CN102383103A - Film coating bearing device and optical film coating equipment having same - Google Patents
Film coating bearing device and optical film coating equipment having same Download PDFInfo
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- CN102383103A CN102383103A CN2010102667933A CN201010266793A CN102383103A CN 102383103 A CN102383103 A CN 102383103A CN 2010102667933 A CN2010102667933 A CN 2010102667933A CN 201010266793 A CN201010266793 A CN 201010266793A CN 102383103 A CN102383103 A CN 102383103A
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- load plate
- annular
- annular load
- plated film
- running gear
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Abstract
The invention provides a film coating bearing device, which comprises a plurality of concentric annular bearing discs having different diameters and movable devices which correspond to the annular bearing discs one by one. Each annular bearing disc comprises a soleplate, wherein the soleplate is provided with a plurality of accommodating holes for accommodating lens to be coated. The annular bearing discs are gradually nested from small diameter to large diameter, each movable device is respectively connected with one annular bearing disc, and each movable device is used for moving the annular bearing disc along the axial direction of the annular bearing disc. By changing the axial displacement of each concentric annular bearing disc, a shape of the film coating bearing device can be changed, so the film coating thickness of the lens to be coated with different radial distances can be conveniently adjusted when a film is coated. In addition, the invention also provides optical film coating equipment.
Description
Technical field
The present invention relates to a kind of plated film bogey and have the optical coating equipment of this plated film bogey.
Background technology
Existing eyeglass is installed on the coating umbrella when plated film mostly.Because the eyeglass of different radial distances is different with distance between the vapor deposition source on the coating umbrella; So the thicknesses of layers of the eyeglass of different radial distances may there are differences when plated film; Yet because the profile of existing coating umbrella is changeless; Even so that plated film when test found on the thicknesses of layers of eyeglass of different radial distances is variant, also have no idea coating umbrella is finely tuned, can only eliminate the difference between this rete through extra increase revision board.And the design of revision board often depends on designer's experience, if the designer does not have profuse experience, often is difficult to design satisfactory revision board, thereby causes the inconvenience in the production.
Summary of the invention
In view of this, be necessary to provide a kind of optical coating equipment that can regulate the plated film bogey of shape and have this device.
A kind of plated film bogey, it comprise a plurality of different diameters the annular concentric load plate and with each annular load plate running gear one to one.Said each annular load plate comprises base plate; Offer a plurality of containing holes that are used for ccontaining eyeglass to be plated on the said base plate; Said each annular load plate is ascending nested one by one, and said each running gear is connected with each annular load plate respectively, is used for moving axially said each annular load plate along said each annular load plate.
A kind of optical coating equipment, it comprises coating chamber, plated film bogey and vapor deposition source.Said plated film bogey is arranged on the top of said coating chamber, and said vapor deposition source is arranged on the bottom of said coating chamber.Said plated film bogey comprise a plurality of different diameters the annular concentric load plate and with each annular load plate running gear one to one; Said each running gear is fixed on the top of said coating chamber; And be connected with each annular load plate respectively, said each running gear is used for moving axially said each annular load plate along said each annular load plate, and said each annular load plate comprises base plate; Offer a plurality of containing holes that are used for ccontaining eyeglass to be plated on the said base plate, said each annular load plate is ascending nested one by one.
Plated film bogey provided by the invention changes the shape of said plated film bogey, thereby when plated film, can conveniently adjust the thicknesses of layers of the eyeglass to be plated of different radial distances through changing the axial displacement of each annular concentric load plate.
Description of drawings
Fig. 1 is the synoptic diagram of optical coating equipment provided by the invention.
Fig. 2 is the synoptic diagram of the optical coating device interior of Fig. 1.
Fig. 3 is the view of the optical coating equipment of Fig. 1.
The main element nomenclature
Top 11
Sidewall 12
Through hole 120
Bottom 13
The first annular load plate 21
First base plate 210
Containing hole 20a
First annular sidewall 211
First hanger 212
The second annular load plate 22
Second base plate 220
Second annular sidewall 221
Second hanger 222
The 3rd annular load plate 23
The 3rd base plate 230
The 3rd annular sidewall 231
The 3rd hanger 232
First running gear 24
First motor 240
First rotating shaft 241
First suspender belt 242
Second running gear 25
Second motor 250
Second rotating shaft 251
Second suspender belt 252
The 3rd running gear 26
The 3rd motor 260
The 3rd rotating shaft 261
The 3rd suspender belt 262
Support 40
Crossbeam 41
Cantilever 42
Embodiment
See also Fig. 1 and Fig. 2, be a kind of optical coating equipment 100 provided by the invention, said optical coating equipment 100 comprises coating chamber 10, plated film bogey 20, vapor deposition source 30 and support 40.
