CN102380822A - Ultra high-speed compound polishing disc of diamond film - Google Patents

Ultra high-speed compound polishing disc of diamond film Download PDF

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Publication number
CN102380822A
CN102380822A CN2010102690215A CN201010269021A CN102380822A CN 102380822 A CN102380822 A CN 102380822A CN 2010102690215 A CN2010102690215 A CN 2010102690215A CN 201010269021 A CN201010269021 A CN 201010269021A CN 102380822 A CN102380822 A CN 102380822A
Authority
CN
China
Prior art keywords
polishing disc
polishing disk
polishing
diamond film
speed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2010102690215A
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Chinese (zh)
Inventor
许立福
周丽
黄树涛
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shenyang Ligong University
Original Assignee
Shenyang Ligong University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shenyang Ligong University filed Critical Shenyang Ligong University
Priority to CN2010102690215A priority Critical patent/CN102380822A/en
Publication of CN102380822A publication Critical patent/CN102380822A/en
Pending legal-status Critical Current

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Abstract

The invention relates to an ultra high-speed compound polishing disc of a diamond film, comprising a polishing disc, a polishing disc seat, a dynamic balance adjusting block, a coupling shaft and a high-speed electric main shaft, wherein the polishing disc is fixed in a round groove of the polishing disc seat by a bolt, the polishing disc seat is connected with the high-speed electric main shaft by the coupling shaft, and the dynamic balance adjusting block is arranged in an annular groove of the polishing disc seat. The ultra high-speed compound polishing disc has the advantages of simple structure, light weight, convenience in replacement of the polishing disc, high polishing speed, convenience in dynamic balance adjustment, low cost and the like.

Description

A kind of ultrahigh speed composite polishing dish of diamond film
Technical field
The invention belongs to the high speed polishing technology of diamond film, particularly diamond film high speed and ultra-speed precise polishing technology.
Background technology
At present, mostly employed polishing disk is the single-deck structure during diamond film thermo-chemical polishing, needs integral replacing after the polishing disk wearing and tearing; And when carrying out the polishing of high speed and ultrahigh speed, need carry out strict dynamic balancing, dynamic balancing adjustment trouble.If make and cylinder iron wait material as polishing disk, because its quality is big, the inertia force when rotating at a high speed may make polishing disk break and cause danger.
Summary of the invention
The objective of the invention is in order to solve diamond film ultrahigh speed when polishing dynamic balancing adjustment, polishing disk is changed and polishing disk breaks technical problem, provide a kind of simple in structure, rotary inertia is little, dynamic balancing is easy to adjust, polishing disk is changed and is easy to a kind of diamond film ultrahigh speed composite polishing dish.
The present invention includes polishing disk, the polishing disk seat of aluminum alloy materials, dynamic balancing adjustment piece, coupling spindle, high-speed electric main shaft that material can be changed.Polishing disk is installed in the circular groove of polishing disk seat and through bolt and connects; Three dynamic balancing adjustment pieces are installed in the cannelure of the trapezoid cross section of polishing disk seat another side; Mix up and will adjust piece with screw after the dynamic balancing and hold out against in the cannelure of polishing disk seat, the polishing disk seat is connected with high-speed electric main shaft through coupling spindle.The one side of said polishing disk seat is useful on the cannelure that dynamic balancing adjustment piece is installed, and another side is useful on the circular groove that polishing disk is installed, and the middle part is to be used for the locating hole and the bolt hole that are connected with coupling spindle.
Advantages such as that the present invention has is simple in structure, in light weight, rotary inertia is little, can change the polishing disk of multiple material, and the dynamic balancing adjustment is simple and convenient.
Description of drawings
Fig. 1 is a structural representation of the present invention.
Fig. 2 is that the A of polishing disk seat is to view.
Among the figure: 1 electric main shaft, 2 coupling spindles, 3 dynamic balancing adjustment piece, 4 adjustment screws, 5 polishing disk seats, 6 polishing disks, 7 attachment bolts.
The specific embodiment
Below in conjunction with accompanying drawing the structural principle of the present invention and the course of work are described further.
A kind of ultrahigh speed composite polishing dish of diamond film, as shown in Figure 1, it comprises electric main shaft 1, coupling spindle 2, dynamic balancing adjustment piece 3, adjustment screw 4, polishing disk seat 5, polishing disk 6, attachment bolt 7.Coupling spindle 2 connects with electric main shaft 1 through screw thread; Polishing disk 6 is placed in the circular groove of polishing disk seat 5 tops, they connect with the flange of coupling spindle 2 through bolt 7; Dynamic balancing adjustment piece 3 is installed in the cannelure below the polishing disk seat 5; Relative position through adjusting three dynamic balancing adjustment piece circumferencial directions reaches the dynamically balanced purpose of adjustment, tightens adjustment screw 4 after dynamic balancing is adjusted and piece is adjusted in dynamic balancing is fixed.Rotate together through coupling spindle 2 drive polishing disk seats and polishing disk by electric main shaft 1.

