CN102528020B - Alloy steel powder for powder metallurgy and iron based material and manufacture method thereof - Google Patents

Alloy steel powder for powder metallurgy and iron based material and manufacture method thereof Download PDF

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CN102528020B
CN102528020B CN201110262731.XA CN201110262731A CN102528020B CN 102528020 B CN102528020 B CN 102528020B CN 201110262731 A CN201110262731 A CN 201110262731A CN 102528020 B CN102528020 B CN 102528020B
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quality
iron
alloy steel
powder metallurgy
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CN102528020A (en
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宇波繁
尾崎由纪子
中村尚道
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JFE Engineering Corp
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NKK Corp
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Abstract

The present invention proposes the excellent alloy steel powder for powder metallurgy of intensity-tough sexual balance and iron based material and manufacture method thereof.Described alloy steel powder for powder metallurgy is formed by making the comminuted steel shot diffusion into the surface attachment of at least any one or more than two kinds of the powder containing Ni:0.05 ~ 5.0 quality % and/or Cu:0.05 ~ 5.0 quality % in pre-alloyed Nb:0.02 ~ 0.4 quality %, V:0.01 ~ 0.4 quality % and Ti:0.01 ~ 0.4 quality %.

Description

Alloy steel powder for powder metallurgy and iron based material and manufacture method thereof
Technical field
The present invention relates to the alloy steel powder for powder metallurgy being applicable to being provided in PM technique, particularly when using described powdered alloy steel to manufacture agglomerated material for realizing the powdered alloy steel of the intensity-tough sexual balance improving described agglomerated material.
In addition, the present invention relates to the agglomerated material using the intensity-tough sexual balance of above-mentioned alloy steel powder for powder metallurgy manufacture excellent and manufacture method thereof.
Background technology
PM technique can manufacture the parts of complicated shape with the shape (so-called nearly end form) very close with article shape with high accuracy to size, cut cost therefore, it is possible to greatly reduce.Therefore, sintered metal product is used as various machinery, parts in many-side.
And, recently, in order to realize miniaturization, the lightweight of parts, be strongly required the intensity improving sintered metal product.Particularly require strong to the high strength of iron-based powder goods (iron base sintered body).
Iron-based powder for powder metallurgy formed body generally manufactures by operating as follows: in iron-based powder, be mixed into the alloy such as copper powder, graphite powder powder and the lubricant such as stearic acid, lithium stearate and make iron-based powder mixed powder, then filling it in mould and carry out press molding.According to composition, iron-based powder can be categorized as iron powder (such as straight iron powder etc.), powdered alloy steel etc.In addition, when classifying according to manufacture method, can be categorized as atomized iron powder, reduced iron powder etc., in these classification, iron powder uses the broad sense comprising powdered alloy steel.
The density of the formed body obtained by common powder metallurgy operation is generally about 6.6Mg/m 3~ about 7.1Mg/m 3.Then, sintering processes implemented to these iron-based powder formed bodies and makes sintered body, and then implementing pressure-sizing processing, machining as required, thus making sintered metal product.And, when needing higher intensity, sometimes also implement carburizing heat treatment, brightness heat treatment after sintering.
In the stage of raw meal, as the powder adding alloying element, known following powder etc.:
(1) in straight iron powder, be mixed with the mixed powder of each alloying element powder;
(2) the complete alloying prealloy comminuted steel shot of each element;
(3) each alloying element powder is made to adhere to the part dif-fusion-alloyed steel powder of diffusion in the surface portion of straight iron powder, prealloy comminuted steel shot.
(1) the mixed powder being mixed with each alloying element powder in straight iron powder, has the advantage can guaranteeing the high-compressibility equal with straight iron powder.But but there are the following problems: when sintering, if not by the CO in sintering atmosphere, carburizing atmosphere 2concentration and dew point are strict controlled in reduced levels, then Mn, Cr, V, Si, Nb, Ti etc. as the metal more active than Fe can be oxidized, thus can not realize low oxygen content; And each alloying element in Fe and insufficient diffusion, forms uneven tissue, thus can not reach matrix strengthening.
Therefore, the mixed powder being mixed with each alloying element powder in straight iron powder of (1) can not tackle the requirement of high strength in recent years, so that is in not by the state used.
