CN102420286A - Piezoelectric component having multilayer composite structure and preparation method thereof - Google Patents
Piezoelectric component having multilayer composite structure and preparation method thereof Download PDFInfo
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- CN102420286A CN102420286A CN2011104083921A CN201110408392A CN102420286A CN 102420286 A CN102420286 A CN 102420286A CN 2011104083921 A CN2011104083921 A CN 2011104083921A CN 201110408392 A CN201110408392 A CN 201110408392A CN 102420286 A CN102420286 A CN 102420286A
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Abstract
The invention relates to a piezoelectric component having a multilayer composite structure and a preparation method thereof. The component is made of a material with piezoelectricity, the piezoelectric component having the multilayer composite structure has three-layer structure, and the structures of three layers are communicated together to form a whole; two end face layers are provided with piezoelectric material strips arranged in parallel, and the middle layer is provided with a piezoelectric material granule post; and legacy electrode layers are formed on the surfaces of the piezoelectric material strips on the two end face layers. The piezoelectric component having the multilayer composite structure is a circular, square or polygonal planar component. The invention is characterized in that: the piezoelectric component is easy and convenient to prepare and controllable in performance; the electrode layers of two ends can be welded through high-temperature leads, and all the structures of three layers are communicated, so the piezoelectric component has high strength and reliability; and the parameters of the piezoelectric component are superior to those of a solid piezoelectric component of the same overall dimension.
Description
Technical field
The present invention relates to a kind of technical field that belongs to functional material and preparation method thereof, definite saying so relates to a kind of multi-layer compound structure piezo component that is used for aspects such as the underwater sound, medical supersonic, industrial ultrasound detection and preparation method thereof.
Background technology
The development of piezoelectric is tortuous.The eighties in 19th century, Curie brother at first found piezoelectric effect on quartz crystal, to the 1950's people to develop with lead zirconate titanate (PZT) be the piezoelectric ceramic of representative.This type material has that piezoelectric property is good, and characteristics such as electromechanical coupling factor height are widely used in electroacoustic, the underwater sound and ultrasonic field, like piezoelectric vibrator, piezoelectric ignition device, piezoelectric transformer, piezoelectric filter etc.But because the density of piezoelectric ceramic and modulus of elasticity are all big, the hydrostatic pressing piezoelectric constant is little, poor, heavier, the difficult and empty G&W coupling of the transducer shock resistance of making is difficult to satisfy the requirement of hydrophone and medical science transducer.The seventies in 20th century; With Kynoar (PVDF) is the high polymer piezoelectric material stable chemical performance of representative, and compliance is good, can make large tracts of land and uniform film; Its acoustic impedance is easy to the acoustic impedance coupling with water and organism; Can be widely used in ultrasonic transducer, underwater acoustic transducer, biology sensor, pyroelectric electric device etc., but its piezoelectric constant and electromechanical coupling factor are little, working range is narrow.
Solid piezo component is when its lateral dimension during greater than longitudinal size, and lateral is serious, has not only reduced the mechano-acoustical efficiency of thickness vibration mould, and can bring unwanted resonance frequency, also can cause the thickness frequency bandwidth narrower.Therefore the researcher often adopts piezoelectric ceramic granule post composition array to obtain the performance index that need in order to obtain the higher sound source utmost point and the bandwidth of broad.But the cost of doing like this is higher, and complex technical process, especially when high-frequency (＞500kHz) because thickness is less, in order to satisfy certain aspect ratio, the piezoelectric ceramic particle width also very little (≤2mm), give and install that making brings very high difficulty with electrode.And the piezo-electricity composite material of single face cutting, the electrode on cut surface is made and because macromolecular material solidifies the factor that the whole deformation that is brought also is its volume production of restriction and application.
For exploration can better underwater sound sensor and ultrasound in medicine and biology device; People attempt to seek a kind of pottery and polymer advantage of having concurrently; And can suppress the new material of shortcoming separately; Thereby begun the research of a ceramic polymer piezoelectric composite material, its performance is improved largely than piezoelectric ceramic.Oneself forms the practicability commodity 1-3 type, become present research at most, the most deep, most widely used a kind of piezo-electricity composite material, but its electrode layer needs preparation again; Basically adopt the cryogenic vacuum way of distillation or sputtering method, conjugation is not high, is used for receiving transducer more; When being used for big voltage transmitting transducer; Reliability is not high, and complex manufacturing process, and technical process is various.
Summary of the invention
The objective of the invention is to overcome the deficiency of above-mentioned existence, and a kind of multi-layer compound structure piezo component and preparation method thereof is provided, can be used for aspects such as the underwater sound, medical supersonic, industrial ultrasound detection.
