CN102497166B - Excitation circuit of bell-shaped vibrator - Google Patents

Excitation circuit of bell-shaped vibrator Download PDF

Info

Publication number
CN102497166B
CN102497166B CN201110359333.XA CN201110359333A CN102497166B CN 102497166 B CN102497166 B CN 102497166B CN 201110359333 A CN201110359333 A CN 201110359333A CN 102497166 B CN102497166 B CN 102497166B
Authority
CN
China
Prior art keywords
signal generator
sinusoidal signal
sinusoidal
frequency
pzt
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201110359333.XA
Other languages
Chinese (zh)
Other versions
CN102497166A (en
Inventor
付梦印
邓志红
刘彤
王新宇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beijing Institute of Technology BIT
Original Assignee
Beijing Institute of Technology BIT
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Beijing Institute of Technology BIT filed Critical Beijing Institute of Technology BIT
Priority to CN201110359333.XA priority Critical patent/CN102497166B/en
Publication of CN102497166A publication Critical patent/CN102497166A/en
Application granted granted Critical
Publication of CN102497166B publication Critical patent/CN102497166B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Oscillators With Electromechanical Resonators (AREA)

Abstract

The invention relates to an excitation circuit of a bell-shaped vibrator, in particular to a vibrator excitation circuit for a bell-shaped vibrator angular rate gyroscope, and belongs to the filed of inertial guidance. The excitation circuit is composed of a programmable logic device, two sinusoidal signal generators, two power operational amplifiers, two piezoelectric transducers and a constant crystal oscillator; a controlled sinusoidal excitation voltage used for generating frequency and amplitude excites the bell-shaped vibrator to generate frequency and four antinode waveform with stable amplitude, and further, the angular rate can be measured via measuring the torsion deformation of four antinode vibration form. The bell-shaped vibrator excitation circuit has a simple structure and low cost; a sinusoidal excitation signal is generated by using a switch capacitance filter; and the frequency, the amplitude value and the phase of the signal can be conveniently controlled by utilizing the programmable logic device, and the precision of the frequency is only determined by the frequency stability of the constant temperature crystal oscillator and can reach 0.05ppm.

