscopic imaging device index path.Constitute by coherent source 1, beam splitter 2, first catoptron 3, first baffle plate 4, second baffle 5, first spatial filter 6, first lens 7, testing sample 8, aperture 9, real image 10, prism 11, detector 12, computing machine 13, imaging lens group 17, second spatial filter 18, second lens 19 and second catoptron 20 by the visible transmission-type sample phase place microscope equipment of the present invention of figure, the position relation of above-mentioned component as follows:

The light that coherent source 1 sends is divided into transmitted light beam and folded light beam through beam splitter 2; Described transmitted light beam becomes directional light light 15 as a reference after 20 reflections of described second catoptron through second spatial filter 18 and second lens 19; Described folded light beam becomes directional light and is radiated on the transmission-type testing sample 8 as illumination light 16 behind first catoptron 3, first spatial filter 6 and first lens 7; Become the real image 10 of amplification in a distance through imaging lens group 17 through the thing light that should see through testing sample 8; The aperture 9 known with space distribution at these real image 10 places scans in the plane perpendicular to the thing optical propagation direction; Emergent light after described aperture 9 scannings is along same optical axis direction propagation and as thing light wave 14; This thing light wave 14 is propagated along equidirectional after 11 couplings of overcoupling prism with reference light 15; And distribute by detector 12 record hot spots, described aperture 9 is controlled at plane perpendicular to thing light optical axis by computing machine 13, and (x y) carries out in the plane line by line or by column scan; Described detector 12 record hot spots distribution input computing machines 13 are stored, and first baffle plate 4 and second baffle 5 are respectively as the switch that is positioned at the light path of described transmitted light beam and folded light beam.

That utilizes above-mentioned transmission-type sample phase place microscope equipment carries out transmission-type sample phase place microscopic method, and this method comprises the following steps:

(1) data recording: the real image 10 after 9 pairs of amplifications of computing machine 13 control apertures scans line by line; The capable j row of i place in scanning process, the light distribution H of the interference pattern when recording illumination light 16 with reference light 15 with second baffle 5 usefulness detectors 12 through controlling first baffle plate 4 _{I, j}Diffractional field distribution I when only illumination light 16 being arranged _{I, j}Light distribution R when record once only has reference light 15; Wherein i is the positive integer of 1～a, and j is the positive integer of 1～b, and a, b represent total line number and total columns of aperture 9 scan matrixs respectively; All data of described detector (12) record deposit described computing machine 13 in;

(2) phase place micro-image data disposal route:

Described computing machine 13 at first provides a conjecture value guess at random initial value as image COMPLEX AMPLITUDE obj to the image complex amplitude, promptly thinks initial image COMPLEX AMPLITUDE obj=guess:

guess＝E*rand(m，n)*exp(i*rand(m，n)*π)，

Wherein: E is an amplitude, and (m n) is the function that produces the random number of the capable n row of m to rand; Form with matrix in computing machine exists, and matrix size is by the decision of factors such as the scanning times of detector 12 target surface resolution, number of pixels, aperture 9 and size, detector matrix be expressed as p capable * the q row; Aperture 9 each moving step lengths are l, and by p capable * its transmittance functions of matrix representation of q row, the light transmission part is 1; Lightproof part is 0; And the movement matrix of diaphragm be a capable * b row, obj be m capable * the n row, wherein

M=p+ (a-1) * l; N=q+ (b-1) * l brings in constant renewal in obj the logical light part at place, position according to the scanning sequencing of aperture 9, and the transmitance of aperture 9 is with having only 0 and 1 screen function cir to represent; And use identical scanning aperture 9; Therefore identical at the screen function cir of all positions, aperture 9 scanning position (i, the obj step of updating of j) locating is:

(a) according to the light wave diffraction principle calculate object wave see through aperture 9 scanning position (i, the communication process of j) locating:

At first need respective apertures diaphragm 9 position (i; J) locate to get the p of obj capable * q is listed as as sample real image 10 outgoing wave functions; 1+ (i-1) the * l that is obj is capable capable to p+ (i-1) * l; 1+ (j-1) * l is listed as q+ (j-1) * l row, and the transmittance function matrix cir that is multiplied by aperture 9 simultaneously is exactly the outgoing wave function 14 under precondition, is expressed as obj _{I, j}If sample place Z=0 place (x, y) the emergent light distribution of amplitudes on plane is E (x, y, 0), Z=L be the COMPLEX AMPLITUDE at detector 12 places be E (x, y, L):

