CN102502043B - Sputtering target packaging box - Google Patents

Sputtering target packaging box Download PDF

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Publication number
CN102502043B
CN102502043B CN201110383244.9A CN201110383244A CN102502043B CN 102502043 B CN102502043 B CN 102502043B CN 201110383244 A CN201110383244 A CN 201110383244A CN 102502043 B CN102502043 B CN 102502043B
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China
Prior art keywords
sputtering target
cover plate
packaging box
frame
box
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CN201110383244.9A
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CN102502043A (en
Inventor
潘杰
姚力军
王学泽
李响
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Ningbo Jiangfeng Electronic Material Co Ltd
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Yuyao Kang Fute Electron Material Co Ltd
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Priority to CN201110383244.9A priority Critical patent/CN102502043B/en
Publication of CN102502043A publication Critical patent/CN102502043A/en
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02WCLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO WASTEWATER TREATMENT OR WASTE MANAGEMENT
    • Y02W90/00Enabling technologies or technologies with a potential or indirect contribution to greenhouse gas [GHG] emissions mitigation
    • Y02W90/10Bio-packaging, e.g. packing containers made from renewable resources or bio-plastics

Abstract

The invention provides a sputtering target packaging box, which comprises an enclosed box, a protection body positioned in an accommodating space, a bottom plate and a cover plate, wherein the enclosed box comprises side plates which are connected end to end and are integrally molded; the accommodating space is defined by the side plates; two sides of the protection body are supported on the side plates; the bottom plate is arranged on the protection body and is positioned in the enclosed box; the cover plate is arranged on the top of the enclosed box and has a shape of a frame; each frame of the cover plate is provided with a locking hole or a buckle; and the side plates are correspondingly provided with buckles or locking holes which are matched with the locking holes or the buckles of the cover plate. The sputtering target packaging box does not deform due to external force, and the target damage rate is reduced; the packaging box can be repeatedly detached and mounted multiple times and is convenient to carry and flexible to use; and the bearing capacity is high, the packaging box can be laminated in multiple layers, and the storage space of a target is saved.

Description

Sputtering target packaging box
Technical field
The present invention relates to quartz conductor and manufacture the packaging field of target, relate in particular to sputtering target packaging box.
Background technology
In order to prevent that in transportation, object is damaged, conventionally to pack object, all kinds of packing containers are widely used in all trades and professions, for example, for cardboard wooden case, plastic box, the plastics Turnround basket of bottling; With removable overplate, come packaged; With band rope or metal wool to the enlacement packaging of stone and other objects etc.
At quartz conductor, manufacture in the packaging field of sputtering target material, the general common casing packings such as hollow box that adopt of existing sputtering target material packing, sputtering target packaging box generally adopts papery or plastic material.No matter adopt papery or plastic material, existing sputtering target packaging box all exists intensity lower, holds yielding problem, is only applicable to common target to pack.When transporting, area is larger, and during thinner large-scale sputtering target material, this sputtering target packaging box does not have protective effect, because, in handling process, when this packing chest is subject to External Force Acting, with existing sputtering target packaging box, pack large-scale sputtering target material, large-scale sputtering target material is easy to unbalance stress, cause a lot of problems, for example, large-scale sputtering target material can skid off from damaged normal packet vanning gap, or large-scale sputtering target material is damaged in damaged packing case, or damaged packing case is out of shape target in transportation, be that damage rate of goods and packed and transported cost are high.And apply and existing target packing chest is packed large-scale sputtering target material, therefore the intensity of this sputtering target packaging box can not support large-scale sputtering target material to stack, and can not deposit more target to depositing the restriction that causes waste or be subject to place in the space of target.
For example; the packing chest of relevant target can be the Chinese utility model of CN201231873Y with reference to Granted publication number; it has only been to provide a kind of packing chest; can not solve easily breakage of packing chest in transportation; thereby make the impaired problem of large-scale sputtering target material; cannot play a very good protection to large-scale sputtering target material, same, packing chest can cause parking space waste or be subject to the problem of place restriction described in this utility model
Summary of the invention
The technical matters that the present invention solves is that breakage easily appears in large-scale sputtering target material packing chest in transportation, thereby easily makes the impaired problem of large-scale sputtering target material.In addition, the present invention also solves the problem that existing packing chest causes parking space waste or is subject to place restriction.
For addressing the above problem, the invention provides a kind of sputtering target packaging box, comprising:
Enclose case, comprise and joining end to end and integrated side plate, described side plate surrounds a spatial accommodation;
Be positioned at the watch box of described spatial accommodation, the supported on both sides of described watch box is on described side plate;
Place on described watch box and described in being arranged in, enclose the base plate of case;
Described in being placed in, enclose the cover plate of box top, described cover plate is frame-type, and each frame of described cover plate is provided with bonnet lock hole or snap close; Corresponding, described side plate is provided with snap close or the bonnet lock hole matching with described bonnet lock hole or the snap close of described cover plate.
Optionally, described watch box is connected, is welded by spiral shell or the mode bundling is fixed on described side plate.
Optionally, described watch box is guard strip, pillar, protecting wire net or backplate; The material of described watch box is wood, bamboo, paper, plastics or metal.
Optionally, separately comprise base, described base at least comprises two isolated I-beam sections.
Optionally, the material that encloses case described in is metal or plastics.
Optionally, the side plate that encloses case described in is oblong, square or annular.
Optionally, the bonnet lock hole arranging on each frame or the number of snap close are 3~6.
Optionally, described base plate is oblong, square or circular.
Optionally, the material of described base plate is wood, bamboo, paper, plastics or metal.
Optionally, described cover plate comprises cover plate frame, is fixedly connected on the cover plate watch box between cover plate frame and covers the cover plate sheet on cover plate watch box.
Optionally, described cover plate watch box is guard strip, pillar, protecting wire net or is backplate; The material that described cover plate watch box adopts is wood, bamboo, paper, plastics or metal.
Optionally, described cover plate is oblong, square or circular.
Optionally, the outer ledge length of described cover plate frame with described in to enclose inside edge, box top equal in length.
