CN102597711A - Linear scale - Google Patents
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- CN102597711A CN102597711A CN2010800467790A CN201080046779A CN102597711A CN 102597711 A CN102597711 A CN 102597711A CN 2010800467790 A CN2010800467790 A CN 2010800467790A CN 201080046779 A CN201080046779 A CN 201080046779A CN 102597711 A CN102597711 A CN 102597711A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
- G01D5/204—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils
- G01D5/2086—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils by movement of two or more coils with respect to two or more other coils
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
- G01D5/2451—Incremental encoders
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- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Abstract
Disclosed is a linear scale such that the physical space required for the wiring of a combination scale is reduced and the installation of the combination scale at an installation site can be made simple. The combination scale (43) has a plurality of unit scales (51, 52) arranged in a column and has a common channel (61); the coil for each unit scale is connected to the common channel and thereby the coils of all the unit scales are connected in parallel. Further, an electrical resistance (56) connected to the coil of each unit scale, acts as an impedance adjustment unit, adjusting the impedance of the unit scale. The electrical resistance has a resistance value for which the impedance difference of the unit scale (greater than or equal to 100 times the aforementioned impedance difference) can be ignored. The common channel is formed by connecting a plurality of common channel segments (61A), by joining together the two end connectors (62), with the coil of each unit scale connected thereto.
Description
Technical field
The present invention relates to the linear scale of inductosyn mode.
Background technology
The linear scale of inductosyn mode has slide block and scale.With said slide block and said scale arranged opposite; The coil that is arranged at said slide block is in the state of facing mutually with the coil that is arranged at said scale across minim gap; The alternating voltage that applies SIN ripple/COS ripple through the coil to a side flows through exciting current, obtains the variation of the voltage of in the opposing party's coil, responding to because of the electromagnetic induction effect thus and carries out position probing.
And linear scale is used to detect the straight line amount of movement of moving body (worktable of lathe etc.), under the long situation of the displacement of moving body, needs to adopt the scale of the long stroke that meets this displacement.
Figure 10 illustrates the formation of the scale of existing long stroke.As shown in the drawing; In the past under the situation of the scale of the long stroke of needs; The scale 1 (scale of this monomer is also referred to as single scale) of many weak points (for example 1m) stroke is adapted to row, and will be arranged at coil 2 series connection (series) connections of each single scale 1.Thus, the scale 10 (this scale is also referred to as the combination scale) that can the group of many single scales 1 be regarded as the long stroke of 1 body.The output of combination scale 10 is input to prime amplifier 4 via connector 3.
Yet,, be distributed in the C (capacitor: stray capacitance) composition, the increase of L (inductance) composition on this scale if constitute the combination scale of long stroke through being connected in series.And; Under the situation of the combination scale that has for example constituted this long stroke that surpasses the 4m stroke on the specification with the mode that is connected in series; Because C composition, the L composition of this scale too increase, apply the waveform of voltage and the waveform of the voltage that induces thus between phase deviation (phase differential) become excessive, produced phase reversal; Thereby in the A/D transducer of handling induced voltage, can produce miscount, therefore can't correctly detect amount of movement.This phenomenon is obvious under the high situation of the frequency of exciting current especially.
For this reason, under the situation of the combination scale that for example constitutes the long stroke that surpasses 4m, correspondence is carried out in wiring through dividing into groups.
For example under the situation of the combination scale of the long stroke that constitutes 11m; Shown in figure 11; 2 of group groups and 1 group of group of combination scale 6 that 3 single scales 1 is serially connected in the long stroke of 3m of combination scale 5 that 4 single scales 1 is serially connected in the long stroke of 4m forms a line; And coil 2 parallel connections (parallel) through with these combination scales 5,6 connect, and can regard length thus as and be the combination scale 20 of long stroke of 1 body of 11m.The output of combination scale 20 is input to prime amplifier 4 via connector 3.
In addition; Because single scale 1 is than lacking 1 in the combination scale 5 in the combination scale 6; So at the scene that linear scale is installed; To have with 1 should list scale 1 the resistance 7 of the suitable resistance value of resistance value be connected with the lead-out terminal of combination scale 6, make combination scale 5 become identical with the resistance value that makes up scale 6.
(prior art document)
Patent documentation 1: japanese kokai publication hei 9-325002 communique
Summary of the invention
(problem that invention will solve)
Yet, merely will make up under the situation that scale 5,6 is connected in parallel in that kind shown in figure 11, owing to can produce the bundle 21 of bigger wiring, thereby be difficult to guarantee dispose the physical space of the bundle 21 of this wiring sometimes.
In addition; Though it is 1 that the scale bar in Figure 11 between group is counted difference; To count difference be 2 situation or be situation of 3 etc. but because of the scale bar between the also existence group of difference of stroke; So each all must select count the resistance of the corresponding resistance value of difference, in the not enough group of single scale 1, this resistance be set, so this is provided with the operation trouble that becomes at the scene that linear scale is set with the scale bar.
And; In the past; Need carry out at the scene that is provided with of linear scale to single scale 1 squeeze into pin (terminal), to this pin crimping of squeezing into lead-in wire, to operations such as the lead-in wire of crimping connect up, thereby operation is set need expends time in and the labour of scale causes wiring error easily.
Therefore, the present invention In view of the foregoing realizes, problem is to provide the required physical space of a kind of wiring that can reduce the combination scale, make the linear scale that operation etc. is set that carries out on-the-spot combination scale easily.
