CN102377096A - Water-cooling control method for preventing laser crystals from dewing - Google Patents

Water-cooling control method for preventing laser crystals from dewing Download PDF

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CN102377096A
CN102377096A CN2011104014832A CN201110401483A CN102377096A CN 102377096 A CN102377096 A CN 102377096A CN 2011104014832 A CN2011104014832 A CN 2011104014832A CN 201110401483 A CN201110401483 A CN 201110401483A CN 102377096 A CN102377096 A CN 102377096A
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water
temperature
water temperature
cooling
control
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林学春
邹淑珍
侯玮
赵鹏飞
农光一
李晋闽
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Institute of Semiconductors of CAS
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Abstract

The invention discloses a water-cooling control method for preventing laser crystals from dewing, which comprises the following steps: step 1. firstly, a water temperature control system program is opened; step 2. the water temperature control system program automatically detects the temperature and the humidity of air and the initial temperature of cooling water, and the temperature, the humidity and the initial temperature are stored in environment state parameters of the program; step 3. working condition parameters are input in the water temperature control system program; step 4. the water temperature control system program is operated and controlled to output a water temperature decline stage control signal; and step 5. a water-cooling machine carries out refrigeration by stages so as to prevent crystals of a laser from dewing.

Description

Avoid the water-cool control method of laser crystal dewfall
Technical field
The invention belongs to technical field of semiconductors, particularly a kind of water-cool control method of avoiding the laser crystal dewfall.
Background technology
The high power all solid state laser is when starting, and the recirculated cooling water of water cooling unit is started working earlier, because the water cooling unit refrigeration rapidly; Laser crystal that is cooled and ambient temperature produce the bigger temperature difference at short notice, have under the air ambient of certain humidity, and steam on every side is dewfall on laser crystal easily; Thereby influencing laser vibrates in the chamber; Cause laser power to descend, when serious even damage laser crystal, cause the laser can't operate as normal.
Summary of the invention
The objective of the invention is to, a kind of control coolant water temperature method of laser crystal dewfall when avoiding high power laser to open is provided.
The present invention provides a kind of water-cool control method of avoiding the laser crystal dewfall, comprises the steps:
Step 1: at first open the control water temperature system program;
Step 2: the control water temperature system program detects the initial temperature of temperature, humidity and the cooling water of air automatically, and deposits in the ambient condition parameter of program;
Step 3: input service state parameter in the control water temperature system program;
Step 4: operation control water temperature system program, output water temperature decline stage numerical control system signal;
Step 5: water cooling unit freezes stage by stage, to avoid laser crystal bar dewfall.
Wherein the ambient condition parameter comprises: the initial temperature of recirculated cooling water in the water cooling unit before the temperature of air, humidity and the laser system work.
Wherein the input service state parameter comprises: laser works power and water cooling unit work water temperature.
Wherein numerical control system signal is the output water temperature decline stage: control program carries out condition judgment automatically according to ambient condition parameter and working status parameter in the empirical parameter database of having set; The number of stages that output control cooling water temperature on average descends; Obtain the voltage-time control signal of water cooling unit, the control water cooling unit freezes stage by stage.
When superpower laser is opened, the temperature of cooling water is descended to prolong the time that cooling water arrives working temperature stage by stage through the control water temperature system program.At first operating power and the coolant water temperature value at the whole story with the air themperature of detecting laser operational environment, air humidity, laser setup passes to the control water temperature system program; System program carries out condition judgment according to predefined empirical parameter database automatically; The number of stages that output control cooling water temperature on average descends; Obtain the voltage-time control signal of water cooling unit; Water temperature decline stage number and air humidity in the database, laser works power are proportional, and the temperature difference of so controlling laser crystal and surrounding air is within the dewfall temperature range.
Description of drawings
For further specifying technology contents of the present invention, below in conjunction with accompanying drawing and embodiment the present invention is explained in detail, wherein:
Fig. 1 is a control circuit system program circuit sketch map of the present invention;
Fig. 2 is control circuit system program control water cooling unit voltage-time diagram of the present invention;
Fig. 3 is the water cooling unit of the present invention water temperature-time variation diagram that freezes stage by stage.
Embodiment
See also shown in Figure 1ly, the present invention provides a kind of water-cool control method of avoiding the laser crystal dewfall, comprises the steps:
Step 1: at first open the control water temperature system program;
Step 2: the control circuit system program is through the automatic testing environment state parameter of detector; And deposit in the ambient condition parameter of program, this ambient condition parameter comprises: the initial temperature of recirculated cooling water in the water cooling unit before the temperature of air, humidity and the laser system work.Survey through air thermometer and hygrometer and to obtain air themperature and humidity is respectively T a=29 ℃,
Figure BDA0000116486200000021
It is T that cooling water temperature control device is surveyed its initial temperature 0=28 ℃;
Step 3: input laser works state parameter in the control circuit system program, the working status parameter of this input comprises: laser works power and water cooling unit work water temperature.Input laser works power P=3000W, water cooling unit work water temperature is T w=18 ℃;
Step 4: running control circuit system program; Output water temperature decline stage numerical control system signal; Be about to ambient condition parameter and working status parameter and call in control program, Automatic Program is carried out condition judgment in the empirical parameter database of having set, the number of stages N=3 that output control cooling water temperature on average descends; Obtain the voltage-time control signal of water cooling unit, as shown in Figure 2;
Step 5: water cooling unit freezes stage by stage, and the variation of cooling water water temperature-time diagram is as shown in Figure 3, and coolant water temperature was wave and descends in 15 minutes, from initial temperature T 0=28 ℃ drop to work temperature w=18 ℃, in the temperature difference of laser crystal temperature and surrounding air remains at more among a small circle, the dewfall phenomenon does not take place.
The above; Only be embodiments of the invention; Be not that the present invention is done any pro forma restriction; Every according to technical spirit of the present invention to any simple modification, equivalent variations and modification that above embodiment did, all still belong within the technical scheme scope of the present invention, so protection scope of the present invention is when being as the criterion with claims.

