CN102530556A - Substrate conveying device, method and system - Google Patents
Substrate conveying device, method and system Download PDFInfo
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- CN102530556A CN102530556A CN2010105975847A CN201010597584A CN102530556A CN 102530556 A CN102530556 A CN 102530556A CN 2010105975847 A CN2010105975847 A CN 2010105975847A CN 201010597584 A CN201010597584 A CN 201010597584A CN 102530556 A CN102530556 A CN 102530556A
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- supporting construction
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- transmission device
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- 238000000034 method Methods 0.000 title claims abstract description 38
- 238000010276 construction Methods 0.000 claims description 138
- 230000005540 biological transmission Effects 0.000 claims description 96
- 230000005484 gravity Effects 0.000 claims description 7
- 238000009826 distribution Methods 0.000 claims description 2
- 230000000694 effects Effects 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 239000010409 thin film Substances 0.000 description 6
- 230000000153 supplemental effect Effects 0.000 description 5
- 230000003319 supportive effect Effects 0.000 description 5
- 238000002360 preparation method Methods 0.000 description 4
- 230000007547 defect Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 244000062793 Sorghum vulgare Species 0.000 description 1
- 241000826860 Trapezium Species 0.000 description 1
- 239000005030 aluminium foil Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 235000019713 millet Nutrition 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
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Abstract
The invention discloses a substrate conveying device, a substrate conveying method and a substrate conveying system for carrying large-area substrate. The substrate conveying device is arranged in a vacuum conveying chamber and comprises a turntable, a sliding rail, a carrying mechanical arm and a supporting structure, wherein the turntable is arranged below the sliding rail and is used for rotating the sliding rail; the carrying mechanical arm is positioned on the sliding rail; and the supporting structure is positioned between the sliding rail and the bottom face of the vacuum conveying chamber to prevent the sliding rail from deforming under pressure. When the carrying mechanical arm in the substrate conveying device rotates to one end of the sliding rail, the added supporting structure supports the carrying mechanical arm to prevent the carrying mechanical arm from deforming under pressure at the end of the sliding rail, thereby increasing safety of substrate conveying; and the supporting structure does not conduct the supporting function all the time, so the rotation resistance of the substrate conveying device is reduced.
Description
Technical field
The present invention relates to a kind of mechanical handing device, in particular a kind of base plate transmission device, board transport method and substrate transport system.
Background technology
In semiconductor fabrication; Need in vacuum environment, realize wafer transmission, be that 2912932 Chinese patent has proposed a kind of substrate transmit machine arm device such as patent publication No., specifically referring to shown in Figure 1; Comprise: mechanical arm 5, line slideway 6, driving disk 7, manipulator support 8, rotary disk 9, tension wheel 10 and steel band (not shown in figure 1); Wherein: mechanical arm 5 is installed on the rotary disk 9, and rotary disk 9 is positioned on the manipulator support 8, and manipulator support is installed line slideway 68 times; Steel band is wound on rotary disk 9, tension wheel 10, the driving disk 7, and this device is got sheet and delivered to orientation device 4 through vacuum lock 3 from wafer case 2, and orientation device 4 is accomplished chip oriented, again wafer is delivered to wafer station 1.When to after the finishing dealing with of wafer, by this device wafer is delivered to wafer case 2 again.But device shown in Figure 1 is complex structure not only; The chip area that is transmitted is smaller; And when mechanical arm 5 when an end of line slideway 6 slides to the other end, line slideway 6 because of receiving unbalanced distortion of weight, has increased the insecurity in the board transport process easily.
In the preparation field of thin-film solar cells, substrate also need be transported to treatment chamber from the substrate loading stage with Handling device, after the processing of treatment chamber completion substrate, also need substrate be transported to the substrate unloading platform from treatment chamber.Fig. 2 shows the substrate transport system that existing a kind of thin-film solar cells is made; Comprise: substrate loading stage 11, substrate unloading platform 12, treatment chamber 13, vacuum transmission chamber 14 and base plate transmission device; Wherein: base plate transmission device is arranged in the said vacuum transmission chamber 14; Be used for substrate is transported to treatment chamber 13 from substrate loading stage 11, the substrate after will handling again is transported to substrate unloading platform 12 from treatment chamber 13.Said base plate transmission device comprises at least: turntable 15, slide rail 16 and conveying robot 17; Wherein: said slide rail 16 is positioned on the said turntable 15; Said conveying robot 17 is positioned on the said slide rail 16; Said conveying robot 17 slides to carry out said carrying action along slide rail 16, and said turntable 15 is used to rotate said conveying robot 17 to cooperate said carrying action.