Description

A kind of exciting circuit of bell-shaped vibrator
Technical field
What the present invention relates to is a kind of exciting circuit of bell-shaped vibrator, and particularly a kind of oscillator exciting circuit for Campaniform oscillator type angular rate gyroscope instrument, belongs to inertial navigation field.
Background technology
Carrier angular rate measurement in land, sea, air, day all kinds of armament systems and national economy numerous areas all bringing into play extremely important effect, it is to realize that attitude of carrier is determined, stabilized platform is controlled and the key technology of the work such as movable body driftage measurement.Gyro is the Main Means of realizing angular rate measurement, different by operation principle, gyro can be divided into mechanical rotor formula gyro conventionally, optical gyroscope and oscillation gyro, wherein oscillation gyro is based on Gori sharp principle difficult to understand, with vibrating elements, replaced the mechanical rotor in traditional gyro, with micro breadth oscillation, replaced High Rotation Speed, compare with mechanical gyro with optical gyroscope, the solid-state design of oscillation gyro makes it be more suitable for the applications such as angular rate measurement under large overload environment, there is good environmental adaptability simultaneously, cost is low, life-span is long, reliability is high, be easy to the features such as miniaturization.At present, oscillation gyro has been widely used in the navigation and TT&C system of the weaponrys such as aircraft, naval vessel, tank, submarine, guided missile, torpedo, at civil areas such as automobile, medicine equipment, geological prospecting, imaging are stable, is also widely adopted.
The torsion measured angular speed that Campaniform oscillator type angular rate gyroscope instrument shakes shape by measuring bell-shaped vibrator four wave amplitudes.When bell-shaped vibrator is during in stable vibration state, as along its central shaft to there being input angular velocity, the coriolis force being produced by transport motion will change the motion of each particle of bell-shaped vibrator (element quality), makes bell-shaped vibrator produce torsional deformation, and this deformation is directly proportional to input angle speed.The electrostatic charge causing by the capacitance sensor detection oscillator deformation of installing on pedestal changes can realize the measurement to carrier angular speed.
The exciting circuit of bell-shaped vibrator is used for encouraging bell-shaped vibrator to produce four antinode waveforms.
Summary of the invention
The object of the invention is to propose a kind of exciting circuit of bell-shaped vibrator, for generation of frequency and the controlled sinusoidal excitation voltage of amplitude, encourage bell-shaped vibrator to produce four antinode waveforms of frequency, amplitude stability and then the torsional deformation measured angular speed of shaking shape by measuring four antinodes.
Due in actual use, oscillator produces the shake natural frequency of shape of four antinodes and varies with temperature and change, the torsional deformation that the shape of shaking occurs also needs to control, obtain the stable shape of shaking, exciting circuit must have FREQUENCY CONTROL, amplitude is controlled and the shape of shaking is reversed control function, and the pumping signal of generation has higher frequency stability and Amplitude Stability.
The object of the invention is to be achieved through the following technical solutions.
The exciting circuit of a kind of bell-shaped vibrator of the present invention, is comprised of programmable logic device 1, the first sinusoidal signal generator 21, the second sinusoidal signal generator 22, the first power operational amplifier 31, the second power operational amplifier 32, first group of PZT (piezoelectric transducer) 41, second group of PZT (piezoelectric transducer) 42 and constant-temperature crystal oscillator 5;
Wherein the signal input port SIG of the first sinusoidal signal generator 21 and the second sinusoidal signal generator 22 is connected with PWM3 with 2 I/O port PWM1 of programmable logic device 1 respectively, the input end of clock mouth CLK of the first sinusoidal signal generator 21 and the second sinusoidal signal generator 22 is connected with PWM4 with the I/O port PWM2 of 2 of programmable logic device 1 respectively, the output port OUT of the first sinusoidal signal generator 21 and the second sinusoidal signal generator 22 is connected with the input port IN of the second power operational amplifier 32 with the first power operational amplifier 31 respectively, the output port OUT of the first power operational amplifier 31 and the second power operational amplifier 32 is connected with second group of PZT (piezoelectric transducer) 42 with first group of PZT (piezoelectric transducer) 41 respectively, the external clock input port EXCLK of programmable logic device 1 is connected with the output terminal of clock mouth of constant-temperature crystal oscillator 5,
Above-mentioned first group of PZT (piezoelectric transducer) 41 and second group of PZT (piezoelectric transducer) 42 are installed in bell-shaped vibrator top, and both install phase phasic difference 45 degree, wherein every group of PZT (piezoelectric transducer) comprises again two PZT (piezoelectric transducer)s, and the installation site of two PZT (piezoelectric transducer)s differs 180 degree in every group;
