CN102519882A - Infrared modulation photacoustic spectroscopic gas detection device - Google Patents

Infrared modulation photacoustic spectroscopic gas detection device Download PDF

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Publication number
CN102519882A
CN102519882A CN2011104521678A CN201110452167A CN102519882A CN 102519882 A CN102519882 A CN 102519882A CN 2011104521678 A CN2011104521678 A CN 2011104521678A CN 201110452167 A CN201110452167 A CN 201110452167A CN 102519882 A CN102519882 A CN 102519882A
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CN
China
Prior art keywords
optoacoustic
gas
chamber
resonant cavity
photoacoustic
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CN2011104521678A
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尹毅
刘杰
王志浩
王俏华
李喆
王桃
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Kunshan He Zhi Electric Appliance Equipment Co Ltd
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Kunshan He Zhi Electric Appliance Equipment Co Ltd
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Abstract

The invention discloses an infrared modulation photacoustic spectroscopic gas detection device, which comprises a light source module, a photoacoustic cavity module arranged aside the light source module, and a data collection and amplification module which is connected with the circuit of the photoacoustic cavity module, wherein the photoacoustic cavity module comprises a photoacoustic spectroscopic system, a resonant cavity, a microphone, a window, a gas inlet of a photoacoustic cavity and a gas outlet of the photoacoustic cavity; the resonant cavity is arranged in the photoacoustic spectroscopic system, and is arranged on the light path which is sent by the light source module; the microphone is close to and is arranged adjacent to the resonant cavity; the window is arranged on the side wall of the photoacoustic spectroscopic system, and is arranged on the light path which is sent by the light source module; the gas inlet of the photoacoustic cavity is arranged on the side wall of the photoacoustic spectroscopic system, and is connected with the gas inlet of the resonant cavity through a gas pipe; and the gas outlet of the photoacoustic cavity is arranged on the side wall of the photoacoustic spectroscopic system, and is connected with the gas outlet of the resonant cavity through a gas pipe. The invention provides a method and a system which utilize the photacoustic spectroscopy to detect the variable gas content, the structure is simple, the detection precision is high, the speed is quick, the maintenance amount is small, the online detection can be carried out for a long time, the cost is saved, and the operation efficiency of a transformer is greatly improved.

Description

Infrared modulation optoacoustic spectroscopy gas-detecting device
Technical field
The present invention relates to a kind of exact science detecting instrument that is widely used in a plurality of fields such as physics, chemistry, biology, medical science, chemical industry, environmental protection, material science, be specifically related to a kind of infrared modulation optoacoustic spectroscopy gas-detecting device that gas content detects that is used for.
Background technology
Detection technique is the important component part of sciemtifec and technical sphere.We can say that each of development in science and technology goes on foot the detection technique under cooperation, the especially extreme condition that all be unable to do without detection technique, become the important means of the in-depth knowledge of natural environment.
In recent decades, along with the fast development of electronic technology, it mostly is to do the electric weight conversion through various sensors that various weak physical quantitys (like the low light level, light current, weak magnetic) measurements have had significant progress, its detection method, makes measuring object convert electric weight to.Basic skills has: coherent measurement method, the average time domain method of repeating signal, the statistical average method of discrete signal and Computer Processing method etc.But since the fluctuation of weak signal itself, the influence of sensor itself and measuring instrument noise etc., and the sensitivity of detection and accuracy have received great restriction.In recent years, the scientists of various countries has been carried out a large amount of extensive and deep researchs to optoacoustic spectroscopy.People just can analyze and research to various characteristicses such as the power of material, heat, sound, light, magnetic through detecting sound wave and thermal effect, and this detection is applicable to the sample of nearly all type, even can also carry out the inferior surperficial Non-Destructive Testing and the imaging of sample.This method has successfully solved and had used the masty difficult problem of classic method in the past; Thereby be widely used in a plurality of fields such as physics, chemistry, biology, medical science, chemical industry, environmental protection, material science, become crucial detection and analysis means in the scientific research.