Along with the development of technology, the substrate area in the preparation thin-film solar cells becomes increasing, more than 1 sq m, therefore causes the great big increase that receives of slide rail 16 at least.This moment is when sliding the end to slide rail 16 when conveying robot 17; Slide rail 16 is easily because of receiving heavy unbalanced the distortion; Cause the transmission location of substrate to produce error, because mostly substrate is glass substrate, transmission location has error slightly again; Just might cause the impact failure of substrate etc., therefore increase the insecurity in the board transport process.
Summary of the invention
The purpose of this invention is to provide a kind of base plate transmission device, board transport method and substrate transport system, solve in the prior art slide rail and heavily be out of shape because of receiving, thereby cause the unsafe problem of board transport.
For addressing the above problem, the invention provides a kind of base plate transmission device, said base plate transmission device is arranged in the vacuum transmission chamber, comprising: turntable is arranged on the bottom surface of said vacuum transmission chamber; Slide rail; Conveying robot is positioned on the said slide rail, it is characterized in that, also comprises: the supporting construction between the bottom surface of said slide rail and said vacuum transmission chamber is used to prevent that said slide rail receives heavily to be out of shape.
Alternatively, said supporting construction is positioned on the lower surface of said slide rail.
Alternatively, said supporting construction is positioned on the said vacuum transmission chamber bottom surface.
Alternatively, said vacuum transmission chamber is connected with process chamber, and each said process chamber has at least two sub-processes chambers, and said conveying robot comprises two-layer at least load bearing arm, and said conveying robot is used for simultaneously from said treatment chamber carrying two plate bases at least.
Alternatively, the surface of said conveying robot coats one deck solar heat protection shell.
Alternatively, said supporting construction is screw, roller or roller.
Alternatively, the quantity of said supporting construction is even number.
Alternatively, said supporting construction is that the center is symmetrically distributed with the turntable.
Alternatively, the spacing between said supporting construction is unequal.
Alternatively, the spacing between said supporting construction is along with reducing with the increase of turntable distance.
Alternatively, the diameter of said turntable is less than or equal to the width of said slide rail.
Alternatively, said supporting construction is shaped as semicircular body or cone.
Alternatively, the quantity of said supporting construction is 2, and lays respectively at the two ends of said slide rail.
Alternatively, said supporting construction is fixed on the lower surface or said vacuum chamber bottom surface of said slide rail through mechanical system.
Alternatively, said supporting construction and said slide rail or said chamber bottom are one.
Alternatively, the said supporting construction that is positioned at turntable the same side is a wedge shape along the vertical cross-section of slide rail length direction.
For addressing the above problem, the present invention also provides a kind of substrate transport system that comprises the aforesaid substrate transmitting device.
For addressing the above problem, the present invention also provides a kind of board transport method of aforesaid substrate transmitting device, comprising:
The loading or unloading substrate;
Said conveying robot slides along said slide rail, and when said conveying robot slided the end to said slide rail, said slide rail contacted with said vacuum transmission chamber bottom surface through said supporting construction.
Alternatively, said board transport method also comprises: when the center of gravity of said conveying robot overlapped with the center of said turntable, said conveying robot stopped to slide along said slide rail; Rotate said turntable, make said slide rail point to predetermined direction.
Compared with prior art, the present invention has the following advantages:
1) setting of said supporting construction can prevent that said slide rail receives heavily to be out of shape, and has increased board carrying process safe property.
2) said supporting construction does not play a supportive role all the time, thereby has reduced the rotary resistance of slide rail.
3) said supporting construction both can be positioned at the lower surface of slide rail, also can be positioned at vacuum transmission chamber bottom surface, and the position is more flexible, can select as the case may be.
When 4) said supporting construction was semicircular body or cone, it contacted with said vacuum transmission chamber bottom surface or slide rail following table millet cake, to reduce the resistance in the said conveying robot rotary course.
5) said conveying robot is forked row, has a plurality of horizontally extending handling machinery arms, and corresponding treatment chamber is stacked; Therefore, can carry and handle multi-piece substrate simultaneously, increase the efficient of board transport and processing.
6) surface of said conveying robot can coat one deck solar heat protection shell, to guarantee that conveying robot can work long hours in hot environment.
