CN102322817A - Method for quickly and automatically adjusting tested element detected by using Fizeau interferometer - Google Patents
Method for quickly and automatically adjusting tested element detected by using Fizeau interferometer Download PDFInfo
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Abstract
一种使用菲索干涉仪检测被测元件的快速自动调整的方法属于测量技术领域，检测方法如下步骤：安装装置，条纹判读，检测被测元件是否满足于要求；如果不满足，驱动调节装置，最终调节到干涉条纹为理想条纹且干涉条纹数目合适，程序结束。本发明可以对被测元件进行高精度且快速的姿态与位置调整，提高了调整的效率，降低由于人工判读对菲索干涉仪测量结果的影响，即进一步提高菲索干涉仪检测结果的重复性。
A fast and automatic adjustment method using a Fizeau interferometer to detect a measured element belongs to the field of measurement technology. The detection method has the following steps: installing a device, reading fringes, and detecting whether the measured element meets the requirements; if not, driving the adjustment device, Finally, adjust until the interference fringes are ideal and the number of interference fringes is appropriate, and the program ends. The invention can adjust the attitude and position of the measured element with high precision and fast, improves the efficiency of adjustment, reduces the influence of manual interpretation on the measurement results of the Fizeau interferometer, that is, further improves the repeatability of the detection results of the Fizeau interferometer .
Description
Technical field
The invention belongs to field of measuring technique, relate to a kind of method of using the Feisuo interferometer to detect the fast automatic adjustment of detected element.
Background technology
The precision of optical detection and repeatability directly affect the technical merit of manufacturing of processing and the optical system of optical element; Raising along with the optical system complexity; Improving constantly of optical element requirement on machining accuracy also had higher requirement to optical detection.
The face shape that the Feisuo interferometer is widely used in optical element is detected, and radius-of-curvature detects and optical system sees through aspects such as wavefront detection, is a kind of visual plant in the optical detection.General testing process is after detected element is installed, and the attitude and the position of artificial adjustment detected element are through the interference image on the observation display; Regulate repeatedly; Up to desirable interference fringe image occurring, testing result is finally exported in the detection of being correlated with through the Feisuo interferometer again.Above-mentioned method needs operating personnel to have certain interference detection knowledge and adjustment operating experience on the one hand, and is higher to operating personnel's technical requirement, and needs the manual work adjustment of repeated multiple times, just can obtain assay preferably; Owing to artificial interpretation interference fringe, different operation personnel are sentence read result and inequality often on the other hand, has therefore improved the repeatability of using the Feisuo interferometer to carry out optical detection, has just limited the accuracy of optical detection.
Summary of the invention
In order to address the above problem; The present invention has designed a kind of method of using the Feisuo interferometer to detect the fast automatic adjustment of detected element; Can carry out high precision and attitude and position adjustment fast to detected element; Improved the efficient of adjustment, reduced owing to the influence of artificial interpretation to Feisuo interferometer measurement result.
A kind of method of using the Feisuo interferometer to detect the fast automatic adjustment of detected element comprises the steps:
1) detected element is installed; Move detected element to the nominative testing position along accurate line slideway; Trip bar print image automatic interpretation program; The PC interface reads in the interference fringe image that the Feisuo interferometer is gathered in real time, carries out the pre-service of interference fringe image, removes noise and strengthens the image that picture contrast obtains interference fringe;
2) utilize the self-adaption binaryzation algorithm computation to obtain the binary image of interference fringe, carry out geometric center and whole audience phase place that the pixel projection operational analysis obtains interference fringe, and then obtain the adjusting parameter of detected element;
3) when interference fringe be desirable striped and number when suitable, if the adjusting parameter of detected element meets the demands, then use the Feisuo interferometer to carry out interferometry, accomplish the adjustment of detected element; If when the adjusting parameter of detected element does not meet the demands, then carry out step 4);
4) PC analyzes the interference fringe feedback regulation once more and adopts the concrete adjusting parameter of PID (PID) control algolithm correction, through driving pitch tilt direction adjustment device, vertical-horizontal direction adjustment device, objective table and accurate line slideway the attitude of detected element is adjusted;
5) repeating step 2) to step 4), finally being adjusted to interference fringe is that desirable striped and interference fringe number are suitable, accomplishes the adjustment of detected element.
Characteristics such as it is fast that the present invention has governing speed, and dynamic perfromance is good.Reduced technical requirement, and improved and used the Feisuo interferometer to carry out the efficient of optical detection and the repeatability of testing result operating personnel; Calculate measuring method and replace artificial striped interpretation, improved interpretation speed and accuracy, algorithm principle is simple, and operation efficiency is high, can realize the interpretation of dynamic fringe image real-time.
Description of drawings
Fig. 1 is the structural drawing of Feisuo interferometer detected element automatic adjustment system of the present invention.
Fig. 2 is a kind of method flow diagram that uses the Feisuo interferometer to detect the fast automatic adjustment of detected element of the present invention.
