CN102541398A - Method, device and system for adjusting process formula step sequence - Google Patents
Method, device and system for adjusting process formula step sequence Download PDFInfo
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- CN102541398A CN102541398A CN2010105927650A CN201010592765A CN102541398A CN 102541398 A CN102541398 A CN 102541398A CN 2010105927650 A CN2010105927650 A CN 2010105927650A CN 201010592765 A CN201010592765 A CN 201010592765A CN 102541398 A CN102541398 A CN 102541398A
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Abstract
The invention provides a method, device and system for adjusting a process formula step sequence, which are used for solving the problems of high work load and easiness in causing misoperation caused by manually adjusting the process step sequence. The method comprises the following steps of: detecting the state of a mouse button; if detecting that the mouse button is pressed, judging whether a pressed position of a mouse corresponds to a certain process formula step, and if so, recording the pressed position of the mouse as an initial position and continuing to detect the state of the mouse button; if detecting that the mouse button is lifted, judging whether a lifted position of the mouse corresponds to a certain process formula step, and if so, recording the lifted position of the mouse as a final position; and comparing whether the initial position and the final position are same, and if not, moving the process formula step corresponding to the initial position to the front or back of the process formula step corresponding to the final position. By using the method, device and system, the step sequence can be conveniently and accurately adjusted, the editing work is greatly simplified, the workload is reduced, and the possibility of misoperation is lowered.
Description
Technical field
The present invention relates to the semiconductor control technology, particularly relate to a kind of method, Apparatus and system of adjusting process prescription sequence of steps.
Background technology
In semiconductor machining industry, apparatus control system is used to control various semiconductor processing equipments and carries out the semi-conductive manufacturing.Said apparatus control system comprises upper strata control system and lower floor's control system; Wherein lower floor's control system is directly mutual with equipment; The upper strata control system is mutual with lower floor's control system; Automatic generation, data acquisition, warning processing, plant maintenance operation, the technical recipe edition function of the equipment of being responsible for, and technical recipe editor wherein is one of very important function of upper strata control system.
Said technical recipe editor is meant to different processing technologys and carries out settings such as processing step, desired parameters, range of parameter values.With reference to shown in Figure 1, be editor's synoptic diagram of a certain technical recipe (recipe).It shown in the figure editor's form; The first line display gauge outfit of editor's form; Gauge outfit comprises fields such as " parameter " and each processing step " step1 ", " step2 "; Wherein the parameter setting of needs in this technological process is shown in the corresponding tabulation of field " parameter ", like chamber pressure, chamber temp, incident power, reflective power, process gas flow or the like; " step1 ", " step2 " expression processing step sequence number, corresponding institute setting parameter all has the relevant parameters value under each processing step.
In the technical recipe editor; Usually need adjust the order between each processing step according to the different processes prescription; Sequence of process steps for example shown in Figure 1 just need be exchanged order with step1 and step2 in another technical recipe, perhaps step1 moved to after the step3, or the like.
At present; The method of adjusting process prescription sequence of steps is in the control system of upper strata: the gauge outfit of the processing step of at first selecting to move at the process establishment page, " moving " button on the click process edit page then, page ejection dialog box; In dialog box, click drop-down list; The target location that selection will move to, " affirmation " button of clicking then in the dialog box is accomplished moving of processing step, perhaps clicks " cancellation " button and cancels current operation.For example; Step1 among Fig. 1 is moved to the step2 back; Choose the corresponding row of field " step1 " earlier; Click " moving " button then and eject dialog box, in the drop-down list of dialog box, choose " step2 " and click " affirmation ", the row that " step1 " is corresponding can move on to after " step2 " corresponding row automatically.
Above-mentioned this method through manual mode adjusting process sequence of steps; Whenever move a step and all will accomplish the complicated processes that the ejection dialog box is closed in click movable button, click drop-down list, select target step, click affirmation or cancellation; And in the process of edit process prescription; Moving the prescription step is very frequent work, so the workload of said method is very big.And if the step of technical recipe is a lot, the content of drop-down list can be long in the dialog box that then ejects, and is very easy to produce maloperation during the select target step.
