CN102628446A - Centrifugal vacuum pump and method for generating negative pressure - Google Patents
Centrifugal vacuum pump and method for generating negative pressure Download PDFInfo
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- CN102628446A CN102628446A CN2012100225491A CN201210022549A CN102628446A CN 102628446 A CN102628446 A CN 102628446A CN 2012100225491 A CN2012100225491 A CN 2012100225491A CN 201210022549 A CN201210022549 A CN 201210022549A CN 102628446 A CN102628446 A CN 102628446A
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- Prior art keywords
- centrifugal
- vacuum pump
- pump impeller
- shell
- air
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/165—Axial entry and discharge
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
- F04D29/053—Shafts
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
- F04D29/4206—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for elastic fluid pumps
- F04D29/4213—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for elastic fluid pumps suction ports
Abstract
The vacuum pump has a housing (1) and centrifugal impellers (5-7) which are rotatably mounted in the housing by a sleeve shaft (2), and are provided with several radially extending air flow channels. The housing comprises suction line (12) at the radial inner end and air outlets (16,17) at the radial outer ends, which are in flow communication with each other. The suction line communicates with an inner portion (10) of the sleeve shaft. The sleeve shaft comprises several holes (9) through which the inner portion of sleeve shaft communicates with air flow channels. An independent claim is included for method for generating low pressure by centrifugal impellers.
Description
Technical field
The present invention relates to a kind of according to the as described in the preamble centrifugal vacuum pump of independent claims and the method that is used to produce negative pressure.
Background technique
The electric vacuum pump that is used for the Brake booster of motor vehicle is supplied with is the vane pump or the form of diaphragm pistonpump normally.Yet; The working principle of these pumps has a large amount of shortcomings: the life-span that vane pump is limited owing to blade wear has; Owing to risk of overheating has limited continuous operating time, and special in a large amount of frictions between blade and the case have relatively poor efficient.The working life of diaphragm pistonpump is than the long service life of vane pump, but limited equally, particularly because the embrittlement of barrier film.In addition, diaphragm pistonpump at low temperatures, especially having high power consumpiton below-40 ℃, have bigger spatial requirement, and transform to necessity of longitudinal movement owing to rotatablely moving and to stand frictional loss.
All electric vacuum pumps commonly used all have relatively poor efficient, that is to say, the vacuum merit of during the working time of pump, being accomplished is lower with the electric power that is consumed.
The centrifugal vacuum pump of known preamble according to claim 1 from DE 197 25 335 A1.In the document, proposed to use centrifugal vacuum pump as the sourceof negative pressure that is used for Brake booster.The centrifugal vacuum pump of describing in this article comprises around the annular chamber of axle; On the one hand, aspiration is passed in this annular chamber, and on the other hand, the radial inner end of the airflow path that is formed by the blade of bending is adjacent with this annular chamber.In this annular chamber, air to be aspirated axially and radially flows to axle, thereby promotes the formation of turbulent flow.Blade is relatively short and therefore airflow path is shorter relatively.In addition, blade must move through the fixed surface of shell, and since the gap between them can not under the situation that does not produce friction or too much friction, make infinitely small, so the air of pumping can be back to this position than in the area of low pressure.All these have limited efficient and obtainable pressure reduction.
Summary of the invention
The objective of the invention is to improve the efficient and the obtainable pressure reduction of centrifugal vacuum pump.
Conventional method and the characteristic through independent claims of this purpose through being used for producing negative pressure is achieved at general centrifugal vacuum pump.
Under situation of the present invention, axle forms the part of aspiration, and in aspiration, air to be aspirated and axle almost coaxial flows deflect into airflow path at place, a plurality of hole then.Axially separate, thereby offset turbulent flow with radial air stream thereby with the mode that promotes to flow.Be used for axial air through the inside of using axle and supply with, for the identical outer perimeter of pump impeller, airflow path can be longer than above-mentioned existing technology.Since the axial lead of intake air, the air of pumping certainly only twice of deflection with respect to about 90 degree of the axis tilt of axle, rather than deflection three times in above-mentioned existing technology.Tightness between the relative to each other movable parts can utilize the sealing between shell and the axle to provide simply, and this sealing can easily and almost frictionally realize owing to the less relatively radius of axle.
Improved the efficient and the obtainable pressure reduction of centrifugal vacuum pump, therefore, the present invention is particularly suitable for as the electricity driving vacuum pump that is used for supplying with to braking system negative pressure all these highly significant.Improved efficient makes it possible to reduce to be had explosive motor or motor or has the fuel and the energy consumption of the motor vehicle of explosive motor and motor (in motor vehicle driven by mixed power).