Above-mentioned programmable logic device 1 need to have compared with high clock frequency to meet application, and its JTAG programming port is connected with external programmer 6, and programmable logic device 1 can adopt digital signal processor DSP or two kinds of patterns of single-chip microprocessor MCU to realize;
Above-mentioned the first sinusoidal signal generator 21 and the second sinusoidal signal generator 22 are same structure, include low pass switched capacitor filter, active low-pass first order filter and related peripheral circuit, its annexation is: the signal input port of low pass switched capacitor filter and input end of clock mouth are signal input port SIG and the input end of clock mouth CLK of corresponding sinusoidal signal generator, the output port of low pass switched capacitor filter is connected with the input port of corresponding active low-pass first order filter, the output port of active low-pass first order filter is the output port OUT of corresponding sinusoidal signal generator,
The exciting circuit of a kind of bell-shaped vibrator of the present invention, its course of work is:
1) the I/O port PWM1 of programmable logic device 1 produces respectively with PWM3 the square wave that two-way is identical with oscillator natural frequency and duty ratio is 50%, as the signal input of the first sinusoidal signal generator 21 and the second sinusoidal signal generator 22, controls the first sinusoidal signal generator 21 and the second sinusoidal signal generator 22 sinusoidal wave frequency that produces;
2) to produce respectively two-way frequency be the square wave that 50 times of oscillator natural frequency and duty ratio are 50% for the I/O port PWM2 of programmable logic device 1 and PWM4, as the clock input of the first sinusoidal signal generator 21 and the second sinusoidal signal generator 22, control the cut-off frequency of low pass switched capacitor filter in the first sinusoidal signal generator 21 and the second sinusoidal signal generator 22, make cut-off frequency equal the frequency of its input signal, and then control sinusoidal wave amplitude;
3) sine wave that the first sinusoidal signal generator 21 and the second sinusoidal signal generator 22 produce makes the first power operational amplifier 31 and the second power operational amplifier 32 produce two-way sinusoidal excitation signal as the input signal of the first power operational amplifier 31 and the second power operational amplifier 32 respectively;
4) the two-way sinusoidal excitation signal that step 3) produces is respectively as the input signal of first group of PZT (piezoelectric transducer) 41 and second group of PZT (piezoelectric transducer) 42, and excitation bell-shaped vibrator produces the four antinodes shape of shaking;
5) by controlling the frequency of the 4 road square-wave signals that 4 I/O port PWM1, PWM2, PWM3, the PWM4 of programmable logic device 1 produce, can control amplitude and the frequency of two-way sinusoidal excitation signal, and then control the shake amplitude of shape and the shape of shaking of four antinodes and reverse.
In the first sinusoidal signal generator 21 and the second sinusoidal signal generator 22, the principle of the generation of sinusoidal signal is: the cut-off frequency of low pass switched capacitor filter is determined by the frequency of input end of clock, when cut-off frequency equates with signal input part frequency or is lower slightly, the output of low pass switched capacitor filter will be for the first-harmonic of input signal and the sine wave of inputting square-wave signal frequency and equating, but in sine wave, contains the high fdrequency component that low pass switched capacitor filter is introduced.The high fdrequency component that active low-pass first order filter is introduced for filtering low pass switched capacitor filter, and export comparatively ideal sine wave;
The frequency of bell-shaped vibrator exciting circuit pumping signal of the present invention determined by programmable logic device 1, and its frequency stability determines by constant-temperature crystal oscillator 5, and frequency stability can reach 0.05ppm.
Beneficial effect
Bell-shaped vibrator exciting circuit of the present invention is simple in structure, cost is low, use switching capacity filter to produce sinusoidal excitation signal, signal frequency, amplitude and phase place can be used programmable logic device to control easily, and frequency accuracy is only determined by the frequency stability of constant-temperature crystal oscillator, can reach 0.05ppm.
Accompanying drawing explanation
Fig. 1 is the exciting circuit annexation schematic diagram of bell-shaped vibrator in the present invention;
In Fig. 1,1 is programmable logic device, 21 is the first sinusoidal signal generator, 22 is the second sinusoidal signal generator, and 31 is the first power operational amplifier, and 32 is the second power operational amplifier, 41 is first group of PZT (piezoelectric transducer), 42 is second group of PZT (piezoelectric transducer), and 5 is constant-temperature crystal oscillator, and 6 is external programmer;
Fig. 2 is PZT (piezoelectric transducer) installation site schematic diagram in embodiments of the invention.
Embodiment
Below in conjunction with drawings and Examples, the present invention will be further described.
Embodiment
