CN102564299A - Achieving device and achieving method capable of improving temperature stability of objective space - Google Patents
Achieving device and achieving method capable of improving temperature stability of objective space Download PDFInfo
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- CN102564299A CN102564299A CN2010106184439A CN201010618443A CN102564299A CN 102564299 A CN102564299 A CN 102564299A CN 2010106184439 A CN2010106184439 A CN 2010106184439A CN 201010618443 A CN201010618443 A CN 201010618443A CN 102564299 A CN102564299 A CN 102564299A
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Abstract
The invention provides an achieving device and an achieving method capable of improving temperature stability of an objective space. The achieving device comprises an inner shell, an outer shell, a static pressure cavity body and a filter, wherein the inside of the inner shell is the objective space, a first medium is filled in the objective space, the outer shell surrounds the inner shell, an annular space is formed between the outer shell and the inner shell, a second medium is filled in the annular space, the static pressure cavity body is positioned at one end of the outer shell, the filter is arranged between the outer shell and the static pressure cavity body, and the static pressure cavity body, the filter and the outer shell are communicated. The achieving device and the achieving method capable of improving temperature stability of the objective space are applied to devices of interferometers and the like which require high temperature stability and can achieve high temperature stability for a long time.
Description
Technical field
The present invention relates to a kind of temperature stabilization device and method, relate in particular to a kind of device and method that improves the object space temperature stability.
Background technology
The temperature stability index has fundamental influence to the optical path space of interferometry equipment and the performance of other many high-accuracy measuring equipments.
Interferometer light path space temperature stability, be meant interferometer light path in the particular space scope of process air (or other gas) temperature to the change of time rate.For example, be used to measure the fizeau interferometer of optical mirror slip face type.The fizeau interferometer principle is an equal thickness interference, in order to a kind of exact instrument of the corrugated aberration of the face shape of detection optical element, optical lens and optical material homogeneity etc.Its measuring accuracy is generally λ/10～λ/100, and λ is the mean wavelength of test light source.
Fizeau interferometer the plane arranged with two kinds of sphere, the former is made up of beam splitter, collimator objective and standard flat, the latter is made up of apart from object lens and standard sphere beam splitter, finite conjugate.Homogeneous beam is on standard flat or standard sphere, and partial reflection is a reference beam; Measured piece is also passed through in the part transmission, is to detect light beam.Detect the light beam autocollimatic and return, overlap, form equal thick interference fringe with reference beam.Can detect the surface shape and the homogeneity thereof of flat board or prism with striking cable plane interferometer.Can detect sphere face shape and its radius-of-curvature, about 1 micron of the latter's measuring accuracy with striking rope sphericity interferometer; Also can detect unlimited, finite conjugate corrugated aberration apart from camera lens.
According to the EDLEN formula; Fizeau interferometer is on the light path of 300mm, and temperature variation will cause the measured deviation of 2nm at least for 0.005 ℃, if one-shot measurement needs 30 minutes; Then need be in 30 minutes time range; The light path temperature being stabilized in the fluctuation range of 0.005 ℃/30min always, realizing the temperature stability of this superhigh precision, is the challenge to temperature control method and device.
Often utilize the principle of thermal resistance series connection to realize the accurate temperature controlling in controlled interval in the prior art.Utilize mixture of ice and water to have constant 0 ℃ of temperature value and boiling water has the characteristic of 100 ℃ of constant temperature values; The temperature end and the low-temperature end of temperature stabilization have been set up respectively; Controlled device is placed between temperature end and the low-temperature end; And, regulate two ends heat conductor thermal resistance and realize controlled device two ends precise dose difference respectively through the heat conductor connection of the adjustable thermal resistance in two ends.