$E(x,y,L)=\underset{\&infin;}{\&Integral;\&Integral;}A(\frac{\mathrm{\&alpha;}}{\mathrm{\&lambda;}},\frac{\mathrm{\&beta;}}{\mathrm{\&lambda;}},0)\exp \left(\mathrm{<figure-callout\; id="2"\; label="i"\; filenames="HDA0000145037100000011.png"\; state="\{\{state\}\}">i</figure-callout>}\frac{2\mathrm{\&pi;}}{\mathrm{\&lambda;}}\sqrt{1-{\mathrm{\&alpha;}}^2-{\mathrm{\&beta;}}^2}L\right)\exp \left[\mathrm{<figure-callout\; id="2"\; label="i"\; filenames="HDA0000145037100000011.png"\; state="\{\{state\}\}">i</figure-callout>}2\mathrm{\&pi;}(\frac{\mathrm{\&alpha;}}{\mathrm{\&lambda;}}x+\frac{\mathrm{\&beta;}}{\mathrm{\&lambda;}}y)\right]d\frac{\mathrm{\&alpha;}}{\mathrm{\&lambda;}}d\frac{\mathrm{\&beta;}}{\mathrm{\&lambda;}}$

Wherein:

is the E (x of Z=0 place; Y; 0) angular spectrum, λ is the illumination light wavelength;

Calculate the COMPLEX AMPLITUDE E at detector 12 places this moment _{I, j}=abs (E _{I, j}) exp (i φ _{I, j}), keep its phase invariant also with described diffractional field distribution I _{I, j}Square root sqrt (I _{I, j}) replace its amplitude to become E ' _{I, j}=sqrt (I _{I, j}) exp (i φ _{I, j}); Calculate the COMPLEX AMPLITUDE obj ' that aperture 9 places are gone back in its reverse propagation again _{I, j}, according to the transmittance function of aperture 9 here the outer value of light hole is forced to zero and obtains new ob ' _{I, j}

(b) obj ' after utilization is upgraded _{I, j}Situation when it exists with reference light 15 simultaneously as 14 calculating of thing light; Because the reference light 15 that uses is plane wave; Its phase place is a constant, and amplitude is sqrt (R), so reference light is that amplitude is sqrt (R); Phase place is the plane wave of constant 0, so the COMPLEX AMPLITUDE at detector 12 places does when thing light 14 exists with reference light 15 simultaneously

And with sqrt (H _{I, j}) replace its amplitude and phase place remains unchanged, obtain new

According to the complex amplitude superposition principle, the thing light at detector 12 places distributes can use G ' _{I, j}-sqrt (R) calculates, with G ' _{I, j}-sqrt (R) obtains obj against propagating into aperture 9 places " _{I, j}While obj _{I, j}In the light transmission part of aperture 9 with obj " _{I, j}Replace obj _{I, j}The constant sample outgoing wave COMPLEX AMPLITUDE that obtains this calculating of other parts be obj " ' _{I, j}:

obj″′ _i，j＝obj _i，j*～cir+obj″ _i，j*cir，

Wherein :～cir is the inversion operation of aperture transmittance function matrix, and promptly 0 becomes 1,1 and becomes 0; Use obj again " ' _{I, j}Replace the capable q column matrix of corresponding with it p among the obj, obj is once upgraded in the distribution at aperture 9 places;

(c) repeating step (a) and (b) calculating (i, j+1) sample outgoing wave COMPLEX AMPLITUDE is obj " ' _{I, j+1}, all upgrade completion once in order until the obj at all aperture position places;

(d) computational accuracy function S SE and judging:

When SSE is close to 0, when perhaps reaching accuracy requirement, get into step (e), otherwise, begin repeating step (a)～(d) from first aperture position again;

(e) finish; The obj that finally obtains is that the amplitude that deducts illumination light (16) of the COMPLEX AMPLITUDE of sample real image (10) is the illu amplitude transmittance function

that is sample (8) and phase place

for the phase change value of illumination light (16) after through sample (8), has promptly realized a position phase micrometering.

The computing method of described precision function S SE are following:

If the thing light light distribution of CCD place record is by matrix I _{I, j}Expression, and reproduce light distribution that wave function propagates into the CCD place accordingly by matrix E _{I, j}Expression, then

I=1 wherein, 2..., j=1,2....

Be the coherent source of 632.8nm for wavelength in the embodiment of the invention.

Said sample 8 is a transmission-type, will carry structures of samples information after illumination light 16 sees through sample, is the plant roots and stems slices across in the present embodiment.

Said lens or lens combination 17 fundamental purposes increase enlargement factor for sample 8 emergent lights are amplified in advance, and enlargement factor is 1.2 times among this embodiment.

Said aperture 9 is the known light hole in border, can have any shape, and size is the circular hole of diameter 1mm among this embodiment by detector target surface size and the decision of diffraction spot size.

Said detector 12 is the light intensity detecting element, is in order to write down light distribution, is ccd detector among this embodiment, and resolution is 582pixel * 782pixel, and each pixel length of side is 8.3 μ m, resolution is high more form images accurate more.

Said control computer 13 purposes realize the controlled scanning to the sample real image 10 after amplifying for controlling moving of printing opacity aperture 9 and detector 12 through accurately controlling moving of motorized precision translation stage (precision is 0.001mm among this embodiment).

