CN102433540A - Window type device for detecting surface parameters of material in direct contact way in vacuum environment - Google Patents

Window type device for detecting surface parameters of material in direct contact way in vacuum environment Download PDF

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CN102433540A
CN102433540A CN 201110258864 CN201110258864A CN102433540A CN 102433540 A CN102433540 A CN 102433540A CN 201110258864 CN201110258864 CN 201110258864 CN 201110258864 A CN201110258864 A CN 201110258864A CN 102433540 A CN102433540 A CN 102433540A
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sealing
provided
window
vacuum
linear
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CN 201110258864
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Chinese (zh)
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费绍栋
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费绍栋
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Abstract

The invention relates to a window type device for detecting surface parameters of a material in a direct contact way in a vacuum environment. The window type device is characterized in that: a vacuum shell is provided with a sealing window; a rubber sealing ring is arranged between the lower side of a movable sealing cover and the sealing window; a ventilation hole is formed at the central position of the movable sealing cover; a sealing support plate is arranged at a corresponding position inside the movable sealing cover; an annular flaky rubber pad is arranged at a position which is opposite to the sealing support plate in the shell; the lower surface of the sealing support plate is provided with a universal ball pit; a universal bulb is arranged in the universal ball pit to ensure the parallelism of two sealing surfaces under the situation that the sealing support plate and a vacuum shell wall on the inner side of the sealing window are stressed; a detected flat material is positioned between the sealing support plate and the vacuum shell on the sealing window; and a linear slide bar is fixed by using a linear bearing, and can move linearly in a reciprocating way. The window type device has the characteristics of simple structure and low cost; and detection outside vacuum and production in vacuum are combined together, so that the environment requirement of detection requirement is lowered, and the cost is reduced.

Description

用于真空环境中直触式探测物料表面参数的窗式装置 Window means for a vacuum environment parameters detecting direct touch surface material

技术领域 FIELD

[0001] 本发明涉及扁平材料半成品二次加工或深加工行业,具体的说是一种用于真空环境中直触式探测物料表面参数的窗式装置,应用于扁平材料半成品二次加工或深加工设备上面。 [0001] The present invention relates to a secondary processing flat material or semifinished product processing industry, specifically for window type device is a vacuum environment parameters detecting direct touch surface material, applied to the flat material or semifinished secondary processing processing equipment above.

背景技术 Background technique

[0002] 现有技术中扁平材料多为整卷的材料,长度从几百米至上万米不等,而对于要求相对较高的材料(如镀膜)在涂覆加工的过程都是处于真空环境中完成的。 [0002] The prior art multi a flat material as the material of the entire volume, ten thousand meters length ranging from a few hundred meters comes first, and for the material requirements are relatively high (e.g., film) during the coating process is in a vacuum environment of completion. 由于这样的加工工艺环境复杂、技术难度较高,所以对于在真空环境中完成涂覆工作的设备以及检测物料表面质量参数进行测量的检测设备和技术要求都非常高。 Because of the complexity of such a processing environment, high technical difficulty, so for the coating of the work in a vacuum environment, and a detection device for detecting the material surface quality parameter measurement equipment and technical requirements are very high. 目前国内这种在扁平材料表面进行涂覆工艺的设备已经不完全依赖于进口了。 At present such apparatus for the coating process on the surface of the flat material is no longer entirely dependent on imports. 但是由于这种对扁平材料表面进行涂覆加工工艺是完全处于真空环境中完成的,所以这就对在涂覆过程中材料表面质量检测的设备和技术要求非常高。 However, since such a coating process the surface of the flat material in a vacuum environment is fully completed, so this material to the surface during the coating process quality testing equipment and technical requirements are very high. 同时由于扁平材料(如膜)收储的特殊性,多为卷装,中间不能有任何断裂或者破损,所以在加工过程中的材料必须保持连续性。 Specificity and because the flat material (e.g., film) Shouchu, mostly package, the middle can not have any broken or damaged, the material in the process must be continuity. 但又不能采用整卷材料全都涂覆完成取出后再进行检测,那样就无法保证整卷材料的质量统一是否合格。 But not all use of the entire volume of material removed after completion of the coating were detected, so we can not guarantee the quality of the entire volume of the material unity of eligibility. 也不能加工过程中在大气中进行测试,那样会造成真空环境泄漏和破坏,造成整卷薄膜质量不合格。 Processing can not be tested in the atmosphere, creating a vacuum environment that would leak and damage, the entire volume of unsatisfactory quality of the film. 但必须在加工过程中在真空环境情况下对材料表面进行实时质量数据采集检测,以此确保整个材料质量自始至终的稳定性。 However, in the process must be carried out in a vacuum atmosphere where the surface of the material quality of the real-time data acquisition is detected, in order to ensure the stability of the material throughout the entire mass. 所以就得要求在真空中完成对薄膜表面质量参数的在线采集和监测。 So we have line required to complete the acquisition and monitoring of the quality parameters of the film surface in vacuum. 把测量仪器仪表置于真空中,信号由数据线引出。 The measuring instruments placed under vacuum, the signal leads from the data line. 测试仪器仪表的体积和使用环境受限制、电子芯片散热、电路板防电晕等因素导致测量系统可靠性极低。 Volume of test instruments and restricted environment, the electronic chip cooling, circuit boards and other factors causing a low anti-corona measuring system reliability. 同时目前工作在真空里的分析测试仪器仪表几乎没有,依赖于购买进口产品,价格非常高。 While currently working in a vacuum of analytical instrumentation little, depending on the purchase of imported products, the price is very high.