On the other hand, (2) the prealloy comminuted steel shot tool of each element of complete alloying has the following advantages: although due to by molten steel atomization being manufactured, thus the solution hardening effect caused by the oxidation in the atomization procedure of molten steel and complete alloying can be produced, but, by limiting the kind of the alloying elements such as Mn, Cr, V, Si, Nb, Ti and amount, low oxygen content and the high-compressibility equal with straight iron powder can be guaranteed.In addition, there is the possibility being caused matrix strengthening by complete alloying, therefore developing as high strength prealloy comminuted steel shot.
In addition, (3) part dif-fusion-alloyed steel powder, by mixing the metal dust of each element and carry out heating to make each metal dust manufacture in the surface portion ground diffusion bond of straight iron powder, prealloy comminuted steel shot under the atmosphere of non-oxidizable or irreducibility in straight iron powder, prealloy comminuted steel shot, therefore, it can combine the advantage of the iron base powder mixture of (1) and the prealloy comminuted steel shot of (2).Therefore, low oxygen content and the high-compressibility equal with straight iron powder can be guaranteed, and there is the possibility causing matrix strengthening by forming the complex tissue that is made up of complete alloy phase and part enrichment phase, therefore, developing as high strength partially-diffuse alloyed comminuted steel shot.
As the basic alloy composition of above-mentioned prealloy comminuted steel shot and part dif-fusion-alloyed steel powder, in most cases use Mo.Its reason is identical with the reason that Mo can be used as the intensified element of ferrous materials.Namely, this is because Mo not only suppresses ferritic generation, makes bainite structure in ferrous materials, thus make parent phase (matrix) phase transformation strengthening, and distribute in parent phase and carbide and make parent phase solution strengthening, and then form fine carbide and make parent phase precipitation strength.In addition, owing to being the non-crystal boundary oxidizing elemental that gas carburizing is excellent, therefore also there is the effect of carburizing strengthening.
In addition, make agglomerated material strengthening aspect from the precipitation strength by carbide, the strong element of the carbide Forming ability such as V, Nb, Ti can also be added.
For example, Patent Document 1 discloses a kind of alloy steel powder for powder metallurgy, it is characterized in that, by pre-alloyed and containing Mo:0.1 ~ 6.0%, V:0.05 ~ 2.0% and below Nb:0.10%, and make the Mo of less than 4% partly spread attachment.This powdered alloy steel ensure that the low oxygen content of powder stage and the high-compressibility equal with iron powder, and achieves low oxygen content and the matrix strengthening of agglomerated material or carburizing and quenching material.
In addition, Patent Document 2 discloses a kind of high-strength sintered body powdered alloy steel, it is characterized in that, with mass ratio range, containing Cr:0.5 ~ 2%, below Mn:0.08%, Mo:0.1 ~ 0.6%, V:0.05 ~ 0.5%, also containing a kind or 2 kinds in Nb:0.01 ~ 0.08%, Ti:0.01 ~ 0.08%, and make the Mo diffusion attachment of 0.05 ~ 3.5%.With regard to this technology, the powdered alloy steel that compressibility is good, can control as suitable quenching degree can be obtained, and, by using this comminuted steel shot and controlling the cooling velocity after sintering, can make form fine pearlitic structrure in sintered body and do not form thick upper bainite tissue, thus just can obtain high strength under sintering state.
Patent document 1: Japanese Unexamined Patent Publication 8-49047 publication
Patent document 2: Japanese Unexamined Patent Publication 7-331395 publication
But the research of the present inventor shows, the agglomerated material employing any one powdered alloy steel in above-mentioned patent document 1 and patent document 2 is all difficult to have intensity and toughness concurrently.
Summary of the invention
The object of the invention is to, overcome the problem of above-mentioned prior art, propose intensity and the good alloy steel powder for powder metallurgy of tough sexual balance.
In addition, the present invention also aims to, the agglomerated material and its favourable manufacture method that use the intensity-tough sexual balance of above-mentioned alloy steel powder for powder metallurgy manufacture excellent are provided.
In order to achieve the above object, repeatedly carried out various research to the alloying component of iron-based powder and adding method thereof, result obtains opinion as described below to the present inventor.
When making formed body the iron-based powder on the iron powder making Ni, Cu spread to be attached to the carbide formers such as Nb pre-alloyed is mixed with carbon dust and sinter, alloying element Ni, Cu sintered neck enrichment between iron based powder particles, simultaneously in the iron matrix except this enrichment portion, the Carbide Precipitation of Nb, V, Ti.
