CN102594290B - Oscillator circuit using narrow pulse to excite MEMS resonator - Google Patents
Oscillator circuit using narrow pulse to excite MEMS resonator Download PDFInfo
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- CN102594290B CN102594290B CN201210052015.3A CN201210052015A CN102594290B CN 102594290 B CN102594290 B CN 102594290B CN 201210052015 A CN201210052015 A CN 201210052015A CN 102594290 B CN102594290 B CN 102594290B
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Abstract
An oscillator circuit using a narrow pulse to excite a MEMS resonator is disclosed. The oscillator circuit comprises a MEMS resonator, a low pass filter, a high gain inverter and a narrow-pulse generator, wherein an input terminal of the low pass filter is connected with an output terminal of the MEMS resonator; the input terminal of the high gain inverter is connected with the output terminal of the low pass filter; the input terminal of the narrow-pulse generator is connected with the output terminal of the high gain inverter; the output terminal of the narrow-pulse generator is connected with the input terminal of the MEMS resonator so as to form a closed loop. By using the oscillator circuit which uses the narrow pulse to excite the MEMS resonator in the invention, phase noise can be reduced. The oscillator circuit has advantages that: power consumption is low; design cost is low.
Description
Technical field
The invention belongs to microelectronics technology, particularly a kind of pierce circuit that adopts burst pulse excitation MEMS resonator.
Background technology
Commercial oscillator mainly contains two kinds at present, a kind of based on quartz crystal, a kind of based on MEMS resonator.Through the development of decades, the process technology of quartz crystal and interlock circuit design are very ripe,, quartz oscillator has very cheap cost, very high frequency stability.Oscillator based on MEMS resonator is a kind of oscillator that business market is moved towards in the development along with micromachined and designing technique in recent years gradually, its advantage is that volume is little, can be together with integrated antenna package, reduce the volume and weight of whole circuit, thereby reduce product cost.
Traditional oscillator based on MEMS resonator as shown in Figure 1.It comprises a MEMS resonator 101 and a positive feedback trans-impedance amplifier 102.Utilize positive feedback trans-impedance amplifier 102 feedback excitation signal to be applied to the input of MEMS resonator 101.Resonator can be equivalent to the LCR resonant circuit shown in Fig. 2, and Lx, Cx are the parameter relevant to MEMS resonator shape, material and operating state with Rx, and CP is the feedthrough parasitic capacitance that pcb board and MEMS resonator domain etc. produce.L, C, R are cascaded, and form frequency-selective network.
In above structure, suitably adjust the value of mutual conductance resistance R _ f, just can meet amplitude and the phase condition of the starting of oscillation of oscillator.When starting of oscillation, trsanscondutance amplifier energising, the random noise of its output is by after resonator filtering, noise signal outside resonance frequency is attenuated, near signal resonance frequency further amplifies by trsanscondutance amplifier, and by resonator filtering, several week after date so circulates again, finally form stable oscillation stationary vibration, the sine wave of stable output.
In above-mentioned existing example, pierce circuit shakes in MEMS resonator resonant frequency range, but because MEMS resonator is the conversion based on electric energy-mechanical energy-electric energy, energy conversion rate is very low, very large to the decay of signal.The problem existing is, need the very large trans-impedance amplifier of multiplication factor to carry out signal amplification, in addition, for the MEMS resonator that is operated in VHF and uhf band, it has also proposed very high requirement to the operating frequency of amplifier, like this, require and high-frequency work ability in order to meet high-gain, the amplifier of design need to consume larger power consumption.
And, when circuit oscillation, signal is by after resonator, due to the existence of feedthrough capacitor C a, signal phase is offset, and is limited to concrete domain structure and the PCB circuit layout of resonator, and the value of Ca is conventionally uncertain, cause the uncertain of signal phase skew, cause the difficulty to the compensation of oscillator loop phase.
In addition, each different MEMS resonating device, its insertion loss, resonance frequency is all inconsistent, like this, and in order to meet starting condition for oscillation, need to be for each MEMS resonating device design of feedback amplifier.And that quartz crystal oscillator has energy loss is little, the advantage of high conformity, the quartz crystal that the quartz oscillator circuit being made up of inverter and quartz crystal only need be replaced different resonance frequencys just can be realized different frequencies of oscillation and export, oscillating circuit has versatility, and the design cost of the oscillator based on MEMS resonator is greater than quartz oscillator like this.
Summary of the invention
The object of the invention is to, a kind of pierce circuit that adopts burst pulse excitation MEMS resonator is provided, it can reduce phase noise, has advantages of low in energy consumption and design cost is low.
The invention provides a kind of pierce circuit that adopts burst pulse excitation MEMS resonator, comprising:
One MEMS resonator;
One low pass filter, the input of this low pass filter is connected with the output of MEMS resonator;
One high-gain inverter, the input of this high-gain inverter is connected with the output of low pass filter;
One narrow-pulse generator, the input of this narrow-pulse generator is connected with the output of high-gain inverter, and the output of this narrow-pulse generator is connected with MEMS resonator input, forms closed-loop path.
