CN102517497A - Alloy target material in vertical magnetic recording medium and preparation method for alloy target material - Google Patents
Alloy target material in vertical magnetic recording medium and preparation method for alloy target material Download PDFInfo
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- CN102517497A CN102517497A CN2011104402077A CN201110440207A CN102517497A CN 102517497 A CN102517497 A CN 102517497A CN 2011104402077 A CN2011104402077 A CN 2011104402077A CN 201110440207 A CN201110440207 A CN 201110440207A CN 102517497 A CN102517497 A CN 102517497A
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Abstract
The invention relates to an alloy target material in a vertical magnetic recording medium. The alloy target material is characterized in that: the atomic ratio composition formula is (CoX-Fe100-X)100-(Y+Z)-TbY-MZ, wherein x is more than or equal to 5 and less than or equal to 20; Y is more than or equal to 15 and less than or equal to 40; Z is more than or equal to 2 and less than or equal to 15; M is one or two of Ta, Nb and Zr; the atomic ratio of Fe is 40 to 70 percent; the atomic ratio of Co is 5 to 30 percent; the atomic ratio of Tb is 20 to 40 percent; and the atomic ratio of one or two of Ta, Nb and Zr is 2 to 15 percent. The invention provides the alloy target material applied to a soft magnetic film of the vertical magnetic recording medium. The Tb is distributed in a microstructure of the Fe-Co-based alloy target material uniformly by a smelting method and the structure can be controlled in a rolling manner at later stage, so that the alloy target material with high purity, uniform components, uniform microstructure, high noncrystalline performance and anisotropy is obtained.
Description
Technical field
The present invention relates to a kind of alloy sputtering target that is used for preparing the soft magnetism rete of perpendicular magnetic recording medium.The invention still further relates to a kind of method for preparing this alloy target material.
Background technology
The development of Along with computer technology, people need the increasingly high density of data storage, and the magnetic recording storage is the topmost mode of data storage, and this just requires in the magneticsubstance area of single recorded bit more and more littler.Therefore, the raising of magnetic recording density is faced with great challenge, wherein most importantly need overcome the challenge that the ultra paramagnetic limit is brought exactly, and this just requires to adopt perpendicular magnetic recording, because perpendicular magnetic recording can be broken through 150GB/in
2Record surface density.Perpendicular magnetic recording medium is an important ring of realizing the vertical magnetic storage of VHD; Compare with traditional longitudinal magnetic recording medium, perpendicular magnetic recording can reach more high record density, in the longitudinal magnetic recording system; Medium is magnetized on the direction parallel with dielectric surface; In the perpendicular magnetic recording system, with the vertical direction of dielectric surface on be magnetized, can realize further reducing of unit record position.
Perpendicular magnetic recording materials need possess following characteristics: the coercive force that (1) is high: be the sign of magnetic moment upset difficulty or ease, for the data stability of under the influence of thermal perturbation and stray field, holding the record, necessarily require high coercive force; (2) high squareness ratio (Mr/Ms) and moderate saturation magnetization: the ratio of high residual magnetization (Mr) and residual magnetization (Ms); Be to satisfy the enough big read output signal and the inevitable requirement of SNR, require the squareness ratio of material all will be now more than 0.95.Too high saturation magnetization can reduce the SNR of read output signal; In order to obtain big read output signal, the material of low saturation magnetization is thicker relatively, and this has proposed extra requirement to growth technique; And increased the difficulty of writing information, done the raising that also is unfavorable for area density like this; (3) enough low coupling between the magnetic crystal grain: in the preparation technology of magnetic recording media, the uncoupling between the magnetic crystal grain is an important problem.The coupling that intercrystalline is strong excessively and can reduce SNR, and when a recorded bit writing information, can have influence on recorded bit information on every side; (4) uniform, the little magnetic crystal grain of diameter Distribution: the excessive and inhomogeneous meeting of magnetic crystal grain diameter causes SNR to reduce; In addition, little magnetic particle also is the inevitable choice that improves area density; (5) moderate Tc: consider hot auxiliary perpendicular magnetic recording; The Tc of magneticsubstance should be moderate; Because if the Curie temperature of magneticsubstance is too high; Then under this technology Applicable temperature (about) as 150 ℃, coercive force is not obvious with variation of temperature, does not reach hot auxiliary effect; And if the Curie temperature of magneticsubstance is low excessively, its poor heat stability, because hard disk can generate heat in use, recorded information is lost easily.
