CN102390935A - Method for preparing strontium titanate film having spherical grain accumulated porous structure - Google Patents

Method for preparing strontium titanate film having spherical grain accumulated porous structure Download PDF

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CN102390935A
CN102390935A CN2011102411283A CN201110241128A CN102390935A CN 102390935 A CN102390935 A CN 102390935A CN 2011102411283 A CN2011102411283 A CN 2011102411283A CN 201110241128 A CN201110241128 A CN 201110241128A CN 102390935 A CN102390935 A CN 102390935A
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strontium titanate
film
strontium
piled
spheroidal particle
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CN102390935B (en
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李明春
吴玉胜
韩亚苓
邵义
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Shenyang University of Technology
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Abstract

The invention belongs to the technical field of a functional material and particularly relates to a method for preparing a strontium titanate film having a spherical grain accumulated porous structure. A sol gel template process is adopted in the method. The method comprises the following steps: dropwise adding a strontium acetate solution having a certain concentration in a tetrabutyl titanate alcohol solution at a speed of (0.25-2) milliliters per minute; continuously stirring at a speed of (500-1000) revolutions per minute; after finishing titration for 0.5-1.5 hours, adding a non-ionic surface active agent; stirring again till obtaining a uniform, stable, layering-free and 0.1-0.5mol/L strontium titanate sol; after ageing, utilizing a spinning method or dipping drawing method to coat a film on a substrate; and drying and calcinating, thereby obtaining the strontium titanate film having the spherical grain accumulated porous structure. The method provided by the invention has the characteristics of simple production process, less equipment investment, low cost, easiness for operation and excellent repeatability. According to the method, a spherical grain accumulated three-dimensional porous film, which has the characteristics of big specific surface area, uniform pore distribution and excellent interpenetration, can be obtained.

Description

A kind of spheroidal particle is piled up the preparation method of vesicular structure strontium titanate film
Technical field
The invention belongs to technical field of function materials, be specifically related to the preparation method that a kind of spheroidal particle is piled up the vesicular structure strontium titanate film.
Background technology
SrTiO 3It is the characteristic that the calcium titanium ore structure complex metal oxides has metalloid conductive mechanism and variable valence oxide compound; And has a good oxidation catalysis characteristic; Also have the good characteristics of high-temperature stability as gas sensitive especially oxygen-sensitive material; Be applied to obtain information rapidly, exactly in the gas sensor and it is transported out with electrical signal form, harmful gases is detected and monitoring in real time.Its gas sensing mechanism be when seized gas molecule after material surface or inner absorption, can cause that many-sides such as surface charge, surface energy band, surface adsorbed oxygen and crystal boundary potential barrier change, and transport out with electrical signal form then.The air-sensitive performance of visible material is the comprehensive embodiment of material catalytic performance and chemical property, and the sensing capabilities of gas sensor is not only relevant with the composition of sensitive material, and is also relevant with the pore structure of sensitive material.If process the porous structure to the sensitive material of gas sensor; The then particle size of material, porosity, pore size and distribution; Factors such as specific surface area all can directly influence adsorption potential and the active sites quantity that it provided, thereby can improve the sensitivity characteristic of gas sensor significantly.Research to the metal oxide semiconductor air-sensitive performance at present mainly concentrates on ion doping, precious metal surface modification and novel material exploitation aspect; For preparation with to construct selectivity good; Respond, recover fast, the corresponding research of the porous road structure air-sensitive dielectric material that sensitivity is higher is less.And to fundamentally solve the existing selectivity of present metal oxide semiconductor gas sensor, less stable, response recovers fast inadequately and is difficult to realize 10 -9Problems such as level detection; Not only to strengthen development research to novel gas sensitive; More should strengthen simultaneously the preparation and the structure optimization design research thereof of high-efficiency multiple road structure gas sensitive; Thereby promote gas sensor to efficient mini, integrated, multi-functional, intelligent development, and promote the industrialization process of porous road structure gas sensor.
Prepare SrTiO at present 3The method of thin-film material mainly contains pulsed laser deposition, molecular beam epitaxy, chemical Vapor deposition process, sol-gel method and magnetron sputtering method etc.; Compare with other method; Sol-gel method have processing unit simple (needing no vacuum condition and equipment) but, synthesis temperature is low, purity is high, chemical ingredients is accurate, film forming is even, be easy to advantages such as doping and large-area coating film, thereby utilizes this legal system to be equipped with the common concern that the metal oxide film material has received domestic and international researchist.The technology of preparing that combines with the Subjective and Objective template of sol-gel method becomes the main means that realize molecule assembling and synthetic mesopore material gradually in recent years, and does not at home and abroad see as yet and utilize this legal system to be equipped with perovskite series complex metal oxides SrTiO 3The research report of porous membrane.When existing hard template/sol-gel method prepares ordered porous thin-film; There is the synthetic difficulty of template; Remove complex process, cost is too high and the duct between shortcomings such as mutual connectivity difference; And conventional softer template/sol-gel method exists when preparing porous membrane thermostability, pore distribution homogeneity relatively poor, and pore structure is prone to cave in and influences shortcomings such as the degree of order and the effective usable floor area of film.Therefore the effective usable floor area that how to improve its structural stability, thermostability, three-dimensional pore space connectivity and increase film is the key technical problem that this field faces.
Summary of the invention
To the blank of prior art for preparing vesicular structure strontium titanate film, the preparation method that the present invention provides that a kind of three-dimensional pore space connectivity is good, even pore distribution and the high spheroidal particle of effective usable floor area are piled up the vesicular structure strontium titanate film.
A kind of spheroidal particle of the present invention is piled up the preparation of vesicular structure strontium titanate film, adopts the collosol and gel template agent method,, carries out according to following steps as the agent of pore-creating guiding die plate with nonionogenic tenside:
(1) with absolute ethyl alcohol, tetrabutyl titanate and complexing agent, the mixing that under 30-40 ℃ of water bath condition, constantly stirs, static 30min forms the tetrabutyl titanate ethanolic soln;
Described complexing agent is diethylolamine or methyl ethyl diketone, and the mol ratio of tetrabutyl titanate and complexing agent is 1: (1 ~ 5);
(2) be 1 in molar ratio with strontium acetate and aqueous solvent: the ratio preparation strontium acetate solution of (30 ~ 55) and strontium acetate and tetrabutyl titanate mol ratio 1:1; Then with strontium acetate solution with the speed of (0.25-2) mL/min with (500-1000) splash in the tetrabutyl titanate ethanolic soln under the rpm agitation condition; Titration finishes to add nonionogenic tenside behind the 0.5-1.5h; The nonionogenic tenside that adds and the mol ratio of tetrabutyl titanate are (0.005 ~ 0.045): 1; Continue to stir to obtain strontium titanate colloidal sol, hierarchy of control temperature is 25 ~ 40 ℃ in the whole process again;
Described nonionogenic tenside is polyoxyethylene glycol or non-ionic polyacrylamide;
The concentration of described strontium titanate colloidal sol is 0.1 ~ 0.5molL -1
(3) with carrying out plated film behind the at room temperature static ageing 2-12h of above-mentioned strontium titanate colloidal sol, adopt spin-coating method or dip-coating method plated film on substrate, the substrate that is coated with strontium titanate colloidal sol is dried down at 80-120 ℃;
Described substrate is a glass, metal, pottery or silicon chip;
Described coating layers is at least one deck;
(4) substrate that is coated with strontium titanate colloidal sol after will drying finally makes the strontium titanate porous membrane that spheroidal particle is piled up pore structure in 550-750 ℃ of following roasting 1 ~ 4h.
The invention has the beneficial effects as follows:
The synthetic difficulty of template when (1) the present invention has overcome existing hard template/sol-gel method and prepares ordered porous thin-film, remove complex process, cost is too high and the duct between shortcomings such as mutual connectivity difference; Pore distribution homogeneity when having overcome soft template/sol-gel method simultaneously and preparing porous membrane, thermostability are relatively poor, and pore structure is prone to cave in and influences shortcomings such as the degree of order and the effective usable floor area of film;
(2) the perovskite series complex metal oxides strontium titanate porous membrane of the inventive method preparation has the three-D pore structure that spheroidal particle is piled up; Specific surface area is big; Even pore distribution; Connectivity is good each other, and gaseous diffusion transports easily carries out, thereby has improved the effective rate of utilization of porous membrane specific surface area;
(3) to have the technological process of production simple for the inventive method, and facility investment is few, cost is low, synthesis temperature is low, easy to operate and good reproducibility, but the characteristics of big area plated film in the substrate of various different shapeies, differing materials.
Description of drawings
Fig. 1 is the ESEM picture that the spheroidal particle that makes of embodiment 1 is piled up the strontium titanate porous membrane;
Fig. 2 is the ESEM picture that the spheroidal particle that makes of embodiment 2 is piled up the strontium titanate porous membrane;
Fig. 3 is the N that the spheroidal particle that makes of embodiment 2 is piled up the strontium titanate porous membrane 2Absorption/desorption isotherm;
Fig. 4 is the BJH desorption pore size distribution curve that the spheroidal particle that makes of embodiment 2 is piled up the strontium titanate porous membrane.
Embodiment
Embodiment 1
In the 250ml beaker, add the 62ml absolute ethyl alcohol, the 17.02g tetrabutyl titanate, the 7.905g diethylolamine, after constantly stirring under 30 ℃ of bath temperatures, static 30min is with abundant complexing; Under with the continuous stirring condition of the speed of 500rpm, with the 27ml strontium acetate aqueous solution (Sr (CH 3COO) 2.0.5H 2O, 397.6g/L) speed of dripping with 0.25ml/min is added drop-wise in the tetrabutyl titanate ethanolic soln, after titration finishes 30min, adds 1.0g polyoxyethylene glycol PEG2000, and continuing to stir until obtaining concentration is the uniform and stable transparent strontium titanate colloidal sol of 0.4mol/L; With adopting dip-coating method to carry out plated film behind the at room temperature static ageing 4h of strontium titanate colloidal sol, the ceramic substrate of cleaning surfaces is vertical, at the uniform velocity be immersed in the strontium titanate colloidal sol with 6cm/min; Static 20s; With the speed of 4cm/min, vertically and at the uniform velocity upwards lift substrate then, dry 2h to the ceramic substrate that is coated with strontium titanate colloidal sol down at 80 ℃; Put into retort furnace subsequently in 650 ℃ of following roasting 3h, finally obtain the strontium titanate film that spheroidal particle is piled up vesicular structure.
Fig. 1 is the ESEM picture that the spheroidal particle that makes of embodiment 1 is piled up the strontium titanate porous membrane; As can be seen from Figure 1; The strontium titanate film of the present invention preparation is made up of spherical strontium titanate particle and hole, and even pore distribution has formed the pore structure of three-dimensional perforation.
Embodiment 2
In the 250ml beaker, add the 94ml absolute ethyl alcohol, the 17.02g tetrabutyl titanate, the 10.54g diethylolamine, after constantly stirring under 35 ℃ of bath temperatures, static 30min is with abundant complexing; Under with the continuous stirring condition of the speed of 600rpm, with the 36.4ml strontium acetate aqueous solution (Sr (CH 3COO) 2.0.5H 2O, 294.9g/L) speed of dripping with 0.5ml/min is added drop-wise in the tetrabutyl titanate ethanolic soln, after titration finishes 50min, adds 2.0g polyoxyethylene glycol PEG2000, and continuing to stir until obtaining concentration is the uniform and stable transparent strontium titanate colloidal sol of 0.3mol/L; With adopting dip-coating method to carry out plated film behind the at room temperature static ageing 8h of strontium titanate colloidal sol, the glass substrate of cleaning surfaces is vertical, at the uniform velocity be immersed in the strontium titanate colloidal sol with 6cm/min; Static 20s with the speed of 4cm/min, vertically and at the uniform velocity upwards lifts substrate then; Dry 1h to the glass substrate that is coated with strontium titanate colloidal sol down at 105 ℃; Repeat above-mentioned plated film and drying step, plate second tunic, with the glass substrate that plated two membranes dry 4h under 120 ℃; Put into retort furnace subsequently in 600 ℃ of following roasting 2.5h, finally obtain the strontium titanate film that spheroidal particle is piled up vesicular structure.
Fig. 2 is the ESEM picture that the spheroidal particle that makes of embodiment 2 is piled up the strontium titanate porous membrane; As can be seen from Figure 2; The strontium titanate film of the present invention preparation is made up of spherical strontium titanate particle and hole, and even pore distribution has formed the pore structure of three-dimensional perforation; Fig. 3 is the N that embodiment 2 prepared spheroidal particle are piled up the strontium titanate porous membrane 2Absorption/desorption isotherm; This absorption/desorption isotherm belongs to IV type thermo-isopleth; Having tangible hysteresis loop to exist, is the adsorpting type of typical mesopore porous mass, and hysteresis loop is steep and intra-annular adsorption/desorption part is almost parallel; Explain that pore structure is made up of in the hole of rule shape, this hysteresis loop is from lower spot pressure (P/P 0=0.27) just begins to form, up to higher P/P0 position (P/P 0=0.985), the pore size distribution broad of this porous film material is described, and is contained a spot of macropore; Fig. 4 is the BJH desorption pore size distribution curve that embodiment 2 prepared spheroidal particle are piled up the strontium titanate porous membrane; The porous membrane specific surface area that BET calculates is 186.37m 2/ g.The spheroidal particle accumulation strontium titanate porous membrane specific surface area of detected result explanation the inventive method preparation is big, and connectivity is good each other, and it is high that gaseous diffusion transports the effective rate of utilization of carrying out easily with specific surface area.
Embodiment 3
In the 500ml beaker, add the 176ml absolute ethyl alcohol, the 17.02g tetrabutyl titanate, the 15.81g diethylolamine, after constantly stirring under 35 ℃ of bath temperatures, static 30min is with abundant complexing; Under with the continuous stirring condition of the speed of 800rpm, with the 41ml strontium acetate aqueous solution (Sr (CH 3COO) 2.0.5H 2O, 268.4g/L) speed of dripping with 1ml/min is added drop-wise in the tetrabutyl titanate ethanolic soln, after titration finishes 1h, adds 3.0g polyoxyethylene glycol PEG2000, and continuing to stir until obtaining concentration is the uniform and stable transparent strontium titanate colloidal sol of 0.2mol/L; With adopting dip-coating method to carry out plated film behind the at room temperature static ageing 10h of strontium titanate colloidal sol, the silicon chip of cleaning surfaces is vertical, at the uniform velocity be immersed in the strontium titanate colloidal sol with 6cm/min; Static 20s with the speed of 4cm/min, vertically and at the uniform velocity upwards lifts substrate then; The silicon chip that is coated with strontium titanate colloidal sol dry 1h under 105 ℃; Repeat above-mentioned plated film and drying step, plating second tunic and trilamellar membrane on silicon chip are with the silicon chip that plated trilamellar membrane dry 6h under 120 ℃; Put into retort furnace subsequently in 700 ℃ of following roasting 2h, finally obtain the strontium titanate film that spheroidal particle is piled up vesicular structure.
Embodiment 4
In the 500ml beaker, add the 285ml absolute ethyl alcohol, the 17.02g tetrabutyl titanate, the 21.08g diethylolamine, after constantly stirring under 40 ℃ of bath temperatures, static 30min is with abundant complexing; Under with the continuous stirring condition of the speed of 1000rpm, with the 36.4ml strontium acetate aqueous solution (Sr (CH 3COO) 2.0.5H 2O, 294.9g/L) speed of dripping with 1.5ml/min is added drop-wise in the tetrabutyl titanate ethanolic soln, after titration finishes 1.5h, adds 4.0g polyoxyethylene glycol PEG2000, and continuing to stir until obtaining concentration is the uniform and stable transparent strontium titanate colloidal sol of 0.15mol/L; With adopting spin-coating method to carry out plated film behind the at room temperature static ageing 12h of strontium titanate colloidal sol, strontium titanate colloidal sol is dropped on the ceramic substrate of cleaning surfaces, with sol evenning machine colloidal sol is evenly thrown away; Form gel-film; Whirl coating speed is 3000 rpm, with substrate and gel-film dry 1h under 105 ℃, repeats above-mentioned plated film, drying step again; Plating second tunic and trilamellar membrane on substrate; With the substrate that plated trilamellar membrane dry 6h under 120 ℃, put into retort furnace subsequently in 650 ℃ of following roasting 2h, finally obtain the strontium titanate film that spheroidal particle is piled up vesicular structure.
Embodiment 5
In the 250ml beaker, add the 125ml absolute ethyl alcohol, the 17.02g tetrabutyl titanate, the 10.01g methyl ethyl diketone, after constantly stirring under 30 ℃ of bath temperatures, static 50min is with abundant complexing; Under with the continuous stirring condition of the speed of 800rpm, with the 45ml strontium acetate aqueous solution (Sr (CH 3COO) 2.0.5H 2O, 238.6g/L) speed of dripping with 1ml/min is added drop-wise in the tetrabutyl titanate ethanolic soln, after titration finishes 50min, adds the 8.5g non-ionic polyacrylamide, and continuing to stir until obtaining concentration is the uniform and stable transparent strontium titanate colloidal sol of 0.25mol/L; With adopting spin-coating method to carry out plated film behind the at room temperature static ageing 6h of strontium titanate colloidal sol, strontium titanate colloidal sol is dropped on the metal substrate of cleaning surfaces, with sol evenning machine colloidal sol is evenly thrown away; Form gel-film; Whirl coating speed is 4000 rpm, with substrate and gel-film dry 1h under 105 ℃, repeats above-mentioned plated film, drying step again; Plating second tunic on substrate; With the substrate that plated two membranes dry 4h under 120 ℃, put into retort furnace subsequently in 550 ℃ of following roasting 4h, finally obtain the strontium titanate film that spheroidal particle is piled up vesicular structure.
Embodiment 6
In the 250ml beaker, add the 45ml absolute ethyl alcohol, the 17.02g tetrabutyl titanate, the 5.0g methyl ethyl diketone, after constantly stirring under 30 ℃ of bath temperatures, static 30min is with abundant complexing; Under with the continuous stirring condition of the speed of 1000rpm, with the 49.5ml strontium acetate aqueous solution (Sr (CH 3COO) 2.0.5H 2O 216.9g/L) is added drop-wise in the tetrabutyl titanate ethanolic soln with 2ml/min, after titration finishes 30min, adds the 3.78g non-ionic polyacrylamide, and continuing to stir until obtaining concentration is the uniform and stable transparent strontium titanate colloidal sol of 0.5mol/L; With adopting spin-coating method to carry out plated film behind the at room temperature static ageing 2h of strontium titanate colloidal sol; Strontium titanate colloidal sol is dropped on the ceramic substrate of cleaning surfaces, colloidal sol is evenly thrown away, form gel-film with sol evenning machine; Whirl coating speed is 6000 rpm; With substrate and gel-film dry 3h under 120 ℃, put into retort furnace subsequently again, finally obtain the strontium titanate film that spheroidal particle is piled up vesicular structure in 750 ℃ of following roasting 1.5h.

Claims (8)

1. a spheroidal particle is piled up the preparation method of vesicular structure strontium titanate film, it is characterized in that carrying out according to following steps:
(1) with absolute ethyl alcohol, tetrabutyl titanate and complexing agent, the mixing that under 30-40 ℃ of water bath condition, constantly stirs, static 30min forms the tetrabutyl titanate ethanolic soln;
(2) prepare the strontium acetate aqueous solution in the ratio of strontium acetate and tetrabutyl titanate mol ratio 1:1; Then with strontium acetate solution with the speed of (0.25-2) mL/min with (500-1000) splash in the tetrabutyl titanate ethanolic soln under the rpm agitation condition; Titration finishes to add nonionogenic tenside behind the 0.5-1.5h; The nonionogenic tenside that adds and the mol ratio of tetrabutyl titanate are (0.005 ~ 0.045): 1; Continue to stir again, obtain strontium titanate colloidal sol, hierarchy of control temperature is 25 ~ 40 ℃ in the whole process;
(3) with carrying out plated film behind the at room temperature static ageing 2-12h of above-mentioned strontium titanate colloidal sol, adopt spin-coating method or dip-coating method plated film on substrate, the substrate that is coated with strontium titanate colloidal sol is dried down at 80-120 ℃;
(4) substrate that is coated with strontium titanate colloidal sol after will drying finally makes the strontium titanate porous membrane that spheroidal particle is piled up pore structure in 550-750 ℃ of following roasting 1 ~ 4h.
2. a kind of spheroidal particle according to claim 1 is piled up the preparation method of vesicular structure strontium titanate film, it is characterized in that described complexing agent is diethylolamine or methyl ethyl diketone, and the mol ratio of tetrabutyl titanate and complexing agent is 1: (1 ~ 5).
3. a kind of spheroidal particle according to claim 1 is piled up the preparation method of vesicular structure strontium titanate film, it is characterized in that described nonionogenic tenside is polyoxyethylene glycol or non-ionic polyacrylamide.
4. a kind of spheroidal particle according to claim 1 is piled up the preparation method of vesicular structure strontium titanate film, and the mol ratio that it is characterized in that water and tetrabutyl titanate and strontium acetate is 30 ~ 55:1:1.
5. a kind of spheroidal particle according to claim 1 is piled up the preparation method of vesicular structure strontium titanate film, and the concentration that it is characterized in that described strontium titanate colloidal sol is 0.1 ~ 0.5molL -1
6. a kind of spheroidal particle according to claim 1 is piled up the preparation method of vesicular structure strontium titanate film, it is characterized in that described substrate is a glass, metal, pottery or silicon chip.
7. a kind of spheroidal particle according to claim 1 is piled up the preparation method of vesicular structure strontium titanate film, it is characterized in that said on substrate plated film, coating layers is at least one deck.
8. a kind of spheroidal particle according to claim 1 is piled up the preparation method of vesicular structure strontium titanate film, it is characterized in that the strontium titanate porous membrane of prepared spheroidal particle accumulation pore structure has the pore structure that is interconnected that the spheroidal particle accumulation forms.
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CN114068795A (en) * 2021-03-10 2022-02-18 杭州安誉科技有限公司 Semiconductor element for thermoelectric module of real-time fluorescent quantitative PCR instrument
CN114068795B (en) * 2021-03-10 2022-07-01 杭州安誉科技有限公司 Semiconductor element for thermoelectric module of real-time fluorescent quantitative PCR instrument
CN114907116A (en) * 2022-05-10 2022-08-16 武汉理工大学 Preparation method of strontium titanate film with adjustable heat conductivity coefficient

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