CN102453878A - Coating device - Google Patents
Coating device Download PDFInfo
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- CN102453878A CN102453878A CN201010521455XA CN201010521455A CN102453878A CN 102453878 A CN102453878 A CN 102453878A CN 201010521455X A CN201010521455X A CN 201010521455XA CN 201010521455 A CN201010521455 A CN 201010521455A CN 102453878 A CN102453878 A CN 102453878A
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- bin
- inner ring
- concentric
- suspension member
- outer ring
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Abstract
The invention relates to a coating device which comprises a coating cavity and a concentric material rest, wherein the concentric material rest is arranged inside the coating cavity and can rotate around its own central shaft. The concentric material rest is provided with an inner ring material rest and an outer ring material rest surrounding the inner ring material rest and connected with the inner ring material rest, wherein the central area of the inner ring material rest is provided with at least one inner columnar target seat, a plurality of outer columnar target seats are arranged on the periphery of the outer ring material rest, and the inner target seat and the outer target seats are both used for arranging coating targets. For the coating device, concentrically arranged inner ring material rest and outer ring material rests are adopted and the columnar target seats are respectively arranged in the central region of the inner ring material rest and the periphery of the outer ring material rest, so that mutual interference among the targets arranged on different seats can be effectively lowered, and the coating quality is ensured. Moreover, the coating device is beneficial to controlling the targets and increasing the utilization rate of the targets.
Description
Technical field
The present invention relates to technical field of vacuum plating, especially design a kind of film coating apparatus.
Background technology
Along with the popularization and application of various electronic products, requiring of human consumer is increasingly high, except that requiring to satisfy the functions of use, the human consumer to the outward appearance of electronic product, touch texture etc. new requirement also arranged.Such as, require product casing to have gorgeous color, metal-like, wear-resistant etc.Utilize reaction formula magnetron sputtering embrane method that product casing is carried out plated film processing, can make electronic product obtain to have multilayer film shell various colors, high metallic texture, satisfy present consumer demand.
Traditional anode for sputter coating basically all is to adopt the mode of plane to target, the plane target stand that carries target relatively is arranged at the inboard and the outside of single circumference bin.But in the plated film course of processing of reality, when adopting the plane that the mode of target is provided with target, being prone to influences coating quality because of the phase mutual interference takes place relative target close together.In addition, adopt the plane that the mode of target is provided with target and have problems such as target is wayward, utilization ratio is low.
Summary of the invention
In view of this, be necessary to provide a kind of be easy to realize, film coating apparatus that can effectively solve the problem that exists in the prior art.
A kind of film coating apparatus, it comprises a plated film cavity, and a concentric bin.Said concentric bin is arranged at said plated film inside cavity, and said concentric bin can be around the hub rotation of himself.Said concentric bin has an inner ring bin, and an outer ring bin that centers on said inner ring bin and be connected with said inner ring bin.The middle section of said inner ring bin is provided with the interior target stand of at least one column, and the outer periphery of said outer ring bin is equipped with the outer target stand of a plurality of columns, and said interior target stand and said outer target stand all are used to be provided with the plated film target.
With respect to prior art; Film coating apparatus of the present invention has following advantage: one of which; Adopt the inner ring bin and the outer ring bin that are provided with one heart; And the target stand of column is set in the periphery of the middle section of inner ring bin and outer ring bin respectively, can reduces phase mutual interference between the target that is arranged at different target stands effectively, guarantee coating quality.Its two, adopt the target stand of column to help reducing the relative area between the different targets, can reduce further that interferential maybe each other between the target.Its three, adopt the target stand of column to help controlling target through the rotation target stand, be convenient to improve the utilization ratio of target.
Description of drawings
Fig. 1 is the synoptic diagram of the film coating apparatus that provides of one embodiment of the invention, and said film coating apparatus comprises a concentric bin.
Fig. 2 is the vertical view of film coating apparatus shown in Figure 1.
Fig. 3 is the partial schematic diagram of the transmission rig of concentric bin shown in Figure 1.
Fig. 4 is the fundamental diagram of concentric bin shown in Figure 3.
The main element nomenclature
Plated film cavity 10
Concentric bin 20
Inner ring bin 21
Outer ring bin 23
Connecting arm 25
Interior target stand 30
Outer target stand 40
Inner ring erecting frame 211
Inner ring suspension member bar 213
Outer ring erecting frame 231
Outer ring suspension member bar 233
Embodiment
To combine accompanying drawing and embodiment that the present technique scheme is done further explain below.
