CN102592289B - Depth information obtaining method and system for movement target position of nanometer material - Google Patents
Depth information obtaining method and system for movement target position of nanometer material Download PDFInfo
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- CN102592289B CN102592289B CN201210034248.0A CN201210034248A CN102592289B CN 102592289 B CN102592289 B CN 102592289B CN 201210034248 A CN201210034248 A CN 201210034248A CN 102592289 B CN102592289 B CN 102592289B
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Abstract
The invention discloses depth information obtaining method and system for a movement target position of a nanometer material. The method is applied in a nanometer operation system; the nanometer operation system comprises an electron microscope; an operator of the nanometer operation system forms an included angle with a vertical line of the plane where the target position is located; the method comprises the steps of: moving the operator in a depth direction; obtaining the overlooking planar image information of the tail end of the operator through the electron microscope; monitoring the moving direction of the tail end of the operator in the overlooking planar image; judging whether the moving direction changes to obtain a first judge result; and obtaining first depth direction position information of the tail end of the operator to be used as the depth information of the movement target position of the nanometer material if the first judge result indicates that the moving direction changes. The method and system disclosed by the invention can accurately obtain the depth information of the movement target position of the nanometer material.
Description
Technical field
The present invention relates to accurate control field, particularly relate to the Depth Information Acquistion method and system of the moving target position of nano material.
Background technology
Along with developing rapidly of nanometer technology, also more and more higher for the requirement of the accuracy of the operation of the object (nano material) of nanoscale.When nano material is operated, need to nano material (as nano wire, nanotube, nano particle and nanosphere) be moved to preassigned position by nanometer operating system.During due to use nanometer operating system, must be first by the range information input nanometer operating system that nano material is moved at three dimensions, nanometer operating system could move nano material accurately according to the range information of input, so before use nanometer operating system moves nano material, first will obtain the depth information of the moving target position of nano material.
But, in prior art, also there is no a kind of Depth Information Acquistion method of moving target position of effective nano material, the operation for nano material on depth direction (Z direction) depends primarily on operator's experience.
Summary of the invention
The Depth Information Acquistion method and system that the object of this invention is to provide a kind of moving target position of nano material, can the positional information of Obtaining Accurate nano material on depth direction.
For achieving the above object, the invention provides following scheme:
A Depth Information Acquistion method for the moving target position of nano material, is applied to nanometer operating system; Described nanometer operating system comprises electron microscope; The vertical line of the manipulater of described nanometer operating system and described target location plane of living in forms angle;
Described method comprises:
Mobile described manipulater on depth direction;
By described electron microscope, obtain the top plan view image information of the end of described manipulater;
The moving direction of the end of monitoring described manipulater in described plan view from above;
Judge that whether described moving direction changes, and obtains the first judged result;
When described the first judged result represents that described moving direction changes, obtain the first depth direction positional information of end of described manipulater as the depth information of the moving target position of described nano material.
Preferably, describedly judge that whether described moving direction changes, and comprising:
Record the moving direction of the end of a upper described manipulater of the moment;
Obtain the moving direction of the end of manipulater described in current time;
Whether the moving direction that judges the end of manipulater described in current time is contrary with upper one moving direction constantly.
Preferably, described method also comprises:
After described moving direction changes, mobile in opposite direction described manipulater on depth direction;
Judge whether described moving direction secondary occurs and change, and obtains the second judged result;
When described the second judged result represents that described moving direction changes, obtain the second depth direction positional information of the end of described manipulater;
According to described the first depth direction positional information and described the second depth direction positional information, calculating mean value, obtains the depth information of the moving target position of described nano material.
Preferably, by described electron microscope, obtain the top plan view image information of the end of described manipulater, comprising:
By described electron microscope, obtain the image information of setting regions;
Described image information is carried out to Gaussian smoothing filtering, adaptive threshold, corrosion and divergence process;
Gaussian smoothing filtering is taken out noise in image and is disturbed
Obtain the graph outline of the described image information after processing, the end using the summit of described graph outline as described manipulater.
