CN102626900A - Repair device for soft fixed abrasive particle pneumatic grinding wheel - Google Patents
Repair device for soft fixed abrasive particle pneumatic grinding wheel Download PDFInfo
- Publication number
- CN102626900A CN102626900A CN2012101168547A CN201210116854A CN102626900A CN 102626900 A CN102626900 A CN 102626900A CN 2012101168547 A CN2012101168547 A CN 2012101168547A CN 201210116854 A CN201210116854 A CN 201210116854A CN 102626900 A CN102626900 A CN 102626900A
- Authority
- CN
- China
- Prior art keywords
- blade
- emery wheel
- abrasive particle
- grinding wheel
- bearing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002245 particle Substances 0.000 title claims abstract description 48
- 230000008439 repair process Effects 0.000 title abstract description 20
- 230000007246 mechanism Effects 0.000 claims abstract description 20
- 230000003044 adaptive effect Effects 0.000 claims abstract description 4
- 229910001651 emery Inorganic materials 0.000 claims description 79
- 230000005540 biological transmission Effects 0.000 claims description 18
- 230000002146 bilateral effect Effects 0.000 claims description 7
- 239000011230 binding agent Substances 0.000 abstract description 5
- 230000000694 effects Effects 0.000 abstract description 4
- 238000005520 cutting process Methods 0.000 abstract description 3
- 238000004458 analytical method Methods 0.000 abstract description 2
- 238000010224 classification analysis Methods 0.000 abstract 1
- 239000006061 abrasive grain Substances 0.000 description 9
- 238000000034 method Methods 0.000 description 9
- 238000005516 engineering process Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 238000002360 preparation method Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 230000037303 wrinkles Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000007730 finishing process Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Images
Landscapes
- Polishing Bodies And Polishing Tools (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
A repair device for a soft fixed abrasive particle pneumatic grinding wheel comprises a plurality of spherical arc-shaped blades, a supporting seat and a drive mechanism; the blades are designed and manufactured in accordance with the shape of the grinding wheel,to form a semispherical entity with a downward opening, inner side of the blades closely and directly abuting against external surface of the grinding wheel, and a left side and a right side of the blades being in cutting edge shape. The blades are secured on the supporting seat by screws, the size of the supporting seat being adaptive to the grinding wheel; an end part of the supporting seat is connected with a drive mechanism. According to the phenomena of uneven thickness of a binder and uneven abrasive particle density of a surface abrasive particle layer commonly existing in a produced pneumatic grinding wheel, the present invention provides a repair device for a pneumatic grinding wheel. By carrying out failure analysis on unqualified grinding wheels, the grinding wheels are divided into three categories with a deviation angle of a main slope as a standard, and three categories of blade repair design are accordingly established based on grinding wheel failure classification analysis, avoiding damage caused by excessive repair, thereby enabling the grinding wheel to maintain a good high-efficiency repair effect.
Description
Technical field
The present invention relates to soft fixed grain air pressure emery wheel Precision Machining field.
Background technology
Soft fixed grain air pressure emery wheel is a hollow hemisphere that is made up of rubber matrix, and its appearance forms the uniform abrasive grain layer of a layer thickness through binding agent, and air pressure inside is controlled, cooperates robot to realize automatic precision processing.In the precise finishing process on high hardness material surface; Soft fixed grain air pressure emery wheel forms good profiling with its good flexibility to free form surface on the one hand; And its surperficial abrasive particle crowd is supplied under the force environment by flexible substrate on the other hand; Can overcome in the existing air bag polishing technology and adopt the more weak shortcoming of free abrasive cutting power, form high-efficient cutting.
But the preparation to soft fixed grain air pressure emery wheel lacks effective means at present; And find that after the preparation of air pressure emery wheel is accomplished surperficial abrasive grain layer often exists adhesive thickness uneven; Phenomenons such as abrasive particle density unevenness, and will be difficult to emery wheel is repaired after stable through reaching after a while when binding agent.Under current present situation, still do not have efficient apparatus and can repair, to such an extent as to spillage of material is excessive in the emery wheel manufacture process to underproof air pressure emery wheel.
In sum; Seeing that the key player that soft fixed grain air pressure emery wheel is played the part of in polishing process; In order to guarantee its emery wheel preparation quality and reduce material wastage rate that designing and develop a kind of prosthetic device to soft fixed grain air pressure emery wheel is a meaningful and valuable job.
