CN102419518A - Developing machine, developing solution feeding system and method thereof - Google Patents
Developing machine, developing solution feeding system and method thereof Download PDFInfo
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- CN102419518A CN102419518A CN 201010293171 CN201010293171A CN102419518A CN 102419518 A CN102419518 A CN 102419518A CN 201010293171 CN201010293171 CN 201010293171 CN 201010293171 A CN201010293171 A CN 201010293171A CN 102419518 A CN102419518 A CN 102419518A
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Abstract
The invention provides a developing machine, a developing solution feeding system and a developing solution feeding method thereof, belongs to the technical field of developing, and can solve the problem that the existing developing solution feeding process is poor in reliability. The developing solution feeding system of the developing machine disclosed by the invention comprises a solution delivery pipe, a liquid level sensor, a driving mechanism and a controller, wherein the solution delivery pipe is provided with a control valve; the driving mechanism is used for driving the control valve to open and close; and the controller is used for receiving measuring results of the liquid level sensor, and sending control signals to the driving mechanism according to the measuring results so as to control the opening and closing of the control valve. The developing machine disclosed by the invention comprises a developing solution pot and the developing solution feeding system above. The developing solution feeding method of the developing machine disclosed by the invention comprises the following steps: measuring the liquid level of a developing solution in the developing solution pot by using the liquid level sensor, and sending an obtained measuring result to the controller; and when the liquid level is a first liquid level, opening the control valve on the solution delivery pipe by the driving mechanism controlled by the controller, then, delivering the developing solution to the developing solution pot by the solution delivery pipe. The machine, system and method provided by the invention can be applied to semiconductor manufacturing processes.
Description
Technical field
The present invention relates to the developing technique field, relate in particular to developing machine that is used for semiconductor technology and the system and method that adds developer solution thereof.
Background technology
Developing machine is a kind of common equipment in the semiconductor technology, is used for developer solution is sprayed on the substrate that is coated with photoresist, to develop.Obviously, for guaranteeing the continuous production of developing machine, need the developer solution in the development flow container of developing machine is carried out in time replenishing.As shown in Figure 1, in the system that adds developer solution of existing developing machine (for example SVG 90S coating developing machine), have the development flow container 2 that the liquid-transport pipe-line 1 of controlling 11 valves connects developer solution liquid-supplying system 3 (for example floor manager's liquid-supplying systems) and developing machine; Be provided with the liquid level sensor 4 that links to each other with warning device 5 in the development flow container 2, when the liquid level of developer solution in the development flow container 2 dropped to low liquid level 21, liquid level sensor 4 sent signal to warning device 5; Warning device 5 sends buzzing and reports to the police; And show that TANK LOW, operating personnel hear the back manual unlocking operation valve 11 of reporting to the police, and add developer solution through liquid-transport pipe-line 1 to development flow container 2; When the liquid level in the flow container 2 of waiting to develop reaches high liquid level 22; Warning device 5 stops to report to the police, and shows TANK HIGH, and operating personnel are manual-lock operation valve 11 again.
The inventor finds to have following problem in the prior art at least: because adding developer solution operation and will leaning on operating personnel manually to carry out of existing developing machine influenced greatly by human factor, easy maloperation, poor reliability.
Summary of the invention
The system that embodiments of the invention provide a kind of developing machine to add developer solution, its good reliability.
For achieving the above object, embodiments of the invention adopt following technical scheme:
A kind of developing machine adds the system of developer solution, comprising:
The liquid-transport pipe-line that has operation valve is connected between the development flow container of developer solution liquid-supplying system and developing machine, is used for from said developer solution liquid-supplying system to said development flow container supplying developing liquid;
Liquid level sensor is used for measuring the liquid level of said development flow container developer solution;
Driving mechanism is used to drive the switching of said operation valve;
Controller is used to receive the measurement result of said liquid level sensor, thereby and sends the switching that control signal is controlled said operation valve according to said measurement result to said driving mechanism.
Because the developing machine of embodiments of the invention adds in the system of developer solution through controller automatic shutter operation valve, does not receive artificial factor, so good reliability.
Embodiments of the invention also provide a kind of developing machine, its good reliability.
For achieving the above object, embodiments of the invention adopt following technical scheme:
A kind of developing machine comprises being used to store the development flow container of developer solution and the system that above-mentioned developing machine adds developer solution.