Owing to there is a large amount of pore in sintered neck, therefore the intensity of this part has the tendency of reduction, but when forming the enrichment portion of Ni, Cu around pore, can become the tissue that toughness is high.
In addition, when the carbide of Nb, V, Ti is separated out in iron matrix, due to precipitation strength, the tissue that intensity is high is formed.
The present invention completes based on above-mentioned opinion.
That is, described in main points of the present invention are constructed as follows.
1. an alloy steel powder for powder metallurgy, its by make the powder containing Ni:0.05 ~ 5.0 quality % and/or Cu:0.05 ~ 5.0 quality % in pre-alloyed Nb:0.02 ~ 0.4 quality %, V:0.01 ~ 0.4 quality % and Ti:0.01 ~ 0.4 quality % at least any one comminuted steel shot diffusion into the surface attachment and formed.
2. an iron based material, by the alloy steel powder for powder metallurgy press-powder described in above-mentioned 1 is shaped, then carries out sintering and obtain, there is the enrichment portion of Ni and/or Cu around the pore of described agglomerated material, and in the matrix except described enrichment portion carbide precipitate.
3. the manufacture method of an iron based material, it is characterized in that, alloy steel powder for powder metallurgy described in above-mentioned 1 is mixed with the carbon dust of 0.1 ~ 1.0 quality %, then under the pressure of 400 ~ 1000MPa, press-powder shaping is carried out, then sinter at the temperature of 1100 ~ 1300 DEG C, make the enrichment portion forming Ni and/or Cu around the pore of the agglomerated material of gained, make carbide precipitate in the matrix except described enrichment portion simultaneously.
Invention effect
According to the present invention, by having used Nb, V and Ti pre-alloyed at least any one and make Ni and/or Cu spread the alloy steel powder for powder metallurgy of attachment, the agglomerated material that intensity-tough sexual balance is excellent can be obtained.
Accompanying drawing explanation
Fig. 1 is the ideograph comprising the sintering structure of sintered neck representing the sintered body obtained by the present invention.
Label declaration
1 iron-based powder
2 sintered necks
Detailed description of the invention
Below, the present invention is specifically described.
Alloy steel powder for powder metallurgy of the present invention, makes to obtain containing Ni powder and/or containing at least any one the comminuted steel shot diffusion into the surface attachment of Cu powder in pre-alloyed Nb, V, Ti.
Make formed body by making the alloy steel powder for powder metallurgy of the invention described above mix with carbon dust and sinter, the sintered neck between iron based powder particles forms the enrichment portion of Ni, Cu.In addition, the carbide of Nb, V, Ti disperses to separate out in iron matrix.
Owing to there is a large amount of pore in sintered neck, therefore the intensity of this part has the tendency of reduction, but when forming the enriched layer of Ni, Cu around pore, become the tissue that toughness is high, on the other hand, owing to separating out the carbide of Nb, V, Ti in iron matrix, therefore due to precipitation strength, become the tissue that intensity is high.
Thus, become and can have high strength and high tenacity concurrently, think and can obtain the excellent sintered body of intensity-tough sexual balance.
Below, be described with at least any one the reason in aforementioned compositing range pre-alloyed Nb, V, Ti in the present invention.In addition, " % " shown below is the ratio (quality %) overall relative to alloy steel powder for powder metallurgy of the present invention (after Ni and/or Cu diffusion attachment).
Nb:0.02~0.4%
Nb, by separating out with carbide form in the base, plays the raising of intensity and very effectively acts on.But, when content is less than 0.02%, the growing amount of carbide becomes insufficient, cannot expect the sufficient high strength of sintered body, on the other hand, when being greater than 0.4%, carbide coarsening, thus strength-enhancing effect reduces, and causes compressibility to reduce due to the sclerosis of powdered alloy steel particle, moreover, also unfavorable from the viewpoint of economy.Be more preferably 0.05 ~ 0.3%.
V:0.01 ~ 0.4% and Ti:0.01 ~ 0.4%
V and Ti is the element useful as carbide former being only second to Nb, therefore by containing these elements, can contribute to the raising of intensity further.But wherein the interpolation of any one element is less than in limited time lower, under-ageing; On the other hand, when interpolation exceedes in limited time, carbide still can coarsening, thus causes that strength-enhancing effect reduces, compressibility reduces, and therefore, makes to contain in the above-mentioned scope of each leisure of V, Ti.More preferably each comfortable less than 0.3%.
