CN102588320A - Molecular pump metal plate stator - Google Patents
Molecular pump metal plate stator Download PDFInfo
- Publication number
- CN102588320A CN102588320A CN2012100623183A CN201210062318A CN102588320A CN 102588320 A CN102588320 A CN 102588320A CN 2012100623183 A CN2012100623183 A CN 2012100623183A CN 201210062318 A CN201210062318 A CN 201210062318A CN 102588320 A CN102588320 A CN 102588320A
- Authority
- CN
- China
- Prior art keywords
- stator
- molecular pump
- panel beating
- stiffening rib
- metal plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Abstract
The invention discloses a molecular pump metal plate stator. The stator is of an overall stainless steel metal plate stamping structure and comprises an annular supporting frame, wherein a plurality of blades are arranged on the annular supporting frame and can be of a rotary structure or a beveled structure. The molecular pump metal plate stator is simple in structure; the supporting frame and the blades can be produced by using a stamping die; and the manufacturing process is simple, the cost is low and the production efficiency is high.
Description
Technical field
The present invention relates to a kind of stator of molecular pump, relate in particular to a kind of molecular pump panel beating stator.
Background technique
Turbomolecular pump is realized the function of bleeding through moving plate-stator group.
In the existing technology, the stator of molecular pump adopts aluminum alloy material, becomes discoideus blank through the lathe car earlier, and through dividing head control angle, the angle of adjustment milling machine is used special milling cutter frock, through the milling machine milled blade again.Because every group of quantity of molecular pump stator is many and thin; In a whole set of technology for avoiding the aluminum alloy material stress relief to cause deformable blade; Need to use special jaw, and the stress deformation that multiple tracks turnning and milling operation guarantees blade in allowed limits through multiple tracks heat treatment destressing.Milling good stator afterwards also needs through deburring, anodic oxidation, and label cuts off, joins many operations of beating pin-and-hole, could finally accomplish.
As shown in Figure 1, be a pair of stator group of milling system processing in the existing technology.
There is following shortcoming at least in above-mentioned existing technology:
The stator technology of milling system has increased reject rate simultaneously milling on each blade extremely elapsed time.Complex process, man-hour are long, reject rate is high makes the holding at high price of blade finished product, and the stator size is big more, and difficulty of processing is high more.Therefore cause the production capacity of stator very limited.
Summary of the invention
The molecular pump panel beating stator that the purpose of this invention is to provide a kind of simple in structure, easy making.
The objective of the invention is to realize through following technological scheme:
Molecular pump panel beating stator of the present invention comprises circular support frame, and said circular support frame is provided with a plurality of blades, and said circular support frame and said blade are whole metal plate punching structure.
Technological scheme by the invention described above provides can be found out, molecular pump panel beating stator provided by the invention is simple in structure because this stator is whole metal plate punching structure, can adopt the Production of Stamping Die stator, and manufacturing process is simple, cost is low, manufacturing efficiency is high.
Description of drawings
Fig. 1 is a pair of structural representation that mills the stator group of system processing in the existing technology;
Fig. 2 is the structural representation of the torsional mode panel beating stator of specific embodiment of the present invention;
Fig. 3 is the structural representation of the inclined opening type panel beating stator of specific embodiment;
Fig. 4 is the structural representation of the press tool of specific embodiment of the present invention;
Fig. 5 a, 5b, 5c, 5d are the structural representation of several specific embodiments of the stiffening rib on the stator among the present invention;
Fig. 6 a, 6b, 6c are the structural representation of several specific embodiments of the lap buckle on the stator among the present invention.
Among the figure: 1, support frame, 2, blade.
Embodiment
To combine accompanying drawing that the embodiment of the invention is done to describe in detail further below.
Molecular pump panel beating stator of the present invention, its preferable embodiment is:
Comprise circular support frame, said circular support frame is provided with a plurality of blades, and said circular support frame and said blade are whole metal plate punching structure.
This stator can be stainless steel metal plate punching spare, also can select the material of other easy punching press for use.
