CN102320555A - Single nanometer hole preparation method based on glass micro tube and medium identification method - Google Patents

Single nanometer hole preparation method based on glass micro tube and medium identification method Download PDF

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Publication number
CN102320555A
CN102320555A CN201110196956XA CN201110196956A CN102320555A CN 102320555 A CN102320555 A CN 102320555A CN 201110196956X A CN201110196956X A CN 201110196956XA CN 201110196956 A CN201110196956 A CN 201110196956A CN 102320555 A CN102320555 A CN 102320555A
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glass
medium
nano
pore
passage
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CN201110196956XA
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Chinese (zh)
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沙菁洁
陈云飞
张磊
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Southeast University
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Southeast University
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Abstract

The invention relates to a single nanometer hole preparation method based on a glass micro tube and a medium identification method. The single nanometer hole preparation method based on the glass micro tube comprises the following steps that: firstly, solid paraffin (2) is sealed in the glass micro tube (1), then, the glass micro tube (1) sealed with the solid paraffin (2) is heated, sealed by fusing and broken through pulling, a conical nanometer hole passage (10) is formed inside the glass sealed by fusing, finally, acetone is adopted for removing the paraffin, and a diamond grinding wheel is used for grinding the fusing sealed head part of the glass tube so that the hole communication is realized by the inside nanometer passage. A method for medium identification for the single nanometer hole glass micro tube comprises the following steps that: both ends of the glass base nanometer hole passage (10) are connected with two fluid units, voltage is respectively exerted on two ends of the nanometer hole passage to generate ion currents, when the diameter of the nanometer hole passage is similar to the diameter of a medium to be identified and when a heterogeneous medium pass through the nanometer hole, the weak change of the current can be caused through the medium blockage, and at the time, the medium in the passage is further identified through detecting the change of the ion current in the nanometer hole passage.