In this embodiment, said optical coating equipment 100 is vacuum plating units.Said coating chamber 10 comprises top 11, sidewall 12 and bottom 13.Said plated film bogey 20 is positioned at the top 11 of said coating chamber 10.Said vapor deposition source 30 is fixed on the bottom 13 of said vacuum film coating chamber 10.Said coating chamber 10 sidewalls 12 are offered six pairs of through holes 120, and each to through hole 120 against each other.Each is parallel to the hub of through hole 120, and is positioned at sustained height.Certainly, in other embodiments, said each each other also can be not parallel to the hub of through hole 120, and be positioned at different heights.
Said plated film bogey 20 is used to load eyeglass to be coated.In this embodiment, said plated film bogey 20 comprises the annular load plate of the annular load plate of the first annular load plate 21, second the 22, the 3rd 23, first running gear 24, second running gear 25 and the 3rd running gear 26.Certainly, said if desired plated film bogey 20 loads more eyeglass to be plated, and that perhaps need regulate is thinner.Said plated film bogey 20 also can comprise more annular load plate.
In this embodiment, said first annular load plate 21, second annular load plate the 22, the 3rd annular load plate 23 is discoid.Certainly, said first annular load plate 21, the second annular load plate 22 and the 3rd annular load plate 23 also can be polygonal shape.
The said first annular load plate 21 comprises first base plate 210, first annular sidewall 211 and two first hangers 212.Offer a plurality of containing hole 20a that are used for ccontaining eyeglass to be plated on said first base plate 210.Said first annular sidewall 211 is surrounded on said first base plate 210.Said first annular sidewall 211 is structure as a whole with said first base plate 210.Certainly, the said first annular load plate 21 also can comprise the stability when more first hangers 212 move to improve the said first annular load plate 21.Said first annular sidewall 211 also can be opened manufacturing in 210 minutes with said first base plate, connected together through weldprocedure.
Said two first hangers 212 are fixed on said first annular sidewall 211, and are symmetrically distributed along the center of circle of the said first annular load plate 21.
The said second annular load plate 22 comprises second base plate 220, second annular sidewall 221 and two second hangers 222.The structural shape of the said second annular load plate 22 is identical with the said first annular load plate 21, but the size of the said second annular load plate 22 is greater than the size of the said first annular load plate 21.In this embodiment, the internal diameter of the said second annular load plate 22 equals the external diameter of the said first annular load plate 21, and the said second annular load plate 22 is sheathed on first annular sidewall 211 of the said first annular load plate 21.Certainly, the internal diameter of the said second annular load plate 22 also can be greater than the external diameter of the said first annular load plate 21.
The said the 3rd annular load plate 23 comprises the 3rd base plate 230, the 3rd annular sidewall 231 and two the 3rd hangers 232.The structural shape of the said the 3rd annular load plate 23 is identical with the said first annular load plate 21, but the size of the said the 3rd annular load plate 23 is greater than the size of the said second annular load plate 22.In this embodiment, the internal diameter of the said the 3rd annular load plate 23 equals the external diameter of the said second annular load plate 22, and the said the 3rd annular load plate 23 is sheathed on second annular sidewall 221 of the said second annular load plate 22.Certainly, the internal diameter of the said the 3rd annular load plate 23 also can be greater than the external diameter of the said second annular load plate 22.In this embodiment, when first annular load plate 21, second annular load plate the 22, the 3rd annular load plate 23 was positioned at sustained height, said first hanger 212, second hanger 222, the 3rd hanger 232 were located along the same line.
In this embodiment, said first running gear 24 comprises two first motors 240, two first rotating shafts 241 and two first suspender belts 242.Said each first rotating shaft 241 is rotated respectively and is installed on said each first motor 240, and said each first motor 240 is fixed in the top 11 of said coating chamber 10.In this embodiment, said first motor 240 is fixed on the said support 40.Said support 40 comprises crossbeam 41 and is positioned at two cantilevers 42 at crossbeam two ends, and said two cantilevers 42 are welded in said coating chamber 10 sidewalls 12 outsides, and said two cantilevers 42 and the junction of said coating chamber 10 are positioned at the below of said through hole 120.Said first motor 240 is fixed on the crossbeam 41, and is relative with a pair of through hole 120 on said coating chamber 10 sidewalls 12.Certainly, said cantilever 42 also can be bolted on said coating chamber 10 sidewalls 12.Said two first motors 240 rotate synchronously.Certainly, said first motor 240 also can be fixed in said coating chamber 10 inside.Said first running gear 24 also can only comprise 240, two first rotating shafts 241 of one first motor and driven by this first motor 240 simultaneously through modes such as geartransmission or sprocket wheel chain gears.