In order to obtain to have the high performance vertical magnetic recording thin film material of above-mentioned character; For the alloy target material that is used to make soft magnetic film; Need possess following performance; The good film of ability obtained performance: (1) requires alloy target material that certain purity must be arranged, and generally speaking, requires purity to be higher than 99.9%; (2) alloying constituent that requires alloy target material is being evenly distributed at each position; (3) microtexture that requires alloy target material is at each position uniform distribution; (4) require alloy target material to have higher magnetic susceptibility, that is, have more magneticline of force can pass target, general magnetic susceptibility requires greater than 50%.
Chinese patent CN102149836A provides a kind of alloy of the soft magnetism rete in perpendicular magnetic recording medium, and this alloy comprises following in atom %: Fe:10 ~ 45%; Ni:1 ~ 25%; Among Zr, Hf, Nb, Ta and the B one or more: the Zr+Hf+Nb+Ta+B/2 sum is 5 ~ 10%, and wherein B is 0 ~ 7% amount; And among Al and the Cr one or more: the Al+Cr sum is 0 ~ 5%; And as the Co and the unavoidable impurities of surplus: more than 37%, and said alloy satisfies following with atomic ratio measuring: Fe/ (Fe+Co+Ni): 0.1 ~ 0.5; And Ni/ (Fe+Co+Ni): 0.1 ~ 0.25.The characteristics of this patent are that the solidity to corrosion of alloy target material is good, the characteristics that magnetic susceptibility is high, owing to use the powder metallurgy sintered method manufacturing and the raw material of selection, the different performance of each of microtexture is less.
Chinese patent CN1995443A provides a kind of method of manufacture of cobalt base alloy target for vertical magnetic recording medium soft magnetization bottom; Comprise the steps; Measure Co, Ta, three kinds of element raw materials of Zr and put into crucible; Carry out vacuum melting and be cast into ingot casting, the gained ingot casting is carried out hot isostatic pressing, after carry out hot rolling deformation; The hot rolling ingot is carried out the target that machining makes desired shape.The characteristics of this patent have been to guarantee the microtexture performance of material, the characteristics that magnetic susceptibility is high, but technological process is still comparatively complicated.
Summary of the invention
The objective of the invention is to overcome above-mentioned deficiency; A kind of alloy target material that is used at the soft magnetism rete of perpendicular magnetic recording medium is provided; This alloy target material has high magnetic susceptibility, moderate magnetic saturation intensity, amorphism better and have preferably characteristics such as erosion resistance, and this target can be used for magnetron sputtering effectively.
The objective of the invention is to realize like this: the alloy target material in a kind of perpendicular magnetic recording medium, said alloy target material specifically are a kind of Tb-Fe-Co base alloy target materials, and the composition formula of its atomic ratio is (Co
X-Fe
100-X)
100-(Y+Z)-Tb
Y-M
Z, wherein, 5≤X≤20; 15≤Y≤40,2≤Z≤15, one or both elements of the M element in the said composition formula for from Ta, Nb, Zr, selecting; Wherein: the atomic ratio of Fe is 40% ~ 70%; The atomic ratio of Co is 5% ~ 30%, and the atomic ratio of Tb is 20% ~ 40%, and one or both atomic ratio is 2% ~ 15% among Ta, Nb, the Zr.
The present invention also provides a kind of method for preparing above-mentioned alloy target material, said method comprising the steps of:
(1) constituent content of pressing the Tb-Fe-Co base alloy target material that is designed calculates required Tb, Fe, Co, the weight of element more than three kinds or three kinds, requires the purity of all raw materials all to be higher than 99.9%;
(2) raw material of (1) step being got is put into vacuum melting furnace, and melting also is cast into ingot, and smelting temperature is 1400 ~ 1600 ℃, earlier vacuum tightness is evacuated to 6.67 * 10 before the melting
-3Pa feeds the Ar shielding gas then, and the vacuum tightness during melting is 1.0 * 10
-1Pa;
(3) (2) step gained molten alloy ingot is carried out a low temperature hot rolling deformation process and twice high temperature hot rolling deformation process, the low temperature hot-rolled temperature is 300 ~ 500 ℃, and the high temperature hot-rolled temperature is at 700 ~ 1150 ℃, requires when rolling pass deformation rate less than 30%;
(4) ingot with (3) step gained carries out the target that machining makes desired shape
Compared with prior art, the invention has the beneficial effects as follows:
The present invention provides a kind of alloy target material that is used at the soft magnetism rete of perpendicular magnetic recording medium; Method with melting lets Tb be evenly distributed in the microtexture of Fe-Co base alloy target material; The mode of rolling through the later stage; The control weave construction has obtained that purity is high, composition is even, microtexture is even, good, the anisotropic alloy target material of noncrystalline performance.