7) shape of said supporting construction and quantity all do not have restriction, and then can select for use screw, roller or roller etc. as supporting construction, make the assembling of said supporting construction be more prone to.
8) quantity of said supporting construction is even number, and supporting construction is center when being symmetrically distributed with the turntable, can be in the process of carrying substrate, and the support that the slide rail two ends receive is identical.
9) spacing between said supporting construction can equate, also can be unequal, and the position is provided with flexibly; Preferably, the spacing between said supporting construction is along with reducing with the increase of turntable distance, to strengthen its supporting capacity at the slide rail two ends.
10) diameter of said turntable can be less than or equal to the width of said slide rail, owing to there is not supporting construction, so the diameter of turntable is much in the width of slide rail in the prior art, thereby the present invention has reduced the size and the cost of turntable.
11) said supporting construction is 2, and lays respectively at the two ends of said slide rail, can simple and effectively prevent that slide rail receives heavily to be out of shape, and guarantees the safety of board transport.
12) said supporting construction both can be fixed on the below or said vacuum chamber bottom surface of said slide rail through mechanical system, can be one with said slide rail or said chamber bottom also, and implementation is various.
13) it is wedge shape that the said supporting construction that is positioned at the turntable homonymy constitutes a cross section respectively, to greatest extent said slide rail is supported, strengthens the supplemental support ability of supporting construction.
When 14) center of gravity of said conveying robot overlaps with the center of said turntable; Just rotating said turntable makes said slide rail point to predetermined direction; So that said supporting construction can not contact with said slide rail or said vacuum transfer chamber bottom surface, avoided supporting construction to rotate further and brought resistance to slide rail.
Description of drawings
Fig. 1 is the structural representation of substrate transmit machine arm device in the prior art;
Fig. 2 is the substrate transport system structural representation during thin-film solar cells is made in the prior art;
Fig. 3 is the birds-eye view of base plate transmission device in the embodiment of the invention 1;
Fig. 4 is the section drawing along A-A direction among Fig. 3;
Fig. 5 is the birds-eye view of substrate transport system in the embodiment of the invention 2;
Fig. 6 is the birds-eye view of base plate transmission device in the embodiment of the invention 3;
Fig. 7 is the section drawing along B-B direction among Fig. 6.
The specific embodiment
For make above-mentioned purpose of the present invention, feature and advantage can be more obviously understandable, does detailed explanation below in conjunction with the accompanying drawing specific embodiments of the invention.
Set forth a lot of details in the following description so that make much of the present invention, implement but the present invention can also adopt other to be different from alternate manner described here, so the present invention has not received the restriction of following disclosed specific embodiment.
Said as the background technology part; Area along with substrate in the prior art becomes increasing, thereby the heavy burden of slide rail increases greatly, and this moment is when sliding the end to slide rail when conveying robot; Slide rail because of receiving heavy unbalanced the distortion, has increased the insecurity in the board transport process easily.
Therefore, in the preparation process of thin-film solar cells, for preventing above-mentioned generation of defects; The invention provides a kind of base plate transmission device; Said base plate transmission device is arranged in the vacuum transmission chamber, comprising: turntable is arranged on the bottom surface of said vacuum transmission chamber; Slide rail matches with said turntable; Conveying robot is positioned on the said slide rail; Supporting construction between the bottom surface of said slide rail and said vacuum transmission chamber, is used to prevent that said slide rail receives heavily to be out of shape.
For preventing above-mentioned generation of defects, the present invention also provides a kind of substrate transport system that comprises the aforesaid substrate transmitting device.
For preventing above-mentioned generation of defects, the present invention also provides a kind of board transport method of aforesaid substrate transmitting device, comprising: the loading or unloading substrate; Said conveying robot slides along said slide rail, and when said conveying robot slided the end to said slide rail, said slide rail contacted with said vacuum transmission chamber bottom surface through said supporting construction.
The present invention is in existing base plate transmission device; Increased supporting construction; At least when the conveying robot in the base plate transmission device turned to slide rail one end, said supporting construction played a supportive role, in the time of can preventing that said conveying robot from sliding into slide rail one end; Slide rail is out of shape because of receiving to weigh, thereby has increased board transport process safe property; Simultaneously, supporting construction does not play a supportive role all the time, thereby has reduced the rotary resistance of base plate transmission device.
Be elaborated respectively below in conjunction with accompanying drawing.