(being used to solve the means of problem)
Solve the linear scale of the 1st invention of above-mentioned problem; It has slide block and constitutes with the combination scale; Said linear scale is characterised in that; The structure that said combination scale adopts is: have common line and many single scales that form a line, be connected the coils from parallel connection of coils that makes all said single scales with said common line respectively through the coil that makes said single scale.
In addition; The linear scale of the 2nd invention is characterized in that in the linear scale of the 1st invention; Said common line is to utilize two ends to be provided with the common line of cutting apart of connector; Saidly cut apart that common line constitutes through said connector being combined each other connect many, the coil of said single scale respectively with respectively cut apart common line and be connected.
In addition; The linear scale of the 3rd invention is characterized in that in the linear scale of the 1st or the 2nd invention; Said many single scales have utilized single scale of multiple different length; And, on the coil of single scale of said multiple different length, connect impedance match part respectively, thereby make the impedance matching of single scale of said multiple different length.
In addition; The linear scale of the 4th invention is characterized in that in the linear scale of the 3rd invention; The said impedance match part that is connected with the coil of single scale of said multiple different length respectively; All be resistance, and said resistance have the resistance value of the extent of the single scale impedance each other that can ignore said multiple different length with same resistance value.
In addition; The linear scale of the 5th invention is characterized in that in the linear scale of the 3rd invention; The said impedance match part that is connected with the coil of single scale of said multiple different length respectively; All be to have made up any a plurality of in resistance, inductor and the capacitor and the parts that constitute; And all have identical resultant impedance value, and the said parts that made up any a plurality of in resistance, inductor and the capacitor and constituted has the resultant impedance value of the extent of the single scale impedance each other that can ignore said multiple different length.
In addition; The linear scale of the 6th invention is characterized in that in the linear scale of the 3rd invention; The said impedance match part that is connected with the coil of single scale of said multiple different length respectively; All be resistance, and said resistance have the resistance value more than 100 times of difference of single scale impedance each other of said multiple different length with same resistance value.
In addition; The linear scale of the 7th invention is characterized in that in the linear scale of the 3rd invention; The said impedance match part that is connected with the coil of single scale of said multiple different length respectively; All be to have made up any a plurality of in resistance, inductor and the capacitor and the parts that constitute; And all have identical resultant impedance value, and the said parts that made up any a plurality of in resistance, inductor and the capacitor and constituted has the resultant impedance value more than 100 times of difference of single scale impedance each other of said multiple different length.
(invention effect)
Linear scale according to the 1st invention; Owing to having slide block, it constitutes with the combination scale; Said linear scale is characterised in that; The structure that said combination scale adopts is: have common line and many single scales that form a line; Coil through making said single scale is connected the coils from parallel connection of coils that makes all said single scales with said common line respectively, so the combination scale that no matter how to extend, the phase deviation that applies between the waveform of waveform and induced voltage of voltage can not become big.And, do not need such in the past pin set (pin group) wiring, and can not produce the bundle of the bigger wiring that produces because of simple being connected in parallel yet.Therefore, can reduce the required physical space of wiring of combination scale, the wiring operation is easy, is difficult for causing wiring error.
Linear scale according to the 2nd invention; Owing in the linear scale of the 1st invention, it is characterized in that; Said common line is to utilize two ends to be provided with the common line of cutting apart of connector, saidly cuts apart that common line constitutes through said connector being combined each other connect many, the coil of said single scale respectively with respectively cut apart common line and be connected; So the wiring operation also can only be merely to combine to cut apart the connector of common line each other; Because the connection operation that does not need coil at the scene to be connected with common line, the operation of therefore connecting up becomes easier, is difficult for causing wiring error.
Linear scale according to the 3rd invention; Because in the linear scale of the 1st or the 2nd invention, it is characterized in that said many single scales have utilized single scale of multiple different length, and; On the coil of single scale of said multiple different length, connect impedance match part respectively; Thereby make the impedance matching of single scale of said multiple different length, thus the effect of the above-mentioned the 1st or the 2nd invention can be obtained, and can need not to take notice of single scale of the difference ground combination in any different length of impedance; Can constitute the combination scale of desired length, so the operation that is provided with of combination scale at the scene becomes easy.
Linear scale according to the 4th invention; Owing in the linear scale of the 3rd invention, it is characterized in that; The said impedance match part that is connected with the coil of single scale of said multiple different length respectively; All be resistance, and said resistance have the resistance value of the extent of the single scale impedance each other that can ignore said multiple different length with same resistance value; So can obtain and the same effect of above-mentioned the 3rd invention; And when single scale of making subsidiary impedance match part (resistance), need not to be provided with by the different single scale of length the impedance match part (resistance) of different resistance values, therefore the manufacturing of single scale becomes very easy.
Linear scale according to the 5th invention; Owing in the linear scale of the 3rd invention, it is characterized in that; The said impedance match part that is connected with the coil of single scale of said multiple different length respectively; All be to have made up any a plurality of in resistance, inductor and the capacitor and the parts that constitute; And all has identical resultant impedance value; And; The said parts that made up any a plurality of in resistance, inductor and the capacitor and constituted have the resultant impedance value of the extent of the single scale impedance each other that can ignore said multiple different length, thus can obtain and the same effect of above-mentioned the 3rd invention, and when single scale of making subsidiary impedance match part (having made up any a plurality of in resistance, inductor and the capacitor and the parts of formation); Need not to be provided with by the different single scale of length the impedance match part (made up any a plurality of in resistance, inductor and the capacitor and constitute parts) of different resultant impedance values, therefore the manufacturing of single scale becomes very easy.