Please consult Fig. 1 and Fig. 2 in the lump, one embodiment of the invention provides a kind of film coating apparatus 100, and it is used for carrying out plated film processing to be coated; Said film coating apparatus 100 comprises a plated film cavity 10; 20, three interior target stands 30 of a concentric bin, and six outer target stands 40.
Said plated film cavity 10 is a vacuum cavity, and its inner vacuum environment obtains through the vacuum pump (figure does not show) that is connected with said plated film cavity 10.In the present embodiment, said plated film cavity 10 is the tubular cavity.
Said concentric bin 20 is arranged at said plated film cavity 10 inside, and said concentric bin 20 can be around the hub rotation of himself.Said concentric bin 20 has 21, one outer ring bins 23 of an inner ring bin, and two connecting arms 25.In the present embodiment, said concentric bin 20 is positioned at the middle section of said plated film cavity 10, and the spigot shaft coaxle of the hub of said concentric bin 20 and said plated film cavity 10.Said inner ring bin 21 is used to carry to be coated (figure does not show) with said outer ring bin 23, and said connecting arm 25 is used to connect said inner ring bin 21 and said outer ring bin 23.
Said inner ring bin 21 has an inner ring erecting frame 211, and a plurality of inner ring suspension member bars 213.Said a plurality of inner ring suspension member bar 213 is set in parallel in said inner ring erecting frame 211.In the present embodiment, said inner ring erecting frame 211 is a circular configuration, and said a plurality of inner ring suspension member bars 213 evenly are provided with along the circumference of said inner ring erecting frame 211 at interval.Each said inner ring suspension member bar 213 all can be around the hub rotation of himself.
Said outer ring bin 23 has an outer ring erecting frame 231, and a plurality of outer rings suspension member bar 233.Said a plurality of outer rings suspension member bar 233 is set in parallel in said outer ring erecting frame 231.In the present embodiment, said outer ring erecting frame 231 is a circular configuration, and the circumference of said a plurality of outer rings suspension member bar 233 erecting frame 231 along said outer ring evenly is provided with at interval.Each said outer ring suspension member bar 233 all can be around the hub rotation of himself.
Said inner ring bin 21 and the 23 concentric settings of said outer ring bin, said outer ring bin 23 are around said inner ring bin 21, and said inner ring bin 21 has a common center axle, the hub of promptly said concentric bin 20 with said outer ring bin 23.The inner ring suspension member bar 213 of said inner ring bin 21 is parallel to each other with the outer ring suspension member bar 233 of said outer ring bin 23; And the common center axle that all is parallel to said inner ring bin 21 and said outer ring bin 23, promptly said inner ring suspension member bar 213 and said outer ring suspension member bar 233 all are parallel to the hub of said concentric bin 20.
Said connecting arm 25 connects said inner ring bin 21 and said outer ring bin 23, and said inner ring bin 21 and said outer ring bin 23 can be simultaneously rotated around the hub of said concentric bin 20.In the present embodiment, said two connecting arms 25 relatively are arranged at the top of said inner ring bin 21 and said outer ring bin 23, and are connected said inner ring bin 21 and said outer ring bin 23 between said inner ring bin 21 and the said outer ring bin 23.Each said connecting arm 25 all has one first end 251, and one and said first end, 251 second opposed end 252.Said first end 251 is connected with the inner ring erecting frame 211 of said inner ring bin 21.Said second end 252 is connected with the outer ring erecting frame 231 of said outer ring bin 23.Thus, said connecting arm 25 makes said inner ring bin 21 and said outer ring bin 23 form an integral body, is convenient to the drive source of the said concentric bin 20 of simplified design, realizes that the integral body of said concentric bin 20 drives.
It is understandable that; Can realize being connected with the fit structure of groove with threaded hole or flange with hole, bolt through pin between said connecting arm 25 and said inner ring bin 21 and the said outer ring bin 23, as long as can make integral body of said inner ring bin 21 and 23 formation of said outer ring bin.
In the present embodiment, each said inner ring suspension member bar 213 and each said outer ring suspension member bar 233 all are provided with a plurality of carriers (figure does not show) of to be coated that are used to carry along its length direction.
It is understandable that; Be arranged at the carrier on said inner ring suspension member bar 213 and the said outer ring suspension member bar 233, also can be set as different angles with corresponding suspension member bar, as; Carrier parallels with corresponding suspension member bar, perpendicular or tilt; Thus, can regulate the angle that is carried on to be coated surface to be plated on the said carrier, be convenient to be coated surface to be plated and carry out the rete of different angles and be coated with.
Preferably, the hub of said concentric bin 20 and any said inner ring suspension member bar 213 and any said outer ring suspension member bar 233 be not all on same straight line.Thus, can avoid between said inner ring suspension member bar 213 and the said outer ring suspension member bar 233 to be coated because of blocking each other, and influence unidirectional plated film.