Summary of the invention
The present invention provides a kind of method, Apparatus and system of adjusting process prescription sequence of steps, to solve the problem that the manual setting sequence of process steps causes big, the easy maloperation of workload.
In order to address the above problem, the invention discloses a kind of method of adjusting process prescription sequence of steps, comprising:
Detect the mousebutton state;
Press if detect mousebutton, then judge mouse corresponding a certain technical recipe step whether depressed position, if then write down mouse and be initial position depressed position, and continue to detect the mousebutton state;
Lift if detect mousebutton, then judge whether corresponding a certain technical recipe step of mouse-up position, if then writing down the mouse-up position is final position;
Whether more said initial position is identical with final position, if different, then that initial position is corresponding technical recipe step moves to before or after the corresponding technical recipe step of final position.
Preferably; Judge that mouse presses or lift whether corresponding a certain technical recipe step of position; Comprise: judge that mouse presses or lift the gauge outfit whether position is in a certain technical recipe step, if represent that then mouse presses or lift the position to should the technical recipe step; If not, do not represent that then mouse presses or lift the position not to should the technical recipe step.
Preferably, said record mouse is an initial position depressed position, comprising: the column position that the record mouse is corresponding depressed position is an initial position, and said column position is the column position of the gauge outfit place row of a certain technical recipe step.
Preferably, said record mouse-up position is a final position, comprising: the corresponding column position in record mouse-up position is a final position, and said column position is the column position of the gauge outfit place row of a certain technical recipe step.
Preferably, whether said initial position is identical with final position, comprising: whether the column position column position corresponding with final position that relatively initial position is corresponding is same column position, if then said initial position is identical with final position; Then said initial position and final position are inequality if not.
Preferably, said method also comprises: press the back and move if detect mousebutton, the gauge outfit sectional drawing of then that initial position is corresponding a certain technical recipe step, and with this sectional drawing as mouse icon; If detect mouse-up, then with said mouse icon reduction.
Wherein, said mousebutton is the left button or the right button of mouse.
The present invention also provides a kind of device of adjusting process prescription sequence of steps, comprising:
The mouse state detecting unit is used to detect the mousebutton state;
Mouse is pressed processing unit; Be connected in said mouse state detecting unit; Be used for when the mouse state detection when mousebutton is pressed, judge mouse corresponding a certain technical recipe step whether depressed position, if; Then write down mouse and be initial position depressed position, and trigger the mouse state detecting unit and continue to detect the mousebutton state;
The mouse-up processing unit; Be connected in said mouse state detecting unit, be used for when the mouse state detection when mousebutton lifts, judge whether corresponding a certain technical recipe step of mouse-up position; If then writing down the mouse-up position is final position;
The step adjustment unit; Be connected to said mouse and press processing unit and said mouse-up processing unit; Whether be used for more said initial position identical with final position; If different, then that initial position is corresponding technical recipe step moves to before or after the corresponding technical recipe step of final position.
Preferably; Said mouse is pressed processing unit and is comprised: press judgment sub-unit; Be used for when the mouse state detection when mousebutton is pressed; Judge whether mouse is in the gauge outfit of a certain technical recipe step depressed position, if represent that then mouse is depressed position to should the technical recipe step; If not, do not represent that then mouse is not depressed position to should the technical recipe step; Initial position record subelement; Be connected in the said judgment sub-unit of pressing; Be used for when said when pressing judgment sub-unit and judging mouse and be in the gauge outfit of a certain technical recipe step depressed position; The column position that the record mouse is corresponding depressed position is an initial position, and said column position is the column position of the gauge outfit place row of this technical recipe step.
Preferably; Said mouse-up processing unit comprises: lift judgment sub-unit; Be used for when the mouse state detection when mousebutton lifts; Judge whether the mouse-up position is in the gauge outfit of a certain technical recipe step, if represent that then the mouse-up position is to should the technical recipe step; If not, do not represent that then the mouse-up position is not to should the technical recipe step; Final position record subelement; Be connected in the said judgment sub-unit of lifting; Be used for when said when lifting judgment sub-unit and judging the mouse-up position and be in the gauge outfit of a certain technical recipe step; The corresponding column position in record mouse-up position is a final position, and said column position is the column position of the gauge outfit place row of this technical recipe step.
