CN102418067A - Multiple-strip type comparison strip device for vacuum coating machine - Google Patents
Multiple-strip type comparison strip device for vacuum coating machine Download PDFInfo
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- CN102418067A CN102418067A CN2011103703359A CN201110370335A CN102418067A CN 102418067 A CN102418067 A CN 102418067A CN 2011103703359 A CN2011103703359 A CN 2011103703359A CN 201110370335 A CN201110370335 A CN 201110370335A CN 102418067 A CN102418067 A CN 102418067A
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Abstract
The invention discloses a multiple-strip type comparison strip device for a vacuum coating machine. The multiple-strip type comparison strip device is provided with a loading and shifting mechanism, a rotary sealing and feeding mechanism and a shifting and driving mechanism of a comparison strip, wherein the loading and shifting mechanism consists of a toggle disk, a supporting disk, an upper disk and a comparison strip storage cylinder; single glass is used as a comparison strip unit; a plurality of pieces of glass is overlapped and arranged in the storage cylinder; a shaft of the toggle disk is connected with a shaft of the rotary sealing and feeding mechanism through a coupling; the rotary sealing and feeding mechanism consists of a Wilson sealing mechanism and a bearing block; the shifting and driving mechanism consists of a motor, a driving gear, a driven gear and a positioning disk; the driven gear and the positioning disk are fixedly arranged on the shaft of the rotary sealing and feeding mechanism; three equipartition 120-degree slits are arranged on the positioning disk; grooved optical couplers receive optical signals at slit positions for controlling the motor to rotate and stop. The multiple-strip type comparison strip device has the advantages of simple structure, convenience in mounting and dismounting of the comparison strip, favorable positioning repeatability, high reliability and low manufacturing cost.
Description
Technical field
The invention belongs to the vacuum plating unit technical field, be specifically related to relatively sheet device of a kind of vacuum plating unit multiple-piece.
Background technology
Vacuum plating unit comparison sheet is being undertaken in the optical precision coating equipment and is being loaded the relatively function of sheet of glass.The comparison sheet mechanism of existing homemade vacuum plating unit is divided into 6 districts on a flat glass, each district is as a comparison sheet, because relatively sheet only has 6, so limited the number of plies that is coated with of optical thin film.In addition, receive the little restriction in in-plane position, sheet useful area little (relatively the sheet diameter is φ 8mm) relatively, light path adjustment inconvenience, the poor signal to noise of optical signal has had a strong impact on the quality of optical thin film.Therefore, the comparison sheet mechanism of existing homemade vacuum plating unit can not satisfy the plated film requirement of the ultra multilayer of contemporary optics (more than 30 layers) precision optics film.
Summary of the invention
Be to solve the above-mentioned defective that prior art exists, the object of the present invention is to provide a kind of simple in structurely, relatively the sheet loading and unloading are convenient, the location principal characteristic again well, safety is high, the vacuum plating unit multiple-piece of low cost of manufacture sheet device relatively.
For realizing above-mentioned purpose; The technical scheme that the present invention adopts is: this vacuum plating unit multiple-piece is the sheet device relatively; Loading and inversion mechanism, rotary seal feed-in mechanism and transposition driving mechanism with comparison sheet; It is characterized in that: said loading and inversion mechanism are by stirring dish, step disk, last dish and comparing the sheet storage barrel and form; As a comparison blade unit, the stack of multi-disc glass is installed in the storage barrel by monolithic glass, and a said axle by shaft coupling and sealing feed-in mechanism of stirring dish is connected; Said rotary seal feed-in mechanism is made up of Wilson seal mechanism and chock; Said transposition driving mechanism is made up of motor, driving toothed gear, passive gear and dowel disc; Said passive gear and dowel disc are fixed on the axle of sealing feed-in mechanism; On the said dowel disc by 3 divide equally 120 the degree slits; Grooved light lotus root receives optical signal in slit location, control motor rotation and stop.
Adopt the beneficial effect of technique scheme: the comparison sheet loading in this vacuum plating unit multiple-piece comparison sheet device and the design of inversion mechanism; The design philosophy of comparison sheet loader mechanism breaks traditions; One sheet glass is divided into several unit, and adopting monolithic glass is a relatively blade unit, and the stack of multi-disc glass is installed in the storage barrel; Utilize solid space to increase the relatively load quantity of sheet; According to user's needs 100 relatively sheets can be installed at most, relatively the sheet diameter is φ 26.5mm, and useful area is 490mm
2The design of said rotary seal feed-in mechanism; Adopt the Wilson seal rotating mechanism of typical known; This mechanism mainly is made up of Wilson seal mechanism and chock, has realized the sealing to Vakuumkammer, passes to comparison sheet inversion mechanism to the outer powered rotation of Vakuumkammer simultaneously.The said relatively function of the transposition driving mechanism of sheet is to realize comparing changing sheet and guaranteeing that newly relatively sheet accurately arrives specified location of sheet.This mechanism is made up of motor, driving toothed gear, passive gear, dowel disc.Whether said passive gear and dowel disc are fixed on through round pin and jackscrew on the axle of sealing feed-in mechanism, put in place by dowel disc judgement and definite relatively sheet.The positioning principle of dowel disc (referring to Fig. 1 and Fig. 3), by 3 slits of dividing equally 120 degree, grooved light lotus root receives optical signal in current slit location on the dowel disc;, motor begins rotation after accepting cue mark; When the displacement of slit when dowel disc is driven in rotation, grooved light lotus root can't accept optical signal, when next slit rotates to light lotus root position; The light lotus root receives optical signal once more through slit; Optical signal is made motor stop the rotation rapidly immediately after the processing of circuit, therefore, every rotation 120 degree of dowel disc just can locate and count once.
The working cycle of this structure is that when needs more renewed the comparison sheet, the driven by motor driving toothed gear rotated; Driving toothed gear drives passive gear and rotates; Just rotate like this and pass to dowel disc through the axle that seals feed-in mechanism, pass to shifting shaft and stir dish through shaft joint simultaneously, moving 120 degree of dowel disc revolution are stirred dish along with rotation 120 degree; Stir moving 120 degree of dish revolution; Relatively the comparison sheet of sheet working position is pushed the outlet of comparison sheet and is fallen in the Vakuumkammer, in the storage barrel new one relatively sheet pushed the working position, like this with regard to more change a new comparison sheet.Therefore, moving 120 degree of dowel disc revolution are just changed a new comparison sheet.
The present invention is simple in structure, and dependable performance is stable, and each item technical indicator all can satisfy the requirement that the optical precision coating equipment is coated with the precision optics film.
Description of drawings
Below in conjunction with accompanying drawing specific embodiment of the present invention is done further detailed explanation.
Fig. 1 compares sheet apparatus structure synoptic diagram for the vacuum plating unit multiple-piece.
Fig. 2 is the A-A sectional view of Fig. 1.
Fig. 3 is the dowel disc structural representation.
Fig. 4 is the vertical view of Fig. 3.
Fig. 5 is the structural representation of shifting shaft.
Fig. 6 is the right view of Fig. 5.
Embodiment
Compare the sheet device like Fig. 1, the vacuum plating unit multiple-piece shown in 2, have loading and inversion mechanism, rotary seal feed-in mechanism and the transposition driving mechanism of comparison sheet.Said transposition driving mechanism is fixed on the coating equipment roof box 3; Be made up of motor 9, driving toothed gear 8, passive gear 7 and dowel disc 6, the output shaft of said motor 9 is provided with driving toothed gear 8, driving toothed gear 8 and passive gear 7 engagements; Passive gear 7 is fixed on the axle 1 of sealing feed-in mechanism with dowel disc; Said rotary seal feed-in mechanism is made up of with chock 2 Wilson seal mechanism 5, and chock 2 outsides are set with stationary magazine creel 4, and stationary magazine creel 4 is fixedly installed on the coating equipment roof box 3.Like Fig. 3, shown in 4, by 3 slits of dividing equally 120 degree, grooved light lotus root 17 receives optical signal in slit location on the said dowel disc, the rotation of control motor and stopping.Said loading and inversion mechanism by stir dish 15, step disk 16, on coil 14 and relatively sheet storage barrel 13 form; Through enlarging the diameter of step disk, make this mechanism big at the useful area of in-plane, it is φ 26.5mm that comparison sheet diameter can be installed; Relatively sheet 12 by monolithic glass as a blade unit relatively; Relatively sheet adopts space multistory stack mounting structure, and the stack of multi-disc glass is installed in the comparison sheet storage barrel 13, realizes once can installing 50 to 100 relatively sheets; When having solved coating equipment and being coated with multilayer precision optics film, relatively sheet quantity influences the number of plies of plated film and the problem of precision less.Like Fig. 4, shown in 5, saidly stir shifting shaft 11 that dish 15 connects and be connected by spool 1 of shaft coupling 10 and sealing feed-in mechanism.
Claims (1)
1. a vacuum plating unit multiple-piece compares the sheet device; Loading and inversion mechanism, rotary seal feed-in mechanism and transposition driving mechanism with comparison sheet; It is characterized in that: said loading and inversion mechanism are by stirring dish, step disk, last dish and comparing the sheet storage barrel and form; As a comparison blade unit, the stack of multi-disc glass is installed in the storage barrel by monolithic glass, and a said axle by shaft coupling and sealing feed-in mechanism of stirring dish is connected; Said rotary seal feed-in mechanism is made up of Wilson seal mechanism and chock; Said transposition driving mechanism is made up of motor, driving toothed gear, passive gear and dowel disc; Said passive gear and dowel disc are fixed on the axle of sealing feed-in mechanism; On the said dowel disc by 3 divide equally 120 the degree slits; Grooved light lotus root receives optical signal in slit location, control motor rotation and stop.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110370335.9A CN102418067B (en) | 2011-11-03 | 2011-11-03 | Multiple-strip type comparison strip device for vacuum coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110370335.9A CN102418067B (en) | 2011-11-03 | 2011-11-03 | Multiple-strip type comparison strip device for vacuum coating machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102418067A true CN102418067A (en) | 2012-04-18 |
| CN102418067B CN102418067B (en) | 2014-05-07 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110370335.9A Expired - Fee Related CN102418067B (en) | 2011-11-03 | 2011-11-03 | Multiple-strip type comparison strip device for vacuum coating machine |
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| CN (1) | CN102418067B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103602956A (en) * | 2013-11-08 | 2014-02-26 | 南方科技大学 | Vacuum depositing system and rotary feed-in device thereof |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2531213Y (en) * | 2002-03-28 | 2003-01-15 | 王志宾 | Electronic locating device for electrically operated valve |
| CN201069472Y (en) * | 2007-02-27 | 2008-06-04 | 河南中光学集团有限公司 | Position switch control device of multi-bit comparison sheet of optical plating film |
| CN201459236U (en) * | 2009-07-24 | 2010-05-12 | 北京北仪创新真空技术有限责任公司 | Transposition mechanism for multiple comparison strips |
-
2011
- 2011-11-03 CN CN201110370335.9A patent/CN102418067B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2531213Y (en) * | 2002-03-28 | 2003-01-15 | 王志宾 | Electronic locating device for electrically operated valve |
| CN201069472Y (en) * | 2007-02-27 | 2008-06-04 | 河南中光学集团有限公司 | Position switch control device of multi-bit comparison sheet of optical plating film |
| CN201459236U (en) * | 2009-07-24 | 2010-05-12 | 北京北仪创新真空技术有限责任公司 | Transposition mechanism for multiple comparison strips |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103602956A (en) * | 2013-11-08 | 2014-02-26 | 南方科技大学 | Vacuum depositing system and rotary feed-in device thereof |
| CN103602956B (en) * | 2013-11-08 | 2016-02-17 | 南方科技大学 | A kind of vacuum deposition system and rotatory feedthru thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102418067B (en) | 2014-05-07 |
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| C53 | Correction of patent of invention or patent application | ||
| CB03 | Change of inventor or designer information |
Inventor after: Liu Yang Inventor after: Zhang Yuhua Inventor after: Liu Jibiao Inventor after: Huang Jianna Inventor after: He Junfeng Inventor after: Wang Yi Inventor after: Peng Erbao Inventor after: Hua Xianli Inventor after: Gao Zhihua Inventor after: Xu Guiyang Inventor before: Liu Yang Inventor before: Hu Xuemei Inventor before: Zhang Yongmei Inventor before: Lian Han Inventor before: Zhou Wei Inventor before: Zhang Li Inventor before: Ran Wendong Inventor before: Wang Yi Inventor before: Hua Xianli |
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Free format text: CORRECT: INVENTOR; FROM: LIU YANG HU XUEMEI ZHANG YONGMEI LIAN HAN ZHOU WEI ZHANG LI RAN WENDONG WANG YI HUA XIANLI TO: LIU YANG LIU JIBIAO HUANG JIANNA HE JUNFENG WANG YI PENG ERBAO HUA XIANLI GAO ZHIHUA XU GUIYANG ZHANG YUHUA |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140507 Termination date: 20141103 |
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