The present invention solves the technical scheme that its technical problem adopts: the material of this multi-layer compound structure piezo component is the material with piezoelectricity; Profile is planar rondure, plane quadrilateral or plane polygon; Comprise three-decker on the multi-layer compound structure piezo component structure; This three-decker is connected together, and is as a whole; Be that the two ends surface layer all is that to be the piezoelectric that strip is arranged in parallel rectangular, the intermediate layer is the grains of piezoelectric material post.
Gap between the piezoelectric of described facing layer is rectangular and the rectangular width of each piezoelectric are decided as required; The rectangular thickness of the piezoelectric of a facing layer is identical; The rectangular orientation of piezoelectric on two facing layer is angled; Angle is greater than 0 ° and less than 180 °, and electrode layer is left on the rectangular surface of the piezoelectric on the surface layer of two ends.
The cross section of the grains of piezoelectric material post in described intermediate layer is a parallelogram; And the angle at two diagonal angles is identical with the rectangular stagger angle of the piezoelectric of two ends surface layer; The tetragonal size of each grains of piezoelectric material post depends on the width that the both ends of the surface layer of piezo-electric material is rectangular; The height of each grains of piezoelectric material post is identical, and the rectangular length direction of the piezoelectric of short transverse and two ends surface layer is perpendicular.
Like the preparation method of this multi-layer compound structure piezo component, comprise that step is following:
1), be bonded on the base in an end face level of flat element device, adopt the scribing cutting machine the enterprising capable bar shaped cutting of not cutting of not bonding element end face, it is rectangular to cut into the spaced piezoelectric of bar shaped;
2), after the first step is accomplished, take off the flat element device, the end face of well cutting is bonded on the base, and the base rotation, make cutting blade with cut on the end face that finishes the rectangular direction of piezoelectric at an angle;
3) take off the flat element device after cutting finishes, for the second time, after cleaning finishes, obtain the multi-layer compound structure piezo component.
Cutting mode is the bar shaped cutting; Process is carried out on two end faces of flat element device respectively at twice; The direction of cutting twice has a certain degree; Angle is greater than 0 ° and less than 180 °, and promptly this angle has just determined the angle between rectangular orientation of piezoelectric of gained components and parts two ends surface layers.
When carrying out end face bar shaped cutting each time; Depth of cut is greater than the half the of primary plane components and parts thickness and less than former first planar device thickness; Depth of cut on same end face is identical, and decide according to required size at the interval of the degree of depth of cutting twice and bar shaped cutting.
Multi-layer compound structure piezo component profile provided by the invention is circular, square or polygon plane element; Main feature is simple for production; Performance is controlled, and the two end electrodes layer all can pass through the high temperature wire welding lead, and three-decker all is communicated with; Strength reliability is high, and parameter is superior to the solid piezo component of same overall dimension.
Description of drawings
Fig. 1 is that multi-layer compound structure piezo component of the present invention is made the structural representation after the cutting of bar shaped is for the first time accomplished;
Fig. 2 is that multi-layer compound structure piezo component of the present invention is made the structural representation after the cutting of bar shaped is for the second time accomplished;
Label in the accompanying drawing is respectively: 1, facing layer, 2, the intermediate layer, 11, piezoelectric is rectangular.
Embodiment
To combine accompanying drawing that the present invention is done detailed introduction below: shown in accompanying drawing, a kind of multi-layer compound structure piezo component provided by the invention comprises three layers on the component structure; Two ends are to be the piezoelectric ceramic bar that strip is arranged; At interval can be identical, also can be different, set as required; The size of the piezoelectric rectangular 11 on two facing layer 1 can be the same or different, and rectangular 11 orientations of piezoelectric on two facing layer 1 are angled, and angle is greater than 0 ° and less than 180 °; Intermediate layer 2 is grains of piezoelectric material posts; The grains of piezoelectric material column section is a parallelogram; And the angle at two diagonal angles is identical with rectangular 11 stagger angles of the piezoelectric of two ends surface layer 1; The length direction of the piezoelectric of the short transverse of grains of piezoelectric material post and two ends surface layer 1 rectangular 11 is perpendicular, and three-decker is connected together, and the residue strip electrode layer of two ends surface layer 1 is the electrode of element as a whole still.