Compared with prior art, sputtering target packaging box provided by the invention, integratedly encloses case design and can make casing not because of being subject to extruding or the impact of extraneous external force to produce deformation, the loss percentage of reduction target.
Sputtering target packaging box provided by the invention, enclose watch box is set in case, and the supported on both sides of this watch box is on described side plate, can give large-scale sputtering target material with bearing capacity, increase the intensity of sputtering target packaging box, large-scale sputtering target material can be out of shape because of putting forth effort inhomogeneous in handling process, guarantee the quality and safety of target in carrying way, reduce damage rate of goods and reduce target traffic cost.
Sputtering target packaging box provided by the invention, the bonnet lock hole of described cover plate frame and adjacent described in enclose snap close interlock on case side plate or described cover plate frame snap close and adjacent described in enclose the bonnet lock hole interlock on case side plate, can effectively fix the connection of cover plate and the casing of large-scale sputtering target packaging box, can prevent that large-scale sputtering target material from skidding off casing and can prevent that large-scale sputtering target material from wounding in carrying way in carrying way.Meanwhile, the bonnet lock hole on this sputtering target packaging box and repeatedly repeated removal, installation of the interlock of snap close design, be convenient to shipment and use flexibly.
Sputtering target packaging box provided by the invention, described base at least comprises two isolated I-beam sections, improved the bearing capacity of large-scale sputtering target packaging box, and, when large-scale sputtering target material is packed with this packing chest, described in being positioned at, the cover plate of the frame-type of above-mentioned packing chest encloses box top, equally also improved sputtering target packaging box weight capacity, guaranteed that sputtering target packaging box can laminated multi-layer, saved the parking space of target.
Described cover plate is divided into cover plate frame and is placed on the cover plate sheet on cover plate frame, can surfacing when the cover plate design of described frame-type can guarantee that cover plate sheet is placed on cover plate frame attractive in appearance, and guarantee that large-scale sputtering target material can better avoid external force infringement in above-mentioned sputtering target packaging box, reduce packing and traffic cost.
Accompanying drawing explanation
Fig. 1 is the structural representation of an embodiment of large-scale sputtering target packaging box;
Fig. 2 is the structural representation of the part except cover plate of the large-scale sputtering target packaging box shown in Fig. 1;
Fig. 3 is the structural representation of the large-scale sputtering target packaging box cover plate shown in Fig. 1;
Fig. 4 is the structural representation of large-scale sputtering target packaging box part except cover plate of another embodiment;
Fig. 5 is the structural representation of the large-scale sputtering target packaging box cover plate of another embodiment;
The flow chart of steps that Fig. 6 packs large-scale sputtering target material for the large-scale sputtering target packaging box of application;
Fig. 7 is the structural representation of large-scale sputtering target material package;
Fig. 8 is the structural representation of the large-scale sputtering target material package of another way;
Fig. 9 is the structural representation of stainless steel sheet package.
The specific embodiment
The invention provides a kind of sputtering target packaging box, by utilizing integrated enclosing to be provided with watch box in case, and the supported on both sides of this watch box is on described side plate, increases the intensity of sputtering target packaging box; The engaged design of the bonnet lock hole on this sputtering target packaging box and snap close can make packing chest repeatedly repeated removal, installation, is convenient to shipment and uses flexibly; Described base has two isolated I-beam sections at least, has improved the weight capacity of sputtering target packaging box, encloses the loss percentage that has equally also improved sputtering target packaging box weight capacity on case and reduced target described in the cover plate of the frame-type of above-mentioned packing chest is positioned at.
Preferred embodiment of the present invention is a kind of large-scale sputtering target packaging box that I-beam section is built as base, application aluminium section bar and aluminium-plastic panel of applying, the sputtering target packaging box bearing capacity that application above-mentioned material is made is strong, light flexibly, can be difficult for getting wet, be difficult for getting rusty, be difficult for adhering to paper scrap.
For above-mentioned purpose of the present invention, feature and advantage can be become apparent more, below in conjunction with accompanying drawing, embodiment is specifically described.
A lot of details have been set forth in the following description so that fully understand the present invention.But the present invention can implement to be much different from alternate manner described here, and those skilled in the art can do similar popularization without prejudice to intension of the present invention in the situation that, so the present invention is not subject to the restriction of following public concrete enforcement.
Fig. 1 to Fig. 3 is the different views of one embodiment of the invention, wherein, Fig. 1 is the schematic diagram of the large-scale sputtering target packaging box of the present embodiment, Fig. 2 is the schematic diagram of the large-scale sputtering target packaging box of the present embodiment part except cover plate, and Fig. 3 is the schematic diagram of the large-scale sputtering target packaging box cover plate of the present embodiment.
As shown in Figure 1, large-scale sputtering target packaging box 10 is used for packing the large-scale sputtering target material of oblong, and therefore large-scale sputtering target packaging box 10 is cuboid.Large-scale sputtering target packaging box 10 comprises base 11, encloses case 12, fixedly encloses watch box 13, cover plate 17, base plate in case 12.
In the present embodiment, the base 11 of large-scale sputtering target packaging box 10 is comprised of the I-beam section of two or more mutual isolation, and I-beam section also claims girder steel (English name I Beam), is that cross section is the rectangular steel of double-tee.I-beam section tolerance is strong, is therefore widely used in various building structure, bridge, vehicle, support, machinery etc.In the present embodiment, I-beam section is applied to the base of sputtering target packaging box, can strengthen the weight capacity of sputtering target packaging box.
As shown in Figure 1, the base 11 of large-scale sputtering target packaging box 10 is comprised of three I-beam sections, is respectively the first base 11A, the second base 11B and the 3rd base 11C.The first base 11A, the second base 11B and the 3rd base 11C's is equal in length, is the width of large-scale sputtering target packaging box 10, and the height of the first base 11A, the second base 11B and the 3rd base 11C also equates.The first base 11A, the second base 11B and the parallel placement of the 3rd base 11C, and the first base 11A, the second base 11B are equal with the 3rd base 11C spacing.
The base 11 of the present embodiment is comprised of three I-beam sections, and in other embodiments, base also can be comprised of two I-beam sections or three above I-beam sections.The shape of base can be square tube, pipe, angle bar, rod, bar.