The method that this dependence thermal resistance series connection principle is regulated the controlled device two ends temperature difference is fully feasible on principle; But in the scope of ultraprecise temperature control; The difficulty of this method on Project Realization just sharply increased; Especially high precision like 0.02 ℃ the temperature difference by a small margin under, the method that above-mentioned patent provides is feasible hardly.Main cause is that the control of the environmental temperature fluctuation that general interferometer is placed becomes unusual difficult, and the fluctuation of common engineering environment temperature all can be above 0.02 ℃.Describe as stated above; Two conductors of its both sides, controlled space all need be stabilized in the highly stable state of temperature; And controlled space also is the fluctuation of not conducting heat, and this is what be difficult to realize on engineering, and the adiabatic necessity of in the above-mentioned document and not mentioned controlled space and device; The method and apparatus of more not mentioned thermal insulation, it is infeasible that the temperature difference by a small margin that therefore designs as stated above is based upon on the engineering.When using said method in interferometer light path temperature control field; Because the general environment temperature fluctuation has surpassed temperature-controlled precision, therefore need work out a kind of be not subject to external environment influence, that temperature stability is high, be suitable for bigbore, as to can be applicable to interferometer light path temperature control device and method.
Summary of the invention
The technical matters that the present invention will solve is that high implement device of a kind of temperature stability and method are provided.
For addressing the above problem, the present invention provides a kind of implement device that improves the object space temperature stability, comprising:
Inner casing, its inside is said object space, fills first medium in the said object space;
Shell, it is outside to be enclosed in said inner casing, and forms annular space between the said inner casing, fills second medium in the said annular space;
The static pressure cavity is arranged at an end of said shell;
Filtrator is arranged between said shell and the said static pressure cavity, and said static pressure cavity, filtrator and shell three are communicated with.
Further, said first medium is air or helium.
Further, said second medium is helium, air or nitrogen.
Further, the material of said inner casing is the material of coefficient of heat conductivity less than 0.3w/mk.
Further, the implement device of said raising object space temperature stability also comprises first blind plate and second blind plate, is arranged at respectively on the both ends of the surface of said inner casing.
Further, said first blind plate and said second blind plate are overlapping two-layer perforated plate, and said first blind plate and said second blind plate are two-layer perforated plate, and said two-layer perforated plate is provided with through hole, and wherein one deck perforated plate can rotate around the center.
Further, the thickness of said annular space is 40mm～60mm.
The present invention also provides a kind of method that improves the object space temperature stability, may further comprise the steps:
In the periphery of said object space said inner casing is set, fills said first medium to said object space;
In the periphery of said inner casing said shell is set, forms said annular space between said shell and the inner casing, fill said second medium to said annular space;
End at said shell is provided with the static pressure cavity;
Between said static pressure cavity and said shell, filtrator is set;
Said first medium gets into said object space, reaches and all pass through said static pressure cavity and filtrator successively before said second medium gets into said annular space, to purify said first medium, second medium, improves temperature homogeneity.
Further, said first medium is air or helium.
Further, said second medium is helium, air or nitrogen.
Further, the material of said inner casing is the material of coefficient of heat conductivity less than 0.3w/mk.
Further, first blind plate, second blind plate are set on the both ends of the surface of said inner casing respectively.
Further, said first blind plate and said second blind plate are double-deck perforated plate, and said two-layer perforated plate is provided with through hole, and wherein one deck perforated plate can rotate around the center.
Further, the thickness of said annular space is 40mm～60mm.
The implement device and the method for raising object space temperature stability according to the invention are applied to the device that interferometer etc. needs high-temperature stability, can realize long temperature stability.
Compared with prior art, advantage of the present invention comprises:
1. implement device according to the invention and nested double-decked insulation inside and outside method has designed; Through circularizing the space in the object space profile; And in annular space the higher medium of filling temp stability; Initiatively shield the temperature fluctuation of object space and external environment condition, made implement device of the present invention and method can adapt to general Unit Installation environment such as interferometer, be particularly useful for the temperature control of heavy caliber fizeau interferometer light path;
2. the effect to transport function refine on the operational design, has proposed three kinds of methods that reduce the temperature amplitude, improve temperature stability, comprising:
(1) changes the interior medium of object space, select helium, can reduce the temperature fluctuation in the object space;
(2) thermal resistance of increase intermediate link, inner shell materials is selected the material of coefficient of heat conductivity less than 0.3w/mk, for example adopts ultra heat insulation double glazing material;
The amplitude of the temperature fluctuation of the medium of (3) reduce filling is provided with static pressure cavity and filtrator, improves the purification grade and the homogeneity of the medium of filling, with the amplitude of the temperature that reduces the medium of filling in the object space; According to the transport function principle, reduce the temperature amplitude of the temperature control medium of filling;
On engineering, be easy to the measure that realizes through above-mentioned three; The high accuracy temperature control engineering can suit measures to local conditions to adopt in above-mentioned three measures one or several to make up and realize temperature control; Can realize the more high precision of the temperature of object space; Adopt implement device according to the invention and method, the temperature stability of object space can realize 0.005 ℃/72 hours ultra-high temperature stability.
