CN102593709B - 用于制造光子器件的工艺 - Google Patents
用于制造光子器件的工艺 Download PDFInfo
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- CN102593709B CN102593709B CN201210041732.6A CN201210041732A CN102593709B CN 102593709 B CN102593709 B CN 102593709B CN 201210041732 A CN201210041732 A CN 201210041732A CN 102593709 B CN102593709 B CN 102593709B
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- laser
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- technique
- semiconductor structure
- epitaxial semiconductor
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 40
- 238000005516 engineering process Methods 0.000 title abstract description 8
- 238000001039 wet etching Methods 0.000 claims abstract description 17
- 238000001312 dry etching Methods 0.000 claims abstract description 11
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 7
- 239000010410 layer Substances 0.000 claims description 65
- 238000000034 method Methods 0.000 claims description 55
- 239000004065 semiconductor Substances 0.000 claims description 25
- 239000000758 substrate Substances 0.000 claims description 18
- 239000011247 coating layer Substances 0.000 claims description 15
- 238000000151 deposition Methods 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 238000000407 epitaxy Methods 0.000 abstract 3
- 238000005530 etching Methods 0.000 description 25
- 238000003776 cleavage reaction Methods 0.000 description 22
- 230000007017 scission Effects 0.000 description 22
- 229920002120 photoresistant polymer Polymers 0.000 description 14
- 238000001259 photo etching Methods 0.000 description 11
- 239000000463 material Substances 0.000 description 8
- 238000001459 lithography Methods 0.000 description 6
- 238000001465 metallisation Methods 0.000 description 6
- 239000003795 chemical substances by application Substances 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 238000001020 plasma etching Methods 0.000 description 4
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 4
- 238000007747 plating Methods 0.000 description 4
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 3
- 230000010354 integration Effects 0.000 description 3
- 238000010884 ion-beam technique Methods 0.000 description 3
- 238000001451 molecular beam epitaxy Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 230000001154 acute effect Effects 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 2
- 238000005566 electron beam evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 239000013110 organic ligand Substances 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000009931 harmful effect Effects 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000005036 potential barrier Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
Landscapes
- Semiconductor Lasers (AREA)
Abstract
Description
Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210041732.6A CN102593709B (zh) | 2006-12-26 | 2006-12-26 | 用于制造光子器件的工艺 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210041732.6A CN102593709B (zh) | 2006-12-26 | 2006-12-26 | 用于制造光子器件的工艺 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2006800567932A Division CN101569067B (zh) | 2006-12-26 | 2006-12-26 | 具有蚀刻停止层的端面蚀刻脊型激光器 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102593709A CN102593709A (zh) | 2012-07-18 |
CN102593709B true CN102593709B (zh) | 2015-04-01 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201210041732.6A Active CN102593709B (zh) | 2006-12-26 | 2006-12-26 | 用于制造光子器件的工艺 |
Country Status (1)
Country | Link |
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CN (1) | CN102593709B (zh) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1332501A (zh) * | 2000-07-06 | 2002-01-23 | 中国科学院半导体研究所 | 选择区域外延制作电吸收调制分布反馈激光器的方法 |
CN1467891A (zh) * | 2002-06-03 | 2004-01-14 | ��ʽ���綫֥ | 半导体激光器及其制造方法 |
CN1767286A (zh) * | 2004-10-29 | 2006-05-03 | 夏普株式会社 | 半导体激光元件的制造方法 |
CN1790846A (zh) * | 2004-12-13 | 2006-06-21 | 中国科学院半导体研究所 | 激光器-电吸收调制器-模斑转换器单片集成的制作方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101160699A (zh) * | 2005-02-18 | 2008-04-09 | 宾奥普迪克斯股份有限公司 | 高可靠性的蚀刻小面光子器件 |
-
2006
- 2006-12-26 CN CN201210041732.6A patent/CN102593709B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1332501A (zh) * | 2000-07-06 | 2002-01-23 | 中国科学院半导体研究所 | 选择区域外延制作电吸收调制分布反馈激光器的方法 |
CN1467891A (zh) * | 2002-06-03 | 2004-01-14 | ��ʽ���綫֥ | 半导体激光器及其制造方法 |
CN1767286A (zh) * | 2004-10-29 | 2006-05-03 | 夏普株式会社 | 半导体激光元件的制造方法 |
CN1790846A (zh) * | 2004-12-13 | 2006-06-21 | 中国科学院半导体研究所 | 激光器-电吸收调制器-模斑转换器单片集成的制作方法 |
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Publication number | Publication date |
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CN102593709A (zh) | 2012-07-18 |
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