As shown in Figure 1, the case 12 that encloses of large-scale sputtering target packaging box 10 is to be enclosed and formed by integrated four side plates, and the material that encloses case 12 can be metal or plastics.The better aluminium section bar of case 12 that encloses of the present embodiment processes, the case 12 that encloses of the one being processed by aluminium section bar is applied in sputtering target packaging box, when sputtering target packaging box is subject to external force extruding or impacts, can make the firm tolerance of large-scale sputtering target packaging box, be not easy distortion and relative light and flexible, make large-scale sputtering target material in the process of carrying, inner not cracky and distortion of large-scale sputtering target material.When large-scale sputtering target packaging box 10 is carried to dust proof workshop, large-scale sputtering target packaging box can be difficult for getting wet, is difficult for getting rusty, is difficult for adhering to paper scrap, is difficult for adhering to dust etc.
As shown in Figure 1, four side plates that enclose case 12 are respectively the first side plate 12A, the second side plate 12B, the 3rd side plate 12C and the 4th side plate 12D.The below of the second side plate 12B is fixed with base 11A, and the below of the 4th side plate 12D is fixed with base 11C.The first side plate 12A is vertical with base 11, and the 3rd side plate 12C is vertical with base 11.3~6 snap closes 15 or bonnet lock hole 16 (in the present embodiment, bonnet lock hole 16 is formed on cover plate 17) are set on each side plate in four side plates, above-mentioned be arranged on enclose the snap close 15 on case 12 side plates position near cover plate 17.If arrange and be less than 3 snap closes 15 on each side plate, the side ability to bear of large-scale sputtering target packaging box 10 is poor, and large-scale sputtering target material 10 side discontinuity in transportation is easily out of shape.If arrange and be greater than 6 snap closes 15 on each side plate limit, the production technology of large-scale sputtering target packaging box 10 is caused to waste.
In the present embodiment, in conjunction with Fig. 1 and Fig. 2, be provided with separately 5 snap closes 15 in close cover plate 17 places of the first side plate 12A, the second side plate 12B, the 3rd side plate 12C and the 4th side plate 12D enclosing 12 4 side plates of case, the first side plate 12A of take is elaborated as example, the first side plate 12A has 5 snap closes 15 near cover plate 17 places, is followed successively by snap close 15A1, snap close 15A2, snap close 15A3, snap close 15A4 and snap close 15A5.In the middle of wherein snap close 15A3 occupy, snap close 15A1 and snap close 15A5 are with the snap close 15A3 distribution that is centrosymmetric, snap close 15A2 and snap close 15A4 are with the snap close 15A3 distribution that is centrosymmetric, and the distance between snap close 15A1 and snap close 15A2 equals the distance between snap close 15A4 and snap close 15A5.In the symmetrical shackle designs of the first side plate 12A, can apply less snap close and just can reach the firm effect of sputtering target packaging box 10 construction profiles, improve the side ability to bear of large-scale sputtering target packaging box 10, large-scale sputtering target material stressed being evenly not easy in transportation is out of shape.
In the present embodiment, the side plate that encloses case 12 is oblong, and the large-scale sputtering target packaging box that therefore forms cuboid formula is used for transporting oblong target.In the present embodiment, the width range of this large-scale sputtering target packaging box is 80cm~160cm, and length range is 90cm~210cm, and thickness range is 20mm~50mm.In other embodiments, the side plate that encloses case 12 can be square or annular etc., can transport the large-scale sputtering target material of square or the shapes such as circular.
Shown in Fig. 1 and Fig. 2, enclosing of large-scale sputtering target packaging box 10 is provided with watch box 13 between case 12.Because large-scale sputtering target material area is large, thin thickness, in long-distance transport, being subject to external force to collide or push easily deforms, the watch box 13 that encloses case 12 interior settings at large-scale sputtering target packaging box 10 can make the bottom of casing firm, can be to the large-scale sputtering target material in casing with enough bearing capacitys, guarantee the smooth placement in casing of large-scale sputtering target material, large-scale sputtering target material can be out of shape because of discontinuity in handling process, firm structure more can guarantee the safety of large-scale sputtering target material in carrying way simultaneously, reduce the loss percentage of large-scale sputtering target material.
Watch box 13 can or be backplate for guard strip, pillar, protecting wire net, and the material that watch box 13 can adopt is wood, bamboo, paper, plastics or metal.In the present embodiment, the guard strip of the better employing aluminium profile of described watch box 13, adopting aluminium section bar is in order to make the casing of large-scale sputtering target packaging box 10 firm, be not easy distortion, quality is light, totally, especially, when large-scale sputtering target packaging box 10 is carried to dust proof workshop, can be difficult for getting wet, be difficult for getting rusty, be difficult for adhering to paper scrap, be difficult for adhering to dust etc.
The watch box 13 of the present embodiment is comprised of 5~8 the same strip aluminium section bars of length, described strip aluminium section bar is guard strip 14, if watch box 13 is comprised of the guard strip 14 that is less than 5, the large-scale sputtering target material of support that watch box 13 can not be firm, makes large-scale sputtering target material easily impaired in handling process.If watch box 13 is comprised of the guard strip 14 more than 8, cause cost waste.
In the present embodiment, watch box 13 is comprised of 7 guard strips 14.Every guard strip 14 is all vertical with base 11, and between guard strip 14, parallel to each other being fixedly connected on enclosed in case 12.Described being fixedly connected with can select spiral shell to connect, weld or binding.The preferred spiral shell of the present embodiment connects, by closely cooperating of bolts and nuts, the two ends of guard strip 14 are fixedly connected on and are enclosed in case 12, being specially closely cooperating of bolts and nuts is fixedly connected with one end of side plate 12B, guard strip 14 with base 11A, and the other end of side plate 12D, guard strip 14 is fixedly connected with base 11C, and base 11B is connected at the mid point position of guard strip 14 by bolts and nuts.Therefore the watch box 13 being comprised of 7 guard strips 14 can make the bottom of sputtering target packaging box firm, can be to the large-scale sputtering target material in casing with enough bearing capacitys, guarantee the smooth placement in casing of large-scale sputtering target material, large-scale sputtering target material can be out of shape because of putting forth effort inhomogeneous in handling process, reduce the loss percentage of large-scale sputtering target material.