A Depth Information Acquistion system for the moving target position of nano material, is applied to nanometer operating system; Described nanometer operating system comprises electron microscope; The vertical line of the manipulater of described nanometer operating system and described target location plane of living in forms angle;
Described Depth Information Acquistion system comprises:
Manipulater mobile unit, for mobile described manipulater on depth direction;
Image information acquisition unit, for obtaining the top plan view image information of the end of described manipulater by described electron microscope;
Moving direction monitoring means, the moving direction for the end of monitoring described manipulater in described plan view from above;
The first judging unit, for judging that whether described moving direction changes, and obtains the first judged result;
The first Depth Information Acquistion unit, for when described the first judged result represents that described moving direction changes, obtains the first depth direction positional information of end of described manipulater as the depth information of the moving target position of described nano material.
Preferably, described the first judging unit comprises:
A upper moment moving direction records subelement, for recording the moving direction of the end of a upper described manipulater of the moment;
Current time moving direction records subelement, for obtaining the moving direction of the end of manipulater described in current time;
Whether moving direction judgment sub-unit is contrary with upper one moving direction constantly for the moving direction that judges the end of manipulater described in current time.
Preferably, described system also comprises:
Reverse operation device mobile unit, after changing when described moving direction, mobile in opposite direction described manipulater on depth direction;
The second judging unit, for judging whether described moving direction secondary occurs and change, and obtains the second judged result;
The second Depth Information Acquistion unit, for when described the second judged result represents that described moving direction changes, obtains the second depth direction positional information of the end of described manipulater;
Depth Information Acquistion unit, for according to described the first depth direction positional information and described the second depth direction positional information, calculating mean value, obtains the depth information of the moving target position of described nano material.
Preferably, described image information acquisition unit comprises:
Image information acquisition subelement, for obtaining the image information of setting regions by described electron microscope;
Image Information Processing subelement, for described image information is carried out to Gaussian smoothing filtering, adaptive threshold, corrosion and divergence process;
Manipulater end recognin unit, for obtaining the graph outline of the described image information after processing, the end using the summit of described graph outline as described manipulater.
According to specific embodiment provided by the invention, the invention discloses following technique effect:
Method and system of the present invention, by the direction of motion of end on the imaging plane of electron microscope of monitoring manipulater, when the direction of motion by the end of manipulater on the imaging plane of electron microscope changes, the depth information of the end of manipulater is as the depth information of the moving target position of nano material, the depth information of moving target position that can Obtaining Accurate nano material.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, to the accompanying drawing of required use in embodiment be briefly described below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skills, do not paying under the prerequisite of creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 is the process flow diagram of Depth Information Acquistion embodiment of the method 1 of the moving target position of nano material of the present invention;
Fig. 2 is the electron microscope imaging schematic diagram of the end of manipulater while not touching target location plane;
Fig. 3 is the electron microscope imaging schematic diagram of the end of manipulater while touching target location plane;
Fig. 4 is the process flow diagram of Depth Information Acquistion embodiment of the method 2 of the moving target position of nano material of the present invention;
Fig. 5 is the process flow diagram that judges whether moving direction changes of the present invention;
Fig. 6 is the process flow diagram of the top plan view image information of the present invention's end of obtaining manipulater by electron microscope;
Fig. 7 is the structural drawing of Depth Information Acquistion system embodiment 1 of the moving target position of nano material of the present invention;
Fig. 8 is the structural drawing of Depth Information Acquistion system embodiment 2 of the moving target position of nano material of the present invention;
Fig. 9 is the first judging unit structural drawing of the present invention;
Figure 10 is image information acquisition cellular construction figure of the present invention.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is clearly and completely described, obviously, described embodiment is only the present invention's part embodiment, rather than whole embodiment.Embodiment based in the present invention, those of ordinary skills, not making the every other embodiment obtaining under creative work prerequisite, belong to the scope of protection of the invention.
For above-mentioned purpose of the present invention, feature and advantage can be become apparent more, below in conjunction with the drawings and specific embodiments, the present invention is further detailed explanation.
The Depth Information Acquistion method of the moving target position of nano material of the present invention, is applied to nanometer operating system; Described nanometer operating system comprises electron microscope; The vertical line of the manipulater of described nanometer operating system and described target location plane of living in forms angle.
