CN102566028B - Carrier and operation method thereof - Google Patents
Carrier and operation method thereof Download PDFInfo
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- CN102566028B CN102566028B CN 201010623838 CN201010623838A CN102566028B CN 102566028 B CN102566028 B CN 102566028B CN 201010623838 CN201010623838 CN 201010623838 CN 201010623838 A CN201010623838 A CN 201010623838A CN 102566028 B CN102566028 B CN 102566028B
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Abstract
The invention relates to a carrier and an operation method thereof. The carrier comprises a base, a first gear component, a second gear component, an object carrying part and a fixing part. The first gear component is rotatably arranged on the base and the second gear component is rotatably arranged on the base and meshed with the first gear component. The object carrying part is used for receiving the placement of an object. The fixing part is connected with the base and a carrying table of a microscopic member group, wherein an angle is formed between a rotating shaft of the first gear component and the rotating shaft of the second gear component. The carrier disclosed by the invention can drive the object to rotate in a full angle manner, and three-dimensional imaging analysis of a microscopic system or processing effectiveness of the object can be effectively upgraded.
Description
Technical field
The present invention relates to a kind of carrier and method of operating thereof, particularly a kind of carrier and method of operating thereof that is applied to micro-member group.
Background technology
Please refer to Fig. 1, it is the schematic diagram of the microscope carrier of traditional sweep electron microscope (Scanning Electron Microscope, SEM) or focused ion beam microscopic system (Focused Ion Beam, FIB).This carrier 10 is except the axial movement of x, y, z three, and microscope carrier 12 can and vert around the x axle along the rotation of z axle.Yet, the scope that general microscope carrier 12 rotates around the x axle roughly only can be between 60 ° to 120 °, because microscope carrier 12 is subject to this angle limits, therefore the object to be measured 14 that is located thereon only can be accepted with the angular relationship that is limited in scope the irradiation of the particle beams 16, this processes to SEM tomoscan or FIB object the restriction that causes in operation.
Summary of the invention
Technical matters to be solved by this invention is to provide a kind of carrier and method of operating thereof, and carrier can drive the rotation that object is made full angle, can effectively promote the usefulness of three-dimensional capture analysis or the object processing of microscopic system.
To achieve these goals, the invention provides a kind of carrier of micro-member group.Carrier comprises a pedestal, one first gear assembly, one second gear assembly, an object bearing part and a fixture.The first gear assembly is located at pedestal rotationally, and the second gear assembly is located at rotationally pedestal and is engaged in the first gear assembly.The object bearing part is located on the second gear assembly, in order to accept the placement of an object.Fixture connects the position of not doing the vertical axial rotation on a microscope carrier of pedestal and micro-member group.Wherein, the first gear assembly can directly or be mounted to microscope carrier via exchanging structure; And the rotation axis of the first gear assembly to and the rotation axis of the second gear assembly between folder one angle.
In order to realize better above-mentioned purpose, the present invention also provides a kind of method of operating of carrier.Carrier be installed in-micro-member group on.Carrier comprises a pedestal, one first gear assembly, one second gear assembly, an object bearing part and a fixture.The first gear assembly is located at pedestal rotationally, and the second gear assembly is located at rotationally pedestal and is engaged in the first gear assembly.The object bearing part is located on the second gear assembly, in order to carry an object.Fixture connects the position of not doing the vertical axial rotation on a microscope carrier of pedestal and micro-member group.Wherein, the first gear assembly can directly or be mounted to microscope carrier via exchanging structure; And the rotation axis of the first gear assembly to and the rotation axis of the second gear assembly between folder one angle.Method of operating comprises the following steps.Driving the first gear assembly rotates; And the first gear assembly drives the second gear assembly and rotates, and wherein the object bearing part rotates with the second gear assembly and drives the object rotation, makes object be subject to the irradiation of a particle beams of micro-member group.
Technique effect of the present invention is: carrier of the present invention and method of operating thereof, carrier can drive object to be analyzed or processing and rotate moving axis to the rotation of carrying out 360 degree, to accept incident particle bundle (as electron beam or the ion beam) irradiation in micro-member group, and then tomoscan capture or the processing of reaching full angle, can effectively promote the three-dimensional capture analysis of microscopic system or the usefulness that object is processed.In addition, carrier has portability and dismantled and assembled property, and its microscope carrier assembly and disassembly from micro-member group are quite convenient and quick.