Brief description of the drawings
For further illustrating technology contents of the present invention, be described in detail as follows below in conjunction with embodiment and accompanying drawing, wherein:
Fig. 1 is traditional pierce circuit based on MEMS resonator;
Fig. 2 is traditional pierce circuit equivalent circuit diagram based on MEMS resonator;
Fig. 3 is the MEMS pierce circuit block diagram of employing burst pulse excitation of the present invention;
Fig. 4 is the narrow-pulse generator circuit theory diagrams that the present invention adopts;
Fig. 5 is circuit sequence signal principle schematic of the present invention;
Fig. 6 is circuit theory instance graph of the present invention.
Embodiment
Refer to shown in Fig. 3 to Fig. 6, the invention provides a kind of pierce circuit that adopts burst pulse excitation MEMS resonator, comprising:
One MEMS resonator 10, the working impedance of this MEMS resonator 10 is determined by feedthrough electric capacity and operating frequency in MEMS resonator 10;
One low pass filter 11, the input of this low pass filter 11 is connected with the output of MEMS resonator 10, the cut-off frequency that this low pass filter 11 adopts is 2-4 times of MEMS resonator 10 frequencies, the low pass filter 11 of described employing is RC passive filter, can filtering high fdrequency component, play again the effect of resonator dynamic impedance matching, converted MEMS resonator 10 output currents to voltage signal;
One high-gain inverter 12, the input of this high-gain inverter 12 is connected with the output of low pass filter 11, the gain that this high-gain inverter 12 adopts is greater than the insertion loss of MEMS resonator 10, in described high-gain inverter 12 and narrow-pulse generator 13, there is source capsule within a cycle of oscillation, while only having the state turnover of generation, just consumed energy, energy consumption is less than the trsanscondutance amplifier of the high frequency high-gain in existing MEMS oscillator structure;
One narrow-pulse generator 13, the input of this narrow-pulse generator 13 is connected with the output of high-gain inverter 12, the output of this narrow-pulse generator 13 is connected with MEMS resonator 10 inputs, form closed-loop path, the burst pulse frequency component that described narrow-pulse generator 13 adopts is 5-10 times of MEMS resonator resonance frequency, under the signal frequency that this narrow pulse signal generator 13 sends, realize the impedance matching of 50 ohm, improve capacity usage ratio, when described narrow-pulse generator 13 is started working, produce a pulse, excitation MEMS resonator 10 vibrates, this time of MEMS resonator 10 from starting of oscillation to stable vibration is less than the Induction Peried of existing noise trigger generator circuit.
MEMS resonator 10 energisation modes of the present invention are periodic burst pulse excitation, and in the time of equilbrium position, MEMS resonator 10 is encouraged, when all the other positions, MEMS resonator 10 is in free-run mode, the frequency that frequency of oscillation is Minimal energy loss, i.e. resonance frequency.When cycle of burst pulse excitation is consistent with harmonic period, the energy that pulse is supplementary and the energy coincidence of system loss, system generation resonance, output signal maximum.
Resonator output signal mainly comprises two parts, a part is MEMS resonator 10 external resonance signal of output while there is resonance, another part is the signal that narrow pulse signal obtains by MEMS resonator 10 feedthrough electric capacity, the two parts of signals output that is superimposed, as shown in Figure 5.
Filtering output signal 24 has very high spectral purity and low-down phase noise, and this signal has just obtained the very low square wave output 21 of phase noise after by high-gain inverter 12.The square wave of output is used for encouraging narrow-pulse generator 13, in the time that the rising edge of square-wave signal arrives, narrow-pulse generator 13 is exported a direct impulse, in the time that the trailing edge of square-wave signal arrives, a negative-going pulse of narrow-pulse generator output, the amplitude of pulse is relevant with the amplitude of circuit structure and supply power voltage size and square-wave signal.Just can encourage MEMS resonator works with this pair of narrow pulse signal 22.
In the time of power supply electrifying, narrow-pulse generator 13 will produce a pulse signal, this signal excitation MEMS resonator 10, make it depart from equilbrium position, there is free vibration, free running frequency is consistent with resonance frequency, and vibration obtains an output signal after high-gain inverter 12 amplifies, and excitation narrow-pulse generator 13 sends next pulse signal.Under the energy supplement of next pulse signal, MEMS resonator 10 continues free vibration, and amplitude increases, and exports the signal larger than the previous cycle, then sends into high-gain inverter 12 and amplify.So move in circles, finally make the amplitude of resonator reach maximum, form stable oscillation stationary vibration.With respect to noise starting of oscillation, this mode of utilizing pulse starting of oscillation has been saved Induction Peried greatly.