A kind of exciting circuit of bell-shaped vibrator, as shown in Figure 1, programmable logic device 1, the first sinusoidal signal generator 21, the second sinusoidal signal generator 22, the first power operational amplifier 31, the second power operational amplifier 32, first group of PZT (piezoelectric transducer) 41, second group of PZT (piezoelectric transducer) 42 and constant-temperature crystal oscillator 5, consist of, wherein each sine-wave generator comprises again low pass switched capacitor filter, active low-pass first order filter and related peripheral circuit;
Wherein the signal input port SIG of the first sinusoidal signal generator 21 and the second sinusoidal signal generator 22 is connected with PWM3 with 2 I/O port PWM1 of programmable logic device 1 respectively, the input end of clock mouth CLK of the first sinusoidal signal generator 21 and the second sinusoidal signal generator 22 is connected with PWM4 with the I/O port PWM2 of 2 of programmable logic device 1 respectively, the output port OUT of the first sinusoidal signal generator 21 and the second sinusoidal signal generator 22 is connected with the input port IN of the second power operational amplifier 32 with the first power operational amplifier 31 respectively, the output port OUT of the first power operational amplifier 31 and the second power operational amplifier 32 is connected with second group of PZT (piezoelectric transducer) 42 with first group of PZT (piezoelectric transducer) 41 respectively, the external clock input port EXCLK of programmable logic device 1 is connected with the output terminal of clock mouth of constant-temperature crystal oscillator 5,
Above-mentioned programmable logic device 1 adopts digital signal processor DSP to realize, its clock frequency is 150MHz, the external clock input port of programmable logic device 1 is connected with constant-temperature crystal oscillator 5, and the JTAG programming port of programmable logic device 1 is connected with external programmer 6;
Above-mentioned first group of PZT (piezoelectric transducer) 41 and second group of PZT (piezoelectric transducer) 42 are installed in bell-shaped vibrator top, and both install phase phasic difference 45 degree, wherein every group of PZT (piezoelectric transducer) comprises again two PZT (piezoelectric transducer)s, in every group, the installation site of two PZT (piezoelectric transducer)s differs 180 degree, as shown in Figure 2, outermost one angle value corresponding to circle numeral relevant position in figure, 3 of the outer shroud the insides ellipse setting with each other represents four wave amplitudes of the bell-shaped vibrator bottom margin shape of shaking, indicate digital box indicating the position of PZT (piezoelectric transducer) can be installed, in Fig. 21, two PZT (piezoelectric transducer)s of first group of PZT (piezoelectric transducer) 41 are installed at 5 places, in the drawings 2, two PZT (piezoelectric transducer)s of second group of PZT (piezoelectric transducer) 42 are installed at 6 places.
That above-mentioned digital signal processor (DSP) is selected is the TMS320F2812 of American TI Company, and that low pass switched capacitor filter is selected is the MAX296 of U.S. MAXIM company, and that power operational amplifier is selected is the OPA544 of U.S. BB company.
The course of work of the exciting circuit of above-mentioned a kind of bell-shaped vibrator is:
1) the I/O port PWM1 of programmable logic device 1 produces respectively with PWM3 the square wave that two-way is identical with oscillator natural frequency and duty ratio is 50%, as the signal input of the first sinusoidal signal generator 21 and the second sinusoidal signal generator 22, controls the first sinusoidal signal generator 21 and the second sinusoidal signal generator 22 sinusoidal wave frequency that produces;
2) to produce respectively two-way frequency be the square wave that 50 times of oscillator natural frequency and duty ratio are 50% for the I/O port PWM2 of programmable logic device 1 and PWM4, as the clock input of the first sinusoidal signal generator 21 and the second sinusoidal signal generator 22, control the cut-off frequency of low pass switched capacitor filter in the first sinusoidal signal generator 21 and the second sinusoidal signal generator 22, make cut-off frequency equal the frequency of its input signal, and then control sinusoidal wave amplitude;
3) sine wave that the first sinusoidal signal generator 21 and the second sinusoidal signal generator 22 produce makes the first power operational amplifier 31 and the second power operational amplifier 32 produce two-way sinusoidal excitation signal as the input signal of the first power operational amplifier 31 and the second power operational amplifier 32 respectively;
4) the two-way sinusoidal excitation signal that step 3) produces is respectively as the input signal of first group of PZT (piezoelectric transducer) 41 and second group of PZT (piezoelectric transducer) 42, and excitation bell-shaped vibrator produces the four antinodes shape of shaking;
5) by controlling the frequency of the 4 road square-wave signals that 4 I/O port PWM1, PWM2, PWM3, the PWM4 of programmable logic device 1 produce, can control amplitude and the frequency of two-way sinusoidal excitation signal, and then control the shake amplitude of shape and the shape of shaking of four antinodes and reverse.
The above is preferred embodiment of the present invention, and the present invention should not be confined to the disclosed content of this embodiment and accompanying drawing.Everyly do not depart from the equivalence completing under spirit disclosed in this invention or revise, all falling into the scope of protection of the invention.