Preferably, be provided with a said inner ring suspension member bar 213 on the midperpendicular of any two adjacent said outer ring suspension member bars 233.
Said three interior target stands 30 are columnar structure with said six outer target stands 40, all are used to be provided with plated film target (figure does not show).In the present embodiment, said in target stand 30 be cylindrical-shaped structure with said outer target stand 40, the hub of each said interior target stand 30 and the hub of each said outer target stand 40 all are parallel to the hub of said concentric bin 20.And target stand 30 and each said outer target stand 40 all can be respectively rotate around self hub in each was said.Certainly, target stand 30 also can be oval columnar structure with said outer target stand 40 in said.
Said three interior target stands 30 are arranged at the middle section of said inner ring bin 21, and distribute around the even compartment of terrain of the hub of said concentric bin 20.Said six outer target stands 40 are arranged at the periphery of said outer ring bin 23, and are that even compartment of terrain, center distributes with the hub of said concentric bin 20.Particularly, said three interior target stands 30 are at the middle section of said inner ring bin 21, and are along the circumferential direction equidistantly spaced apart around the hub of said concentric bin 20, and the central angle between two adjacent arbitrarily said interior target stands 30 is 120 degree; The periphery of said six outer target stands 40 bin 23 in said outer ring, along the circumferential direction equidistantly spaced apart around the hub of said concentric bin 20, the central angle between two adjacent arbitrarily said outer target stands 40 is 60 degree.
It is understandable that said interior target stand 30 all can drive realization by CD-ROM drive motor (figure does not show) with said outer target stand 40 and rotate around the hub of self respectively.
In the present embodiment; Film coating apparatus 100 so that three said interior target stands 30 and six said outer target stands 40 to be set is that example describes; Certainly, the middle section of said inner ring bin 21 also can only be provided with a said interior target stand 30, and four, eight, ten or 12 said outer target stands 40 also can be established in the periphery of said outer ring bin 23; Specifically can be provided with, be not limited to present embodiment according to the needs that structure, size and the plated film of said film coating apparatus 100 are processed.
Please consult Fig. 3 and Fig. 4 in the lump, further, said film coating apparatus 100 comprises a transmission rig 50, and a driving mechanism 60.Said transmission rig 50 connects said inner ring bin 21 and said outer ring bin 23 and said driving mechanism 60.Said driving mechanism 60 drives said inner ring bin 21 and said outer ring bin 23 simultaneously around the hub rotation of said concentric bin 20, and drives each said inner ring suspension member bar 213 and each said outer ring suspension member bar 233 and rotate around separately hub.
Between two adjacent said inner ring suspension member bars 213, between adjacent two said outer ring suspension member bars 233 and between said inner ring suspension member bar 213 and the said outer ring suspension member bar 233, realize interconnecting through said transmission rig 50.Thus, can realize between said a plurality of inner ring suspension member bar 213, the transmission of power between said a plurality of outer rings suspension member bar 233, and the transmission of power between said inner ring suspension member bar 213 and the said outer ring suspension member bar 233.
In the present embodiment, said transmission rig 50 is a gear drive, and it is arranged at the bottom of said concentric bin 20.Certainly, between two adjacent said inner ring suspension member bars 213, between adjacent two said outer ring suspension member bars 233, and between said inner ring suspension member bar 213 and the said outer ring suspension member bar 233, also can realize interconnecting through belt or chain respectively.As long as can realize between said a plurality of inner ring suspension member bar 213 respectively, between said a plurality of outer rings suspension member bar 233, and the transmission of power between said inner ring suspension member bar 213 and the said outer ring suspension member bar 233 gets final product.
It is understandable that; Because mutual transmission of power between said a plurality of inner ring suspension member bars 213; And mutual transmission of power between said a plurality of outer rings suspension member bar 233; Therefore, only need between an adjacent inner ring suspension member bar 213 and an outer ring suspension member bar 233, geartransmission, belt transmission or chain gear to be set, can realize the transmission of power between said a plurality of inner ring suspension member bar 213 and the said a plurality of outer rings suspension member bar 233.