发明内容 SUMMARY

[0003] 本发明所要解决的技术问题是克服现有技术的不足,提供一种用于真空环境中直触式探测物料表面参数的窗式装置,本发明解决其技术问题所采用的技术方案是:本发明的结构包括通气阀、通气孔、活动密封盖、橡胶密封圈、橡胶垫、密封托板、万向球坑、万向球头、直线滑杆、直线轴承、连杆、偏心轮、转动轴、真空、外壳,其特征在于外壳上面中心处设置密封窗口,密封窗口处设置活动密封盖,活动密封盖下面与密封窗口之间设置有橡胶密封圈,活动密封盖中心位置设置有通气孔,活动密封盖上面设置通气阀,通气阀与通气孔连接,活动密封盖里面对应位置设置密封托板,密封托板上面设置有圆形片状的橡胶垫,在外壳内与密封托板相对的位置也设置有环形片状的橡胶垫,外壳上的橡胶垫中间设置孔并且孔的直径与密封窗口径相等外径与 [0003] The present invention solves the technical problem to overcome deficiencies of the prior art, there is provided a vacuum apparatus windowed environment parameters detecting direct touch surface material for the present invention is to solve the technical problems the technical solution used is : structure of the present invention comprises a vent valve, air vent, the sealing cap activities, rubber seals, rubber, sealing pallets, universal ball pit, ball joint, linear slider, linear bearings, connecting rods, eccentric, rotary shaft, the vacuum housing, wherein the housing above the center of the sealing window, the sealing window, the sealing cap is provided at the activity, activity seal having rubber seals and the seal between the lower window setting, active position of the sealing cover is provided with a central vent hole activities sealing cover disposed above the vent valve, the vent valve is connected with the air vent, the sealing cap inside the active sealing position corresponding to the pallet, the pallet above the seal is provided with a circular sheet-shaped rubber pad, opposite the sealing pallets within the housing the position of the sheet is also provided with an annular rubber pad, the rubber pad disposed intermediate the housing and the bore hole diameter equal to the outer diameter of the sealing window and 密封托板的直径相等,密封托板的下表面设置有万向球坑,万向球坑内设置有万向球头,万向球头下面设置直线滑杆,直线滑杆固定在直线轴承上,直线滑杆下面设置有偏心轮,偏心轮中心设置转动轴,直线滑杆通过连杆与偏心轮连接,直线滑杆可做直线往复运动,外壳内设置真空。 Equal to the diameter of the seal of the pallet, the lower surface of the pallet is provided with a universal ball seal pit, the pit is provided with a ball joint ball joint, ball joint arranged straight below the slide bar, the slide bar fixed to the straight linear bearing, the following linear slider provided with an eccentric, the eccentric rotation of the central shaft is provided, the slide bar linearly through the eccentric link connection, the linear slider can do a linear reciprocating motion, the vacuum is provided within the housing.