Describe the present invention below in conjunction with the drawings and specific embodiments, but not as a limitation of the invention.
Description of drawings
Fig. 1 is the schematic diagram of the microscope carrier of general micro-member group;
Fig. 2 is the schematic diagram according to the micro-member group of one embodiment of the invention;
Fig. 3 is that the first adaptor of Fig. 2 and the card of fixture are established schematic diagram;
Fig. 4 is for establishing schematic diagram according to the first adaptor of the present invention's one enforcement aspect and the card of fixture;
Fig. 5 is the side view of edge+X-direction in Fig. 4;
Fig. 6 is the front view of Fig. 2;
Fig. 7 is the cut-open view of the second adaptor of the carrier of other embodiment of the present invention;
Fig. 8 is the explosive view of pedestal, the first adaptor, the first gear assembly and the second gear assembly of Fig. 6;
Fig. 9 is the cut-open view of the first adaptor of other embodiment of the present invention;
Figure 10 is the schematic diagram of object bearing part in Fig. 6;
Figure 11 is the flow chart according to the micro-member group of one embodiment of the invention.
Wherein, Reference numeral
10,102 carriers 12,104 microscope carriers
14,154 object 16 electron beams
100 micro-member group 104a rotatable portion
Non-rotatable part 106 first gear assemblies of 104b
108 second gear assembly 110 pedestals
112 first subbase seat 114 second subbase seats
118,218 fixtures 120,220,320 first adaptors
120a, 164a, 218a perforate 124 first gears
The 124a back side 126 second dwangs
128 the 3rd dwang 130 pedestal perforations
132 second gear 134 first dwangs
136 connecting portion 138 first fixed bars
140 supporter 142 insertion ends
144,150 perforation 152 object bearing parts
156 standing groove 158 base bodies
160 perforations or screw 162 screws
164 second adaptor 166 locked assemblies
320 adapting rod 328 first fixed bars
340 supporter 346 first components
348 second component 348a one ends
348b other end A1, A2 angle
D1, d3, d6 inner diameter d 2, d4, d5 external diameter
S1, S2 rotation axis are to the S3 central shaft
Embodiment
Below in conjunction with accompanying drawing, structural principle of the present invention and principle of work are done concrete description:
Please refer to Fig. 2, it is the schematic diagram according to the micro-member group of one embodiment of the invention.Carrier 102 is arranged on the microscope carrier 104 of micro-member group, and microscope carrier 104 comprises rotatable portion 104a and non-rotatable part 104b, but the rotation of rotatable portion 104a vertical direction, and non-rotatable part 104b does not make vertical rotation.The carrier 102 of the present embodiment is not limited to structure shown in Figure 2, and in other embodiment, the external form of carrier 102 and structure can be different from Fig. 2.Micro-member group can be the micro-member group of sweep electron microscope, the micro-member group of focused ion beam or other kind.
In addition, by non-rotatable part 104b and the pedestal 110 that fixture 118 connects on microscope carrier 104, make when the first gear assembly 106 drives the second gear assembly 108 rotation, pedestal 110 does not rotate thereupon.For example, by engaging of fixture 118 and the first adaptor 120, pedestal 110 is not rotated thereupon.Please refer to Fig. 3, it establishes schematic diagram for the first adaptor of Fig. 2 and the card of fixture.Pedestal can have a perforate, makes fixture can be arranged in perforate, and for example, pedestal 110 comprises that base body 158 (seeing Fig. 2) and the first adaptor 120, the first adaptors 120 are fixedly arranged on the base body 158 of pedestal 110 and have a perforate 120a.Fixture 118 is fixedly arranged on microscope carrier 104 and is arranged in the perforate 120a of the first adaptor 120.Perforate 120a is for example strip hole or circular hole, and the perforate 120a of the present embodiment is take strip hole as example.The bearing of trend of perforate 120a (long axis direction) haply the rotation axis of parallel the second gear assembly 108 to S2.Perforate 120a equals the outside diameter d 2 of fixture 118 and perforate 120a joint haply along the inner diameter d 1 of a direction.Direction herein is the first gear assembly 106 when rotating, in the first adaptor 120 corresponding to the force direction that is subjected at perforate 120a position.
