CN102433540A - Window type device for detecting surface parameters of material in direct contact way in vacuum environment - Google Patents
Window type device for detecting surface parameters of material in direct contact way in vacuum environment Download PDFInfo
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- CN102433540A CN102433540A CN201110258864XA CN201110258864A CN102433540A CN 102433540 A CN102433540 A CN 102433540A CN 201110258864X A CN201110258864X A CN 201110258864XA CN 201110258864 A CN201110258864 A CN 201110258864A CN 102433540 A CN102433540 A CN 102433540A
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- sealing
- window
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- shell
- slide bar
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Abstract
The invention relates to a window type device for detecting surface parameters of a material in a direct contact way in a vacuum environment. The window type device is characterized in that: a vacuum shell is provided with a sealing window; a rubber sealing ring is arranged between the lower side of a movable sealing cover and the sealing window; a ventilation hole is formed at the central position of the movable sealing cover; a sealing support plate is arranged at a corresponding position inside the movable sealing cover; an annular flaky rubber pad is arranged at a position which is opposite to the sealing support plate in the shell; the lower surface of the sealing support plate is provided with a universal ball pit; a universal bulb is arranged in the universal ball pit to ensure the parallelism of two sealing surfaces under the situation that the sealing support plate and a vacuum shell wall on the inner side of the sealing window are stressed; a detected flat material is positioned between the sealing support plate and the vacuum shell on the sealing window; and a linear slide bar is fixed by using a linear bearing, and can move linearly in a reciprocating way. The window type device has the characteristics of simple structure and low cost; and detection outside vacuum and production in vacuum are combined together, so that the environment requirement of detection requirement is lowered, and the cost is reduced.
Description
Technical field
The present invention relates to flat material work in-process secondary processing or deep processing industry, a kind ofly specifically be used for the window formula device that the material surface parameter is surveyed in the straight touch of vacuum environment, be applied to flat material work in-process secondary processing or above the deep processing equipment.
Background technology
Mostly flat material is the material of whole volume in the prior art, and length does not wait from the supreme myriametre of hundreds of rice, and accomplishes for requiring higher relatively material (like plated film) all to be in the vacuum environment in the process that applies processing.Because such complete processing circumstance complication, technical difficulty is higher, so for the equipment of in vacuum environment, accomplishing coating work and to detect test set and technical requirements that the material surface quality parameters measures all very high.The domestic this equipment that carries out coating processes on the flat material surface has not exclusively depended on import at present.But owing to thisly the flat material surface is applied complete processing be in the vacuum environment fully and accomplish, so this is just very high to the equipment and the technical requirements of material surface quality examination in coating procedure.Because mostly the singularity that flat material (like film) is stored up is package, can not there be any fracture or damaged the centre, so the material in the course of processing must keep continuity simultaneously.Detect after completion is taken out but can not adopt whole roll of material all to apply, that kind just can't guarantee whether the quality of whole roll of material is unified qualified again.Can not in atmosphere, test in the course of processing, that kind can cause vacuum environment to leak and destroy, and causes whole volume film quality defective.But must in the course of processing, under the vacuum environment situation, carry out real-time qualitative data acquisition testing, guarantee whole quality of materials stability from start to finish with this to material surface.So must require to accomplish in a vacuum online acquisition and monitoring to the film surface mass parameter.Place vacuum to the surveying instrument instrument, signal is drawn by data line.Factors such as the volume and the environment for use of testing meter and instrument is restricted, electronic chip dispels the heat, circuit card is anticorona cause the measuring system safety extremely low.The analysis tester instruments and meters that is operated at present in the vacuum does not simultaneously almost have, and depends on the purchase imported product, and price is very high.
Summary of the invention
Technical problem to be solved by this invention is the deficiency that overcomes prior art, and a kind of window formula device that the material surface parameter is surveyed in the straight touch of vacuum environment that is used for is provided, and the technical solution adopted for the present invention to solve the technical problems is: structure of the present invention comprises breather valve, ventilating pit, movable sealing lid, rubber seal, rubber pad, sealing supporting plate, multi-directional ball hole, universal ball end, straight line slide bar, linear bearings, connecting rod, eccentric wheel, rotation axis, vacuum, shell; It is characterized in that the center is provided with sealed window above the shell, the sealed window place is provided with the movable sealing lid, and movable sealing covers between following and the sealed window and is provided with rubber seal; Movable sealing lid central position is provided with ventilating pit; The movable sealing face of covering is provided with breather valve, and breather valve is connected with ventilating pit, and movable sealing lid the inside correspondence position is provided with the sealing supporting plate; Be provided with the rubber pad of round sheet above the sealing supporting plate; Also be provided with the rubber pad of annular slice in the enclosure with the relative position of sealing supporting plate, diameter and the hermetyic window bore equal outer diameter and the equal diameters that seals supporting plate in hole and hole is set in the middle of the rubber pad on the shell, the lower surface of sealing supporting plate is provided with the multi-directional ball hole; Multi-directional ball is provided with universal ball end in the hole; The straight line slide bar is set below the universal ball end, and the straight line slide bar is fixed on the linear bearings, is provided with eccentric wheel below the straight line slide bar; The eccentric wheel center is provided with rotation axis; The straight line slide bar is connected with eccentric wheel through connecting rod, and the straight line slide bar can be done straight reciprocating motion, and vacuum is set in the shell.