In addition; Linear scale according to the 6th invention; Owing in the linear scale of the 3rd invention, it is characterized in that; The said impedance match part that is connected with the coil of single scale of said multiple different length respectively all is the resistance with same resistance value, and; Said resistance has the resistance value more than 100 times of difference of single scale impedance each other of said multiple different length; So can obtain and the same effect of above-mentioned the 3rd invention, and when single scale of making subsidiary impedance match part (resistance), need not to be provided with by the different single scale of length the impedance match part (resistance) of different resistance values, therefore the manufacturing of single scale becomes very easy.
Linear scale according to the 7th invention; Owing in the linear scale of the 3rd invention, it is characterized in that; The said impedance match part that is connected with the coil of single scale of said multiple different length respectively; All be to have made up any a plurality of in resistance, inductor and the capacitor and the parts that constitute; And all has identical resultant impedance value; And; The said parts that made up any a plurality of in resistance, inductor and the capacitor and constituted have the resultant impedance value more than 100 times of difference of single scale impedance each other of said multiple different length, thus can obtain and the same effect of above-mentioned the 3rd invention, and when single scale of making subsidiary impedance match part (having made up any a plurality of in resistance, inductor and the capacitor and the parts of formation); Need not to be provided with by the different single scale of length the impedance match part (made up any a plurality of in resistance, inductor and the capacitor and constitute parts) of different resultant impedance values, therefore the manufacturing of single scale becomes very easy.
Description of drawings
Fig. 1 is the structural drawing of feed back control system that has adopted the full cut-off ring of the linear scale that embodiment of the present invention example 1 relates to.
Fig. 2 is the structural drawing of the combination scale in the linear scale that relates to of embodiment of the present invention example 1.
Fig. 3 (a) is the structural drawing as single scale of the inscape of said combination scale, (b) is the structural drawing as other single scales of the inscape of said combination scale.
Fig. 4 is the structural drawing of the combination scale in the linear scale that relates to of embodiment of the present invention example 2.
Fig. 5 (a) is the structural drawing as single scale of the inscape of said combination scale, (b) is the structural drawing as other single scales of the inscape of said combination scale.
Fig. 6 is the structural drawing of the combination scale in the linear scale that relates to of embodiment of the present invention example 3.
Fig. 7 (a) is the structural drawing as single scale of the inscape of said combination scale, (b) is the structural drawing as other single scales of the inscape of said combination scale.
Fig. 8 is the structural drawing of the combination scale in the linear scale that relates to of embodiment of the present invention example 4.
Fig. 9 (a) is the structural drawing as single scale of the inscape of said combination scale, (b) is the structural drawing as other single scales of the inscape of said combination scale.
The structural drawing of the combination scale that Figure 10 is carrying out is connected in series in the past.
Figure 11 is carrying out the divide into groups structural drawing of combination scale of wiring in the past.
Embodiment
Below, based on accompanying drawing, specify embodiment example of the present invention.
< embodiment example 1 >
Based on Fig. 1～Fig. 3, embodiment example 1 of the present invention is described.
At first, based on Fig. 1, explain that the linear scale with this embodiment example 1 is applied to the situation of the feed back control system of the full cut-off ring in the lathe.
As shown in Figure 1, ball screw 31 has thread spindle 31a and the nut 31b that screws togather, and thread spindle 31a is connected with the turning axle of driving motor 32, and nut 31b is installed in the worktable 33 as moving body.Therefore, if make thread spindle 31a that kind shown in arrow A rotate through driving motor 32, then worktable 33 moves with nut 31b such straight line shown in arrow B.
For the position (amount of movement) of detecting this worktable 33, adopted the linear scale 41 of this embodiment example 1.The linear scale 41 of inductosyn mode has slide block 42 and constitutes with combination scale 43, and slide block 42 is installed in worktable 33 and moves with worktable 33 straight lines, and combination scale 43 is installed in the fixed part (omitting diagram) of lathe.Through with slide block 42 and combination scale 43 arranged opposite, the coil 44 that is arranged at slide block 42 thus be arranged at the coil 54,58 that makes up scale 43 and face mutually across minim gap.
And, the long stroke that combination scale 43 has the displacement that meets worktable 33.The back that is formed in detail of this combination scale 43 is narrated.
If apply the alternating voltage of SIN ripple/COS ripple and flow through exciting current, then induce voltage at the coil 54,58 of combination scale 43 because of the electromagnetic induction effect from the coil 44 of A/D transducer 46 to slide block 42.Induced voltage changes according to the variation of the relative position between slide block 42 (coil 44) and the combination scale 43 ( coil 54,58).Induced voltage is removed via connector 47 from combination scale 43, and after being amplified by prime amplifier 48, inputs to A/D transducer 46.
In A/D transducer 46, handle the position (amount of movement) that induced voltage comes testing platform 33, and the signal of this detection position is fed back to the NC servoamplifier 49 as control device.In NC servoamplifier 49,, and come the rotation of controlling and driving motor 32 according to the deviation of the said detection position and the said location of instruction for the position that makes worktable 33 becomes the location of instruction.
Then, based on Fig. 1～Fig. 3, the structure of the combination scale 43 of this embodiment example 1 is described.