Embodiment
The present invention relates to a kind of Tb-Fe-Co base alloy target material, the composition formula of its atomic ratio is (Co
X-Fe
100-X)
100-(Y+Z)-Tb
Y-M
Z, wherein, 5≤X≤20,15≤Y≤40,2≤Z≤15, the M element in the said composition formula is the sputtering target material of one or both elements of from Ta, Nb, Zr, selecting.In microtexture, Tb, Ta, Nb, Zr be fine be evenly distributed on Fe be main body alloy composition mutually in.
Ferromagnetic material Fe, Ni, Co monocrystalline; Magnetzation curve along different crystalline axis direction has nothing in common with each other; Like the easy magnetization of Co single crystal in [0001] direction, this axle be an easy magnetizing axis, magnetizes and [1010] crystalline axis direction is the most difficult; Be hard axis, this anisotropy relevant with crystalline structure is magnetocrystalline anisotropy.The characteristics of alloy target material then are according to properties of materials, keep outside the distinctive magnetic property of material, also must guarantee certain magnetic susceptibility, make and carry out sputter more effectively, form high-quality magnetic recording thin film.The magneticanisotropy of rare earth atom is closely related with the perpendicular magnetic anisotropy of inducting of non-crystalline state RE-TM metal.Heavy rare earth metal has big magnetocrystalline anisotropy, derives from the effect of 4f orbital magnetic moment and crystal field, than the big 100-1000 of situation of Fe, Co doubly.So the anisotropy energy of the Tb that monatomic anisotropy energy is big, Dy and the induced amorphous structure of Co is also big.Add high Tb content in the alloy target material, let Tb be evenly distributed in the microtexture of Fe-Co base alloy target material, can reduce the permeance of alloy target material.From the angle of erosion resistance, the Fe-Co that adds heavy rare earth metal is an alloy, Fe content atomic ratio be lower than 33% will reduce alloy target material saturation magnetic flux density, it will be to make the solidity to corrosion variation of alloy target material that Fe content atomic ratio is higher than 72%.The corrosion resisting property of Co is better than iron, increases the content of Co, can strengthen the corrosion resisting property of alloy target material.Ta, Nb, Zr have and Fe, eutectic phasor that Co is relevant, and form noncrystalline phase easily, to improve magnetic susceptibility.
Consider magnetic susceptibility, saturation magnetic flux density and the solidity to corrosion of alloy target material; Based on issuable master alloy in the process; Preferably, in order to improve the saturation magnetic flux density of alloy target material, the atomic ratio of confirming Fe is 40% ~ 70%; Do not lose saturation magnetic flux density for the solidity to corrosion that improves alloy target material, the atomic ratio of Co is 5% ~ 30%; For improving the magnetic susceptibility and the amorphism of target, the atomic ratio of Tb is 20% ~ 40%, and in order to increase the noncrystalline eutectic phase of alloy target material, one or both atomic ratio is 2% ~ 15% among Ta, Nb, the Zr.
For the microtexture uniform distribution that improves alloy target material, high magnetic susceptibility, the present invention also provides a kind of method for preparing above-mentioned Tb-Fe-Co base alloy target material, said method comprising the steps of:
(1) constituent content of pressing the Tb-Fe-Co base alloy target material that is designed calculates required Tb, Fe, Co, the weight of element more than three kinds or three kinds, requires the purity of all raw materials all to be higher than 99.9%;
(2) raw material of (1) step being got is put into vacuum melting furnace, and melting also is cast into ingot, and smelting temperature is 1400 ~ 1600 ℃, earlier vacuum tightness is evacuated to 6.67 * 10 before the melting
-3Pa feeds the Ar shielding gas then, and the vacuum tightness during melting is 1.0 * 10
-1Pa;
(3) (2) step gained molten alloy ingot is carried out a low temperature hot rolling deformation process and twice high temperature hot rolling deformation process, the low temperature hot-rolled temperature is 300 ~ 500 ℃, and the high temperature hot-rolled temperature is at 700 ~ 1150 ℃, requires when rolling pass deformation rate less than 30%;
(4) ingot with (3) step gained carries out the target that machining makes desired shape.