Claims (4)

1. an exciting circuit for bell-shaped vibrator, is characterized in that: programmable logic device (1), the first sinusoidal signal generator (21), the second sinusoidal signal generator (22), the first power operational amplifier (31), the second power operational amplifier (32), first group of PZT (piezoelectric transducer) (41), second group of PZT (piezoelectric transducer) (42) and constant-temperature crystal oscillator (5), consist of;
Wherein the signal input port SIG of the first sinusoidal signal generator (21) and the second sinusoidal signal generator (22) is connected with PWM3 with 2 I/O port PWM1 of programmable logic device (1) respectively, the input end of clock mouth CLK of the first sinusoidal signal generator (21) and the second sinusoidal signal generator (22) is connected with PWM4 with the I/O port PWM2 of 2 of programmable logic device (1) respectively, the output port OUT of the first sinusoidal signal generator (21) and the second sinusoidal signal generator (22) is connected with the input port IN of the second power operational amplifier (32) with the first power operational amplifier (31) respectively, the output port OUT of the first power operational amplifier (31) and the second power operational amplifier (32) is connected with second group of PZT (piezoelectric transducer) (42) with first group of PZT (piezoelectric transducer) (41) respectively, the external clock input port EXCLK of programmable logic device (1) is connected with the output terminal of clock mouth of constant-temperature crystal oscillator (5),
Above-mentioned first group of PZT (piezoelectric transducer) (41) and second group of PZT (piezoelectric transducer) (42) are installed in bell-shaped vibrator top, and both install phase phasic difference 45 degree, wherein every group of PZT (piezoelectric transducer) comprises again two PZT (piezoelectric transducer)s, and the installation site of two PZT (piezoelectric transducer)s differs 180 degree in every group;
The JTAG programming port of above-mentioned programmable logic device (1) is connected with external programmer (6).
2. the exciting circuit of a kind of bell-shaped vibrator according to claim 1, is characterized in that: described programmable logic device (1) adopts digital signal processor DSP or single-chip microprocessor MCU to realize.
3. the exciting circuit of a kind of bell-shaped vibrator according to claim 1, it is characterized in that: described the first sinusoidal signal generator (21) and the second sinusoidal signal generator (22) are same structure, include low pass switched capacitor filter, active low-pass first order filter and related peripheral circuit, its annexation is: the signal input port of low pass switched capacitor filter and input end of clock mouth are signal input port SIG and the input end of clock mouth CLK of corresponding sinusoidal signal generator, the output port of low pass switched capacitor filter is connected with the input port of corresponding active low-pass first order filter, the output port of active low-pass first order filter is the output port OUT of corresponding sinusoidal signal generator.
4. the exciting circuit of a kind of bell-shaped vibrator according to claim 1, is characterized in that its course of work is:
1) the I/O port PWM1 of programmable logic device (1) produces respectively with PWM3 the square wave that two-way is identical with oscillator natural frequency and duty ratio is 50%, as the signal input of the first sinusoidal signal generator (21) and the second sinusoidal signal generator (22), controls the first sinusoidal signal generator (21) and the second sinusoidal signal generator (22) sinusoidal wave frequency that produces;
2) to produce respectively two-way frequency be the square wave that 50 times of oscillator natural frequency and duty ratio are 50% for the I/O port PWM2 of programmable logic device (1) and PWM4, as the clock input of the first sinusoidal signal generator (21) and the second sinusoidal signal generator (22), control the cut-off frequency of low pass switched capacitor filter in the first sinusoidal signal generator (21) and the second sinusoidal signal generator (22), make cut-off frequency equal the frequency of its input signal, and then control sinusoidal wave amplitude;
3) sine wave that the first sinusoidal signal generator (21) and the second sinusoidal signal generator (22) produce makes the first power operational amplifier (31) and the second power operational amplifier (32) produce two-way sinusoidal excitation signal as the input signal of the first power operational amplifier (31) and the second power operational amplifier (32) respectively;
4) the two-way sinusoidal excitation signal that step 3) produces is respectively as the input signal of first group of PZT (piezoelectric transducer) (41) and second group of PZT (piezoelectric transducer) (42), encourages bell-shaped vibrator to produce the four wave amplitudes shape of shaking;
5) by controlling the frequency of the 4 road square-wave signals that 4 I/O port PWM1, PWM2, PWM3, the PWM4 of programmable logic device (1) produce, can control amplitude and the frequency of two-way sinusoidal excitation signal, and then control the shake amplitude of shape and the shape of shaking of four wave amplitudes and reverse.
CN201110359333.XA 2011-11-14 2011-11-14 Excitation circuit of bell-shaped vibrator Expired - Fee Related CN102497166B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201110359333.XA CN102497166B (en) 2011-11-14 2011-11-14 Excitation circuit of bell-shaped vibrator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201110359333.XA CN102497166B (en) 2011-11-14 2011-11-14 Excitation circuit of bell-shaped vibrator