3. in addition, for reducing the initialization time of installing described in the present invention, guide plate respectively is set in the front-end and back-end of said inner casing, said guide plate is double-deck perforated plate, and said double-deck perforated plate can be realized manually opened and close; At initial phase, at first open said guide plate, said object space is spacious logical; In said object space, fill first medium; Reach preset temperature rapidly, close said guide plate behind the certain hour, said object space sealing; Thereby when keeping the temperature of high stability, add the initialization time that the earth has reduced said implement device.
Description of drawings
Fig. 1 is the structure simplified diagram that improves the implement device of object space temperature stability in one embodiment of the invention.
Fig. 2 be in one embodiment of the invention first blind plate at the structural representation of opening state.
Fig. 3 be in one embodiment of the invention first blind plate in the structure simplified diagram of closed state.
Fig. 4 is the schematic flow sheet that improves the method for object space temperature stability in one embodiment of the invention.
Fig. 5 is an application-fizeau interferometer structure simplified diagram in one embodiment of the invention.
Fig. 6 is the experiment effect figure that implement device according to the invention adopts the heat insulation embodiment of annular space.
It is the experiment effect figure of coefficient of heat conductivity less than the embodiment of 0.3w/mk that Fig. 7 changes inner shell materials for implement device according to the invention.
Fig. 8 is provided with the experiment effect figure of an embodiment of static pressure cavity and filtrator for implement device according to the invention.
Fig. 9 is the experiment effect figure that first medium adopts an embodiment of helium in the implement device object space according to the invention.
Figure 10 changes inner shell materials simultaneously for implement device according to the invention adopts is coefficient of heat conductivity less than 0.3w/mk, the experiment effect figure of an embodiment that static pressure cavity and filtrator, first medium adopt the innovative approach of helium is set.
Embodiment
For making content of the present invention clear more understandable,, content of the present invention is described further below in conjunction with Figure of description.Certainly the present invention is not limited to this specific embodiment, and the general replacement that those skilled in the art knew also is encompassed in protection scope of the present invention.
Secondly, the present invention utilizes synoptic diagram to carry out detailed statement, and when instance of the present invention was detailed, for the ease of explanation, synoptic diagram did not amplify according to general ratio is local, should be with this as to qualification of the present invention.
Fig. 1 is the structural representation that improves the implement device of object space temperature stability described in one embodiment of the invention, and as shown in Figure 1, the implement device of said raising object space temperature stability comprises:
Also comprise:
Said first blind plate and second blind plate are arranged at respectively on the both ends of the surface of said inner casing 2.The structure of said first blind plate and second blind plate can be identical, thus be example with first blind plate, Fig. 2 be in one embodiment of the invention first blind plate at the brief configuration synoptic diagram of opening state.Fig. 3 be in one embodiment of the invention first blind plate in the brief configuration simplified diagram of closed state.Said first blind plate 31 is overlapping two-layer perforated plate, and said two-layer perforated plate is equipped with through hole 32, and in the present embodiment, the through hole of two-layer perforated plate can complete matching; Wherein one deck perforated plate can rotate around the center, and is when this layer perforated plate rotates to certain angle, as shown in Figure 2; The through hole complete matching of two-layer perforated plate, then this moment, first blind plate 31 was open-minded, rotated this layer perforated plate once more; As shown in Figure 3, the through hole of two-layer perforated plate staggers fully, then first blind plate, 32 sealings.Said second blind plate is identical with the structure of first blind plate, opens also identical with the mode of sealing.