Principle of work and method of use: principle of work of the present invention is with the flat material process detection zone that has processed, and flat material is made a brief stay, and continues after the completion to be tested to move ahead again.Eccentric rotation axis is drawn Vakuumkammer through the vacuum-sealing bearing, and under the driving of motor speed varying case or crank, the straight line slide bar of eccentric wheel in connecting rod drives linear bearings done straight reciprocating motion.The universal ball end of slide bar end heads into multi-directional ball hole, sealing supporting plate back, to guarantee the parallelism of two trims when stressed.Fixing round sheet sealing rubber pad above the sealing supporting plate, the flaky sealing rubber pad of stationary annular on the vaccum case of survey in the window.The internal diameter of ring seal rubber pad equates with the hermetyic window bore, external diameter and sealing supporting plate equal diameters.Seal with rubber seal between movable sealing lid and the vaccum case.When the straight line slide bar was in the limes superiors position, the sealing rubber pad that is positioned at the sheet material both sides was extruded, and surveyed in sealing supporting plate, sheet material and the hermetyic window of this moment to form vacuum-sealing.After being positioned at the purging valve venting that hermetyic window covers face, open the window lid.The sheet material exposed that be arranged in window this moment and does not influence the intravital vacuum tightness of shell at atmosphere.The probe of use test instrument (transmitter) is directly tested the material surface.After accomplishing test, the lid top flap is closed purging valve.Drive eccentric rotation axis, take back the smallest limit position to straight line connecting rod and sealing supporting plate through connecting rod, rubber pad separates with sheet material, and this test process finishes, and material applies processing to be continued to advance.
The invention has the beneficial effects as follows that the present invention has simple in structure, characteristics with low cost combine producing in outer detection of vacuum and the vacuum, have reduced the environmental requirement of test set, and then have reduced cost.
Description of drawings
Fig. 1: embodiment of the invention structure is not surveyed the material view;
Fig. 2: embodiment of the invention structure is surveyed the supreme limit position synoptic diagram of material;
Among the figure: breather valve 1, ventilating pit 2, movable sealing lid 3, rubber seal 4, sheet material 5, rubber pad 6, sealing supporting plate 7, multi-directional ball hole 8, universal ball end 9, straight line slide bar 10, linear bearings 11, connecting rod 12, eccentric wheel 13, rotation axis 14, vacuum 15.
Embodiment
Concrete detailed description below with reference to description of drawings the present invention being done; Shown in accompanying drawing, structure of the present invention comprises breather valve 1, ventilating pit 2, movable sealing lid 3, rubber seal 4, rubber pad 6, sealing supporting plate 7, multi-directional ball hole 8, universal ball end 9, straight line slide bar 10, linear bearings 11, connecting rod 12, eccentric wheel 13, rotation axis 14, vacuum 15, shell 16, it is characterized in that shell 16 top centers are provided with sealed window; The sealed window place is provided with movable sealing lid 3; Be provided with rubber seal 4 below movable sealing covers 3 and between the sealed window, movable sealing covers 3 central positions and is provided with ventilating pit 2, above the movable sealing lid 3 breather valve 1 is set; Breather valve 1 is connected with ventilating pit 2; Movable sealing covers 3 the inside correspondence positions sealing supporting plate 7 is set, and sealing is provided with the rubber pad 6 of round sheet above the supporting plate 7, shell 16 in seal the rubber pad 6 that supporting plate 7 relative positions also are provided with annular slice; Diameter and the hermetyic window bore equal outer diameter and the equal diameters that seals supporting plate 7 in hole and hole are set in the middle of the rubber pad 6 on the shell 16; The lower surface of sealing supporting plate 7 is provided with multi-directional ball hole 8, is provided with universal ball end 9 in the multi-directional ball hole 8, straight line slide bar 10 is set below the universal ball end 9; Straight line slide bar 10 is fixed on the linear bearings 11; Be provided with eccentric wheel 13 below the straight line slide bar 10, eccentric wheel 13 centers are provided with rotation axis 14, and straight line slide bar 10 is connected with eccentric wheel 13 through connecting rod 12; Straight line slide bar 10 can be done straight reciprocating motion, in the shell 16 vacuum is set.