Publications (2)

Publication Number Publication Date
CN102497166A CN102497166A (en) 2012-06-13
CN102497166B true CN102497166B (en) 2014-04-02

Family

ID=46188964

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201110359333.XA Expired - Fee Related CN102497166B (en) 2011-11-14 2011-11-14 Excitation circuit of bell-shaped vibrator

Country Status (1)

Country Link
CN (1) CN102497166B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103047978B (en) * 2012-12-17 2013-11-13 北京信息科技大学 Bell-shaped oscillator type angular-seed gyroscope harmonic oscillator frequency cracking restraining method
CN103313144A (en) * 2013-07-01 2013-09-18 贵州中科汉天下电子有限公司 Control method of radio frequency switch
CN109269627B (en) * 2018-11-16 2023-05-16 中国计量大学 Dynamic piezoelectric transducer resonance state on-line detection circuit

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1189024A2 (en) * 2000-09-15 2002-03-20 BEI Technologies, Inc. Inertial rate sensor and method with improved clocking
CN101968360A (en) * 2010-07-05 2011-02-09 北京信息科技大学 Circuit system for bell-shaped vibrator angular rate gyro

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7437253B2 (en) * 2004-07-29 2008-10-14 The Boeing Company Parametrically disciplined operation of a vibratory gyroscope

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1189024A2 (en) * 2000-09-15 2002-03-20 BEI Technologies, Inc. Inertial rate sensor and method with improved clocking
CN101968360A (en) * 2010-07-05 2011-02-09 北京信息科技大学 Circuit system for bell-shaped vibrator angular rate gyro

Also Published As

Publication number Publication date
CN102497166A (en) 2012-06-13

Similar Documents

Publication Publication Date Title
TW468035B (en) Micro inertial measurement unit
CN102109345B (en) Digital signal processing method and device for micro-mechanical gyroscope
CN102834695B (en) Physical quantity transducer
CN202304840U (en) Flexible gyroscope rebalancing loop board
CN102759365B (en) Bias stability improving method and device for silicon micromechanical gyroscope
CN102497166B (en) Excitation circuit of bell-shaped vibrator
CN105547294B (en) The appraisal procedure of the optimal installation configuration of two frequency machine laser gyroscope shaking Inertial Measurement Units
CN102607546B (en) Orthogonal error processing method for micromechanical gyroscope and device
CN108803473A (en) A kind of micro-mechanical accelerometer control method and device
CN102305627A (en) All solid dual-axis gyroscope with discoid piezoelectric vibrator
CN105547274A (en) Active vibration damping control method for mechanically dithered ring laser gyroscope
CN103344228B (en) Shake mass body sound wave solid fluctuation microthrust test drives and testing circuit
Liu et al. Digital closed-loop control based on adaptive filter for drive mode of a MEMS gyroscope
CN113607151B (en) Quartz gyro error suppression method based on time division driving and orthogonal electric cancellation
CN203259542U (en) Flexible pendulous accelerometer digital control circuit
Zhang et al. The structure principle of silicon micromachined gyroscope driven by the rotating carrier
Yin et al. Structure-decoupled dual-mass MEMS gyroscope with self-adaptive closed-loop detection
CN103048925B (en) A kind of Campaniform oscillator type angular rate gyroscope oscillator amplitude stability method
TW479131B (en) Processing method for motion measurement
RU106357U1 (en) FIBER OPTICAL GYROSCOPE
Wang et al. Research and experiment on the drive frequency control of the MEMS gyroscope
Wang et al. Research on principle and phase of silicon micromachined gyroscope using for rotating carrier
Xu et al. Design of a digital control system of gyroscope
RU2417352C1 (en) Precision gyro stabiliser
Ning et al. Research on the control loop for Solid Vibratory Gyroscope

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20140402

Termination date: 20141114

EXPY Termination of patent right or utility model