Fig. 1 is the process flow diagram of Depth Information Acquistion embodiment of the method 1 of the moving target position of nano material of the present invention.As shown in Figure 1, the method comprising the steps of:
S101: mobile described manipulater on depth direction;
S102: the top plan view image information of obtaining the end of described manipulater by described electron microscope;
S103: the moving direction of the end of monitoring described manipulater in described plan view from above;
S104: judge that whether described moving direction changes, and obtains the first judged result;
S105: when described the first judged result represents that described moving direction changes, obtain the first depth direction positional information of end of described manipulater as the depth information of the moving target position of described nano material.
For the ease of understanding side's ratio juris of the present invention, below in conjunction with the image-forming principle of electron microscope, be specifically described.
Fig. 2 is the electron microscope imaging schematic diagram of the end of manipulater while not touching target location plane.
In original position, the end of manipulater 104 is 1 place in position.After move operation device 104 on depth direction, the end of manipulater 104 is 2 places in position.From the image-forming principle of electron microscope, when the end of manipulater 104 is during in 1 place, position, the light of the end of manipulater 104, by after the primary optical axis of object lens 103, will project 1 ' position of imaging plane 101; When the end of manipulater 104 is during in 2 place, position, the light of the end of manipulater 104, by after the primary optical axis of object lens 103, will project 2 ' position of imaging plane 101.Therefore, take Fig. 2 as example, while moving down described manipulater 104 on depth direction, on the imaging plane at electron microscope place, can see that the end of manipulater 104 moves to 2 ' by 1 ', i.e. dextrosinistral direction in Fig. 2.
Fig. 3 is the electron microscope imaging schematic diagram of the end of manipulater while touching target location plane.From the image-forming principle of electron microscope, when the end of manipulater 104 is in position when 3 places (just contact target plane 105), the light of the end of manipulater 104, by after the primary optical axis of object lens 103, will project 3 ' position of imaging plane 101; When the end of manipulater 104 is in position when 4 places (touch the rear manipulater 104 of objective plane 105 deformation occur), the light of the end of manipulater 104, by after the primary optical axis of object lens 103, will project 4 ' position of imaging plane 101.
Why it should be noted that, can there is deformation in manipulater 104, be because: the manipulater of described nanometer operating system 104 forms angle with the vertical line of described target location plane of living in, and manipulater 104 itself has elasticity.So when manipulater 104 touches after objective plane 105, if continue to move down manipulater 104, will there is deformation in manipulater 104, and the end of manipulater 104 can produce relative sliding on objective plane 105.
Therefore, take Fig. 3 as example, while moving down described manipulater 104 on depth direction, on the imaging plane at electron microscope place, can see that the end of manipulater 104 moves to 4 ' by 3 ', be i.e. direction from left to right in Fig. 3.
Can find out, end at manipulater moves to objective plane, until come in contact with objective plane, occur again in the process of relative sliding, the direction of motion of the end of manipulater on the imaging plane of electron microscope can change, and when the end of manipulater just contacts with objective plane, direction of motion just can change.Therefore, method of the present invention is by the direction of motion of end on the imaging plane of electron microscope of monitoring manipulater, when the direction of motion by the end of manipulater on the imaging plane of electron microscope changes, the depth information of the end of manipulater is as the depth information of the moving target position of nano material, the depth information of moving target position that can Obtaining Accurate nano material.
Fig. 4 is the process flow diagram of Depth Information Acquistion embodiment of the method 2 of the moving target position of nano material of the present invention.As shown in Figure 4, the method comprising the steps of:
S401: mobile described manipulater on depth direction;
S402: the top plan view image information of obtaining the end of described manipulater by described electron microscope;
S403: the moving direction of the end of monitoring described manipulater in described plan view from above;
S404: judge that whether described moving direction changes, and obtains the first judged result;
S405: when described the first judged result represents that described moving direction changes, obtain the first depth direction positional information of end of described manipulater as the depth information of the moving target position of described nano material;
S406: after described moving direction changes, mobile in opposite direction described manipulater on depth direction;
S407: judge whether described moving direction secondary occurs and change, and obtains the second judged result;
S408: when described the second judged result represents that described moving direction changes, obtain the second depth direction positional information of the end of described manipulater;
S409: according to described the first depth direction positional information and described the second depth direction positional information, calculating mean value, obtains the depth information of the moving target position of described nano material.
