CN102494808B

CN102494808B - Microcalorimeter, power reference system and measurement method using the microcalorimeter

Info

Publication number: CN102494808B
Application number: CN201110372129.1A
Authority: CN
Inventors: 崔孝海; 李勇
Original assignee: National Institute of Metrology
Current assignee: National Institute of Metrology
Priority date: 2011-11-21
Filing date: 2011-11-21
Publication date: 2014-02-12
Anticipated expiration: 2031-11-21
Also published as: CN102494808A

Abstract

The invention provides a microcalorimeter, a power reference system utilizing the microcalorimeter and a measuring principle thereof. The microcalorimeter has an structure of an auxiliary heater, the power reference system applies current bias to the auxiliary heater of the microcalorimeter by the aid of an auxiliary heating direct-current substitute instrument so as to realize direct-current substitution measurement to a heat insulation section, and effective efficiency of a working end can be acquired by a short-circuiter and calibration tests. Affection on a thermistor mount according to the transfer standards is eliminated during computing, S parameter measurement and side-arm power monitoring are omitted, tracing patch of the radiofrequency power reference is changed, and only voltage reference can be traced. In addition, the power reference system utilizing the measuring principle will be the national radio power reference.

Description

Microcalorimeter, power reference system and measurement method using the microcalorimeter

技术领域 technical field

本发明涉及微波功率基准测量技术领域，特别地涉及一种微量热计、使用该微量热计的功率基准系统及其测量方法。The invention relates to the technical field of microwave power reference measurement, in particular to a microcalorimeter, a power reference system using the microcalorimeter and a measurement method thereof.

背景技术 Background technique

由于基于量热方式的功率基准测量准确度高，因此作为国家微波功率基准，常常采用量热计或者微量热计。量热计是以微波负载作为微波功率吸收部件，而微量热计是以热敏电阻座作为微波功率吸收部件，后者具有响应速度快、传递方便、操作简单的特点。微量热计的目的是测出热敏电阻座的有效效率。Due to the high measurement accuracy of power benchmarks based on calorimetry, calorimeters or microcalorimeters are often used as national microwave power benchmarks. The calorimeter uses the microwave load as the microwave power absorbing part, while the microcalorimeter uses the thermistor base as the microwave power absorbing part. The latter has the characteristics of fast response, convenient transmission and simple operation. The purpose of the microcalorimeter is to measure the effective efficiency of the thermistor mount.

目前在WR22(33GHz-50GHz)频段各国均采用微量热计。如图1所示，为现有微量热计的结构图。传统微量热计测量系统主要由以下几部分构成：At present, microcalorimeters are used in all countries in the WR22 (33GHz-50GHz) frequency band. As shown in Figure 1, it is a structural diagram of an existing microcalorimeter. The traditional microcalorimeter measurement system mainly consists of the following parts:

1)输入波导，将信号输入到功率座中；1) Input the waveguide to input the signal into the power seat;

2)基准底盘，连接输入波导和底盘连接器；2) Reference chassis, connecting the input waveguide and the chassis connector;

3)底盘连接器，用来连接底盘和隔热段；3) Chassis connector, used to connect the chassis and heat insulation section;

4)隔热段和接触法兰；4) Insulation section and contact flange;

5)工作功率座和参考功率座；5) Working power base and reference power base;

6)外盖，与基准底盘密封与外边的水隔离；6) The outer cover is sealed with the reference chassis and isolated from the outside water;

7)热电堆，感应工作端的温升，转换成电信号；7) Thermopile, which senses the temperature rise at the working end and converts it into an electrical signal;

8)外围仪器，控制软件。8) Peripheral instruments, control software.

在图1中，热电堆用于感应工作端的温度变化，参考端为其提供温度恒定的参考点，隔热段用来进行隔热。整个量热装置被密封地放置在恒温水槽中，四线功率计为功率座提供偏置电压，纳伏电压表用于测量热电堆电压。整个测量过程大致为：在不加微波时，工作端的功率座内电桥由四线功率计偏置在一个直流电压，此时功率座偏置电压为v₁，系统热平衡后热电堆读数为e₁；加入微波功率后，微波在功率座耗散产生热量，故电桥重新平衡，偏置电压降为v₂，在系统达到热平衡后，测得热电堆读数为e₂。假设R为功率座偏置电阻，则直流替代功率P_b为：In Figure 1, the thermopile is used to sense the temperature change at the working end, the reference end provides a reference point with a constant temperature, and the heat insulation section is used for heat insulation. The entire calorimetric device is sealed in a constant temperature water bath, a four-wire wattmeter provides bias voltage for the power base, and a nanovoltmeter is used to measure the thermopile voltage. The whole measurement process is roughly as follows: when no microwave is added, the electric bridge in the power seat at the working end is biased at a DC voltage by a four-wire power meter. At this time, the bias voltage of the power seat is v ₁ , and the reading of the thermopile after the system thermal balance is e ₁ ; After the microwave power is added, the microwave dissipates in the power seat to generate heat, so the bridge is rebalanced, and the bias voltage drops to v ₂ . After the system reaches thermal equilibrium, the thermopile reading is e ₂ . Assuming that R is the bias resistance of the power base, the DC substitute power P _b is:

${P P}_{b b} = = \frac{{v v}_{11}^{22} - - {v v}_{22}^{22}}{R R} - - - - - - ((11))$

由于功率座波导壁损耗及替代的不等效性，耗散在功率座上的微波功率P_rf不能完全由替代功率表示，因此可定义有效效率为：Due to the loss of the waveguide wall of the power seat and the inequalities of substitution, the microwave power P _rf dissipated on the power seat cannot be completely represented by the substitution power, so the effective efficiency can be defined as:

${η η}_{e e} = = \frac{{P P}_{b b}}{{P P}_{rf rf}} = = g g \frac{11 - - {v v}_{22}^{22} / / {v v}_{11}^{22}}{{e e}_{22} / / {e e}_{11} - - {v v}_{22}^{22} / / {v v}_{11}^{22}} - - - - - - ((22))$

其中，g是一个与频率有关的修正因子，测量有效效率关键是要测量g。Among them, g is a frequency-related correction factor, and the key to measuring the effective efficiency is to measure g.