The method for preparing multi-layer compound structure piezo component of the present invention forms through the piezoelectric media with plane components and parts being adopted ad hoc fashion cut the back, and profile is circular, square or polygon plane element.Need carry out the bar shaped cutting process twice.The first step, at first an end face of pure piezoelectric ceramic device is not cut bar shaped cutting on solid plane, and an end face level of solid piezoelectric ceramic device is bonded on the base; Guarantee that components and parts face to be cut is parallel with the knife face traffic direction, adopt the scribing cutting machine on not bonding components and parts end face, not cut the bar shaped cutting, i.e. the depth of cut of single face cutting is less than components and parts thickness; Bar shaped (piezoelectric is rectangular) is set at interval can be identical, also can be different, set according to actual needs (＞blade thickness); Components and parts after this bar shaped cutting step finishes constitute double-layer structure; Cut surface one deck is the piezoelectric ceramic stripe board, and stripe board length is the length at this position of former components and parts, and width deducts blade width for the cutting spacing; It highly is depth of cut; Width of slit is a blade width, and another layer not cutting part is solid piezoelectric ceramic, and thickness is that former components and parts thickness deducts depth of cut; Second step; Do not cut the bar shaped cutting at another end face, after the first step is accomplished, take off components and parts, the end face that has cut is bonded on the base; Guarantee that element face to be cut is parallel with the knife face traffic direction; And rotating base, and with base rotation, make cutting blade and the rectangular direction of piezoelectric (＞0 ° and＜180 °) at an angle of having cut on the end face that finishes; All the other parameter set-up modes are identical with first step with cutting process, and the parameter value of cutting twice can be inequality.Take off components and parts after cutting finishes for the second time, promptly accomplish preparation after cleaning finishes.
The technical scheme for preparing process is for a better understanding of the present invention done further to describe in detail below in conjunction with concrete data, and data in this instance and result be not as the general constraint of restriction patent of the present invention.Concrete making step is narrated as follows:
1, the flat element device adopts the square planar piezoelectric ceramic device of 40mm * 40mm * 4mm, on both ends of the surface, has silver layer, and blade thickness 0.3mm is cut in the bar shaped of adopting the scribing cutting machine that solid pure piezoelectric ceramic device is not cut form.During cutting, at first an end face level with solid piezoelectric ceramic device is bonded on the base, guarantees that element face to be cut is parallel with the knife face traffic direction; Depth of cut is 3.5mm, and for the easy bar shaped cutting spacing of then setting is all 1.8mm mutually, the components and parts after cutting finishes like this constitute double-layer structure; Cut surface one deck is the piezoelectric ceramic stripe board, the long 40mm of piezoelectric ceramic stripe board, wide 1.5mm; High 3.5mm, cutting part is not the long 40mm of solid piezoceramics layer, wide 40mm; High 0.5mm, as shown in Figure 1;
2, take off components and parts; End face after again it having been cut is bonded on the base, guarantees that element face to be cut is parallel with the knife face traffic direction, and base is rotated; Make cutting blade and the piezoelectric strip direction of having cut on the end face that finishes be 90 ° of angles; In the also enterprising capable bar shaped cutting of not cutting of uncut element end face, the bar shaped depth of cut is 3.5mm then, and spacing is all 1.8mm mutually; The same first step of cutting process takes off the making that components and parts clean the back and accomplish components and parts after cutting is accomplished.
Be divided into three layers on the final component structure of accomplishing, two ends are respectively that one deck is the piezoelectric ceramic bar that strip is arranged, long 40mm; Wide 1.5mm, high 0.5mm, cutter stitch wide 0.3mm; Piezoelectric strip is arranged in parallel on each end face, interval 1.8mm, and the two ends piezoelectric strip is in the longitudinal direction at an angle of 90; The intermediate layer is the particle post of piezoceramic material, and particle post cross section is a square, the wide 1.5mm that is all mutually of particle column length, height 3mm.Overall structure is as shown in Figure 2.
Claims (6)
1. multi-layer compound structure piezo component; It is characterized in that: the material of components and parts is the material with piezoelectricity; Profile is planar rondure, plane quadrilateral or plane polygon; Comprise three-decker on the multi-layer compound structure piezo component structure, this three-decker is connected together, and is as a whole; Be that two ends surface layer (1) all is to be the piezoelectric rectangular (11) that strip is arranged in parallel, intermediate layer (2) are the grains of piezoelectric material posts.
2. multi-layer compound structure piezo component according to claim 1; It is characterized in that: the gap between the piezoelectric of described facing layer (1) rectangular (11) and the width of each piezoelectric rectangular (11) are decided as required; The piezoelectric of a facing layer (1) rectangular (11) thickness is identical; Piezoelectric on two facing layer (1) rectangular (11) orientation is angled; Angle is greater than 0 ° and less than 180 °, and electrode layer is left on the piezoelectric on two ends surface layer (1) rectangular (11) surface.