In the present embodiment, after the end of the manipulater moving direction on imaging plane changes for the first time, to opposite direction move operation device.Easily understand, the Fig. 2,3 of take is example, and at manipulater in the other direction in mobile process, the end of manipulater will be from position on imaging plane 4 ' moves to position 3 ', then 2 ' moves to position 1 ' from position.First the moving direction of the end of manipulater on imaging plane be from right to left, and when the end of manipulater leaves after objective plane just, the moving direction of the end of manipulater on imaging plane becomes from left to right.Therefore,, when the moving direction of the end of manipulater on imaging plane changes for the second time, the residing depth location of manipulater end is also the depth location of objective plane.
In the present embodiment, the first depth direction positional information and the second depth direction positional information are averaged, the depth information of the moving target position using this mean value as nano material, can further improve the precision of depth information of the moving target position of nano material.
Fig. 5 is the process flow diagram that judges whether moving direction changes of the present invention.As shown in Figure 5, this flow process comprises step:
S501: the moving direction that records the end of a upper described manipulater of the moment;
S502: the moving direction that obtains the end of manipulater described in current time;
S503: whether the moving direction that judges the end of manipulater described in current time is contrary with upper one moving direction constantly.
Fig. 6 is the process flow diagram of the top plan view image information of the present invention's end of obtaining manipulater by electron microscope.As shown in Figure 6, this flow process comprises step:
S601: the image information of obtaining setting regions by described electron microscope;
S602: described image information is carried out to Gaussian smoothing filtering, adaptive threshold, corrosion and divergence process;
Wherein, Gaussian smoothing filtering can be carried out noise eliminating to image, and smoothing processing obtains good image border; Adaptive threshold can dynamically be adjusted its threshold value according to image local feature, and image is converted to black and white binary image, obtains more satisfactory thresholding treatment effect; Corrosion treatment can weed out " burr " of the image border of binaryzation; Divergence process is that the edge of image is expanded, and its effect is exactly that the edge of image after corrosion or inner hole are filled out, and conventionally corrodes and expands two kinds of methods and can be used alternatingly.
S603: obtain the graph outline of the described image information after processing, the end using the summit of described graph outline as described manipulater.
Adopt the flow process of Fig. 6, can obtain the top plan view image information of the end of manipulater more clearly.
The present invention discloses a kind of Depth Information Acquistion system of moving target position of nano material.Described Depth Information Acquistion system applies is in nanometer operating system; Described nanometer operating system comprises electron microscope; The vertical line of the manipulater of described nanometer operating system and described target location plane of living in forms angle.
Fig. 7 is the structural drawing of Depth Information Acquistion system embodiment 1 of the moving target position of nano material of the present invention.As shown in Figure 7, this system comprises:
Manipulater mobile unit 701, for mobile described manipulater on depth direction;
Image information acquisition unit 702, for obtaining the top plan view image information of the end of described manipulater by described electron microscope;
Moving direction monitoring means 703, the moving direction for the end of monitoring described manipulater in described plan view from above;
The first judging unit 704, for judging that whether described moving direction changes, and obtains the first judged result;
The first Depth Information Acquistion unit 705, for when described the first judged result represents that described moving direction changes, obtains the first depth direction positional information of end of described manipulater as the depth information of the moving target position of described nano material.
System of the present invention is by the direction of motion of end on the imaging plane of electron microscope of monitoring manipulater, when the direction of motion by the end of manipulater on the imaging plane of electron microscope changes, the depth information of the end of manipulater is as the depth information of the moving target position of nano material, the depth information of moving target position that can Obtaining Accurate nano material.
Fig. 8 is the structural drawing of Depth Information Acquistion system embodiment 2 of the moving target position of nano material of the present invention.As shown in Figure 8, this system also comprises:
Reverse operation device mobile unit 801, after changing when described moving direction, mobile in opposite direction described manipulater on depth direction;
The second judging unit 802, for judging whether described moving direction secondary occurs and change, and obtains the second judged result;
The second Depth Information Acquistion unit 803, for when described the second judged result represents that described moving direction changes, obtains the second depth direction positional information of the end of described manipulater;
Depth Information Acquistion unit 804, for according to described the first depth direction positional information and described the second depth direction positional information, calculating mean value, obtains the depth information of the moving target position of described nano material.