目前，修正因子g的计算方法通常采用短路器方法，即在接触法兰参考面上放入短路器，由于短路器是由在接触法兰和功率座之间放置一个薄铜片做成的，因此微量热计的热特性几乎没有改变。但是短路器的反射系数测量的不确定度对修正因子不确定度的影响非常大。首先可通过网络分析仪测量得到功率座、短路器、信号源的反射系数，即Γ_M为功率座的反射系数，Γ_FS为短路器的反射系数，Γ_GE为信号源反射系数。k₁为热电堆输出对于功率输出的比例因子，这里由于功率变化很小，可以认为功率在变化范围内，热电堆的输出是线性的，因此k₁这个参数可以由不加射频情况下热电堆输出和直流功率的比值算出。然后分两个不同模式进行测量：一是在短路器测量模式下，测得热电堆电压变化为e_FS，定向耦合器的旁臂功率座直流替代功率为P_3FS；二是在标准模式下，不加短路器，微波入射到微量热计内部的标准功率座，此时测得标准功率座替代功率为P_S，定向耦合器的旁臂功率座直流替代功率为P_3S，其有效效率为η_e。首先计算标准模式下，入射到功率座的微波功率P_IFS：At present, the calculation method of the correction factor g usually adopts the short circuit method, that is, the short circuit is placed on the reference surface of the contact flange. Since the short circuit is made by placing a thin copper sheet between the contact flange and the power seat, The thermal characteristics of the microcalorimeter are thus hardly changed. However, the measurement uncertainty of the reflection coefficient of the short circuit has a great influence on the uncertainty of the correction factor. First, the reflection coefficients of the power base, short circuit and signal source can be measured by a network analyzer, that is, Γ _M is the reflection coefficient of the power base, Γ _FS is the reflection coefficient of the short circuit, and Γ _GE is the reflection coefficient of the signal source. k ₁ is the proportional factor of the thermopile output to the power output. Here, since the power change is very small, it can be considered that the power is within the range of change, and the output of the thermopile is linear. Therefore, the parameter k ₁ can be determined by the thermopile without adding radio frequency. The ratio of output and DC power is calculated. Then it is measured in two different modes: one is in the short circuit mode, the measured thermopile voltage change is e _FS , and the DC substitution power of the side arm power seat of the directional coupler is P _3FS ; the other is in the standard mode, Without a short circuit, the microwave is incident on the standard power seat inside the microcalorimeter. At this time, the measured standard power seat substitute power is P _S , the DC substitute power of the side arm power seat of the directional coupler is P _3S , and its effective efficiency is η _e . First calculate the microwave power P _IFS incident on the power base in standard mode:

${P P}_{IFS IFS} = = \frac{{P P}_{S S}}{{η η}_{e e} ((11 - - {| | {Γ Γ}_{M m} | |}^{22}))} \frac{{P P}_{33 FS FS}}{{P P}_{33 S S}} \frac{{| | 11 - - {Γ Γ}_{GE GE} {Γ Γ}_{M m} | |}^{22}}{{| | 11 - - {Γ Γ}_{GE GE} {Γ Γ}_{FS FS} | |}^{22}} - - - - - - ((33))$

则g为：Then g is:

$g g = = 11 + + \frac{11 + + {| | {Γ Γ}_{M m} | |}^{22}}{11 - - {| | {Γ Γ}_{M m} | |}^{22}} ((\frac{{e e}_{FS FS}}{{k k}_{11} {P P}_{IFS IFS} ((11 + + {| | {Γ Γ}_{FS FS} | |}^{22}))} - - \frac{11 - - {| | {Γ Γ}_{FS FS} | |}^{22}}{11 + + {| | {Γ Γ}_{FS FS} | |}^{22}})) - - - - - - ((44))$

在(4)式中，η_e其实是假设g＝1情况下，由(2)式计算得出的。In formula (4), η _e is actually calculated from formula (2) under the assumption that g=1.

从以上描述可以看出，现有技术的缺点是由于短路器、定向耦合器、功率座的S参数需要用网络分析仪来测量，这样不确定度将会溯源到网络参数，而网络参数又与功率密切相关，这样就会存在矛盾。且在现有的微量热计评定过程中，都需要测量短路器、热敏电阻座、等效信号源的散射参数，不确定度溯源到网络分析仪。As can be seen from the above description, the shortcoming of the prior art is that the S parameters of the crowbar, directional coupler, and power base need to be measured with a network analyzer, so that the uncertainty will be traced to the network parameters, and the network parameters are related to the network parameters. Power is closely related, so there will be a contradiction. Moreover, in the evaluation process of the existing microcalorimeter, it is necessary to measure the scattering parameters of the short circuit, the thermistor base, and the equivalent signal source, and the uncertainty can be traced to the network analyzer.

发明内容 Contents of the invention

本发明旨在至少解决现有技术中存在的技术问题，特别创新地提出了一种微量热计、使用该微量热计的功率基准系统及其测量方法。The present invention aims to at least solve the technical problems existing in the prior art, and particularly innovatively proposes a microcalorimeter, a power reference system using the microcalorimeter and a measurement method thereof.

