CN102607817A - Method and device for measuring lateral magnification of optical system - Google Patents
Method and device for measuring lateral magnification of optical system Download PDFInfo
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Abstract
The invention discloses a method and a device for measuring lateral magnification of an optical system, belonging to the metering equipment field taking optical method as characteristic, wherein the method comprises the steps of taking line light source as target to obtain a linear image; finding value range of the pixel distance in the frequency domain; using the search algorithm to perform computing to obtain lateral magnification of the optical system according to that the overlap ratio of the actual modulation transfer function curve related to the pixel distance and the theoretical actual modulation transfer function curve is the best on the least squares condition; and the line light source is a bent shape in a plane determined by the optical axis direction of the device and row or line direction of the image sensor; any position of the line light source can image focally to the surface of the image sensor. The method for measuring lateral magnification of an optical system in the invention is beneficial for reducing error between single measurement results so as to improve repeatability of the measurement result.
Description
Technical field
It is the metering outfit field of characteristic that the optical system lateral magnification measuring method of utilizing line source belongs to the employing optical means with device; Relating in particular to a kind of is target with the line source, utilizes line source to look like to measure the method and apparatus of optical system lateral magnification at frequency domain.
Background technology
The optical system lateral magnification is a very important parameter in medical science and the precision measurement field, and it not only indicates the technical indicator of optical system, can utilize this technical indicator to carry out other Parameter Precise Measuring equally.Yet, how to obtain the lateral magnification of an optical system, be the matter of utmost importance of carrying out this work.
One, optical system lateral magnification measuring method problem
1987 07 month; " medical physics " publish an article " magnification of object lens in the opinion microscope "; Found the contradiction that produces in lateral magnification experimental formula and the actual measurement process of object lens in the microscope; Though this article does not provide the measuring method of object lens lateral magnification, this contradiction has but been drawn the problems of measurement of optical system lateral magnification.
And some follow-up articles all show the necessity that the optical system lateral magnification is measured.
1999 03 month; " Huangshan Higher Training School's journal " the 1st the 2nd phase of volume publish an article " about the discussion of lateral magnification in the geometrical optics "; This article has been discussed the mathematic(al) representation of optical system lateral magnification; The applicable elements of this method is the perfect optical system imaging under the paraxial condition, and when these conditions do not satisfy, but not explanation of the error between formula that this paper summed up and the actual optical system lateral magnification; More lack for this error, how to measure the explanation of optical system lateral magnification method.
2000 05 month; " South China Normal University's journal (natural science edition) " the 2nd phase publish an article " about the analysis and the utilization of desirable optical system lateral magnification curve "; This paper sums up the computing formula of desirable optical system lateral magnification according to the definition of optical system lateral magnification; And draw out lateral magnification-object distance image distance curve, the condition that this method is suitable for remains the perfect optical system paraxial rays, and under the non-ideal condition; Error between lateral magnification of pointing out in the experimental formula and the actual lateral magnification is not explanation but, and the necessity of measuring optical system lateral magnification method more has been described.
2002 06 month; " Jiangxi Teaching College's journal (natural science) " the 23rd the 3rd phase of volume publish an article " the object image distance formula and the lateral magnification formula of deriving lens under the paraxial condition with position phase inversion function "; This article is the basis with the Fourier optics; Utilize the phase tranformation effect of lens to derive image range formula and the optical system lateral magnification formula under the paraxial condition; Yet the applicable elements of this piece article remains the perfect optical system imaging under the paraxial approximation condition, has together two pieces of problems that article is identical before equally.
Because the active demand that exists the optical system lateral magnification to measure is so in fields such as medical domain and precision measurements, all have the scholar to propose the measuring method of oneself.