Embodiment 1
(1) constituent content of pressing the Tb-Fe-Co base alloy target material that is designed calculates the weight of required Tb, Fe, three kinds of elements of Co, atomic percent Tb:Fe:Co=22:65:13, and the purity of Tb is 99.9%, and Fe is 99.99%, and Co is 99.99%;
(2) raw material of (1) step being got is put into vacuum melting furnace, and melting also is cast into ingot, and smelting temperature is 1500 ℃, earlier vacuum tightness is evacuated to 6.67 * 10 before the melting
-3Pa feeds Ar gas then, and the vacuum tightness during melting is 1.0 * 10
-1Pa;
(3) (2) step gained molten alloy ingot is carried out a low temperature hot rolling deformation process and twice high temperature hot rolling deformation process, the low temperature hot-rolled temperature is 350 ℃, and the high temperature hot-rolled temperature is at 800 ℃, and pass deformation rate is 20% when rolling;
(4) ingot with (3) step gained carries out the target that machining makes desired shape.
Comparison example 2
(1) constituent content of pressing the Tb-Fe-Co base alloy target material that is designed calculates the weight of required Tb, Fe, three kinds of elements of Co, atomic percent Tb:Fe:Co=8:65:27, and the purity of Tb is 99.9%, and Fe is 99.99%, and Co is 99.99%;
(2) raw material of (1) step being got is put into vacuum melting furnace, and melting also is cast into ingot, and smelting temperature is 1500 ℃, earlier vacuum tightness is evacuated to 6.67 * 10 before the melting
-3Pa feeds Ar gas then, and the vacuum tightness during melting is 1.0 * 10
-1Pa;
(3) (2) step gained molten alloy ingot is carried out a low temperature hot rolling deformation process and twice high temperature hot rolling deformation process, the low temperature hot-rolled temperature is 350 ℃, and the high temperature hot-rolled temperature is at 800 ℃, and pass deformation rate is 20% when rolling;
(4) ingot with (3) step gained carries out the target that machining makes desired shape.
Comparison example 3
(1) constituent content of pressing the alloy target material that is designed calculates the weight of required Tb, Fe, three kinds of elements of Zr, atomic percent Tb:Fe:Zr=22:65:13, and the purity of Tb is 99.9%, and Fe is 99.99%, and Zr is 99.99%;
(2) raw material of (1) step being got is put into vacuum melting furnace, and melting also is cast into ingot, and smelting temperature is 1550 ℃, earlier vacuum tightness is evacuated to 6.67 * 10 before the melting
-3Pa feeds Ar gas then, and the vacuum tightness during melting is 1.0 * 10
-1Pa;
(3) (2) step gained molten alloy ingot is carried out a low temperature hot rolling deformation process and twice high temperature hot rolling deformation process, the low temperature hot-rolled temperature is 400 ℃, and the high temperature hot-rolled temperature is at 900 ℃, and pass deformation rate is 15% when rolling;
(4) ingot with (3) step gained carries out the target that machining makes desired shape.
Embodiment 4
(1) constituent content of pressing the Tb-Fe-Co base alloy target material that is designed calculates the weight of required Tb, Fe, Co, four kinds of elements of Ta; Atomic percent Tb:Fe:Co:Ta=22:54:13:11, the purity of Tb is 99.9%, Fe is 99.99%; Co is 99.99%, and Ta is 99.99%;
(2) raw material of (1) step being got is put into vacuum melting furnace, and melting also is cast into ingot, and smelting temperature is 1550 ℃, earlier vacuum tightness is evacuated to 6.67 * 10 before the melting
-3Pa feeds Ar gas then, and the vacuum tightness during melting is 1.0 * 10
-1Pa;
(3) (2) step gained molten alloy ingot is carried out a low temperature hot rolling deformation process and twice high temperature hot rolling deformation process, the low temperature hot-rolled temperature is 400 ℃, and the high temperature hot-rolled temperature is at 900 ℃, and pass deformation rate is 15% when rolling;
(4) ingot with (3) step gained carries out the target that machining makes desired shape.
Embodiment 5
(1) constituent content of pressing the Tb-Fe-Co base alloy target material that is designed calculates the weight of required Tb, Fe, Co, four kinds of elements of Zr; Atomic percent Tb:Fe:Co:Zr=22:54:13:11, the purity of Tb is 99.9%, Fe is 99.99%; Co is 99.99%, and Zr is 99.99%;
(2) raw material of (1) step being got is put into vacuum melting furnace, and melting also is cast into ingot, and smelting temperature is 1550 ℃, earlier vacuum tightness is evacuated to 6.67 * 10 before the melting
-3Pa feeds Ar gas then, and the vacuum tightness during melting is 1.0 * 10
-1Pa;
(3) (2) step gained molten alloy ingot is carried out a low temperature hot rolling deformation process and twice high temperature hot rolling deformation process, the low temperature hot-rolled temperature is 400 ℃, and the high temperature hot-rolled temperature is at 900 ℃, and pass deformation rate is 15% when rolling;
(4) ingot with (3) step gained carries out the target that machining makes desired shape.