Among the figure: 1, Feisuo interferometer, 2, detected element, 3, the pitch tilt direction adjustment device, 4, the vertical-horizontal direction adjustment device, 5, objective table, 6, accurate line slideway.
Embodiment
As shown in Figure 1, the employed Feisuo interferometer of the inventive method detected element automatic adjustment system comprises pitch tilt direction adjustment device 3, vertical-horizontal direction adjustment device 4, objective table 5 and accurate line slideway 6; Said pitch tilt direction adjustment device 3 is fixedly mounted on the objective table 5 with vertical-horizontal direction adjustment device 4; Objective table 5 is done linear movement on accurate line slideway 6.
Said pitch tilt direction adjustment device 3 passes through fixedly detected element 2 of mechanical clamp.
As shown in Figure 2, a kind of method of using the Feisuo interferometer to detect the fast automatic adjustment of detected element of the present invention comprises the steps:
1) detected element 2 is installed; Move detected element 2 to the nominative testing position along accurate line slideway 6; Trip bar print image automatic interpretation program; The PC interface reads in the interference fringe image that Feisuo interferometer 1 is gathered in real time, carries out the pre-service of interference fringe image, removes noise and strengthens the image that picture contrast obtains interference fringe;
2) utilize the self-adaption binaryzation algorithm computation to obtain the binary image of interference fringe, carry out geometric center and whole audience phase place that the pixel projection operational analysis obtains interference fringe, and then obtain the adjusting parameter of detected element 2;
3) when interference fringe be desirable striped and number when suitable, if the adjusting parameter of detected element 2 meets the demands, then use Feisuo interferometer 1 to carry out interferometry, accomplish the adjustment of detected element 2; If when the adjusting parameter of detected element 2 does not meet the demands, then carry out step 4);
4) PC analyzes the interference fringe feedback regulation once more and adopts the concrete adjusting parameter of pid control algorithm correction, adjusts through the attitude that drives pitch tilt direction adjustment device 3, vertical-horizontal direction adjustment device 4, objective table 5 and 6 pairs of detected element 2 of accurate line slideway;
5) repeating step 2) to step 4), finally being adjusted to interference fringe is that desirable striped and interference fringe number are suitable, accomplishes the adjustment of detected element 2.
Through reading the interference fringe image that Feisuo interferometer 1 is gathered in real time; Can be divided into two kinds of situation according to detected element surface shape: if detected element 2 surfaces are the plane; Then desirable stripe pattern is parallel interference fringe, therefore only need adjust pitch tilt direction adjustment device 3.Through plane striped interpretation algorithm real-time interference fringe image is analyzed; Obtain the pitch tilt information of detected element 2; Adjustment pitch tilt direction adjustment device 3 is analyzed interference fringe once more and is adopted the concrete adjusting parameter of pid control algorithm correction, further optimizes the respective process of regulating; Regulate pitch tilt direction adjustment device 3 once more, the suitable adjustment of then accomplishing plane detected element 2 of interference fringe number; If detected element 2 surfaces are sphere; Then desirable stripe pattern should be donut; Therefore need carry out the two dimension adjustment to the direction perpendicular to interferometer 1 optical axis of detected element and carry out the one dimension adjustment with the direction of parallel interferometer light path; Through sphere interference fringe interpretation algorithm real-time interference fringe image is analyzed, obtained the out of focus information of the runout information correspondence position of detected element optical axis and interferometer optical axis, adjust with objective table 5 through the driver control vertical-horizontal direction adjustment device 4 of adjustment platform; Analyze interference fringe and the same concrete adjusting parameter of pid control algorithm correction that adopts once more; Further optimize the respective process of regulating, regulate vertical-horizontal direction adjustment device 4 and objective table 5 once more, the suitable adjustment of then accomplishing sphere detected element 2 of interference fringe number.
Drive the adjusting program and adopt pid control algorithm, and quote the adjusting protection mechanism, improving regulating system speed, on the basis of dynamic perfromance, prevent that the regulating system motion is too fast or shake influence detected element.
Claims (2)
1. a method of using the Feisuo interferometer to detect the fast automatic adjustment of detected element is characterized in that this method comprises the steps:
1) detected element (2) is installed; Move detected element (2) to the nominative testing position along accurate line slideway (6); Trip bar print image automatic interpretation program; The PC interface reads in the interference fringe image that Feisuo interferometer (1) is gathered in real time, carries out the pre-service of interference fringe image, removes noise and strengthens the image that picture contrast obtains interference fringe;
2) utilize the self-adaption binaryzation algorithm computation to obtain the binary image of interference fringe, carry out geometric center and whole audience phase place that the pixel projection operational analysis obtains interference fringe, and then obtain the adjusting parameter of detected element (2);
3) when interference fringe be desirable striped and number when suitable, if the adjusting parameter of detected element (2) meets the demands, then use Feisuo interferometer (1) to carry out interferometry, accomplish the adjustment of detected element (2); If when the adjusting parameter of detected element (2) does not meet the demands, then carry out step 4);
4) PC analyzes the interference fringe feedback regulation once more and adopts the concrete adjusting parameter of pid control algorithm correction, through driving pitch tilt direction adjustment device (3), vertical-horizontal direction adjustment device (4), objective table (5) and accurate line slideway (6) attitude of detected element (2) is adjusted;
5) repeating step 2) to step 4), finally being adjusted to interference fringe is that desirable striped and interference fringe number are suitable, accomplishes the adjustment of detected element (2).