Embodiment 1
Referring to Fig. 3, the base plate transmission device that present embodiment provides is arranged in the vacuum transmission chamber, comprising: turntable 22 is arranged on the said vacuum transmission chamber bottom surface 21; Slide rail 23 is positioned on the said turntable 22; Conveying robot 24 is positioned on the said slide rail 23; Supporting construction 25 between said slide rail 23 and said vacuum transmission chamber bottom surface 21, is used to prevent that said slide rail 23 receives heavily to be out of shape.
Present embodiment intermediate station 22 is used to support said slide rail 23 and drives said slide rail 23 rotations; Owing to have supporting construction 25 in the present embodiment; Slide into a certain position of said turntable 22 centers of gravity of deviation of gravity center of said conveying robot 24 at slide rail 23 upper edge slide rails 23 when conveying robot 24; Supporting construction 25 between said slide rail 23 and said vacuum transmission chamber bottom surface 21 just can be brought into play the effect of the said slide rail 23 of supplemental support; Shared the part load-carrying for turntable 22, so can select undersized turntable 22 in the present embodiment for use, the diameter of promptly said turntable 22 can be less than the width of said slide rail 23.Preferably, turntable described in the present embodiment 33 be arranged on said slide rail 23 centers under.In other embodiments of the invention, said turntable can also be arranged on the below of said slide rail, but said turntable as long as turntable can rotate said slide rail, and makes conveying robot get final product along the slide rail slip not in the central lower of said slide rail.
In the specific embodiment of the present invention, the treatment chamber in the substrate transport system has adopted the mode of piling up, and each treatment chamber comprises three sub-processes chambers; Each sub-process chamber is handled a substrate, and each treatment chamber can be handled three substrates simultaneously like this, correspondingly; Referring to Fig. 4, conveying robot described in the present embodiment 24 has three handling machinery arms that pile up setting, therefore; Conveying robot 24 can be carried three substrates simultaneously, has improved the handling efficiency of substrate.
Substrate temperature after the process treatment chamber is handled is higher; Substrate temperature after specifically in thin-film solar cells preparation of the present invention, handling is between 100 ℃～200 ℃; If the substrate of the such higher temperature of carrying then will cause conveying robot 24 to be heated.When the temperature of conveying robot 24 is in high temperature for a long time, just deformation can take place.If conveying robot takes place obviously can to have influence on the particularity of transmission than large deformation, and possibly cause the impact failure etc. of substrate, thereby conveying robot can't be accomplished the task of carrying substrate.Therefore; Present embodiment coats one deck solar heat protection shell on said conveying robot 24 surfaces, and the material of said solar heat protection shell is an aluminium foil, and the span of the thickness of said solar heat protection shell is 0.001mm～0.03mm; Preferably, the thickness range of said solar heat protection shell is: 0.007mm～0.01mm.The thickness of solar heat protection shell is specially 0.001mm, 0.005mm, 0.007mm, 0.008mm, 0.009mm, 0.01mm, 0.015mm, 0.02mm, 0.025mm or 0.03mm in the present embodiment.
Referring to Fig. 3 and Fig. 4, the supporting construction 25 in the present embodiment is positioned on the lower surface of said slide rail 23, and said supporting construction 25 is identical with the material of said slide rail 23, and both are one.Need to prove that in other embodiments of the invention, the material of said supporting construction and said slide rail can be different, said supporting construction is fixed on the lower surface of said slide rail through mechanical system or bonding method.
Refer again to Fig. 3 and Fig. 4, the supporting construction 25 in the present embodiment be shaped as hemisphere, the quantity of supporting construction 25 is even number, is specially six, these six supporting constructions 25 are arranged along the length direction of slide rail, and are that the center is symmetrically distributed with turntable 22.Consider that slide rail 23 is after long-term use; Plastic deformation can take place, and the closer to the edge of slide rail 23, the plastic deformation amount that said slide rail 23 takes place is big more; Distance between said slide rail 23 places and the said vacuum transmission chamber bottom surface 21 is also just more little; For preventing that said supporting construction 25 from rubbing with said vacuum transmission chamber bottom surface 21 when rotating because of the plastic deformation of slide rail 23, therefore, the size of the supporting construction 25 of needs is more little; Therefore the size of three supporting constructions 25 that is positioned at turntable 22 the same sides is unequal, and the size of said supporting construction 25 is along with reducing with the increase of turntable 22 distances.In order to realize that slide rail 23 rotates with turntable 22, the height of said supporting construction 25 should be less than the height of said turntable 22.Consider the edge of conveying robot 24 the closer to slide rail 23; The deformation that said slide rail 23 takes place is big more, and the danger in the board transport process is also big more, so the spacing of 25 of supporting constructions described in the present embodiment is unequal; And the spacing that said supporting construction is 25 is along with reducing with the increase of turntable 22 distances; So that said conveying robot 24 is during the closer to the edge of slide rail 23, said slide rail 23 must increase the safety of board carrying with more supports.