The a pair of through hole 120 that said each first rotating shaft 241 is passed on said coating chamber 10 sidewalls 12 stretches in the coating chamber 10.Said first suspender belt 242 is soft bands of high temperature material belt, metal bracelet or other structures processed.One end of said each first suspender belt 242 respectively ties up on said first hanger 212, and the other end is wrapped in said each first rotating shaft 241.Certainly, in order to improve spiral efficient, also reel can be installed in said first rotating shaft 241, said first suspender belt 242 is wrapped on the reel.In order to obtain higher stationarity, said first running gear 24 also can adopt hydraulic pressure or pneumatic shuttle, and piston rod is connected with the said first annular load plate 21, changes the height of the said first annular load plate 21 through moving of piston rod.
Said second running gear 25 comprises two second motors 250, two second rotating shafts 251 and two second suspender belts 252.Said second running gear 25 is identical with said first running gear, 24 structures.Said second motor 250 also is fixed on the said crossbeam 41, and is relative with a pair of through hole 120 on said coating chamber 10 sidewalls 12, and said two second motors 250 are positioned at the outside of said two first motors 240.Said each second rotating shaft 251 is connected with said each second motor 250.One end of said each second suspender belt 252 respectively ties up on said second hanger 222, and the other end is wrapped in said each second rotating shaft 251.
Said the 3rd running gear 26 comprises two the 3rd motors 260, two the 3rd rotating shafts 261 and two the 3rd suspender belts 262.Said the 3rd running gear 26 is identical with said first running gear, 24 structures.Said the 3rd motor 260 is fixed on the said crossbeam 41, and is relative with a pair of through hole 120 on said coating chamber 10 sidewalls 12, and said two the 3rd motors 260 are positioned at the outside of said two second motors 250.Said each the 3rd rotating shaft 261 is connected with said each the 3rd motor 260.One end of said each the 3rd suspender belt 262 respectively ties up on said the 3rd hanger 232, and the other end is wrapped in said each the 3rd rotating shaft 261.
See also Fig. 3, when optical coating equipment 100 is tried to plate, if find on the thicknesses of layers of the eyeglass to be plated of different radial distances on the said plated film bogey 20 variant.For example; Glasses lens plated thickness on the said second annular load plate 22 meets the thicknesses of layers of anticipation; And the glasses lens plated thickness on the said first annular load plate 21 is slightly thicker than the thickness of anticipation, and the glasses lens plated thickness on the said the 3rd annular load plate 23 is thinner than the thickness of anticipation slightly.Then can control said two first motors 240 and rotate said two first rotating shafts 241 simultaneously; Scroll up said two first suspender belts 242; The height of the said first annular load plate 21 raises; Increase the distance between the said first annular load plate 21 and the vapor deposition source 30, thereby just can when plated film, reduce the thickness of the eyeglass rete on the said first annular load plate 21.Control said two the 3rd motors 260 and rotate said two the 3rd rotating shafts 261 simultaneously; Reduce the number of turns that said two the 3rd suspender belts 262 twine in said two the 3rd rotating shafts 261; Reduce the height of the said the 3rd annular load plate 23; Reduce the distance between the said first annular load plate 21 and the vapor deposition source 30, thereby just can when plated film, increase the thickness of the eyeglass rete on the said first annular load plate 21.
Plated film bogey provided by the invention changes the shape of said plated film bogey, thereby when plated film, can conveniently adjust the thicknesses of layers of the eyeglass to be plated of different radial distances through changing the axial displacement of each annular concentric load plate.
It is understandable that, for the person of ordinary skill of the art, can make other various corresponding changes and distortion by technical conceive according to the present invention, and all these change the protection domain that all should belong to claim of the present invention with distortion.
Claims (10)
1. plated film bogey; It comprises a plurality of different diameters the annular concentric load plate and with each annular load plate running gear one to one; Said each annular load plate comprises base plate, offers a plurality of containing holes that are used for ccontaining eyeglass to be plated on the said base plate, and said each annular load plate is ascending nested one by one; Said each running gear is connected with each annular load plate respectively, is used for moving axially said each annular load plate along said each annular load plate.
