CN102434075B - Safety door - Google Patents
Safety door Download PDFInfo
- Publication number
- CN102434075B CN102434075B CN201110366066.9A CN201110366066A CN102434075B CN 102434075 B CN102434075 B CN 102434075B CN 201110366066 A CN201110366066 A CN 201110366066A CN 102434075 B CN102434075 B CN 102434075B
- Authority
- CN
- China
- Prior art keywords
- door
- microenvironment
- safety door
- safety
- lock
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention relates to the technical field of a safety door in a semiconductor device, and discloses a safety door, which comprises a door, a safety door lock (2) and a mechanical door lock, the safety door lock (2) is installed on the inner side of the door, and the mechanical door lock is installed on the outer side of the door. A safety door is designed through installing locks on the inner side and the outer side of the door in a microenvironment, and the safety door is simple in structure, is particularly suitable for a semiconductor device, and can ensure the working safety in a microenvironment.
Description
Technical field
The present invention relates to safety door technical field, be specifically related to a kind of safety door.
Background technology
In semiconductor manufacturing equipment, microenvironment is the loading area of silicon chip, and this region is a region that nitrogen gas concn is higher, and oxygen content is lower, is that an airtight ，Gai region, space relates to more motion.Therefore enter the danger very of microenvironment inside, if can not timely out, can produce fatal threat.
Door lock is installed in the outside that on traditional semiconductor equipment is all the only door (referred to as microenvironment door) in microenvironment, in other words can only be in microenvironment outdoors by door-lock opening or close the door in microenvironment, and can not open in inside microenvironment door.If but in plant maintenance process or other situation have personnel to be closed in microenvironment the inside, may be too low because of oxygen content in microenvironment, people's life security is produced to fatal threat.
Summary of the invention
(1) technical problem that will solve
Technical problem to be solved by this invention is: how to design a kind of safety door.
(2) technical scheme
For solving the problems of the technologies described above, the invention provides a kind of safety door, comprise door, safety door latch and mechanical door lock, it is upper that described safety door latch is arranged on described door inner side, and described mechanical door lock is arranged on described outer side of door.
Preferably, described door is microenvironment door.
Preferably, described safety door also comprises the microenvironment doorframe that is positioned at described microenvironment door inner side.
Preferably, described safety door latch comprises joint and hasp, and described joint is fixedly connected with described hasp by described microenvironment doorframe.
Preferably, on described microenvironment doorframe, lock dog is installed, described hasp is arranged in described lock dog.
Preferably, described joint is rotatable assistant shape joint.
Preferably, on described microenvironment doorframe, sealing ring is installed.
Preferably, the material of described safety door latch is clean series of products.
Preferably, the material of described safety door latch is 316L stainless steel.
Preferably, described mechanical door lock is tongue revolving type door lock.
(3) beneficial effect
The present invention has designed a kind of safety door by door lock is set in door medial and lateral simultaneously, and it is simple in structure, is particularly useful in semiconductor equipment, can guarantee the safety of working in microenvironment.
Accompanying drawing explanation
Fig. 1 is the safety door schematic diagram of the embodiment of the present invention;
Fig. 2 is the structural representation of safety door latch safety door while closing;
Fig. 3 is the structural representation of safety door latch safety door while opening;
Fig. 4 is safety door latch dismounting schematic diagram;
Fig. 5 is the structural representation of assistant shape joint;
Fig. 6 is the structural representation of hasp;
Fig. 7 is the structural representation of microenvironment doorframe;
Fig. 8 is the structural representation of lock dog.
Wherein, 1 safety door latch position; 2 safety door latchs; 3 microenvironment doors; 4 microenvironment doorframes; 5 lock dogs; 6 tongue revolving type door locks; 7 sealing rings; 8 microenvironment inner sides.
The specific embodiment
Under regard to a kind of safety door proposed by the invention, describe in detail in conjunction with the accompanying drawings and embodiments.
The embodiment of the present invention, by microenvironment door inner side, safety door latch being installed, had both realized and can, from external opening microenvironment door, also can open from inside microenvironment door.