The course of work of present embodiment is:

(1) the DATA REASONING process is following:

For ease of calculating; The step-length of printing opacity aperture 9 scannings is preferably the integral multiple of the detector 12 pixel length of sides; Be 50 times of 8.3 μ m among this embodiment, be 0.415mm, overlapping enough sample sweep limits that guarantees are simultaneously partly arranged with the logical light between these adjacent two scanning holes.For reducing the translation stage error; Scan mode perhaps one turns back to starting point earlier after being listed as for scan delegation, moves on to the scanning of carrying out equidirectional behind next line or the next column again, among this embodiment; Line by line scan; Turn back to first row of this delegation after having scanned earlier, move to next line, carry out the scanning of equidirectional again.Be the resolution and the picture of imaging much larger than the sample of detector 12 target surface sizes that make full use of detector 12, aperture 9 carries out same moved further with detector 12;

In the process that 9 pairs of objects of aperture scan; Light distribution R when record only has reference light 15 is (because reference light 15 is constant in the scanning process; Only record once); (i, j) scanning position place are recorded in the hot spot distribution pattern under following two situation through adjustment light path first baffle plate, 4 first baffle plates 5 with detector 12:

The light distribution H of the interference pattern when illumination light 16 (thing light 14 is promptly arranged) and reference light 15 are arranged _{I, j}

Diffractional field distribution I when illumination light 16 (thing light 14 is promptly only arranged) is only arranged _{I, j}

Among this embodiment because scanning 10 * 10 times, so i=1,2...10, j=1,2...10, and to respective record result numbering and be stored in the middle of the computing machine.

(2) step of utilizing record data to recover:

At first the image complex amplitude is carried out the initial value of a conjecture value guess at random as image wave function obj, promptly (guess can be expressed as guess=E*rand (m, n) * exp (i*rand (m to obj=guess; N) * π); Wherein E is an amplitude, rand (m n) is the function that produces the random number of the capable n row of m); Form with matrix in computing machine exists, and matrix size is by the decision of factors such as the scanning times of detector 12 target surface resolution, number of pixels, aperture 9 and size.Among this embodiment; Detector 9, being CCD resolution is 582pixel * 782pixel, the step-length of the scanning of aperture 9 is 0.415mm; Be the length of CCD50 pixel; Simultaneously scanning times is 10 * 10 times, so the movement matrix of diaphragm 9 is 10 row * 10 row, the size of obj matrix is (582+50 * (10-1)) * (782+50 * (10-1)); Scanning sequencing according to aperture 9 is brought in constant renewal in obj the logical light part at place, position, and the transmitance of aperture 9 can be represented with the screen function cir that has only 0 and 1.

Recover to calculate according to following order then.

The obj step of updating that aperture 9 is located at scanning position (1,1) is:

(a) calculate object wave according to the light wave diffraction principle and see through the communication process that aperture 9 is located at scanning position (1,1).At first need respective apertures diaphragm 9 positions (1; 1) locates to get 582 of obj and go * 782 row as sample real image 10 outgoing wave functions; 1 row that is obj is to 582 row; 1 is listed as 782 row, and the transmittance function matrix that is multiplied by aperture 9 simultaneously is exactly the outgoing wave function 14 under precondition, can be expressed as obj _1,1, be in the process flow diagram step 1.; If sample place Z=0 place (x, y) the emergent light distribution of amplitudes on plane is E (x, y, 0), Z=L be the COMPLEX AMPLITUDE at detector 12 places be E (x, y, L):

$E(x,y,L)=\underset{\&infin;}{\&Integral;\&Integral;}A(\frac{\mathrm{\&alpha;}}{\mathrm{\&lambda;}},\frac{\mathrm{\&beta;}}{\mathrm{\&lambda;}},0)\exp \left(\mathrm{<figure-callout\; id="2"\; label="i"\; filenames="HDA0000145037100000011.png"\; state="\{\{state\}\}">i</figure-callout>}\frac{2\mathrm{\&pi;}}{\mathrm{\&lambda;}}\sqrt{1-{\mathrm{\&alpha;}}^2-{\mathrm{\&beta;}}^2}L\right)\exp \left[\mathrm{<figure-callout\; id="2"\; label="i"\; filenames="HDA0000145037100000011.png"\; state="\{\{state\}\}">i</figure-callout>}2\mathrm{\&pi;}(\frac{\mathrm{\&alpha;}}{\mathrm{\&lambda;}}x+\frac{\mathrm{\&beta;}}{\mathrm{\&lambda;}}y)\right]d\frac{\mathrm{\&alpha;}}{\mathrm{\&lambda;}}d\frac{\mathrm{\&beta;}}{\mathrm{\&lambda;}}$

Wherein:

is the E (x of Z=0 place; Y; 0) angular spectrum, λ is the illumination light wavelength.