Said blade can be the torsional mode structure, also can be the inclined opening type structure.
Can be provided with stiffening rib on the said circular support frame.
Said stiffening rib can be trigonometric form stiffening rib, circular stiffening rib, fillet grooved stiffening rib and/or square stiffening rib etc.
Said circular support frame can be the structure of two semicircular ring assembly units, and the joint between two semicircular ring is provided with lap buckle.Position and intensity when guaranteeing to install and during the rotor pairing.
Stator among the present invention is a metal plate punching spare, and in the specific embodiment, stator can be processed through punching press with the high-quality corrosion resistant plate, and is simple in structure, can adopt the Production of Stamping Die stator, simplified manufacturing process greatly, reduces cost, enhanced productivity.
As shown in Figure 2, be the torsional mode panel beating stator of specific embodiment; As shown in Figure 3, be the inclined opening type panel beating stator of specific embodiment.Specifically can select torsional mode panel beating stator and inclined opening type panel beating stator according to the concrete condition of size, blade tilt and the quantity of stator.Wherein torsional mode has better performance, and inclined opening type has better intensity.
As shown in Figure 4, be the structural representation of the press tool of a specific embodiment, through two punch dies up and down, one or many is accomplished the stamping-out and the torsional deflection of blade.
Shown in Fig. 5 a, 5b, 5c, 5d, for guaranteeing stator intensity, on the bigger stator of diameter, can increase stiffening rib in the specific embodiment, such as: trigonometric form stiffening rib, circular stiffening rib, fillet grooved stiffening rib and square stiffening rib etc.
Shown in Fig. 6 a, 6b, 6c, accurate for guaranteeing the stator mounting point, can be designed with various lap buckles between stator group two-part.
The advantage of specific embodiment of the present invention is that stator employing stainless steel panel beating is processed, and film-making is significantly increased manufacturing efficiency, difficulty of processing significantly reduces, can significantly reduce manufacturing cost than generally milling.Simultaneously, stainless steel has better vacuum characteristic than aluminum alloy, and it is little under vacuum condition, to exit, and helps to improve performance of products.
The above; Be merely the preferable embodiment of the present invention, but protection scope of the present invention is not limited thereto, any technician who is familiar with the present technique field is in the technical scope that the present invention discloses; The variation that can expect easily or replacement all should be encompassed within protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain of claims.
Claims (7)
1. a molecular pump panel beating stator is characterized in that, comprises circular support frame, and said circular support frame is provided with a plurality of blades, and said circular support frame and said blade are whole metal plate punching structure.
2. molecular pump panel beating stator according to claim 1 is characterized in that this stator is a stainless steel metal plate punching spare.
3. molecular pump panel beating stator according to claim 2 is characterized in that said blade is the torsional mode structure.
4. molecular pump panel beating stator according to claim 2 is characterized in that said blade is the inclined opening type structure.
5. according to each described molecular pump panel beating stator of claim 1 to 4, it is characterized in that said circular support frame is provided with stiffening rib.
6. molecular pump panel beating stator according to claim 5 is characterized in that, said stiffening rib is trigonometric form stiffening rib, circular stiffening rib, fillet grooved stiffening rib and/or square stiffening rib.