Summary of the invention
The present invention will overcome the shortcoming that prior art can't effectively be repaired defective air pressure emery wheel; Provide towards soft fixed grain air pressure emery wheel and designed a kind of prosthetic device; And in repair process, wheel face is not caused other damage; Thereby improve air pressure emery wheel production efficiency, reduce spillage of material.
The technical scheme that the present invention adopted is:
Said soft fixed grain air pressure emery wheel prosthetic device is characterized in that: comprise some dome shape arc shaped blades, bearing and transmission mechanism; Described blade is made according to the emery wheel configuration design, and opening constitutes the planar integral body of hemisphere down; Its inboard directly fits tightly with the emery wheel appearance; The described blade left and right sides is blade-like, and described blade pass is crossed screw and is fixed on the described bearing, and described bearing size is adaptive with emery wheel; The end of described bearing connects transmission mechanism.
Further, all there is blade in its one-sided or left and right sides of said dome shape arc shaped blade, and the blade upper and lower side is crooked, inboard to become sphere shape curved surface, and described blade is be used to remove the main gradient deviation angle abrasive particle raised areas that is 1 district outer curved.
Perhaps; All there is blade in its one-sided or left and right sides of said dome shape arc shaped blade; Crooked, the inboard one-tenth sphere of blade upper and lower side shape curved surface, described blade is the linear pattern that is used to remove the main gradient deviation angle abrasive particle raised areas that is 2 districts, has one-sided blade or bilateral blade.
Perhaps, all there is blade in its one-sided or left and right sides of said dome shape arc shaped blade, the blade upper and lower side is crooked, inboard become sphere shape curved surface, described blade be used to remove the main gradient deviation angle abrasive particle raised areas that is 3 districts in curved.
Further, described blade pass is crossed screw and is fixed on the said bearing, the adjustable positions that screw is fixed on bearing, and said bearing becomes cylindrical, and the downside of described bearing is equipped with the screwed hole, the upside that are used for fixing blade and links to each other with transmission mechanism.
Further, described transmission mechanism one end connects described bearing, and the other end connects power source, can be fixed on any lathe.
Power source is then confirmed according to the equipment installation requirements, for device provides power that moves up and down and rotary power, can use manual method, also can use automatic method.
All there is blade in its one-sided or left and right sides of said dome shape arc shaped blade; Blade upper and lower side curved interior becomes sphere shape curved surface; When a plurality of blades with the stratiform form superimposed fixing after, the inboard basic dome shape that becomes, can with repair wheel face and fit; Its big I is moved by stiff end and adjusts, and also can adjust through blade exchanging.Blade shape mainly is divided into three kinds of forms and is used to repair three kinds of abrasive particle concretion abrasive wheel surfaces under the different situations.The disabled status fixed for the accurate description abrasive particle need be divided into three types with the abrasive grain layer raised areas; Divide by main gradient deviation angle; The so-called main gradient refers to the abrasive particle raised areas and possesses the comparatively zone of flat grade; The emery wheel abrasive grain layer mainly is made up of binding agent and abrasive particle, will cause damage to projection area neighborhood abrasive grain layer to great slope reparation, can avoid or reduce extra damage and repair according to main gradient district.And main gradient deviation angle refers to the angle that becomes of gradient center and gravity straight line; In order to describe the blade repairing effect under the different main gradient situation; To be divided into three zones according to deviation angle: what the definition deviation angle was in 0 ° to 60 ° and 300 ° to 360 ° is 1 district; What deviation angle was in 60 ° to 120 ° and 240 ° to 300 ° is 2 districts, and moving the angle, to be in 120 ° to 240 ° be 3 districts.And blade be respectively linear pattern, in curved and curved outward.The outer curved abrasive particle raised areas that is 1 district that is used to remove main gradient deviation angle; The linear pattern blade can be designed to one-sided blade and bilateral blade, is mainly used in and removes the main gradient deviation angle abrasive particle raised areas that is 2 districts; In curved blade be used to remove the main gradient deviation angle abrasive particle raised areas that is 3 districts.
Air pressure emery wheel to abrasive particle after fixed screens, underproof emery wheel distinguished according to size, and observation abrasive particle raised areas in the emery wheel of same size subsequently, and according to main gradient deviation angle underproof emery wheel is divided three classes again.The air pressure emery wheel of needs reparation is installed on the pole, makes its inboard and pole outside applying fully, emery wheel elasticity appearance does not have the extruding wrinkle.