Calculate the COMPLEX AMPLITUDE E at detector 12 places this moment _1,1=abs (E _1,1) exp (i φ _1,1), keep its phase invariant also with described diffractional field distribution I _1,1Sqrt (I _1,1) replace its amplitude to become E ' _1,1=sqrt (I _1,1) exp (i φ _1,1), this is that step is 2. in the process flow diagram; Calculate the COMPLEX AMPLITUDE obj ' that aperture 9 places are gone back in its reverse propagation again _1,1, according to the transmittance function of aperture 9 here the outer value of light hole is forced to zero and obtains new obj ' _1,1, this is that step is 3. in the process flow diagram;

(b) obj ' after utilization is upgraded _1,1Situation when it exists with reference light 15 simultaneously as 14 calculating of thing light; Because the reference light 15 that uses is plane wave; Its phase place is a constant, and amplitude is sqrt (R), and can be set at amplitude to reference light is sqrt (R); Phase place is the plane wave of constant 0, the COMPLEX AMPLITUDE at detector 12 places in the time of can calculating thing light 14 and exist simultaneously with reference light 15

And with sqrt (H _1,1) replace its amplitude and phase place remains unchanged, obtain new This is that step is 4. in the process flow diagram; According to the complex amplitude superposition principle, the thing light at detector 12 places distributes can use G _1,1-sqrt (R) calculates, with G _1,1-sqrt (R) obtains obj against propagating into aperture 9 places " _1,1, this be flow chart step 5.; While obj _1,1In the light transmission part of aperture 9 with obj " _1,1Replace obj _1,1Other parts constant, i.e. obj " ' _1,1=obj _1,1*～cir+obj " _1,1* cir, wherein～cir is the inversion operation of aperture transmittance function matrix, promptly 0 becomes 1,1 and becomes 0, and this is that step is 6. in the process flow diagram; Use obj again " ' _1,1Replace corresponding with it 582 row, 782 column matrix among the obj, this is that step is 7. in the process flow diagram; Obj is once upgraded in the distribution at aperture 9 places;

Through the obj that locates to calculate in (1, the 1) initial value as the image wave function, the obj step of updating that aperture 9 is located at scanning position (1,2) is:

(a) calculate object wave according to the light wave diffraction principle and see through the communication process that aperture 9 is located at scanning position (1,2).At first need respective apertures diaphragm 9 positions (1; 2) locate to get 582 of obj and go * 782 row as sample real image 10 outgoing wave functions; 1 row that is obj is to 582 row; 1+ (2-1) * 50 is listed as 782+ (2-1) * 50 row, and the transmittance function matrix that is multiplied by aperture 9 simultaneously is exactly the outgoing wave function 14 under precondition, can be expressed as obj _1,2, be in the process flow diagram step 1.; If sample place Z=0 place (x, y) the emergent light distribution of amplitudes on plane is E (x, y, 0), Z=L be the COMPLEX AMPLITUDE at detector 12 places be E (x, y, L):

$E(x,y,L)=\underset{\&infin;}{\&Integral;\&Integral;}A(\frac{\mathrm{\&alpha;}}{\mathrm{\&lambda;}},\frac{\mathrm{\&beta;}}{\mathrm{\&lambda;}},0)\exp \left(\mathrm{<figure-callout\; id="2"\; label="i"\; filenames="HDA0000145037100000011.png"\; state="\{\{state\}\}">i</figure-callout>}\frac{2\mathrm{\&pi;}}{\mathrm{\&lambda;}}\sqrt{1-{\mathrm{\&alpha;}}^2-{\mathrm{\&beta;}}^2}L\right)\exp \left[\mathrm{<figure-callout\; id="2"\; label="i"\; filenames="HDA0000145037100000011.png"\; state="\{\{state\}\}">i</figure-callout>}2\mathrm{\&pi;}(\frac{\mathrm{\&alpha;}}{\mathrm{\&lambda;}}x+\frac{\mathrm{\&beta;}}{\mathrm{\&lambda;}}y)\right]d\frac{\mathrm{\&alpha;}}{\mathrm{\&lambda;}}d\frac{\mathrm{\&beta;}}{\mathrm{\&lambda;}}$

Wherein:

is the E (x of Z=0 place; Y; 0) angular spectrum, λ is the illumination light wavelength.

Calculate the COMPLEX AMPLITUDE E at detector 12 places this moment _1,2=abs (E _1,2) exp (i φ _1,2), keep its phase invariant also with described diffractional field distribution I _1,2Sqrt (I _1,2) replace its amplitude to obtain E ' _1,2=sqrt (I _1,2) exp (i φ _1,2), this is that step is 2. in the process flow diagram; Calculate the COMPLEX AMPLITUDE obj ' that aperture 9 places are gone back in its reverse propagation again _1,2, according to the transmittance function of aperture 9 here the outer value of light hole is forced to zero and obtains new obj ' _1,2, this is that step is 3. in the process flow diagram.