Because the developing machine of embodiments of the invention has the system that above-mentioned developing machine adds developer solution, so but its automatic shutter operation valve does not receive artificial factor, good reliability.
The method that embodiments of the invention also provide a kind of developing machine to add developer solution, its good reliability.
For achieving the above object, embodiments of the invention adopt following technical scheme:
A kind of developing machine adds the method for developer solution, comprising:
Measure the liquid level of developer solution in the development flow container of developing machine with liquid level sensor, and measurement result is sent to controller;
When the liquid level of said developer solution is first liquid level, the operation valve on the said controller controlling and driving mechanism opening liquid-transport pipe-line, through said liquid-transport pipe-line to said development flow container supplying developing liquid.
Because the developing machine of embodiments of the invention adds in the method for developer solution, operation valve is automatic shutter under the control of controller, does not receive artificial factor, so good reliability.
Description of drawings
In order to be illustrated more clearly in the embodiment of the invention or technical scheme of the prior art; To do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art below; Obviously, the accompanying drawing in describing below only is some embodiments of the present invention, for those of ordinary skills; Under the prerequisite of not paying creative work, can also obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 adds the structural representation of the system of developer solution for existing developing machine;
Fig. 2 adds the structural representation of the system of developer solution for the developing machine of the embodiment of the invention one;
Fig. 3 adds the structural representation of the system of developer solution for the developing machine of the embodiment of the invention two;
Fig. 4 adds the process flow diagram of the method for developer solution for the developing machine of the embodiment of the invention four.
Embodiment
To combine the accompanying drawing in the embodiment of the invention below, the technical scheme of the embodiment of the invention is carried out clear, intactly description, obviously, described embodiment only is a part of embodiment of the present invention, rather than whole embodiment.Based on the embodiment among the present invention, all other embodiment that those of ordinary skills are obtained under the prerequisite of not making creative work belong to the scope that the present invention protects.
Embodiment one
The system that the embodiment of the invention provides a kind of developing machine to add developer solution, as shown in Figure 2, it comprises:
The liquid-transport pipe-line 1 that has operation valve 11 is connected 2 of the development flow containers of developer solution liquid-supplying system 3 and developing machine, is used for from said developer solution liquid-supplying system 3 to said development flow container 2 supplying developing liquid;
Liquid level sensor 4 is used for measuring the liquid level of said development flow container 2 developer solutions;
Because the developing machine of embodiments of the invention adds in the system of developer solution through controller automatic shutter operation valve, does not receive artificial factor, so good reliability; It can not forget that opening operation valve causes the developer solution consumption to do because of operating personnel; Thereby avoided the phenomenon of under the situation of Nonvisualization liquid, working and causing product to do over again or scrap, also can not cause developer solution to overflow the development flow container because of operating personnel forget closed control valve because of developing machine.
Embodiment two
The system that the embodiment of the invention provides a kind of coating developing machine to add developer solution, as shown in Figure 3, it comprises:
The liquid-transport pipe-line 1 that has solenoid valve 11 (operation valve), it is connected 2 of developer solution liquid-supplying system 3 and developing machine development flow containers, is used for from developer solution liquid-supplying system 3 to development flow container 2 supplying developing liquid;
Liquid level sensor 4 is used for measuring the liquid level of development flow container 2 developer solutions, and measurement result is sent to programmable controller 6 and warning device 5;
Programmable controller (controller) 6 is used for sending control signal according to the measurement result of liquid level sensor 4 to driving mechanism 111, thus the switching of control electromagnetic valve 11 (reality is the break-make of control electromagnetic valve 11).Wherein, when the liquid level of developer solution in the development flow container 2 drops to low liquid level 21 (first liquid level), programmable controller 6 control electromagnetic valve 11 open with through liquid-transport pipe-line 1 from developer solution liquid-supplying system 3 to development flow container 2 supplying developing liquid; And when the liquid level of developer solution rose to high liquid level 22 (second liquid level), programmable controller 6 control electromagnetic valve 11 were closed, and stopped the developer solution supply; And if because of developer solution liquid-supplying system 3 failure and other reasons; The liquid level of developer solution is being reduced to minimum liquid level 23 (the 3rd liquid level) through low liquid level 21 continued; 6 of programmable controllers send the order of termination work to coating developing machine, do not cause product rejection having to work under the situation of developer solution or do over again to prevent coating developing machine.