Yet; The principle of pump in accordance with the present invention also has other a large amount of application; Be used for supplying with negative pressure or being used for the air extraction to equipment or machine, the term here " air " not only comprises the gaseous mixture that is present in the earth atmosphere, also comprises the mixture of other gases or gas.
In a preferred embodiment, centrifugal pump impeller is the pump impeller of sealing; That is to say that except its radial inner end and outer end, the airflow path of centrifugal pump impeller seals everywhere, make the air that flows out to get into from any position along the length of airflow path or to overflow.
In a preferred embodiment of the invention; Opposite (wherein with the centrifugal cutter of above-mentioned existing technology or routine; Path and its cross section that airflow path is followed about bending at pump impeller broaden towards the outside); The airflow path of centrifugal pump impeller leaves axle basically linearly and radially extends, and has essentially identical cross section along its length.Flow through the maximum acceleration of air experience of this straight passage, and because the flow cross section of passage does not radially increase, so compare with the situation that the cross section of passage increases towards the outside, the speed of the air of carrying therein reduces lessly.These two measures have all increased obtainable pressure reduction.
Can make centrifugal vacuum pump reach high rotation speed through motor, under high rotation speed, produce the pumping power and the pressure reduction that are enough to supply with negative pressure to Brake booster.When in motor vehicle, using, centrifugal vacuum pump can be come mechanically to drive by any supplementary equipment of explosive motor or explosive motor substitutingly.
According to the present invention, turbine wheel also can be the form of integrated radial/axial turbine wheel.In this case, the center axial axis of hollow is connected in the functional inner chamber of integrated radial/axial turbine wheel.Air is extracted through turbine wheel via the axial axis of hollow.
When integrated radial/axial turbine wheel used in vacuum pump according to the present invention, turbine wheel had made air stream deflection.Therefore complicated and expensive tinsel induction element is not essential.The lip seal that is used for the redundancy sealing of quill shaft is also save.Axial air outlet on the both sides can be substituted by the air outlet slit on the side.The annular air outlet can be save, and is substituted by cylindrical air outlet.
Description of drawings
The exemplary embodiment of expression is explained the present invention in more detail with reference to the accompanying drawings, in the accompanying drawings:
Fig. 1 shows the longitudinal section of the centrifugal vacuum pump that passes the radial turbine machine impeller with quill shaft and sealing;
Fig. 2 a-2c shows the radially partial section of passing quill shaft, guide blades that radial turbine machine impeller is relevant with some along the A-A line among Fig. 1, and two plan views that in two embodiments, have the turbine wheel of relevant guide blades;
Fig. 3 is the schematic representation of centrifugal vacuum pump with radial turbine machine impeller and additional axial turbine wheel of quill shaft, sealing;
Fig. 4 shows integrated radial/axial turbine wheel;
Fig. 5 shows the alternative designs according to centrifugal pump of the present invention.
Embodiment
Centrifugal vacuum pump shown in Figure 1 comprises rotational symmetric basically shell 1, and quill shaft 2 is rotatably installed along the axis of shell 1.Quill shaft 2 has closed end, and this closed end is connected in the rotor of the centered of the motor 3 that schematically shows, and wherein motor 3 axially fastens in shell 1 or on the shell 1, and quill shaft 2 is installed in the bearing through motor 3.Quill shaft 2 is through being installed in the shell 1 with the deep groove ball bearing 4 of motor 3 at a distance of certain axial distance.
Two dish type blade racks 5,6 are formed on the quill shaft 2, and blade rack 5,6 stretches out from the tube portion of quill shaft 2 at a distance of certain axial distance ground each other separately, and therefore when quill shaft 2 is driven by motor 3, rotate with quill shaft 2.
Two blade racks 5, be supported with 24 blades 7 between 6, these blades distribute around quill shaft 2 with the angle intervals of 15 degree, shown in Fig. 2 a, (in Fig. 2 a, have only drawn a spot of blade 7), and have therefore formed centrifugal pump impeller.
Different with the centrifugal pump impeller of routine, blade 7 is not a slim vane, but when perpendicular to axially the seeing of quill shaft 2, on cross section, is wedge shape (shown in Fig. 2 a); Make the interval between the blade 7 form elongated airflow path 8; Airflow path 8 radially extends away from quill shaft 2 straightly, and has identical cross section, i.e. rectangular cross section along its length; For example, as seeing from Fig. 2 a the right.