Claims (3)

1. the ultrahigh speed composite polishing dish of a diamond film; It is characterized in that; The polishing disk seat, dynamic balancing adjustment piece, coupling spindle, the high-speed electric main shaft that comprise polishing disk, aluminium alloy; Polishing disk is installed in the circular groove of polishing disk seat, and dynamic balancing adjustment piece is installed in the cannelure of polishing disk seat, and the polishing disk seat is connected with high-speed electric main shaft through coupling spindle.
2. the ultrahigh speed composite polishing dish of a kind of diamond film according to claim 1 is characterized in that the one side of said aluminium alloy polishing disk seat is useful on the circular groove that polishing disk is installed, and another side is useful on the cannelure that dynamic balancing adjustment piece is installed.
3. the ultrahigh speed composite polishing dish of a kind of diamond film according to claim 1 is characterized in that said polishing disk can change fast.
CN2010102690215A 2010-09-01 2010-09-01 Ultra high-speed compound polishing disc of diamond film Pending CN102380822A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2010102690215A CN102380822A (en) 2010-09-01 2010-09-01 Ultra high-speed compound polishing disc of diamond film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2010102690215A CN102380822A (en) 2010-09-01 2010-09-01 Ultra high-speed compound polishing disc of diamond film

Publications (1)

Publication Number Publication Date
CN102380822A true CN102380822A (en) 2012-03-21

Family

ID=45820873

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2010102690215A Pending CN102380822A (en) 2010-09-01 2010-09-01 Ultra high-speed compound polishing disc of diamond film

Country Status (1)

Country Link
CN (1) CN102380822A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109202710A (en) * 2018-11-22 2019-01-15 中国电子科技集团公司第二十六研究所 Polishing head structure is used in crystal polishing

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US430270A (en) * 1890-06-17 Balancing device for wh eels
JPS5845874A (en) * 1981-09-11 1983-03-17 Hitachi Seiko Ltd Feed water device for cup type grindstone
JPH10286770A (en) * 1997-04-09 1998-10-27 Nikon Corp Grinding stone and grinding stone set
EP1110669A2 (en) * 1997-08-15 2001-06-27 Disco Corporation Apparatus and method for cutting workpieces by flushing working liquid to the tool-and-workpiece interface
CN2657857Y (en) * 2003-11-14 2004-11-24 顾印利 Flat surface sample polishing machine
CN2719494Y (en) * 2004-09-03 2005-08-24 沈阳理工大学 Diamond film high-speed precision polishing device
CN201158002Y (en) * 2008-01-08 2008-12-03 准力机械股份有限公司 Flange of grinding wheel of processor and pullback weight block structure improvement

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US430270A (en) * 1890-06-17 Balancing device for wh eels
JPS5845874A (en) * 1981-09-11 1983-03-17 Hitachi Seiko Ltd Feed water device for cup type grindstone
JPH10286770A (en) * 1997-04-09 1998-10-27 Nikon Corp Grinding stone and grinding stone set
EP1110669A2 (en) * 1997-08-15 2001-06-27 Disco Corporation Apparatus and method for cutting workpieces by flushing working liquid to the tool-and-workpiece interface
CN2657857Y (en) * 2003-11-14 2004-11-24 顾印利 Flat surface sample polishing machine
CN2719494Y (en) * 2004-09-03 2005-08-24 沈阳理工大学 Diamond film high-speed precision polishing device
CN201158002Y (en) * 2008-01-08 2008-12-03 准力机械股份有限公司 Flange of grinding wheel of processor and pullback weight block structure improvement

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109202710A (en) * 2018-11-22 2019-01-15 中国电子科技集团公司第二十六研究所 Polishing head structure is used in crystal polishing

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PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20120321