2010 09 month; " medical image technology " the 26th volume supplementary issue 1 publish an article " mensuration of the intrinsic magnification of digital X-ray machine " a kind of assay method of magnification is provided; This assay method at first is fixed on small ball on the X line detector, takes the photograph the scale that carries with machine behind the sheet and measures the diameter of little spheric projection; Print photo, readding under the sheet lamp with the divider amount steel ball size of projection on the good photo, and accurately measuring its data, contrast two groups of wrong differences of data with vernier caliper.Measure the actual diameter of corresponding steel ball equally with vernier caliper, can draw two diameter ratios, i.e. X line hachure magnification.Because this article is not to be write by precision measurement field personnel, so the measuring method that article adopted is more ancient, what continue to use is the tape measure object height, and this tape measure has certain subjectivity, bigger to the measurement result influence.
2003 09 month; " Hebei Vocational Technology Normal College's journal " the 17th the 3rd phase of volume publishes an article " compare the plate method and survey magnification of telescope "; This article has been introduced a kind of new method of optical system lateral magnification; This method is compared with existing Lab of General Physics method therefor, and not only principle is simple, data are accurate, and has more operability.Yet this method is appointed the constraint of so not breaking away from classic method, and the method that rule reads target length is still continued to use in the judgement of image height, therefore has the problem of subjectivity equally.
Yet this problem solves along with the developing and being widely applied to the precision measurement field rapidly of CCD, and simultaneously, the measuring accuracy of optical system lateral magnification is also corresponding to be improved.
1998 06 month, " photoelectric project " the 25th the 3rd phase of volume published an article " CCD surveys the telescopic system magnification ", and the method principle that this article is introduced is simple; Directly utilize the image height object height recently to measure the magnification of telescopic system; The method that this article is introduced is compared with classic method, and image height no longer accepted scale is measured, but judges through the product of shared CCD number of pixels of groove and pel spacing; This method has reduced the subjective factor in the measuring process, makes measurement result more accurate.
2002 03 month; " Physical Experiment " the 22nd the 3rd phase of volume publishes an article in " basic point that the lateral magnification method is confirmed complex optics ", and 2006 08 month, " College Physics " the 25th the 8th phase of volume publish an article " basic point that the lateral magnification method is measured optical system "; These two pieces of articles have expanded to a new application with lateral magnification; Confirm the basic point of complex optics with it, and draw important conclusion, basic point is the function of optical system lateral magnification.It is whether accurate directly relevant with the order of accuarcy of optical system lateral magnification that this conclusion explanation basic point is confirmed, therefore, is necessary accurately to measure the optical system lateral magnification.And this paper still continues to use the definition of lateral magnification, and promptly image height and object height ratio are measured, and wherein, the measuring principle of above chapter article is still continued to use in the measurement of image height, according to double slit across number of pixels and the product of pel spacing confirm.
Statement to art methods can sum up to draw a conclusion, and for the problems of measurement of optical system lateral magnification, is nothing but to adopt two kinds of methods:
1) utilize the definition of optical system lateral magnification, promptly the ratio of image height and object height comes directly measurement;
2), obtain the indirect measurement of realization to the optical system lateral magnification through picture altitude according to optical system lateral magnification and the particular kind of relationship of certain picture altitude in certain optical systems.
No matter be any method, all need judge, and the determination methods of present stage have identical technical characterictic image height:
Utilize image obtain the elevation information of image across the product of the number of pixel and pel spacing.
Though this technical characterictic can be avoided in the classic method with the subjective factor in the process of rule measurement image height; But this method also has the problem of self, because for the judgement of number of pixels, can only be that integer is judged; The judgement of each side exists at most ± error of 0.5 pixel; Two edges just possibly exist ± error of 1 pixel, and size of images is more little, and error will be big more.Though can increase the length of line source in theory; Remedied through sharing error equally with more pixel; But for big distortion optical system, the different optical system of enlargement ratio under the promptly different visual fields, the length that increases line source can be brought new problem equally:
1) increases target size, may make image that serious deformation takes place on length, in this case; Not only can not share error equally; Can make the error in judgement of number of pixels bigger on the contrary, therefore for big distortion optical system, this method is not suitable in big field range, measuring;
2) to big distortion optical system; Ought to be in each small field of view scope; Accurately measure the lateral magnification under this field range; Finally obtain the lateral magnification curve under the different visual fields, but since measuring method that background technology adopted in the small field of view scope between the single measurement result error bigger, therefore big distortion optical system lateral magnification measuring repeatability is low.