The tube portion of quill shaft 2 comprises a plurality of holes 9; Hole 9 is connected in annular chamber 11 with the inside 10 of quill shaft 2; Annular chamber 11 below blade 7 at blade rack 5, keep unimpededly between 6, annular chamber 11 is narrower in the radial direction, the radial inner end of hole 9 contiguous airflow paths 8.
The lip Sealing 14 that is arranged in deep groove ball bearing 4 next doors is for the inside 10 of quill shaft 2 provides additional seal, and the sealing lip of lip seal 14 leans against in the tube portion of quill shaft 2, and the periphery of lip seal 14 is placed in the shell 1 securely and hermetically.
The perimembranous that 8 tinsel air guide 15 are wound the centrifugal pump impeller that is formed by blade rack 5,6 and blade 7 distributes equally spacedly.Each tinsel air guide 15 all is anchored on shell 1 in the outside, and along the big segment distance of axial length of the axis ratio of elongation pump impeller of shell 1.
Between pump impeller and tinsel air guide 15, have little gap, and in the axial outside of the axial end of pump impeller, tinsel air guide 15 is extended one section short distance along the axial direction of shell 1, like what can from Fig. 1, see.In the zone of two axial ends of tinsel air guide 15, shell 1 opens wide to environment, forms annular air outlet 16 and 17.Annular air outlet 16 also can be substituted by simple cylinder open.
Equivalently, under the situation of the abundant axial ventilation of pump impeller, shell can only ventilate in a side.Tinsel air guide 15 can be arranged in spiral structure on the cylinder shape inner wall of shell 1 with respect to longitudinal axis, makes the air of being carried by pump impeller can be discharged into sidepiece better.In this case, the orientation of corresponding helix angle depends on the sense of rotation of centrifugal pump impeller.
Fig. 2 b shows the embodiment of pump impeller (5,6,7) axial ventilation in both sides, as represented by annular air outlet 16 and 17 in Fig. 1.In this case, tinsel air guide 15 is arranged with respect to the central plane of centrifugal pump impeller symmetrically.
If shell only has air outlet slit in a side, so pump impeller at a side shaft to ventilation.The alignment along its whole length towards the ventilation side then of tinsel air guide is shown in Fig. 2 c.
Therefore if motor 3, axle 2, also have centrifugal pump impeller (it is by blade rack 5,6 and blade 7 forms and form the unit with quill shaft 2) along the direction of arrow rotation that marks among Fig. 2 a, then continuous air stream along among Fig. 1 and 2 schematically the flow arrow of drafting build up.
Particularly, air (for example, treating the air that extracts from vacuum brake assistor) flows into the inside 10 of axle 2 via inlet link 12, and passes hole 9 from this and flow into airflow paths 8, is accelerated at this place and thereby is discharged to the outside.After air had left airflow path 8, its inboard along two axial directions against shell 1 was deflected, and flowed along tinsel air guide 15, and passed annular air outlet 16 and 17 outflow shells 1 (seeing Fig. 2 b).
Yet, having under the situation of sufficient ventilation, the air that radially leaves centrifugal impeller also can only ventilate at an axial direction upper deflecting and through the air outlet slit on the side of shell 16,17.Then, the deflection on axial direction only is through only realizing (seeing Fig. 2 c) towards the tinsel guide 15 of ventilation side positioning.
From the air of centrifugal pump impeller discharge, through quill shaft 2 and inlet link 12 generations air flow subsequently.
One outlet port of the bottom that is positioned at Fig. 2 a in airflow path 8, the flowing velocity of the air that radially leaves owing to centrifugal force is by arrow 18 expressions.Because the geostrophic force (Coriolis force) that occurs during the centrifugal action and the flowing velocity of air of leaving airflow path 8 with the perimembranous of pump impeller are by arrow 19 expressions tangently.Two flowing velocities 18 and 19 vector stack produce the absolute outflow direction by the inclination of arrow 20 expressions.
Can see that in Fig. 2 a tinsel air guide 15 approximately is parallel to outflow direction 20 extends, thus, the outflow of air is homogenized and is improved.Flow out direction 20 mainly by the inlet radius of centrifugal pump impeller with go out port radius and confirm, and can confirm through calculating.The tinsel air guide can additionally be arranged with respect to the shell periphery obliquely, makes the air of being carried by centrifugal pump impeller can be discharged to sidepiece better.The orientation that is in tilted layout of tinsel air guide is confirmed by sense of rotation.