[0004] 工作原理及使用方法:本发明工作原理是将已经加工好的扁平材料经过检测区,使扁平物料做短暂停留,待测试完成后再继续前行。 [0004] The working principle and method: the operation of the present invention is a flat material has been processed through the detection zone, the material of the flat short stay, to be tested after the move is completed. 偏心轮的转动轴经真空密封轴承引出真空室,在马达变速箱或摇把的驱动下,偏心轮经连杆驱动直线轴承内的直线滑杆做直线往复运动。 The rotary shaft of the eccentric vacuum chamber vacuum sealed lead-bearing, gearbox or the motor in a driving crank, eccentric rod driving straight through the linear bearing slider linearly reciprocates. 滑杆端部的万向球头顶入密封托板背部万向球坑,以保证两个密封面在受力时的平行度。 Ball head slider into the sealing end portion of the back of the pallet universal ball pit to ensure the parallelism of the two sealing surfaces when the force. 密封托板上面固定圆形片状密封橡胶垫,窗口内测的真空壳体上固定环形片状的密封橡胶垫。 The fixed circular sealing pallets above the sheet-like sealing rubber pad, a sheet-like sealing rubber pad fixed annular housing on the vacuum window is measured. 环形密封橡胶垫的内径与密封窗口径相等,外径与密封托板直径相等。 Annular seal sealing rubber pad inner diameter equal to the diameter of the window, equal to the outer diameter of the sealing pallets. 活动密封盖与真空壳体之间用橡胶密封圈密封。 Between the movable cover and the vacuum housing sealing rubber seals. 当直线滑杆处于上极限位时,位于片状物料两侧的密封橡胶垫被挤压,此时的密封托板、片状物料和密封窗内测形成真空密封。 When the linear slider is in the limit position, is located on both sides of the sheet material sealing rubber pad is pressed, then sealing the pallet, the sheet-like material and sealed windows beta form a vacuum seal. 位于密封窗盖上面的放气阀放气后,打开窗盖。 Sealed window cover positioned above a discharge valve deflated, the window cover is opened. 此时位于窗口的片状物料上表面暴露在大气中,且不影响壳体内的真空度。 At this time, the surface exposed to the atmosphere of the window on the sheet material, and does not affect the degree of vacuum within the housing. 使用测试仪器的探头(传感器)对物料表面直接进行测试。 Using the test instrument probe (sensor) directly on the material surface tests. 完成测试后,盖上窗盖,关闭放气阀。 After completion of the test, close the window cover, purge valve was closed. 驱动偏心轮的转动轴,通过连杆把直线连杆和密封托板带回下极限位,橡胶垫和片状物料分离,本次测试过程结束,物料涂覆加工继续行进。 Eccentric driving rotation shaft by the straight line link and a link back to the lower limit position sealing the pallet, and a rubber pad sheet material separating the end of the test process, the material coating process to proceed.

[0005] 本发明的有益效果是,本发明具有结构简单,成本低廉的特点,将真空外检测和真空中生产结合在一起,降低了检测设备的环境要求,进而降低了成本。 [0005] Advantageous effects of the present invention, the present invention has a simple structure, low cost, and detecting binding in vacuo outer vacuum produced together, reducing the environmental requirements detecting apparatus, thereby reducing the cost.

附图说明 BRIEF DESCRIPTION

[0006] 图1 :本发明实施例结构未探测物料状态示意图; [0006] Figure 1: a schematic structural embodiment of the present invention does not detect the state of the material;

[0007] 图2 :本发明实施例结构探测物料至上极限位置示意图; [0007] Figure 2: Example extreme positions schematic structural embodiment of the present invention, the detection material first;

[0008] 图中:通气阀1、通气孔2、活动密封盖3、橡胶密封圈4、片状物料5、橡胶垫6、密封托板7、万向球坑8、万向球头9、直线滑杆10、直线轴承11、连杆12、偏心轮13、转动轴14、 [0008] FIG: vent valve 1, 2 vent holes, sealing cover 3 activity, rubber sealing ring 4, the sheet material 5, the rubber pad 6, the sealing pallets 7, 8 pits universal ball, ball joint 9, linear slider 10, linear bearings 11, connecting rod 12, eccentric 13, rotation shaft 14,

真空15。 15 in vacuo.