Two, optical system lateral magnification measurement mechanism problem
The field tests of international Patent classificating number G01M 11/02 optical property discloses forming of moving image modulation transfer function measurement mechanism by two patents of invention:
Patent No. ZL200810137150.1; At on 09 29th, 2010 Granted publication day; Patent of invention " dynamic target modulation transfer function measurement method and device "; Disclose a kind of moving image modulation transfer function measurement mechanism of high-accuracy multifunctional, also had the structure of light source, optical system and imageing sensor in this device, and be that light source arrives image sensor surface through optical system imaging equally.
Patent No. ZL201010252619.3; At on 01 11st, 2012 Granted publication day; Patent of invention " moving image modulation transfer function measurement mechanism " on the basis of a last disclosed device of patent, further defines the coupling scheme of optical lens in the device and the method for synchronization of measurement.
But the movement locus that these two characteristic feature of an inventions are light sources is perpendicular to the straight line of optical axis; For the optical system that the curvature of field is arranged, in the process of light source motion, will inevitably cause the out of focus of image; If these two the disclosed measurement mechanisms of invention are applied directly among the present invention; Can't overcome problem of image blurring and gradation of image value variation issue that out of focus causes, this problem can cause the locational skew of cutoff frequency, and the accuracy of measurement result is affected.
Summary of the invention
The present invention is exactly to big distortion optical system to above-mentioned existing measuring method; Be not suitable for measuring in the big field range, and in the small field of view scope, have the low problem of lateral magnification measuring repeatability again; And there is the problem of out of focus in existing measurement mechanism; Proposed a kind of measuring method and device of optical system lateral magnification, this method can improve measurement result repeatability in the small field of view scope, be more suitable for measuring big distortion optical system lateral magnification; This device can be eliminated the influence of out of focus to measurement result, further improves measurement result repeatability.
The objective of the invention is to realize like this:
Utilize the optical system lateral magnification measuring method of line source, step is following:
A, to place length at object space be the line source of d, and direction is parallel with the row or the column direction of imageing sensor;
B, imageing sensor form images to line source, obtain initial point spread function image; Keep the imageing sensor time shutter constant, remove line source, imageing sensor forms images to background, obtains interfering picture, and with the maximal value of gray-scale value in the interfering picture as threshold value;
C. b is gone on foot in the initial point spread function image that obtains, full line that the line source picture is expert at or is listed as or permutation information extract, and as initial line spread function image, this initial line spread function image has n element; And gray-scale value in this n element is modified to 0 less than the gray-scale value of the pixel of b step gained threshold value, and obtaining modified line spread function image, this modified line spread function image has n element;
Perhaps:
B is gone on foot in the initial point spread function image that obtains, and gray-scale value is modified to 0 less than the gray-scale value of the pixel of b step gained threshold value, as adjusting point spread function image; And with in the adjusting point spread function image, full line that the line source picture is expert at or is listed as or permutation information extract, and obtain modified line spread function image, and this modified line spread function image has n element;
D. the modified line spread function image that the c step is obtained carries out discrete Fourier transformation and delivery; Obtain the modulation transfer function image; This modulation transfer function image has the identical element number n of modified line spread function image that obtains with the c step; Be n discrete spectrum component, be respectively M according to spatial frequency order from small to large
0, M
1, M
2..., M
N-1, at this in proper order down, it is M that modulating transfer function value reaches the pairing modulating transfer function value of minimal value for the first time
i, footnote sequence number is i under it, the pel spacing l of combining image sensor obtains M
I-1And M
I+1Pairing spatial frequency values is respectively: f
Min=(i-1)/(nl) and f
Max=(i+1)/(nl);
E. according to modulation transfer function model M TF (f)=| sinc (π fd ') |, the spatial frequency range f that obtains in conjunction with d step
MinAnd f
Max, obtain line source as length span: d
Max'=1/f
Min=nl/ (i-1) and d
Min'=1/f
Max=nl/ (i+1);
F. the line source that obtains according to a step line source length d and e step is as the length span, calculates optical system lateral magnification span to be: β
Min=d
Min'/d=nl/ ((i+1) d) and β
Max=d
Max'/d=nl/ ((i-1) d);
G. the optical system lateral magnification span that obtains according to the f step is divided into N part with the optical system lateral magnification, is respectively β
1, β
2..., β
N, wherein, β
1=β
Min, β
N=β
Max
H. go on foot at d and choose K data as a comparison in n the modulating transfer function value that obtains, this K modulating transfer function value is respectively M
K1, M
K2..., M
KK, N the pel spacing that the g step is obtained is updated to following formula respectively:
In the resulting N of this formula the value, the pairing optical system lateral magnification of minimum value β is institute and asks.