为了实现本发明的上述目的，根据本发明的第一个方面，本发明提供了一种微量热计，其包括基准底盘和连接所述基准底盘的外盖，以及由所述基准底盘和所述外盖密封形成的腔室；底盘连接器，该底盘连接器设置在所述腔室内并与所述基准底盘连接；第一隔热段和第二隔热段，所述第一隔热段和第二隔热段通过底盘连接器连接在所述基准底盘之上；工作端和参考端，所述工作端通过第一法兰连接在所述第一隔热段之上，所述参考端通过第二法兰连接在所述第二隔热段之上；输入波导，所述输入波导与所述底盘连接器相连、用于将待测信号输入到所述工作端中；热电堆，所述热电堆连接在所述工作端和参考端之间，用于检测所述工作端相对于所述参考端的温度偏差信号；热敏电阻，所述热敏电阻形成在所述第一隔热段和所述第二隔热段上、用于反映所述第一隔热段和所述第二隔热段的温度变化；测温电桥，所述测温电桥分别与所述第一隔热段和所述第二隔热段的热敏电阻相连、用于检测温升并将温升转换成电信号；以及辅助加热器，所述辅助加热器形成在所述第一法兰上，用于为所述第一隔热段加热。In order to achieve the above object of the present invention, according to the first aspect of the present invention, the present invention provides a microcalorimeter, which includes a reference chassis and an outer cover connected to the reference chassis, and the reference chassis and the A cavity formed by sealing the outer cover; a chassis connector, which is arranged in the cavity and connected to the reference chassis; a first thermal insulation section and a second thermal insulation section, the first thermal insulation section and the The second heat insulation section is connected on the reference chassis through the chassis connector; the working end and the reference end, the working end is connected on the first heat insulation section through the first flange, and the reference end is connected to the first heat insulation section through the first flange. The second flange is connected on the second heat insulation section; the input waveguide is connected with the chassis connector and is used to input the signal to be measured into the working end; the thermopile, the A thermopile is connected between the working terminal and the reference terminal, and is used for detecting a temperature deviation signal of the working terminal relative to the reference terminal; a thermistor, the thermistor is formed between the first heat insulation section and On the second heat insulation section, it is used to reflect the temperature change of the first heat insulation section and the second heat insulation section; a temperature measuring bridge, the temperature measuring bridge is respectively insulated from the first heat insulation The section is connected with the thermistor of the second insulation section for detecting temperature rise and converting the temperature rise into an electrical signal; and an auxiliary heater, which is formed on the first flange and used for To heat the first insulation section.

本发明的微量热计采用辅助加热器结构，对隔热段进行直流替代测量，在计算中扣除了对传递标准-热敏电阻座的影响，不需要任何的散射参数测量，也不需要旁臂监测，就获得了有效效率，提高了微量热计的准确性。The microcalorimeter of the present invention adopts an auxiliary heater structure to carry out DC substitution measurement on the insulation section, and the influence on the transfer standard-thermistor base is deducted in the calculation, and does not require any measurement of scattering parameters, nor does it need a side arm monitoring, the effective efficiency is obtained and the accuracy of the microcalorimeter is improved.

为了实现本发明的上述目的，根据本发明的第二个方面，提供了一种使用本发明的微量热计的功率基准系统，其包括：微量热计；信号源，所述信号源的信号输出端与所述微量热计的信号输入端相连；功率计，所述功率计的信号输入端与所述微量热计的工作端相连，所述功率计和DC(Direct Current，直流)参考与功率测量系统相连，所述功率测量系统的信号输出端与所述信号源的AM(调谐)信号输入端相连，为所述信号源提供稳幅反馈；辅助加热直流替代仪，所述辅助加热直流替代仪与所述微量热计的热电堆和辅助加热器相连，用于接收所述热电堆测得的温度偏差信号并向所述辅助加热器施加功率偏置；电压表1，所述电压表1与所述功率计相连、用于监测所述功率计的电压；电压表2，所述电压表2与所述辅助加热直流替代仪相连，用于监测所述辅助加热直流替代仪的电压；电压表3，所述电压表3与所述测温电桥相连，通过所述电压表3监测所述第一隔热段的温升。In order to achieve the above object of the present invention, according to a second aspect of the present invention, a power reference system using the microcalorimeter of the present invention is provided, which includes: a microcalorimeter; a signal source, and the signal output of the signal source Terminal is connected with the signal input end of described microcalorimeter; Power meter, the signal input end of described power meter is connected with the working end of described microcalorimeter, and described power meter and DC (Direct Current, direct current) reference and power The measurement system is connected, and the signal output terminal of the power measurement system is connected with the AM (tuning) signal input terminal of the signal source to provide a stable amplitude feedback for the signal source; the auxiliary heating DC substitute instrument, the auxiliary heating DC substitute The instrument is connected with the thermopile and the auxiliary heater of the microcalorimeter, and is used to receive the temperature deviation signal measured by the thermopile and apply power bias to the auxiliary heater; voltmeter 1, the voltmeter 1 Connected to the power meter, used to monitor the voltage of the power meter; Voltmeter 2, the voltmeter 2 is connected to the auxiliary heating DC substitution instrument, used to monitor the voltage of the auxiliary heating DC substitution instrument; Voltage Table 3, the voltmeter 3 is connected to the temperature measuring bridge, and the temperature rise of the first heat insulation section is monitored through the voltmeter 3 .

本发明的功率基准系统，通过辅助加热直流替代仪向微量热计的辅助加热器施加功率偏置，对隔热段进行直流替代测量，只需要通过短路器、校准实验，就可以得出工作端的有效效率，而不需要S参数测量及旁臂功率监测，这种新的功率基准系统将成为中国国家无线电功率基准。The power reference system of the present invention applies power bias to the auxiliary heater of the microcalorimeter through the auxiliary heating direct current substitution instrument, and performs direct current substitution measurement on the heat insulation section. Effective efficiency, without the need for S-parameter measurements and sidearm power monitoring, this new power reference system will become China's national radio power reference.

为了实现本发明的上述目的，根据本发明的第三个方面，提供了一种本发明功率基准系统的功率测量方法，其包括如下步骤：In order to achieve the above object of the present invention, according to a third aspect of the present invention, a power measurement method of the power reference system of the present invention is provided, which includes the following steps:

S1：在工作端和第一法兰之间夹入短路片，测量信号源关闭时系统平衡后的工作端偏置电压V_{DC，sh，off}、测温电桥初始电压e_i，sh，0，辅助加热器偏置电压V_A，sh，off，测量信号源开启时系统平衡后的工作端偏置电压V_DC，sh，on、测温电桥初始电压e_i，sh，on，辅助加热器偏置电压V_A，sh，on；S1: Insert a short circuit between the working end and the first flange, and measure the bias voltage V _{DC of the working end after the system is balanced when the signal source is turned off, sh, off} , and the initial voltage of the temperature measuring bridge e _{i, sh, 0} , Auxiliary heater bias voltage V _{A, sh, off} , bias voltage V _{DC of the working end after the system is balanced when the measurement signal source is turned on, sh, on} , initial voltage of the temperature measuring bridge e _{i, sh, on} , auxiliary heating Device bias voltage V _{A, sh, on} ;