Described base plate (not shown) is enclosing the bottom of case 12 and is being placed on watch box 13, and base plate can be oblong, square or circular.The material of base plate can be wood, bamboo, paper, plastics or metal.In the present embodiment, base plate is preferably rectangular aluminium-plastic panel, adopts aluminium-plastic panel, can make the solid and lighter weight of large-scale sputtering target packaging box, and is difficult for getting wet, is difficult for getting rusty, is difficult for adhering to paper scrap, is difficult for adhering to dust.The size of base plate with enclose the floor space consistent size that case 12 encloses, base plate just in time agrees with in the bottom of enclosing case 12 like this, base plate and enclose between case 12 and there is no space, guarantees that large-scale sputtering target material is in handling process, and target can not skid off because of the damage of casing from casing.
In the present embodiment, base plate is oblong, and in other embodiment, base plate can be square or circular.When enclosing floor space that case encloses for square, base plate be square; When enclosing floor space that case encloses when circular, base plate be circle.
In conjunction with Fig. 1, Fig. 2 and Fig. 3, in the present embodiment, cover plate 17 is frame-type, comprises cover plate frame 171, cover plate watch box 172, cover plate sheet 173 and is fixed on the bonnet lock hole 16 of cover plate 17 surroundings.In figure, snap close 15, bonnet lock hole 16 are only signal, not practical structures.
The material of cover plate frame 171 is aluminium section bar.Adopt aluminium section bar can make large-scale sputtering target packaging box solid, light and be difficult for getting wet, be difficult for getting rusty, be difficult for adhering to paper scrap, be difficult for adhering to dust.Cover plate frame 171 is oblong, and the size of this cover plate frame 171 matches with the size of enclosing case 12 topside areas, and the outer ledge length of above-mentioned cover plate 17 is equal in length with the inside edge of enclosing case 12 tops.Above-mentioned design, when case 12 is enclosed in cover plate 17 coverings, encloses case 12 tops described in cover plate 17 is positioned at, when cover plate 17 is subject to external force extruding or impacts, enclose case 12 and can support cover plate 17, in the handling process of large-scale sputtering target material, has guaranteed the safety of large-scale sputtering target material.
Concrete, cover plate frame 171 has four frames, i.e. the first frame 171A, the second frame 171B, the 3rd frame 171C and the 4th frame 171D.In the present embodiment, four side plates that enclose case 12 are provided with snap close 15, four frames at cover plate frame 171 are provided with bonnet lock hole 16, each frame arranges 5 bonnet lock holes 16, four frames arrange altogether 20 bonnet lock holes, take 5 bonnet lock holes of the first frame 171A of cover plate frame 171 as example, be followed successively by bonnet lock hole 16A1, bonnet lock hole 16A2, bonnet lock hole 16A3, bonnet lock hole 16A4 and bonnet lock hole 16A5.In the middle of wherein bonnet lock hole 16A3 occupy, bonnet lock hole 16A1 and bonnet lock hole 16A5 are with the bonnet lock hole 16A3 distribution that is centrosymmetric, bonnet lock hole 16A2 and bonnet lock hole 16A4 are with the bonnet lock hole 16A3 distribution that is centrosymmetric, and the distance between bonnet lock hole 16A1 and bonnet lock hole 16A2 equals the distance between bonnet lock hole 16A4 and bonnet lock hole 16A5.
The bonnet lock hole 16 of the first frame 171A is one to one with enclosing the snap close 15 on the first side plate 12A on case 12, be specially the bonnet lock hole 16A4 interlock of bonnet lock hole 16A3 interlock, the snap close 15A4 on the first side plate 12A and the first frame 171A of bonnet lock hole 16A2 interlock, the snap close 15A3 on the first side plate 12A and the first frame 171A of bonnet lock hole 16A1 interlock, the snap close 15A2 on the first side plate 12A and the first frame 171A of snap close 15A1 on the first side plate 12A and the first frame 171A, the bonnet lock hole 16A5 interlock of the snap close 15A5 on the first side plate 12A and the first frame 171A.On cover plate 17, the bonnet lock hole 16 of other frames is also corresponding interlock one by one with the snap close 15 that encloses other side plates on case 12, when the large-scale sputtering target material of packing, bonnet lock hole 16 on cover plate 17 frames and the corresponding interlock of enclosing the bonnet lock hole 15 on case 12 side plates, by cover plate 17 with enclose case 12 and be closely connected.
In the present embodiment, the symmetrical bonnet lock hole 16 of the first frame 171A also can with enclose case 12 on symmetrical snap close 15 corresponding interlock one by one on the 3rd side plate 12C, meanwhile, the symmetrical bonnet lock hole 16 of the 3rd frame 171C also can with enclose case 12 on snap close 15 corresponding interlock one by one on the first side plate 12A.
In the present embodiment, cover plate frame 171 is oblong, and in other embodiments, cover plate frame 171 can also be square or circular.When large-scale sputtering target packaging box 10 enclose case 12 end faces for when square, cover plate frame 171 be square; When enclosing case 12 end faces for circle, cover plate frame 171 is circular.
In the present embodiment; on cover plate frame 171, be provided with cover plate watch box 172; the cover plate that is arranged so that large-scale sputtering target packaging box 10 17 of cover plate watch box 172 is many lattice structures; said structure guarantees that the cover plate sheet 173 being placed on cover plate frame 171 is smooth and attractive in appearance; the protection target that act as of this cover plate sheet 173 is difficult for while being subject to External Force Acting in handling process damagedly, reduces the loss percentage of large-scale sputtering target material.