Utilize the optical system lateral magnification measurement mechanism of line source; Comprise line source, optical system, imageing sensor; Described line source arrives image sensor surface through optical system imaging, and, in this device optical axis direction and image sensor line or the determined plane of column direction; Line source is bending, and accurate Jiao in optional position is imaged onto image sensor surface on the described line source.
The invention has the beneficial effects as follows:
1) measuring method of the present invention's employing is different from traditional spatial domain measuring method; This method is that target obtains linear image with the line source; In frequency domain, seek the span of pel spacing; And best according to the actual modulated transfer curve relevant and theoretical modulation transfer function curve registration under least square condition with pel spacing, utilize searching algorithm to calculate the optical system lateral magnification; When this characteristic make to adopt the short and small line source of length, can obtain higher cutoff frequency, thereby share the error of cutoff frequency equally, make that the error between the single measurement result is littler, and then improve measurement result repeatability;
2) measurement mechanism of the present invention's employing is in this device optical axis direction and image sensor line or the determined plane of column direction, and line source is bending, and accurate Jiao in optional position is imaged onto image sensor surface on the described line source; This characteristic makes the modulation transfer function curve that measures more near true curve, and the cutoff frequency position that actual measurement obtains is more accurate, can further reduce the error between the single measurement result, improves measurement result repeatability.
Description of drawings
Fig. 1 is the optical system lateral magnification measurement mechanism structural representation that utilizes line source
Fig. 2 is the optical system lateral magnification measurement mechanism optical planar circuit figure that utilizes line source
Fig. 3 is the optical system lateral magnification measuring method process flow diagram that utilizes line source
Fig. 4 is an initial point spread function image
Fig. 5 is an initial line spread function image
Fig. 6 is a modified line spread function image
Among the figure: 1 line source, 2 optical systems, 3 imageing sensors
Embodiment
Below in conjunction with accompanying drawing the specific embodiment of the invention is done and to be described in further detail.
Fig. 1 is the optical system lateral magnification measurement mechanism structural representation that utilizes line source, and figure is as shown in Figure 2 for its optical planar circuit; This device comprises line source 1, optical system 2, imageing sensor 3; Described line source 1 is imaged onto imageing sensor 3 surfaces through optical system 2; And; In this device optical axis direction and the determined plane of imageing sensor 3 line directions, line source 1 is bending, and accurate Jiao in optional position is imaged onto imageing sensor 3 surfaces on the described line source 1; Wherein, the lateral length of line source 1 is 3mm, and the pel spacing of imageing sensor 3 is 5.6 μ m.
