CN102571028A - Surface acoustic wave reflecting grating - Google Patents

Surface acoustic wave reflecting grating Download PDF

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Publication number
CN102571028A
CN102571028A CN2012100567874A CN201210056787A CN102571028A CN 102571028 A CN102571028 A CN 102571028A CN 2012100567874 A CN2012100567874 A CN 2012100567874A CN 201210056787 A CN201210056787 A CN 201210056787A CN 102571028 A CN102571028 A CN 102571028A
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CN
China
Prior art keywords
reflecting grating
acoustic wave
surface acoustic
electrode
reflecting
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CN2012100567874A
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Chinese (zh)
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CN102571028B (en
Inventor
肖夏
常志刚
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Tianjin University
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Tianjin University
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Priority to CN201210056787.4A priority Critical patent/CN102571028B/en
Publication of CN102571028A publication Critical patent/CN102571028A/en
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Publication of CN102571028B publication Critical patent/CN102571028B/en
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Abstract

The invention belongs to the technical field of electronic information, and relates to a surface acoustic wave reflecting grating, which comprises a plurality of reflecting grating electrodes. The surface acoustic wave reflecting grating is characterized in that: each reflecting grating electrode is 0.06 mu m thick and 0.1 mu m wide. The reflecting grating has high reflecting capability and low transmission loss, the problems about the reflecting coefficient and transmission loss of the reflecting grating in a 2.4GHz surface acoustic wave tag can be well solved, and the identification efficiency and accuracy of the tag can be improved.

Description

A kind of surface acoustic wave reflecting grating
Affiliated technical field
The present invention relates to passive electronic label in the electronic information technical field, particularly relate to a kind of hyperfrequency small size surface acoustic wave reflecting grating.
Background technology
The development of modern communications requires to provide low-loss surface acoustic wave (surface acoustic wave, SAW) device.With respect to traditional SAW device, the cardinal principle of low-loss SAW device is to utilize the reflection of grizzly bar, realizes the one way propagation of sound wave.In order in the process of design, to take into account the reflection of grizzly bar, must carry out necessary improvement to original method for designing.
Summary of the invention
The purpose of this invention is to provide a kind of can being operated under the 2.4GHz, can reduce the loss of surface acoustic wave, and improve the surface acoustic wave reflecting grating of the albedo of reflecting grating.Technical scheme of the present invention is following:
A kind of surface acoustic wave reflecting grating comprises a plurality of reflecting grating electrodes, and the reflecting grating thickness of electrode is 0.06 μ m, and width is 0.1 μ m.
As preferred implementation, described surface acoustic wave reflecting grating, the length of said reflecting grating electrode is 155 μ m, the spacing of electrode and electrode is 0.1 μ m.
Reflecting grating provided by the invention has very strong albedo and than the low transmission loss, can solve the reflection coefficient and the loss problem of reflecting grating in the 2.4GHz surface acoustic wave label, improves the recognition efficiency and the precision of label.
Description of drawings
Fig. 1 reflecting grating dimensional structure of the present invention sketch map.
Fig. 2 reflecting grating dimensional structure of the present invention profile.
Fig. 3 (a) and (b) be respectively the S of reflecting grating electrode 11And S 12Curve.
The relation curve of Fig. 4 reflection coefficient and reflecting grating number of electrodes.
The relation curve of Fig. 5 loss and reflecting grating number of electrodes.
Embodiment
Below in conjunction with accompanying drawing and embodiment, the present invention is further specified.
Reflecting grating is a device architecture the most basic in the SAW device, and what the present invention adopted is open circuit reflecting grating model, and accompanying drawing 1 is the dimensional structure figure of one group of reflecting grating with accompanying drawing 2, and among the figure, 1 is substrate, and 2 is an electrode of reflecting grating.Relating to parameters such as the structure of the main and reflecting grating of the reflection coefficient of reflecting grating, the quantity of electrode, thickness, along with reducing of thickness of electrode, the attenuation coefficient of surface acoustic wave can reduce thereupon; On the other hand; Because reducing of thickness of electrode, the albedo of open-circuit gate also reduces thereupon, for attenuation characteristic and the reflection characteristic of taking into account the surface acoustic wave label; Finally choosing thickness of electrode is 0.06 μ m, through the return loss S shown in the accompanying drawing 3 11Curve and loss S 21Curve can know that reflecting grating is applicable to that frequency is the surface acoustic wave of 2.4GHz.The quantity of gate electrode also is the key factor that influences reflection coefficient, and along with the increase of reflecting grating number of electrodes, reflection coefficient can increase, but the loss of surface acoustic wave also can strengthen, shown in accompanying drawing 4, accompanying drawing 5.Pass through series of optimum; The length and width of the gate electrode of surface acoustic wave reflecting grating and thickness are respectively 155 μ m, 0.1 μ m and 0.06 μ m; As attach shown in Fig. 1 and 2, and 6 reflecting grating electrodes constitute one group of reflecting grating, at this moment; Reflecting grating has very strong albedo and than the low transmission loss, can well be applied in the hyperfrequency surface acoustic wave label.
Through optimization to reflector structure; Can effectively solve the albedo and the loss problem of surface acoustic wave label, confirm finally that through simulation optimization the length and width and the thickness of the gate electrode of surface acoustic wave reflector is respectively 155 μ m, 0.1 μ m and 0.06 μ m, the spacing of electrode and electrode is 0.1 μ m; And per 6 reflecting grating electrodes constitute one group of reflecting grating; At this moment, reflecting grating has very strong albedo and than the low transmission loss, can well be applied in the 2.4GHz surface acoustic wave label.