In addition, when the total amount of Nb, V and Ti is in the scope of 0.1 ~ 0.4%, can obtain possessing intensity excellent especially and the agglomerated material of toughness.
In addition, while guaranteeing excellent toughness, effectively improve intensity, preferably must add above-mentioned Nb.From the view point of further improving intensity, preferably must add above-mentioned Nb, and add in above-mentioned V and Ti at least any one.
Then, the manufacture method of alloy steel powder for powder metallurgy of the present invention is described.
First, what prepare scheduled volume contains the iron-based powder (iron-based powder as raw material) as the alloying element of prealloy composition (that is, as prealloy) and the powder containing Ni, Cu.
As iron-based powder, preferred so-called atomized iron powder.Atomized iron powder refers to the iron-based powder of being sprayed to the molten steel that have adjusted alloying component according to object by water or gas and being obtained.For atomized iron powder, usually, after atomization, heating in reducing atmosphere (such as hydrogen atmosphere), implements the process of C and O reduced in iron powder thus.But, as the iron-based powder of raw material of the present invention, the iron powder not implementing this heat treated, so-called " spray pattern " also can be used.
As containing Ni powder, be applicable to the pure metal powder and the Ni alloy powder such as oxidation Ni powder or FeNi (ferronickel) powder etc. that use Ni.In addition, the Ni carbide of the compound of Ni, Ni sulfide, Ni nitride etc. can also be used as.
Equally, as containing Cu powder, the pure metal powder and the Cu alloy powder such as oxidation Cu powder or FeCu (copper iron) powder, Cu-Mn powder, Fe-Cu-Mn powder, Cu-Ni powder etc. that use Cu is applicable to.In addition, the sulfuration Cu etc. of the compound of Cu can also be used as.
In addition, can also use and can be reduced into containing Ni powder, compound containing Ni, Cu of Cu powder.And, the powder simultaneously containing Ni and Cu can also be used.
Then, mix by above-mentioned iron-based powder with containing Ni powder and/or containing Cu powder (hereinafter referred to as containing Ni, Cu powder) according to predetermined ratio.About mixed method, there is no special restriction, such as, can use Henschel mixer, cone mixer etc.
Then, this mixture is at high temperature kept, make Ni, Cu spread in iron and engage at iron-based powder with the contact surface containing Ni, Cu powder, thus, obtain alloy steel powder for powder metallurgy of the present invention.
Here, as heat treated atmosphere, preferred reducing atmosphere, hydrogen atmosphere, particularly preferably hydrogen atmosphere.In addition, the heat treatment carried out under vacuo can also be increased.In addition, the heat treatment temperature be applicable to is the scope of 800 ~ 1000 DEG C.
In addition, when the iron powder under use spray pattern is as iron-based powder, the content of C, O is high, therefore, carries out reducing C and O preferably by making heat treatment in reducing atmosphere.By this reducing effect, iron-based powder surface activation, even if also positively can carry out the attachment caused by the diffusion containing Ni, Cu powder under low temperature (about 800 DEG C ~ about 900 DEG C).
When carrying out diffusion attachment process as described above, under normal circumstances, iron-based powder becomes caking state after sintering with containing Ni, Cu powder, therefore, by pulverizing/being classified to desired particle diameter, and implement annealing as required further, thus make alloy steel powder for powder metallurgy.
In the present invention, preferably iron-based powder surface is attached to equably containing the minuteness particle of Ni, Cu powder.When evenly attachment, after adhering to process, alloy steel powder for powder metallurgy is pulverized, transport etc. time, easily come off from iron-based powder surface containing Ni, Cu powder, therefore especially easily increase free state containing Ni, Cu powder.When sintering the powdered alloy steel of this state into formed body, there is the tendency of the dispersity segregation of carbide.Therefore, in order to improve intensity, the toughness of sintered body, preferably make evenly to be attached to the surface of iron-based powder containing Ni, Cu powder, with reduce the free state that produces owing to come off etc. containing Ni, Cu powder.