Utilize the optical system lateral magnification measuring method of line source, process flow diagram is as shown in Figure 3, and this method step is following:
A, to place length at object space be the line source 1 of d=3mm, and direction is parallel with imageing sensor 3 line directions;
B, 1 imaging of 3 pairs of line sources of imageing sensor, as shown in Figure 4, obtain initial point spread function image; Keep 3 time shutter of imageing sensor constant, remove line source 1,3 pairs of backgrounds imagings of imageing sensor obtain interfering picture, and with the maximal value of gray-scale value in the interfering picture as threshold value, this threshold value is 10;
C. b is gone on foot in the initial point spread function image that obtains; The full line information that the line source picture is expert at extracts, and is as initial line spread function image, as shown in Figure 5; And gray-scale value is modified to 0 less than the gray-scale value that b goes on foot the pixel of gained threshold value in the initial line spread function image; Obtain modified line spread function image, as shown in Figure 6, this modified line spread function image has n=1280 element;
Perhaps:
B is gone on foot in the initial point spread function image that obtains, and gray-scale value is modified to 0 less than the gray-scale value of the pixel of b step gained threshold value, as adjusting point spread function image; And with in the adjusting point spread function image, the full line information that the line source picture is expert at extracts, and obtains modified line spread function image, and is as shown in Figure 6, and this modified line spread function image has n=1280 element;
D. the modified line spread function image that the c step is obtained carries out discrete Fourier transformation and delivery; Obtain the modulation transfer function image; This modulation transfer function image has the identical element number n=1280 of modified line spread function image that obtains with the c step; Promptly 1280 discrete spectrum components are respectively M according to spatial frequency order from small to large
0, M
1, M
2..., M
1279, at this in proper order down, it is M that modulating transfer function value reaches the pairing modulating transfer function value of minimal value for the first time
42, footnote sequence number is i=42 under it, the pel spacing l=5.6 μ m of combining image sensor 3 obtains M
41And M
43Pairing spatial frequency values is: f
Min=(i-1)/(nl)=(42-1)/(1280 * 5.6 * 10
-3)=5.7199lp/mm and f
Max=(i+1)/(nl)=(42+1)/(1280 * 5.6 * 10
-3)=5.9989lp/mm;
E. according to modulation transfer function model M TF (f)=| sinc (π fd ') |, the spatial frequency range f that obtains in conjunction with d step
Min=5.7199lp/mm and f
Max=5.9989lp/mm obtains line source as length span: d
Max'=1/f
Min=nl/ (i-1)=1280 * 5.6 * 10
-3/ (42-1)=0.1748mm and d
Min'=1/f
Max=nl/ (i+1)=1280 * 5.6 * 10
-3/ (42+1)=0.1667mm;
F. the line source that obtains according to a step line source 1 length d=3mm and e step is as length span d
Min'=0.1667mm and d
Max'=0.1748mm calculates optical system lateral magnification span and is: β
Min=d
Min'/d=nl/ ((i+1) d)=1280 * 5.6 * 10
-3/ ((42+1) * 3)=0.0556 and β
Max=d
Max'/d=nl/ ((i-1) d)=1280 * 5.6 * 10
-3/ ((42-1) * 3)=0.0583;
E. according to modulation transfer function model M TF (f)=| sinc (π fd ') |, in conjunction with the spatial frequency values f=5.8594lp/mm that d step obtains, obtain line source and be: d '=1/f=nl/i=1280 * 5.6 * 10 as length
-3/ 42=0.1707mm;
F. the line source that obtains according to a step line source 1 length d=3mm and e step as length d '=0.1707mm, calculate optical system 3 lateral magnifications and be: β=d '/d=nl/ (id)=1280 * 5.6 * 10
-3/ (42 * 3)=0.0569.
G. the optical system 3 lateral magnification span β that obtain according to the f step
Min=0.0556 and β
Max=0.0583, optical system 3 lateral magnifications are divided into N=1000 part, be respectively β
1, β
2..., β
1000, wherein, β
1=β
Min=0.0556, β
1000=β
Max=0.0583;
H. according to spatial frequency order from small to large, n=1280 the modulating transfer function value that the d step is obtained is depicted as a curve, chooses on this curve from M
0Begin to first maximum value, and do not comprise the M that the d step obtains
42, data are compared in K conduct altogether, and this K modulating transfer function value is respectively M
K1, M
K2..., M
KK, N=1000 the optical system lateral magnification that the g step is obtained is updated to following formula respectively:
In the resulting N=1000 of this formula the value, the pairing optical system 3 lateral magnification β of minimum value are institute and ask, through calculating β=0.0558.