(b) obj ' after utilization is upgraded _1,2Situation when it exists with reference light 15 simultaneously as 14 calculating of thing light; Because the reference light 15 that uses is plane wave; Its phase place is a constant, and amplitude is sqrt (R), and can be set at amplitude to reference light is sqrt (R); Phase place is the plane wave of constant 0, the COMPLEX AMPLITUDE at detector 12 places in the time of can calculating thing light 14 and exist simultaneously with reference light 15

And with sqrt (H _1,2) replace its amplitude and phase place remains unchanged, obtain

This be flow chart step 4.; According to the complex amplitude superposition principle, the thing light at detector 12 places distributes can use G ' _1,2-sqrt (R) calculates, with G ' _1,2-sqrt (R) obtains obj against propagating into aperture 9 places " _1,2, this be flow chart step 5.; While obj _1,2In the light transmission part of aperture 9 with obj " _1,2Replace obj _1,2Other parts constant, obtain the sample outgoing wave function COMPLEX AMPLITUDE obj of this calculating " ' _1,2, i.e. obj " ' _1,2=obj _1,2*～cir+obj " _1,2* cir, wherein～cir is the inversion operation of aperture transmittance function matrix, promptly 0 becomes 1,1 and becomes 0, this be flow chart step 6.; Use obj again " ' _1,2Replace corresponding with it 582 row, 782 column matrix among the obj, obj is once upgraded in the distribution at aperture 9 places, and this is that step is 7. in the process flow diagram;

Through scanning position (i, j-1) locating to upgrade the obj that obtains is initial value, aperture 9 scanning position (i, the obj step of updating of j) locating is:

(a) calculate object wave according to the light wave diffraction principle and see through aperture 9 in scanning position (i, the communication process of j) locating.At first need respective apertures diaphragm 9 position (i; J) locate to get the p of obj capable * q is listed as as sample real image 10 outgoing wave functions; 1+ (i-1) the * l that is obj is capable capable to p+ (i-1) * l; 1+ (j-1) * l is listed as q+ (j-1) * l row, and the transmittance function matrix cir that is multiplied by aperture 9 simultaneously is exactly the outgoing wave function 14 under precondition, can be expressed as obj _{I, j}, be in the process flow diagram step 1.; If sample place Z=0 place (x, y) the emergent light distribution of amplitudes on plane is E (x, y, 0), Z=L be the COMPLEX AMPLITUDE at detector 12 places be E (x, y, L):

$E(x,y,L)=\underset{\&infin;}{\&Integral;\&Integral;}A(\frac{\mathrm{\&alpha;}}{\mathrm{\&lambda;}},\frac{\mathrm{\&beta;}}{\mathrm{\&lambda;}},0)\exp \left(\mathrm{<figure-callout\; id="2"\; label="i"\; filenames="HDA0000145037100000011.png"\; state="\{\{state\}\}">i</figure-callout>}\frac{2\mathrm{\&pi;}}{\mathrm{\&lambda;}}\sqrt{1-{\mathrm{\&alpha;}}^2-{\mathrm{\&beta;}}^2}L\right)\exp \left[\mathrm{<figure-callout\; id="2"\; label="i"\; filenames="HDA0000145037100000011.png"\; state="\{\{state\}\}">i</figure-callout>}2\mathrm{\&pi;}(\frac{\mathrm{\&alpha;}}{\mathrm{\&lambda;}}x+\frac{\mathrm{\&beta;}}{\mathrm{\&lambda;}}y)\right]d\frac{\mathrm{\&alpha;}}{\mathrm{\&lambda;}}d\frac{\mathrm{\&beta;}}{\mathrm{\&lambda;}}$

Wherein: is the E (x of Z=0 place; Y; 0) angular spectrum, λ is the illumination light wavelength.

Calculate the COMPLEX AMPLITUDE E at detector 12 places this moment _{I, j}=abs (E _{I, j}) exp (i φ _{I, j}), keep its phase invariant also with described diffractional field distribution I _{I, j}Sqrt (I _{I, j}) replace its amplitude to become E ' _{I, j}=sqrt (I _{I, j}) exp (i φ _{I, j}), this is that step is 2. in the process flow diagram; Calculate the COMPLEX AMPLITUDE obj ' that aperture 9 places are gone back in its reverse propagation again _{I, j}, according to the transmittance function of aperture 9 here the outer value of light hole is forced to zero and obtains new obj ' _{I, j}, this is that step is 3. in the process flow diagram.

(b) obj ' after utilization is upgraded _{I, j}Situation when it exists with reference light 15 simultaneously as 14 calculating of thing light; Because the reference light 15 that uses is plane wave; Its phase place is a constant, and amplitude is sqrt (R), and can be set at amplitude to reference light is sqrt (R); Phase place is the plane wave of constant 0, the COMPLEX AMPLITUDE at detector 12 places in the time of can calculating thing light 14 and exist simultaneously with reference light 15

And with sqrt (H _{I, j}) replace its amplitude and phase place remains unchanged, obtain new