Like Fig. 1 and shown in Figure 2; Combination scale 43 is adapted to row with single scale 51 of many (in the illustrated example being 8) short strokes (for example 1m) and single scale 52 of many (in the illustrated example being 2) short strokes (for example 250mm), thereby can regard the scale of the long stroke (for example 8.5m) of 1 body as.
The structure that single scale 51 adopts is: the substrate 53 as rectangular-shaped iron plate is provided with jagged coil 54.And, be connected with resistance 56 respectively in the both sides of the coil 54 of single scale 51.Equally, the structure that adopts of single scale 52 is: the substrate 57 as rectangular-shaped iron plate is provided with jagged coil 58.And, also be connected with resistance 56 respectively in the both sides of the coil 58 of single scale 52.The product of these single scales 51,52 conducts such subsidiary impedance match part (resistance 56) shown in Fig. 3 (a) and Fig. 3 (b), and in the manufacturing works of linear scale 41, make.
Like Fig. 1 and shown in Figure 2, the coil 54,58 of single scale 51,52 all parallel connection (parallel) connects, and on connecting, can treat as independent scale thus., if carry out simple being connected in parallel of that kind shown in Figure 11, then the corresponding quantity of bar number of wiring meeting increase and single scale 51,52 can produce the bundle of bigger wiring.
Therefore, the coil of single scale 51,52 connects the mode that has adopted the multiple branch circuit wiring of in universal serial bus connects, using.That is,, the coil 54,58 of each single scale 51,52 is connected respectively with this common line 61, makes coil 54,58 parallel connections of all single scales 51,52 thus through setting common line (bus) 61.Be provided with connector 47 in the end of common line 61, and this connector 47 combines with the connector 47 of prime amplifier 48.
On the other hand; Because the length (stroke) of single scale 51 and single scale 52 is different; Thereby R (resistance) composition that had of each single scale 51,52, (capacitor: stray capacitance) value of composition and L (inductance) composition is different, and is different with the corresponding impedance of the frequency of exciting current for C.Therefore, if the coil 54,58 of single scale 51,52 that length is different only links to each other with common line 61, then understand variation at the position detection accuracy of the shank of single scale 51,52.
Therefore, in any of the coil 54,58 of single scale 51,52, all connected aforesaid resistance 56, as the parts (impedance match part) of the impedance matching that is used to make single scale 51 and single scale 52.In arbitrary single scale 51,52, all be provided with resistance 56; And having identical resistance value, is the resistance value of the extent of the impedance that can ignore single scale 51 with single scale 52 of different length (impedance of single scale 51,52 of the state of resistance 56 promptly is not set).That is, resistance 56 has and compares fully big resistance value with the difference of said impedance.
In this case, the resistance value of preferred resistance 56 is more than 100 times of difference of the impedance of above-mentioned single scale 51,52, and the difference of said impedance is below 1% for this resistance value.For example, if the difference of said impedance is 10 Ω, then the resistance value of resistance 56 is made as more than the 1K Ω.
But if too increase the resistance value of resistance 56, the output (gain) of then making up scale 43 can become too small, therefore can't carry out the high position probing of precision.Therefore, the resistance value of resistance 56 need be made as the value that the output (gain) that can not make combination scale 43 becomes extremely little degree.In addition, which kind of the size of said output need reach more than the degree, as long as carry out suitably confirming according to the processing power of said output etc.That is the higher limit of, suitably confirming the resistance value of resistance 56 according to the size of needed output gets final product.
In addition, owing in single scale 51 of illustrated example, be provided with resistance 56, so as long as the combined resistance value of the resistance 56 of these both sides is made as above-mentioned value in the both sides of coil 54.Equally, owing in single scale 52 of illustrated example, also be provided with resistance 56, so as long as the combined resistance value of the resistance 56 of these both sides is made as above-mentioned value in the both sides of coil 58.Be provided with resistance 56 in the both sides of coil 54,58 and be having good stability for the alternating voltage that makes coil 54,58 inductions.
But be not limited thereto,, may not as above-mentioned, resistance 56 be set in the both sides of coil 54,58 from making this viewpoint of impedance matching of single scale 51,52, also can be only at the one-sided resistance 56 that is provided with of coil 54,58.In this case, the resistance value of the one-sided resistance 56 that is arranged at coil 54 is made as above-mentioned value, the resistance value of the one-sided resistance 56 that is arranged at coil 58 also is made as above-mentioned value gets final product.
As stated; Linear scale 41 according to this embodiment example 1; Constitute with combination scale 43 owing to this linear scale 41 has slide block 42, linear scale 41 is characterised in that the structure that combination scale 43 adopts is: have common line 61 and many single scales 51,52 that form a line; And the coil 54,58 through making single scale 51,52 is connected with common line 61 respectively; Thereby make coil 54,58 parallel connections of all single scales 51,52, so the combination scale 43 that no matter how to extend, the phase deviation that applies between the waveform of waveform and induced voltage of voltage can not become big.And, do not need such in the past pin set wiring, and can not produce the bundle of the bigger wiring that produces because of simple being connected in parallel yet.Therefore, can reduce the required physical space of wiring of combination scale 43, the wiring operation is easy, is difficult for causing wiring error.
In addition; Linear scale 41 according to this embodiment example 1; Owing to it is characterized in that on the coil 54,58 of single scale 51,52 of different length, connecting resistance 56 respectively is used as impedance match part, thereby mate the impedance of single scale 51,52 of different length, so can need not to take notice of single scale 51,52 of the difference ground combination in any different length of impedance; Can constitute the combination scale of desired length, so the operation that is provided with of combination scale 41 at the scene becomes easy.
