CN102645168A - System for measuring nanometer micrometric displacement based on full-fiber frequency domain interference - Google Patents
System for measuring nanometer micrometric displacement based on full-fiber frequency domain interference Download PDFInfo
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- CN102645168A CN102645168A CN2012101510604A CN201210151060A CN102645168A CN 102645168 A CN102645168 A CN 102645168A CN 2012101510604 A CN2012101510604 A CN 2012101510604A CN 201210151060 A CN201210151060 A CN 201210151060A CN 102645168 A CN102645168 A CN 102645168A
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Abstract
The invention discloses a system for measuring the nanometer micrometric displacement based on full-fiber frequency domain interference. A broadband light source of the system is connected with a port I of an optical fiber circulator through an optical fiber, a port II of the optical fiber circulator is connected with one end of a silica optical fiber probe through the optical fiber, a port III of the optical fiber circulator is connected with an optical spectrometer through the optical fiber, and tail fibers of components are connected through a flange plate or in a welding method. The system disclosed by the invention has the ability of measuring the nanometer micrometric displacement, is a non-contact type measuring device, can be used for statically and dynamically measuring the distance from the surface of an objected to be tested to the surface of the probe, and can be used for measuring metal or nonmetal. According to the system disclosed by the invention, by adopting a full-fiber-structured device, the operation difficulty is greatly reduced, the promotion and the use of the device are facilitated, and the anti-interference ability is strong.
Description
Technical field
The present invention relates to a kind of displacement transducer, especially possess the sensing device of nano-grade displacement resolution characteristic.
Background technology
Displacement is the amount of movement of position in motion process of object; The related scope of the measurement of displacement is quite extensive, and wherein, the measurement of micrometric displacement relates to delicate metering and MEMS etc.; Can indirect detection arrive a lot of physical quantitys through Displacement Measurement, like acceleration, pressure and stress etc.At present, micrometric displacement detects with sensors such as inductance type, raster pattern and eddy current types usually.Inductive displacement transducer has fricton-tight contact, though work the time does not receive the influence of nonmetal factors such as dust, and low-power consumption; Long-life; But measuring object must be a metallic conductor, owing to be contact measurement, therefore may bring negative effect to measurand in addition.Though the raster pattern sensor have be prone to realize that digitizing, antijamming capability are strong, do not have artificial reading error, easy for installation, use advantages such as reliable, but measuring accuracy generally is applied in the industries such as machine tooling, measuring instrument generally at micron order.Eddy-current transducer utilize eddy current effect can be static with dynamically noncontact, high linearity, the high resolution ground tested metallic conductor of measurement apart from the detecting head surface distance, but measured body must be a metallic conductor, this drawbacks limit its widespread use.In sum, present displacement sensing technology is difficult to satisfy the growing requirements in aspect such as delicate metering and MEMS measuring nanoscale micrometric displacement existence deficiency.
Summary of the invention
For metal and non-metallic objectsit is not a metal object are carried out the measurement of nanoscale micrometric displacement; The present invention provides a kind of full optical fiber frequency domain interference nano micro-displacement measuring system, and this sensor-based system can static state and dynamically noncontact, convenient easy to operate, high resolution ground measurement testee surface lies detecting head surface distance.
Full optical fiber frequency domain interference nano micro-displacement sensing of the present invention system; Be characterized in: the wideband light source of said system is connected through optical fiber with the port I of fiber optical circulator; The port II of fiber optical circulator is connected through optical fiber with an end of silica fibre probe; The port III of fiber optical circulator is connected through optical fiber with spectrometer, connects through ring flange or burning-on method between the tail optical fiber of each parts.
The light wave line width of the wideband light source output among the present invention is greater than 2nm, and the bandwidth range of fiber optical circulator and spectrometer is consistent with the bandwidth of wideband light source.
The other end of the silica fibre probe among the present invention is a butt end, the tail optical fiber of silica fibre probe, transmits in a coaxial fashion from the light wave of butt end end face reflection and the light wave of testee reflection.