Cover plate watch box 172 is comprised of 3~5 the same strip aluminium section bars of length.If the guard strip number of cover plate watch box 172 is less than 3, the weight capacity of cover plate 17 is poor, and cover plate sheet 173 is smooth not on the few cover plate watch box 172 of quantity; If the guard strip number of cover plate watch box 172 is greater than 5, can cause the waste of producing large-scale sputtering target packaging box technique.The present embodiment is preferably by 4 cover plate guard strips and forms cover plate watch box 172.Every cover plate guard strip is all parallel with base 11, and, equidistant being fixedly connected on cover plate frame 171 frames between each cover plate guard strip.Described being fixedly connected with can select spiral shell to connect, weld or binding.The preferred spiral shell of the present embodiment connects, by closely cooperating of bolts and nuts, the two ends of cover plate guard strip are fixedly connected between the second frame 171B and the 4th frame 171D of cover plate frame 171, in other embodiments, every cover plate guard strip also can be all vertical with base 11, and two ends are fixedly connected between the first frame 171A and the 3rd frame 171C of cover plate frame 171.
Cover plate sheet 173 is placed on cover plate watch box 172 belows (as shown in Figure 3), and cover plate sheet 173 can be oblong, square or circular.The material of cover plate sheet 173 can be wood, bamboo, paper, plastics or metal.In the present embodiment, cover plate sheet 173 is preferably rectangular aluminium-plastic panel, adopts aluminium-plastic panel, can make that large-scale sputtering target packaging box is solid, lighter weight, and is difficult for getting wet, is difficult for getting rusty, is difficult for adhering to paper scrap, is difficult for adhering to dust.Cover plate sheet 173 side dimension are consistent with cover plate frame 171 inside dimensions, cover plate sheet 173 just in time agrees with in cover plate frame 171, such design can guarantee that large-scale sputtering target material is in handling process, and target can be because not existing gap or breakage to skid off from casing in casing.
Each large-scale sputtering target material weighs 500 kilograms~1000 kilograms, and existing target packing chest can only take individual layer to place, and still, cover plate design of the present invention, can, so that large-scale sputtering target packaging box 10 carries out laminated multi-layer, save the parking space of target.In the present embodiment, large-scale sputtering target packaging box 10 can stack 2~4 layers, has greatly reduced the parking space of target.
Below by another embodiment, introduce large-scale sputtering target packaging box.
Fig. 4 is the schematic diagram of the large-scale sputtering target packaging box of another embodiment part except cover plate; Fig. 5 is the schematic diagram of the large-scale sputtering target packaging box cover plate of another embodiment.Four side plates that the large-scale sputtering target packaging box of a upper embodiment encloses case 12 are provided with 5 snap closes 15 separately, and four frames of cover plate frame 171 are provided with 5 bonnet lock holes 16 separately.In the present embodiment, with the difference of a upper embodiment be that four side plates that large-scale sputtering target packaging box encloses case 12 ' are provided with 5 bonnet lock holes 16 separately, four frames of cover plate frame 171 ' are provided with 5 snap closes 15 separately.
Be specially as shown in Figure 4 and Figure 5, four side plates that enclose case 12 ' of the large-scale sputtering target packaging box i.e. close cover plate 17 ' of the first side plate 12A ', the second side plate 12B ', the 3rd side plate 12C ' and the 4th side plate 12D ' locate to be provided with separately 5 bonnet lock holes 16.
As shown in Figure 4, the first side plate 12A ' has located 5 bonnet lock holes 16 near cover plate 17 ', is followed successively by bonnet lock hole 16A1, bonnet lock hole 16A2, bonnet lock hole 16A3, bonnet lock hole 16A4 and bonnet lock hole 16A5.In the middle of wherein bonnet lock hole 16A3 occupy, bonnet lock hole 16A1 and bonnet lock hole 16A5 are with the bonnet lock hole 16A3 distribution that is centrosymmetric, bonnet lock hole 16A2 and bonnet lock hole 16A4 are with the bonnet lock hole 16A3 distribution that is centrosymmetric, and the distance between bonnet lock hole 16A1 and bonnet lock hole 16A2 equals the distance between bonnet lock hole 16A4 and bonnet lock hole 16A5.In the symmetrical bonnet lock hole design of the first side plate 12A ', less bonnet lock hole can be applied equally and just the effect that sputtering target packaging box construction profile is firm can be made, improve the side ability to bear of large-scale sputtering target packaging box, large-scale sputtering target material stressed being evenly not easy in transportation is out of shape.
In conjunction with Fig. 4 and Fig. 5, when the side plate that encloses case 12 ' is provided with bonnet lock hole 16, four frames of cover plate frame 171 ' are just provided with snap close 15, and four frames of described cover plate frame 171 ' are followed successively by the first frame 171A ', the second frame 171B ', the 3rd frame 171C ', the 4th frame 171D '.Each frame arranges 15, four frames of 5 snap closes 20 snap closes is set altogether, and 5 snap closes of the first frame 171A ' of cover plate frame 171 ' of take are example, are followed successively by snap close 15A1, snap close 15A2, snap close 15A3, snap close 15A4, snap close 15A5.In the middle of wherein snap close 15A3 occupy, snap close 15A1 and snap close 15A5 are with the snap close 15A3 distribution that is centrosymmetric, snap close 15A2 and snap close 15A4 are with the snap close 15A3 distribution that is centrosymmetric, and the distance between snap close 15A1 and snap close 15A2 equals the distance between snap close 15A4 and snap close 15A5.
The symmetrical snap close 15 of the first frame 171A ' is one to one with the bonnet lock hole 16 enclosing on upper the first side plate 12A ' of case 12 ', be specially bonnet lock hole 16A1 on the first side plate 12A ' and the snap close 15A1 interlock of the first frame 171A ', the snap close 15A2 interlock of bonnet lock hole 16A2 on the first side plate 12A ' and the first frame 171A ', the snap close 15A3 interlock of bonnet lock hole 16A3 on the first side plate 12A ' and the first frame 171A ', the snap close 15A4 interlock of bonnet lock hole 16A4 on the first side plate 12A ' and the first frame 171A ', the snap close 15A5 interlock of bonnet lock hole 16A5 on the first side plate 12A and the first frame 171A '.The snap close 15 of upper other frames of cover plate 17 ' is also corresponding one by one with the bonnet lock hole 16 that encloses other side plates on case 12 ', by cover plate 17 ' with enclose case 12 ' and be closely connected.