Ni, Cu amount that diffusion is adhered to is 0.05 ~ 5.0% separately.When being less than 0.05%, it is little that toughness improves effect.On the other hand, when being greater than 5.0%, there is the shortcoming that intensity reduces on the contrary.Therefore, Ni, Cu amount diffusion being adhered to is 0.05 ~ 5.0% separately.Be preferably the scope of Ni:1.0 ~ 4.0%, Cu:0.2 ~ 3.0%.Be more preferably the scope of Ni:2.0 ~ 4.0%, Cu:1.0 ~ 2.0%.
In addition, the surplus of powdered alloy steel is iron and impurity.As the impurity contained in powdered alloy steel, can C, O, N, S etc. be enumerated, as long as they are below C:0.02%, below O:0.2%, below N:0.004%, below S:0.03% separately, then there is no special problem.
When above-mentioned powdered alloy steel is manufactured sintered body as raw material, the carbon dusts such as graphite, due to effective in high strength and high-fatigue strength, therefore, added and count the graphite of 0.1 ~ 1.0% with C conversion and mix before press molding.Above-mentioned C conversion amount is the quality ratio relative to mixed powdered alloy steel mixed powder.
In addition, with regard to the present invention, certainly can according to the adding material of object interpolation for improving characteristic.Such as, for the purpose of the machinability improving sintered body, machinability improvement powder such as adding MnS can be illustrated.The impurity contained in powdered alloy steel mixed powder, as long as below O:0.2%, below N:0.004%, below S:0.03%, does not then have special problem.But, when on purpose adding as above-mentioned additive, not treating as impurity, therefore also there is no need to control in above-mentioned scope.
Then, preferred sintering condition during use alloy steel powder for powder metallurgy manufacture of the present invention sintered body is described.
When press molding, can also the pulverous lubricant of additional mixing.In addition, also can be coated with on mould or adhere to lubricant.No matter in which kind of situation, as lubricant, all can preferably use the known lubricants such as the amide-based wax such as metallic soap, ethylenebisstearamide such as zinc stearate.During hybrid lubricant, be preferably about 0.1 mass parts ~ about 1.2 mass parts relative to powdered alloy steel mixed powder 100 mass parts.
When press molding, must carry out under the pressure of 400 ~ 1000MPa.This is because when pressure is less than 400MPa, the density of the formed body obtained reduces, thus the characteristic of sintered body reduces; On the other hand, when being greater than 1000MPa, the lost of life of mould, it is unfavorable to become economically.In addition, temperature during pressurization is preferably the scope of normal temperature (about 20 DEG C) ~ about 160 DEG C.
In addition, sintering must carry out in the temperature range of 1100 ~ 1300 DEG C.This is because when sintering temperature is lower than 1100 DEG C, sintering cannot carry out, thus the characteristic of sintered body reduces; On the other hand, when higher than 1300 DEG C, the lost of life of sintering furnace, it is unfavorable to become economically.In addition, preferred sintering time is the scope of 10 ~ 180 minutes.For making the carbide of Nb, V, Ti separate out in iron matrix (except the part except Ni, Cu rich region of sintered neck, also referred to as matrix), also this sintering range preferred and sintering time.
For obtained sintered body, the intensive treatment such as carburizing and quenching, bright quenching, high-frequency quenching and nicarbing process can be implemented as required, even if but when not implementing intensive treatment, also improve with existing sintered body (not implementing the sintered body of intensive treatment) phase specific strength and toughness.It should be noted that, each intensive treatment can be undertaken by conventional method.
Show to Fig. 1 pattern the sintering structure comprising sintered neck of the sintered body obtained by the present invention.In figure, label 1 sintered neck that to be iron-based powder, 2 be around pore.
Here, as the carbide of separating out in the matrix except the enrichment portion of Ni, Cu, can enumerate: NbC, (Nb, V) C, (Nb, V, Ti) C etc.
In addition, preferred above-mentioned carbide at above-mentioned zone with per unit area 1 μm 2the ratio of middle about 1 ~ about 100 is separated out.
It should be noted that, Ni, Cu rich region refers to the region of around sintered neck about 10 μm.
Embodiment
Below, in further detail the present invention is described by embodiment, but the present invention is not by any restriction of following instance.