The technical solution adopted for the present invention to solve the technical problems is; Wideband light source, fiber optical circulator, silica fibre probe are connected through optical fiber with spectrometer; The wideband light source output beam is from the port I input of fiber optical circulator; Output to the silica fibre probe by the port II, the end face of silica fibre probe is a tack.Light beam is from the outgoing of silica fibre probe end face the time, and part light directly reflects from end face, is called reference beam, and another part illumination is mapped on the testee reflects, and is collected by the silica fibre probe and returns, and is called detecting light beam.Reference beam and detecting light beam turn back to the port II of fiber optical circulator together through optical fiber, then from the outgoing of port III and be transferred to spectrometer, and spectrometer record interference information.Because reference beam and detecting light beam all are broad band light beams, and have a certain amount of optical path difference, so the interference fringe with wavelength change, i.e. frequency domain interference fringe can occur on the spectrum of spectrometer record.Note silica fibre probe end face to the mathematical form of the distance of testee does
d, the mathematic(al) representation of the frequency domain interference fringe of spectrometer record can be written as:
In the formula
λBe optical wavelength,
I 0(
λ) be wideband light source output light intensity distribution function,
nIt is the refractive index of air.Use light frequency
νWavelength in the alternate form (1)
λ, formula (1) can be write as:
In the formula
ν=
c/
λ,
cBe the light velocity in the vacuum.Can know that by (2) formula the intensity distributions of interference field has fixing periodicity on frequency domain, interfere so this interference is named as frequency domain.Optical path difference 2 between the repetition frequency of frequency domain interference fringe and reference beam and the detecting light beam
NdBe closely related, its physical significance is the transmission time difference Δ of two-beam
t=2
Nd/
cWavelength Conversion in the interference spectrum data of spectrometer record is become frequency, carry out the repetition frequency that Fourier analysis draws the frequency domain striped then, i.e. the transmission time difference Δ of reference beam and detecting light beam
t, can obtain the distance of silica fibre probe end face through calculating then to testee
d
The invention has the beneficial effects as follows to possess the ability of measuring the nanoscale micrometric displacement through repeatedly experimental verification, testee can be a metal and nonmetal, has broken through more current sensors and can't measure this restriction of nonmetal object.Measuring system of the present invention adopts all optical fibre structure device, greatly reduces debugging and operation easier, helps promoting the use of.Set forth and can know from technical scheme, the reference beam in the measuring system of the present invention is transferred to the spectrometer record with detecting light beam through identical path, and this close coupled type structure helps to avoid the influences of factor to measuring such as environment temperature vibrations, and antijamming capability is strong.Measuring system of the present invention is contactless displacement sensing system, can static and dynamically measure the distance of testee surface and detecting head surface.
Description of drawings
Fig. 1 is the structural representation of the full optical fiber frequency domain of the present invention interference nano micro-displacement measuring system;
Among the figure, 1. wideband light source 2. fiber optical circulators 3. silica fibre probes 4. spectrometers 5. testees.
Embodiment
Fig. 1 is the structural representation of the full optical fiber frequency domain of the present invention interference nano micro-displacement measuring system; As shown in Figure 1; Wideband light source 1 in the measuring system of the present invention is connected through optical fiber with the port I of fiber optical circulator 2; The port II of fiber optical circulator 2 and silica fibre probe 3 are connected through optical fiber, and the port III of fiber optical circulator 2 and spectrometer 4 are connected through optical fiber, connect through ring flange or burning-on method between the tail optical fiber.
The line width of wideband light source 1 is 10nm;
Fiber optical circulator 2 is three port circulators that bandwidth comprises wideband light source 1, is exported by the port II from the light of port I input, is exported port I and port III high degree of isolation by the port III from the light of port II input;
Silica fibre probe 3 one ends have tail optical fiber, and the other end is a tack, are used for the measurement collection reflected signal;
Described spectrometer 4 is a fiber spectrometer, and the wavelength respective range comprises the spectral range of wideband light source 1.
The measuring process of full optical fiber frequency domain interference nano micro-displacement measuring system of the present invention is: the first step, connect all devices according to Fig. 1, and open the power supply of wideband light source 1 and spectrometer 4; Second step, the butt end of silica fibre probe 3 is aimed at testee 5, regulate the alignment angle of silica fibre probe 3, the interference fringe of high-contrast appears in spectrometer 4; The 3rd step; With the interference spectrum data transmission of spectrometer record to terminal; Terminal converts the wavelength data in the spectroscopic data to frequency data; And then carry out the repetition frequency that Fourier analysis draws the frequency domain striped, at last through calculating the distance of silica fibre probe end face to testee.
Claims (3)
1. full optical fiber frequency domain interference nano micro-displacement measuring system; It is characterized in that: the wideband light source of said system (1) is connected through optical fiber with the port I of fiber optical circulator (2); The port II of fiber optical circulator (2) is connected through optical fiber with an end of silica fibre probe (3); The port III of fiber optical circulator (2) is connected through optical fiber with spectrometer (4), connects through ring flange or burning-on method between the tail optical fiber of each parts.