Say further, because the first gear assembly 106 rotates moving axis when rotating to S1, perforate 120a also has the trend that the moving axis that rotates rotates to S1 (be for example tangentially the Y trend of rotating), and therefore perforate 120a is subject to fixture 118 along stopping of Y direction and stressed.Yet, by perforate 120a along the inner diameter d 1 of Y direction equal haply fixture 118 and perforate 120a joint outside diameter d 2, move along Y direction therefore can limit the perforate 120a of the first adaptor 120.When the first gear assembly 106 rotates, be subject to the restriction of fixture 118 due to the first adaptor 120, relatively motionless therefore pedestal 110 also is restricted, so make the first gear assembly 106 rotate and the second gear assembly 108 can be rotated to S2 around rotation axis to S1 around rotation axis.
The coordinate X-Y-Z of the present embodiment in order to facilitate the rotation direction of key diagram target view directions and gear, is not the coordinate system that is defined as microscope carrier 104 or micro-member group.For example, in the present embodiment, X-axis be the rotation axis of the second gear assembly 108 to S2, and Z axis be the rotation axis of the first gear assembly 106 to S1, in other embodiment, the X-Y-Z axle can have different definition again.
Although first adaptor 120 of the present embodiment is to have perforate 120a as the example explanation, so this is non-in order to limit the present invention.In other embodiments, the first adaptor can omit perforate, and fixture can have perforate, makes pedestal can be arranged in perforate.Say further, please refer to Fig. 4 and Fig. 5, Fig. 4 establishes schematic diagram for the first adaptor and the fixture card implemented according to the present invention one, and Fig. 5 is the side view of edge+X-direction in Fig. 4.Fixture 218 has perforate 218a, and perforate 218a is for example strip hole, and the rotation axis of parallel in fact the first gear assembly 106 of its bearing of trend (being long axis direction) is to S1.Perforate 218a equals in fact the outside diameter d 4 of the first adaptor 220 and perforate 218a joint along the inner diameter d 3 of Y direction, in the present embodiment, the first adaptor 220 has an insertion section 142, and it inserts in perforate 218a.The inner diameter d 3 of perforate 218a equals the outside diameter d 4 of insertion section 142 and perforate 218a joint haply.
In the present embodiment, fixture 118 is slender rod piece, and so this is non-in order to limit the present invention, and in other embodiment, the structure of fixture 118 also can be other profile.Say further, as long as the first adaptor 120 that can fixed pedestal 110, all do not break away from the scope of the fixture 118 of the embodiment of the present invention.
Below further introduce the structure of pedestal 110, the first gear assembly 106 and the second gear assembly 108.Please refer to Fig. 6, it is the front view of Fig. 2.
The first gear assembly 106 is for example an assembly or integrally formed assembly.The first gear assembly 106 comprises the first gear 124 and the second dwang 126 and the 3rd dwang 128.The external diameter of the second dwang 126 makes the second dwang 126 and the 3rd dwang 128 consist of a stepped stem less than the external diameter of the 3rd dwang 128.The second dwang 126 can directly be fixed in the microscope carrier 104 of micro-member group 100, and so this is non-in order to limit the present invention.In other embodiment, the second dwang can be fixed in by various types of exchanging structures the microscope carrier of micro-member group.For example, please refer to Fig. 7, it is the cut-open view of the second adaptor of the carrier of other embodiment of the present invention.The second adaptor 164 has perforate 164a and screw 164b, and the second adaptor 164 is in order to connect the second dwang 126 and microscope carrier 104.For example, the second dwang 126 can pass perforate 164a and arrange, and locked assembly 166 can pass screw 164b and the second dwang 126 is fixed on the second adaptor 164.In addition, the mode that the second adaptor 164 is combined with the microscope carrier of micro-member group can stage structure and different designs is arranged, and the first gear assembly 106 of carrier 102 can be installed on the microscope carrier of all kinds of micro-member groups by the second adaptor 164.In the middle of this example, the second adaptor 164 bottoms are one can clamp together the groove of micro-member group microscope carrier.
