CN102607543A - 基于硅通孔技术的硅晶圆直接键合的微机械陀螺仪 - Google Patents
基于硅通孔技术的硅晶圆直接键合的微机械陀螺仪 Download PDFInfo
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CN201210094531.2A CN102607543B (zh) | 2012-04-01 | 2012-04-01 | 基于硅通孔技术的硅晶圆直接键合的微机械陀螺仪 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104198763A (zh) * | 2014-09-17 | 2014-12-10 | 安徽北方芯动联科微系统技术有限公司 | Tsv圆片级封装的三轴mems加速度计 |
CN105424017A (zh) * | 2016-01-12 | 2016-03-23 | 中国人民解放军国防科学技术大学 | 一种基于切向静电力驱动的三层结构硅微陀螺 |
CN111413560A (zh) * | 2020-03-10 | 2020-07-14 | 中国电子产品可靠性与环境试验研究所((工业和信息化部电子第五研究所)(中国赛宝实验室)) | 圆片键合质量可靠性测试结构及可靠性测试方法 |
Citations (3)
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CN1821787A (zh) * | 2005-12-09 | 2006-08-23 | 中国科学院上海微系统与信息技术研究所 | 三维集成微机械加速度传感器及制作方法 |
US20070029629A1 (en) * | 2005-07-21 | 2007-02-08 | Evigia Systems, Inc. | Integrated sensor and circuitry and process therefor |
CN1959417A (zh) * | 2006-11-17 | 2007-05-09 | 中国科学院上海微系统与信息技术研究所 | 微机械电容式加速度传感器及制作方法 |
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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US20070029629A1 (en) * | 2005-07-21 | 2007-02-08 | Evigia Systems, Inc. | Integrated sensor and circuitry and process therefor |
CN1821787A (zh) * | 2005-12-09 | 2006-08-23 | 中国科学院上海微系统与信息技术研究所 | 三维集成微机械加速度传感器及制作方法 |
CN1959417A (zh) * | 2006-11-17 | 2007-05-09 | 中国科学院上海微系统与信息技术研究所 | 微机械电容式加速度传感器及制作方法 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104198763A (zh) * | 2014-09-17 | 2014-12-10 | 安徽北方芯动联科微系统技术有限公司 | Tsv圆片级封装的三轴mems加速度计 |
CN104198763B (zh) * | 2014-09-17 | 2017-01-11 | 安徽北方芯动联科微系统技术有限公司 | Tsv圆片级封装的三轴mems加速度计 |
CN105424017A (zh) * | 2016-01-12 | 2016-03-23 | 中国人民解放军国防科学技术大学 | 一种基于切向静电力驱动的三层结构硅微陀螺 |
CN105424017B (zh) * | 2016-01-12 | 2017-01-18 | 中国人民解放军国防科学技术大学 | 一种基于切向静电力驱动的三层结构硅微陀螺 |
CN111413560A (zh) * | 2020-03-10 | 2020-07-14 | 中国电子产品可靠性与环境试验研究所((工业和信息化部电子第五研究所)(中国赛宝实验室)) | 圆片键合质量可靠性测试结构及可靠性测试方法 |
CN111413560B (zh) * | 2020-03-10 | 2022-06-10 | 中国电子产品可靠性与环境试验研究所((工业和信息化部电子第五研究所)(中国赛宝实验室)) | 圆片键合质量可靠性测试结构及可靠性测试方法 |
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Effective date of registration: 20170109 Address after: 233000 Anhui city of Bengbu province and Economic Development Zone, Road No. 2016 Patentee after: NORTH ELECTRON RESEARCH INSTITUTE ANHUI Co.,Ltd. Address before: High tech Zone Branch Road, Suzhou city of Jiangsu Province, No. 18 215000 Patentee before: Suzhou Wenzhixin Microsystem Technology Co.,Ltd. |
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Address after: No. 2016, Tanghe Road, economic development zone, Bengbu City, Anhui Province 233000 Patentee after: Anhui North Microelectronics Research Institute Group Co.,Ltd. Address before: No. 2016, Tanghe Road, economic development zone, Bengbu City, Anhui Province 233000 Patentee before: NORTH ELECTRON RESEARCH INSTITUTE ANHUI Co.,Ltd. |
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Address after: No. 2016, Tanghe Road, economic development zone, Bengbu City, Anhui Province 233000 Patentee after: Anhui North Microelectronics Research Institute Group Co.,Ltd. Address before: No. 2016, Tanghe Road, economic development zone, Bengbu City, Anhui Province 233000 Patentee before: Anhui North Microelectronics Research Institute Group Co.,Ltd. |