Optoacoustic spectroscopy detects why to have and so develops rapidly and obtain increasingly extensive application, is to be determined by itself characteristics.Compare with common spectral measurement, the photoacoustic signal that optoacoustic spectroscopy detects directly depends on the size of material absorbing luminous energy, and reflected light, scattered light are very little to the interference of the detection of optoacoustic; Therefore, for weak signal, then can improve the signal to noise ratio (S/N ratio) of detection through the way that increases incident optical power; Simultaneously, it still is the unique method that can use test samples section absorption spectrum.In photo-acoustic detection, sample itself is a measured matter, is again the detecting device that absorbs light wave, therefore can in a humorous scope of very wide ripple, study, and needn't change detection system, brings great convenience to practical operation.Optoacoustic effect is the extremely sensitive and highly effective method of research material fluorescence, photoelectricity and photochemistry; This is because the extraneous projectile energy that optoacoustic information has been material absorbing after modulating; Transitting to low-energy state by excited state produces; Therefore, the radiative process after it and material are excited, photochemistry etc. are complementary, thereby have improved the sensitivity that detects greatly.
Summary of the invention
The present invention provides a kind of infrared modulation optoacoustic spectroscopy gas-detecting device; It is based on photocaustic spectroscopy; Utilize the high strength power and the monochromaticity laser light sound spectrum of LASER Light Source can reach very high detection sensitivity and resolution, all higher than the detection sensitivity and the degree of accuracy of traditional sensors.
For realizing above-mentioned purpose, the present invention provides a kind of infrared modulation optoacoustic spectroscopy gas-detecting device, is characterized in that this device comprises light source module, is arranged on the other optoacoustic chamber module of light source module, the data aggregation amplification module that is connected with optoacoustic chamber modular circuit;
Above-mentioned optoacoustic chamber module comprises:
The optoacoustic spectroscopy system;
Be arranged on the intrasystem resonant cavity of optoacoustic spectroscopy, it is arranged on the light path that light source module sends;
Microphone, it fits tightly the resonant cavity setting;
Be arranged on the window on the optoacoustic spectroscopy system sidewall, it is arranged on the light path that light source module sends;
Be arranged on the optoacoustic chamber air intake on the optoacoustic spectroscopy system sidewall, it connects the air intake opening of resonant cavity through tracheae; And,
Be arranged on the gas outlet, optoacoustic chamber on the optoacoustic spectroscopy system sidewall, it connects the gas outlet of resonant cavity through tracheae.
Above-mentioned light source module comprises spherical reflector, infrared light supply, chopper wheel, the filter disc that is successively set on this light source module institute output light path place straight line; This filter disc is with respect to described window setting;
Above-mentioned chopper wheel and filter disc circuit respectively are connected with stepper motor.
Above-mentioned data aggregation amplification module comprises the prime amplifier that is connected with microphonic circuit of output terminal, and the lock-in amplifier that is connected with the prime amplifier circuit of output terminal; The circuit of output terminal of this lock-in amplifier connects follow-up treatment facility.
This device also includes surge chamber, and its gas outlet connects optoacoustic chamber air intake, and the air intake opening of this surge chamber connects tested sample air.
This device also includes vacuum pump, and its air intake opening connects gas outlet, optoacoustic chamber.
The air intake opening of above-mentioned surge chamber and place, gas outlet also are respectively equipped with some solenoid valves.
The air intake opening place of above-mentioned vacuum pump also is provided with solenoid valve.
Above-mentioned optoacoustic chamber air intake and gas outlet, optoacoustic chamber are arranged on the acoustic pressure node place in the optoacoustic spectroscopy system.
Above-mentioned microphone is arranged on the antinodal point of resonant cavity.
Adopt the concentration of photocaustic spectroscopy measurement gas, open solenoid valve, import resonant cavity to sample air via surge chamber through vacuum pump; Close each solenoid valve, with the sample air in the infrared radiation resonant cavity of infrared light supply transmission, gas is through the absorbing light pulse; Produce sound wave, microphone detects its intensity, transfers electric signal to; After this signal passes through prime amplifier and lock-in amplifier, transfer to subsequent processing device lab for analysis of gas content and storage.