In addition; Linear scale 41 according to this embodiment example 1; Owing to it is characterized in that the impedance match part that is connected respectively with the coil 54,58 of single scale 51,52 of different length all is the resistance 56 with same resistance value; And this resistance 56 has the resistance value of the extent (more than 100 times of the difference of said impedance) of the impedance of the single scale 51,52 that can ignore different length; So when single scale 51,52 of making subsidiary impedance match part (resistance 56), need not to be provided with by the different single scale 51,52 of length the impedance match part (resistance) of different resistance values, therefore the manufacturing of single scale 51,52 is very easy to.
In addition,, be not limited thereto, also can adopt single scale (for example single scale of 1m, 500mm and 250mm) of the different length (stroke) more than 3 kinds though in above-mentioned explanation, adopted single scale 51,52 of 2 kinds of different lengths (stroke).In this case; With likewise above-mentioned; As long as on the coil of each single scale, connect the impedance matching that resistance makes all single scales, need only the value that the resistance value of resistance at this moment is made as the extent (more than 100 times of the difference of said impedance) that to ignore the impedance between single scale.In addition, under the difference condition of different of the difference of the impedance between a certain single scale and the impedance between other single scales, as long as be made as the resistance value of the extent (more than 100 times of the difference of said impedance) that can ignore maximum impedance.
< embodiment example 2 >
Based on Fig. 4 and Fig. 5, embodiment example 2 of the present invention is described.Wherein, owing to the configuration relation between slide block in the linear scale and the combination scale, the application examples of linear scale etc. and above-mentioned embodiment example 1 same (with reference to Fig. 1), so omit explanation at this.
In addition, about giving prosign, and omit the detailed description of repeating part with the same part of combination scale (with reference to Fig. 2, Fig. 3) of above-mentioned embodiment example 1.
As shown in Figure 4, in the combination scale 71 in the linear scale of this embodiment example 2, common line 61 is divided into a plurality of part 61A (be also referred to as cut apart common line with this part), and is respectively arranged with connector 62 at the two ends of respectively cutting apart common line 61A.Through combining the adjacent connector of cutting apart common line 61A 62 to connect a plurality of common line 61A of cutting apart each other, can regard the common line 61 (it is also referred to as the combination common line) of 1 body thus as.
And, the coil 54,58 of each single scale 51,52 respectively with respectively cut apart common line 61A and be connected. Single scale 51,52 as the installation shown in Fig. 5 (a) and Fig. 5 (b) product of the state of cutting apart common line 61A of impedance match part (resistance 56) and subsidiary connector 62, in the manufacturing works of linear scale, make.Therefore,, only the adjacent connector of cutting apart common line 61A 62 is combined each other, just can accomplish the wiring operation simply at the scene that is provided with of linear scale.In addition, in single scale 52 of end, the connector 62 that will cut apart common line 61A combines with the connector 47 of prime amplifier 48.
Constitute about other of the combination scale 71 of this embodiment example 2, identical with the combination scale 43 of above-mentioned embodiment example 1.
As stated; Linear scale according to this embodiment example 2; Since it is characterized in that common line 61 be utilize that two ends are provided with connector 62 cut apart common line 61A, connect many each other through joint connector 62 and cut apart that common line 61A constitutes, the coil 54,58 of single scale 51,52 respectively with respectively cut apart common line 61A and be connected; So the wiring operation only merely will be cut apart the connector 62 of common line 61A and combine each other to get final product; The connection operation that does not need coil at the scene to be connected with common line, the operation of therefore connecting up becomes easier, is difficult for causing wiring error.
< embodiment example 3 >
Based on Fig. 6 and Fig. 7, embodiment example 3 of the present invention is described.In addition, owing to slide block and the configuration relation between the combination scale, the application examples of linear scale etc. and above-mentioned embodiment example 1 identical (with reference to Fig. 1) of linear scale, so omit explanation at this.
As shown in Figure 6; Combination scale 81 in the linear scale of this embodiment example 3 is adapted to row with single scale 82 of many (for example 8) short strokes (for example 1m) and single scale 83 of many (for example 2) short strokes (for example 250mm), thereby can regard the scale of the long stroke (for example 8.5m) of 1 body as.
The structure that single scale 82 adopts is: the substrate 84 as rectangular-shaped iron plate is provided with jagged coil 85.And, be connected with resistance 88, inductor 89 and capacitor 90 respectively in the both sides of the coil 85 of single scale 82.Equally, the structure that adopts of single scale 83 is: the substrate 86 as rectangular-shaped iron plate is provided with jagged coil 87.And, also be respectively arranged with resistance 88, inductor 89 and capacitor 90 in the both sides of the coil 87 of single scale 83.
As shown in Figure 6, the coil 85,87 of single scale 82,83 all parallel connection (parallel) connects, and on connecting, can treat as independent scale thus., if carry out simple being connected in parallel of that kind shown in Figure 11, then wiring can increase with the bar number of single scale 82,83 and measures accordingly, can produce the bundle of bigger wiring.
Therefore, adopted the mode of the multiple branch circuit wiring of in universal serial bus connects, using during the coil of single scale 82,83 connects.That is, through setting common line (bus) 91, and the coil 85,87 of each single scale 82,83 is connected respectively with this common line 91, makes coil 85,87 parallel connections of all single scales 82,83 thus.Be provided with connector 94 in the end of common line 91, and this connector 94 combines with the connector 95 of prime amplifier 96.