Embodiment 1
Sprayed by the molten steel of water atomization to the alloying element shown in No.1 ~ 16 containing table 1, make the iron-based powder of spray pattern.In this iron-based powder, table 1 is added shown containing Ni powder, containing Cu powder with predetermined ratio, and use V-Mixer to mix 15 minutes, then, be heat-treat in the hydrogen atmosphere of 30 DEG C (keeping temperature: 875 DEG C, retention time: 1 hour) at dew point, the diffusion into the surface manufacturing iron-based powder thus attached to the alloy steel powder for powder metallurgy of Ni, Cu of scheduled volume.
Then, to these alloy steel powder for powder metallurgy, add the graphite of the amount of Table 1, and then interpolation is the ethylenebisstearamide of 0.6 mass parts relative to obtained powdered alloy steel mixed powder 100 mass parts, then uses V-Mixer to mix 15 minutes.Then, under the pressure of 686MPa, carry out press molding, make the formed body of long 55mm, wide 10mm, thick 10mm.
Sintering is implemented to this formed body, makes sintered body.This sintering is at N 2-10%H 2in atmosphere, sintering temperature: 1130 DEG C, sintering time: carry out under the condition of 20 minutes.
When for tension test, obtained sintered body is processed into the pole tensile test specimen that parallel portion diameter is 5mm, and when for summer ratio (charpy) impact test, evaluates with the shape being in sintering state original.
By the hot strength TS (MPa) of these sintered bodies and impact value (J/cm 2) measurement result be shown in table 1 in the lump.
As shown in table 1, the hot strength and the impact value that compare example and comparative example are known, and example all can have high strength and high tenacity concurrently, that is, hot strength is more than 550MPa, impact value is 15J/cm 2above, and on the other hand, any one in the hot strength of any one comparative example and impact value is all poor than example.
In addition, with regard to the present invention's example, observed and graphical analysis, all at the per unit area 1 μm of the matrix except the enrichment portion of Ni, Cu by the SEM in sintered body cross section 2in observed about 1 ~ about 100 NbC, (Nb, V) C, (Nb, V, Ti) C etc.

Claims (3)

1. an alloy steel powder for powder metallurgy, its by make the powder containing Ni:0.05 ~ 5.0 quality % and/or Cu:0.05 ~ 5.0 quality % in pre-alloyed Nb:0.02 ~ 0.4 quality %, V:0.01 ~ 0.4 quality % and Ti:0.01 ~ 0.4 quality % at least any one comminuted steel shot diffusion into the surface attachment and formed, the surplus of described powdered alloy steel is iron and impurity, and described impurity is below C:0.02 quality %, O:0.2 below quality %, below N:0.004 quality %, S:0.03 below quality %.
2. an iron based material, by alloy steel powder for powder metallurgy press-powder according to claim 1 is shaped, then carries out sintering and obtain, there is the enrichment portion of Ni and/or Cu around the pore of described agglomerated material, and in the matrix except described enrichment portion carbide precipitate.
3. the manufacture method of an iron based material, it is characterized in that, the carbon dust of alloy steel powder for powder metallurgy according to claim 1 with 0.1 ~ 1.0 quality % is mixed, then under the pressure of 400 ~ 1000MPa, press-powder shaping is carried out, then sinter at the temperature of 1100 ~ 1300 DEG C, make the enrichment portion forming Ni and/or Cu around the pore of the agglomerated material of gained, make carbide precipitate in the matrix except described enrichment portion simultaneously.
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EP4035798A4 (en) * 2019-09-27 2022-12-07 JFE Steel Corporation Alloy steel powder for powder metallurgy, iron-based mixed powder for powder metallurgy, and sintered body
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CN1488006A (en) * 2001-01-24 2004-04-07 ����-�ɹŶ��ս��Ʒ���޹�˾ Sintered ferrous material containing copper
CN1528547A (en) * 2003-09-28 2004-09-15 海安县鹰球集团有限公司 Powder metallurgy internal hilical gear, and its manufacturing method and die using same method
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JPH0681001A (en) * 1992-09-02 1994-03-22 Kawasaki Steel Corp Alloy steel powder
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CN1488006A (en) * 2001-01-24 2004-04-07 ����-�ɹŶ��ս��Ʒ���޹�˾ Sintered ferrous material containing copper
CN1528547A (en) * 2003-09-28 2004-09-15 海安县鹰球集团有限公司 Powder metallurgy internal hilical gear, and its manufacturing method and die using same method
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