2. a kind of method of using the Feisuo interferometer to detect the fast automatic adjustment of detected element according to claim 1; It is characterized in that; Said detected element is divided into two kinds of situation: if detected element (2) surface is the plane; Then desirable stripe pattern is parallel interference fringe, needs to be installed in detected element (2) on the pitch tilt direction adjustment device (3), and PC adjustment pitch tilt direction adjustment device (3) reaches the assigned address of tested requirement; If detected element (2) surface is a sphere, then desirable stripe pattern is a donut, needs to be installed in detected element (2) on the vertical-horizontal direction adjustment device (4), and PC adjustment vertical-horizontal direction adjustment device (4) reaches the assigned address of tested requirement.
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| CN 201110157810 CN102322817B (en) | 2011-06-13 | 2011-06-13 | Method for quickly and automatically adjusting tested element detected by using Fizeau interferometer |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104515482A (en) * | 2014-12-17 | 2015-04-15 | 中国科学院长春光学精密机械与物理研究所 | Interference fringe widening method for white-light interferometer |
| CN109520525A (en) * | 2018-11-29 | 2019-03-26 | 中国科学院长春光学精密机械与物理研究所 | The theodolite light axis consistency method of inspection, device, equipment and readable storage medium storing program for executing |
| CN110332905A (en) * | 2019-07-22 | 2019-10-15 | 中国工程物理研究院激光聚变研究中心 | Any attitude optical element surface shape detection apparatus in place and method |
| CN110824652A (en) * | 2018-08-07 | 2020-02-21 | 宁波舜宇光电信息有限公司 | Method for assembling structured light projection module |
| CN111928819A (en) * | 2020-07-31 | 2020-11-13 | 西南交通大学 | Instrument for horizontal detection and horizontal detection method |
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| JP2001108417A (en) * | 1999-10-04 | 2001-04-20 | Mitsutoyo Corp | Optical shape measuring instrument |
| US20050134851A1 (en) * | 2003-12-22 | 2005-06-23 | Qed Technologies, Inc. | Method for calibrating the geometry of a multi-axis metrology system |
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| TW201024658A (en) * | 2008-12-31 | 2010-07-01 | Univ Chung Yuan Christian | Surface profile measurement device having auto-focusing function and method thereof |
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2011
- 2011-06-13 CN CN 201110157810 patent/CN102322817B/en not_active Expired - Fee Related
Patent Citations (4)
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| JP2001108417A (en) * | 1999-10-04 | 2001-04-20 | Mitsutoyo Corp | Optical shape measuring instrument |
| US20050134851A1 (en) * | 2003-12-22 | 2005-06-23 | Qed Technologies, Inc. | Method for calibrating the geometry of a multi-axis metrology system |
| CN1885097A (en) * | 2005-06-22 | 2006-12-27 | 中国科学院长春光学精密机械与物理研究所 | Method for adjusting aspherical detection optical system by computer |
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Non-Patent Citations (2)
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104515482A (en) * | 2014-12-17 | 2015-04-15 | 中国科学院长春光学精密机械与物理研究所 | Interference fringe widening method for white-light interferometer |
| CN104515482B (en) * | 2014-12-17 | 2017-06-09 | 中国科学院长春光学精密机械与物理研究所 | White light interferometer interference fringe method for widening |
| CN110824652A (en) * | 2018-08-07 | 2020-02-21 | 宁波舜宇光电信息有限公司 | Method for assembling structured light projection module |
| CN110824652B (en) * | 2018-08-07 | 2021-12-07 | 宁波舜宇光电信息有限公司 | Method for assembling structured light projection module |
| CN109520525A (en) * | 2018-11-29 | 2019-03-26 | 中国科学院长春光学精密机械与物理研究所 | The theodolite light axis consistency method of inspection, device, equipment and readable storage medium storing program for executing |
| CN110332905A (en) * | 2019-07-22 | 2019-10-15 | 中国工程物理研究院激光聚变研究中心 | Any attitude optical element surface shape detection apparatus in place and method |
| CN110332905B (en) * | 2019-07-22 | 2024-05-07 | 中国工程物理研究院激光聚变研究中心 | Device and method for detecting in-situ surface shape of optical element in any posture |
| CN111928819A (en) * | 2020-07-31 | 2020-11-13 | 西南交通大学 | Instrument for horizontal detection and horizontal detection method |
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| CN102322817B (en) | 2013-06-19 |
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