On the other hand; Because the length (stroke) of single scale 82 and single scale 83 is different; Thereby R (resistance) composition that had of each single scale 82,83, (capacitor: stray capacitance) value of composition and L (inductance) composition is different, and is different with the corresponding impedance of the frequency of exciting current for C.Therefore, if the coil 85,87 of single scale 82,83 is only linked to each other with common line 91, then understand variation at the position detection accuracy of the shank of single scale 82,83.
Therefore, arbitrary coil of the coil 85,87 of single scale 82,83 has all connected aforesaid resistance 88, inductor 89 and capacitor 90, as the parts (impedance match part) of the impedance matching that is used to make single scale 82 and single scale 83.
In single scale 82, resistance 88 is connected in series with inductor 89, and the coil 85 of single scale 82 is connected with public heart line 92 with inductor 89 via this resistance 88.One end of capacitor 90 is connected with coil 85, and the other end is connected with common mask line 93.Equally, in single scale 83, resistance 88 is connected in series with inductor 89, and the coil 87 of single scale 83 is connected with public heart line 92 with inductor 89 via this resistance 88.One end of capacitor 90 is connected with coil 87, and the other end is connected with common mask line 93.
In addition, common mask line 93 is grounded on circuit ground 97 via prime amplifier 96.
In arbitrary single scale 85,87, all be that resistance 88, inductor 89 and capacitor 90 have same resistance value, same inductance value and identical capacitance values, promptly have an identical resultant impedance value.And; Resistance 88, inductor 89 and capacitor 90 have the resultant impedance value of extent of the impedance (that is the impedance of single scale 51,52 of the state of resistance 88, inductor 89 and capacitor 90, is not set) of the single scale 82 that can ignore different length and single scale 83.That is, resistance 88, inductor 89 and capacitor 90 have and compare fully big resultant impedance value with the difference of said impedance.
In this case, the value of the resultant impedance of preferred resistance 88, inductor 89 and capacitor 90 is more than 100 times of difference of the impedance of above-mentioned single scale 51,52, and the difference of said impedance is below 1% for this resultant impedance value.For example, if the difference of said impedance is 10 Ω, then the resultant impedance value of resistance 88, inductor 89 and capacitor 90 is made as more than the 1K Ω.
But if too increase the resultant impedance value of resistance 88, inductor 89 and capacitor 90, the output (gain) of then making up scale 81 can become too small, therefore can't carry out the high position probing of precision.Therefore, the resultant impedance value of resistance 88, inductor 89 and capacitor 90 need be made as the value that the output (gain) that can not make combination scale 81 becomes extremely little degree.In addition, which kind of the size of said output need reach more than the degree, as long as carry out suitably confirming according to the processing power of said output etc.That is the higher limit of, suitably confirming the resultant impedance value of resistance 88, inductor 89 and capacitor 90 according to the size of needed output gets final product.
In addition, owing in single scale 82 of illustrated example, be provided with resistance 88, inductor 89 and capacitor 90, so as long as the resultant impedance value of resistance 88, inductor 89 and the capacitor 90 of these both sides is made as above-mentioned value in the both sides of coil 85.Equally, owing in single scale 83, also be provided with resistance 88, inductor 89 and capacitor 90, so as long as the resultant impedance value of resistance 88, inductor 89 and the capacitor 90 of these both sides is made as above-mentioned value in the both sides of coil 87.Being provided with resistance 88, inductor 89 and capacitor 90 in the both sides of coil 85,87, is in order to make having good stability at the alternating voltage of coil 85,87 induction.
But be not limited thereto; From making this viewpoint of impedance matching of single scale 82,83; May not as above-mentioned, resistance 88, inductor 89 and capacitor 90 be set in the both sides of coil 85,87, also can be only at one-sided resistance 88, inductor 89 and the capacitor 90 of being provided with of coil 85,87.In this case; Be made as above-mentioned value as long as will be arranged at the resultant impedance value of one-sided resistance 88, inductor 89 and the capacitor 90 of coil 85, the resultant impedance value of the one-sided resistance 88 that is arranged at coil 87, inductor 89 and capacitor 90 also be made as above-mentioned value get final product.
As stated; Linear scale according to this embodiment example 3; Constitute with combination scale 81 owing to this linear scale has slide block, linear scale is characterised in that the structure that combination scale 81 adopts is: have common line 91 and many single scales 82,83 that form a line; And the coil 85,87 through making single scale 82,83 is connected with common line 91 respectively; Make coil 85,87 parallel connections of all single scales 82,83, so the combination scale 81 that no matter how to extend, the phase deviation that applies between the waveform of waveform and induced voltage of voltage can not become big.And, do not need such in the past pin set wiring, and can not produce the bundle of the bigger wiring that produces because of simple being connected in parallel yet.Therefore, can reduce the required physical space of wiring of combination scale 81, the wiring operation is easy, is difficult for causing wiring error.
In addition; Linear scale according to this embodiment example 3; Owing to it is characterized in that on the coil 85,87 of single scale 82,83 of different length, connecting resistance 88, inductor 89 and capacitor 90 respectively; Be used as impedance match part, thereby mate the impedance of single scale 51,52 of different length, so can need not to take notice of single scale 82,83 of the difference ground combination in any different length of impedance; Can constitute the combination scale of desired length, so the operation that is provided with of combination scale at the scene becomes easy.