2. full optical fiber frequency domain interference nano micro-displacement measuring system according to claim 1 is characterized in that: the light wave line width of the wideband light source of said system (1) output is greater than 2nm.
3. full optical fiber frequency domain interference nano micro-displacement measuring system according to claim 1 is characterized in that: the bandwidth range of fiber optical circulator of said system (2) and spectrometer (4) is consistent with the bandwidth of wideband light source (1); The other end of silica fibre probe (3) is a butt end; The tail optical fiber of silica fibre probe (3), transmit in a coaxial fashion from the light wave of butt end end face reflection and the light wave of testee (5) reflection.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104197844A (en) * | 2014-09-18 | 2014-12-10 | 中国工程物理研究院流体物理研究所 | All optical fiber frequency domain interference absolute distance measurement method and device |
| CN104344892A (en) * | 2014-11-07 | 2015-02-11 | 中国工程物理研究院激光聚变研究中心 | All-fiber frequency domain interferometer |
| CN106323186A (en) * | 2016-08-18 | 2017-01-11 | 电子科技大学 | System for measuring micro-displacement of sealing surface moving ring |
| CN110793444A (en) * | 2019-10-24 | 2020-02-14 | 中国工程物理研究院流体物理研究所 | Two-stage all-fiber frequency domain interference ranging method and device |
| CN110793445A (en) * | 2019-10-24 | 2020-02-14 | 中国工程物理研究院流体物理研究所 | Multi-channel synchronous absolute distance measuring method and device based on all-fiber frequency domain interference |
| CN111141221A (en) * | 2019-12-16 | 2020-05-12 | 西安交通大学 | Preparation method of optical fiber probe for micro-displacement sensor, micro-displacement sensor and application |
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| CN1800774A (en) * | 2005-11-28 | 2006-07-12 | 中国工程物理研究院流体物理研究所 | All-fiber displacement interference instrument |
| US20080018907A1 (en) * | 2006-07-18 | 2008-01-24 | Rene Beaulieu | Optical apparatus and method for distance measuring |
| CN102052902A (en) * | 2010-12-10 | 2011-05-11 | 天津大学 | High-precision wide-range low-coherent interference shift demodulation device and demodulation method thereof |
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| CN1335482A (en) * | 2001-08-27 | 2002-02-13 | 中国科学院上海光学精密机械研究所 | All-optical fiber and large range displacement measurer |
| CN1800774A (en) * | 2005-11-28 | 2006-07-12 | 中国工程物理研究院流体物理研究所 | All-fiber displacement interference instrument |
| US20080018907A1 (en) * | 2006-07-18 | 2008-01-24 | Rene Beaulieu | Optical apparatus and method for distance measuring |
| CN102052902A (en) * | 2010-12-10 | 2011-05-11 | 天津大学 | High-precision wide-range low-coherent interference shift demodulation device and demodulation method thereof |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104197844A (en) * | 2014-09-18 | 2014-12-10 | 中国工程物理研究院流体物理研究所 | All optical fiber frequency domain interference absolute distance measurement method and device |
| CN104197844B (en) * | 2014-09-18 | 2017-02-22 | 中国工程物理研究院流体物理研究所 | All optical fiber frequency domain interference absolute distance measurement method and device |
| CN104344892A (en) * | 2014-11-07 | 2015-02-11 | 中国工程物理研究院激光聚变研究中心 | All-fiber frequency domain interferometer |
| CN106323186A (en) * | 2016-08-18 | 2017-01-11 | 电子科技大学 | System for measuring micro-displacement of sealing surface moving ring |
| CN110793444A (en) * | 2019-10-24 | 2020-02-14 | 中国工程物理研究院流体物理研究所 | Two-stage all-fiber frequency domain interference ranging method and device |
| CN110793445A (en) * | 2019-10-24 | 2020-02-14 | 中国工程物理研究院流体物理研究所 | Multi-channel synchronous absolute distance measuring method and device based on all-fiber frequency domain interference |
| CN110793444B (en) * | 2019-10-24 | 2021-05-18 | 中国工程物理研究院流体物理研究所 | Two-stage all-fiber frequency domain interference ranging method and device |
| CN111141221A (en) * | 2019-12-16 | 2020-05-12 | 西安交通大学 | Preparation method of optical fiber probe for micro-displacement sensor, micro-displacement sensor and application |
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Application publication date: 20120822 |