According to the corresponding blade of the classifying and selecting of main gradient deviation angle.The main gradient deviation angle of its abrasive particle raised areas is in the emery wheel in above-mentioned 1 district, chooses outer curved blade, and its blade is in the blade outside.Be in the emery wheel in 2 districts for main gradient deviation angle, choose the linear pattern blade, blade can be designed to one-sided or bilateral.Be in the emery wheel in 3 districts for main gradient deviation angle, curved blade in choosing, its blade is in the blade inboard.
Select the suitable stationary support according to the emery wheel size, and the blade of correspondence is fixed in the suitable position of support according to the requirement of emery wheel size.Fixed support is installed in transmission mechanism one end, and the fixed support center line should be on same the straight line with the emery wheel symmetrical center line, and promptly when blade was repaired emery wheel, air pressure emery wheel outer surface can be fitted in the blade inboard well.Power source can be decided according to whole Machine Tool design, can adopt manually or automatic mode.
The control reblading is rotated, and in the process of rotation, presses down.Be in the emery wheel in 1 district to main gradient deviation angle, outer curved blade outside blade carries out reparation repeatedly to the abrasive particle projection area, and the abrasive particle projection area is through smooth gradually after repeatedly repairing, until being consistent with sphere.After the emery wheel reparation that is in 1 district is accomplished, choose the linear pattern blade, the emery wheel that is in 2 districts is repaired.Curved blade is repaired the emery wheel that is in 3 districts in choosing subsequently again, and repair process is with above-mentioned consistent.
The invention has the beneficial effects as follows: find after preparation is accomplished to the air pressure emery wheel that surperficial abrasive grain layer often exists adhesive thickness uneven, phenomenons such as abrasive particle density unevenness have proposed a kind of air pressure emery wheel prosthetic device.Through failure analysis, be that benchmark is divided three classes emery wheel with main gradient deviation angle to defective emery wheel.Lost efficacy according to emery wheel and decide alanysis, and correspondingly provided the design of three kinds of rebladings, the damage of having avoided mistake to build makes that emery wheel has kept well, repairing effect efficiently in repair process.This method can provide technology ensuring for the highly-efficient processing of soft fixed grain crowd air pressure emery wheel; Bring into play its technical advantage and application potential in the mold polish field for this polishing technology and establish important foundation.
Description of drawings
Fig. 1 is an overall structure sketch map of the present invention.
Fig. 2 is an internal structure sketch map of the present invention.
Fig. 3 is that the present invention repairs view for three kinds
The specific embodiment
Below in conjunction with accompanying drawing the present invention is further described.
With reference to Fig. 1, Fig. 2 and Fig. 3:
Said soft fixed grain air pressure emery wheel prosthetic device comprises some dome shape arc shaped blades, bearing and transmission mechanism; Described blade is made according to the emery wheel configuration design, and opening constitutes the planar integral body of hemisphere down; Its inboard directly fits tightly with the emery wheel appearance; The described blade left and right sides is blade-like, and described blade pass is crossed screw and is fixed on the described bearing, and described bearing size is adaptive with emery wheel; The end of described bearing connects transmission mechanism.
All there is blade in its one-sided or left and right sides of said dome shape arc shaped blade, and the blade upper and lower side is crooked, inboard to become sphere shape curved surface, and described blade is be used to remove the main gradient deviation angle abrasive particle raised areas that is 1 district outer curved.Perhaps; All there is blade in its one-sided or left and right sides of said dome shape arc shaped blade; Crooked, the inboard one-tenth sphere of blade upper and lower side shape curved surface, described blade is the linear pattern that is used to remove the main gradient deviation angle abrasive particle raised areas that is 2 districts, has one-sided blade or bilateral blade.Perhaps, all there is blade in its one-sided or left and right sides of said dome shape arc shaped blade, the blade upper and lower side is crooked, inboard become sphere shape curved surface, described blade be used to remove the main gradient deviation angle abrasive particle raised areas that is 3 districts in curved.
Described blade pass is crossed screw and is fixed on the said bearing, the adjustable positions that screw is fixed on bearing, and said bearing becomes cylindrical, and the downside of described bearing is equipped with the screwed hole, the upside that are used for fixing blade and links to each other with transmission mechanism.Described transmission mechanism one end connects described bearing, and the other end connects power source, can be fixed on any lathe.