S2：去除工作端和第一法兰之间的短路片，测量信号源关闭时系统平衡后的工作端偏置电压V_{DC，cal，off}、测温电桥初始电压e_i，cal，0，辅助加热器偏置电压V_{A，cal，off}，测量信号源开启时系统平衡后的工作端偏置电压V_{DC，cal，on}、测温电桥初始电压e_i，cal，on，辅助加热器偏置电压V_A，cal，on；S2: Remove the short circuit between the working end and the first flange, and measure the bias voltage V _{DC of the working end after the system is balanced when the signal source is turned off, cal, off} , the initial voltage of the temperature measuring bridge e _{i, cal, 0} , Auxiliary heater bias voltage V _{A, cal, off} , working terminal bias voltage V _{DC after the system is balanced when the measurement signal source is turned on, cal, on} , temperature measuring bridge initial voltage e _{i, cal, on} , auxiliary heater Bias voltage V _{A, cal, on} ;

S3：计算使工作端温度上升的功率P_dw，S3: Calculate the power P _dw that increases the temperature of the working end,

${k k}_{w w} {P P}_{dw dw} = = {P P}_{A A,, sub sub,, cal cal} - - \frac{{Δe Δe}_{i i,, cal cal}}{{Δe Δe}_{i i,, sh sh}} {P P}_{A A,, sub sub,, sh sh} + + \frac{{Δe Δe}_{i i,, cal cal}}{{Δe Δe}_{i i,, sh sh}} {k k}_{sh sh} {P P}_{sh sh},,$

其中，k_w为工作端吸收信号功率导致辅助加热器平衡功率的变化的系数，Among them, _kw is the coefficient of the change of the balance power of the auxiliary heater caused by the signal power absorbed by the working end,

k_sh为隔热段和法兰吸收信号功率导致辅助加热器平衡功率的变化的系数，k _sh is the coefficient of the change of the balance power of the auxiliary heater caused by the signal power absorbed by the insulation section and the flange,

P_sh为隔热段和法兰吸收的信号功率，P _sh is the signal power absorbed by the insulation section and the flange,

${P P}_{A A,, sub sub,, cal cal} = = \frac{{V V}_{A A,, cal cal,, off off}^{22} - - {V V}_{A A,, cal cal,, on on}^{22}}{{R R}_{A A}},,$

${P P}_{A A,, sub sub,, sh sh} = = \frac{{V V}_{A A,, sh sh,, off off}^{22} - - {V V}_{A A,, sh sh,, on on}^{22}}{{R R}_{A A}},,$

Δe_i，sh＝e_i，sh，on-e_i，sh，0，Δe _i,sh =e _i,sh,on -e _i,sh,0 ,

Δe_i，cal＝e_i，cal，on-e_i，cal，0，Δe _i,cal =e _i,cal,on -e _i,cal,0 ,

S4：计算工作端的有效效率η_e，S4: Calculate the effective efficiency η _e of the working end,

${η η}_{e e} = = \frac{{P P}_{sub sub}}{{P P}_{sub sub} + + {P P}_{dw dw}} = = \frac{{P P}_{sub sub}}{{P P}_{sub sub} + + \frac{11}{{k k}_{w w}} (({P P}_{A A,, sub sub,, cal cal} - - \frac{{Δe Δ e}_{i i,, cal cal}}{{Δe Δ e}_{i i,, sh sh}} {P P}_{A A,, sub sub,, sh sh} + + \frac{{Δe Δ e}_{i i,, cal cal}}{{Δe Δ e}_{i i,, sh sh}} {k k}_{sh sh} {P P}_{sh sh}))} . .$

本发明中功率基准系统的测量原理，不需要测量短路器、热敏电阻座、等效信号源的散射参数，就能够获得了有效效率。这种新的测量原理是基于对隔热段的直流替代测量，从而在计算中扣除了对传递标准-热敏电阻座的影响。这种新方法改变了射频功率基准的溯源路径，使其溯源到电压基准，利用该测量原理的功率基准系统将成为中国国家无线电功率基准。The measurement principle of the power reference system in the present invention can obtain effective efficiency without measuring the scattering parameters of the short circuit, the thermistor base and the equivalent signal source. This new measuring principle is based on a direct current substitution measurement of the insulation section, whereby the influence of the transfer standard - the thermistor holder - is deducted in the calculation. This new method changes the traceability path of the radio frequency power reference, making it traceable to the voltage reference, and the power reference system using this measurement principle will become China's national radio power reference.

本发明的附加方面和优点将在下面的描述中部分给出，部分将从下面的描述中变得明显，或通过本发明的实践了解到。Additional aspects and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.

附图说明 Description of drawings

本发明的上述和/或附加的方面和优点从结合下面附图对实施例的描述中将变得明显和容易理解，其中：The above and/or additional aspects and advantages of the present invention will become apparent and comprehensible from the description of the embodiments in conjunction with the following drawings, wherein:

图1是现有微量热计的结构示意图；Fig. 1 is the structural representation of existing microcalorimeter;

图2是本发明实施例的微量热计的结构示意图；Fig. 2 is the structural representation of the microcalorimeter of the embodiment of the present invention;

图3是图2中所示微量热计的产品结构图；和Fig. 3 is a product structure diagram of the microcalorimeter shown in Fig. 2; and

图4是本发明实施例的功率基准系统连接示意图。Fig. 4 is a schematic diagram of the connection of the power reference system according to the embodiment of the present invention.

具体实施方式 Detailed ways

下面详细描述本发明的实施例，所述实施例的示例在附图中示出，其中自始至终相同或类似的标号表示相同或类似的元件或具有相同或类似功能的元件。下面通过参考附图描述的实施例是示例性的，仅用于解释本发明，而不能理解为对本发明的限制。Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.

在本发明的描述中，需要理解的是，术语“纵向”、“横向”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本发明和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本发明的限制。In describing the present invention, it should be understood that the terms "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", The orientation or positional relationship indicated by "horizontal", "top", "bottom", "inner", "outer", etc. are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than Nothing indicating or implying that a referenced device or element must have a particular orientation, be constructed, and operate in a particular orientation should therefore not be construed as limiting the invention.