In addition, the rear end of said shell 4 also is provided with air outlet 7, guarantee to flow out from air outlet 7 through thermoregulator second medium stable circulation back in said annular space 3, the area of said air outlet be whole 10%～25%.
Further, said first medium is air or helium.
Further, said second medium can be helium, air or nitrogen.
Further, the thickness of said annular space 3 is 40mm～60mm.
Further, the material of said inner casing 2 is the material of coefficient of heat conductivity less than 0.3w/mk.In the present embodiment, preferable, the thermal insulation of materials organic glass of said inner casing 2, said organic glass is applicable to the visual device of needs.
As shown in Figure 1, in the present embodiment, the flow direction 20 the when sequence of positions of said static pressure cavity, filtrator and shell and first medium, the input of second medium is identical, successively from right to left promptly.
Fig. 4 is the schematic flow sheet that improves the method for object space temperature stability in one embodiment of the invention.Please combine Fig. 1 and Fig. 4, the present invention also provides a kind of method that improves the object space temperature stability, may further comprise the steps:
S01: said inner casing 2 is set in the periphery of said object space 1, fills said first medium to said object space 1; Further, said first medium can be air or helium.
S02: said shell 4 is set in the periphery of said inner casing 2, forms said annular space 3 between said shell 4 and the inner casing 2, fill said second medium to said annular space 3.Further, said second medium can be helium, air or nitrogen.
S03: the end at said shell 4 is provided with static pressure cavity 6 high efficiency particulate air filters 5;
S04: between said static pressure cavity 6 and said shell 4, filtrator 5 is set; Said first medium gets into said object space 1, and before said second medium gets into said annular space 3, all passes through said static pressure cavity 6 and filtrator 5 successively, to purify said first medium, second medium, improves temperature homogeneity.
The course of work of said implement device is following in the present embodiment:
At first implement device initialization.In the time will using, at first implement device is carried out initialization, rotate the perforated plate on first blind plate and second blind plate, make the through hole complete matching of two-layer perforated plate, as shown in Figure 2, this moment, said object space 1 communicated with said annular space 3; Feed in first medium to the said object space 1; (first medium for example ± 0.5 ℃/(0.0033Hz～2Hz)) obtains more stabilized uniform air-flow of temperature, then via filtrator 5 earlier through static pressure cavity 6 will to pass through preliminary adjusting temperature accuracy; Hundred grades that realize first medium purify grade; Be transported to the object space 1 from annular space 3 then, original medium in the object space 1 is discharged, make to be full of first medium in the object space 1 with uniform temperature precision.Then the temperature in the object space 1 is initialised, and rotates the perforated plate on first blind plate and second blind plate after the initialization once more, and the through hole of two-layer perforated plate is staggered fully, forms as shown in Figure 3ly, and then said object space 1 complete closed gets into the temperature control stage.After the initialization of flow field; The engineering parameter of whole temperature control process such as present embodiment; Can in 30 minutes, accomplish; Through installing the regulating device such as the rotation orifice plate additional, can be so that problems such as temperature control overlong time be effectively solved, the feasible device of pressing the raising temperature stability of this patent method design is realized more easily on engineering and is moved more cheaply.
Then get into the temperature control stage.Feeding second medium regulates temperature accuracy (for example ± 0.5 ℃/(0.0033Hz～2Hz)) back is earlier through static pressure cavity 6 through preliminary; Can obtain more stabilized uniform air-flow of temperature; Then via filtrator 5; Filtrator 5 can realize that hundred grades purify grade, and second medium is transported in the annular region space 3 more then, circulation in annular space 3.The fluctuation of second medium temperature causes exchange heat, and heat passes to first medium of object space 1 again through the heat conduction of inner casing 2 through the heat transfer free convection mode.