Preferably; Said step adjustment unit comprises: the position is subelement relatively; Be connected to said initial position record subelement and final position record subelement; Be used for whether the corresponding column position column position corresponding with final position of comparison initial position is same column position, if then said initial position is identical with final position; Then said initial position and final position are inequality if not; Step mover unit; Be connected in relatively subelement of said position; Be used for when said position relatively subelement compare said initial position and final position not simultaneously, the technical recipe step that initial position is corresponding moves to before or after the technical recipe step of final position correspondence.
Preferably, said device also comprises: the mouse icon converter unit, be used for pressing the back when moving to mousebutton when the mouse state detection, the gauge outfit sectional drawing of a certain technical recipe step that initial position is corresponding, and with this sectional drawing as mouse icon; When mouse state detection during to mouse-up, with said mouse icon reduction.
The present invention also provides a kind of semiconductor equipment control system, comprises upper strata control system and lower floor's control system, and said upper strata control system comprises the device of above-mentioned adjusting process prescription sequence of steps.
Compare with existing method, the present invention has the following advantages:
The present invention is in the technical recipe editor; Through detecting pressing, move and lifting state of mouse, a kind of method of operating of towed is provided, this operation is through pulling the corresponding gauge outfit of technical recipe step to the target location; Very convenient, the adjustment of completing steps order exactly; Simplify editing greatly, reduced workload, and reduced the possibility of maloperation.
Description of drawings
Fig. 1 is editor's synoptic diagram of a certain technical recipe in the existing method;
Fig. 2 is the operational flowchart of the said a kind of adjusting process prescription sequence of steps of the embodiment of the invention;
Fig. 3 is editor's synoptic diagram of a certain technical recipe in the embodiment of the invention;
Fig. 4 is the method flow diagram of the said a kind of adjusting process prescription sequence of steps of the embodiment of the invention;
Fig. 5 is the structure drawing of device of the said a kind of adjusting process prescription sequence of steps of the embodiment of the invention.
Embodiment
For make above-mentioned purpose of the present invention, feature and advantage can be more obviously understandable, below in conjunction with accompanying drawing and embodiment the present invention done further detailed explanation.
In the editor of adjusting process prescription step, the invention provides a kind of convenience, towed method of operating accurately, can simplify editing, and reduce the possibility of maloperation.
Be elaborated through embodiment below.
With reference to Fig. 2, be the operational flowchart of the said a kind of adjusting process prescription sequence of steps of the embodiment of the invention.
Be example still, will step1 be moved to after the step2 at present that be about to the corresponding column data of step1 and move to after the corresponding column data of step2, the concrete operations flow process is following with technical recipe step shown in Figure 1:
Said gauge outfit promptly refers to edit first row of form, and the gauge outfit that step2 is corresponding is that field is the gauge outfit of step2 in first row.
Finally, the order of technical recipe step be adjusted into step2, step1, step3 ....
Preferably, in the process that mouse moves, can also the gauge outfit that step1 is corresponding carry out sectional drawing and as mouse icon, follow mouse and move together, the former icon of reduction mouse after mouse-up.
The synoptic diagram of operating process shown in Figure 2 can be with reference to shown in Figure 3; The former icon of mouse is represented with common arrow; After mouse pointer falls into the corresponding gauge outfit scope of step1 (square frame that occupies like field step1), press left mouse button and promptly represent a column data of choosing step1 corresponding; Mouse moves then, and mouse icon is transformed to the corresponding gauge outfit sectional drawing of step1 in the moving process, after the upper left corner of mouse icon falls into the corresponding gauge outfit scope of step2, representes that promptly mouse moves to the corresponding gauge outfit of step2; Lift left mouse button, the column data that step1 is corresponding is automatically moved to before or after the corresponding column data of step2, and mouse icon is reduced to the arrow form simultaneously.