Need to prove; The present invention does not limit the concrete quantity and the shape of said supporting construction 25; The concrete quantity of said supporting construction 25 can be 2 or a plurality of; The shape of said supporting construction 25 can be hemisphere, cone, cylinder or cuboid or the like, so supporting construction 25 can be selected screw, roller or roller etc. for use.As when supporting construction 25 is screw, the end face of said screw is circular polished surface, and screw hammers on the lower surface of slide rail, makes the end face of screw contact with said vacuum transmission chamber bottom surface 21, makes that like this resistance when said slide rail 23 rotates is less.Preferably; Said supporting construction 25 is semicircular body or cone; So, in said slide rail 23 rotary courses, if come in contact between said supporting construction 25 and the said vacuum transmission chamber bottom surface; This contact also only for the some contact, therefore can reduce the said rotary resistance of stating in slide rail 23 rotary courses so.
In another preferred embodiment of the present invention, said supporting construction is 2, and lays respectively at the two ends of said slide rail, can receive heavily to be out of shape by simple and effective prevention slide rail, guarantees the safety of board transport.
Has supporting construction 25 in the present embodiment; When the conveying robot in the base plate transmission device 24 slides into an end of slide rail 23; Said supporting construction 25 plays a supportive role; Thereby in the time of can preventing that said conveying robot 24 from sliding into slide rail 23 1 ends, slide rail 23 is out of shape because of receiving to weigh, thereby has increased board transport process safe property; Simultaneously, supporting construction 25 is not to play a supportive role all the time, thereby has reduced the rotary resistance of base plate transmission device.
And in the present embodiment quantity of supporting construction 25 be even number, said supporting construction 25 with turntable 22 be the center be symmetrically distributed and the spacing of 25 of said supporting constructions along with the increase with turntable 22 distances reduces; In the time of can making said conveying robot 24 the closer to the edge of slide rail 23 like this; Said slide rail 23 must increase the safety of board carrying with more supports.
Present embodiment also provides a kind of substrate transport system that comprises the aforesaid substrate transmitting device.
Present embodiment also provides a kind of board transport method of aforesaid substrate transmitting device, comprising: the loading or unloading substrate; Said conveying robot 24 slides along said slide rail 23, and when said conveying robot 24 slided the end to said slide rail 23, said slide rail 23 contacted with said vacuum transmission chamber bottom surface 21 through said supporting construction 25.
As shown in Figure 5, present embodiment provides a kind of substrate transport system, comprising: substrate loading stage 31; Substrate unloading platform 32; The first treatment chamber 33a, the second treatment chamber 33b and the 3rd treatment chamber 33c; Vacuum transmission chamber 34; The shape that the sidewall of said vacuum transmission chamber 34 surrounds is regular pentagon; And said substrate loading stage 31, substrate unloading platform 32 and 3 treatment chamber are separately positioned on the outside of said sidewall, and are connected with said vacuum transmission chamber 34; Base plate transmission device, said base plate transmission device are arranged in the said vacuum transmission chamber 34, are used for substrate is transported to treatment chamber from substrate loading stage 31, and the substrate after will handling again is transported to substrate unloading platform 32 from treatment chamber.
Need to prove; The shape that the sidewall of said vacuum transmission chamber surrounds can also be hexagon, heptagon or other arbitrary polygons; In addition; Can also on the vacuum transmission chamber is provided with the limit of treatment chamber, substrate loading stage or substrate unloading platform, service ports be set, thereby make things convenient for the maintenance of total system.
Referring to Fig. 5, the base plate transmission device described in the present embodiment comprises: turntable 35, be arranged on the bottom surface of said vacuum transmission chamber 34, and be used to rotate conveying robot 37; Slide rail 36 is positioned on the said turntable 35; Conveying robot 37 is positioned on the said slide rail 36; The first supporting construction 38a, the second supporting construction 38b, the 3rd supporting construction 38c, the 4th supporting construction 38d and the 5th supporting construction 38e; These five supporting constructions all between said slide rail 36 and said vacuum transmission chamber 34 bottom surfaces, are used to prevent that said slide rail 36 receives heavily to be out of shape.
