The flexible erecting device of thermocouple
Technical field
The invention belongs to the heat treating equipment technical field, relate to a kind of erecting device of thermocouple, be specifically related to the flexible erecting device of a kind of thermocouple.
Background technology
Thermopair is a kind of temperature-sensing element, is used with instrument, can be used for temperature survey, and converts temperature signal to the thermopower signal, converts the temperature of measured medium to through electric meter.The temperature of often using thermopair (or being called thermocouple) to come fluid media (medium) in the measuring channel in fields such as petrochemical complex and other chemical industry.
Thermocouple is a kind of consumable accessory, and the main part of thermocouple is processed by rare precious metals, and cost is high, and mostly its shell is insulating material, and the minority skin is enclosed with metal, in use very easily causes damage such as fracture.
In heat treating equipment, all need monitor technological temperature under a lot of situation with thermocouple, especially on semiconductor processing equipment, high temperature, harsh requirement such as pollution-free are to being that the thermocouple of shell relies on very big with the pottery.Be inserted into and use in the device interior thermal field and the use-pattern of thermocouple all is the slave unit outside usually, receive its serviceable life mounting means and condition influence very big.Existing mounting means all can not solve the problem of thermocouple non-artificial damage in use.
Summary of the invention
The technical matters that (one) will solve
The technical matters that the present invention will solve is: how a kind of flexible apparatus that is used to install thermocouple is provided, to solve the in use easy impaired problem of thermocouple.
(2) technical scheme
For solving the problems of the technologies described above, the invention provides the flexible erecting device of a kind of thermocouple, comprising:
The thermocouple guard block has the through hole that can hold thermocouple, comprises interconnective first one and second one;
Installing plate has first hole;
Fixed block is installed on the said installing plate, has groove on the fixed block; Said first one shape matches with the shape of said groove; So that said first one can be in said groove movable; Said second one is passed the side that said first hole reaches installing plate, and the flexible erecting device of thermocouple in use will be through this side and heat treating equipment connection.
Preferably, be coated with thermocouple retaining cover on the fixed block, have second hole that is used to assign thermocouple on the thermocouple retaining cover, the size in said second hole is less than said first the maximum physical dimension of exposed parts in the active procedure in said groove; The size in described second hole also should guarantee to have after thermocouple is installed the activity of certain angle simultaneously greater than the profile full-size of thermocouple insertion end.
Preferably, said first hole is a slotted hole, to increase the easy property of fitting operation, also can absorb various errors simultaneously.
Preferably, said thermocouple guard block is processed by insulating material or metal material; Fixed block is processed by insulating material; Thermocouple retaining cover and installing plate are processed by metal material.
Preferably, said insulating material is an agglomerated material, and said metal material is a stainless steel material.Comprise 304 (0Cr18Ni9), 316 (0Cr17Ni12Mo2), 316L (00Cr17Ni14Mo2), 321 stainless steels such as (1Cr18Ni9Ti);
Preferably, said agglomerated material is ceramic sintering material or glass powder agglomerated material.
Preferably, said insulating material is SiC.
Preferably, said first one has the profile that the thermocouple guard block is moved along with moving of object around contacting with second one in the same way.
Preferably, the said first one sphere that is shaped as.
Preferably, said second one right cylinder or the rectangular parallelepiped of being shaped as.
(3) beneficial effect
Beneficial effect of the present invention is: through the thermocouple guard block thermocouple is wrapped in wherein, has protected thermocouple to avoid damaging effectively; Through the matching relationship between thermocouple guard block and fixed block, make the thermocouple guard block that the scope of activities of certain angle can be arranged, can absorb the destructive power that comes from the outside to greatest extent like this, further protect thermocouple, thereby realize the flexible thermopair of installing; Thermocouple retaining cover is set on the fixed block, has not only fixed fixed block but also limited the axial float of thermocouple guard block.
Description of drawings
Fig. 1 is the axle side synoptic diagram of the embodiment of the invention;
Fig. 2 is the cross section view of Fig. 1;
Fig. 3 is the thermocouple guard block axle side synoptic diagram according to the embodiment of the invention;
Fig. 4 is fixed block axle side synoptic diagram (figure (a)) and the cross section view (figure (b)) according to the embodiment of the invention;
Fig. 5 is the installing plate axle side synoptic diagram according to the embodiment of the invention;
Fig. 6 is the axle side synoptic diagram according to the thermocouple retaining cover of the embodiment of the invention.
Reference numerals list:
1, installing plate; 2, fixed block; 3, thermocouple retaining cover; 4, thermocouple guard block
Embodiment
Below in conjunction with accompanying drawing and embodiment, specific embodiments of the invention is done further explain.Following examples are used to explain the present invention, but are not used for limiting scope of the present invention.