As shown in Fig. 1～4, the safety door for semiconductor equipment of the embodiment of the present invention, comprise microenvironment door 3, safety door latch 2 and tongue revolving type door lock 6, described safety door latch 2 is arranged on described microenvironment door 3 inner sides, and described tongue revolving type door lock 6 is arranged on described microenvironment door 3 outsides.Wherein, Fig. 2～Fig. 4 is lateral view.
Described microenvironment door 3 comprises the microenvironment doorframe 4 that is positioned at described microenvironment door 3 inner sides.
Described safety door latch 2 comprises that (for prior art, as shown in Figure 5) and hasp (as shown in Figure 6), described assistant shape joint is fixedly connected with described hasp by described microenvironment doorframe 4 rotatable assistant shape joint.People can open microenvironment door 3. by rotating 90 ° of this assistant shape joints
On described microenvironment doorframe 4, lock dog 5 is installed, described hasp is arranged in described lock dog 5.
On described microenvironment doorframe 4, sealing ring 7 is installed.
The material selection principle of described safety door latch 2 locks is clean series of products, as 316L stainless steel etc., can guarantee not have volatile particles to enter in microenvironment the processing quality of the product of impact.
The door-plate of microenvironment door 3 and doorframe surfacing, without flexural deformation, can guarantee to make between door-plate and doorframe fastening seamless by safety door latch 2.
As shown in Figure 2, semiconductor equipment in the course of the work, microenvironment door 3 is closed, all tongue revolving type door lock 6 lockings, personnel in microenvironment inside can not open tongue revolving type door lock 6, when maintenance personal is in microenvironment inside and during the locking of the tongue revolving type door lock 6 of microenvironment outside, the personnel of microenvironment inside can open from microenvironment inside safety door latch 2 (rotating 90 ° of this assistant shape joints), microenvironment door 3 can be opened, avoid in the too low threat that people's life is caused of the inner oxygen content of microenvironment.
It should be noted that, the present invention can also be for other process equipment except semiconductor applications, and during for other process equipment, described microenvironment door 3 can replace with the door that relative confined space is provided of other type.Wherein, described tongue revolving type door lock 6 also can replace with other mechanical door lock.While experiment showed, the present invention for semiconductor equipment, effect is fine.
Above embodiment is only for illustrating the present invention; and be not limitation of the present invention; the those of ordinary skill in relevant technologies field; without departing from the spirit and scope of the present invention; can also make a variety of changes and modification; therefore all technical schemes that are equal to also belong to category of the present invention, and scope of patent protection of the present invention should be defined by the claims.
Claims (7)
1. a safety door, is characterized in that, comprises door, safety door latch (2) and mechanical door lock, and it is upper that described safety door latch (2) is arranged on described door inner side, and described mechanical door lock is arranged on described door (3) outside;
Wherein, described door (3) is microenvironment door;
Wherein, described safety door also comprises the microenvironment doorframe (4) that is positioned at described microenvironment door (3) inner side;
Wherein, described safety door latch (2) comprises joint and hasp, and described joint is fixedly connected with described hasp by described microenvironment doorframe (4).
2. safety door as claimed in claim 1, is characterized in that, lock dog (5) is installed on described microenvironment doorframe (4), and described hasp is arranged in described lock dog (5).
3. safety door as claimed in claim 1, is characterized in that, described joint is rotatable assistant shape joint.
4. safety door as claimed in claim 1, is characterized in that, sealing ring (7) is installed on described microenvironment doorframe (4).
5. the safety door as described in any one in claim 1～4, is characterized in that, the material of described safety door latch (2) is clean series of products.
6. safety door as claimed in claim 5, is characterized in that, the material of described safety door latch (2) is 316L stainless steel.
