CN102539925A - High-accuracy dynamic testing method for sensor - Google Patents
High-accuracy dynamic testing method for sensor Download PDFInfo
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- CN102539925A CN102539925A CN2010106146812A CN201010614681A CN102539925A CN 102539925 A CN102539925 A CN 102539925A CN 2010106146812 A CN2010106146812 A CN 2010106146812A CN 201010614681 A CN201010614681 A CN 201010614681A CN 102539925 A CN102539925 A CN 102539925A
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Abstract
The invention discloses a high-accuracy dynamic testing method for a sensor. A voltage source is controlled and tested by a numerical value processor, so a dynamic adjustable high-accuracy voltage source is implemented, and test voltage applied to a sensor to be tested is determined; an appropriate measurement gear is dynamically selected by a dynamic adjustable precise standard resistor in a measurement process, and a precise high-resistance standard resistor is obtained by an attenuation feedback network; and the problem of zero drift is solved by a polarity processing module, so large-scale dynamic high-precision measurement of the sensor can be realized.
Description
Technical field
The present invention relates to the high-acruracy survey of the field of measurement, particularly sensor such as test sign of sensor.
Background technology
Modern nanometer technology expedites the emergence of out the various high-performance sensors of employing nano material development, like alcohol, CO, H
2Various gas sensors such as S, Temperature Humidity Sensor or the like; These sensors are just replacing the sensor of traditional handicraft preparation with high sensitivity (up to 10000), the response speed unrivaled superior characteristics such as (less than 1s) that are exceedingly fast; Especially developing rapidly of modern technology of Internet of things; These Internet of Things front end novel sensor spares are received much concern, and demand heightens, and scientific research institutions at different levels develop, improve various kinds of sensors one after another; Yet they but are to use traditional sensor measurement instrument to measure, analyze, and these instruments can not adapt to the characteristics of modern nano-sensor.
Traditional sensor measurement principle is to take the electric resistance partial pressure measuring principle, and promptly the sensor dividing potential drop of connecting with reference resistance is come the dead reckoning sensor resistance value through measuring partial pressure value.For example; Regular higher educational institutions's electrical category planning teaching material " detecting and switch technology " third edition China Machine Press (book number ISBN 7-111-03106-7); Chapter 8, the second solar term dependent sensor the 5th trifle basic test circuit (217 pages); Its measuring principle figure is as shown in Figure 3 to be exactly this partial pressure type measuring principle, can be through the resistance R s=UcR of formula calculating sensor QM-N5 from figure
L/ U
RL-R
L(R in the formula
LBe reference resistance, Uc is the test voltage source, U
RLBe sampling voltage).And for example; Gansu science journal " the detection technique research of semiconductor gas sensor and array thereof " (2009), instrumental technique and sensor " based on the high resistant gas sensor test circuit of ARM " papers such as (2006); " the HW-C30A gas sensor test appearance " that Han Wei electronics corporation of Henan listed company produces also all takes this partial pressure type principle to measure.The measurement of this mode causes five big problems of industry, and causes the maximum error of measurement result:
The one, the measurement result precision is low, and the result of dividing potential drop directly causes the precision of A/D conversion to reduce, and measuring error is up to more than 90%.Moment sensor sensitivity has reached tens times even more than hundreds of times, and the variation of the resistance of sensor in test process is up to 10 more than the magnitude.As measuring error is 1% before reacting, if the then reacted measuring error of reaction sensitivity 100 just up to 1%*100=100%, so measuring accuracy is very low, institute's test result has reflected not the assertive evidence characteristic of sensor.