在本发明的描述中，除非另有规定和限定，需要说明的是，术语“安装”、“相连”、“连接”应做广义理解，例如，可以是机械连接或电连接，也可以是两个元件内部的连通，可以是直接相连，也可以通过中间媒介间接相连，对于本领域的普通技术人员而言，可以根据具体情况理解上述术语的具体含义。In the description of the present invention, unless otherwise specified and limited, it should be noted that the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be mechanical connection or electrical connection, or two The internal communication of each element may be directly connected or indirectly connected through an intermediary. Those skilled in the art can understand the specific meanings of the above terms according to specific situations.

图2示出了根据本发明的一个优选实施例的微量热计的结构示意图，图3是图2中所示微量热计的产品结构图，从图中可见，该微量热计包括外盖、基准底盘、底盘连接器、第一隔热段、第二隔热段、工作端、参考端、第一法兰、第二法兰、热敏电阻、输入波导、测温电桥和辅助加热器，其中，基准底盘和外盖连接，该基准底盘和外盖密封形成一个密闭腔室，以使微量热计内的各元件处于相同的温度环境中，保证了测量的准确性；在该密闭腔室内设置有与基准底盘连接的底盘连接器；第一隔热段和第二隔热段通过底盘连接器连接在基准底盘之上；工作端通过第一法兰连接在第一隔热段之上，参考端通过第二法兰连接在第二隔热段之上；输入波导与底盘连接器相连、用于将待测信号输入到工作端中；热电堆连接在工作端和参考端之间，用于检测工作端相对于参考端的温度偏差信号；热敏电阻形成在第一隔热段和第二隔热段上、用于反映第一隔热段和所述第二隔热段的温度变化；测温电桥分别与第一隔热段和第二隔热段的热敏电阻相连、用于检测第一隔热段相对于第二隔热段的温升并将温升转换成电信号；辅助加热器形成在第一隔法兰上，用于为第一隔热段加热。Fig. 2 shows the structure schematic diagram of the microcalorimeter according to a preferred embodiment of the present invention, Fig. 3 is the product structural diagram of the microcalorimeter shown in Fig. 2, as can be seen from the figure, this microcalorimeter comprises outer cover, Reference chassis, chassis connector, first insulation section, second insulation section, working end, reference end, first flange, second flange, thermistor, input waveguide, temperature measuring bridge and auxiliary heater , wherein, the reference chassis is connected with the outer cover, and the reference chassis and the outer cover are sealed to form a closed chamber, so that each element in the microcalorimeter is in the same temperature environment, which ensures the accuracy of the measurement; in the closed chamber A chassis connector connected to the reference chassis is provided in the room; the first heat insulation section and the second heat insulation section are connected to the reference chassis through the chassis connector; the working end is connected to the first heat insulation section through the first flange , the reference end is connected to the second insulation section through the second flange; the input waveguide is connected to the chassis connector for inputting the signal to be measured into the working end; the thermopile is connected between the working end and the reference end, It is used to detect the temperature deviation signal of the working end relative to the reference end; the thermistor is formed on the first heat insulation section and the second heat insulation section, and is used to reflect the temperature change of the first heat insulation section and the second heat insulation section ;The temperature measuring bridge is respectively connected with the thermistors of the first heat insulation section and the second heat insulation section, and is used to detect the temperature rise of the first heat insulation section relative to the second heat insulation section and convert the temperature rise into an electrical signal ; The auxiliary heater is formed on the first insulating flange for heating the first insulation section.

图2和图3中示出了辅助加热器结构的一种实施例，当然，这仅仅为示例，目的不在于限制本发明，其作用是使第一隔热段产生温升，可以是但不限于图2中所示的结构。在本实施例中，微量热计采用辅助加热器为第一隔热段加热，该辅助加热器可以是但不限于能够使第一隔热段产生温升的薄膜热电阻片、陶瓷电阻片、环状电阻片之一。Figure 2 and Figure 3 show an embodiment of the structure of the auxiliary heater, of course, this is only an example, the purpose is not to limit the present invention, its function is to make the first heat insulation section produce a temperature rise, it can be but not limited to the structure shown in Figure 2. In this embodiment, the microcalorimeter uses an auxiliary heater to heat the first heat insulation section. The auxiliary heater can be, but not limited to, a thin film thermal resistance sheet, a ceramic resistance sheet, One of the ring resistors.

图4示出了根据本发明的一个优选实施例的采用本发明的微量热计的功率基准系统，其包括微量热计、信号源、功率计、DC参考、功率测量系统、辅助加热直流替代仪、电压表1、电压表2、电压3，其中，信号源的信号输出端与微量热计的信号输入端相连；功率计的信号输入端与微量热计的工作端相连，功率计和DC参考与功率测量系统相连，功率测量系统的信号输出端与信号源的AM信号输入端相连，为信号源提供温服反馈，在本实施方式中，信号源为RF(Radio Frequency，射频)信号源；辅助加热直流替代仪与微量热计的热电堆和辅助加热器相连，用于接收热电堆测得的温度偏差信号并向辅助加热器施加功率偏置；电压表1与功率计相连、用于监测所述功率计的电压；电压表2与辅助加热直流替代仪相连，用于监测辅助加热直流替代仪的电压；电压表3与测温电桥相连，通过电压表3监测第一隔热段的温升。在本实施方式中，辅助加热直流替代仪向辅助加热器施加的功率偏置为1.0毫瓦。本发明的功率基准系统，通过辅助加热直流替代仪向微量热计的辅助加热器施加的电流偏置，通过对隔热段的直流替代测量，在计算中扣除了对传递标准-热敏电阻座的影响。这种新功率基准系统改变了射频功率基准的溯源路径，使其溯源到电压基准，将成为中国国家无线电功率基准。Figure 4 shows a power reference system using the microcalorimeter of the present invention according to a preferred embodiment of the present invention, which includes a microcalorimeter, signal source, power meter, DC reference, power measurement system, auxiliary heating DC substitute instrument , voltmeter 1, voltmeter 2, voltage 3, wherein, the signal output terminal of the signal source is connected with the signal input terminal of the microcalorimeter; the signal input terminal of the power meter is connected with the working terminal of the microcalorimeter, and the power meter and the DC reference Be connected with the power measurement system, the signal output end of the power measurement system is connected with the AM signal input end of the signal source, provide temperature service feedback for the signal source, in this embodiment, the signal source is an RF (Radio Frequency, radio frequency) signal source; The auxiliary heating DC substitution instrument is connected with the thermopile of the microcalorimeter and the auxiliary heater for receiving the temperature deviation signal measured by the thermopile and applying power bias to the auxiliary heater; the voltmeter 1 is connected with the power meter for monitoring The voltage of the wattmeter; the voltmeter 2 is connected with the auxiliary heating direct-current substitute instrument, and is used for monitoring the voltage of the auxiliary heating direct-current substitute instrument; temperature rise. In this embodiment, the power bias applied by the auxiliary heating direct current substitution instrument to the auxiliary heater is 1.0 mW. The power reference system of the present invention, through the current bias applied by the auxiliary heating DC substitution instrument to the auxiliary heater of the microcalorimeter, through the DC substitution measurement of the insulation section, the transfer standard - thermistor seat is deducted in the calculation Impact. This new power reference system changes the traceability path of the radio frequency power reference, making it traceable to the voltage reference, and will become China's national radio power reference.