Infrared modulation optoacoustic spectroscopy gas-detecting device of the present invention is compared with prior art, and its advantage is that the present invention uses optoacoustic spectroscopy to detect the method and system that becomes gas content, and method is reasonable; Simple in structure, reliable, the detected gas kind is many, and accuracy of detection is high; Speed is fast, and is workable, can shorten the obstacle time, and maintenance is little; Can long-term online detection, cheap, use manpower and material resources sparingly, can greatly improve the operational efficiency of transformer.
Description of drawings
Fig. 1 is the structural representation of infrared modulation optoacoustic spectroscopy gas-detecting device of the present invention.
Embodiment
Specify embodiments of the invention below in conjunction with accompanying drawing.
As shown in Figure 1, a kind of infrared modulation optoacoustic spectroscopy gas-detecting device, this pick-up unit comprise light source module, optoacoustic chamber module, data aggregation amplification module.
Light source module comprises spherical reflector 1, infrared light supply 2, chopper wheel 3 and the filter disc 4 that is arranged on the straight line light path, and two stepper motors 12 that are connected with optical filter 4 circuit with chopper wheel 3 respectively.
The incoherent wide light source that infrared light supply 2 becomes when adopting intensity, model is MIRL17-900, wavelength coverage is 1-20um.
The modulating frequency of chopper wheel 3 is 20HZ.
Filter disc 4 is made as and is circle, which is provided with 6 optical filters, and this optical filter adopts the logical type infrared fileter of band, and filter material is a germanium.The characteristic wavelength of optical filter is respectively 7.97um, 11.61um, 9.42um, 12.77um, 4.65um, 14.97um.These 6 circular filters are separately positioned on equidistant symmetrical some place apart from filter disc 4 axle center.
The light path of the light that infrared light supply 2 is sent is a straight line, and spherical reflector 1, infrared light supply 2, chopper wheel 3, filter disc 4 all are successively set on the formed straight line of this light path.Spherical reflector 1 is separately positioned on infrared light supply 2 both sides with chopper wheel 3, and filter disc 4 is arranged on the opposite side of chopper wheel 3.The independent setting that keeps at a certain distance away each other of this spherical reflector 1, infrared light supply 2, chopper wheel 3, filter disc 4.
Chopper wheel 3 is connected a stepper motor 12 with filter disc 4 difference circuit; This stepper motor 12 adopts miniature pulse motor; Its circuit connects control main board, through receiving the instruction operation that control main board is sent, drives chopper wheel 3 by stepper motor 12 and moves to regulate light path with filter disc 4.
Optoacoustic chamber module comprises optoacoustic spectroscopy system 13, is separately positioned on window 5, optoacoustic chamber air intake 6 and gas outlet, optoacoustic chamber 7 on optoacoustic spectroscopy system 13 sidewalls, and the resonant cavity 9 and microphone 8 that are arranged on optoacoustic spectroscopy system 13 inside.Fit tightly between this resonant cavity 9 and the microphone 8 together and be provided with.
It is the brass shielding box of 45mm that optoacoustic spectroscopy system 13 adopts length, to sound, light and electromagnetic screen.This optoacoustic spectroscopy system 13 adopts differential type working methods, and the structure of differential type optoacoustic spectroscopy system is trapezoidal, and non-differential type optoacoustic spectroscopy system architecture is square, the trapezium structure that is in operation stressed evenly, shock resistance is superior to square structure, can suppress common-mode noise.
Window 5 is pressed Brewster angle and is arranged, and window 5 is arranged on the linear light path that infrared light supply 2 sent.Window 5 surfaces need to guarantee clean.
Resonant cavity 9 concerns the detection sensitivity and detection effect of whole optoacoustic spectroscopy module as the core of optoacoustic spectroscopy module.Consider to let the volume in optoacoustic chamber as far as possible little that isolated noise result is good, reduces background signal; Guarantee sealing, after the factor such as inner cavity surface is smooth, this resonant cavity 9 adopts disresonance type optoacoustic chambeies; Being made as radius is the cylindrical of 10mm, and long is 45mm, and volume is 5ml.The inwall of this resonant cavity 9 adopts the organic glass of high thermal conductivity coefficient and reflectivity to process, and outer wall all adopts the bigger brass of thermal conductivity coefficient to process.Unaffected for guaranteeing light path simultaneously, the inwall of resonant cavity 9 needs smooth surface, guarantees cleaning.