Said transmission rig 50 comprises 51, one second driving gears 52 of one first driving gear, a plurality of first follower gears 53, a plurality of second follower gears 54, and a plurality of neutral gears 55,56.Said driving mechanism 60 has a drive shaft 61.Said first driving gear 51 all is sheathed on the said drive shaft 61 with said second driving gear 52.Said a plurality of first follower gear 53 is sheathed on said a plurality of outer rings suspension member bar 233 correspondingly.Said a plurality of second follower gear 54 is sheathed on said a plurality of inner ring suspension member bar 213 correspondingly.Said first driving gear 51 is meshing with each other with the tooth (figure does not show) of the outer of the inner ring erecting frame 211 that is arranged at said inner ring bin 21, realizes the mechanical transmission of said driving mechanism 60 and said inner ring bin 21.First follower gear 53 on said second driving gear 52 and the said outer ring suspension member bar 233 is meshing with each other, and realizes the mechanical transmission of said driving mechanism 60 and said outer ring suspension member bar 233.Said first follower gear 53 is meshing with each other through second follower gear 54 on a said neutral gear 55 and the said inner ring suspension member bar 213, realizes the transmission of power between said outer ring suspension member bar 233 and the said inner ring suspension member bar 213.Two adjacent said first follower gears 53 directly are meshing with each other, and realize transmission of power each other, certainly, also can be meshing with each other through a neutral gear between two adjacent said first follower gears 53.Be meshing with each other through a said neutral gear 56 between two adjacent said second follower gears 54, realize the transmission of power between two adjacent said second follower gears 54.Said first driving gear 51 is unequal with the transmitting ratio of said first follower gear 53 with the transmitting ratio and said second driving gear 52 of said inner ring bin 21.Thus, said driving mechanism 60 of 20 need of said concentric bin can be realized the unitary rotation of said inner ring bin 21 and said outer ring bin 23, realizes the rotation respectively of said inner ring suspension member bar 213 and said outer ring suspension member bar 233 simultaneously.
Plated film adds man-hour, through said driving mechanism 60, drives said concentric bin 20 around its hub unitary rotation, and drives inner ring suspension member bar 213 and outer ring suspension member bar 233 in the said concentric bin 20 respectively around separately hub rotation.Thus; Can control to be coated that is carried on said inner ring suspension member bar 213 and the said outer ring suspension member bar 233; Regulate to be coated whole plated film angle and local plated film angle with respect to coating source; Make each coated surface of to be coated obtain sufficient plated film, obtain rete with better quality.
It is understandable that, according to the process of plated film processing, can control said in target stand 30 and said outer target stand 40 rotate around separately hub; Drive is arranged at the target rotation of said interior target stand 30 and said outer target stand 40; Thus, can make full use of target, improve the utilization ratio of target.
With respect to prior art; Film coating apparatus of the present invention has following advantage: one of which; Adopt the inner ring bin and the outer ring bin that are provided with one heart; And the target stand of column is set in the periphery of the middle section of inner ring bin and outer ring bin respectively, can reduces phase mutual interference between the target that is arranged at different target stands effectively, guarantee coating quality.Its two, adopt the target stand of column to help reducing the relative area between the different targets, can reduce further that interferential maybe each other between the target.Its three, adopt the target stand of column to help controlling target through the rotation target stand, be convenient to improve the utilization ratio of target.
In addition, those skilled in the art can also do other variation in spirit of the present invention, and certainly, these all should be included within the present invention's scope required for protection according to the variation that the present invention's spirit is done.
Claims (10)
1. film coating apparatus, it comprises:
A plated film cavity; And
A concentric bin, said concentric bin is arranged at said plated film inside cavity, and said concentric bin can be around the hub rotation of himself;
It is characterized in that:
Said concentric bin has an inner ring bin, and an outer ring bin that centers on said inner ring bin and be connected with said inner ring bin; The middle section of said inner ring bin is provided with the interior target stand of at least one column, and the outer periphery of said outer ring bin is equipped with the outer target stand of a plurality of columns, and said interior target stand and said outer target stand all are used to be provided with the plated film target.
2. film coating apparatus as claimed in claim 1; It is characterized in that; Target stand and said outer target stand are cylindrical-shaped structure in said; Target stand and said outer target stand can be respectively rotate around self hub in said, and the hub of said interior target stand and the hub of said outer target stand all are parallel to the hub of said concentric bin.
3. film coating apparatus as claimed in claim 2; It is characterized in that; The middle section of said inner ring bin is provided with three said interior target stands, and said three interior target stands are distributed in the middle section of said inner ring bin around the even compartment of terrain of hub of said concentric bin.
4. film coating apparatus as claimed in claim 3 is characterized in that, the outer periphery of said outer ring bin is equipped with six said outer target stands, and said six outer target stands are the periphery that even compartment of terrain, center is distributed in said outer ring bin with the hub of said concentric bin.