Treatment chamber 34 includes only a sub-processes chamber in the present embodiment, and correspondingly, said conveying robot 37 is an individual layer, also carries a substrate at every turn.
The diameter of turntable described in the present embodiment 35 is also less than the width of said slide rail 36, thereby reduced the size and the cost of turntable 35.
Five supporting constructions in the present embodiment all are positioned on the bottom surface of said vacuum chamber 35, and said supporting construction is identical with the material of said vacuum chamber 35 bottom surfaces, and both are one.Need to prove that in other embodiments of the invention, the material of said supporting construction and said vacuum chamber bottom surface can be different, said supporting construction is fixed on the bottom surface of said vacuum chamber 35 through mechanical system or bonding method.
Supporting construction in the present embodiment is equal-sized square; The height of this square is less than the height of said turntable 35; Supporting construction in the concrete present embodiment has five; These five supporting constructions are that the center is symmetrically distributed with turntable 35, and the spacing between each supporting construction equates, and the first supporting construction 38a laterally arranges near the limit of the cooresponding regular pentagon of the said first treatment chamber 33a; When said slide rail 36 during perpendicular to above-mentioned limit, the first supporting construction 38a be positioned at said slide rail 36 1 ends under; The second supporting construction 38b laterally arranges near the limit of the cooresponding regular pentagon of the said second treatment chamber 33b, when said slide rail 36 during perpendicular to above-mentioned limit, the second supporting construction 38b be positioned at said slide rail 36 1 ends under; The 3rd supporting construction 38c laterally arranges near the limit of the cooresponding regular pentagon of said the 3rd treatment chamber 33c, when said slide rail 36 during perpendicular to above-mentioned limit, the second supporting construction 38c be positioned at said slide rail 36 1 ends under; The 4th supporting construction 38d laterally arranges near the limit of said substrate unloading platform 32 cooresponding regular pentagons, when said slide rail 36 during perpendicular to above-mentioned limit, the second supporting construction 38d be positioned at said slide rail 36 1 ends under; The 5th supporting construction 38e laterally arranges near the limit of said substrate unloading platform 31 cooresponding regular pentagons, when said slide rail 36 during perpendicular to above-mentioned limit, the second supporting construction 38e be positioned at said slide rail 36 1 ends under.
Said second treatment chamber has and said vacuum transmission chamber bonded assembly valve (figure does not show); In conjunction with shown in Figure 5, when base plate transmission device needed from the second treatment chamber 33b carrying substrate, slide rail 36 turned to and the corresponding direction of the valve of the second treatment chamber 33b with turntable 35; Subsequently; 37 of conveying robots slide into the said second treatment chamber 33b along said slide rail 36, so that said load bearing arm places in said second treatment chamber, at this moment; The effect of second supporting construction 38b performance supplemental support has avoided slide rail 36 because of receiving heavy the distortion.By that analogy, can find out the effect of other four supporting constructions.
Need to prove that the present invention does not limit said supporting construction shape, the shape of said supporting construction can be semicircular body, cone, cylinder or cuboid or the like, so supporting construction 25 can be selected screw, roller or roller etc. for use; The present invention does not limit the quantity of said supporting construction yet; Receive heavily to be out of shape in order further to reduce slide rail; As can also between each supporting construction and turntable, add one or more supporting constructions; These supporting constructions can be that the center is symmetrically distributed with the turntable, also can not be that the center is symmetrically distributed with the turntable; The shape of these supporting constructions can be identical, also can be inequality.
Present embodiment also provides a kind of board transport method of aforesaid substrate transmitting device, comprising: the loading or unloading substrate; Said conveying robot 37 slides along said slide rail 36, and when said conveying robot 37 slided the end to said slide rail 36, said slide rail 36 contacted with said vacuum transmission chamber 34 bottom surfaces through said supporting construction.
Be example so that substrate is transferred to the second treatment chamber 33b from substrate loading stage 31 below, be elaborated, before an end and the said conveying robot 37 that this moment, said conveying robot 37 just in time was positioned at said slide rail 36 is positioned at the valve of said substrate loading stage 31.