Please get back to Fig. 6, the 3rd dwang 128 is located on pedestal 110 and is connected the first gear 124 and the second dwang 126.Being located at by the 3rd dwang 128 can be padded with the first gear 124 on pedestal 110, avoids the back side 124a of the first gear 124 directly to contact with pedestal 110, and so this is non-in order to limit the present invention.In other embodiment, the first gear assembly 106 also can omit the 3rd dwang 128, and the second dwang 126 connects the microscope carrier 104 of the first gear 124 and micro-member group, in the case, although the back side 124a of the first gear 124 directly contacts with pedestal 110, so still do not affect the rotation of the first gear 124.
The second gear assembly 108 is for example an assembly or integrally formed assembly.The second gear assembly 108 comprises the second gear 132 and the first dwang 134 and connecting portion 136.The second gear assembly 108 movably is connected in the first adaptor 120 with the first dwang 134.The second gear 132 is for example spiral gear, and connecting portion 136 connects on the second gear 132 and the first dwang 134.The rotation axis of the first gear assembly 106 is about 90 degree to the rotation axis of S1 and the second gear assembly 108 to the angle A 1 between S2.In other embodiments, the first gear assembly 106 and the second gear assembly 108 also can be the gear of other type, and in the case, the rotation axis of the first gear assembly 106 is not limited to 90 degree to the rotation axis of S1 and the second gear assembly 108 to the angle between S2.
Please be simultaneously with reference to Fig. 6 and Fig. 8, Fig. 8 is the explosive view of pedestal, the first adaptor, the first gear assembly and the second gear assembly of Fig. 6.The first adaptor 120 comprises the first fixed bar 138 and supporter 140 and has perforation 150.Insertion section 142 is an end of the first fixed bar 138, and it is arranged in fixture 118, and above-mentioned perforate 120a is through this end 142.Supporter 140 is fixed in the first fixed bar 138.As shown in Figure 6, the connecting portion 136 that supporter 140 is positioned at pedestal perforation 130, the second gear assemblies 108 is resisted against supporter 140, to be subject to the backstop of supporter 140.
As shown in Figure 8, the maximum outside diameter d5 of the second gear 132 is less than the inner diameter d 6 of pedestal perforation 130, make the second gear assembly 108 pass pedestal perforation 130 toward the direction of base body in Fig. 8 158, the first dwang 134 of the second gear assembly is installed up to the perforation 150 of the first adaptor 120, then the supporter 140 of the first adaptor 120 is fixedly arranged on the base body 158 of pedestal 110, and wherein supporter 140 can pass on the screw 162 of base body 158 that perforation 144 is locked in pedestal 110 by the locked assembly (not shown).In addition, base body 158 has perforation 146, can be first the second dwang 126 of the first gear assembly 106 be inserted perforations 146 and the 3rd dwang 128 is bearing on pedestal 110, then, make the second gear assembly 108 direction of pedestal 110 in Fig. 8 pass pedestal perforation 130 until be engaged in the first gear assembly 106.As mentioned above, to be spirally connected or other removably is fixedly arranged on base body 158, make the second gear assembly 108 have characteristic fast, easily due to the first adaptor 120 in assembling and dismounting.
In addition, the external diameter of the first dwang 134 of the second gear assembly 108 makes the first dwang 134 interior free to rotate in the perforation 150 of the first fixed bar 138 less than the internal diameter of perforation 150.Better but non-exclusively, the external diameter of the first dwang 134 critically coordinates with the internal diameter of perforation 150, namely the external diameter of the first dwang 134 is equal to or slightly less than in fact the internal diameter of perforation 150.
The structure that the first adaptor 120 is formed in one, that is, the first fixed bar 138 and supporter 140 are completed in same technique.For example, application machine cutting way cutting monolithic raw material becomes the first adaptor 120; Perhaps, application examples in this way forging type produce the first adaptor 120.So, in other embodiment, the first adaptor also can be comprised of a plurality of bulk-breakings, for example, please refer to Fig. 9, and it is the cut-open view of the first adaptor of other embodiment of the present invention.The first adaptor 320 comprises the first component 346 and the second component 348.The first component 346 comprises the first fixed bar 328 and supporter 340, supporter 340 be fixed in the first fixed bar 328, the first fixed bars 328 be for example be spirally connected, the mode of interlock or welding is fixed in an end 348a of the second component 348.One end 348b of the second component 348 has perforate 320a.Wherein, supporter 340 and perforate 320a similar in appearance to above-mentioned supporter 140 and perforate 120a, do not repeat them here respectively.