2. plated film bogey as claimed in claim 1 is characterized in that, said each annular load plate also comprises the annular sidewall that is provided with around said base plate.
3. plated film bogey as claimed in claim 1 is characterized in that, the external diameter of said each annular load plate equates with the internal diameter of annular load plate on being set in its external diameter.
4. plated film bogey as claimed in claim 2; It is characterized in that said each annular load plate also comprises hanger, said hanger is arranged on the said annular sidewall; Said running gear comprises motor, rotating shaft and suspender belt; Said revolution is arranged in the said rotating shaft, and said suspender belt one end is wrapped in the said rotating shaft, and an end ties up on the said hanger.
5. plated film bogey as claimed in claim 4 is characterized in that, said each annular load plate has two hangers, and said two hangers are symmetrically distributed along the center of circle of said annular load plate.
6. optical coating equipment; It comprises coating chamber, plated film bogey and vapor deposition source, and said plated film bogey is arranged on the top of said coating chamber, and said vapor deposition source is arranged on the bottom of said coating chamber; It is characterized in that; Said plated film bogey comprise a plurality of different diameters the annular concentric load plate and with each annular load plate running gear one to one, said each running gear is fixed on the top of said coating chamber, and is connected with each annular load plate respectively; Said each running gear is used for moving axially said each annular load plate along said each annular load plate; Said each annular load plate comprises base plate, offers a plurality of containing holes that are used for ccontaining eyeglass to be plated on the said base plate, and said each annular load plate is ascending nested one by one.
7. plated film bogey as claimed in claim 6 is characterized in that, said each annular load plate also comprises the annular sidewall that is provided with around said base plate.
8. optical coating equipment as claimed in claim 6 is characterized in that, the external diameter of said each annular load plate equates with the internal diameter of annular load plate on being set in its external diameter.
9. optical coating equipment as claimed in claim 7; It is characterized in that the annular sidewall of said each annular load plate is provided with hanger, said running gear comprises motor, rotating shaft and suspender belt; Said revolution is arranged in the said rotating shaft; Said each rotating shaft and suspender belt are corresponding one by one with hanger, and said suspender belt one end is wrapped in the said rotating shaft, and an end ties up on the said hanger.
10. optical coating equipment as claimed in claim 9 is characterized in that, said each annular load plate has two hangers, and said two hangers are symmetrically distributed along the center of circle of said annular load plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010102667933A CN102383103A (en) | 2010-08-30 | 2010-08-30 | Film coating bearing device and optical film coating equipment having same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010102667933A CN102383103A (en) | 2010-08-30 | 2010-08-30 | Film coating bearing device and optical film coating equipment having same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102383103A true CN102383103A (en) | 2012-03-21 |
Family
ID=45822927
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010102667933A Pending CN102383103A (en) | 2010-08-30 | 2010-08-30 | Film coating bearing device and optical film coating equipment having same |
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| Country | Link |
|---|---|
| CN (1) | CN102383103A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103966555A (en) * | 2014-05-28 | 2014-08-06 | 深圳市华星光电技术有限公司 | Evaporation source heating device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3783822A (en) * | 1972-05-10 | 1974-01-08 | J Wollam | Apparatus for use in deposition of films from a vapor phase |
| JPS52145380A (en) * | 1976-05-31 | 1977-12-03 | Hitachi Ltd | Sputtering apparatus |
| CN1464917A (en) * | 2001-06-04 | 2003-12-31 | 日本板硝子株式会社 | Method and device for forming film |
| CN101603169A (en) * | 2008-06-11 | 2009-12-16 | 鸿富锦精密工业（深圳）有限公司 | Film coating apparatus |
-
2010
- 2010-08-30 CN CN2010102667933A patent/CN102383103A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3783822A (en) * | 1972-05-10 | 1974-01-08 | J Wollam | Apparatus for use in deposition of films from a vapor phase |
| JPS52145380A (en) * | 1976-05-31 | 1977-12-03 | Hitachi Ltd | Sputtering apparatus |
| CN1464917A (en) * | 2001-06-04 | 2003-12-31 | 日本板硝子株式会社 | Method and device for forming film |
| CN101603169A (en) * | 2008-06-11 | 2009-12-16 | 鸿富锦精密工业（深圳）有限公司 | Film coating apparatus |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103966555A (en) * | 2014-05-28 | 2014-08-06 | 深圳市华星光电技术有限公司 | Evaporation source heating device |
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Application publication date: 20120321 |