The some dome shape arc shaped blades 13 of the present invention, hold-down support 12 and transmission mechanism 11.Blade 13 is made according to emery wheel 32 configuration designs; Can select the quantity of blade and the kind of blade according to the state that wheel face need be repaired; Blade is unified opening down, and it is planar whole 2 to constitute hemisphere, and its inboard can directly fit tightly with emery wheel 32 appearances; The blade left and right sides is blade-like 21, is used for 33 repairs of the fixed jut of abrasive particle.Blade pass is crossed screw 22 and is fixed on the bearing 12, and the bearing size is decided by the emery wheel size, and how much selects corresponding bearing that screw thread quantity is installed according to blade.Its end connects transmission mechanism 11, and its form is decided by concrete drive method.Power source is then confirmed according to the equipment installation requirements, for device provides power that moves up and down and rotary power, can use manual method, also can use automatic method.
All there is blade 21 in its one-sided or left and right sides of said dome shape arc shaped blade; Blade 13 upper and lower side curved interior become sphere shape curved surface 14; When a plurality of blades with the stratiform form superimposed fixing after, the inboard basic dome shape that becomes, can with repair wheel face and fit; Its big I is moved by stiff end and adjusts, and also can change through blade 13 and adjust.Blade shape mainly is divided into three kinds of forms and is used to repair three kinds of abrasive particle concretion abrasive wheel surfaces under the different situations.The disabled status fixed for the accurate description abrasive particle need be divided into three types with the abrasive grain layer raised areas; Divide by main gradient deviation angle; The so-called main gradient refers to the abrasive particle raised areas and possesses the comparatively zone of flat grade; The emery wheel abrasive grain layer mainly is made up of binding agent and abrasive particle, will cause damage to projection area neighborhood abrasive grain layer to great slope reparation, can avoid or reduce extra damage and repair according to main gradient district.And main gradient deviation angle refers to the angle that becomes of gradient center and gravity straight line; In order to describe the blade repairing effect under the different main gradient situation; To be divided into three zones according to deviation angle: what the definition deviation angle was in 0 ° to 60 ° and 300 ° to 360 ° is 1 district 33; What deviation angle was in 60 ° to 120 ° and 240 ° to 300 ° is 2 districts 31, and moving the angle, to be in 120 ° to 240 ° be 3 districts 35.And blade be respectively linear pattern 37, in curved 36 and outer curved 34.Outer curved 34 are used to remove the main gradient deviation angle abrasive particle raised areas 33 that is 1 district; Linear pattern 37 blades can be designed to one-sided blade and bilateral blade, are mainly used in and remove the main gradient deviation angle abrasive particle raised areas 31 that is 2 districts; In curved 36 blades be used to remove the main gradient deviation angle abrasive particle raised areas 35 that is 3 districts.
Technical conceive of the present invention is: the air pressure emery wheel to abrasive particle after fixed screens; Underproof emery wheel 32 is distinguished according to size; In the emery wheel of same size, observe the abrasive particle raised areas subsequently, and underproof emery wheel is divided three classes again according to main gradient deviation angle.The air pressure emery wheel of needs reparation is installed on the pole, makes its inboard and pole outside applying fully, emery wheel elasticity appearance does not have the extruding wrinkle.
According to the corresponding blade 13 of the classifying and selecting of main gradient deviation angle.The main gradient deviation angle of its abrasive particle raised areas 33 is in the emery wheel in above-mentioned 1 district, chooses outer curved blade 34, and its blade 21 is in the blade outside.Be in the emery wheel in 2 districts for main gradient deviation angle, choose linear pattern blade 37, blade can be designed to one-sided or bilateral.Be in the emery wheel in 3 districts for main gradient deviation angle, curved blade 36 in choosing, its blade 14 is in the blade inboard.
Select suitable stationary support 12 according to emery wheel size, and the blade 13 of correspondence is fixed in the suitable position of support 12 according to the requirement of emery wheel size.Fixed support is installed in transmission mechanism 11 1 ends, and fixed support 12 center lines should be on same the straight line with emery wheel 32 symmetrical center line, and promptly when 13 pairs of emery wheels 32 of blade were repaired, air pressure emery wheel outer surface can be good at being fitted in the blade inboard.Power source can be decided according to whole Machine Tool design, can adopt manually or automatic mode.