In the present embodiment, the first depth direction positional information and the second depth direction positional information are averaged, the depth information of the moving target position using this mean value as nano material, can further improve the precision of depth information of the moving target position of nano material.
Fig. 9 is the first judging unit structural drawing of the present invention.As shown in Figure 9, this first judging unit comprises:
A upper moment moving direction records subelement 901, for recording the moving direction of the end of a upper described manipulater of the moment;
Current time moving direction records subelement 902, for obtaining the moving direction of the end of manipulater described in current time;
Whether moving direction judgment sub-unit 903 is contrary with upper one moving direction constantly for the moving direction that judges the end of manipulater described in current time.
Figure 10 is image information acquisition cellular construction figure of the present invention.As shown in Figure 9, this image information acquisition unit comprises:
Image information acquisition subelement 1001, for obtaining the image information of setting regions by described electron microscope;
Image Information Processing subelement 1002, for described image information is carried out to Gaussian smoothing filtering, adaptive threshold, corrosion and divergence process;
Manipulater end recognin unit 1003, for obtaining the graph outline of the described image information after processing, the end using the summit of described graph outline as described manipulater.
Adopt the structure of Figure 10, can obtain the top plan view image information of the end of manipulater more clearly.
Finally, also it should be noted that, in this article, relational terms such as the first and second grades is only used for an entity or operation to separate with another entity or operational zone, and not necessarily requires or imply and between these entities or operation, have the relation of any this reality or sequentially.And, term " comprises ", " comprising " or its any other variant are intended to contain comprising of nonexcludability, thereby the process, method, article or the equipment that make to comprise a series of key elements not only comprise those key elements, but also comprise other key elements of clearly not listing, or be also included as the intrinsic key element of this process, method, article or equipment.The in the situation that of more restrictions not, the key element being limited by statement " comprising ... ", and be not precluded within process, method, article or the equipment that comprises described key element and also have other identical element.
Through the above description of the embodiments, those skilled in the art can be well understood to the mode that the present invention can add essential hardware platform by software and realize, can certainly all by hardware, implement, but in a lot of situation, the former is better embodiment.Understanding based on such, what technical scheme of the present invention contributed to background technology can embody with the form of software product in whole or in part, this computer software product can be stored in storage medium, as ROM/RAM, magnetic disc, CD etc., comprise that some instructions are with so that a computer equipment (can be personal computer, server, or the network equipment etc.) carry out the method described in some part of each embodiment of the present invention or embodiment.
In this instructions, each embodiment adopts the mode of going forward one by one to describe, and each embodiment stresses is the difference with other embodiment, between each embodiment identical similar part mutually referring to.For the disclosed system of embodiment, because it corresponds to the method disclosed in Example, so description is fairly simple, relevant part partly illustrates referring to method.
Applied specific case herein principle of the present invention and embodiment are set forth, the explanation of above embodiment is just for helping to understand method of the present invention and core concept thereof; Meanwhile, for one of ordinary skill in the art, according to thought of the present invention, all will change in specific embodiments and applications.In sum, this description should not be construed as limitation of the present invention.
Claims (8)
1. a Depth Information Acquistion method for the moving target position of nano material, is characterized in that, is applied to nanometer operating system; Described nanometer operating system comprises electron microscope; The vertical line of the manipulater of described nanometer operating system and described target location plane of living in forms angle;
Described method comprises:
Mobile described manipulater on depth direction;
By described electron microscope, obtain the top plan view image information of the end of described manipulater;
The moving direction of the end of monitoring described manipulater in described plan view from above;
Judge that whether described moving direction changes, and obtains the first judged result;
When described the first judged result represents that described moving direction changes, obtain the first depth direction positional information of end of described manipulater as the depth information of the moving target position of described nano material.
2. method according to claim 1, is characterized in that, describedly judges that whether described moving direction changes, and comprising:
Record the moving direction of the end of a upper described manipulater of the moment;
Obtain the moving direction of the end of manipulater described in current time;
Whether the moving direction that judges the end of manipulater described in current time is contrary with upper one moving direction constantly.
