CN102537748A - Elongated light source for orientation table - Google Patents
Elongated light source for orientation table Download PDFInfo
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- CN102537748A CN102537748A CN2010106219160A CN201010621916A CN102537748A CN 102537748 A CN102537748 A CN 102537748A CN 2010106219160 A CN2010106219160 A CN 2010106219160A CN 201010621916 A CN201010621916 A CN 201010621916A CN 102537748 A CN102537748 A CN 102537748A
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- light
- light source
- outer cover
- light emitting
- emitting diode
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Abstract
The invention discloses an elongated light source for an orientation table, which relates to ion implanters and belongs to the field of semiconductor manufacture. The elongated light source comprises an outer cover (1), a light outlet slit (2), a group of light emitting diodes (3), a light detection device (5) and power sources (4) and (6). The light emitting diodes (3) are arranged on two sides of the outer cover (1), divided into two groups and placed in parallel, and the number of the light emitting diodes ranges from a few to dozens. The light outlet slit (2) is positioned on one surface of the outer cover (1); the light detection device (5) is positioned on another lateral surface of the outer cover (1); and the power sources (4) and (6) are positioned on lateral surfaces of the light emitting diodes (3). By the aid of the elongated light source, stable and reliable parallel light can be provided for the chip orientation table for single chip ion implantation, and premise guarantee for rapid and accurate chip orientation is provided.
Description
Technical field
The present invention is a kind of strip light source that is used for orientation device, and particularly semiconductor is made used ion implantation apparatus in the ion implantation technology, belongs to field of manufacturing semiconductor devices.
Background technology
Now the semiconductor integrated circuit manufacturing process has developed into 12 inches wafers, nm technology node period, and along with the wafer size is increasing, the unit component size is more and more littler, and is also just increasingly high to the performance requirement of semiconductor manufacturing equipment.Ion implantation apparatus is a requisite key equipment in the semiconductor device manufacturing process.
In order to improve the performance of ion implantation apparatus, make its development of satisfying the requirement of modern big wafer, nano-device production technology and adapting to the semiconductor process techniques in future, must improve the precision of each parts of ion implantation apparatus.Wherein, the chip oriented system of implanter guarantee implant angle accurately on particularly important.
The present invention is a kind of strip light source that is used for orientation device, and this strip light source provides one group of directional light as a kind of light source of orientation device, is to be convenient to orientation device to realize the orientation to wafer.
Summary of the invention
The present invention is directed to the functional characteristics of existing ion implantation doping equipment,, propose a kind of strip light source that is used for orientation device in order to realize directed high accuracy, orientation device structural system fast.Orientation device system based on this strip light source has high, directed rapid, the advantages of simple structure and simple of directed precision.
The present invention realizes through following technical scheme:
A kind of strip light source that is used for orientation device is made up of an outer cover (1), a light exit slit (2), one group of light emitting diode (3), an optical detection device (5) and power supply (4), (6).
Described outer cover (1) is used for fixing light emitting diode, but the outer reverberation of its inner surface of while; Its outer surface plating one deck coating makes that light can not be from the coated areas transmission.
Described light exit slit (2) is on the face that places outer cover (1), and plated film is not transparent, and light can see through from slit.
Described light emitting diode (3) places the both sides of outer cover (1), is divided into two groups, place relatively, and the parallel placement of every group diode, quantity is not waited to tens by several, is used for the luminescent system of strip light source.
Described optical detection device (5) is in the side of outer cover (1), is used to detect strip light source interior lights, reflects situation of change at any time.
Described power supply (4), (6) are in the outside of light emitting diode (3), and mainly being provides power supply for the strip light source.
The present invention has following remarkable advantage:
1. the strip light source is inner adopts a plurality of light emitting diodes to be arranged side by side, simple and practical.
2. the strip light source can be launched one group of uniform square light.
3. the strip light source is equipped with a checkout gear, can detect the variation of light in real time, helps the adjusting to this light source.
Description of drawings
Fig. 1 is a kind of structural representation that is used for the strip light source of orientation device of the present invention.
Fig. 2 is a kind of profile that is used for the strip light source of orientation device of the present invention.
The specific embodiment
Below in conjunction with accompanying drawing and specific embodiment the present invention is done further introduction, but not as the qualification novel to the present invention.