Description

Based on the single nano-pore preparation of glass microtubule and the method for identification medium
Technical field
The present invention relates to the making of a kind of glass-base nanometer hole (passage) device, the purpose that amplitude of variation through the caused modulated current of the interior conductive medium of nano-pore (passage) in this device of identification and duration reach this medium of identification.
Background technology
At present, the preparation in solid nano hole is mainly carried out on the solid film material, and method has: 1. ion beam is carved, and a nano-pore processed by ion beam sputtering tafoni membrane material or the horizontal transportation of excitor substance is shrunk to a nano-pore; 2. microscopic carvings casting is processed mother matrix with photoetching technique earlier, again metal deposition preparation nano-pore on PDMS; 3. the track etching of diving, thin polymer film produce the track of diving along the incident ion path after by high-energy heavy ion irradiation, the more potential ion trajectory of film are carried out chemical etching, thereby constitute a pore membrane; 4. high-power electron beam is induced fine setting, and high strength electronics stream can make material surface modifying, finely tunes the diameter of manufactured nano-pore (its available FIB boring or beamwriter lithography obtain).But film nano hole processing cost is higher; Because these methods need expensive manufacturing equipment or special material, such as the electron beam of the high focusing of high energy of the focused ion beam system of SEM (SEM), transmission electron microscope (TEM) or have the polymer film of low-density ion trajectory; Its mechanical stability is relatively poor: be vulnerable to the restriction of the Mechanics of Machinery characteristic of membrane structure; Surface tension between film and the solution also very easily influences the absorption stability of film and substrate, also has salting liquid burn into thermal expansion deformation energy restricting the service life of solid film nano-pore; Its noise effect is bigger: the thin-film material of insulation generally all is deposited on the matrix; The stressing conditions of film and matrix all can exert an influence to nano-pore structure stability under the bonding situation of two kinds of different materials, various fields (solution, temperature, vibration) environment; It is big that thereby experiment obtains the modulated current scope of waving, and noise effect is remarkable.
Summary of the invention
Technical problem: in order to overcome the deficiency of above-mentioned prior art; The invention provides a kind of Mechanics of Machinery characteristic and structural stability than higher, have service life and low-level noise effect preferably based on the single nano-pore preparation of glass microtubule and the method for identification medium.
Technical scheme: the single nano-pore preparation method based on the glass microtubule of the present invention is: at first at glass microtubule sealing paraffin wax solid; And then the glass microtubule of sealing paraffin wax solid is added heat-sealable break; At the inner nano-pore passage that forms a taper of the glass of sealing by fusing; Remove paraffin with acetone at last, and, make inner nanochannel realize that the hole is logical with the head of diamond wheel grinding glass tube sealing by fusing.
The method that the glass microtubule of single nano-pore of employing the method for the invention preparation carries out the identification medium is: the two ends of glass-base nanometer hole path are connected two fluid pool unit; Two ends along the nano-pore passage apply voltage generation gas current respectively; When nano-pore channel diameter and the medium diameter of treating identification near the time; When heterogeneous medium the time through nano-pore; Because the obstruction of medium will cause the faint variation of electric current, can pass through this moment to detect nano-pore passage intermediate ion change in current, and then the medium in the identification passage.
Beneficial effect: nano-pore diameter of the present invention is fit to the size range of different medium at 1-100nm.Because the nano-pore somewhat larger in diameter is in the diameter of testing medium, so possess higher sensitivity.Because nanochannel is continuous tapered channel, adds that this nano-pore has unified and clear and definite material behavior, so this nano-pore has higher structural stability.
Prepare single nano-pore based on the glass microtubule, low preparation method is simple for cost, and the nanometer single hole structural strength that makes is high, signal to noise ratio is lower, sensitivity is higher, is hopeful large-scale application in nano fluid sensor in the future, reduces the cost that detects greatly.
Description of drawings
Fig. 1 is a glass microtubule sketch map,
Most advanced and sophisticated sketch map when Fig. 2 is the stretching of glass microtubule,
Fig. 3 is the sketch map of glass nano hole identification medium.
Have in the drawings: glass microtubule 1, paraffin solid 2, the glass 3 of molten state, paraffin gas molecule 4, Parafilm 5, radial contraction direction 6, horizontal stretch direction 7, glass tube walls 8, heterogeneous medium 9, the voltage 11 that adds.
The specific embodiment
Present invention includes the manufacture craft and the flow process in glass-based solid nano hole; At first in glass microchannel sealing paraffin wax; And then the glass microtubule that will contain paraffin adds heat-sealable and breaks, and at the inner nanochannel that forms a taper of the glass of sealing by fusing, removes paraffin with acetone at last; And, make inner nanochannel realize that the hole is logical with the head of diamond wheel grinding glass tube sealing by fusing.
The present invention adopts above-mentioned making flow process; On the basis of glass microtubule, made up the nanochannel of taper, the function of nano-pore can be realized in the hole of cone point in the passage, and the glass-base nanometer hole is connected two fluid pool unit; Two ends along nano-pore apply voltage generation gas current respectively; When nano-pore diameter and the medium diameter of treating identification near the time, when heterogeneous medium through nano-pore the time, because the obstruction of medium will cause the faint variation of electric current; Can pass through this moment to detect nanochannel intermediate ion change in current, and then the medium in the identification passage.
As shown in Figure 1, be the blank of a glass microtubule, at first suck a spot of paraffin in the inner capillary of microtubule, paraffin is evenly distributed on the inwall of glass microtubule; The two ends of glass microtubule are encapsulated with paraffin, guarantee that glass microtubule inside is airtight; To the glass melting temperature, the paraffin that is heated the zone becomes gaseous state, and (melting point of paraffin wax is 70 ℃, and boiling point is 350 ℃ to glass microtubule local heat; Paraffin is solid-state being lower than under the situation of melting temperature; Be gaseous state more than 400 ℃) because both sides all are that paraffin is solid-state, be equivalent to this part gaseous paraffin is sealed up; The material of equal in quality, the gaseous state volume is greater than solid-state volume; Because this part paraffin is by the solid-state gaseous state that changes into; And limited volume, so the gas pressure intensity overgauge atmospheric pressure of this part sealing, so in glass microtubule drawing process; The pressure of this portion gas has the trend that the opposing glass tube shrinks bonding always; Break up to glass tube, gas discharges, interior exocoel pressure equilibrium.This process just is equivalent to the constantly situation of ventilation of optical fiber.Along with the outfield temperature reduces, gaseous paraffin is frozen into solid-state, and volume further dwindles, and induces the glass inner chamber further to shrink.
When the glass tube fusion drawn, the gaseous paraffin molecular press of limited volume is powerful to have the trend of opposing compression in standard pressure, as shown in Figure 2 at last, forms the physics occupy-place at the tip portion Parafilm, and glass coats Parafilm and forms and receive passage.Can easily remove Parafilm with the chemolysis method at last, realize that the hole in glass nano hole is logical.The diameter of the nanometer single hole of this method preparation is fit to the size range of different medium at 1-100nm.Because the nano-pore somewhat larger in diameter is in the diameter of testing medium, so possess higher sensitivity.Low preparation method is simple for this method cost, and the nanometer single hole structural strength that makes is high, signal to noise ratio is lower, sensitivity is higher, and large-scale application in nano fluid sensor, is reduced the cost that detects greatly.