As shown in Figure 1, the erecting device of the embodiment of the invention comprises: installing plate 1, fixed block 2, thermocouple retaining cover 3 and thermocouple guard block 4.Thermocouple guard block 4 is a stupalith, can satisfy high temperature, the process requirements that no metallics pollutes, high temperature resistant the reaching more than 1000 ℃ of high-purity pottery.
Installing plate 1 has slotted hole as mounting hole on it, in installation process, plays the adjustment installation site, absorbs the effect of various errors.As shown in Figure 4, there is a ball recess in fixed block 2 central authorities, and first one that is used for the thermocouple guard block cooperates, can in this groove, swing or rotate for first one of the thermocouple guard block.
Can find out among Fig. 2; According to this preferred embodiment of the present invention, fixed block 2 is feasible with cooperating of thermocouple guard block 4, in use; Thermocouple guard block 4 has a plurality of degree of freedom; But these degree of freedom do not have negative effect to using the result, and the through hole in the thermocouple guard block 4 is used for installing thermocouple.Generally; There is certain clearance between thermocouple guard block 4 and the thermocouple installed; Like this; In use, thermocouple guard block 4 is that the rotation of axle can't drive the thermocouple that is installed in wherein and together rotates the possibility that the signal wire that does not also just exist thermocouple to pick out simultaneously is intertwined with self axis.Simultaneously, because thermocouple is installed in the inside of thermocouple guard block 4 loosely, so just can receive the extruding force that parts brought of the external world, thereby protect thermocouple effectively like one type of the housing of equipment or heater strip.Than the erecting device of current existing thermocouple, after thermocouple was installed, nearly all degree of freedom was all restrained, did not have movable space; Like this, in equipment running process, some parts is under the vibrations or the effect repeatedly of heat; Can deform or displacement, when such masterpiece was used on the thermocouple, the destruction that thermocouple will be stressed was so that fracture; Then there is not such problem in the present invention, because thermocouple guard block 4 is not fixed extremely, has a plurality of degree of freedom; When above-mentioned situation took place, certain single-degree-of-freedom of thermocouple guard block 4 will absorb such power, had so just guaranteed the excellent of thermocouple.And installing plate 1 also provides possibility for this activity of thermocouple guard block 4 with thermocouple retaining cover 3 (seeing Fig. 5 and 6).But thermocouple retaining cover 3 has limited the axial float of thermocouple guard block 4 simultaneously, can avoid like this causing thermocouple to break away from tested thermal field because of the axial float of thermocouple guard block 4.The thick black line in installing plate 1 left side is represented the outline line of the mounting hole (slotted hole) on the installing plate 1 among Fig. 2; Because installing plate 1 is arc (as shown in Figure 5), be that arcwall face is by the decision of equipment profile, for example here; Usually can thermocouple be installed on the body of heater; Because the outside surface of body of heater is a cylindricality, in order to reach good installation effect, so installing plate is done camber here.
Fig. 3 is a thermocouple guard block synoptic diagram, and these parts can be an integral body, also can be made up of an above part; First one of parts can be spherical other shapes in addition, like the almost spherical or the rectangle of band fillet.
Fig. 4 is the fixed block synoptic diagram, ball recess wherein for Fig. 3 situation under 4 structure match, to reach more satisfactory effect, in addition, its shape can also be other difformities.
Fig. 5 is the installing plate synoptic diagram, and middle slotted hole also can change circular hole or square hole or the hole of other shapes into, and purpose is to realize that the thermocouple guard block can be movable in scope of design.Other four slotted holes that are used to install also can be circular holes or not have such hole.
Thermocouple retaining cover 3 shown in Figure 6 can be installed on the fixed block 2, is installed as one with fixed block 2 and installing plate 1, plays fixed block 2 is fixed, and places restrictions on the effect that axial float takes place thermocouple guard block 4 simultaneously.
Illustrate application of the present invention below: as on the vertical heat treating equipment of the silicon chip more than eight inches; Temperature in the burner hearth need be measured through thermocouple, and thermocouple will extend into burner hearth inside from the body of heater outside and accomplish thermometric, and unavoidable ground will pass from the space of heater strip; This space is usually less than 10mm; And heater strip is after technological process repeatedly, or because cold and hot alternating action, or because the characteristics of the device structure gravity of self in addition; Size or variation up and down take place in the space that all will cause thermocouple to pass; This variation is a kind of test to thermocouple, and the present invention's use in this case then can sponge the destruction of this variation to thermocouple.
Above embodiment only is used to explain the present invention; And be not limitation of the present invention; The those of ordinary skill in relevant technologies field under the situation that does not break away from the spirit and scope of the present invention, can also be made various variations and modification; Therefore all technical schemes that are equal to also belong to category of the present invention, and scope of patent protection of the present invention should be defined by the claims.