The 2nd, the resistance value scope of nano-sensor is extremely wide; Greatly to more than the begohm; Measure the accurate reference resistance that to select gigabit with this dividing potential drop mode; And the scope of conventional precision resistance is limited to below 2 megaohms, and very expensive material and special process making can not make or will be adopted to the precision resistance of this big resistance in fact, so can't realize measuring;
The 3rd, the uncertainty of sensor measurement voltage, when that is to say as if use 5V voltage measurement, the actual voltage that is added on the sensor is a Dynamic Uncertain value, utilizes this apparatus measures result will directly mislead sensor test result's significant errors;
The 4th, sensor measurement voltage can not arbitrarily be provided with, promptly can not be too small or greater than the reference voltage of A/D converter, otherwise will cause distortion or coarse value of component voltage by a small margin, directly cause the measurement result accuracy low;
The 5th, it is exactly the ratio of the partial pressure value of this measurement before and after sensor response that whole industry is all misled to the Sensitirity va1ue of measuring; In fact they have very big difference, can know through simple computation, if reaction sensitivity is m; Under the optimum matching situation, the voltage ratio V before and after its reaction
RL2/ V
RL1=(m+1)/2, and only when m=1, voltage ratio V
RL2/ V
RL1If=1=m is at m=100 voltage ratio V then
RL2/ V
RL1=50.5, the visible error that embodies sensitivity with voltage ratio is beat all big, and this has directly misled the research of sensor.
Summary of the invention
In view of above-mentioned, sensor Dynamic High-accuracy method of testing of the present invention can accurately calculate indexs such as resistance and the sensitivity of sensor.
Sensor Dynamic High-accuracy method of testing of the present invention is achieved in that to comprise
Dynamic controlled test voltage source: realize the high-accuracy voltage source of dynamic adjustable, make the added test voltage of sensor to be measured confirm;
The measuring resistance of dynamic adjustable: the standard precision resistance through dynamic adjustable is implemented in the measurement gear that Dynamic Selection is suitable in the measuring process, to reach high-acruracy survey;
Also comprise
Polarity processing module:, solve the zero point drift problem of metering circuit through measuring and deduct the value at zero point of positive-negative polarity.
Attenuation type feedback network:, be difficult to obtain a big resistance standard precision resistance difficult problem with solution to obtain big resistance standard precision resistance.
From the above mentioned; A kind of sensor Dynamic High-accuracy method of testing of the present invention; Thoroughly overcome in the existing measuring technique dynamic measurement precision low, not energy measurement high value nano-sensor, be added in the uncertain and problems such as misleading of industry aspect transducer sensitivity in test voltage source on the sensor, have following a series of fairly obvious advantage:
The present invention is through said metering circuit, and especially its feedback network thoroughly solves high value standard precision resistance problem, can measure the above nano-sensor resistance value of begohm, and the measurement result that obtains is exactly the true resistance value and the Sensitirity va1ue of sensor; Through be provided with and the circuit of the different feedback networks (gear) that automatically switch and method solution sensor response process in measuring accuracy problem during resistance dynamic change on a large scale; Mode and test voltage control method through sensor being inserted reverse operational amplifier input end solve test voltage source uncertain problem that is added on the sensor and the problem that can not arbitrarily be provided with, and this magnitude of voltage can be set in any wide region that the user needs; Through the zero point and the dynamic deviation problem thereof of polarity processing module and polarity disposal route solution circuit, thus the accuracy of measurement of increasing substantially.
The present invention has provided a kind of feasible novel circuit mode and new measuring method that traditional sensors is measured that be different from fully; Can be well suited for the characteristics of modern novel nano sensor and the characteristics of all kinds of other sensors; All measure and operate and to control automatically by computer or monolithic computer; Solve comprehensively traditional sensors measure in narrow, the measuring accuracy difference problem of measurement range, big resistance precision resistance be difficult to difficult problems such as production; Evaded in the traditional measurement method such as measuring voltage is uncertain, dynamic accuracy is poor, intrinsic standoff ratio is regarded as by error the ubiquitous problem of industry such as sensitivity, thereby the research of guiding sensor develops towards correct direction.
Description of drawings
Fig. 1 is the basic circuit schematic diagram of a kind of sensor Dynamic High-accuracy method of testing of the present invention.
Fig. 2 is a kind of sensor Dynamic High-accuracy method of testing software flow pattern of the present invention.
Fig. 3 is the partial pressure type measuring principle circuit diagram of traditional sensors.