In this embodiment, the symmetrical snap close 15 of the first frame 171A ' also can with the symmetrical bonnet lock hole 16 corresponding interlock one by one of enclosing on upper the 3rd side plate 12C ' of case 12 ', meanwhile, the symmetrical snap close 15 of the 3rd frame 171C ' also can with the bonnet lock hole 16 corresponding interlock one by one of enclosing on upper the first side plate 12A ' of case 12 '.
Other part-structures of the large-scale sputtering target packaging box of this embodiment please refer to the description of an embodiment in the present invention.
Therefore, utilize large-scale sputtering target packaging box of the present invention integrated enclose case design can be so that casing be because being subject to extruding or the impact of extraneous external force to produce deformation.The watch box arranging in enclosing case, can give large-scale sputtering target material with bearing capacity, increase the intensity of sputtering target packaging box, large-scale sputtering target material can be out of shape because of putting forth effort inhomogeneous in handling process, guarantee the quality and safety of target in carrying way, reduce damage rate of goods and reduce target traffic cost.
Large-scale sputtering target packaging box of the present invention, bonnet lock hole on described cover plate frame and adjacent described in enclose snap close interlock on case side plate or the snap close on described cover plate frame and adjacent described in enclose the bonnet lock hole interlock on case side plate, can effectively fix the connection of cover plate and the casing of large-scale sputtering target packaging box, prevent that large-scale sputtering target material from skidding off casing or wounding in carrying way in carrying way.Meanwhile, the bonnet lock hole on this sputtering target packaging box and repeatedly repeated removal, installation of the interlock of snap close design, be convenient to shipment and use flexibly.
Large-scale sputtering target packaging box of the present invention, described base at least comprises two I-beam sections of being separated by, improved the bearing capacity of large-scale sputtering target packaging box, and, when large-scale sputtering target material is packed with this packing chest, described in the cover plate of the frame-type of above-mentioned large-scale target packing chest is positioned at, enclose on case and equally also improved sputtering target packaging box weight capacity, guaranteed that sputtering target packaging box can laminated multi-layer, saved the parking space of target.
Described cover plate is that frame-type guarantees that large-scale sputtering target material can surfacing in this sputtering target packaging box, attractive in appearance, avoid external force infringement, reduces packing and traffic cost.
Referring again to Fig. 6, Fig. 6 is the flow chart of steps that the large-scale sputtering target packaging box of above-mentioned two embodiment of application the present invention is packed large-scale sputtering target material.
First perform step S600, OBL large-scale sputtering target material is carried out to vacuum packaging, form large-scale sputtering target material package;
Execution step S601, provides large-scale sputtering target packaging box, and the base plate of large-scale sputtering target packaging box is arranged to damping anticollision device;
Execution step S602, stainless steel sheet is provided, stainless steel sheet is carried out to vacuum packaging, form stainless steel sheet package, on the cushion layer of large-scale sputtering target packaging box bottom, place above-mentioned stainless steel sheet package, large-scale sputtering target material package is put on stainless steel sheet package, then above-mentioned target package and above-mentioned stainless steel sheet package are spirally connected;
Execution step S603, arranges damping anticollision device in the sidewall that encloses case of packing chest and the gap of large-scale sputtering target material package of large-scale sputtering target material;
Execution step S604 arranges damping anticollision device on large-scale sputtering target material package;
Execution step S605, covers cover plate in the box top of enclosing of large-scale sputtering target packaging box, will enclose the snap close on case and the bonnet lock hole on cover plate is engaged or the bonnet lock hole and the snap close on cover plate that enclose on case is engaged.
Be specially, first perform step S600, OBL large-scale sputtering target material is carried out to vacuum packaging, form large-scale sputtering target material package.
Fig. 7 is the large-scale sputtering target material package schematic diagram of the present embodiment, and in conjunction with Fig. 7, concrete steps are:
(1) provide large-scale sputtering target material 70 and packaging bag C1, described packaging body C1 by oxygen transit dose at 5ml/m 224hrMPa, vapor transfer rate are at 3ml/m 2plastic film below 24hr is made, and to scribble be for example the coat of Copper Foil, the wherein units/ml of oxygen transit dose/(m one of described plastic film or two surfaces 224hrMPa) implication be steady temperature and unit pressure poor under, when stable seeing through, in the unit time, see through the volume of the oxygen of the material units area such as plastic sheeting, Copper Foil, Vacuum Deposition copper film; The units/ml of vapor transfer rate/(m 224hr) implication be steady temperature and water vapour pressure poor under, when stable seeing through, in the unit time, see through the volume of the aqueous vapor of the material units area such as plastic sheeting, Copper Foil, Vacuum Deposition copper film.
(2), by packaging bag C1 described in visual inspection, confirm that packaging bag C1 surface does not have cut and obviously damaged, and in packaging film, there is no bubble, obvious granule foreign etc.
(3) large-scale sputtering target material 70 packed in this packaging bag C1 and put into desiccant G1, put into packed desiccant, in order further to reduce the aqueous vapor in packaging bag, guarantee more fully being dried in packaging bag, prevent the oxidation of large-scale sputtering target material, desiccant used can be the desiccant that can not exert an influence to target character such as active carbon etc.
(4) described packaging bag C1 is carried out to application of vacuum; Described packaging bag C1 after application of vacuum is sealed.
Above-described embodiment carries out monolayer package to large-scale sputtering target material, also can carry out multi-layer packaging to large-scale sputtering target material in other embodiments, the large-scale sputtering target material package schematic diagram that Fig. 8 is another embodiment, and in conjunction with Fig. 8, concrete packaging step comprises:
(1) provide large-scale sputtering target material 80 and packaging bag C2, C3;
(2) by visual inspection packaging bag C2 and by large-scale sputtering target material 80, pack in packaging bag C2;
(3) packaging bag C2 is carried out to application of vacuum;
(4) the packaging bag C2 after application of vacuum is sealed;
(5) by visual inspection packaging bag C3 and large-scale sputtering target material 80 is packed in packaging bag C3 and put into desiccant G2;
(6) packaging bag C3 is carried out to application of vacuum;
(7) the packaging bag C3 after application of vacuum is sealed.