In the aforesaid operations process, whether choose the corresponding column data of step1 about pressing left mouse button, and whether mouse move to the corresponding gauge outfit of step2, other determination methods can also be arranged, present embodiment is not done qualification at this.
Need to prove that present embodiment also can be pressed right mouse button and accomplish whole operation; And what step1 was corresponding in the present embodiment is column data, if step1 corresponding row data, present embodiment also can be realized the position change of line data through the operation of this towed.
The foregoing introduction be user's operating process, be described in detail in how to realize this operation in the technical recipe edit page below.
The technical recipe edit page uses the DataGrid control to accomplish usually; Towed editor in the embodiment of the invention realizes through heavily loaded DataGrid control; Be OnMouseMove (mouse moves), OnMouseDown (mouse is pressed), three methods of OnMouseUp (mouse up) of heavily loaded DataGrid, the processing behind the heavily loaded DataGrid control is as shown in Figure 4.
With reference to Fig. 4, be the method flow diagram of the said a kind of adjusting process prescription sequence of steps of the embodiment of the invention.
If not, promptly the not corresponding depressed position a certain technical recipe step of mouse then finishes the processing of set-up procedure order.
Wherein, said mousebutton can be that left button also can be a right button, can when heavily loaded DataGrid control, set.
In the present embodiment, judge mouse depressed position whether the concrete grammar of corresponding a certain technical recipe step be: judge whether mouse is in the gauge outfit of a certain technical recipe step depressed position, if represent that then mouse is depressed position to should the technical recipe step; If not, do not represent that then mouse is not depressed position to should the technical recipe step.Wherein, can whether fall into the square frame scope shown in the gauge outfit depressed position, judge whether mouse is in the gauge outfit of a certain technical recipe step depressed position through judging mouse.
If the corresponding depressed position a certain technical recipe step of mouse, the column position that then present embodiment is corresponding depressed position with mouse is recorded as initial position, and said column position is the column position of the gauge outfit place row of this technical recipe step.For example among Fig. 3, initial position is the corresponding gauge outfit position of step1.Certainly, if the data of corresponding technical recipe step to go rather than to tabulate and show, also can be recorded as initial position by the column position that mouse is corresponding depressed position.
In addition, if the corresponding depressed position a certain technical recipe step of mouse, also need continue to detect the mousebutton state is to move or lift.
Step 403 is lifted if detect mousebutton, then judges whether corresponding a certain technical recipe step of mouse-up position, if then writing down the mouse-up position is final position;
If not, promptly the not corresponding a certain technical recipe step in mouse-up position then finishes the processing of set-up procedure order.
Similar with step 402; Judge the mouse-up position whether the concrete grammar of corresponding a certain technical recipe step also can be: judge whether the mouse-up position is in the gauge outfit of a certain technical recipe step; If represent that then the mouse-up position is to should the technical recipe step; If not, do not represent that then the mouse-up position is not to should the technical recipe step.Wherein, also can whether fall into the square frame scope shown in the gauge outfit, judge whether the mouse-up position is in the gauge outfit of a certain technical recipe step through judging the mouse-up position.
If the corresponding a certain technical recipe step in mouse-up position, the column position that then present embodiment is corresponding with the mouse-up position is recorded as final position, and said column position is the column position of the gauge outfit place row of a certain technical recipe step.For example among Fig. 3, final position is the corresponding gauge outfit position of step2.Certainly, if the data of corresponding technical recipe step to go rather than to tabulate and show, also can be recorded as final position by the column position that the mouse-up position is corresponding.
Whether said relatively initial position and final position identical being meant: relatively whether the column position column position corresponding with final position of initial position correspondence is same column position; Judge that promptly mouse presses whether the row that the row chosen and mouse-up choose are same row; If then said initial position is identical with final position; Then said initial position and final position are inequality if not.
If initial position and final position are inequality, represent that this time drag operation is effective, trigger the step moving event, this incident is carried out the column data that initial position is corresponding and is automatically moved to before or after the corresponding column data of final position.Wherein, said " before " expression moves to a step before another step, and said " afterwards " expression moves to a step after another step." before " still " afterwards " can preestablish.