Embodiment recited above describes preferred implementation of the present invention; Be not that design of the present invention and scope are limited; Under the prerequisite that does not break away from design concept of the present invention, common engineering technical personnel make technical scheme of the present invention in this area various modification and improvement all should fall into protection scope of the present invention; The technology contents that the present invention asks for protection all is documented in claims.
Claims (1)
1. be used for the straight touch of vacuum environment and survey the window formula device of material surface parameter; Comprise breather valve (1), ventilating pit (2), movable sealing lid (3), rubber seal (4), rubber pad (6), sealing supporting plate (7), multi-directional ball hole (8), universal ball end (9), straight line slide bar (10), linear bearings (11), connecting rod (12), eccentric wheel (13), rotation axis (14), vacuum (15), shell (16); The center is provided with sealed window above it is characterized in that shell (16), and the sealed window place is provided with movable sealing lid (3), and movable sealing covers below (3) and between the sealed window and is provided with rubber seal (4); Movable sealing lid (3) central position is provided with ventilating pit (2); Above the movable sealing lid (3) breather valve (1) is set, breather valve (1) is connected with ventilating pit (2), and movable sealing lid (3) the inside correspondence position is provided with sealing supporting plate (7); Be provided with the rubber pad (6) of round sheet above the sealing supporting plate (7); In shell (16), also be provided with the rubber pad (6) of annular slice with sealing supporting plate (7) relative position, the diameter and the equal diameters of hermetyic window bore equal outer diameter with sealing supporting plate (7) in hole and hole is set in the middle of the rubber pad (6) on the shell (16), the lower surface of sealing supporting plate (7) is provided with multi-directional ball and cheats (8); Be provided with universal ball end (9) in the multi-directional ball hole (8); Straight line slide bar (10) is set below the universal ball end (9), and straight line slide bar (10) is fixed on the linear bearings (11), is provided with eccentric wheel (13) below the straight line slide bar (10); Eccentric wheel (13) center is provided with rotation axis (14); Straight line slide bar (10) is connected with eccentric wheel (13) through connecting rod (12), and straight line slide bar (10) can be done straight reciprocating motion, and shell is provided with vacuum in (16).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110258864XA CN102433540A (en) | 2011-08-30 | 2011-08-30 | Window type device for detecting surface parameters of material in direct contact way in vacuum environment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110258864XA CN102433540A (en) | 2011-08-30 | 2011-08-30 | Window type device for detecting surface parameters of material in direct contact way in vacuum environment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102433540A true CN102433540A (en) | 2012-05-02 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110258864XA Pending CN102433540A (en) | 2011-08-30 | 2011-08-30 | Window type device for detecting surface parameters of material in direct contact way in vacuum environment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102433540A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6193804B1 (en) * | 1999-10-02 | 2001-02-27 | Taiwan Semiconductor Manufacturing Company, Ltd | Apparatus and method for sealing a vacuum chamber |
| CN1682334A (en) * | 2002-09-13 | 2005-10-12 | 莫克斯泰克公司 | Radiation window and method of manufacture |
| CN102005541A (en) * | 2009-08-27 | 2011-04-06 | 三星移动显示器株式会社 | Thin film deposition apparatus and method of manufacturing organic light-emitting display apparatus using the same |
| CN202305504U (en) * | 2011-09-27 | 2012-07-04 | 费绍栋 | Window type device for direct-contact-type detection of material surface parameter in vacuum environment |
-
2011
- 2011-08-30 CN CN201110258864XA patent/CN102433540A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6193804B1 (en) * | 1999-10-02 | 2001-02-27 | Taiwan Semiconductor Manufacturing Company, Ltd | Apparatus and method for sealing a vacuum chamber |
| CN1682334A (en) * | 2002-09-13 | 2005-10-12 | 莫克斯泰克公司 | Radiation window and method of manufacture |
| CN102005541A (en) * | 2009-08-27 | 2011-04-06 | 三星移动显示器株式会社 | Thin film deposition apparatus and method of manufacturing organic light-emitting display apparatus using the same |
| CN202305504U (en) * | 2011-09-27 | 2012-07-04 | 费绍栋 | Window type device for direct-contact-type detection of material surface parameter in vacuum environment |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20120502 |