Warning device 5 is used for sending alerting signal according to the measurement result of liquid level sensor 4, notes to remind operating personnel.For example, when the liquid level of developer solution dropped to low liquid level 21, warning device 5 can send buzzing and report to the police; When rising to high liquid level 22, the liquid level of developer solution can stop to report to the police; And if the liquid level of developer solution is reduced to minimum liquid level 23, warning device 5 can send the warning of another kind of alternative sounds.
Obviously; The system that the coating developing machine of the foregoing description adds developer solution can carry out many variations; For example: can be as shown in Figure 3 between liquid level sensor, warning device, driving mechanism, the programmable controller connect, also can not connect and transmit signal through wireless mode through electric wire; Liquid level sensor can be polytypes such as ultrasonic liquid level sensor, magnetic turnover panel liquid level sensor, static pressure type liquid level sensor, Floating Ball Liquid Level sensor, can be one also to can be a plurality of; Solenoid valve can be the valve (like mechanical valve, air valve etc.) of other form, and its pairing driving mechanism also can be other type (like pneumatic drive mechanism); Programmable controller also can be computer, electrical control cubicles etc.; Programmable controller can not cut out solenoid valve according to high liquid level signal, but after opening solenoid valve, promptly closes solenoid valve through specific time or specific developer solution flow (need set up flow-monitoring device); Also second control device can be set, personnel directly operate system with handled easily.
Embodiment three
The embodiment of the invention provides a kind of developing machine, and it comprises and is used to store the development flow container of developer solution and the system that above-mentioned developing machine adds developer solution.
Alternatively, this developing machine is a coating developing machine.
Because the developing machine of embodiments of the invention has the system that above-mentioned developing machine adds developer solution, so but its automatic shutter operation valve does not receive artificial factor, good reliability.
Embodiment four
The embodiment of the invention provides a kind of developing machine to add the method for developer solution, and it comprises:
S01, measure the liquid level of developer solution in the development flow container of developing machine with liquid level sensor, and measurement result is sent to controller.
S02, when the liquid level of said developer solution is first liquid level, the operation valve on the said controller controlling and driving mechanism opening liquid-transport pipe-line, through said liquid-transport pipe-line to said development flow container supplying developing liquid.
Alternatively, said method also comprises:
S03, when the liquid level of said developer solution is second liquid level, said controller controls said driving mechanism and cuts out the operation valve on the liquid-transport pipe-line, stops supplying developing liquid, wherein said first liquid level is lower than said second liquid level.
Because the developing machine of embodiments of the invention adds in the method for developer solution, operation valve is automatic shutter under the control of controller, does not receive artificial factor, so good reliability.
The above; Be merely embodiment of the present invention, but protection scope of the present invention is not limited thereto, any technician who is familiar with the present technique field is in the technical scope that the present invention discloses; The variation that can expect easily or replacement all should be encompassed within protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain of said claim.
Claims (10)
1. a developing machine adds the system of developer solution, comprising:
The liquid-transport pipe-line that has operation valve is connected between the development flow container of developer solution liquid-supplying system and developing machine, is used for from said developer solution liquid-supplying system to said development flow container supplying developing liquid;
Liquid level sensor is used for measuring the liquid level of said development flow container developer solution;
It is characterized in that the system that said developing machine adds developer solution also comprises:
Driving mechanism is used to drive the switching of said operation valve;
Controller is used to receive the measurement result of said liquid level sensor, thereby and sends the switching that control signal is controlled said operation valve according to said measurement result to said driving mechanism.
2. developing machine according to claim 1 adds the system of developer solution, it is characterized in that, said controller is a programmable controller.
3. developing machine according to claim 1 and 2 adds the system of developer solution, it is characterized in that, said controller is used for when the liquid level of said developer solution is first liquid level, opening said operation valve.
4. developing machine according to claim 3 adds the system of developer solution, it is characterized in that, said controller also is used for when the liquid level of said developer solution is second liquid level, cutting out said operation valve, and wherein said first liquid level is lower than said second liquid level.
5. developing machine according to claim 4 adds the system of developer solution, it is characterized in that, said controller also is used for when the liquid level of said developer solution is the 3rd liquid level, stopping the work of developing machine, and wherein said the 3rd liquid level is lower than said second liquid level.
6. developing machine according to claim 1 and 2 adds the system of developer solution, it is characterized in that, also comprises warning device, and said warning device is used to receive the measurement result of said liquid level sensor, and sends warning according to said measurement result.