为了更清楚的理解本发明实施例提出的上述功率基准系统，本发明还提出了上述功率基准系统的测量原理的实施例，该功率基准系统的量原理包括如下步骤：In order to understand the above-mentioned power reference system proposed by the embodiment of the present invention more clearly, the present invention also proposes an embodiment of the measurement principle of the above-mentioned power reference system. The measurement principle of the power reference system includes the following steps:

S1：短路器测量，按照图2装配微量热计，在工作端和第一法兰之间夹入短路片，使射频信号在工作端入口处全部反射。按照图3连接功率基准系统，关闭射频信号源，使整个微量热计热平衡。记录工作端偏置电压V_{DC，sh，off}、测温电桥初始电压e_i，sh，0，辅助加热直流替代仪偏置电压V_A，sh，off；开射频，待系统重新平衡后，记录工作端偏置电压V_DC，sh，on、测温电桥初始电压e_i，sh，on，辅助加热直流替代仪偏置电压V_A，sh，on。S1: For short circuit measurement, assemble the microcalorimeter according to Figure 2, insert a short circuit between the working end and the first flange, so that the radio frequency signal is completely reflected at the entrance of the working end. Connect the power reference system according to Figure 3, turn off the RF signal source, and make the entire microcalorimeter thermally balanced. Record the bias voltage V _{DC, sh, off} of the working end, the initial voltage e _{i, sh, 0} of the temperature measuring bridge, and the bias voltage V _{A, sh, off} of the auxiliary heating DC substitute instrument; turn on the radio frequency, and after the system is rebalanced, Record the bias voltage V _{DC, sh, on of} the working end, the initial voltage e _{i, sh, on of the temperature measuring bridge, and} the bias voltage V _{A, sh, on} of the auxiliary heating DC substitute instrument.

S2：校准测量，按照图2装配微量热计，在工作端和第一法兰之间不放置短路片。按照图3连接功率基准系统，关闭射频信号源，使整个微量热计热平衡，记录工作端偏置电压V_{DC，cal，off}、测温电桥初始电压e_i，cal，0，辅助加热直流替代仪偏置电压V_{A，cal，off}；开射频，待系统重新平衡后，记录工作端偏置电压V_{DC，cal，on}、测温电桥初始电压e_i，cal，on，辅助加热直流替代仪偏置电压V_A，cal，on。S2: Calibration measurement, assemble the microcalorimeter according to Figure 2, and do not place a short circuit between the working end and the first flange. Connect the power reference system according to Figure 3, turn off the RF signal source, make the entire microcalorimeter thermally balanced, record the working end bias voltage V _{DC, cal, off} , the initial voltage of the temperature measuring bridge e _{i, cal, 0} , and replace the auxiliary heating DC Instrument bias voltage V _{A, cal, off} ; turn on the radio frequency, and after the system is rebalanced, record the working end bias voltage V _{DC, cal, on} , the initial voltage of the temperature measuring bridge e _{i, cal, on} , and the auxiliary heating DC instead Instrument bias voltage V _{A, cal, on} .

微量热计的工作端的有效效率η_e为直流替代功率P_sub与工作端吸收净功率P_rf之比，即：The effective efficiency η _e of the working end of the microcalorimeter is the ratio of the DC substituting power P _sub to the net power P _rf absorbed by the working end, namely:

${η η}_{e e} = = \frac{{P P}_{sub sub}}{{P P}_{rf rf}} - - - - - - ((55))$

即工作端吸收了射频功率，一部分被直流替代了，另一部分导致了直流平衡后的工作端的温升。这样可以把P_rf分为两部分，一部分被直流替代掉了P_sub，另一部分导致了工作端的温升，这一部分功率为P_dw，即：That is, the working end absorbs the RF power, part of it is replaced by DC, and the other part causes the temperature rise of the working end after DC balance. In this way, P _rf can be divided into two parts, one part is replaced by _DC , and the other part causes the temperature rise of the working end. The power of this part is P _dw , namely:

${η η}_{e e} = = \frac{{P P}_{sub sub}}{{P P}_{sub sub} + + {P P}_{dw dw}} - - - - - - ((66))$

P_sub可以由电流自平衡电桥(四线功率计)测得，设未加射频功率时工作端的直流功率为P_DC，off，加入射频功率后工作端的直流功率为P_DC，on，则：P _sub can be measured by a current self-balancing bridge (four-wire power meter). Let the DC power at the working end be P _DC,off when no RF power is added, and P _DC,on after adding RF power, then:

${P P}_{sub sub} = = {P P}_{DC DC,, off off} - - {P P}_{DC DC,, on on} = = \frac{{V V}_{DC DC,, cal cal,, off off}^{22} - - {V V}_{DC DC,, cal cal,, on on}^{22}}{R R} - - - - - - ((77))$