Microphone 8 is as the photo-acoustic detection device, and microphone 8 adopts capacitor type electret microphone among the present invention, and output impedance is 4K Ω, and the typical sensitivity to humidity when 1000hz is 0.06db/zrh.Its frequency of sensing is 20HZ.Its sensitivity drift at normal temperatures can guarantee that in 200 years less than 1%, measuring accuracy can reach 10mv/mp, has high sensitivity and noise resisting ability.This microphone 8 is arranged on the antinodal point of resonant cavity 9, can improve the signal amplitude and inhibition noise of microphone 8 so greatly.
On the sidewall of optoacoustic spectroscopy system 13, at the optoacoustic chamber air intake 6 and optoacoustic chamber gas outlet 7 of acoustic pressure node place's perforate as the flowing gas sample.Because gas is stressed in the process of resonant cavity 9 internal flows; Between gas and gas; 9 of gas and resonant cavities all can rub; These all are the factors of inducing turbulence, and place (the being acoustic pressure node place) punching that is chosen in resonant cavity 9 0.628 times of resonant cavity 9 radius apart from two ends can effectively suppress turbulence noise as optoacoustic chamber air intake 6 and gas outlet, optoacoustic chamber 7.In optoacoustic spectroscopy system 13 inside, this optoacoustic chamber air intake 6 and gas outlet, optoacoustic chamber 7 adopt draft tube to be connected with escape pipe respectively with between the resonant cavity 9.Draft tube between optoacoustic chamber air intake 6 and the resonant cavity 9; Its interface on resonant cavity 9; Selection is arranged on the 0.628R place of resonant cavity 9 radiuses; Wherein R represents the radius of resonant cavity 9, and the position that is provided with of optoacoustic chamber air intake 6 and gas outlet, optoacoustic chamber 7 is apart from the 0.628 times of radius in resonant cavity 9 two ends.Equally, the escape pipe between gas outlet 7, optoacoustic chamber and the resonant cavity 9, its interface on resonant cavity 9, selection is arranged on the 0.628R place of resonant cavity 9 radiuses.In optoacoustic spectroscopy system 13 outsides, optoacoustic chamber air intake 6 is connected with follow-up equipment with outside preposition equipment through tracheae respectively with gas outlet, optoacoustic chamber 7.
As a whole structure is established in microphone 8, resonant cavity 9, window 5, optoacoustic chamber air intake 6 and gas outlet, optoacoustic chamber 7 that this optoacoustic spectroscopy system 13 is inner with it.
This device also includes gas buffer chamber 14; The inlet end of optoacoustic chamber air intake 6 connects the gas outlet of gas buffer chamber 14 through tracheae; This gas buffer chamber 14 is used for the tested gas that gets into optoacoustic spectroscopy system 13 is temporarily stored and cushions, the ground unrest of effective isolation window 5.Be provided with the first solenoid valve V1 at the air intake opening place of gas buffer chamber 14; The sample air that the air intake opening of gas buffer chamber 14 connect to need detects through the first solenoid valve V1, this first solenoid valve V1 is used for pilot-gas surge chamber 14 and closes with the gas circuit connected sum between the sample air that needs detection.Place, 14 gas outlets, gas buffer chamber is provided with the second solenoid valve V2, closes through the gas circuit connected sum that this second solenoid valve V2 connection optoacoustic chamber air intake 6, the second solenoid valve V2 are used between pilot-gas surge chamber 14 and the optoacoustic chamber air intake 6.