In addition, as Fig. 6 and shown in Figure 10, Figure 10 is the schematic diagram of object bearing part in Fig. 6.Object bearing part 152 is located on the second gear assembly 158, is for example to be fixedly arranged on the second gear 132 of the second gear assembly 158.Object bearing part 152 has standing groove 156, object bearing part 152 is fixedly arranged on the second gear 132 through the rotation axis of the second gear 132 mode to S2 with standing groove 156, thus, when the second gear 132 rotated, the to be analyzed or processing object 154 that is positioned on standing groove 156 can eccentric rotary.For instance, the central shaft S3 (seeing Figure 10) of object bearing part 152 has screw or perforation 160 (seeing Fig. 8) through standing groove 156, the second gears 132.When object bearing part 152 is located at the screw of the second gear 132 or perforation 160, the rotation axis of the center of screw or perforation 160, the second gear 132 overlaps to the central shaft S3 of S2 and object bearing part 152, so, when the second gear 132 rotated, the object 154 that is positioned on standing groove 156 can eccentric rotary.
Below with the method for operating of the micro-member group of the flowchart text of Figure 11.Please refer to Figure 11, it is the flow chart according to the micro-member group of one embodiment of the invention.Step S102 to S104 is the method for operating of carrier 102.
In step S102, rotatable portion 104a drives the first gear assembly 106 and rotates.
Then, in step S104, the first gear assembly 106 drives the second gear assemblies 108 and rotates, and the object bearing part 152 that is fixedly arranged on the second gear 132 rotates thereupon, rotates to S2 with drive object 154 moving axis that rotates.
Then, in step S106, the micro-member group 100 irradiation particles beams (being for example electron beam or ion beam) are to object 154.Because object 154 moving axis that can rotate is done the rotations of 360 degree to S2, therefore micro-member group 100 can be at the detected object 154 of rotation axis full angle on the S2, or whole object 154 is processed.
After the carrier 102 of the present embodiment is mounted to general micro-member group microscope carrier, can drive object 154 moving axis that rotates by gear mechanism and reach the slewing areas of 360 degree to S2, make micro-member group 100 can be carry out the acquisition of three-dimension disclocation scan-image or object 154 be carried out the side direction processing of complete angle object 154 limitedly.
The carrier of the above embodiment of the present invention and method of operating thereof, to be analyzed or processing object can rotate moving axis to S2 carry out 360 the degree rotations, shine with the incident particle bundle (as electron beam or ion beam) of accepting in micro-member group, and then tomoscan capture or the processing of reaching full angle.In addition, carrier has portability and dismantled and assembled property, and its be assembled in and dismantle quite convenient and fast from the microscope carrier of micro-member group.
Certainly; the present invention also can have other various embodiments; in the situation that do not deviate from spirit of the present invention and essence thereof; those of ordinary skill in the art work as can make according to the present invention various corresponding changes and distortion, but these corresponding changes and distortion all should belong to the protection domain of the appended claim of the present invention.
Claims (10)
1. the carrier of a micro-member group, is characterized in that, this carrier comprises:
One pedestal;
One first gear assembly is located at this pedestal rotationally;
One second gear assembly is located at rotationally this pedestal and is engaged in this first gear assembly;
One object bearing part is located on this second gear assembly, and this object bearing part is in order to accepting the placement of an object, and
One fixture, a microscope carrier that connects this pedestal and this micro-member group, this microscope carrier comprises a rotatable portion, this rotatable portion is in order to drive this first gear assembly, this first gear assembly drives this second gear assembly and rotates, and wherein this object bearing part rotates with this second gear assembly and drives this object and rotate, and makes this object moving axis that can rotate make 360 degree and rotate, irradiation with the particle beams that is subject to this micro-member group realizes tomoscan capture or the processing of full angle;
Wherein, the rotation axis of this first gear assembly to and the rotation axis of this second gear assembly between folder one angle.
2. carrier as claimed in claim 1, is characterized in that, this first gear assembly and this second gear assembly are spiral gear.