Claims (4)

1.一种避免激光晶体结露的水冷控制方法,包括如下步骤:1. A water-cooling control method for avoiding condensation of laser crystals, comprising the steps of: 步骤1:首先开启控制水温系统程序;Step 1: First start the water temperature control system program; 步骤2:控制水温系统程序自动检测空气的温度、湿度和冷却水的初始温度,并存入程序的环境状态参数中;Step 2: The water temperature control system program automatically detects the temperature, humidity of the air and the initial temperature of the cooling water, and stores them in the environmental state parameters of the program; 步骤3:在控制水温系统程序中输入工作状态参数;Step 3: Enter the working state parameters in the control water temperature system program; 步骤4:运行控制水温系统程序,输出水温下降阶段数控制信号;Step 4: Run the water temperature control system program, and output the control signal of the number of stages of water temperature drop; 步骤5:水冷机分阶段制冷,以避免激光器晶体棒结露。Step 5: The water cooler is cooled in stages to avoid condensation on the laser crystal rod. 2.根据权利要求1所述的避免激光晶体结露的水冷控制方法,其中环境状态参数包括:空气的温度、湿度和激光系统工作前水冷机中循环冷却水的初始温度。2. The water cooling control method for avoiding condensation of laser crystals according to claim 1, wherein the environmental state parameters include: air temperature, humidity and the initial temperature of the circulating cooling water in the water cooler before the laser system works. 3.根据权利要求1所述的避免激光晶体结露的水冷控制方法,其中输入工作状态参数包括:激光器工作功率和水冷机工作水温。3. The water cooling control method for avoiding condensation of laser crystals according to claim 1, wherein the input working state parameters include: working power of the laser and working water temperature of the water cooler. 4.根据权利要求1所述的避免激光晶体结露的水冷控制方法,其中输出水温下降阶段数控制信号是:控制程序根据环境状态参数和工作状态参数自动在已设定的经验参数数据库中进行条件判断,输出控制冷却水温度平均下降的阶段数,获得水冷机的电压-时间控制信号,控制水冷机分阶段制冷。4. The water-cooling control method for avoiding condensation of laser crystals according to claim 1, wherein the output water temperature drop stage number control signal is: the control program is automatically carried out in the set experience parameter database according to the environmental state parameters and the working state parameters Conditional judgment, output the number of stages to control the average drop of cooling water temperature, obtain the voltage-time control signal of the water cooler, and control the cooling of the water cooler in stages.
CN2011104014832A 2011-12-06 2011-12-06 Water-cooling control method for preventing laser crystals from dewing Pending CN102377096A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104083211A (en) * 2014-07-17 2014-10-08 山东杰美医疗科技有限公司 Method for protecting semiconductor laser device in semiconductor laser hair removal instrument
CN106159648A (en) * 2015-05-14 2016-11-23 发那科株式会社 Possesses the laser aid that prediction produces the function of condensation
CN111753400A (en) * 2020-05-27 2020-10-09 江苏大学 A method for controlling molten pool temperature in laser cladding forming
CN116000475A (en) * 2023-03-23 2023-04-25 深圳欧斯普瑞智能科技有限公司 Laser cutting head control method, device, computer equipment and storage medium

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104083211A (en) * 2014-07-17 2014-10-08 山东杰美医疗科技有限公司 Method for protecting semiconductor laser device in semiconductor laser hair removal instrument
CN106159648A (en) * 2015-05-14 2016-11-23 发那科株式会社 Possesses the laser aid that prediction produces the function of condensation
CN106159648B (en) * 2015-05-14 2018-11-30 发那科株式会社 Has the laser aid that prediction generates the function of moisture condensation
US10461488B2 (en) 2015-05-14 2019-10-29 Fanuc Corporation Laser device provided with function of predicting occurrence of condensation
CN111753400A (en) * 2020-05-27 2020-10-09 江苏大学 A method for controlling molten pool temperature in laser cladding forming
CN111753400B (en) * 2020-05-27 2024-08-30 江苏大学 Molten pool temperature control method in laser cladding forming
CN116000475A (en) * 2023-03-23 2023-04-25 深圳欧斯普瑞智能科技有限公司 Laser cutting head control method, device, computer equipment and storage medium

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Application publication date: 20120314