Embodiment
Fig. 1 is the application mode of a kind of basic circuit schematic diagram of a kind of sensor Dynamic High-accuracy method of testing of the present invention.Comprise in these circuit theory diagrams by power module M01, Keysheet module M02, display module M03 and forming, also comprise
(1) test voltage source M6, as the applied signal voltage of testing sensor resistance, the delivery outlet line that directly or indirectly is connected to numerical data processor M5 also can change magnitude of voltage through single-chip microcomputer to carry out Control of Voltage; It is made up of mouth line (fixed voltage) and the driving circuit of said numerical data processor M5, or D/A converter and driving circuit composition, or demodulation of PWM pulsewidth and driving circuit composition;
(2) operational amplifier U1 as measuring amplifier, forms amplifier with following sensor resistance Rs to be measured and feedback network, contains the measuring voltage VAD1 of the resistance information of sensor resistance Rs in order to generation;
(3) sensor resistance Rs to be measured: be connected between said test voltage source M6 and this operational amplifier U1 negative input end; Characteristics through the above feedback amplifier of being made up of operational amplifier U1 can know that the test voltage of test voltage source M6 is added on the sensor resistance Rs to be measured fully, so just make sensor resistance Rs to be measured go up added test voltage and confirm;
(4) be connected feedback network between the positive and negative input end of this operational amplifier U1; This feedback network is composed in parallel by at least 2 feedback units, and one of them feedback unit M1 is composed in series by electric-controlled switch SW1 and attenuation type feedback network M8, and its typical structure is to comprise resistance R 11 of connecting with said electric-controlled switch and the resistance R 12 of connecting with this resistance R 11; And also comprise another resistance R 13; One of which end ground connection, its other end are connected on the tandem node of this resistance R 11 and R12, through calculating; The equivalent feedback resistance Rf=R11+R12+R11*R12/R13 of such attenuation type feedback network; This formula shows, the R13 of the little resistance through precision and R12, the R13 of big resistance can obtain accurate very big resistance equivalence feedback resistance Rf, are beneficial to the sensor of precision measurement high value; Another feedback unit M2 then is composed in series with containing the feedback network that a resistance R 2 forms at least by electric-controlled switch SW2, that is to say that this feedback network both possibly be a resistance R 2, also maybe be identical with above-mentioned attenuation type feedback network structure; The mouth line that said each electric-controlled switch is directly connected to (control end that promptly is directly connected to electric-controlled switch) or is connected to (control end that promptly is connected to electric-controlled switch through driving circuit) numerical data processor M5 indirectly is to realize gear control; Said attenuation type feedback network M8 is meant the network that the feedback signal with said operational amplifier U1 decays;
(5) polarity processing module M3, its input end are connected this operational amplifier U1 output terminal, and it is that a phase inverter or an absolute value circuit add a polarity detection circuit, to accomplish polar switching and the polarity identification to the signal voltage that measures;
(6) analog input end is connected the A/D converter M4 of this operational amplifier U1 output terminal and polarity processing module M3 output terminal, is used for converting the output signal voltage behind this polarity processing module M3 as a result into digital quantity;
(7) be connected the numerical data processor M5 of this A/D converter M4 data output interface; This numerical data processor can be that numerical data processor (M5) is a single-chip microcomputer; Perhaps microprocessor system, perhaps computer system is perhaps by single-chip microcomputer and computer system; And for the single-chip microcomputer scheme, said A/D converter is integrated in this single-chip microcomputer usually; Numerical data processor M5 produces signals to above-mentioned various controls, and with the resistance value Rs of the calculation of parameter sensor of the digital quantity changed and test voltage source M6 and metering circuit.According to these ratio (being sensitivity) of the measurement data of symbol and resistance value that the test voltage data can calculate sensor to be measured and the resistance value of reacting front and back is arranged;
Said power module M01 is used to this metering circuit provides power supply, and said display module M03 is used to show measurement result, and said Keysheet module M02 is used for input measurement parameter and control survey.