Control reblading 13 is rotated, and in the process of rotation, presses down.Be in the emery wheel in 1 district to main gradient deviation angle, outer curved blade 34 outside blades carry out reparation repeatedly to the abrasive particle projection area, and abrasive particle projection area 33 is through smooth gradually after repeatedly repairing, until being consistent with sphere.After the emery wheel reparation that is in 1 district is accomplished, choose linear pattern blade 37, the abrasive particle projection area 31 that is in 2 districts is repaired.Curved 36 type blades are repaired the abrasive particle projection area 35 that is in 3 districts in choosing subsequently again, and repair process is with above-mentioned consistent.
The said content of this specification embodiment only is enumerating inventive concept institute's way of realization; Protection scope of the present invention should only not be confined to implement the concrete form that example is stated, protection scope of the present invention reaches in those skilled in the art according to the thinkable equivalent technologies means of technical conceive of the present invention.
Claims (6)
1. said soft fixed grain air pressure emery wheel prosthetic device is characterized in that: comprise some dome shape arc shaped blades, bearing and transmission mechanism; Described blade is made according to the emery wheel configuration design, and opening constitutes the planar integral body of hemisphere down; Its inboard directly fits tightly with the emery wheel appearance; The described blade left and right sides is blade-like, and described blade pass is crossed screw and is fixed on the described bearing, and described bearing size is adaptive with emery wheel; The end of described bearing connects transmission mechanism.
2. the soft fixed air pressure emery wheel prosthetic device of abrasive particle as claimed in claim 1; It is characterized in that: all there is blade in its one-sided or left and right sides of said dome shape arc shaped blade; Crooked, the inboard one-tenth sphere of blade upper and lower side shape curved surface, described blade is be used to remove the main gradient deviation angle abrasive particle raised areas that is 1 district outer curved.
3. the soft fixed air pressure emery wheel prosthetic device of abrasive particle as claimed in claim 1; It is characterized in that: all there is blade in its one-sided or left and right sides of said dome shape arc shaped blade; Crooked, the inboard one-tenth sphere of blade upper and lower side shape curved surface; Described blade is the linear pattern that is used to remove the main gradient deviation angle abrasive particle raised areas that is 2 districts, has one-sided blade or bilateral blade.
4. the soft fixed air pressure emery wheel prosthetic device of abrasive particle as claimed in claim 1; It is characterized in that: all there is blade in its one-sided or left and right sides of said dome shape arc shaped blade; The blade upper and lower side is crooked, inboard become sphere shape curved surface, described blade be used to remove the main gradient deviation angle abrasive particle raised areas that is 3 districts in curved.
5. like the soft fixed air pressure emery wheel prosthetic device of the described abrasive particle of one of claim 2-4; It is characterized in that: described blade pass is crossed screw and is fixed on the said bearing; The adjustable positions that screw is fixed on bearing; Said bearing becomes cylindrical, and the downside of described bearing is equipped with the screwed hole, the upside that are used for fixing blade and links to each other with transmission mechanism.
6. the soft fixed air pressure emery wheel prosthetic device of abrasive particle as claimed in claim 5, it is characterized in that: described transmission mechanism one end connects described bearing, and the other end connects power source, can be fixed on any lathe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210116854.7A CN102626900B (en) | 2012-04-19 | 2012-04-19 | Repair device for soft fixed abrasive particle pneumatic grinding wheel |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210116854.7A CN102626900B (en) | 2012-04-19 | 2012-04-19 | Repair device for soft fixed abrasive particle pneumatic grinding wheel |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102626900A true CN102626900A (en) | 2012-08-08 |
| CN102626900B CN102626900B (en) | 2014-11-05 |
Family
ID=46585388
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210116854.7A Expired - Fee Related CN102626900B (en) | 2012-04-19 | 2012-04-19 | Repair device for soft fixed abrasive particle pneumatic grinding wheel |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102626900B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107953259A (en) * | 2017-12-01 | 2018-04-24 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Polishing pad finishing method and the cmp method for including it |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003039237A (en) * | 2001-07-05 | 2003-02-12 | Reishauer Ag | Apparatus for dressing abrasive wheel for gear grinding |