When the packaging bag that use is made by common plastics film is packed large-scale sputtering target material, because oxygen transit dose, the vapor transfer rate of common plastics film are all larger, if the holding time is long, when the oxygen accumulative total content in packaging bag, aqueous vapor accumulative total content surpass certain limit, large-scale sputtering target material surface in packaging bag will be oxidized, and forms oxide coating.And, if the package of target is not vacuumized to processing, after packing, in packaging bag, can remain part air, this part residual air can accelerate the oxidation on large-scale sputtering target material surface, the large-scale sputtering target material surface metal characteristic of oxidation changes, be difficult to occur sputter, and arc discharge easily occurs, thereby can cause the Quality Down of sputter coating.Above-mentioned situation finally can cause conforming product rate and production efficiency to decline.While therefore, packing large-scale sputtering target material, use oxygen transit dose at 5ml/m 224hrMPa, vapor transfer rate are at 3ml/m 2the packaging bag that plastic film below 24hr is made is packed.
Then, execution step S601, provides large-scale sputtering target packaging box, at the base plate of large-scale sputtering target packaging box, damping anticollision device is set.What choose here is the large-scale sputtering target packaging box of cuboid formula.This packing chest width is 80cm, and length is 90cm, and thickness is 20mm.
The casing of large-scale sputtering target packaging box generally adopts hard material to make, and the casing of hard can make this packing chest not because being subject to extruding or the impact of extraneous external force to produce deformation, avoids large-scale sputtering target material wherein impaired.In the present embodiment, can first in the bottom of large-scale sputtering target packaging box, damping anticollision device be set, for example, spread padded coaming, above-mentioned padded coaming can be for such as spring or can produce foamed materials, rubber of deformation etc.In moving and transport the process of large-scale sputtering target packaging box, when having External Force Acting in the bottom of casing, further there is deformation in padded coaming, can to the bottom of large-scale sputtering target material, play the effect of buffering, avoids large-scale sputtering target material impaired at the box house of hard.
Afterwards, execution step S602, provides stainless steel sheet, and stainless steel sheet is carried out to vacuum packaging, forms stainless steel sheet package; On the cushion layer of large-scale sputtering target packaging box bottom, place above-mentioned stainless steel sheet package, large-scale sputtering target material package is put on stainless steel sheet package, then above-mentioned target package and above-mentioned stainless steel sheet package are spirally connected.
The above-mentioned stainless steel sheet providing is cuboid, its length and large-scale sputtering target material equal in length, and its width is shorter than the width of large-scale sputtering target material, and its thickness is 8~10mm.Above-mentioned Stainless Steel plate is also to encapsulate separately with plastic film, and carries out application of vacuum formation stainless steel sheet package, when such stainless steel sheet package contacts with large-scale sputtering target material, can not pollute large-scale sputtering target material.Fig. 9 is the stainless steel sheet package schematic diagram of the present embodiment, and in conjunction with Fig. 9, the detailed process that forms stainless steel sheet package is:
(1) provide stainless steel sheet 90 and packaging bag C4.
(2), by packaging bag C4 described in visual inspection, confirm that packaging bag C4 surface does not have cut and obviously damaged, and in packaging film, there is no bubble, obvious granule foreign etc.
(3) stainless steel sheet 90 packed in this packaging bag C4 and put into desiccant G3, put into packed desiccant, in order further to reduce the aqueous vapor in packaging bag, guarantee more fully being dried in packaging bag, prevent the oxidation of large-scale sputtering target material, desiccant used can be the desiccant that can not exert an influence to target character such as active carbon etc.
(4) described packaging bag C4 is carried out to application of vacuum.
(5) the described packaging bag C4 after application of vacuum is sealed.
Afterwards, on the cushion layer of the bottom of large-scale sputtering target packaging box, place above-mentioned stainless steel sheet package, large-scale sputtering target material package is placed on stainless steel sheet package.Corresponding being spirally connected in screw place by the package of above-mentioned stainless steel sheet with large-scale sputtering target material package backboard.By being spirally connected, stainless steel sheet package can be protected large-scale sputtering target material package.
Be specially, if while stainless steel sheet package being set in the bottom of large-scale sputtering target material package, when large-scale sputtering target material package being taken out from large-scale sputtering target packaging box or moving to behind other places, can so that large-scale sputtering target material in handling process stressed evenly, and be not easy distortion or damaged.Why the width of stainless steel sheet is shorter than the width of large-scale sputtering target material, because will allow some leeway to the mechanical device that pipettes large-scale sputtering target material on large-scale sputtering target material, only in this way, guarantee mechanical device is in pipetting the process of large-scale sputtering target material, and mechanical device can not touch etc. stressed and make above-mentioned target distortion or impaired large-scale sputtering target material.
Afterwards, execution step S603, arranges damping anticollision device at the sidewall that encloses case of large-scale sputtering target packaging box and the gap of large-scale sputtering target material.
In the present embodiment, enclose the sidewall of case and the gap of large-scale sputtering target material arranges damping anticollision device, for example, in above-mentioned gap, filling padded coaming.Above-mentioned padded coaming can be such as spring or can produce foamed materials, rubber of deformation etc.In moving and transport the process of large-scale sputtering target packaging box, when having External Force Acting in the sidewall of casing, further there is deformation in padded coaming, can to the sidewall of large-scale sputtering target material, play the effect of buffering, avoids large-scale sputtering target material impaired at the box house of hard.
Afterwards, execution step S604 arranges damping anticollision device on large-scale sputtering target material.
Damping anticollision device is set on large-scale sputtering target material, for example, on above-mentioned target, adds padded coaming.Above-mentioned padded coaming can be the foamed materials, rubber that such as spring, maybe can produce deformation etc.In moving and transport the process of large-scale sputtering target packaging box, when having External Force Acting in the top of casing, further there is deformation in padded coaming, can to the top of large-scale sputtering target material, play the effect of buffering, avoids large-scale sputtering target material impaired at the casing top of hard.
Finally, execution step S605, covers cover plate in the box top of enclosing of large-scale sputtering target packaging box, will enclose the snap close on case and the bonnet lock hole on cover plate is engaged or the bonnet lock hole and the snap close on cover plate that enclose on case is engaged.