Claims (2)

1. a surface acoustic wave reflecting grating comprises a plurality of reflecting grating electrodes, it is characterized in that, the reflecting grating thickness of electrode is 0.06 μ m, and width is 0.1 μ m.
2. surface acoustic wave reflecting grating according to claim 1 is characterized in that, the length of said reflecting grating electrode is 155 μ m, and the spacing of electrode and electrode is 0.1 μ m.
CN201210056787.4A 2012-03-06 2012-03-06 Surface acoustic wave reflecting grating Expired - Fee Related CN102571028B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201210056787.4A CN102571028B (en) 2012-03-06 2012-03-06 Surface acoustic wave reflecting grating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201210056787.4A CN102571028B (en) 2012-03-06 2012-03-06 Surface acoustic wave reflecting grating

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CN102571028A true CN102571028A (en) 2012-07-11
CN102571028B CN102571028B (en) 2014-10-15

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109033552A (en) * 2018-07-04 2018-12-18 中国船舶重工集团公司第七〇九研究所 Surface acoustic wave RFID chip reflection coefficient design method based on backward energy compensation

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61220512A (en) * 1985-03-26 1986-09-30 Kazuhiko Yamanouchi Surface acoustic wave resonator
JP2007508752A (en) * 2003-10-08 2007-04-05 アールエフ ソウ コンポーネンツ,インコーポレーテッド Single-phase unidirectional surface acoustic wave transducer and improved reflector
CN101515792A (en) * 2008-02-20 2009-08-26 爱普生拓优科梦株式会社 Surface acoustic wave device and surface acoustic wave oscillator

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61220512A (en) * 1985-03-26 1986-09-30 Kazuhiko Yamanouchi Surface acoustic wave resonator
JP2007508752A (en) * 2003-10-08 2007-04-05 アールエフ ソウ コンポーネンツ,インコーポレーテッド Single-phase unidirectional surface acoustic wave transducer and improved reflector
CN101515792A (en) * 2008-02-20 2009-08-26 爱普生拓优科梦株式会社 Surface acoustic wave device and surface acoustic wave oscillator

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
XIA XIAO等: "finite element analysis of harmonic frequency for 2.4GHz SAW Tags", 《ELECTRON DEVICES AND SOLID-STATE CIRCUITS (EDSSC), 2011 INTERNATIONAL CONFERENCE OF. IEEE》 *
朱华: "基于频域采样的声表面波射频识别系统研究", 《中国博士学位论文全文数据库》 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109033552A (en) * 2018-07-04 2018-12-18 中国船舶重工集团公司第七〇九研究所 Surface acoustic wave RFID chip reflection coefficient design method based on backward energy compensation

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Granted publication date: 20141015