In addition; Linear scale according to this embodiment example 3; Owing to it is characterized in that respectively the impedance match part that connects with the coil 85,87 of single scale 82,83 of different length all is resistance 88, inductor 89 and the capacitor 90 with identical resultant impedance value; And this resistance 88, inductor 89 and capacitor 90 have the resultant impedance value of the extent (more than 100 times of the difference of said impedance) of the impedance of the single scale 82,83 that can ignore different length; So when single scale 82,83 of making subsidiary impedance match part (resistance 88, inductor 89, capacitor 90); Need not to be provided with by the different single scale 82,83 of length the impedance match part (resistance, inductor, capacitor) of different resultant impedance values, therefore the manufacturing of single scale 82,83 is very easy to.
In addition,, be not limited thereto, also can adopt single scale (for example single scale of 1m, 500mm and 250mm) of the different length (stroke) more than 3 kinds though in above-mentioned, adopted single scale 82,83 of 2 kinds of different lengths (stroke).In this case, also with above-mentioned same, as long as on the coil of each single scale, connect the impedance that resistance, inductor and capacitor mate these single scales.In addition, in this case, the value (value more than 100 times of the difference of said impedance) that the resultant impedance value of resistance, inductor and capacitor is made as the difference that can ignore the impedance between single scale gets final product.In addition, under the difference condition of different of the difference of the impedance between a certain single scale and the impedance between other single scales, as long as be made as the resultant impedance value of poor (more than 100 times of the difference of said impedance) that can ignore maximum impedance.
In addition; In above-mentioned explanation, the impedance match part that is arranged at single scale is to have made up resistance, inductor and capacitor and the parts that constitute, but is not limited thereto; Combination as the impedance match part that is arranged at single scale; The combination of also having made up resistance and inductor, the combination of having made up resistance and capacitor, the combination of having made up inductor and capacitor.
< embodiment example 4 >
Based on Fig. 8 and Fig. 9, embodiment example 3 of the present invention is described.Wherein, owing to the configuration relation between slide block in the linear scale and the combination scale, the application examples of linear scale etc. and above-mentioned embodiment example 1 same (with reference to Fig. 1), so omit explanation at this.
In addition, about giving prosign, and omit the detailed description of repeating part with the same part of combination scale (with reference to Fig. 6, Fig. 7) of above-mentioned embodiment example 3.
As shown in Figure 8, in the combination scale 101 in the linear scale of this embodiment example 4, common line 91 is divided into a plurality of part 91A (be also referred to as cut apart common line with this part).Respectively cutting apart common line 91A has public heart line 92 is divided into the part (be also referred to as cut apart public heart line with this part) of a plurality of part 92A and common mask line 93 is divided into the part (be also referred to as cut apart the common mask line with part) of a plurality of part 93A.Be respectively arranged with connector 102 at the two ends of respectively cutting apart common line 91A.Through combining the adjacent connector of cutting apart common line 91A 102 to connect a plurality of common line 91A of cutting apart each other, can regard the common line 91 (it is also referred to as the combination common line) of 1 body thus as.At this moment; Through connecting a plurality of public heart line 92A of cutting apart; The public heart line 92 (it is also referred to as the public heart line of combination) that can regard 1 body thus as through connecting a plurality of common mask line 93A of cutting apart, can be regarded the common mask line 93 (it is also referred to as combination common mask line) of 1 body as thus.
And, the coil 85,87 of each single scale 82,83 respectively with respectively cut apart common line 91A and be connected.Particularly, the coil 85,87 of single scale 82,83 via resistance 88 with inductor 89 and with cut apart public heart line 93A and be connected.One end of capacitor 90 is connected with coil 85,87, the other end with cut apart common mask line 93A and be connected.
Constitute about other of the combination scale 101 of this embodiment example 4, identical with the combination scale 81 of above-mentioned embodiment example 3.
As stated; Linear scale according to this embodiment example 4; Since it is characterized in that common line 91 be utilize that two ends are provided with connector 102 cut apart common line 91A, connect many each other through joint connector 102 and cut apart that common line 91A constitutes, the coil 85,87 of single scale 82,83 respectively with respectively cut apart common line 91A and be connected; So the wiring operation also can only be merely to combine to cut apart the connector 102 of common line 91A each other; Because the connection operation that does not need coil at the scene to be connected with common line, the operation of therefore connecting up becomes easier, is difficult for causing wiring error.
(utilizability on the industry)
The present invention relates to the linear scale of inductosyn mode, the combination scale of the linear scale that uses in the position probing as the moving body of growing in displacement is useful.
Symbol description
The 31-ball screw; The 31a-thread spindle; The 31b-nut; The 32-driving motor; The 33-worktable; The 41-linear scale; The 42-slide block; 43-makes up scale; The 44-coil; The 46-A/D transducer; The 47-connector; The 48-prime amplifier; The 49-NC servoamplifier; 51, the single scale of 52-; The 53-substrate; The 54-coil; 56-resistance; The 57-substrate; The 58-coil; The 61-common line; 61A-is cut apart common line; The 62-connector; 71,81-combination scale; 82, the single scale of 83-; The 84-substrate; The 85-coil; The 86-substrate; The 87-coil; 88-resistance; The 89-inductor; The 90-capacitor; The 91-common line; 91A-is cut apart common line; The public heart line of 92-; 92A-is cut apart public heart line; 93-common mask line; 93A-is cut apart the common mask line; 94,95-connector; The 96-prime amplifier; The 97-circuit ground; 101-makes up scale; The 102-connector.