When large-scale sputtering target packaging box, enclose box top while covering cover plate, described in being placed on, described cover plate encloses box top, when the coverplate stress of large-scale sputtering target packaging box, described design makes to enclose case can support cover plate, in the handling process of large-scale sputtering target material, guaranteed the safety of large-scale sputtering target material, another aspect on the one hand, can, so that large-scale sputtering target packaging box carries out laminated multi-layer, save the parking space of large-scale sputtering target material.In the present embodiment, large-scale sputtering target packaging box can stack 2~4 layers, has greatly reduced the parking space of large-scale target.
Bonnet lock hole on above-mentioned cover plate frame and adjacent described in enclose snap close interlock design on case side plate or the snap close on cover plate frame and adjacent described in enclose bonnet lock hole interlock design on case side plate and can prevent that large-scale sputtering target material from skidding off casing and can prevent that large-scale sputtering target material from wounding in carrying way in carrying way, makes large-scale sputtering target packaging box casing firmer.Meanwhile, the bonnet lock hole on this sputtering target packaging box and repeatedly repeated removal, installation of the interlock of snap close design, be convenient to shipment and use flexibly.
By above steps, finally obtain the method that large-scale sputtering target packaging box is packed large-scale sputtering target material.
Sputtering target packaging box of the present invention, in above-mentioned large-scale sputtering target packaging box integrated enclose case design can so that casing not because of being subject to extruding or the impact of extraneous external force to produce deformation, the loss percentage of reduction target.
Enclosing the watch box arranging in case can be to large-scale sputtering target material with bearing capacity, increase the intensity of sputtering target packaging box, large-scale sputtering target material can be out of shape because of being puted forth effort inhomogeneous in handling process, guarantee the quality safety of target in carrying way, reduce damage rate of goods and reduce target traffic cost.
Bonnet lock hole on described cover plate frame and adjacent described in enclose snap close interlock on case side plate or the snap close on described cover plate frame and adjacent described in enclose the bonnet lock hole interlock on case side plate, can effectively fix the connection of cover plate and the casing of large-scale sputtering target packaging box, can prevent that large-scale sputtering target material from skidding off casing and can prevent that large-scale sputtering target material from wounding in carrying way in carrying way.Meanwhile, the bonnet lock hole on this sputtering target packaging box and repeatedly repeated removal, installation of the interlock of snap close design, be convenient to shipment and use flexibly.
Sputtering target packaging box of the present invention, described base at least comprises two isolated I-beam sections, improved the bearing capacity of large-scale sputtering target packaging box, and, when large-scale sputtering target material is packed with this packing chest, described in the cover plate of the frame-type of above-mentioned packing chest is located at, enclose on case and equally also improved sputtering target packaging box weight capacity, guaranteed that sputtering target packaging box can laminated multi-layer, saved the parking space of target.
Described cover plate is that frame-type guarantees that large-scale sputtering target material can surfacing in this sputtering target packaging box, attractive in appearance, avoid external force infringement, reduces packing and traffic cost.
The above, be only preferred embodiment of the present invention, not the present invention done to any pro forma restriction.Any those of ordinary skill in the art, do not departing from technical solution of the present invention scope situation, all can utilize method and the technology contents of above-mentioned announcement to make many possible changes and modification to technical solution of the present invention, or be revised as the equivalent embodiment of equivalent variations.Therefore, every content that does not depart from technical scheme of the present invention,, all still belongs in the scope of technical solution of the present invention protection any simple modification made for any of the above embodiments, equivalent variations and modification according to technical spirit of the present invention.

Claims (10)

1. a sputtering target packaging box, for transporting the large-scale sputtering target material of 500~1000 kilograms, is characterized in that, described packing chest is cuboid, and width range is 80cm~160cm, and length range is 90cm~210cm, thickness range is 20mm~50mm, and described packing chest comprises:
Enclose case, comprise and joining end to end and integrated side plate, described side plate surrounds a spatial accommodation;
Be positioned at the watch box of described spatial accommodation, the supported on both sides of described watch box is on described side plate;
Place on described watch box and described in being arranged in, enclose the base plate of case;
Described in being placed in, enclose the cover plate of box top, described cover plate is frame-type, and each frame of described cover plate is provided with bonnet lock hole or snap close; Corresponding, described side plate is provided with snap close or the bonnet lock hole matching with described bonnet lock hole or the snap close of described cover plate; Described cover plate comprises cover plate frame, is fixedly connected on the cover plate watch box between cover plate frame and is placed under cover plate watch box and is connected at the cover plate sheet of described cover plate frame, the side dimension of described cover plate sheet equates with the inside dimensions of described cover plate frame, 4 cover plate guard strips that described cover plate watch box is space form, between described cover plate guard strip, parallel and distance equates, the material of described cover plate sheet is aluminium-plastic panel;
Base, is arranged at the watch box bottom in described spatial accommodation, and described base at least comprises two isolated I-beam sections, and described cover plate guard strip is parallel with described I-beam section.
2. sputtering target packaging box according to claim 1, is characterized in that, the watch box in described spatial accommodation is connected, welded by spiral shell or the mode bundling is fixed on described side plate.
3. sputtering target packaging box according to claim 1, is characterized in that, the watch box in described spatial accommodation is guard strip, pillar, protecting wire net or backplate; The material of the watch box in described spatial accommodation is wood, bamboo, paper, plastics or metal.
4. sputtering target packaging box according to claim 1, is characterized in that, described in enclose case material be metal or plastics.
5. sputtering target packaging box according to claim 1, is characterized in that, described in enclose case side plate be oblong, square or annular.
6. sputtering target packaging box according to claim 1, is characterized in that, the bonnet lock hole arranging on each frame or the number of snap close are 3~6.
7. sputtering target packaging box according to claim 1, is characterized in that, described base plate is oblong, square or circular.
8. according to the sputtering target packaging box described in claim 1 or 7, it is characterized in that, the material of described base plate is wood, bamboo, paper, plastics or metal.
9. sputtering target packaging box according to claim 1, is characterized in that, described cover plate is oblong.
10. sputtering target packaging box according to claim 1, is characterized in that, the outer ledge length of described cover plate frame with described in to enclose inside edge, box top equal in length.
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Patentee before: Yuyao Kang Fute Electron Material Co., Ltd