5. film coating apparatus as claimed in claim 1; It is characterized in that; Said concentric bin has two connecting arms; Said two connecting arms are the top that the center relatively is arranged at said inner ring bin and said outer ring bin with the hub of said concentric bin, and are connected said inner ring bin and said outer ring bin between said inner ring bin and the said outer ring bin, and each said connecting arm all has one first end and one and the said first end second opposed end; Said first end is connected with said inner ring bin, and said second end is connected with said outer ring bin.
6. film coating apparatus as claimed in claim 1; It is characterized in that; Said inner ring bin and said outer ring bin all have a plurality of suspension member bars that laterally arrange, and each said suspension member bar all is parallel to the hub of said concentric bin, and each said suspension member bar all can be around the hub rotation of himself.
7. film coating apparatus as claimed in claim 6 is characterized in that, each said suspension member bar all is provided with a plurality of carriers of to be coated that are used to carry along its length direction.
8. film coating apparatus as claimed in claim 6 is characterized in that, the suspension member bar of the suspension member bar of any said inner ring bin and any said outer ring bin and the hub of said concentric bin be not on same straight line.
9. film coating apparatus as claimed in claim 8 is characterized in that, all has the suspension member bar of a said inner ring bin on the midperpendicular of any two adjacent suspension member bars of said outer ring bin.
10. film coating apparatus as claimed in claim 6 is characterized in that, said film coating apparatus further comprises a transmission rig and a driving mechanism; Said transmission rig connects said inner ring bin and said outer ring bin and said driving mechanism; The said inner ring bin of said drive mechanism rotates around the hub of said concentric bin with said outer ring bin simultaneously, and drives the hub rotation of each said suspension member bar around self.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010521455XA CN102453878A (en) | 2010-10-27 | 2010-10-27 | Coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010521455XA CN102453878A (en) | 2010-10-27 | 2010-10-27 | Coating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102453878A true CN102453878A (en) | 2012-05-16 |
Family
ID=46037549
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201010521455XA Pending CN102453878A (en) | 2010-10-27 | 2010-10-27 | Coating device |
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| Country | Link |
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| CN (1) | CN102453878A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105112874A (en) * | 2015-09-24 | 2015-12-02 | 无锡市中捷减震器有限公司 | Micro/nano film magnetic-control sputtering method |
| WO2021026886A1 (en) * | 2019-08-15 | 2021-02-18 | 常州机电职业技术学院 | Treatment device and treatment method for medical apparatus surface titanium plating |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5618388A (en) * | 1988-02-08 | 1997-04-08 | Optical Coating Laboratory, Inc. | Geometries and configurations for magnetron sputtering apparatus |
| JP2007119824A (en) * | 2005-10-26 | 2007-05-17 | Kohatsu Kogaku:Kk | Target assembly for rotary cylinder type magnetron sputtering cathode, sputtering cathode assembly, and sputtering system and thin film producing process using the same |
| CN2903094Y (en) * | 2006-01-26 | 2007-05-23 | 大连理工大学 | Furnace body of substituted electroplating equipment by bidirectional ion plating magnetic controlling sputtering |
| CN101768727A (en) * | 2009-12-31 | 2010-07-07 | 中国地质大学（北京） | Complex vacuum deposition device |
| CN101818326A (en) * | 2009-02-26 | 2010-09-01 | 鸿富锦精密工业（深圳）有限公司 | Sputtering device |
-
2010
- 2010-10-27 CN CN201010521455XA patent/CN102453878A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5618388A (en) * | 1988-02-08 | 1997-04-08 | Optical Coating Laboratory, Inc. | Geometries and configurations for magnetron sputtering apparatus |
| JP2007119824A (en) * | 2005-10-26 | 2007-05-17 | Kohatsu Kogaku:Kk | Target assembly for rotary cylinder type magnetron sputtering cathode, sputtering cathode assembly, and sputtering system and thin film producing process using the same |
| CN2903094Y (en) * | 2006-01-26 | 2007-05-23 | 大连理工大学 | Furnace body of substituted electroplating equipment by bidirectional ion plating magnetic controlling sputtering |
| CN101818326A (en) * | 2009-02-26 | 2010-09-01 | 鸿富锦精密工业（深圳）有限公司 | Sputtering device |
| CN101768727A (en) * | 2009-12-31 | 2010-07-07 | 中国地质大学（北京） | Complex vacuum deposition device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105112874A (en) * | 2015-09-24 | 2015-12-02 | 无锡市中捷减震器有限公司 | Micro/nano film magnetic-control sputtering method |
| WO2021026886A1 (en) * | 2019-08-15 | 2021-02-18 | 常州机电职业技术学院 | Treatment device and treatment method for medical apparatus surface titanium plating |
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Application publication date: 20120516 |