为了测量P_dw，在隔热段上面加入了辅助直流加热结构，辅助加热直流替代仪向辅助直流加热结构施加1mW的直流偏置。在加入射频功率后，隔热段、法兰及工作端都会因为吸收了射频功率而产生温升，法兰吸收的射频功率和隔热段吸收的射频功率之间有确定的关系，将其一体考虑，记为P_i&f，它们都对座壁温升有贡献。因此，当考虑隔热段及法兰影响时，辅助加热替代功率P_A，sub可以写为：In order to measure P _dw , an auxiliary DC heating structure is added above the insulation section, and the auxiliary heating DC substitution instrument applies a 1mW DC bias to the auxiliary DC heating structure. After adding radio frequency power, the heat insulation section, flange and working end will all have a temperature rise due to the absorption of radio frequency power. There is a definite relationship between the radio frequency power absorbed by the flange and the radio frequency power absorbed by the heat insulation section. Consider, denoted as P _i&f , they all contribute to the temperature rise of the seat wall. Therefore, when considering the influence of the heat insulation section and the flange, the auxiliary heating substitution power P _A,sub can be written as:

P_A，sub＝P_A，off-P_A，on＝k_wP_dw+k_i&fP_i&f (8)P _{A, sub} = P _{A, off} - P _{A, on} = k _w P _dw + k _i&f P _i&f (8)

其中，in,

P_i&f：隔热段和法兰吸收的射频功率；P _i&f : RF power absorbed by insulation section and flange;

k_i&f：隔热段和法兰吸收射频功率导致辅助加热器平衡功率的变化的系数；ki _&f : the coefficient of the change of the auxiliary heater's equilibrium power caused by the absorption of radio frequency power by the heat insulation section and the flange;

k_w：工作端吸收射频功率导致辅助加热器平衡功率的变化的系数。k _w : The coefficient of the change in the balance power of the auxiliary heater caused by the RF power absorbed by the working end.

在短路器测量过程中，测温电桥输出电压变化Δe_i，sh及辅助加热器直流功率变化P_A，sub，sh为：During the measurement of the short circuit, the temperature measuring bridge output voltage change Δe _{i, sh} and the auxiliary heater DC power change P _{A, sub, sh} are:

Δe_i，sh＝e_i，sh，on-e_i，sh，0 (9)Δe _i,sh =e _i,sh,on -e _i,sh,0 (9)

Δe_i，sh＝k_i&f，tP_i&f，sh (10)Δe _i,sh =k _i&f,t P _i&f,sh (10)

${P P}_{A A,, sub sub,, sh sh} = = \frac{{V V}_{A A,, sh sh,, off off}^{22} - - {V V}_{A A,, sh sh,, on on}^{22}}{{R R}_{A A}} - - - - - - ((1111))$

P_A，sub，sh＝k_i&fP_i&f，sh+k_shP_sh (12)P _{A, sub, sh} = k _{i & f} P _{i & f, sh} + k _sh P _sh (12)

k_i&f，t：隔热段及法兰吸收射频功率对测温电桥输出电压的影响因子。ki _{&f, t} : Influence factor of heat insulation section and flange absorbing RF power on output voltage of temperature measuring bridge.

P_i，sh1：隔热段测温电桥输出电压变化量为Δe_i，sh1时隔热段吸收的射频功率；P _{i, sh1} : The RF power absorbed by the heat insulation section when the output voltage change of the temperature measuring bridge in the heat insulation section is Δe _{i, sh1} ;

由式(10)和(12)可以得出：From equations (10) and (12), it can be concluded that:

在校准测量过程中，隔热段测温电桥输出电压变化Δe_i，cal为：During the calibration measurement process, the output voltage change Δe _{i, cal} of the temperature measuring bridge in the heat insulation section is:

Δe_i，cal＝k_i&f，tP_i&f，cal； (14)Δe _{i, cal} = k _{i & f, t} P _{i & f, cal} ; (14)

Δe_i，cal＝e_i，cal，on-e_i，cal，0 (15)Δe _i,cal =e _i,cal,on -e _i,cal,0 (15)

辅助加热器直流功率变化P_{A，sub，cal}包括三部分：隔热段及法兰的功率变化P_i&f，cal，使工作端产生温升的功率P_dw，则有：The DC power change P _{A, sub, cal} of the auxiliary heater includes three parts: the power change P _{i&f, cal} of the heat insulation section and the flange, and the power P _dw that causes the temperature rise at the working end, then:

P_{A，sub，cal}＝k_i&fP_i&f，cal+k_wP_dw； (16)P _{A, sub, cal} = k _{i & f} P _{i & f, cal} + k _w P _dw ; (16)

${P P}_{A A,, sub sub,, cal cal} = = \frac{{V V}_{A A,, cal cal,, off off}^{22} - - {V V}_{A A,, cal cal,, on on}^{22}}{{R R}_{A A}} - - - - - - ((1717))$

由式(14)和(16)可以得出：From equations (14) and (16), it can be concluded that:

由式(13)和(18)相比可以得出：Comparing formulas (13) and (18), it can be concluded that:

$\frac{{Δe Δe}_{i i,, sh sh}}{{Δe Δe}_{i i,, cal cal}} = = \frac{{P P}_{A A,, sub sub,, sh sh} - - {k k}_{sh sh} {P P}_{sh sh}}{{P P}_{A A,, sub sub,, cal cal} - - {k k}_{w w} {P P}_{dw dw}} - - - - - - ((1919))$

由式(19)解出：Solved by formula (19):

${k k}_{w w} {P P}_{dw dw} = = {P P}_{A A,, sub sub,, cal cal} - - \frac{{Δe Δ e}_{i i,, cal cal}}{{Δe Δ e}_{i i,, sh sh}} {P P}_{A A,, sub sub,, sh sh} + + \frac{{Δe Δ e}_{i i,, cal cal}}{{Δe Δ e}_{i i,, sh sh}} {k k}_{sh sh} {P P}_{sh sh},, {k k}_{w w} \approx \approx 11 - - - - - - ((2020))$

${η η}_{e e} = = \frac{{P P}_{sub sub}}{{P P}_{sub sub} + + {P P}_{dw dw}} = = \frac{{P P}_{sub sub}}{{P P}_{sub sub} + + \frac{11}{{k k}_{w w}} (({P P}_{A A,, sub sub,, cal cal} - - \frac{{Δe Δe}_{i i,, cal cal}}{{Δe Δ e}_{i i,, sh sh}} {P P}_{A A,, sub sub,, sh sh} + + \frac{{Δe Δ e}_{i i,, cal cal}}{{Δe Δ e}_{i i,, sh sh}} {k k}_{sh sh} {P P}_{sh sh}))} - - - - - - ((21 twenty one))$

在本实施方式中，工作端吸收信号功率导致辅助加热器平衡功率的变化的系数k_w根据改变工作端平衡功率的方法来实验确定，在一种更加优选的实施方式中，k_w的取值为1.0。In this embodiment, the coefficient k _w of the change in the balance power of the auxiliary heater caused by the absorption of signal power at the working end is determined experimentally according to the method of changing the balance power at the working end. In a more preferred embodiment, the value of k _w is 1.0.