具体实施方式 detailed description

[0009] 参照附图说明对本发明作以下具体的详细说明;如附图所示,本发明的结构包括通气阀1、通气孔2、活动密封盖3、橡胶密封圈4、橡胶垫6、密封托板7、万向球坑8、万向球头9、直线滑杆10、直线轴承11、连杆12、偏心轮13、转动轴14、真空15、外壳16,其特征在于外壳16上面中心处设置密封窗口,密封窗口处设置活动密封盖3,活动密封盖3下面与密封窗口之间设置有橡胶密封圈4,活动密封盖3中心位置设置有通气孔2,活动密封盖3上面设置通气阀1,通气阀1与通气孔2连接,活动密封盖3里面对应位置设置密封托板7,密封托板7上面设置有圆形片状的橡胶垫6,在外壳16内与密封托板7相对的位置也设置有环形片状的橡胶垫6,外壳16上的橡胶垫6中间设置孔并且孔的直径与密封窗口径相等外径与密封托板7的直径相等,密封托板7的下表面设置有万向球坑8,万向 [0009] BRIEF DESCRIPTION The present invention will be described in detail in the following detailed; As shown, the structure of the present invention are shown comprises a vent valve, the vent holes 2, 3 activity sealing cap, the sealing ring 4 of rubber, rubber pad 6, the seal pallet 7, 8 pits universal ball, ball joint 9, the linear slider 10, linear bearings 11, connecting rod 12, eccentric 13, rotation shaft 14, the vacuum 15, housing 16, wherein the housing 16 above the central the sealing window, the sealing window 3 is provided at the sealing cover activities, activities seal having a seal is provided between the window 3 and the following rubber sealing ring 4, the center position of the active sealing cover 3 is provided with a vent hole 2, the movable sealing cover arranged above ventilation 3 1 valve, the vent valve 1 and the vent 2 is connected, the movable sealing cover 3 which corresponds to the position of the pallet 7 is provided a seal, the seal above the pallet 7 is provided with a circular sheet-shaped rubber pad 6 within the housing 16 and the sealing pallets 7 a position opposite the sheet is also provided with an annular rubber pad 6, the rubber pad 16 on the housing 6 and the intermediate bore a hole with a diameter equal to the outer diameter of the sealing window equal to the diameter of the seal 7 of the pallet, the pallet 7 to the lower seal universal ball surface is provided with pits 8, a universal 坑8内设置有万向球头9,万向球头9下面设置直线滑杆10,直线滑杆10固定在直线轴承11上,直线滑杆10下面设置有偏心轮13,偏心轮13中心设置转动轴14,直线滑杆10通过连杆12与偏心轮13连接,直线滑杆10可做直线往复运动,外壳16内设置真空。 8 is provided with the hole 9 ball joint, ball joint 9 disposed below the linear slider 10, the slider 10 is fixed in a straight line on a linear bearing 11, the linear slider 10 is provided below the eccentric wheel 13, 13 is provided eccentric center the rotary shaft 14, the slider 10 is connected by a straight line 12 and the eccentric rod 13, the linear slider 10 can do a linear reciprocating motion, the vacuum is provided within the housing 16.

[0010] 上面所述的实施例仅仅是对本发明的优选实施方式进行描述,并非对本发明的构思和范围进行限定,在不脱离本发明设计构思的前提下,本领域中普通工程技术人员对本发明的技术方案作出的各种变型和改进,均应落入本发明的保护范围,本发明请求保护的技术内容,已经全部记载在权利要求书中。 Example [0010] The above are merely preferred embodiments of the present invention will be described, not for the spirit and scope of the present invention are defined, without departing from the design concept of the present invention is provided, those of ordinary engineering skill in the art of the present invention various modifications to the technical solutions and modifications should fall within the scope of the present invention, the claimed technical contents of the present invention has been fully described in the claims.