The flow arrow of the bottom among Fig. 2 a is represented absolute air flow, that is with shell 1 relevant flowing, and the flow arrow on the right of Fig. 2 a shows relative air flow, that is, with relevant the flowing of pump impeller along direction of arrow rotation.Can see that this fact is being lacked than the back side with respect to the pump impeller sense of rotation of blade 7 in the radial direction in the front with respect to the pump impeller sense of rotation of blade 7, helps air to flow out from airflow path 8.Because the residue periphery that cross section is the back side of the blade 7 of wedge shape exceeds pump impeller is stretched out one section short distance; So each blade forms the flow spoiler 21 that makes the air deflection that leaves previous airflow path 8 leave pump impeller, thereby make the air from next airflow path 8 also can leave unimpededly.
Described centrifugal vacuum pump demonstrates than vane pump or significantly low frictional loss of diaphragm pistonpump.Except the loss at deep groove ball bearing 4, stuffing box packing 13 and lip seal 14 places, there is not frictional loss.Can not appear at the big frictional loss that occurs between the case of blade and vane pump.Because there is not gap loss in the centrifugal pump impeller 5,6,7 of sealing.Be characterised in that especially, directly arrive the centrifugal pump impeller 5,6,7 that seals, and export continuously away from environmental sealing from entering the mouth to via the inlet of quill shaft 2 stream.Vacuum pump is robust, and not owing to risk of overheating has restriction working time.
The design principle of vacuum pump is simple and cost-effective.Therefore, when being used for, compare with diaphragm pistonpump with the vane pump of frequent use in motor vehicle supply negative pressure; Cost is low significantly, and for example allows to be used for the additional expenditure of brushless motor 3, whereby; Working life is also unrestricted, as the situation of vane pump or diaphragm pistonpump.
The pumping power of the centrifugal vacuum pump of having described can increase through additional axial turbine wheel, is schematically shown like Fig. 3.Similar with the exemplary embodiment of Fig. 1 and Fig. 2, quill shaft 32 is installed in the shell 31, drive by motor 33, and with centrifugal pump impeller 34 formation unit.On a side opposite of centrifugal pump impeller 34 (this centrifugal pump impeller 34 is a radial turbine machine impeller) with motor 33; Quill shaft 32 supporting axles are to turbine wheel 35; Turbine wheel 35 suctions are transported to outside the shell 31, shown in flow arrow by the air of centrifugal pump impeller 34 pumpings and with it.
Fig. 4 shows another embodiment of integrated radial/axial turbine wheel 36.The central axial axis 10 of hollow is connected in the functional inner chamber of integrated radial/axial turbine wheel 36.Air is extracted by turbine wheel 36 via hollow axial axis 10.
Fig. 5 shows the alternative designs according to centrifugal pump of the present invention.In this case, air is deflected with the mode that promotes to flow through integrated radial/axial turbine wheel 36.Here, complicated and expensive tinsel guide 15 is optional.The lip seal 14 that is used for the redundancy sealing of quill shaft is also save.Axial air outlet on the both sides is substituted by the air outlet slit on the side.Complicated and expensive right-hand side air outlet slit 17 have been save.Annular air outlet 16 is substituted by simple cylindrical air outlet 16a.
Claims (12)
1. centrifugal vacuum pump; Comprise shell (1) and centrifugal pump impeller (5,6,7); Said centrifugal pump impeller (5,6,7) is rotatably installed in the said shell through axle (2) and has a plurality of airflow paths (8) that approximately radially are provided with; Said airflow path (8) fluidly is connected in the aspiration (12) that extend in the said shell in its radial inner end, and is connected at least one air outlet slit (16,17) that stretches out said shell at its radial outer end with circulating
Wherein, Said axle is quill shaft (2); A plurality of holes (9) are formed in the cylindrical shell of said quill shaft (2); The inside of said quill shaft (10) is connected in said airflow path (8) via said a plurality of holes (9) with circulating, and wherein said aspiration (12) is connected in the inside of said quill shaft with circulating.
2. centrifugal vacuum pump according to claim 1, wherein:
Said vacuum pump is as the sourceof negative pressure of the Brake booster in the motor vehicle.
3. centrifugal vacuum pump according to claim 1 and 2, wherein:
With the motor (3) of said quill shaft (2) mechanical connection or explosive motor actuator as said centrifugal vacuum pump.
4. according to each described centrifugal vacuum pump in the claim, wherein:
The said airflow path (8) of said centrifugal pump impeller seals along its length everywhere.
5. according to each described centrifugal vacuum pump in the claim, wherein:
The said airflow path (8) of said centrifugal pump impeller leaves said quill shaft (2) basically linearly and radially extends.