The first step; Conveying robot 37 mounting substrate from the substrate loading stage 31; Said slide rail 36 contacts with said vacuum transmission chamber 34 bottom surfaces through said the 5th supporting construction 38e, and this moment, said turntable 35 played the main support effect, and said the 5th supporting construction 38e plays the supplemental support effect;
Second step; Said conveying robot 37 slides along said slide rail 36; When said conveying robot 37 slided into the center of slide rail 36, when the center of gravity of promptly said conveying robot 37 overlapped with the center of said turntable 35, said conveying robot 37 stopped to slide along said slide rail 36;
The 3rd step, rotate said turntable 35, make said slide rail 36 point to predetermined direction, through the said turntable 35 of rotation, make said slide rail 36 vertical in the present embodiment with the limit of the vacuum transmission chamber 34 at said second treatment chamber 33b place;
The 4th step; Said conveying robot 37 continues to slide along said slide rail 36; Make said conveying robot 37 arrive destination locations; Before making said conveying robot 37 slide into the valve of the second treatment chamber 33b along slide rail 36 in the present embodiment, promptly said conveying robot 37 is positioned at an end of said slide rail 36, and this moment, said slide rail 36 contacted with said vacuum transmission chamber 34 bottom surfaces through the said second supporting construction 38b; This moment, said turntable 35 played the main support effect, and the said second supporting construction 38b plays the supplemental support effect;
The 5th step, with the substrate unloading on the conveying robot 37 to the second treatment chamber 33b, thereby accomplish the transmission of substrate from substrate loading stage 31 to second treatment chamber 33b.
In the present embodiment when the center of gravity of said conveying robot 37 overlaps with the center of said turntable 35; Just rotating said turntable 35 makes said slide rail 36 point to predetermined direction; So that said supporting construction can not contact with said slide rail 36, avoided supporting construction to rotate for slide rail 36 further and brought resistance.
Need to prove that board transport method of the present invention is not limited to this, can also in the process that conveying robot slides along slide rail, rotate said turntable; Perhaps the said turntable of rotation makes conveying robot slide into destination locations along slide rail to predetermined direction more earlier; Perhaps make conveying robot slide into destination locations earlier, rotate said turntable again to predetermined direction along slide rail.
Like Fig. 6 and shown in Figure 7, the base plate transmission device that present embodiment provides comprises: turntable 42 is arranged on the said vacuum transmission chamber bottom surface 41; Slide rail 43 is positioned on the said turntable 42; Conveying robot 44 is positioned on the said slide rail 43; Supporting construction 45 between said slide rail 43 and said vacuum transmission chamber bottom surface 41, is used to prevent that said slide rail 43 receives heavily to be out of shape.
The diameter of present embodiment intermediate station 42 is less than the width of said slide rail 43, and conveying robot 44 is forked arranges, and is specially two-layer.
Supporting construction 45 is positioned on the lower surface of said slide rail 43 in the present embodiment, and said supporting construction 45 is identical with the material of said slide rail 43, and both are one.Need to prove that in other embodiments of the invention, the material of said supporting construction and said slide rail can be different, said supporting construction is fixed on the lower surface of said slide rail through mechanical system or bonding method.
Supporting construction 45 in the present embodiment is that the center is symmetrically distributed with turntable 42; And the said supporting construction 45 that is positioned at turntable 42 the same sides is that a vertical cross-section along the slide rail length direction is a wedge shape; Particularly; Can be the clinohedral of right-angled trapezium, in order not influence the rotation of turntable 42,45 of said turntable 42 and said supporting constructions are gapped.
In the present embodiment after the slide rail long-term work; Its plastic deformation near the edge of slide rail 43 is big more; Distance between said slide rail 43 and the said vacuum transmission chamber bottom surface 41 is more little; The size of the supporting construction 25 that therefore needs is more little, so just can prevent that said supporting construction 25 from rubbing with said vacuum transmission chamber bottom surface 21 when rotating because of the plastic deformation of slide rail 23, guarantee board transport process safe property.
In other embodiments of the invention, said supporting construction can also be positioned on the said vacuum transmission chamber bottom surface 41; The supporting construction of said turntable both sides can skew distribution; Said supporting construction can be only in the centre of slide rail, and not in the end of slide rail or the like.
Present embodiment also provides a kind of substrate transport system that comprises the described base plate transmission device of present embodiment.