This be flow chart step 4.; According to the complex amplitude superposition principle, the thing light at detector 12 places distributes can use G ' _{I, j}-sqrt (R) calculates, with G ' _{I, j}-sqrt (R) obtains obj against propagating into aperture 9 places " _{I, j}, this is that step is 5. in the process flow diagram; While obj _{I, j}In the light transmission part of aperture 9 with obj " _{I, j}Replace obj _{I, j}The constant sample outgoing wave COMPLEX AMPLITUDE obj that obtains this calculating of other parts " ' _{I, j}, i.e. obj " ' _{I, j}=obj _{I, j}*～cir+obj " _{I, j}* cir, wherein～cir is the inversion operation of aperture transmittance function matrix, promptly 0 becomes 1,1 and becomes 0, and this is that step is 6. in the process flow diagram; Use obj again " ' _{I, j}Replace the capable q column matrix of corresponding with it p among the obj, obj is once upgraded in the distribution at aperture 9 places, and this is that step is 7. in the process flow diagram;

(10,9) to locate to upgrade the obj that obtains be initial value in the position, and the obj step of updating that aperture 9 is located at scanning position (10,10) is:

(a) calculate object wave according to the light wave diffraction principle and see through the communication process that aperture 9 is located at scanning position (10,10).At first need respective apertures diaphragm 9 positions (10; 10) locate to get 582 of objguess and go * 782 row as sample real image 10 outgoing wave functions; 1+ (10-1) * 50 row that are obj are to 582+ (10-1) * 50 row; 1+ (10-1) * 50 is listed as 782+ (10-1) * 50 row, and the transmittance function matrix that is multiplied by aperture 9 simultaneously is exactly the outgoing wave function 14 under precondition, can be expressed as obj _10,10, this be flow chart step 1.; If sample place Z=0 place (x, y) the emergent light distribution of amplitudes on plane is E (x, y, 0), Z=L be the COMPLEX AMPLITUDE at detector 12 places be E (x, y, L):

$E(x,y,L)=\underset{\&infin;}{\&Integral;\&Integral;}A(\frac{\mathrm{\&alpha;}}{\mathrm{\&lambda;}},\frac{\mathrm{\&beta;}}{\mathrm{\&lambda;}},0)\exp \left(\mathrm{<figure-callout\; id="2"\; label="i"\; filenames="HDA0000145037100000011.png"\; state="\{\{state\}\}">i</figure-callout>}\frac{2\mathrm{\&pi;}}{\mathrm{\&lambda;}}\sqrt{1-{\mathrm{\&alpha;}}^2-{\mathrm{\&beta;}}^2}L\right)\exp \left[\mathrm{<figure-callout\; id="2"\; label="i"\; filenames="HDA0000145037100000011.png"\; state="\{\{state\}\}">i</figure-callout>}2\mathrm{\&pi;}(\frac{\mathrm{\&alpha;}}{\mathrm{\&lambda;}}x+\frac{\mathrm{\&beta;}}{\mathrm{\&lambda;}}y)\right]d\frac{\mathrm{\&alpha;}}{\mathrm{\&lambda;}}d\frac{\mathrm{\&beta;}}{\mathrm{\&lambda;}}$

Wherein:

is the E (x of Z=0 place; Y; 0) angular spectrum, λ is the illumination light wavelength.

Calculate the COMPLEX AMPLITUDE E at detector 12 places this moment _10,10=abs (E _10,10) exp (i φ _10,10), keep its phase invariant also with described diffractional field distribution I _10,10Sqrt (I _10,10) replace its amplitude to obtain E ' _10,10=sqrt (I _10,10) exp (i φ _10,10) this is that step is 2. in the process flow diagram; Calculate the COMPLEX AMPLITUDE obj ' that aperture 9 places are gone back in its reverse propagation again _10,10, according to the transmittance function of aperture 9 here the outer value of light hole is forced to zero and obtains new obj ' _10,10, this is that step is 3. in the process flow diagram.

(b) obj ' after utilization is upgraded _10,10Situation when it exists with reference light 15 simultaneously as 14 calculating of thing light; Because the reference light 15 that uses is plane wave; Its phase place is a constant, and amplitude is sqrt (R), and can be set at amplitude to reference light is sqrt (R); Phase place is the plane wave of constant 0, the COMPLEX AMPLITUDE at detector 12 places in the time of can calculating thing light 14 and exist simultaneously with reference light 15

And with sqrt (H _10,10) replace its amplitude and phase place remains unchanged, obtain new

This be flow chart step 4.; According to the complex amplitude superposition principle, the thing light at detector 12 places distributes can use G _10,10-sqrt (R) calculates, with G _10,10-sqrt (R) obtains obj against propagating into aperture 9 places " _10,10, this is that step is 5. in the process flow diagram; While obj _10,10In the light transmission part of aperture 9 with obj " _10,10Replace obj _10,10The constant sample outgoing wave COMPLEX AMPLITUDE obj that obtains this calculating of other parts " ' _10,10, i.e. obj " ' _10,10=obj _10,10*～cir+obj " _10,10* cir, wherein～cir is the inversion operation of aperture transmittance function matrix, promptly 0 becomes 1,1 and becomes 0, and this is that step is 6. in the process flow diagram; Use obj again " ' _10,10Replace corresponding with it 582 row, 782 column matrix among the obj, obj is once upgraded in the distribution at aperture 9 places, and this is that step is 7. in the process flow diagram;

Begin the above process of repetition from first aperture 9 scanning positions then and perhaps meet the requirements of precision up to be close to 0 at all target area SSE.The computing method of SSE are following:

If the thing light light distribution of CCD place record is by matrix I _{I, j}Expression, and reproduce light distribution that wave function propagates into the CCD place accordingly by matrix E _{I, j}Expression, then I=1 wherein, 2..., j=1,2...