Below describe; To specify how to use implement device according to the invention and method temperature stability with an embodiment, the implement device and the method that improve the object space temperature stability described in the present embodiment are applied to the temperature stability of a diameter for the heavy caliber fizeau interferometer optical path space of the long 600mm of φ 300mm.Fig. 5 is an application-fizeau interferometer structure simplified diagram in one embodiment of the invention; The general structure that fizeau interferometer is measured is as shown in Figure 5: the light path that interferometer main frame 300 forms is transmitted in interferometer light path space 100, detects through being got back to interferometer main frame 300 by object plate 200 reflections from optical interference circuit space 100.Wherein interferometer light path space 100 is the temperature controlled object space 1 of needs of the present invention; The direction 10 of the direction of light path in Fig. 1; The flow direction of input media that is used for controlling temperature is below described the implementation procedure of temperature control in detail along the direction 20 of Fig. 1:
At first need construct an enclosure space that surrounds the interferometer light path space fully; Enclosure space is the object space 1 that needs temperature control, and inner casing 2 needs the object space 1 of the whole light path process of parcel, and the sealing property of object space 1 does not have special requirement; Only require medium and annular space 3 in the object space 1 are separated relatively; Allow leakage area to be no more than 5%, seal degree is high more, and the effect of temperature control is good more.
Owing to when general interferometer is used to measure, require object space 1 visual, so that adjust measured eyeglass attitude.Therefore, the inner shell materials 2 that is used to separate adopts organic glass, and its first blind plate and second blind plate also can adopt organic glass.But be not limited to organic glass; Material can be a homogenous material; The coefficient of heat conductivity such as combination layer that also can be the combination of for example multiple material in addition, go out a vacuum interlayer by multiple material clip less than the material of 0.3w/mk all in thought range of the present invention; The coefficient of heat conductivity of the material of inner casing 2 is low more, and the temperature stability index of object space 1 is high more.The coefficient of heat conductivity of the material of inner casing 2 or comprehensive coefficient of heat conductivity are the interior air of the annular space 3 of temperature-control structure of influence as present embodiment to one of important parameter of the transport function of object space 1; It also is one of the important parameter of setting up the temperature stability of the medium temperature precision of carrying in the annular space 3 and object space 1; Relation between the two will be set forth at the back in detail, and this method also is to be used for one of a kind of important method of regulating temperature stability in this patent.
Outside the inner casing 2 of the object space 1 that seals, make up one deck shell 4 again, form an annular space 3 between shell 4 and the inner casing 2.The thickness of annular space 3; Be that distance between shell 4 and the inner casing 2 is 40mm～60mm; That wherein preferable is 50mm; The setting of thickness is relevant with the flowing velocity of second media in the temperature fluctuation of external environment, the annular space 3; Its function is for the thermal boundary layer that external environment is formed in annular space 3 does not have influence on inner casing 2, and shell 4 in the longitudinal direction also need be greater than there being inner casing 2, is placed at fully among second medium that annular space 3 flows to guarantee object space 1 that inner casing 2 seals out.
The material of shell 4 selects not have special requirement; Like engineering object space 1 is had visual requirement, can select transparent materials such as organic glass for use, the coefficient of heat conductivity of shell 4 materials is low more; The temperature control of object space 1 is realized more easily; But influence coefficient is very little, as far as present embodiment, can ignore and not consider.
Need to supply with in the annular space 3 through preliminary second medium of regulating of excess temperature, said second medium can be air, helium or nitrogen, if inner casing 1 also can adopt water for the complete closed material.Second medium adopts air in the present embodiment, and in the scope of temperature fluctuation frequency from 0.0033Hz to 2Hz, the temperature of the object space 1 that present embodiment is realized can both realize the raising of temperature stability index.The said frequencies scope only is the frequency range of temperature fluctuation in the common engineering practice, and this method can realize function in the said frequencies scope, but is not limited in the said frequencies scope.This method has the output point of keeping, i.e. the constant function of the vibration frequency of the temperature of object space.Preliminary temperature accuracy desired value of regulating depends on the index that the temperature stability of object space 1 requires; Present embodiment supplied with ± the 0.5 ℃/(air of 0.0033Hz～2Hz); Realized the temperature control impact point ± 0.2 ℃/(0.0033Hz～2Hz); Under the situation that frequency characteristic remains unchanged, the fluctuation Oscillation Amplitude with input air has eased down to 0.2 from 0.5 effectively.