在本实施方式中，短路片上耗散的射频功率是隔热段、法兰及热敏电阻座上耗散射频功率的0.05％。In this embodiment, the radio frequency power dissipated on the short circuit is 0.05% of the radio frequency power dissipated on the heat insulation section, the flange and the thermistor seat.

基于以上实施方式中的取值，式(20)和式(21)可以写成：Based on the values in the above embodiments, formula (20) and formula (21) can be written as:

${k k}_{w w} {P P}_{dw dw} \approx \approx {P P}_{A A,, sub sub,, cal cal} - - \frac{{Δe Δe}_{i i,, cal cal}}{{Δe Δe}_{i i,, sh sh}} {P P}_{A A,, sub sub,, sh sh},, {k k}_{w w} \approx \approx 11 - - - - - - ((22 twenty two))$

${η η}_{e e} \approx \approx \frac{{P P}_{sub sub}}{{P P}_{sub sub} + + \frac{11}{{k k}_{w w}} (({P P}_{A A,, sub sub,, cal cal} - - \frac{{Δe Δe}_{i i,, cal cal}}{{Δe Δe}_{i i,, sh sh}} {P P}_{A A,, sub sub,, sh sh}))} - - - - - - ((23 twenty three))$

通过上述理论计算，只要通过短路器、校准实验，就可以得出热敏电阻座的有效效率，而不需要S参数测量及旁臂功率监测。这种新方法改变了射频功率基准的溯源路径，使其溯源到电压基准，利用该测量原理的功率基准系统将成为中国国家无线电功率基准。Through the above theoretical calculations, the effective efficiency of the thermistor base can be obtained only through the short circuit and calibration experiments, without the need for S parameter measurement and side arm power monitoring. This new method changes the traceability path of the radio frequency power reference, making it traceable to the voltage reference, and the power reference system using this measurement principle will become China's national radio power reference.

在本说明书的描述中，参考术语“一个实施例”、“一些实施例”、“示例”、“具体示例”、或“一些示例”等的描述意指结合该实施例或示例描述的具体特征、结构、材料或者特点包含于本发明的至少一个实施例或示例中。在本说明书中，对上述术语的示意性表述不一定指的是相同的实施例或示例。而且，描述的具体特征、结构、材料或者特点可以在任何的一个或多个实施例或示例中以合适的方式结合。In the description of this specification, descriptions referring to the terms "one embodiment", "some embodiments", "example", "specific examples", or "some examples" mean that specific features described in connection with the embodiment or example , structure, material or characteristic is included in at least one embodiment or example of the present invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

尽管已经示出和描述了本发明的实施例，本领域的普通技术人员可以理解：在不脱离本发明的原理和宗旨的情况下可以对这些实施例进行多种变化、修改、替换和变型，本发明的范围由权利要求及其等同物限定。Although the embodiments of the present invention have been shown and described, those skilled in the art can understand that various changes, modifications, substitutions and modifications can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the invention is defined by the claims and their equivalents.

Claims

1. a microcalorimeter, is characterized in that, comprising:

Benchmark chassis and the enclosing cover that is connected described benchmark chassis, and the chamber being formed by described benchmark chassis and the sealing of described enclosing cover;

Chassis connector, described chassis connector is arranged in described chamber and is connected with described benchmark chassis;

The first isolation section and the second isolation section, described the first isolation section and the second isolation section are connected on described benchmark chassis by chassis connector;

Working end and reference edge, described working end is connected on described the first isolation section by the first flange, and described reference edge is connected on described the second isolation section by the second flange;

Input waveguide, described input waveguide is connected with described chassis connector, for measured signal being input to described working end;

Thermoelectric pile, described thermoelectric pile is connected between described working end and reference edge, the temperature error signal for detection of described working end with respect to described reference edge;

Thermistor, described thermistor is respectively formed in described the first isolation section and described the second isolation section, for reflecting the temperature variation of described the first isolation section and described the second isolation section;

Bridge for measuring temperature, described bridge for measuring temperature is connected with the thermistor of described the second isolation section, for detection of temperature rise and by temperature rise, converts electric signal to described the first isolation section respectively; Auxiliary heater, described auxiliary heater is formed on described the first flange, is used to described the first isolation section heating.

2. microcalorimeter as claimed in claim 1, is characterized in that, described auxiliary heater is one of film thermal resistance sheet, ceramic resistor sheet, ring-shaped resistor sheet.

3. a power reference system for microcalorimeter, is characterized in that, comprising:

Microcalorimeter, described microcalorimeter is the microcalorimeter described in claim 1-2 any one;

Signal source, the signal output part of described signal source is connected with the working end of described microcalorimeter;

Power meter, the signal input part of described power meter is connected with the working end of described microcalorimeter, described power meter is connected with power measuring system, described power measuring system is connected with direct current reference, the signal output part of described power measuring system is connected with the amplitude-modulated signal input end of described signal source, for described signal source provides fixed ampllitude feedback;

Auxiliary heating direct current substitutes instrument, and described auxiliary heating direct current substitutes instrument and is connected with auxiliary heater with the thermoelectric pile of described microcalorimeter, for receiving the temperature error signal that described thermoelectric pile records and applying power bias to described auxiliary heater; Voltage table 1, described voltage table 1 is connected with described power meter, for monitoring the voltage of described power meter;

Voltage table 2, described voltage table 2 substitutes instrument with described auxiliary heating direct current and is connected, and substitutes the voltage of instrument for monitoring described auxiliary heating direct current;

Voltage table 3, described voltage table 3 is connected with described bridge for measuring temperature, by the temperature rise of described the first isolation section of described voltage table 3 monitoring.

4. the power reference system of microcalorimeter as claimed in claim 3, is characterized in that, the power bias that the alternative instrument of described auxiliary heating direct current applies to described auxiliary heater is 1.0 milliwatts.