Claims (2)
1. utilize the optical system lateral magnification measuring method of line source, it is characterized in that said method step is following:
A, to place length at object space be the line source of d, and direction is parallel with the row or the column direction of imageing sensor;
B, imageing sensor form images to line source, obtain initial point spread function image; Keep the imageing sensor time shutter constant, remove line source, imageing sensor forms images to background, obtains interfering picture, and with the maximal value of gray-scale value in the interfering picture as threshold value;
C. b is gone on foot in the initial point spread function image that obtains, full line that the line source picture is expert at or is listed as or permutation information extract, and as initial line spread function image, this initial line spread function image has n element; And gray-scale value in this n element is modified to 0 less than the gray-scale value of the pixel of b step gained threshold value, and obtaining modified line spread function image, this modified line spread function image has n element;
Perhaps:
B is gone on foot in the initial point spread function image that obtains, and gray-scale value is modified to 0 less than the gray-scale value of the pixel of b step gained threshold value, as adjusting point spread function image; And with in the adjusting point spread function image, full line that the line source picture is expert at or is listed as or permutation information extract, and obtain modified line spread function image, and this modified line spread function image has n element;
D. the modified line spread function image that the c step is obtained carries out discrete Fourier transformation and delivery; Obtain the modulation transfer function image; This modulation transfer function image has the identical element number n of modified line spread function image that obtains with the c step; Be n discrete spectrum component, be respectively M according to spatial frequency order from small to large
0, M
1, M
2..., M
N-1, at this in proper order down, it is M that modulating transfer function value reaches the pairing modulating transfer function value of minimal value for the first time
i, footnote sequence number is i under it, the pel spacing l of combining image sensor obtains M
I-1And M
I+1Pairing spatial frequency values is respectively: f
Min=(i-1)/(nl) and f
Max=(i+1)/(nl);
E. according to modulation transfer function model M TF (f)=| sin c (π fd ') |, the spatial frequency range f that obtains in conjunction with d step
MinAnd f
Max, obtain line source as length span: d
Max'=1/f
Min=nl/ (i-1) and d
Min'=1/f
Max=nl/ (i+1);
F. the line source that obtains according to a step line source length d and e step is as the length span, calculates optical system lateral magnification span to be: β
Min=d
Min'/d=nl/ ((i+1) d) and β
Max=d
Max'/d=nl/ ((i-1) d);
G. the optical system lateral magnification span that obtains according to the f step is divided into N part with the optical system lateral magnification, is respectively β
1, β
2..., β
N, wherein, β
1=β
Min, β
N=β
Max
H. go on foot at d and choose K data as a comparison in n the modulating transfer function value that obtains, this K modulating transfer function value is respectively M
K1, M
K2..., M
KK, N the pel spacing that the g step is obtained is updated to following formula respectively:
In the resulting N of this formula the value, the pairing optical system lateral magnification of minimum value β is institute and asks.
2. utilize the optical system lateral magnification measurement mechanism of line source; Comprise line source (1), optical system (2), imageing sensor (3); Described line source (1) is imaged onto imageing sensor (3) surface through optical system (2); It is characterized in that: in this device optical axis direction and imageing sensor (3) row or the determined plane of column direction, line source (1) is bending, and last accurate Jiao in optional position of described line source (1) is imaged onto imageing sensor (3) surface.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102607813A (en) * | 2012-03-17 | 2012-07-25 | 哈尔滨工业大学 | Method and device for measuring transverse magnifying power of optical system based on linear source |
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| CN102607813A (en) * | 2012-03-17 | 2012-07-25 | 哈尔滨工业大学 | Method and device for measuring transverse magnifying power of optical system based on linear source |
| CN102607813B (en) * | 2012-03-17 | 2014-10-22 | 哈尔滨工业大学 | Method for measuring transverse magnifying power of optical system based on linear source |
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