3. method according to claim 1 and 2, is characterized in that, described method also comprises:
After described moving direction changes, mobile in opposite direction described manipulater on depth direction;
Judge whether described moving direction secondary occurs and change, and obtains the second judged result;
When described the second judged result represents that described moving direction changes, obtain the second depth direction positional information of the end of described manipulater;
According to described the first depth direction positional information and described the second depth direction positional information, calculating mean value, obtains the depth information of the moving target position of described nano material.
4. method according to claim 1 and 2, is characterized in that, obtains the top plan view image information of the end of described manipulater by described electron microscope, comprising:
By described electron microscope, obtain the image information of setting regions;
Described image information is carried out to Gaussian smoothing filtering, the image black white binarization of adaptive threshold, corrosion and divergence process;
Obtain the graph outline of the described image information after processing, the end using the summit of described graph outline as described manipulater.
5. a Depth Information Acquistion system for the moving target position of nano material, is characterized in that, is applied to nanometer operating system; Described nanometer operating system comprises electron microscope; The vertical line of the manipulater of described nanometer operating system and described target location plane of living in forms angle;
Described Depth Information Acquistion system comprises:
Manipulater mobile unit, for mobile described manipulater on depth direction;
Image information acquisition unit, for obtaining the top plan view image information of the end of described manipulater by described electron microscope;
Moving direction monitoring means, the moving direction for the end of monitoring described manipulater in described plan view from above;
The first judging unit, for judging that whether described moving direction changes, and obtains the first judged result;
The first Depth Information Acquistion unit, for when described the first judged result represents that described moving direction changes, obtains the first depth direction positional information of end of described manipulater as the depth information of the moving target position of described nano material.
6. system according to claim 5, is characterized in that, described the first judging unit comprises:
A upper moment moving direction records subelement, for recording the moving direction of the end of a upper described manipulater of the moment;
Current time moving direction records subelement, for obtaining the moving direction of the end of manipulater described in current time;
Whether moving direction judgment sub-unit is contrary with upper one moving direction constantly for the moving direction that judges the end of manipulater described in current time.
7. according to the system described in claim 5 or 6, it is characterized in that, described system also comprises:
Reverse operation device mobile unit, after changing when described moving direction, mobile in opposite direction described manipulater on depth direction;
The second judging unit, for judging whether described moving direction secondary occurs and change, and obtains the second judged result;
The second Depth Information Acquistion unit, for when described the second judged result represents that described moving direction changes, obtains the second depth direction positional information of the end of described manipulater;
Depth Information Acquistion unit, for according to described the first depth direction positional information and described the second depth direction positional information, calculating mean value, obtains the depth information of the moving target position of described nano material.
8. according to the system described in claim 5 or 6, it is characterized in that, described image information acquisition unit comprises:
Image information acquisition subelement, for obtaining the image information of setting regions by described electron microscope;
Image Information Processing subelement, for described image information is carried out to Gaussian smoothing filtering, the image black white binarization of adaptive threshold, corrosion and divergence process;
Manipulater end recognin unit, for obtaining the graph outline of the described image information after processing, the end using the summit of described graph outline as described manipulater.
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| CN1188322A (en) * | 1996-12-10 | 1998-07-22 | 精工电子有限公司 | Cantilever and method of manufacturing the same |
| US6271513B1 (en) * | 1998-09-09 | 2001-08-07 | National Science Council | Large area scanning tip system for near field microscope |
| CN101776434A (en) * | 2010-03-10 | 2010-07-14 | 南开大学 | Method and device for measuring small blind hole based on tunnel current feedback collimation |
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| JP2002206999A (en) * | 2001-01-09 | 2002-07-26 | Hitachi Kenki Fine Tech Co Ltd | Scanning probe microscope |
| US6668628B2 (en) * | 2002-03-29 | 2003-12-30 | Xerox Corporation | Scanning probe system with spring probe |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1188322A (en) * | 1996-12-10 | 1998-07-22 | 精工电子有限公司 | Cantilever and method of manufacturing the same |
| US6271513B1 (en) * | 1998-09-09 | 2001-08-07 | National Science Council | Large area scanning tip system for near field microscope |
| CN101776434A (en) * | 2010-03-10 | 2010-07-14 | 南开大学 | Method and device for measuring small blind hole based on tunnel current feedback collimation |
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