Fig. 6 is that the physical circuit of an operation principle of the present invention is realized example, its median filter 62 is made up of a RC network in parallel, it not only can realize the function of filtering resonator 61 output signal high fdrequency components, the current signal of being also responsible for resonator 61 to export is converted to voltage signal, as the control signal of high-gain inverter 63 inputs.
High-gain inverter 63 adopts positive-negative power supply, when zero-bias, the metal-oxide-semiconductor of high-gain inverter 63 is all operated in linear zone, now possesses maximum gain, the small-signal that resonator 61 can be exported is amplified near supply voltage, forms stable square-wave signal.
Glitch trigger 64 utilizes the avalanche breakdown principle of diode to realize, as Fig. 3.When beginning, triode 641 is biased in critical avalanche condition (in Fig. 4), the rising edge of square-wave signal comes interim, the collector voltage of triode 641 raises, and collector junction charge carrier accelerates under highfield effect, obtains huge energy, they and lattice bump, produced new electron hole pair, the new electron hole pair producing is accelerated again to bump with lattice, repeats said process.The charge carrier sharply increasing causes collector junction electric current to increase rapidly, completes the charging to output.In the time being charged to certain voltage, triode operating state changes, and is operated in linear zone, and to output electric discharge, because base bias is larger, electric discharge is rapid, thereby produces a ultra-narrow pulse.Such ultra-narrow pulse pulsewidth can reach tens ps, the repetition period of pulse can reach several ns, the glitch trigger 13 that namely utilizes the avalanche breakdown of diode to make can be realized the pierce circuit of hundreds of MHz frequency, and the pierce circuit design of higher frequency will adopt broadband trsanscondutance amplifier to realize.
Only above-described, be only a preferred embodiment of the present invention, when can not with restriction scope of the invention process; Be that every equalization of doing according to the present patent application the scope of the claims changes and modifies, all should still belong in the scope that the claims in the present invention contain.
Claims (6)
1. a pierce circuit that adopts burst pulse excitation MEMS resonator, comprising:
One MEMS resonator;
One low pass filter, the input of this low pass filter is connected with the output of MEMS resonator, and this low pass filter is RC passive filter, can filtering high fdrequency component, play again the effect of resonator dynamic impedance matching, converted MEMS resonator output current to voltage signal;
One high-gain inverter, the input of this high-gain inverter is connected with the output of low pass filter;
One narrow-pulse generator, the input of this narrow-pulse generator is connected with the output of high-gain inverter, and the output of this narrow-pulse generator is connected with MEMS resonator input, forms closed-loop path;
In wherein said high-gain inverter and narrow-pulse generator, there is source capsule within a cycle of oscillation, while only having the state turnover of generation, just consumed energy, energy consumption is less than the trsanscondutance amplifier of existing high frequency high-gain.
2. the pierce circuit of employing burst pulse excitation MEMS resonator according to claim 1, the cut-off frequency that wherein said low pass filter adopts is 2-4 times of MEMS resonator resonance frequency.
3. the pierce circuit of employing burst pulse excitation MEMS resonator according to claim 1, the gain of wherein said high-gain inverter is greater than the insertion loss of MEMS resonator.
4. the pierce circuit of employing burst pulse excitation MEMS resonator according to claim 1, the burst pulse frequency component that wherein said narrow-pulse generator adopts is 5-10 times of MEMS resonator resonance frequency.
5. the pierce circuit of employing burst pulse excitation MEMS resonator according to claim 4, the impedance of wherein said MEMS resonator is determined by feedthrough electric capacity and operating frequency in MEMS resonator, under its signal frequency of sending at described narrow pulse signal generator, realize the impedance matching of 50 ohm, improve capacity usage ratio.
6. the pierce circuit of employing burst pulse excitation MEMS resonator according to claim 1, when wherein said narrow-pulse generator is started working, produce a pulse, excitation MEMS resonator vibrates, this time of MEMS resonator from starting of oscillation to stable vibration is less than the Induction Peried of existing noise trigger generator circuit.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102006057A (en) * | 2009-09-01 | 2011-04-06 | 杭州中科微电子有限公司 | Low power consumption and rapid oscillation starting crystal oscillator module with programmable adjusting start-oscillation condition |
| CN102098064A (en) * | 2010-12-31 | 2011-06-15 | 上海集成电路研发中心有限公司 | Ultra-wideband transmitter system |
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| JP2005026829A (en) * | 2003-06-30 | 2005-01-27 | Seiko Epson Corp | Voltage-controlled oscillator, clock converter, and electronic apparatus |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102006057A (en) * | 2009-09-01 | 2011-04-06 | 杭州中科微电子有限公司 | Low power consumption and rapid oscillation starting crystal oscillator module with programmable adjusting start-oscillation condition |
| CN102098064A (en) * | 2010-12-31 | 2011-06-15 | 上海集成电路研发中心有限公司 | Ultra-wideband transmitter system |
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| JP特开2005-26829A 2005.01.27 * |
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