Embodiment 6
(1) constituent content of pressing the Tb-Fe-Co base alloy target material that is designed calculates the weight of required Tb, Fe, Co, Ta, five kinds of elements of Nb; Atomic percent Tb:Fe:Co:Ta, Nb=22:54:13:9:2; The purity of Tb is 99.9%, and Fe is 99.99%, and Co is 99.99%; Ta is 99.99%, and Nb is 99.99%;
(2) raw material of (1) step being got is put into vacuum melting furnace, and melting also is cast into ingot, and smelting temperature is 1550 ℃, earlier vacuum tightness is evacuated to 6.67 * 10 before the melting
-3Pa feeds Ar gas then, and the vacuum tightness during melting is 1.0 * 10
-1Pa;
(3) (2) step gained molten alloy ingot is carried out a low temperature hot rolling deformation process and twice high temperature hot rolling deformation process, the low temperature hot-rolled temperature is 400 ℃, and the high temperature hot-rolled temperature is at 900 ℃, and pass deformation rate is 15% when rolling;
(4) ingot with (3) step gained carries out the target that machining makes desired shape.
Claims (2)
1. the alloy target material in the perpendicular magnetic recording medium is characterized in that said alloy target material specifically is a kind of Tb-Fe-Co base alloy target material, and the composition formula of its atomic ratio is (Co
X-Fe
100-X)
100-(Y+Z)-Tb
Y-M
Z, wherein, 5≤X≤20; 15≤Y≤40,2≤Z≤15, one or both elements of the M element in the said composition formula for from Ta, Nb, Zr, selecting; Wherein: the atomic ratio of Fe is 40% ~ 70%; The atomic ratio of Co is 5% ~ 30%, and the atomic ratio of Tb is 20% ~ 40%, and one or both atomic ratio is 2% ~ 15% among Ta, Nb, the Zr.
2. method for preparing the described alloy target material of claim 1 is characterized in that said method comprising the steps of:
(1) constituent content of pressing the Tb-Fe-Co base alloy target material that is designed calculates required Tb, Fe, Co, the weight of element more than three kinds or three kinds, requires the purity of all raw materials all to be higher than 99.9%;
(2) raw material of (1) step being got is put into vacuum melting furnace, and melting also is cast into ingot, and smelting temperature is 1400 ~ 1600 ℃, earlier vacuum tightness is evacuated to 6.67 * 10 before the melting
-3Pa feeds the Ar shielding gas then, and the vacuum tightness during melting is 1.0 * 10
-1Pa;
(3) (2) step gained molten alloy ingot is carried out a low temperature hot rolling deformation process and twice high temperature hot rolling deformation process, the low temperature hot-rolled temperature is 300 ~ 500 ℃, and the high temperature hot-rolled temperature is at 700 ~ 1150 ℃, requires when rolling pass deformation rate less than 30%;
(4) ingot with (3) step gained carries out the target that machining makes desired shape.
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|---|---|---|---|
| CN2011104402077A CN102517497A (en) | 2011-12-26 | 2011-12-26 | Alloy target material in vertical magnetic recording medium and preparation method for alloy target material |
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|---|---|---|---|
| CN2011104402077A CN102517497A (en) | 2011-12-26 | 2011-12-26 | Alloy target material in vertical magnetic recording medium and preparation method for alloy target material |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112106134A (en) * | 2018-07-31 | 2020-12-18 | 田中贵金属工业株式会社 | Sputtering target for magnetic recording medium |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05271915A (en) * | 1992-03-24 | 1993-10-19 | Hitachi Metals Ltd | Target member for magneto-optical recording medium and its production |
| CN1995443A (en) * | 2006-12-27 | 2007-07-11 | 湖南中精伦金属材料有限公司 | Production method of cobalt base alloy target for vertical magnetic recording medium soft magnetization bottom |
-
2011
- 2011-12-26 CN CN2011104402077A patent/CN102517497A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05271915A (en) * | 1992-03-24 | 1993-10-19 | Hitachi Metals Ltd | Target member for magneto-optical recording medium and its production |
| CN1995443A (en) * | 2006-12-27 | 2007-07-11 | 湖南中精伦金属材料有限公司 | Production method of cobalt base alloy target for vertical magnetic recording medium soft magnetization bottom |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112106134A (en) * | 2018-07-31 | 2020-12-18 | 田中贵金属工业株式会社 | Sputtering target for magnetic recording medium |
| CN112106134B (en) * | 2018-07-31 | 2022-05-03 | 田中贵金属工业株式会社 | Sputtering target for magnetic recording medium |
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Application publication date: 20120627 |