6. according to each described centrifugal vacuum pump in the claim, wherein:
The said airflow path (8) of said centrifugal pump impeller has essentially identical cross section along its length.
7. centrifugal vacuum pump according to claim 6, wherein:
The said airflow path (8) of said centrifugal pump impeller has the cross section of basic rectangle along its length; And be arranged between the blade with wedge-shaped cross-section (7) of said centrifugal pump impeller said blade shorter than the back side with respect to the sense of rotation of said centrifugal pump impeller of said blade with respect to the front of the sense of rotation of said centrifugal pump impeller.
8. according to each described centrifugal vacuum pump in the claim, wherein:
Circumferential portion around said centrifugal pump impeller is furnished with a plurality of fixing tinsel air guide (15), and said tinsel air guide (15) approximately is parallel to the flow direction layout that air leaves said airflow path (8).
9. centrifugal vacuum pump according to claim 8, wherein:
Said tinsel air guide (15) additionally sloped position on the perimembranous of said shell.
10. according to each described centrifugal vacuum pump in the claim, wherein:
Additionally supporting axle is to turbine wheel (35) for said quill shaft (32), and said axial turbine wheel (35) is suitable for suction and leaves the air of said centrifugal pump impeller (34) and it is transported to outside the said shell (31).
11. according to each described centrifugal vacuum pump in the claim 1 to 7, wherein:
Said turbine wheel is the form of integrated radial/axial turbine wheel (36).
12. the method through pump impeller (5,6,7) generation negative pressure,
Said pump impeller (5,6,7) is rotatably installed in the shell (1) through axle (2) and has a plurality of airflow paths (8) that approximately radially are provided with, and said airflow path (8) is transported to its radial outer end with air from its radial inner end through centrifugal force,
Wherein, allow air the to be aspirated axial cavity (10) from said axle (2) to flow into said airflow path (8) through a plurality of holes (9) in the said axle.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102011003509.5 | 2011-02-02 | ||
| DE102011003509.5A DE102011003509B4 (en) | 2011-02-02 | 2011-02-02 | Centrifugal vacuum pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102628446A true CN102628446A (en) | 2012-08-08 |
| CN102628446B CN102628446B (en) | 2017-03-01 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210022549.1A Active CN102628446B (en) | 2011-02-02 | 2012-02-01 | Centrifugal vacuum pump and the method for producing negative pressure |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN102628446B (en) |
| DE (1) | DE102011003509B4 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108397389A (en) * | 2018-03-15 | 2018-08-14 | 潘晓江 | A kind of vacuum pump and its multistage vacuum pump |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108547672A (en) * | 2018-07-02 | 2018-09-18 | 西安空天能源动力智能制造研究院有限公司 | A kind of micro turbine engine bearing cooler |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1143719A (en) * | 1996-07-17 | 1997-02-26 | 于进才 | Method for pumping high-vacuum degree |
| DE19725335A1 (en) * | 1997-06-16 | 1998-12-17 | Bayerische Motoren Werke Ag | Drive disc with integrated radial fan |
| CN1266149A (en) * | 1999-03-04 | 2000-09-13 | 崔铁汉 | super critical vacuum pump |
| DE19953270A1 (en) * | 1999-11-06 | 2001-05-10 | Michael Johannes Jensen | Centrifugal force compressor used as turbocompressor which has higher efficiency than conventional turbo compressors |
-
2011
- 2011-02-02 DE DE102011003509.5A patent/DE102011003509B4/en active Active
-
2012
- 2012-02-01 CN CN201210022549.1A patent/CN102628446B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1143719A (en) * | 1996-07-17 | 1997-02-26 | 于进才 | Method for pumping high-vacuum degree |
| DE19725335A1 (en) * | 1997-06-16 | 1998-12-17 | Bayerische Motoren Werke Ag | Drive disc with integrated radial fan |
| CN1266149A (en) * | 1999-03-04 | 2000-09-13 | 崔铁汉 | super critical vacuum pump |
| DE19953270A1 (en) * | 1999-11-06 | 2001-05-10 | Michael Johannes Jensen | Centrifugal force compressor used as turbocompressor which has higher efficiency than conventional turbo compressors |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108397389A (en) * | 2018-03-15 | 2018-08-14 | 潘晓江 | A kind of vacuum pump and its multistage vacuum pump |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102628446B (en) | 2017-03-01 |
| DE102011003509B4 (en) | 2021-09-23 |
| DE102011003509A1 (en) | 2012-08-02 |
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