7. a developing machine comprises the development flow container that is used to store developer solution, it is characterized in that, said developing machine comprises that also above-mentioned any described developing machine of claim adds the system of developer solution.
8. developing machine according to claim 7 is characterized in that, said developing machine is a coating developing machine.
9. a developing machine adds the method for developer solution, it is characterized in that, comprising:
Measure the liquid level of developer solution in the development flow container of developing machine with liquid level sensor, and measurement result is sent to controller;
When the liquid level of said developer solution is first liquid level, the operation valve on the said controller controlling and driving mechanism opening liquid-transport pipe-line, through said liquid-transport pipe-line to said development flow container supplying developing liquid.
10. developing machine according to claim 9 adds the method for developer solution, it is characterized in that the operation valve on said controller opens liquid-transport pipe-line, also comprises behind said development flow container supplying developing liquid through liquid-transport pipe-line:
When the liquid level of said developer solution was second liquid level, said controller controlled said driving mechanism and cuts out the operation valve on the liquid-transport pipe-line, stopped supplying developing liquid, and wherein said first liquid level is lower than said second liquid level.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010293171 CN102419518B (en) | 2010-09-27 | 2010-09-27 | Developing machine, developing solution feeding system and method thereof |
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| CN 201010293171 CN102419518B (en) | 2010-09-27 | 2010-09-27 | Developing machine, developing solution feeding system and method thereof |
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| CN102419518A true CN102419518A (en) | 2012-04-18 |
| CN102419518B CN102419518B (en) | 2013-03-27 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103970158A (en) * | 2014-05-17 | 2014-08-06 | 浙江工贸职业技术学院 | Automatic liquid level control device |
| CN106802501A (en) * | 2017-03-20 | 2017-06-06 | 信利（惠州）智能显示有限公司 | Developer solution circulation management method |
| CN115729058A (en) * | 2022-11-14 | 2023-03-03 | 上海图双精密装备有限公司 | Full-automatic liquid supply system for gluing developing equipment |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0923005A2 (en) * | 1997-12-12 | 1999-06-16 | Samsung Electronics Co., Ltd. | Developer liquid supply device of wet type electrographic printer |
| CN101634816A (en) * | 2008-07-24 | 2010-01-27 | 北京京东方光电科技有限公司 | Developer control system |
| CN101655672A (en) * | 2009-09-11 | 2010-02-24 | 虎丘影像科技（苏州）有限公司 | Liquor circulation pipeline |
-
2010
- 2010-09-27 CN CN 201010293171 patent/CN102419518B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0923005A2 (en) * | 1997-12-12 | 1999-06-16 | Samsung Electronics Co., Ltd. | Developer liquid supply device of wet type electrographic printer |
| CN101634816A (en) * | 2008-07-24 | 2010-01-27 | 北京京东方光电科技有限公司 | Developer control system |
| CN101655672A (en) * | 2009-09-11 | 2010-02-24 | 虎丘影像科技（苏州）有限公司 | Liquor circulation pipeline |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103970158A (en) * | 2014-05-17 | 2014-08-06 | 浙江工贸职业技术学院 | Automatic liquid level control device |
| CN106802501A (en) * | 2017-03-20 | 2017-06-06 | 信利（惠州）智能显示有限公司 | Developer solution circulation management method |
| CN106802501B (en) * | 2017-03-20 | 2020-07-21 | 信利（惠州）智能显示有限公司 | Developing solution circulation management method |
| CN115729058A (en) * | 2022-11-14 | 2023-03-03 | 上海图双精密装备有限公司 | Full-automatic liquid supply system for gluing developing equipment |
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| Publication number | Publication date |
|---|---|
| CN102419518B (en) | 2013-03-27 |
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Effective date of registration: 20220721 Address after: 518116 founder Microelectronics Industrial Park, No. 5, Baolong seventh Road, Baolong Industrial City, Longgang District, Shenzhen, Guangdong Province Patentee after: SHENZHEN FOUNDER MICROELECTRONICS Co.,Ltd. Address before: 100871, Beijing, Haidian District Cheng Fu Road 298, founder building, 5 floor Patentee before: PEKING UNIVERSITY FOUNDER GROUP Co.,Ltd. Patentee before: SHENZHEN FOUNDER MICROELECTRONICS Co.,Ltd. |