With reference to figure 1, a kind of strip light source that is used for orientation device is made up of an outer cover (1), a light exit slit (2), one group of light emitting diode (3), an optical detection device (5) and power supply (4), (6).Power supply (4), (6) are in the outside of light emitting diode (3), give each light emitting diode (3) power supply; Light emitting diode (3) places the both sides of outer cover (1); Be divided into two groups, place the parallel placement of every group diode relatively; Quantity is not waited to tens by several; Each light emitting diode (3) all can outwards can be launched light, and this light locates to form one group of uniform square light through the repeatedly diffuse reflection of inner surface of outer cover (1) at light exit slit (2); Optical detection device (5) is in the side of outer cover (1), is used to detect strip light source interior lights, can react the situation of change of bright dipping.
With reference to figure 2, light emitting diode (3) is outwards launched light (7), and the inner surface of emission light (7) process outer cover (1) repeatedly diffuse reflection forms reverberation (8), and final reverberation (8) locates to form one group of uniform square light (9) at light exit slit (2).
Specific embodiment of the present invention elaborates content of the present invention.As far as persons skilled in the art, any conspicuous change of under the prerequisite that does not deviate from spirit of the present invention, it being done all constitutes the infringement to patent of the present invention, with corresponding legal responsibilities.
Claims (3)
1. a strip light source that is used for orientation device is characterized in that: an outer cover (1), a light exit slit (2), one group of light emitting diode (3), an optical detection device (5) and power supply (4), (6).Described one group of light emitting diode (3) places the both sides of outer cover (1), divides two groups, parallel placement, and quantity is not waited to tens by several; Described light exit slit (2) is on the face of outer cover (1); Described optical detection device (5) is in another side of outer cover (1); Described power supply (4), (6) are in the side of light emitting diode (3).
2. a kind of strip light source that is used for orientation device shown in claim 1, it is characterized in that: light emitting diode (3) sends light, repeatedly reflects through outer cover (1) inner surface, locates to launch one group of uniform square light at light exit slit (2).
3. a kind of strip light source that is used for orientation device shown in claim 1 is characterized in that: optical detection device (5) but the detection light source interior lights, real time reaction goes out the situation of change of interior lights.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010106219160A CN102537748A (en) | 2010-12-27 | 2010-12-27 | Elongated light source for orientation table |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010106219160A CN102537748A (en) | 2010-12-27 | 2010-12-27 | Elongated light source for orientation table |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102537748A true CN102537748A (en) | 2012-07-04 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010106219160A Pending CN102537748A (en) | 2010-12-27 | 2010-12-27 | Elongated light source for orientation table |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102537748A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110767787A (en) * | 2018-07-26 | 2020-02-07 | 博尔博公司 | Light emitting device with optical power readout |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201487710U (en) * | 2009-03-19 | 2010-05-26 | 深圳华映显示科技有限公司 | Backlight module and liquid crystal display device |
| KR20100086834A (en) * | 2009-01-23 | 2010-08-02 | 엘지전자 주식회사 | Air conditioner |
| CN201589081U (en) * | 2009-07-24 | 2010-09-22 | 敦南科技股份有限公司 | Light source generating structure for improving luminous efficiency and enhancing light source directivity |
-
2010
- 2010-12-27 CN CN2010106219160A patent/CN102537748A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20100086834A (en) * | 2009-01-23 | 2010-08-02 | 엘지전자 주식회사 | Air conditioner |
| CN201487710U (en) * | 2009-03-19 | 2010-05-26 | 深圳华映显示科技有限公司 | Backlight module and liquid crystal display device |
| CN201589081U (en) * | 2009-07-24 | 2010-09-22 | 敦南科技股份有限公司 | Light source generating structure for improving luminous efficiency and enhancing light source directivity |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110767787A (en) * | 2018-07-26 | 2020-02-07 | 博尔博公司 | Light emitting device with optical power readout |
| CN110767787B (en) * | 2018-07-26 | 2022-12-02 | 博尔博公司 | Light emitting device with optical power readout |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| DD01 | Delivery of document by public notice |
Addressee: Zhongkexin Electronic Equipment Co., Ltd., Beijing Document name: Notification that Application Deemed to be Withdrawn |
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| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20120704 |