The obj that finally obtains is the COMPLEX AMPLITUDE of sample real image 10; According to the complex amplitude superposition principle; Its amplitude remove illumination light 16 (if its amplitude is illu) back for amplitude transmittance function

phase place

of sample 8 for illumination light 16 through the phase change value behind the samples 8, promptly realized a phase micrometering.

The present invention is a kind of new method of utilizing coaxial optical interference circuit to realize the transmission-type micro-imaging; Overcome through the mode of introducing the scanning of coaxial interferogram and aperture that speed of convergence in the CDI algorithm is slow, to require sample be the shortcoming that isolated simple objects and simple microscope are difficult to accurate Measurement Phase information; Be the iterative feedback algorithm of successive approximation and the spatial domain ways to restrain of aperture owing to what use simultaneously; The three picture overlap problems that digital hologram usually faces in imaging process, can not occur, and aperture scanning can be expanded imageable sample scope, makes full use of the resolution of detector; The high more imaging precision of detector resolution is high more simultaneously; Consider the amplification of lens combination simultaneously, can realize having wide applications much larger than the micro-imaging of detector target surface size sample.

Claims (3)

1. transmission-type sample phase place microscope equipment; Be characterised in that: this device is made up of coherent source (1), beam splitter (2), first catoptron (3), first baffle plate (4), second baffle (5), first spatial filter (6), first lens (7), testing sample (8), aperture (9), real image (10), coupling prism (11), detector (12), computing machine (13), imaging lens group (17), second spatial filter (18), second lens (19) and second catoptron (20), and the position of above-mentioned component concerns as follows:

The light that coherent source (1) sends is divided into transmitted light beam and folded light beam through beam splitter (2); Described transmitted light beam becomes directional light light (15) as a reference after described second catoptron (20) reflection through second spatial filter (18) and second lens (19); Described folded light beam becomes directional light and is radiated on the transmission-type testing sample (8) as illumination light (16) behind first catoptron (3), first spatial filter (6) and first lens (7); Become the real image (10) of amplification in a distance through imaging lens group (17) through the thing light that should see through testing sample (8); Locating the aperture known with space distribution (9) at this real image (10) scans in the plane perpendicular to the thing optical propagation direction; Emergent light after described aperture (9) scanning is along same optical axis direction propagation and as thing light light wave (14); This thing light light wave (14) and reference light (15) are propagated along equidirectional after overcoupling prism (11) coupling; And distribute by detector (12) record hot spot, described aperture (9) is controlled at plane perpendicular to thing light optical axis by computing machine (13), and (x y) carries out in the plane line by line or by column scan; Described detector (12) record hot spot distribution input computing machine (13) is stored, and first baffle plate (4) and second baffle (5) are respectively as the switch that is positioned at the light path of described transmitted light beam and folded light beam.

2. utilize the phase place microscopic method of the described transmission-type sample of claim 1 phase place microscope equipment, be characterised in that this method comprises the following steps:

(1) data recording: computing machine (13) control aperture (9) is lined by line scan to the real image (10) after amplifying; The capable j row of i place in scanning process, the light distribution H of the interference pattern when recording illumination light (16) and reference light (15) with detector (12) through controlling first baffle plate (4) and second baffle (5) _{I, j}Diffractional field distribution I when illumination light (16) is only arranged _{I, j}Light distribution R when record once only has reference light (15); Wherein i is the positive integer of 1～a, and j is the positive integer of 1～b, and a, b represent total line number and total columns of aperture (9) scan matrix respectively; All data of described detector (12) record deposit described computing machine (13) in;

(2) the phase place micro-image data is handled:

Described computing machine (13) at first provides a conjecture value guess at random initial value as image COMPLEX AMPLITUDE obj to the image complex amplitude; Promptly think initial image COMPLEX AMPLITUDE obj=guess and guess=E*rand (m, n) * exp (i*rand (m; N) * π)

Wherein: E is an amplitude, and (m n) is the function that produces the random number of the capable n row of m to rand; Form with matrix in computing machine exists, and matrix size is by the decision of factors such as the scanning times of detector (12) target surface resolution, number of pixels, aperture (9) and size, detector matrix be expressed as p capable * the q row; The each moving step length of aperture (9) is l, and by p capable * its transmittance functions of matrix representation of q row, the light transmission part is 1; Lightproof part is 0, and the movement matrix of diaphragm be a capable * b row, obj be m capable * the n row; M=p+ (a-1) * l wherein, n=q+ (b-1) * l brings in constant renewal in obj the logical light part at place, position according to the scanning sequencing of aperture (9); The transmitance of aperture (9) is used has only 0 and 1 screen function cir to represent, and uses identical scanning aperture (9), therefore identical at the screen function cir of all positions; Aperture (9) scanning position (i, the obj step of updating of j) locating is:

(a) according to the light wave diffraction principle calculate object wave see through aperture (9) scanning position (i, the communication process of j) locating:

At first need respective apertures diaphragm (9) position (i; J) locate to get the p of obj capable * q is listed as as sample real image (10) outgoing wave function; 1+ (i-1) the * l that is obj is capable capable to p+ (i-1) * l; 1+ (j-1) * l is listed as q+ (j-1) * l row, and the transmittance function matrix cir that is multiplied by aperture (9) simultaneously is exactly the outgoing wave function (14) under precondition, is expressed as obj _{I, j}If sample place Z=0 place (x, y) the emergent light distribution of amplitudes on plane is E (x, y, 0), Z=L be COMPLEX AMPLITUDE that detector (12) is located be E (x, y, L):

$E(x,y,L)=\underset{\&infin;}{\&Integral;\&Integral;}A(\frac{\mathrm{\&alpha;}}{\mathrm{\&lambda;}},\frac{\mathrm{\&beta;}}{\mathrm{\&lambda;}},0)\exp \left(i\frac{2\mathrm{\&pi;}}{\mathrm{\&lambda;}}\sqrt{1-{\mathrm{\&alpha;}}^2-{\mathrm{\&beta;}}^2}L\right)\exp \left[i2\mathrm{\&pi;}(\frac{\mathrm{\&alpha;}}{\mathrm{\&lambda;}}x+\frac{\mathrm{\&beta;}}{\mathrm{\&lambda;}}y)\right]d\frac{\mathrm{\&alpha;}}{\mathrm{\&lambda;}}d\frac{\mathrm{\&beta;}}{\mathrm{\&lambda;}}$

Wherein:

is the E (x of Z=0 place; Y; 0) angular spectrum, λ is the illumination light wavelength;

Calculate the COMPLEX AMPLITUDE E that detector this moment (12) is located _{I, j}=abs (E _{I, j}) exp (i φ _{I, j}), keep its phase invariant also with described diffractional field distribution I _{I, j}Square root sqrt (I _{I, j}) replace its amplitude to become E ' _{I, j}=sqrt (I _{I, j}) exp (i φ _{I, j}); Calculate its reverse propagation again and return the COMPLEX AMPLITUDE obj ' that aperture (9) is located _{I, j}, according to the transmittance function of aperture (9) here the outer value of light hole is forced to zero and obtains new obj ' _{I, j}

(b) obj ' after utilization is upgraded _{I, j}Calculate itself and the situation of reference light (15) when existing simultaneously as thing light (14); Because the reference light (15) that uses is plane wave; Its phase place is a constant, and amplitude is sqrt (R), so reference light is that amplitude is sqrt (R); Phase place is the plane wave of constant 0, so thing light (14) and reference light (15) COMPLEX AMPLITUDE that detector (12) is located when existing simultaneously do

And with sqrt (H _{I, j}) replace its amplitude and phase place remains unchanged, obtain new

According to the complex amplitude superposition principle, the thing light that detector (12) is located distributes can use G ' _{I, j}-sqrt (R) calculates, with G ' _{I, j}-sqrt (R) locates to obtain obj against propagating into aperture (9) " _{I, j}While obj _{I, j}In the light transmission part of aperture (9) with obj " _{I, j}Replace obj _{I, j}The constant sample outgoing wave COMPLEX AMPLITUDE that obtains this calculating of other parts be obj " ' _{I, j}:

obj″′ _i，j＝obj _i，j*～cir+obj″ _i，j*cir，

Wherein :～cir is the inversion operation of aperture transmittance function matrix, and promptly 0 becomes 1,1 and becomes 0; Use obj again " ' _{I, j}Replace the capable q column matrix of corresponding with it p among the obj, obj is once upgraded in the distribution that aperture (9) is located;

(c) repeating step (a) and (b) calculating (i, j+1) sample outgoing wave COMPLEX AMPLITUDE is obj " ' _{I, j+1}, all upgrade completion once in order until the obj at all aperture position places;

(d) computational accuracy function S SE and judging:

When SSE is close to 0, when perhaps reaching accuracy requirement, get into step (e), otherwise, begin repeating step (a)～(d) from first aperture position again;

(e) finish; The obj that finally obtains is that the amplitude that deducts illumination light (16) of the COMPLEX AMPLITUDE of sample real image (10) is the illu amplitude transmittance function

that is sample (8) and phase place for the phase change value of illumination light (16) after through sample (8), has promptly realized a position phase micrometering.

3. transmission-type sample phase place microscopic method according to claim 2 is characterised in that the computing method of described precision function S SE are following:

If the thing light light distribution of CCD place record is by matrix I _{I, j}Expression, and reproduce light distribution that wave function propagates into the CCD place accordingly by matrix E _{I, j}Expression, then

I=1 wherein, 2..., j=1,2....

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