If initial position is identical with final position, represent that this time drag operation is invalid, then can not trigger said step moving event.
Preferably, after step 402, press the back and move if detect mousebutton, can also change mouse icon, the gauge outfit sectional drawing of a certain technical recipe step that initial position is corresponding is also followed mouse as mouse icon and is dragged together; And in step 403, if detect mouse-up, then with said mouse icon reduction.
In sum, the towed method of operating that provides of the embodiment of the invention has following effect:
1, only need mouse to pull gauge outfit, just can accomplish a step adjustment operation, workload is few, is operating under the frequent situation, and advantage is more obvious;
2, operation is directly perceived, needs mobile step gauge outfit to follow mouse as mouse icon and moves, and has greatly reduced the possibility of maloperation;
3, reduce the quantity that ejects dialog box in the existing method, and then reduced programming personnel's workload;
4, reduced interface element such as movable button in the existing method, thereby made edit page more attractive in appearance;
5, realize said drag operation with the control form, only need replace former DataGrid control and get final product, farthest realized code reuse with the DataGrid control of heavy duty.
Based on above content, the present invention also provides corresponding device thereof and system embodiment.
With reference to Fig. 5, be the structure drawing of device of the said a kind of adjusting process prescription sequence of steps of the embodiment of the invention.
The device of said adjusting process prescription sequence of steps comprises that mouse state detecting unit 1, mouse press processing unit 2, mouse-up processing unit 3, step adjustment unit 4, and wherein, mouse state detecting unit 1 is used to detect the mousebutton state; Mouse is pressed processing unit 2 and is connected in said mouse state detecting unit 1; Be used for when mouse state detecting unit 1 detects mousebutton and presses; Judge mouse corresponding a certain technical recipe step whether depressed position; If then write down mouse and be initial position depressed position, and trigger the mouse state detecting unit and continue to detect the mousebutton state; Mouse-up processing unit 3 is connected in said mouse state detecting unit 1; Be used for when mouse state detecting unit 1 detects mousebutton and lifts; Judge whether corresponding a certain technical recipe step of mouse-up position, if then writing down the mouse-up position is final position; Step adjustment unit 4 is connected to said mouse and presses processing unit 2 and said mouse-up processing unit 3; Whether be used for more said initial position identical with final position; If different, then that initial position is corresponding technical recipe step moves to before or after the corresponding technical recipe step of final position.
Wherein, Said mouse is pressed processing unit 2 can comprise that further pressing judgment sub-unit 21 writes down subelement 22 with initial position; Wherein pressing judgment sub-unit 21 is used for when mouse state detecting unit 1 detects mousebutton and presses; Judge whether mouse is in the gauge outfit of a certain technical recipe step depressed position, if represent that then mouse is depressed position to should the technical recipe step; If not, do not represent that then mouse is not depressed position to should the technical recipe step; Initial position record subelement 22 is connected in the said judgment sub-unit of pressing; Be used for when said when pressing judgment sub-unit 21 and judging mouse and be in the gauge outfit of a certain technical recipe step depressed position; The column position that the record mouse is corresponding depressed position is an initial position, and said column position is the column position of the gauge outfit place row of this technical recipe step.
Accordingly; Said mouse-up processing unit 3 can comprise also that further lifting judgment sub-unit 31 writes down subelement 32 with final position; Wherein lifting judgment sub-unit 31 is used for when mouse state detecting unit 1 detects mousebutton and lifts; Judge whether the mouse-up position is in the gauge outfit of a certain technical recipe step, if represent that then the mouse-up position is to should the technical recipe step; If not, do not represent that then the mouse-up position is not to should the technical recipe step; Final position record subelement 32 is connected in the said judgment sub-unit 31 of lifting; Be used for when said when lifting judgment sub-unit 31 and judging the mouse-up position and be in the gauge outfit of a certain technical recipe step; The corresponding column position in record mouse-up position is a final position, and said column position is the column position of the gauge outfit place row of this technical recipe step.