Fig. 6 is that implement device described in one embodiment of the invention adopts the heat insulation experiment effect figure of annular space.Of Fig. 6, according to the design of above-mentioned present embodiment, input air temperature ± 0.5 ℃/(0.0033Hz), the target control point temperature stability of output be ± 0.2 ℃/(0.0033Hz).
This method does not limit the Oscillation Amplitude of input media temperature; The span of limited target space temperature amplitude more not; Important characteristic is to keep simultaneously under the constant situation of frequency through the Oscillation Amplitude that reduces temperature, improves the output point temperature, and promptly the changing value of object space is to the ratio of time; Be temperature stability, to satisfy the requirement of particular device to the object space temperature stability.The temperature accuracy that present embodiment has adopted annular space 3 is ± 0.5 ℃ to ± 0.05 ℃ value, but this method is not limited to this temperature range value, and specifically value is according to actual demands of engineering.The stability of adjusting second medium is to be used to one of important method that improves target temperature controlling point temperature stability index in this patent.
The speed of supplying with second medium of annular space 3 is principle by not producing the noise objective that surpasses requirement, does not have other special requirement.
In the present embodiment, first medium of sealing is an air in the object space 1.The said method of this patent not in the limited target space 3 first medium be air.Change the temperature stability that the object space 1 first interior medium can improve output point, another important method of the temperature stability of the raising target temperature controlling point of this method formation this patent target.
Below set forth in detail three kinds of methods that improve temperature stabilities; Provide the adjusting parameter of each method and the corresponding relation of output; Set forth corresponding relation or the corresponding relation computing method that provided according to hereinafter; Can combine the actual demands of engineering situation in the engineering, design according to this method and meet the temperature-control structure that target temperature controlling point temperature stability is wanted.
1. change the inner shell materials heat conductivility and improve the object space temperature stability.
It is the experiment effect figure of coefficient of heat conductivity less than the embodiment of 0.3w/mk that Fig. 7 changes inner shell materials for implement device according to the invention.As shown in Figure 7, change the material of inner casing 2 the superadiabatic material of coefficient of heat conductivity into less than 0.3w/mk, for example during the superadiabatic double glazing, in input air temperature ± 0.05 ℃/(0.0033Hz), the temperature stability of object space 1 be ± 0.005 ℃/(0.0033Hz).
2. regulate the input air temperature stability and improve the object space temperature stability.
Fig. 8 is provided with the experiment effect figure of an embodiment of static pressure cavity and filtrator for implement device according to the invention.Like Fig. 8, static pressure cavity 5 and filtrator 6 are set, improve first medium of input and the purification grade and the homogeneity of second medium, with reduce by first medium of filling in the object space 1 with annular space 3 in the temperature amplitude of second medium; According to the transport function principle, the temperature amplitude of the temperature control medium of reduce filling, input air temperature ± 0.05 ℃/(0.0033Hz), the target control point temperature stability of output be ± 0.02 ℃/(0.0033Hz).
3. first medium of changing object space 1 improves the temperature stability of object space.
Fig. 9 is the experiment effect figure that first medium adopts an embodiment of helium in the implement device object space according to the invention.As shown in Figure 9, when first medium in the said object space 1 changes helium into, with the temperature stability that improves the target temperature controlling point.Input air temperature ± 0.05 ℃/(0.0033Hz), the target control point temperature stability of output be ± 0.005 ℃/(0.0033Hz).
The transport function of said process is specific, be with structure one to one, what in the structural parameters transport function is had the greatest impact is the heat conductivility parameter of the above-mentioned shell of enumerating 2, the stability parameter of input media and the geometric scale of object space 1.After these three parameters are confirmed; Can adopt the lumped parameter method of heat supply network network computing method or the temperature stabilization performance index that the CFD method is confirmed the target control point corresponding with above-mentioned parameter; Like the target control point temperature stability index of present embodiment ± 0.2 ℃/(0.0033Hz～2Hz); Can change and optimize the calculating check as stated above again of above-mentioned three parameters; To realize the temperature stability index of the desired object space of engineering; As lower ± 0.3 ℃/72 hours, Figure 10 changes inner shell materials simultaneously for implement device according to the invention adopts is coefficient of heat conductivity less than 0.3w/mk, the experiment effect figure that static pressure cavity and filtrator, first medium adopt an embodiment of three kinds of innovative approachs of helium is set.Shown in figure 10, its temperature stabilization index reaches ± and 0.005 ℃/72 hours.