Claims (1)

  1. 1.用于真空环境中直触式探测物料表面参数的窗式装置,包括通气阀(1)、通气孔O)、活动密封盖(3)、橡胶密封圈0)、橡胶垫(6)、密封托板(7)、万向球坑(8)、万向球头(9)、直线滑杆(10)、直线轴承(11)、连杆(12)、偏心轮(13)、转动轴(14)、真空(15)、外壳(16),其特征在于外壳(16)上面中心处设置密封窗口,密封窗口处设置活动密封盖(3),活动密封盖C3)下面与密封窗口之间设置有橡胶密封圈,活动密封盖(3)中心位置设置有通气孔O),活动密封盖C3)上面设置通气阀(1),通气阀(1)与通气孔(¾连接,活动密封盖(3)里面对应位置设置密封托板(7),密封托板(7)上面设置有圆形片状的橡胶垫(6), 在外壳(16)内与密封托板(7)相对的位置也设置有环形片状的橡胶垫(6),外壳(16)上的橡胶垫(6)中间设置孔并且孔的直径与密封窗口径相等外径与密 1. Window apparatus for a vacuum environment parameters detecting direct touch surface material, comprising a vent valve (1), vent O), active sealing cover (3), a rubber 0 ring), rubber pad (6), the sealing plate (7), universal ball pit (8), ball joint (9), the linear slider (10), the linear bearing (11), a link (12), the eccentric (13), the rotation shaft (14), vacuum (15), the housing (16), characterized in that the housing (16) disposed above the center between the sealing window, the sealing window is provided at the active sealing cover (3), the sealing cover activity C3) below the sealing window provided with a rubber sealing ring, the movable seal cap (3) is provided with a vent hole center position O), active sealing cover C3) disposed above the venting valve (1), through the valve (1) and the vent (¾ connections, active sealing cover ( 3) which corresponds to the position of the sealing plate (7), the sealing plate (7) is provided above the circular plate-shaped rubber pad (6), the relative position of the sealing plate (7) in the housing (16) also provided with an annular sheet-like rubber pad (6), rubber pads (6) and the intermediate aperture is provided on the housing (16) bore diameter equal to the outer diameter of the sealing window and adhesion 托板(7)的直径相等, 密封托板(7)的下表面设置有万向球坑(8),万向球坑(8)内设置有万向球头(9),万向球头(9)下面设置直线滑杆(10),直线滑杆(10)固定在直线轴承(11)上,直线滑杆(10)下面设置有偏心轮(13),偏心轮(13)中心设置转动轴(14),直线滑杆(10)通过连杆(12)与偏心轮(13)连接,直线滑杆(10)可做直线往复运动,外壳(16)内设置真空。 Equal to the diameter of the plate (7), the lower surface of the sealing plate (7) is provided with a universal ball hole (8), universal ball pit (8) is provided with a ball joint within (9), ball joint (9) (10), the linear slider (10) fixed to the linear bearings (11), the linear slider (10) is provided below the eccentric wheel (13), the eccentric (13) rotatably disposed below the center of the slide bar linearly disposed shaft (14), the linear slider (10) is connected via a link (12) and the eccentric (13), the linear slider (10) to do a linear reciprocating motion, the housing (16) disposed within the vacuum.
CN 201110258864 2011-08-30 2011-08-30 Window type device for detecting surface parameters of material in direct contact way in vacuum environment CN102433540A (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6193804B1 (en) * 1999-10-02 2001-02-27 Taiwan Semiconductor Manufacturing Company, Ltd Apparatus and method for sealing a vacuum chamber
CN1682334A (en) * 2002-09-13 2005-10-12 莫克斯泰克公司 Radiation window and method of manufacture
CN102005541A (en) * 2009-08-27 2011-04-06 三星移动显示器株式会社 Thin film deposition apparatus and method of manufacturing organic light-emitting display apparatus using the same
CN202305504U (en) * 2011-09-27 2012-07-04 费绍栋 Window type device for direct-contact-type detection of material surface parameter in vacuum environment

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6193804B1 (en) * 1999-10-02 2001-02-27 Taiwan Semiconductor Manufacturing Company, Ltd Apparatus and method for sealing a vacuum chamber
CN1682334A (en) * 2002-09-13 2005-10-12 莫克斯泰克公司 Radiation window and method of manufacture
CN102005541A (en) * 2009-08-27 2011-04-06 三星移动显示器株式会社 Thin film deposition apparatus and method of manufacturing organic light-emitting display apparatus using the same
CN202305504U (en) * 2011-09-27 2012-07-04 费绍栋 Window type device for direct-contact-type detection of material surface parameter in vacuum environment

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