A kind of sensor Dynamic High-accuracy method of testing of the present invention on the basis of above basic circuit schematic diagram, is achieved in that
This method realizes that by software Fig. 2 is the process flow diagram of a kind of sensor Dynamic High-accuracy method of testing software of the present invention, is achieved in that
(1) measures initializers: will carry out initialization with necessary parameter and variable in the software of lower part;
(2) test voltage Control Software: control is added in the test voltage VT on the sensor resistance;
(3) A/D switching software: through said test voltage Control Software input test voltage (VT) back the metering circuit output voltage of the resistance information that contains sensor is carried out the A/D conversion, to obtain to contain the digital quantity of said resistance information;
(4) polarity process software:, obtain signed number word amount in order to judge the symbol of the digital quantity that said A/D switching software is obtained; Said polarity process software be that pass-through mode one or mode two are carried out, wherein
Mode one is through said A/D switching software the digital quantity that two output voltage obtained of metering circuit anti-phase each other to be analyzed; Said A/D converter is always 0 or be approximately zero to the digital quantity of negative voltage signal collection; The digital quantity that gather on another road then always is equal to or higher than the digital quantity on this road, so just can obtain effective digital quantity and symbol;
Mode two is through said A/D switching software the absolute value of metering circuit institute output voltage to be gathered, and judges symbol through polarity detection circuit;
(5) gear auto-control software: whether judge whether and to measure gear to more rational direction adjustment above upper and lower bound through analyzing said signed number word amount; Its implementation is that preset gear is behind said test voltage Control Software input test signal (VT); The signed number word amount that obtains according to following methods analyst; When promptly this value fell between preset upper limit and the predetermined lower limit, gear was suitable, kept current gear; Otherwise, switch the gear of gear to a high feedback resistance value in limited time being lower than this time, be higher than the gear that switches gear to a low feedback resistance value on this in limited time; When gear change, carry out one-shot measurement and judgment processing as stated above again according to newly establishing gear, suitable up to gear;
(6) zero point automatic calibration software: when making input test voltage (VT) be zero through the test voltage Control Software; The signed number word amount that obtains through said A/D switching software is as zero point; The signed number word amount that when adding input test signal voltage (VT), obtains is removed this zero point, to obtain school zero data;
(7) sensor resistance software for calculation: calculate according to following method; Be that sensor resistance equals constant and multiply by said test signal voltage (VT) and multiply by equivalent feedback resistance value corresponding to suitable gear again divided by said school zero data, the intrinsic parameter characteristic of this constant reflected measurement circuit.
Claims (4)
1. a sensor Dynamic High-accuracy method of testing comprises
Dynamic controlled test voltage source: realize the high-accuracy voltage source of dynamic adjustable, make the added test voltage of sensor to be measured confirm;
The measuring resistance of dynamic adjustable: the standard precision resistance through dynamic adjustable is implemented in the measurement gear that Dynamic Selection is suitable in the measuring process, to reach high-acruracy survey.
2. a kind of sensor Dynamic High-accuracy method of testing according to claim 1 is characterized in that: also comprise
Polarity processing module:, solve the zero point drift problem of metering circuit through measuring and deduct the value at zero point of positive-negative polarity.
3. a kind of sensor Dynamic High-accuracy method of testing according to claim 1 is characterized in that: also comprise
Attenuation type feedback network:, be difficult to obtain a big resistance standard precision resistance difficult problem with solution to obtain big resistance standard precision resistance.
4. according to claim 2 or 3 described a kind of sensor Dynamic High-accuracy method of testings, it is characterized in that: also comprise the characteristic that claim 3 or 2 is limited.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105937920A (en) * | 2016-04-14 | 2016-09-14 | 河南汉威电子股份有限公司 | Sensor display correction method for drifting due to long-term cold placing |
| CN106645310A (en) * | 2017-02-05 | 2017-05-10 | 复旦大学 | Dynamic detection system for semiconductor gas sensor |
| CN106989847A (en) * | 2017-03-22 | 2017-07-28 | 中国计量大学 | Error correcting method in system of Pt-resistance |
| CN114964346A (en) * | 2022-04-11 | 2022-08-30 | 合肥通用机械研究院有限公司 | Sensor testing method |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105937920A (en) * | 2016-04-14 | 2016-09-14 | 河南汉威电子股份有限公司 | Sensor display correction method for drifting due to long-term cold placing |
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| CN106989847B (en) * | 2017-03-22 | 2019-09-06 | 中国计量大学 | Error correcting method in system of Pt-resistance |
| CN114964346A (en) * | 2022-04-11 | 2022-08-30 | 合肥通用机械研究院有限公司 | Sensor testing method |
| CN114964346B (en) * | 2022-04-11 | 2023-08-01 | 合肥通用机械研究院有限公司 | Sensor testing method |
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Application publication date: 20120704 |