The implement device and the method for raising object space temperature stability according to the invention are applied to the device that interferometer etc. needs high-temperature stability, can realize long temperature stability.
Compared with prior art, advantage of the present invention comprises:
1, implement device according to the invention and nested double-decked insulation inside and outside method has designed; Through circularizing the space in the object space profile; And in annular space the higher medium of filling temp stability; Initiatively shield the temperature fluctuation of object space and external environment condition, made implement device of the present invention and method can adapt to general Unit Installation environment such as interferometer, be particularly useful for the temperature control of heavy caliber fizeau interferometer light path;
2, the effect to transport function refine on the operational design, has proposed three kinds of methods that reduce the temperature amplitude, comprising:
(1) changes the interior medium of object space, select helium, to reduce the temperature fluctuation in the object space;
(2) thermal resistance of increase intermediate link, inner shell materials is selected the material of coefficient of heat conductivity less than 0.3w/mk, for example adiabatic organic glass, the heat-insulating property of raising thermal insulation material;
The amplitude of the temperature fluctuation of the medium of (3) reduce filling is provided with static pressure cavity and filtrator, improves the purification grade and the homogeneity of the medium of filling, with the amplitude of the temperature that reduces the medium of filling in the object space; According to the transport function principle, reduce the temperature amplitude of the temperature control medium of filling;
On engineering, be easy to the measure that realizes through above-mentioned three; The high accuracy temperature control engineering can suit measures to local conditions to adopt in above-mentioned three measures one or several to make up and realize temperature control; Can realize the more high precision of the temperature of object space; Adopt implement device according to the invention and method, the temperature stability of object space can realize 0.005 ℃/72 hours ultra-high temperature stability.
3, in addition, for reducing the initialization time of installing described in the present invention, guide plate respectively is set in the front-end and back-end of said inner casing, said guide plate is double-deck perforated plate, and said double-deck perforated plate can be realized manually opened and close; At initial phase, at first open said guide plate, said object space is spacious logical; In said object space, fill first medium; Reach preset temperature rapidly, close said guide plate behind the certain hour, said object space sealing; Thereby when keeping the temperature of high stability, add the initialization time that the earth has reduced said implement device.
Though the present invention discloses as above with preferred embodiment; Right its is not in order to limit the present invention; Has common knowledge the knowledgeable in the technical field under any; Do not breaking away from the spirit and scope of the present invention, when can doing a little change and retouching, so protection scope of the present invention is as the criterion when looking claims person of defining.
Claims (14)
1. an implement device that improves the object space temperature stability is characterized in that, comprising:
Inner casing, its inside is said object space, is filled with first medium in the said object space;
Shell, it is outside to be enclosed in said inner casing, and forms annular space between the said inner casing, is filled with second medium in the said annular space;
The static pressure cavity is arranged at an end of said shell;
Filtrator is arranged between said shell and the said static pressure cavity, and said static pressure cavity, filtrator and shell three are communicated with.
2. like the implement device of right 1 described raising object space temperature stability, it is characterized in that said first medium is air or helium.
3. like the implement device of right 1 described raising object space temperature stability, it is characterized in that said second medium is helium, air or nitrogen.
4. like the implement device of right 1 described raising object space temperature stability, it is characterized in that the material of said inner casing is the material of coefficient of heat conductivity less than 0.3w/mk.
5. like the implement device of right 1 described raising object space temperature stability, it is characterized in that, also comprise first blind plate and second blind plate, be arranged at respectively on the both ends of the surface of said inner casing.
6. like the implement device of right 1 described raising object space temperature stability, it is characterized in that said first blind plate and said second blind plate are two-layer perforated plate, said two-layer perforated plate is provided with through hole, and wherein one deck perforated plate can rotate around the center.