| JP3872721B2 (en) * | 2002-05-24 | 2007-01-24 | 本田技研工業株式会社 | Wheel dressing method |
| CN102152239A (en) * | 2011-03-19 | 2011-08-17 | 上海规程精密机械有限公司 | Machine tool for forming and dressing grinding wheel |
| CN102179759A (en) * | 2011-03-03 | 2011-09-14 | 浙江工业大学 | Finishing machining system based on flexible controlled air pressure grinding wheel |
| CN202668348U (en) * | 2012-04-19 | 2013-01-16 | 浙江工业大学 | Repairing device for soft and fixed abrasive particle air pressure grinding wheel |
-
2012
- 2012-04-19 CN CN201210116854.7A patent/CN102626900B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003039237A (en) * | 2001-07-05 | 2003-02-12 | Reishauer Ag | Apparatus for dressing abrasive wheel for gear grinding |
| JP3872721B2 (en) * | 2002-05-24 | 2007-01-24 | 本田技研工業株式会社 | Wheel dressing method |
| CN102179759A (en) * | 2011-03-03 | 2011-09-14 | 浙江工业大学 | Finishing machining system based on flexible controlled air pressure grinding wheel |
| CN102152239A (en) * | 2011-03-19 | 2011-08-17 | 上海规程精密机械有限公司 | Machine tool for forming and dressing grinding wheel |
| CN202668348U (en) * | 2012-04-19 | 2013-01-16 | 浙江工业大学 | Repairing device for soft and fixed abrasive particle air pressure grinding wheel |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107953259A (en) * | 2017-12-01 | 2018-04-24 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Polishing pad finishing method and the cmp method for including it |
| CN107953259B (en) * | 2017-12-01 | 2019-09-27 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Polishing pad finishing method and cmp method comprising it |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102626900B (en) | 2014-11-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR102413618B1 (en) | Method for shaping and finishing a workpiece | |
| CN103769983A (en) | Polishing assisting device of polishing machine, and polishing machine | |
| CN102626900A (en) | Repair device for soft fixed abrasive particle pneumatic grinding wheel | |
| CN202668348U (en) | Repairing device for soft and fixed abrasive particle air pressure grinding wheel | |
| CN203956720U (en) | A kind of diamond-impregnated wheel | |
| CN105690198A (en) | Pressure-adjustable floating polishing device | |
| CN203509855U (en) | Rough polishing tile for shaft part | |
| CN203426872U (en) | High-precision sponge sand | |
| CN201500928U (en) | Clamp pressure fine-adjustment device for surface lapping machine | |
| CN207858579U (en) | Grinder | |
| CN212977799U (en) | Part grinding equipment for machine-building | |
| CN202225099U (en) | Novel high-elasticity strong sponge sanding block | |
| CN204135910U (en) | A kind of polishing disk device | |
| CN203509861U (en) | Finishing polishing tile for shaft part | |
| CN203817980U (en) | Finishing device for finishing grinding wheel grinding surface | |
| JP7337095B2 (en) | Compatible Abrasive Article | |
| CN205148097U (en) | Porous sponge buffing wheel convenient to installation | |
| CN206643702U (en) | Supporting device for cutters applied to processing of whetting a knife | |
| CN205148098U (en) | Sponge buffing wheel convenient to installation | |
| CN205148106U (en) | Sponge buffing wheel of installation of being convenient for of indent | |
| CN218504083U (en) | Deburring machine | |
| CN104875088A (en) | Spherical workpiece grinding machine tool | |
| CN203696684U (en) | Polisher polishing-assisting device and polisher | |
| CN205915191U (en) | Ventilation formula abrasive disc connects | |
| CN105290990A (en) | Handheld porous sponge polishing wheel |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20191115 Address after: 215100 Jiangsu province Suzhou Wuzhong Economic Development Zone the River Street Wuzhong Road No. 1368 Building 1 Patentee after: Suzhou Wei you Intellectual Property Operation Co.,Ltd. Address before: 313000 Room 1403, 14th Floor, Building B, Freeport, Headquarters 1188 District Fulu Road, Wuxing District, Huzhou City, Zhejiang Province Patentee before: Zhejiang creation Intellectual Property Service Co.,Ltd. Effective date of registration: 20191115 Address after: 313000 Room 1403, 14th Floor, Building B, Freeport, Headquarters 1188 District Fulu Road, Wuxing District, Huzhou City, Zhejiang Province Patentee after: Zhejiang creation Intellectual Property Service Co.,Ltd. Address before: 310014 Hangzhou city in the lower reaches of the city of Zhejiang Wang Road, No. 18 Patentee before: Zhejiang University of Technology |
|
| TR01 | Transfer of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141105 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |