CN102389974A - Method for producing magnetron cathode material for preventing recrystallized grains from being coarsened - Google Patents
Method for producing magnetron cathode material for preventing recrystallized grains from being coarsened Download PDFInfo
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- CN102389974A CN102389974A CN2011102225720A CN201110222572A CN102389974A CN 102389974 A CN102389974 A CN 102389974A CN 2011102225720 A CN2011102225720 A CN 2011102225720A CN 201110222572 A CN201110222572 A CN 201110222572A CN 102389974 A CN102389974 A CN 102389974A
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- Prior art keywords
- magnetron cathode
- cathode material
- proportion
- emission function
- production method
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- 239000010406 cathode material Substances 0.000 title claims abstract description 22
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 15
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims abstract description 10
- 238000000034 method Methods 0.000 claims abstract description 8
- ZSLUVFAKFWKJRC-IGMARMGPSA-N 232Th Chemical compound [232Th] ZSLUVFAKFWKJRC-IGMARMGPSA-N 0.000 claims abstract description 7
- 229910052684 Cerium Inorganic materials 0.000 claims abstract description 7
- 229910052776 Thorium Inorganic materials 0.000 claims abstract description 7
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 claims abstract description 7
- 229910052746 lanthanum Inorganic materials 0.000 claims abstract description 7
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 claims abstract description 7
- 229910052702 rhenium Inorganic materials 0.000 claims abstract description 7
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 claims abstract description 7
- 229910052721 tungsten Inorganic materials 0.000 claims abstract description 7
- 239000010937 tungsten Substances 0.000 claims abstract description 7
- 229910052727 yttrium Inorganic materials 0.000 claims abstract description 7
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 claims abstract description 7
- 230000009467 reduction Effects 0.000 claims description 19
- QGLKJKCYBOYXKC-UHFFFAOYSA-N nonaoxidotritungsten Chemical compound O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1 QGLKJKCYBOYXKC-UHFFFAOYSA-N 0.000 claims description 15
- 229910001930 tungsten oxide Inorganic materials 0.000 claims description 15
- 239000008367 deionised water Substances 0.000 claims description 10
- 229910021641 deionized water Inorganic materials 0.000 claims description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 10
- 239000000203 mixture Substances 0.000 claims description 9
- 239000000843 powder Substances 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 6
- 239000007788 liquid Substances 0.000 claims description 6
- 238000000465 moulding Methods 0.000 claims description 6
- VGBPIHVLVSGJGR-UHFFFAOYSA-N thorium(4+);tetranitrate Chemical compound [Th+4].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O VGBPIHVLVSGJGR-UHFFFAOYSA-N 0.000 claims description 6
- 230000006835 compression Effects 0.000 claims description 5
- 238000007906 compression Methods 0.000 claims description 5
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 3
- 238000005242 forging Methods 0.000 claims description 3
- 229910052739 hydrogen Inorganic materials 0.000 claims description 3
- 239000001257 hydrogen Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 238000002360 preparation method Methods 0.000 claims description 3
- 238000003756 stirring Methods 0.000 claims description 3
- 238000003763 carbonization Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
Abstract
The invention discloses a method for producing a magnetron cathode material for preventing recrystallized grains from being coarsened. In the process of preparing the magnetron cathode material by taking tungsten and thorium as main components, at least one of rhenium, lanthanum, yttrium and cerium respectively with a transmitting function is added. The magnetron cathode material produced by the method disclosed by the invention is capable of preventing the recrystallized grains from being coarsened, and after the magnetron cathode material is carbonized, the recrystallized grains are refined, and through-type grain boundary sliding lines are not generated, thereby, the product percent of pass is improved, and the fault rate of final products in transportation, sales and application is reduced.
Description
Technical field
The present invention relates to a kind of production method of magnetron cathode material.
Background technology
Existing magnetron cathode material ubiquity the problem of shape crystal boundary slippage occurs connecting after carbonization, influence service behaviour and service life.
Summary of the invention
The object of the present invention is to provide and a kind ofly can prevent the recrystal grain alligatoring, the production method of the magnetron cathode material that prevents the recrystal grain alligatoring of favorable working performance.
Technical solution of the present invention is:
A kind of production method that prevents the magnetron cathode material of recrystal grain alligatoring; It is characterized in that: is in the magnetron cathode materials process of main component in preparation with tungsten, thorium; Add at least a element in rhenium with emission function, lanthanum, yttrium, the cerium; Wherein tungsten is that tungsten oxide, thorium are thorium nitrate, and the percentage by weight of above-mentioned each component is:
Tungsten oxide 97 ~ 98.9%
Thorium nitrate 0.5 ~ 2%
Emission function element 0.0001 ~ 1%.
The said production method that prevents the magnetron cathode material of recrystal grain alligatoring comprises the following steps: successively
(1) water-soluble closing: tungsten oxide is used the deionized water submergence, become thick shape, the weight ratio of tungsten oxide and deionized water is 1:1; With in emission function element rhenium, lanthanum, yttrium, the cerium one or more respectively with add deionized water dissolving, emission function element liquid;
(2) mix: the thick shape of tungsten oxide that step (1) is obtained does not have the adding mixer, adds the emission function element liquid that step (1) obtains while stirring, and then handles in 90 ~ 110 ℃ of baking ovens, pulverizes 80 orders again;
(3) reduction: under pure hydrogen protection, carry out high temperature reduction and handle;
(4) mix powder: will in batch mixer, all mix through the powder that above-mentioned processing obtains;
(5) moulding: press the moulding of tungsten powder forming method, and, get the base bar through pressed compact, pre-burning, the molten processing of hammer;
(6) forging: by proportion above-mentioned base bar is divided into the different specific weight type earlier, the base bar that proportion is lower forges compression, makes its proportion identical with the base bar type of high specific weight; Concrete grammar: earlier above-mentioned base bar is divided into 18.2 >=proportion >=19.9 and 17.6 >=proportion by proportion>18.2 two kinds, and with 17.6 >=proportion 18.2 base bar forges compression, making its proportion is 18.2 >=proportion >=19.9;
The material that (7) will obtain through step (6), heating in heating furnace, stretching get product.
Step (3) is carried out three high temperature reductions and is handled; Handle down at 300 ~ 800 ℃ when reduction is handled for the first time, 200 orders sieve; It is under 1000 ℃, to carry out that reduction is for the second time handled, and it is under 1100 ℃, to carry out that reduction is for the third time handled.
The addition of emission function element is 0.0001 ~ 0.001%.The addition of emission function element is 0.001 ~ 0.01%.
The present invention can prevent the recrystal grain alligatoring, after the carbonization, in the crystallization grain refinement, does not have the shape of perforation crystal boundary slippage lines, has improved product percent of pass, reduces final products in transportation and sale failure in service rate.
Be described further below in conjunction with embodiment the present invention.
The specific embodiment
A kind of production method that prevents the magnetron cathode material of recrystal grain alligatoring; Is in the magnetron cathode materials process of main component in preparation with tungsten, thorium; Add at least a element in rhenium with emission function, lanthanum, yttrium, the cerium; Wherein tungsten is that tungsten oxide, thorium are thorium nitrate, and the percentage by weight of above-mentioned each component is:
Tungsten oxide 97 ~ 98.9% (example 97%, 98%, 98.9%)
Thorium nitrate 0.5 ~ 2% (example 0.5%, 1%, 2%)
Emission function element 0.0001 ~ 1% (example 0.0001%, 0.001%, 0.01%, 0.1%, 1%).
Above-mentioned each component sum is 100%.
Concrete steps are following successively:
(1) water-soluble closing: tungsten oxide is used the deionized water submergence, become thick shape, the weight ratio of tungsten oxide and deionized water is 1:1; With in emission function element rhenium, lanthanum, yttrium, the cerium one or more respectively with add deionized water dissolving, emission function element liquid;
(2) mix: the thick shape of tungsten oxide that step (1) is obtained does not have the adding mixer, adds the emission function element liquid that step (1) obtains while stirring, and then handles in 90 ~ 110 ℃ of baking ovens, pulverizes 80 orders again;
(3) reduction: under pure hydrogen protection, carry out high temperature reduction and handle; Average 2.6 ~ 3 μ m of powder after reduction is handled;
(4) mix powder: will in batch mixer, all mix through the powder that above-mentioned processing obtains;
(5) moulding: press the moulding of tungsten powder forming method, and, get the base bar through pressed compact, pre-burning, the molten processing of hammer;
(6) forging: earlier above-mentioned base bar is divided into 18.2 >=proportion >=19.9 and 17.6 >=proportion by proportion>18.2 two kinds, and with 17.6 >=proportion 18.2 base bar forges compression, making its proportion is 18.2 >=proportion >=19.9;
The material that (7) will obtain through step (6), heating in heating furnace, stretching get product.
Step (3) is carried out three high temperature reductions and is handled; Handle down at 300 ~ 800 ℃ when reduction is handled for the first time, 200 orders sieve; It is under 1000 ℃, to carry out that reduction is for the second time handled, and it is under 1100 ℃, to carry out that reduction is for the third time handled.
Claims (7)
1. production method that prevents the magnetron cathode material of recrystal grain alligatoring; It is characterized in that: is in the magnetron cathode materials process of main component in preparation with tungsten, thorium; Add at least a element in rhenium with emission function, lanthanum, yttrium, the cerium; Wherein tungsten is that tungsten oxide, thorium are thorium nitrate, and the percentage by weight of above-mentioned each component is:
Tungsten oxide 97 ~ 98.9%
Thorium nitrate 0.5 ~ 2%
Emission function element 0.0001 ~ 1%.
2. the production method that prevents the magnetron cathode material of recrystal grain alligatoring according to claim 1 is characterized in that: comprise the following steps: successively
(1) water-soluble closing: tungsten oxide is used the deionized water submergence, become thick shape; With in emission function element rhenium, lanthanum, yttrium, the cerium one or more respectively with add deionized water dissolving, emission function element liquid;
(2) mix: the thick shape of tungsten oxide that step (1) is obtained does not have the adding mixer, adds the emission function element liquid that step (1) obtains while stirring, and then handles in 90 ~ 110 ℃ of baking ovens, pulverizes again;
(3) reduction: under pure hydrogen protection, carry out high temperature reduction and handle;
(4) mix powder: will in batch mixer, all mix through the powder that above-mentioned processing obtains;
(5) moulding: press the moulding of tungsten powder forming method, and, get the base bar through pressed compact, pre-burning, the molten processing of hammer;
(6) forging: by proportion above-mentioned base bar is divided into the different specific weight type earlier, the base bar that proportion is lower forges compression, makes its proportion identical with the base bar type of high specific weight;
The material that (7) will obtain through step (6), heating in heating furnace, stretching get product.
3. the production method that prevents the magnetron cathode material of recrystal grain alligatoring according to claim 2 is characterized in that: step (3) is carried out three high temperature reductions and is handled; Handle down at 300 ~ 800 ℃ when reduction is handled for the first time, 200 orders sieve; It is under 1000 ℃, to carry out that reduction is for the second time handled, and it is under 1100 ℃, to carry out that reduction is for the third time handled.
4. the production method that prevents the magnetron cathode material of recrystal grain alligatoring according to claim 2; It is characterized in that: the weight ratio of tungsten oxide and deionized water is 1:1 in the step (1), and the emission function element is 1:10 with the part by weight that adds deionized water.
5. the production method that prevents the magnetron cathode material of recrystal grain alligatoring according to claim 2; It is characterized in that: the concrete grammar of step (6) is: earlier by proportion above-mentioned base bar is divided into 18.2 >=proportion >=19.9 and 17.6 >=proportion>18.2 two kinds; And with 17.6 >=proportion>18.2 base bar forges compression, and making its proportion is 18.2 >=proportion >=19.9.
6. the production method that prevents the magnetron cathode material of recrystal grain alligatoring according to claim 1 is characterized in that: the addition of emission function element is 0.0001 ~ 0.001%.
7. the production method that prevents the magnetron cathode material of recrystal grain alligatoring according to claim 1 is characterized in that: the addition of emission function element is 0.001 ~ 0.01%.
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201110222572 CN102389974B (en) | 2011-05-12 | 2011-08-04 | Method for producing magnetron cathode material for preventing recrystallized grains from being coarsened |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110121968.6 | 2011-05-12 | ||
| CN201110121968 | 2011-05-12 | ||
| CN 201110222572 CN102389974B (en) | 2011-05-12 | 2011-08-04 | Method for producing magnetron cathode material for preventing recrystallized grains from being coarsened |
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| Publication Number | Publication Date |
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| CN102389974A true CN102389974A (en) | 2012-03-28 |
| CN102389974B CN102389974B (en) | 2013-04-24 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102800543A (en) * | 2012-08-29 | 2012-11-28 | 朱惠冲 | Lanthanum tungsten cathode for magnetron of micro-wave oven and preparation technology thereof |
| CN105543797A (en) * | 2015-12-12 | 2016-05-04 | 朱惠冲 | Manufacturing process of rhenium-lanthanum rare-earth alloy high-energy electronic injection target |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1041113A (en) * | 1996-07-25 | 1998-02-13 | Mitsubishi Materials Corp | Rare earth magnet material powder having superior magnetic characteristics and manufacture thereof |
| JP2000223305A (en) * | 1999-02-01 | 2000-08-11 | Mitsubishi Materials Corp | Rare-earth r-fe-co-b magnetic powder, its manufacturing method, and bonded magnet made of the powder |
| CN101004995A (en) * | 2006-01-20 | 2007-07-25 | 顾进跃 | Method for producing thorium-tungsten wire |
| CN102009171A (en) * | 2010-09-30 | 2011-04-13 | 厦门虹鹭钨钼工业有限公司 | Magnetron coil material powder for magnetron cathode and preparation method thereof |
-
2011
- 2011-08-04 CN CN 201110222572 patent/CN102389974B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1041113A (en) * | 1996-07-25 | 1998-02-13 | Mitsubishi Materials Corp | Rare earth magnet material powder having superior magnetic characteristics and manufacture thereof |
| JP2000223305A (en) * | 1999-02-01 | 2000-08-11 | Mitsubishi Materials Corp | Rare-earth r-fe-co-b magnetic powder, its manufacturing method, and bonded magnet made of the powder |
| JP3427765B2 (en) * | 1999-02-01 | 2003-07-22 | 三菱マテリアル株式会社 | Rare earth-Fe-Co-B based magnet powder, method for producing the same, and bonded magnet using the powder |
| CN101004995A (en) * | 2006-01-20 | 2007-07-25 | 顾进跃 | Method for producing thorium-tungsten wire |
| CN102009171A (en) * | 2010-09-30 | 2011-04-13 | 厦门虹鹭钨钼工业有限公司 | Magnetron coil material powder for magnetron cathode and preparation method thereof |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102800543A (en) * | 2012-08-29 | 2012-11-28 | 朱惠冲 | Lanthanum tungsten cathode for magnetron of micro-wave oven and preparation technology thereof |
| CN102800543B (en) * | 2012-08-29 | 2015-07-29 | 佛山宁宇科技有限公司 | A kind of lanthanum tungsten cathode for magnetron of micro-wave oven and preparation method thereof |
| CN105543797A (en) * | 2015-12-12 | 2016-05-04 | 朱惠冲 | Manufacturing process of rhenium-lanthanum rare-earth alloy high-energy electronic injection target |
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| CN102389974B (en) | 2013-04-24 |
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Denomination of invention: Method for producing magnetron cathode material for preventing recrystallized grains from being coarsened Effective date of registration: 20180322 Granted publication date: 20130424 Pledgee: Bank of China Limited by Share Ltd Foshan branch Pledgor: Foshan Ning Yu Polytron Technologies Inc Registration number: 2018440000064 |
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