7. according to each described molecular pump panel beating stator of claim 1 to 4, it is characterized in that said circular support frame is the structure of two semicircular ring assembly units, the joint between two semicircular ring is provided with lap buckle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012100623183A CN102588320A (en) | 2012-03-09 | 2012-03-09 | Molecular pump metal plate stator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012100623183A CN102588320A (en) | 2012-03-09 | 2012-03-09 | Molecular pump metal plate stator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102588320A true CN102588320A (en) | 2012-07-18 |
Family
ID=46477421
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012100623183A Pending CN102588320A (en) | 2012-03-09 | 2012-03-09 | Molecular pump metal plate stator |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102588320A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103939368A (en) * | 2013-01-22 | 2014-07-23 | 株式会社岛津制作所 | Vacuum pump |
| CN109648252A (en) * | 2018-12-11 | 2019-04-19 | 陕西宏远航空锻造有限责任公司 | A kind of large titanium alloy frame forging machining deformation control method and device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080317590A1 (en) * | 2007-06-21 | 2008-12-25 | Shimadzu Corporation | Production method of stator blade and turbo-molecular pump with the stator blade |
| CN102007298A (en) * | 2008-02-15 | 2011-04-06 | 株式会社岛津制作所 | Turbomolecular pump |
| CN202091252U (en) * | 2011-05-31 | 2011-12-28 | 埃慕迪磁电科技(上海)有限公司 | Fixing blade of turbomolecular pump |
| CN202579268U (en) * | 2012-03-09 | 2012-12-05 | 北京北仪创新真空技术有限责任公司 | Metal fixed sheet of molecular pump |
-
2012
- 2012-03-09 CN CN2012100623183A patent/CN102588320A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080317590A1 (en) * | 2007-06-21 | 2008-12-25 | Shimadzu Corporation | Production method of stator blade and turbo-molecular pump with the stator blade |
| CN102007298A (en) * | 2008-02-15 | 2011-04-06 | 株式会社岛津制作所 | Turbomolecular pump |
| CN202091252U (en) * | 2011-05-31 | 2011-12-28 | 埃慕迪磁电科技(上海)有限公司 | Fixing blade of turbomolecular pump |
| CN202579268U (en) * | 2012-03-09 | 2012-12-05 | 北京北仪创新真空技术有限责任公司 | Metal fixed sheet of molecular pump |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103939368A (en) * | 2013-01-22 | 2014-07-23 | 株式会社岛津制作所 | Vacuum pump |
| CN103939368B (en) * | 2013-01-22 | 2016-07-06 | 株式会社岛津制作所 | Vacuum pump |
| CN109648252A (en) * | 2018-12-11 | 2019-04-19 | 陕西宏远航空锻造有限责任公司 | A kind of large titanium alloy frame forging machining deformation control method and device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101025226B (en) | steel plate chain wheel and its manufacturing method | |
| CN107413987B (en) | bus bending device | |
| CN106180359A (en) | A kind of adjustable steel plate rushes louvered die | |
| CN201889385U (en) | Finish-forging die structure of stainless steel die forging product | |
| CN101920287A (en) | Fine blanking die and method thereof for implementing fine blanking | |
| CN102588320A (en) | Molecular pump metal plate stator | |
| CN202579268U (en) | Metal fixed sheet of molecular pump | |
| JP5968091B2 (en) | Method for punching a thin metal plate and removing distortion and tool therefor | |
| CN105458066A (en) | Sectional material dressing die | |
| CN208214028U (en) | A kind of pendulum rushes machine | |
| CN102019314A (en) | Tooth punching die for saw blade substrate | |
| CN105098422A (en) | Integral connector end structure and fabrication method thereof | |
| CN105345145A (en) | High-speed steel saw blade inlaid with teeth and manufacturing method of high-speed steel saw blade | |
| CN205165587U (en) | Mode structure under stamping die | |
| CN205341624U (en) | Stamping die's positive top -cross sword structure | |
| CN203370951U (en) | Hydraulic machine die special for machining upper barrel edge of agitator | |
| CN205673447U (en) | The drift of slab narrow slot diel | |
| CN205183904U (en) | A mechanical type circle shear cutter for shearing steel plate | |
| CN208083328U (en) | Large titanium alloy blade entirety precision forging sectional die | |
| CN104162768B (en) | Chain part method for processing forming | |
| CN211101088U (en) | Balancing pole machine | |
| CN210080485U (en) | Large-hole step punching die for numerical control punch | |
| CN208992168U (en) | A kind of stamping equipment Multifunctional punching mechanism | |
| CN108580945B (en) | A kind of knurling tool structure and curved surface flower trough rose work method | |
| CN105290231A (en) | Lower mold structure of stamping mold |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C12 | Rejection of a patent application after its publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20120718 |