7. safety door as claimed in claim 1, is characterized in that, described mechanical door lock is tongue revolving type door lock (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110366066.9A CN102434075B (en) | 2011-11-17 | 2011-11-17 | Safety door |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110366066.9A CN102434075B (en) | 2011-11-17 | 2011-11-17 | Safety door |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102434075A CN102434075A (en) | 2012-05-02 |
| CN102434075B true CN102434075B (en) | 2014-02-05 |
Family
ID=45982400
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110366066.9A Active CN102434075B (en) | 2011-11-17 | 2011-11-17 | Safety door |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102434075B (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2278391A (en) * | 1993-05-26 | 1994-11-30 | Castell Safety Int | Plural key system for lockable emergency exit doors |
| CN201377227Y (en) * | 2009-04-09 | 2010-01-06 | 温州美億德装饰五金有限公司 | Lock body of escape lock |
| JP2010189978A (en) * | 2009-02-20 | 2010-09-02 | Nabtesco Corp | Locking/unlocking device for emergency escape door |
| CN201581725U (en) * | 2009-12-21 | 2010-09-15 | 扬州麦斯通复合材料有限公司 | Refrigerator wagon rear door escape device |
| CN201991336U (en) * | 2010-11-19 | 2011-09-28 | 中山市皇鼎五金制品有限公司 | Mortise door lock available for self-locking and escaping |
| CN202370384U (en) * | 2011-11-17 | 2012-08-08 | 北京七星华创电子股份有限公司 | Safety door |
-
2011
- 2011-11-17 CN CN201110366066.9A patent/CN102434075B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2278391A (en) * | 1993-05-26 | 1994-11-30 | Castell Safety Int | Plural key system for lockable emergency exit doors |
| JP2010189978A (en) * | 2009-02-20 | 2010-09-02 | Nabtesco Corp | Locking/unlocking device for emergency escape door |
| CN201377227Y (en) * | 2009-04-09 | 2010-01-06 | 温州美億德装饰五金有限公司 | Lock body of escape lock |
| CN201581725U (en) * | 2009-12-21 | 2010-09-15 | 扬州麦斯通复合材料有限公司 | Refrigerator wagon rear door escape device |
| CN201991336U (en) * | 2010-11-19 | 2011-09-28 | 中山市皇鼎五金制品有限公司 | Mortise door lock available for self-locking and escaping |
| CN202370384U (en) * | 2011-11-17 | 2012-08-08 | 北京七星华创电子股份有限公司 | Safety door |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102434075A (en) | 2012-05-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN209723926U (en) | Bag lock | |
| CN203903730U (en) | Synchronous halving sliding-type elevator car roof safety window | |
| CN102434075B (en) | Safety door | |
| CN202370384U (en) | Safety door | |
| CN205277166U (en) | Purify steel door | |
| CN203835195U (en) | Improved intelligent anti-theft door | |
| CN104499887B (en) | A kind of corner door | |
| CN102390641B (en) | Container door lock mechanism capable of being fast opened inside and outside | |
| CN100491684C (en) | General-purpose stop for anti-theft push-pull window | |
| CN204112945U (en) | A kind of Door cross-pin | |
| CN208294312U (en) | The hidden door of openable 180 degree | |
| CN206859971U (en) | A kind of anti-theft pick-proof structure of safe door and doorframe | |
| CN208202968U (en) | Big and small door with intelligent fingerprint lock | |
| CN207004357U (en) | A kind of anti-theft pick-proof door | |
| CN207282969U (en) | A kind of construction cubicle switchboard | |
| CN217894011U (en) | A observe access hole door for on material transport chute | |
| CN210763962U (en) | Punching type manhole cover structure | |
| CN201412031Y (en) | 3-orbit anti-theft slide window | |
| CN201439664U (en) | Latch | |
| CN201306051Y (en) | Gate lock protector and a door with same | |
| CN202321330U (en) | Container door lock mechanism quickly opened internally and externally | |
| CN104492196A (en) | Rotary type circular double-hinge access door | |
| CN203186720U (en) | Plate defining box object taking opening door and window positioning clamping plate mechanism | |
| CN204251164U (en) | A kind of auxiliary shaft cage gate | |
| CN209413746U (en) | The pylon of hermatic door and wind power generating set |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 100016 Jiuxianqiao East Road, Beijing, No. 1, No. Patentee after: North China Science and technology group Limited by Share Ltd. Address before: 100016, No. 1, Jiuxianqiao East Road, Beijing, Chaoyang District, building No. 2, M2 Patentee before: BEIJING SEVENSTAR ELECTRONIC Co.,Ltd. |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20180322 Address after: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Patentee after: BEIJING NAURA MICROELECTRONICS EQUIPMENT Co.,Ltd. Address before: 100016 Jiuxianqiao East Road, Beijing, No. 1, No. Patentee before: North China Science and technology group Limited by Share Ltd. |