Said step adjustment unit 4 also can comprise position relatively subelement 41 and step mover unit 42; Wherein comparison subelement 41 in position is connected to said initial position record subelement 22 and final position record subelement 32; Be used for whether the corresponding column position column position corresponding with final position of comparison initial position is same column position; If then said initial position is identical with final position; Then said initial position and final position are inequality if not; Step mover unit 42 is connected in relatively subelement 41 of said position; Be used for when said position relatively subelement 41 compare said initial position and final position not simultaneously, the technical recipe step that initial position is corresponding moves to before or after the technical recipe step of final position correspondence.
Preferably; In order to reduce the possibility of maloperation; The device of said adjusting process prescription sequence of steps can also comprise: mouse icon converter unit 5; Be used for pressing the back when moving when mouse state detecting unit 1 detects mousebutton, the gauge outfit sectional drawing of a certain technical recipe step that initial position is corresponding, and as mouse icon; When mouse state detecting unit 1 detects mouse-up, with said mouse icon reduction.
Need to prove that said mousebutton can also can be right mouse button for left mouse button, and present embodiment also can be realized the position change of line data through said apparatus.
In sum, editing has been simplified in the adjustment of completing steps order easily and accurately of the device of said adjusting process prescription sequence of steps greatly, has reduced workload, and has reduced the possibility of maloperation.
Based on the device embodiment of above-mentioned adjusting process prescription sequence of steps, the present invention also provides a kind of embodiment of semiconductor equipment control system.Said apparatus control system comprises upper strata control system and lower floor's control system; Wherein lower floor's control system is directly mutual with equipment; The upper strata control system is mutual with lower floor's control system, is responsible for automatic generation, data acquisition, warning processing, plant maintenance operation, the technical recipe edition function of equipment.Said upper strata control system comprises the device of above-mentioned adjusting process prescription sequence of steps, can simplify technologist's technical recipe editing, and reduces the possibility of technologist's maloperation.
Each embodiment in this instructions all adopts the mode of going forward one by one to describe, and what each embodiment stressed all is and the difference of other embodiment that identical similar part is mutually referring to getting final product between each embodiment.For system embodiment, because it is similar basically with method embodiment, so description is fairly simple, relevant part gets final product referring to the part explanation of method embodiment.
More than to method, the Apparatus and system of a kind of adjusting process prescription sequence of steps provided by the present invention; Carried out detailed introduction; Used concrete example among this paper principle of the present invention and embodiment are set forth, the explanation of above embodiment just is used for helping to understand method of the present invention and core concept thereof; Simultaneously, for one of ordinary skill in the art, according to thought of the present invention, the part that on embodiment and range of application, all can change, in sum, this description should not be construed as limitation of the present invention.
Claims (13)
1. the method for an adjusting process prescription sequence of steps is characterized in that, comprising:
Detect the mousebutton state;
Press if detect mousebutton, then judge mouse corresponding a certain technical recipe step whether depressed position, if then write down mouse and be initial position depressed position, and continue to detect the mousebutton state;
Lift if detect mousebutton, then judge whether corresponding a certain technical recipe step of mouse-up position, if then writing down the mouse-up position is final position;
Whether more said initial position is identical with final position, if different, then that initial position is corresponding technical recipe step moves to before or after the corresponding technical recipe step of final position.
2. method according to claim 1 is characterized in that, judges that mouse presses or lift whether corresponding a certain technical recipe step of position, comprising:
Judge that mouse presses or lift the gauge outfit whether position is in a certain technical recipe step, if represent that then mouse presses or lift the position to should the technical recipe step; If not, do not represent that then mouse presses or lift the position not to should the technical recipe step.
3. method according to claim 1 and 2 is characterized in that, said record mouse is an initial position depressed position, comprising:
The column position that the record mouse is corresponding depressed position is an initial position, and said column position is the column position of the gauge outfit place row of a certain technical recipe step.
