CN102445314A - 激光成像sf6气体漏点定位系统 - Google Patents
激光成像sf6气体漏点定位系统 Download PDFInfo
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- CN102445314A CN102445314A CN2011102845210A CN201110284521A CN102445314A CN 102445314 A CN102445314 A CN 102445314A CN 2011102845210 A CN2011102845210 A CN 2011102845210A CN 201110284521 A CN201110284521 A CN 201110284521A CN 102445314 A CN102445314 A CN 102445314A
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CN2011102845210A CN102445314A (zh) | 2011-09-22 | 2011-09-22 | 激光成像sf6气体漏点定位系统 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104458577A (zh) * | 2014-12-02 | 2015-03-25 | 中国科学院半导体研究所 | 基于红外热像仪的气体遥测装置 |
US11322902B2 (en) | 2019-01-24 | 2022-05-03 | Trumpf Lasersystems For Semiconductor Manufacturing Gmbh | Arrangement for monitoring an optical element, laser source and euv radiation generation apparatus |
CN116878741A (zh) * | 2023-09-06 | 2023-10-13 | 江苏炎启自动化有限公司 | 一种用于gis室内气体泄漏的检测装置及其使用方法 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2856958Y (zh) * | 2005-05-12 | 2007-01-10 | 常州市科能电器有限公司 | 六氟化硫漏点激光成像仪 |
US20070018104A1 (en) * | 2005-07-25 | 2007-01-25 | Parviz Parvin | Machine for detecting sulfur hexafluoride (SF6) leaks using a carbon dioxide laser and the differential absorption lidar ( DIAL) technique and process for making same |
CN101122540A (zh) * | 2007-09-12 | 2008-02-13 | 上海天陇电力科技发展有限公司 | 激光成像sf6泄漏定位装置 |
CN201322680Y (zh) * | 2008-11-17 | 2009-10-07 | 浙江红相科技有限公司 | 激光成像sf6气体泄漏定位系统 |
CN201397221Y (zh) * | 2009-05-12 | 2010-02-03 | 上海宁跃电子有限公司 | 六氟化硫气体泄漏激光成像仪 |
CN201434754Y (zh) * | 2009-06-25 | 2010-03-31 | 上海科大鲁能集成科技有限公司 | Sf6气体泄漏激光智能检测仪 |
US20100230593A1 (en) * | 2009-03-16 | 2010-09-16 | Southwest Research Institute | Compact handheld non-laser detector for greenhouse gasses |
CN202229896U (zh) * | 2011-09-22 | 2012-05-23 | 安徽省电力公司合肥供电公司 | 激光成像sf6气体漏点定位系统 |
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2011
- 2011-09-22 CN CN2011102845210A patent/CN102445314A/zh active Pending
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2856958Y (zh) * | 2005-05-12 | 2007-01-10 | 常州市科能电器有限公司 | 六氟化硫漏点激光成像仪 |
US20070018104A1 (en) * | 2005-07-25 | 2007-01-25 | Parviz Parvin | Machine for detecting sulfur hexafluoride (SF6) leaks using a carbon dioxide laser and the differential absorption lidar ( DIAL) technique and process for making same |
CN101122540A (zh) * | 2007-09-12 | 2008-02-13 | 上海天陇电力科技发展有限公司 | 激光成像sf6泄漏定位装置 |
CN201322680Y (zh) * | 2008-11-17 | 2009-10-07 | 浙江红相科技有限公司 | 激光成像sf6气体泄漏定位系统 |
US20100230593A1 (en) * | 2009-03-16 | 2010-09-16 | Southwest Research Institute | Compact handheld non-laser detector for greenhouse gasses |
CN201397221Y (zh) * | 2009-05-12 | 2010-02-03 | 上海宁跃电子有限公司 | 六氟化硫气体泄漏激光成像仪 |
CN201434754Y (zh) * | 2009-06-25 | 2010-03-31 | 上海科大鲁能集成科技有限公司 | Sf6气体泄漏激光智能检测仪 |
CN202229896U (zh) * | 2011-09-22 | 2012-05-23 | 安徽省电力公司合肥供电公司 | 激光成像sf6气体漏点定位系统 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104458577A (zh) * | 2014-12-02 | 2015-03-25 | 中国科学院半导体研究所 | 基于红外热像仪的气体遥测装置 |
US11322902B2 (en) | 2019-01-24 | 2022-05-03 | Trumpf Lasersystems For Semiconductor Manufacturing Gmbh | Arrangement for monitoring an optical element, laser source and euv radiation generation apparatus |
TWI776120B (zh) * | 2019-01-24 | 2022-09-01 | 德商創浦半導體製造雷射系統公司 | 監測光學元件、雷射來源及euv輻射產生設備 |
CN116878741A (zh) * | 2023-09-06 | 2023-10-13 | 江苏炎启自动化有限公司 | 一种用于gis室内气体泄漏的检测装置及其使用方法 |
CN116878741B (zh) * | 2023-09-06 | 2023-12-01 | 江苏炎启自动化有限公司 | 一种用于gis室内气体泄漏的检测装置及其使用方法 |
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Owner name: STATE GRID CORPORATION OF CHINA Effective date: 20121218 |
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Effective date of registration: 20121218 Address after: 230022 power supply company, No. 133, Susong Road, Anhui, Hefei Applicant after: Anhui Power Company Hefei Power Supply Company Applicant after: State Grid Corporation of China Address before: 230022 power supply company, No. 133, Susong Road, Anhui, Hefei Applicant before: Anhui Power Company Hefei Power Supply Company |
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Application publication date: 20120509 |