3. multi-layer compound structure piezo component according to claim 1; It is characterized in that: the cross section of the grains of piezoelectric material post of described intermediate layer (2) is a parallelogram; And the angle at two diagonal angles is identical with the piezoelectric of two ends surface layer rectangular (11) stagger angle; The tetragonal size of each grains of piezoelectric material post depends on the width of two ends surface layer (1) piezoelectric rectangular (11); The height of each grains of piezoelectric material post is identical, and the length direction of the piezoelectric rectangular (11) of short transverse and two ends surface layer (1) is perpendicular.
4. method for preparing multi-layer compound structure piezo component as claimed in claim 1 is characterized in that: comprise that step is following:
1), be bonded on the base, adopts the scribing cutting machine, cut into the spaced piezoelectric of bar shaped rectangular (11) the enterprising capable bar shaped cutting of not cutting of not bonding element end face in an end face level of flat element device;
2), after the first step is accomplished, take off the flat element device, the end face of well cutting is bonded on the base, and the base rotation, make cutting blade with cut on the end face that finishes piezoelectric rectangular (11) direction at an angle;
3) take off the flat element device after cutting finishes, for the second time, after cleaning finishes, obtain the multi-layer compound structure piezo component.
5. the preparation method of multi-layer compound structure piezo component according to claim 4; It is characterized in that: cutting mode is the bar shaped cutting; Process is carried out on two end faces of flat element device respectively at twice; The direction of cutting twice has a certain degree, and angle is greater than 0 ° and less than 180 °, and promptly this angle has just determined the angle between the orientation between the piezoelectric rectangular (11) of gained components and parts two ends surface layers (1).
6. the preparation method of multi-layer compound structure piezo component according to claim 4; It is characterized in that: when carrying out end face bar shaped cutting each time; Depth of cut is greater than the half the of primary plane components and parts thickness and less than former first planar device thickness; Depth of cut on same end face is identical, and decide according to required size at the interval of the degree of depth of cutting twice and bar shaped cutting.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103344708A (en) * | 2013-06-13 | 2013-10-09 | 江苏大学 | Ultrasonic phased-array transducer used for detection of concrete material and manufacturing method |
| CN109985796A (en) * | 2019-03-25 | 2019-07-09 | 中国船舶重工集团公司第七一五研究所 | A kind of polygon array element piezo-electricity composite material energy converter preparation method |
| CN114290542A (en) * | 2021-12-17 | 2022-04-08 | 中国船舶重工集团公司第七一五研究所 | 1-3 composite material preparation method based on multi-wire cutting technology |
| CN114311351A (en) * | 2021-12-17 | 2022-04-12 | 中国船舶重工集团公司第七一五研究所 | Preparation method of 1-3 type piezoelectric single crystal composite material |
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| US20040190377A1 (en) * | 2003-03-06 | 2004-09-30 | Lewandowski Robert Stephen | Method and means for isolating elements of a sensor array |
| CN101150301A (en) * | 2006-09-21 | 2008-03-26 | 日本电波工业株式会社 | Method of manufacturing piezoelectric resonator |
| CN102130293A (en) * | 2010-12-06 | 2011-07-20 | 中国船舶重工集团公司第七一五研究所 | Method for preparing high temperature resistant double-layer piezoelectric composite material component |
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- 2011-12-09 CN CN2011104083921A patent/CN102420286A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040190377A1 (en) * | 2003-03-06 | 2004-09-30 | Lewandowski Robert Stephen | Method and means for isolating elements of a sensor array |
| CN101150301A (en) * | 2006-09-21 | 2008-03-26 | 日本电波工业株式会社 | Method of manufacturing piezoelectric resonator |
| CN102130293A (en) * | 2010-12-06 | 2011-07-20 | 中国船舶重工集团公司第七一五研究所 | Method for preparing high temperature resistant double-layer piezoelectric composite material component |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103344708A (en) * | 2013-06-13 | 2013-10-09 | 江苏大学 | Ultrasonic phased-array transducer used for detection of concrete material and manufacturing method |
| CN109985796A (en) * | 2019-03-25 | 2019-07-09 | 中国船舶重工集团公司第七一五研究所 | A kind of polygon array element piezo-electricity composite material energy converter preparation method |
| CN114290542A (en) * | 2021-12-17 | 2022-04-08 | 中国船舶重工集团公司第七一五研究所 | 1-3 composite material preparation method based on multi-wire cutting technology |
| CN114311351A (en) * | 2021-12-17 | 2022-04-12 | 中国船舶重工集团公司第七一五研究所 | Preparation method of 1-3 type piezoelectric single crystal composite material |
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Application publication date: 20120418 |