This device also includes vacuum pump 15, and the gas outlet of gas outlet, optoacoustic chamber 7 connects vacuum pump 15 through tracheae, and this vacuum pump 15 is used to bleed, and tested gas is introduced in the resonant cavity 9.Simultaneously through setting vacuum pump 15, the restricting flow velocity range of the gases of circulation in the optoacoustic spectroscopy system 13 is set in less than 100ml/min.The air intake opening place of this vacuum pump 15 is provided with the 3rd solenoid valve V3, and the gas circuit connected sum between control vacuum pump 15 and the resonant cavity 9 is closed.
The data aggregation amplification module includes: the prime amplifier 10 that is connected with the circuit of output terminal of microphone 8; And the lock-in amplifier 11 that is connected with the circuit of output terminal of this prime amplifier 10, lock-in amplifier 11 circuit connect follow-up treatment facility (as: computing machine).This prime amplifier 10 is used for suppressing to disturb with lock-in amplifier 11.Microphone 8 transfers to prime amplifier 10 with its detection signal to carry out signal method and suppresses interference with lock-in amplifier 11.
The principle of work of infrared modulation optoacoustic spectroscopy gas-detecting device of the present invention is following:
Open the second solenoid valve V2, the first solenoid valve V1 and the 3rd solenoid valve V3 of gas circuit; Vacuum pump 15 is bled; Make sample air get into surge chamber 14; And import to the resonant cavity 9 through optoacoustic chamber air intake 6 from surge chamber 14,, sample air closes the second solenoid valve V2, the first solenoid valve V1 and the 3rd solenoid valve V3 after getting into resonant cavity 9.Adopt the concentration of photocaustic spectroscopy measurement gas then; Infrared light supply 2 sends infrared light, and with parallel beam process chopper wheel 3, chopper wheel 3 rotates under the drive of stepper motor 12 behind spherical reflector 1; Parallel beam is cut into interrupted light beam by continuous quilt; Interrupted infrared beam is through filter disc 4, and this filter disc 4 rotates under the drive of stepper motor 12, and this process is accomplished beam split.Separated interrupted infrared light is injected in the resonant cavity 9 through window 5, the appearance gas in the pulse optical radiation resonant cavity 9 of the infrared light that sends with infrared light supply 2.The light at each the gas characteristic frequency place after modulation is with the modulating frequency gas molecule of sample air in the excitation resonance chamber 9 repeatedly; The gas molecule that is excited can be got back to ground state through radiation or non-radiation dual mode, and for non-radiative relaxation pressure process, the energy of system finally is converted into the translation energy of molecule; Cause spot heating; Thereby in resonant cavity 9, produce sound wave, collect through microphone 8 and detect its intensity, and change acoustical signal into electric signal; Transfer to prime amplifier 10; Electric signal is transferred to above the computing machine behind prime amplifier 10 and lock-in amplifier 11 and analyzes, and accurately measures each gaseous species and concentration, also can adopt high precision digital-to-analog converter and DSP data transmitter to gather data and storage in this signal.One take turns the test finish after, under the effect of vacuum pump 15, the waste gas in the optoacoustic chamber 9 is discharged.
Although content of the present invention has been done detailed introduction through above-mentioned preferred embodiment, will be appreciated that above-mentioned description should not be considered to limitation of the present invention.After those skilled in the art have read foregoing, for multiple modification of the present invention with to substitute all will be conspicuous.Therefore, protection scope of the present invention should be limited appended claim.

Claims (9)

1. an infrared modulation optoacoustic spectroscopy gas-detecting device is characterized in that this device comprises light source module, is arranged on the other optoacoustic chamber module of light source module, the data aggregation amplification module that is connected with optoacoustic chamber modular circuit;
Described optoacoustic chamber module comprises:
Optoacoustic spectroscopy system (13);
Be arranged on the resonant cavity (9) in the said optoacoustic spectroscopy system (13), it is arranged on the light path that said light source module sends;
Microphone (8), it fits tightly said resonant cavity (9) setting;
Be arranged on the window (5) on optoacoustic spectroscopy system (13) sidewall, it is arranged on the light path that said light source module sends;
Be arranged on the optoacoustic chamber air intake (6) on optoacoustic spectroscopy system (13) sidewall, it connects the air intake opening of said resonant cavity (9) through tracheae; And,
Be arranged on the gas outlet, optoacoustic chamber (7) on optoacoustic spectroscopy system (13) sidewall, it connects the gas outlet of said resonant cavity (9) through tracheae.