Claims (7)
1. linear scale, it has slide block and constitutes with the combination scale, and this linear scale is characterised in that,
The structure that said combination scale adopts is: have common line and many single scales that form a line, be connected the coils from parallel connection of coils that makes all said single scales with said common line respectively through the coil that makes said single scale.
2. linear scale according to claim 1 is characterized in that,
Said common line is to utilize two ends to be provided with the common line of cutting apart of connector, saidly cuts apart that common line constitutes through said connector being combined each other connect many,
The coil of said single scale respectively with respectively cut apart common line and be connected.
3. linear scale according to claim 1 and 2 is characterized in that,
Said many single scales have utilized single scale of multiple different length,
And, on the coil of single scale of said multiple different length, connect impedance match part respectively, thereby make the impedance matching of single scale of said multiple different length.
4. linear scale according to claim 3 is characterized in that,
The said impedance match part that is connected with the coil of single scale of said multiple different length respectively all is the resistance with same resistance value,
And said resistance has the resistance value of the extent of the single scale impedance each other that can ignore said multiple different length.
5. linear scale according to claim 3 is characterized in that,
The said impedance match part that is connected with the coil of single scale of said multiple different length respectively all is to have made up any a plurality of in resistance, inductor and the capacitor and the parts that constitute, and all has identical resultant impedance value,
And the said parts that made up any a plurality of in resistance, inductor and the capacitor and constituted have the resultant impedance value of the extent of the single scale impedance each other that can ignore said multiple different length.
6. linear scale according to claim 3 is characterized in that,
The said impedance match part that is connected with the coil of single scale of said multiple different length respectively all is the resistance with same resistance value,
And said resistance has the resistance value more than 100 times of difference of single scale impedance each other of said multiple different length.
7. linear scale according to claim 3 is characterized in that,
The said impedance match part that is connected with the coil of single scale of said multiple different length respectively all is to have made up any a plurality of in resistance, inductor and the capacitor and the parts that constitute, and all has identical resultant impedance value,
And the said parts that made up any a plurality of in resistance, inductor and the capacitor and constituted have the resultant impedance value more than 100 times of difference of single scale impedance each other of said multiple different length.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009290331A JP5193175B2 (en) | 2009-12-22 | 2009-12-22 | Linear scale |
| JP2009-290331 | 2009-12-22 | ||
| PCT/JP2010/065909 WO2011077790A1 (en) | 2009-12-22 | 2010-09-15 | Linear scale |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102597711A true CN102597711A (en) | 2012-07-18 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010800467790A Pending CN102597711A (en) | 2009-12-22 | 2010-09-15 | Linear scale |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP5193175B2 (en) |
| KR (1) | KR101352720B1 (en) |
| CN (1) | CN102597711A (en) |
| TW (1) | TW201142248A (en) |
| WO (1) | WO2011077790A1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6087588B2 (en) * | 2012-11-12 | 2017-03-01 | 三菱重工工作機械株式会社 | Wiring structure of displacement sensor |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN88202473U (en) * | 1988-03-28 | 1988-12-07 | 上海水平仪厂 | Combined linear induction synchronizer with absolute zero position |
| JPH0581612U (en) * | 1992-04-02 | 1993-11-05 | 多摩川精機株式会社 | Linear sensor |
| CN2150965Y (en) * | 1993-03-16 | 1993-12-29 | 刘肇萱 | Extendible linear induction synchronizer assembled ruler with aluminium alloy |
| JP2003014408A (en) * | 2001-06-29 | 2003-01-15 | Matsushita Electric Works Ltd | Position sensor |
| JP2009002660A (en) * | 2007-06-19 | 2009-01-08 | Murata Mach Ltd | Linear scale |
-
2009
- 2009-12-22 JP JP2009290331A patent/JP5193175B2/en not_active Expired - Fee Related
-
2010
- 2010-09-15 KR KR1020127010111A patent/KR101352720B1/en not_active IP Right Cessation
- 2010-09-15 WO PCT/JP2010/065909 patent/WO2011077790A1/en active Application Filing
- 2010-09-15 CN CN2010800467790A patent/CN102597711A/en active Pending
- 2010-09-28 TW TW099132833A patent/TW201142248A/en unknown
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN88202473U (en) * | 1988-03-28 | 1988-12-07 | 上海水平仪厂 | Combined linear induction synchronizer with absolute zero position |
| JPH0581612U (en) * | 1992-04-02 | 1993-11-05 | 多摩川精機株式会社 | Linear sensor |
| CN2150965Y (en) * | 1993-03-16 | 1993-12-29 | 刘肇萱 | Extendible linear induction synchronizer assembled ruler with aluminium alloy |
| JP2003014408A (en) * | 2001-06-29 | 2003-01-15 | Matsushita Electric Works Ltd | Position sensor |
| JP2009002660A (en) * | 2007-06-19 | 2009-01-08 | Murata Mach Ltd | Linear scale |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20120064115A (en) | 2012-06-18 |
| JP5193175B2 (en) | 2013-05-08 |
| JP2011133238A (en) | 2011-07-07 |
| KR101352720B1 (en) | 2014-01-16 |
| WO2011077790A1 (en) | 2011-06-30 |
| TW201142248A (en) | 2011-12-01 |
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Application publication date: 20120718 |