Present embodiment also provides a kind of board transport method of aforesaid substrate transmitting device, comprising: the loading or unloading substrate; Said conveying robot 44 slides along said slide rail 43, and when said conveying robot 44 slided the end to said slide rail 43, said slide rail 43 contacted with said vacuum transmission chamber bottom surface 41 through said supporting construction 45.
Though oneself discloses the present invention as above with preferred embodiment, the present invention is defined in this.Any those skilled in the art are not breaking away from the spirit and scope of the present invention, all can do various changes and modification, so protection scope of the present invention should be as the criterion with claim institute restricted portion.
Claims (19)
1. base plate transmission device, said base plate transmission device is arranged in the vacuum transmission chamber, comprising: turntable is arranged on the bottom surface of said vacuum transmission chamber; Slide rail, conveying robot is positioned on the said slide rail, it is characterized in that, also comprises: the supporting construction between the bottom surface of said slide rail and said vacuum transmission chamber is used to prevent that said slide rail receives heavily to be out of shape.
2. base plate transmission device according to claim 1 is characterized in that said supporting construction is positioned at the lower surface of said slide rail.
3. base plate transmission device according to claim 1 is characterized in that, said supporting construction is positioned at said vacuum transmission chamber bottom surface.
4. according to claim 2 or 3 described base plate transmission devices, it is characterized in that said supporting construction is fixed on the lower surface or said vacuum chamber bottom surface of said slide rail through mechanical system or bonding method.
5. according to claim 2 or 3 described base plate transmission devices, it is characterized in that said supporting construction and said slide rail or said chamber bottom are one.
6. base plate transmission device according to claim 1; It is characterized in that; Said vacuum transmission chamber is connected with process chamber; Each said process chamber has at least two sub-processes chambers, and said conveying robot comprises two-layer at least load bearing arm, and said conveying robot is used for simultaneously from said treatment chamber carrying two plate bases at least.
7. base plate transmission device according to claim 1 is characterized in that, the surface of said conveying robot coats one deck solar heat protection shell.
8. base plate transmission device according to claim 1 is characterized in that, said supporting construction is screw, roller or roller.
9. base plate transmission device according to claim 1 is characterized in that, the quantity of said supporting construction is even number.
10. base plate transmission device according to claim 9 is characterized in that, said supporting construction is the center distribution that is centrosymmetric with the turntable.
11. base plate transmission device according to claim 1 is characterized in that, the spacing between said supporting construction is unequal.
12. base plate transmission device according to claim 11 is characterized in that, the spacing between said supporting construction is along with reducing with the increase of turntable distance.
13. base plate transmission device according to claim 1 is characterized in that, the diameter of said turntable is less than or equal to the width of said slide rail.
14. base plate transmission device according to claim 1 is characterized in that, said supporting construction be shaped as semicircular body or cone.
15. base plate transmission device according to claim 1 is characterized in that, the quantity of said supporting construction is 2, and lays respectively at the two ends of said slide rail.
16. base plate transmission device according to claim 1 is characterized in that, the said supporting construction that is positioned at turntable the same side is a wedge shape along the vertical cross-section of slide rail length direction.
17. substrate transport system that comprises each described base plate transmission device in the claim 1 to 16.
18. the board transport method according to each described base plate transmission device in the claim 1 to 16 comprises:
The loading or unloading substrate;
Said conveying robot slides along said slide rail, and when said conveying robot slided the end to said slide rail, said slide rail contacted with said vacuum transmission chamber bottom surface through said supporting construction.
19. board transport method according to claim 18 is characterized in that, also comprises: when the center of gravity of said conveying robot overlapped with the center of said turntable, said conveying robot stopped to slide along said slide rail; Rotate said turntable, make said slide rail point to predetermined direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010597584.7A CN102530556B (en) | 2010-12-20 | 2010-12-20 | Substrate conveying device, method and system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010597584.7A CN102530556B (en) | 2010-12-20 | 2010-12-20 | Substrate conveying device, method and system |
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| Publication Number | Publication Date |
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| CN102530556A true CN102530556A (en) | 2012-07-04 |
| CN102530556B CN102530556B (en) | 2015-06-24 |
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| CN201010597584.7A Active CN102530556B (en) | 2010-12-20 | 2010-12-20 | Substrate conveying device, method and system |
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Cited By (1)
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|---|---|---|---|---|
| CN103730398A (en) * | 2012-10-11 | 2014-04-16 | 株式会社Tes | Apparatus for transferring substrate |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN102530556B (en) | 2015-06-24 |
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