2. infrared modulation optoacoustic spectroscopy gas-detecting device as claimed in claim 1; It is characterized in that described light source module comprises spherical reflector (1), infrared light supply (2), chopper wheel (3), the filter disc (4) that is successively set on this light source module institute output light path place straight line; This filter disc (4) is provided with respect to described window (5);
Described chopper wheel (3) and filter disc (4) circuit respectively are connected with stepper motor (12).
3. infrared modulation optoacoustic spectroscopy gas-detecting device as claimed in claim 1; It is characterized in that; Described data aggregation amplification module comprises the prime amplifier (10) that is connected with the circuit of output terminal of said microphone (8), and the lock-in amplifier (11) that is connected with said prime amplifier (10) circuit of output terminal; The circuit of output terminal of this lock-in amplifier (11) connects follow-up treatment facility.
4. infrared modulation optoacoustic spectroscopy gas-detecting device as claimed in claim 1; It is characterized in that; This device also includes surge chamber (14), and its gas outlet connects described optoacoustic chamber air intake (6), and the air intake opening of this surge chamber (14) connects tested sample air.
5. infrared modulation optoacoustic spectroscopy gas-detecting device as claimed in claim 1 is characterized in that this device also includes vacuum pump (15), and its air intake opening connects gas outlet, described optoacoustic chamber (7).
6. infrared modulation optoacoustic spectroscopy gas-detecting device as claimed in claim 4 is characterized in that, the air intake opening of described surge chamber (14) and place, gas outlet also are respectively equipped with some solenoid valves.
7. infrared modulation optoacoustic spectroscopy gas-detecting device as claimed in claim 4 is characterized in that the air intake opening place of described vacuum pump (15) also is provided with solenoid valve.
8. infrared modulation optoacoustic spectroscopy gas-detecting device as claimed in claim 1 is characterized in that, described optoacoustic chamber air intake (6) and gas outlet, optoacoustic chamber (7) are arranged on the acoustic pressure node place in the optoacoustic spectroscopy system (13).
9. infrared modulation optoacoustic spectroscopy gas-detecting device as claimed in claim 1 is characterized in that described microphone (8) is arranged on the antinodal point of resonant cavity (9).
CN2011104521678A 2011-12-30 2011-12-30 Infrared modulation photacoustic spectroscopic gas detection device Pending CN102519882A (en)

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CN105548024A (en) * 2016-01-14 2016-05-04 湖北索瑞电气有限公司 Photoacoustic spectrometry gas detection device based on pulse infrared light source
CN106124710A (en) * 2016-08-12 2016-11-16 安徽中杰信息科技有限公司 Escaping gas concentration inspection method
CN108287142A (en) * 2018-01-26 2018-07-17 南昌航空大学 Gas real-time detection apparatus and method based on infrared photoacoustic spectra technology
CN113281263A (en) * 2021-04-19 2021-08-20 国网江苏省电力有限公司检修分公司 Differential photoacoustic trace gas detection device based on T-shaped photoacoustic cell
CN114839148A (en) * 2022-03-29 2022-08-02 电子科技大学 Miniature infrared photoacoustic CO 2 Sensor and detection method
WO2023184610A1 (en) * 2022-03-29 2023-10-05 安徽理工大学 Real-time mine dust detection system and method based on double photoacoustic spectrums

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CN113281263A (en) * 2021-04-19 2021-08-20 国网江苏省电力有限公司检修分公司 Differential photoacoustic trace gas detection device based on T-shaped photoacoustic cell
CN114839148A (en) * 2022-03-29 2022-08-02 电子科技大学 Miniature infrared photoacoustic CO 2 Sensor and detection method
WO2023184610A1 (en) * 2022-03-29 2023-10-05 安徽理工大学 Real-time mine dust detection system and method based on double photoacoustic spectrums

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Application publication date: 20120627