3. carrier as claimed in claim 1, is characterized in that, this angle equals 90 degree.
4. carrier as claimed in claim 1, is characterized in that, one of this pedestal and this fixture have a perforate, and another of this pedestal and this fixture is arranged in this perforate.
5. carrier as claimed in claim 4, it is characterized in that, this perforate is positioned at this pedestal, and this perforate is equal to or slightly less than the external diameter of this fixture and this perforate joint along the internal diameter of a direction, wherein this direction is this first gear assembly when rotating, this perforate be subjected to force direction.
6. carrier as claimed in claim 4, it is characterized in that, this pedestal has one first fixed bar, this perforate is positioned at this fixture, this perforate equals this first fixed bar of this pedestal and the external diameter of this perforate joint along the internal diameter of a direction, wherein this direction is this first gear assembly when rotating, this perforate be subjected to force direction.
7. carrier as claimed in claim 1, is characterized in that, this pedestal comprises:
One base body has a pedestal perforation; And
One first adaptor is fixedly arranged on this base body;
Wherein, wear this pedestal perforation one of in this first adaptor and this second gear assembly, and this second gear assembly movably is connected in this first adaptor.
8. carrier as claimed in claim 7, is characterized in that, this first adaptor comprises:
One first fixed bar is arranged in this fixture; And
One supporter is fixed in this first fixed bar and is positioned at this pedestal perforation;
This second gear assembly comprises:
One second gear, the external diameter of this second gear is less than the internal diameter of this pedestal perforation;
One first dwang movably is connected in this first adaptor; And
A junction connects this second gear and this first dwang and is resisted against on this supporter of this first adaptor.
9. carrier as claimed in claim 1, is characterized in that, this microscope carrier comprises not rotating part of a rotatable portion and, and this carrier also comprises:
One second adaptor connects this rotatable portion of this first gear assembly and this microscope carrier;
Wherein, this fixture connects the not rotating part of this pedestal and this microscope carrier.
10. the method for operating of a carrier, this carrier is applicable to be installed on a micro-member group, it is characterized in that, this carrier comprises a pedestal, one first gear assembly, one second gear assembly, one object bearing part and a fixture, this first gear assembly is located at this pedestal rotationally, this second gear assembly is located at rotationally this pedestal and is engaged in this first gear assembly, this object bearing part is located on this second gear assembly, in order to carry an object, this fixture connects the microscope carrier of this pedestal and this micro-member group, this microscope carrier comprises a rotatable portion, this rotatable portion is in order to drive this first gear assembly, wherein the rotation axis of this first gear assembly to and the rotation axis of this second gear assembly between folder one angle, this method of operating comprises:
Driving this first gear assembly with this rotatable portion rotates; And
This first gear assembly drives this second gear assembly and rotates, wherein this object bearing part rotates with this second gear assembly and drives this object rotation, make this object moving axis that can rotate make 360 degree and rotate, irradiation with the particle beams that is subject to this micro-member group realizes tomoscan capture or the processing of full angle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010623838 CN102566028B (en) | 2010-12-31 | 2010-12-31 | Carrier and operation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010623838 CN102566028B (en) | 2010-12-31 | 2010-12-31 | Carrier and operation method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102566028A CN102566028A (en) | 2012-07-11 |
| CN102566028B true CN102566028B (en) | 2013-11-06 |
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| CN 201010623838 Active CN102566028B (en) | 2010-12-31 | 2010-12-31 | Carrier and operation method thereof |
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Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002025490A (en) * | 2000-07-13 | 2002-01-25 | Mitsubishi Electric Corp | Sample holder, sample table and sample table fixture for electron microscope |
| CN2828847Y (en) * | 2005-11-14 | 2006-10-18 | 广州和创电子科技有限公司 | Three-D rotation observation video microscope |
| KR20090077036A (en) * | 2006-08-04 | 2009-07-14 | 아이코니시스 인코포레이티드 | Dynamic scanning automatic microscope and method |
| JP4988662B2 (en) * | 2008-07-25 | 2012-08-01 | 株式会社日立ハイテクノロジーズ | Charged particle beam equipment |
| CN101706610B (en) * | 2009-11-02 | 2011-07-13 | 徕卡显微系统(上海)有限公司 | Limit adjusting mechanism of microscope objective table |
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