4. method according to claim 3 is characterized in that, said record mouse-up position is a final position, comprising:
The corresponding column position in record mouse-up position is a final position.
5. method according to claim 4 is characterized in that, whether said initial position is identical with final position, comprising:
Whether the column position column position corresponding with final position that relatively initial position is corresponding is same column position, if then said initial position is identical with final position; Then said initial position and final position are inequality if not.
6. method according to claim 2 is characterized in that, also comprises:
Press the back and move if detect mousebutton, the gauge outfit sectional drawing of then that initial position is corresponding a certain technical recipe step, and with this sectional drawing as mouse icon;
If detect mouse-up, then with said mouse icon reduction.
7. method according to claim 1 is characterized in that:
Said mousebutton is the left button or the right button of mouse.
8. the device of an adjusting process prescription sequence of steps is characterized in that, comprising:
The mouse state detecting unit is used to detect the mousebutton state;
Mouse is pressed processing unit; Be connected in said mouse state detecting unit; Be used for when the mouse state detection when mousebutton is pressed, judge mouse corresponding a certain technical recipe step whether depressed position, if; Then write down mouse and be initial position depressed position, and trigger the mouse state detecting unit and continue to detect the mousebutton state;
The mouse-up processing unit; Be connected in said mouse state detecting unit, be used for when the mouse state detection when mousebutton lifts, judge whether corresponding a certain technical recipe step of mouse-up position; If then writing down the mouse-up position is final position;
The step adjustment unit; Be connected to said mouse and press processing unit and said mouse-up processing unit; Whether be used for more said initial position identical with final position; If different, then that initial position is corresponding technical recipe step moves to before or after the corresponding technical recipe step of final position.
9. device according to claim 8 is characterized in that, said mouse is pressed processing unit and comprised:
Press judgment sub-unit, be used for when the mouse state detection when mousebutton is pressed, judge whether mouse is in the gauge outfit of a certain technical recipe step depressed position, if represent that then mouse is depressed position to should the technical recipe step; If not, do not represent that then mouse is not depressed position to should the technical recipe step;
Initial position record subelement; Be connected in the said judgment sub-unit of pressing; Be used for when said when pressing judgment sub-unit and judging mouse and be in the gauge outfit of a certain technical recipe step depressed position; The column position that the record mouse is corresponding depressed position is an initial position, and said column position is the column position of the gauge outfit place row of this technical recipe step.
10. device according to claim 9 is characterized in that, said mouse-up processing unit comprises:
Lift judgment sub-unit, be used for when the mouse state detection when mousebutton lifts, judge whether the mouse-up position is in the gauge outfit of a certain technical recipe step, if represent that then the mouse-up position is to should the technical recipe step; If not, do not represent that then the mouse-up position is not to should the technical recipe step;
Final position record subelement is connected in the said judgment sub-unit of lifting, and is used for when said when lifting judgment sub-unit and judging the mouse-up position and be in the gauge outfit of a certain technical recipe step, and the corresponding column position in record mouse-up position is a final position.
11. device according to claim 10 is characterized in that, said step adjustment unit comprises:
The position is subelement relatively; Be connected to said initial position record subelement and final position record subelement; Be used for whether the corresponding column position column position corresponding with final position of comparison initial position is same column position, if then said initial position is identical with final position; Then said initial position and final position are inequality if not;
Step mover unit; Be connected in relatively subelement of said position; Be used for when said position relatively subelement compare said initial position and final position not simultaneously, the technical recipe step that initial position is corresponding moves to before or after the technical recipe step of final position correspondence.
12. device according to claim 8 is characterized in that, also comprises:
The mouse icon converter unit is used for pressing the back when moving when the mouse state detection to mousebutton, the gauge outfit sectional drawing of a certain technical recipe step that initial position is corresponding, and with this sectional drawing as mouse icon; When mouse state detection during to mouse-up, with said mouse icon reduction.
13. a semiconductor equipment control system comprises upper strata control system and lower floor's control system, it is characterized in that: said upper strata control system comprises the device of the described adjusting process prescription of the arbitrary claim of claim 8 to 12 sequence of steps.
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