7. like the implement device of right 1 described raising object space temperature stability, it is characterized in that the thickness of said annular space is 40mm～60mm.
8. an implementation method that improves the object space temperature stability is characterized in that, may further comprise the steps:
Periphery at object space is provided with inner casing, fills first medium to said object space;
Periphery at said inner casing is provided with shell, forms annular space between said shell and the said inner casing, fills second medium to said annular space;
End at said shell is provided with the static pressure cavity;
Between said static pressure cavity and said shell, filtrator is set;
Said first medium gets into said object space, reaches and all pass through said static pressure cavity and filtrator successively before said second medium gets into said annular space, to purify said first medium, second medium, improves temperature homogeneity.
9. the method for raising object space temperature stability as claimed in claim 8 is characterized in that, said first medium is air or helium.
10. the method for raising object space temperature stability as claimed in claim 8 is characterized in that, said second medium is helium, air or nitrogen.
11. the method for raising object space temperature stability as claimed in claim 8 is characterized in that, the material of said inner casing is the material of coefficient of heat conductivity less than 0.3w/mk.
12. the method for raising object space temperature stability as claimed in claim 8 is characterized in that, first blind plate, second blind plate are set respectively on the both ends of the surface of said inner casing.
13. the method for raising object space temperature stability as claimed in claim 8 is characterized in that, said first blind plate and said second blind plate are double-deck perforated plate, and said two-layer perforated plate is provided with through hole, and wherein one deck perforated plate can rotate around the center.
14. the method for raising object space temperature stability as claimed in claim 8 is characterized in that, the thickness of said annular space is 40mm～60mm.
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| CN201010618443.9A CN102564299B (en) | 2010-12-30 | 2010-12-30 | A kind of implement device and method improving object space temperature stability |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105276769A (en) * | 2015-11-17 | 2016-01-27 | 中国科学院长春光学精密机械与物理研究所 | Local environment control unit of optical system |
| CN107621238A (en) * | 2017-09-01 | 2018-01-23 | 南京理工大学 | Interference cavity device is used in flatness metering |
| CN114739161A (en) * | 2022-04-02 | 2022-07-12 | 合肥真萍电子科技有限公司 | Quartz vertical tube furnace with air curtain cooling structure |
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| JPS5398138A (en) * | 1977-02-09 | 1978-08-28 | Masahiko Izumi | Constant temperature room |
| CN2565758Y (en) * | 2002-05-28 | 2003-08-13 | 上海富华保温容器有限公司 | Rotary bottle stopper for vacuum flask |
| CN2866215Y (en) * | 2005-12-20 | 2007-02-07 | 比亚迪股份有限公司 | Vehicle air conditioner rotary throttle sealing device |
| CN101250679A (en) * | 2008-04-15 | 2008-08-27 | 任建国 | On-line annealing method and apparatus for rolling copper pipe |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPS5398138A (en) * | 1977-02-09 | 1978-08-28 | Masahiko Izumi | Constant temperature room |
| CN2565758Y (en) * | 2002-05-28 | 2003-08-13 | 上海富华保温容器有限公司 | Rotary bottle stopper for vacuum flask |
| CN2866215Y (en) * | 2005-12-20 | 2007-02-07 | 比亚迪股份有限公司 | Vehicle air conditioner rotary throttle sealing device |
| CN101250679A (en) * | 2008-04-15 | 2008-08-27 | 任建国 | On-line annealing method and apparatus for rolling copper pipe |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105276769A (en) * | 2015-11-17 | 2016-01-27 | 中国科学院长春光学精密机械与物理研究所 | Local environment control unit of optical system |
| CN107621238A (en) * | 2017-09-01 | 2018-01-23 | 南京理工大学 | Interference cavity device is used in flatness metering |
| CN114739161A (en) * | 2022-04-02 | 2022-07-12 | 合肥真萍电子科技有限公司 | Quartz vertical tube furnace with air curtain cooling structure |
| CN114739161B (en) * | 2022-04-02 | 2023-12-26 | 合肥真萍电子科技有限公司 | Quartz standpipe stove with air curtain cooling structure |
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| CN102564299B (en) | 2016-04-20 |
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