Claims (2)

1. single nano-pore preparation method based on the glass microtubule; It is characterized in that,, and then the glass microtubule (1) of sealing paraffin wax solid (2) is added heat-sealable break at first at glass microtubule (1) sealing paraffin wax solid (2); At the inner nano-pore passage (10) that forms a taper of the glass of sealing by fusing; Remove paraffin with acetone at last, and, make inner nanochannel realize that the hole is logical with the head of diamond wheel grinding glass tube sealing by fusing.
2. a glass microtubule that adopts single nano-pore of the said method of claim 1 preparation carries out the method for identification medium; It is characterized in that; The two ends of glass-base nanometer hole path (10) are connected two fluid pool unit, apply voltage respectively along the two ends of nano-pore passage and produce gas current, when nano-pore channel diameter and the medium diameter of treating identification near the time; When heterogeneous medium the time through nano-pore; Because the obstruction of medium will cause the faint variation of electric current, can pass through this moment to detect nano-pore passage intermediate ion change in current, and then the medium in the identification passage.
CN201110196956XA 2010-12-07 2011-07-06 Single nanometer hole preparation method based on glass micro tube and medium identification method Pending CN102320555A (en)

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CN201010577121 2010-12-07
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Cited By (6)

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CN107356580A (en) * 2017-06-27 2017-11-17 南京大学 A kind of nanometer single hole based on dispersed nano lamella and its preparation method and application
CN107416759A (en) * 2017-03-21 2017-12-01 东南大学 A kind of nanojet microdriver, its preparation method and its application
CN108231950A (en) * 2016-12-22 2018-06-29 中国科学院上海高等研究院 Semiconductor homo-substrate and preparation method thereof, the preparation method of homogeneity epitaxial layer
CN109824012A (en) * 2019-01-18 2019-05-31 广东工业大学 A kind of nano-pore accurate manufacture process
CN110231334A (en) * 2019-06-14 2019-09-13 福州大学 A kind of method of taper micron openings effective aperture regulation electrochemiluminescence signal
CN112034741A (en) * 2020-08-26 2020-12-04 中国科学院重庆绿色智能技术研究院 Liquid-phase micro-nano processing method and equipment

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US20060143895A1 (en) * 2004-12-30 2006-07-06 Hon Hai Precision Industry Co., Ltd. Process for manufacturing a reference leak
CN1987459A (en) * 2006-12-14 2007-06-27 上海交通大学 Method for producing biological sensor
CN101219873A (en) * 2007-01-12 2008-07-16 上海船舶工艺研究所 Nano-porous thermal insulating material and method for producing the same
CN101349704A (en) * 2008-09-04 2009-01-21 南京大学 Micro-nano flow control high-efficiency enriching and purifying chip and rapid preparation method thereof
CN101774532A (en) * 2010-01-29 2010-07-14 大连海事大学 Method for machining nanometer channel on microfluid chip

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Publication number Priority date Publication date Assignee Title
US5148307A (en) * 1988-07-17 1992-09-15 Raoul Kopelman Nanometer dimension optical device with microimaging and nanoillumination capabilities
US20060143895A1 (en) * 2004-12-30 2006-07-06 Hon Hai Precision Industry Co., Ltd. Process for manufacturing a reference leak
CN1987459A (en) * 2006-12-14 2007-06-27 上海交通大学 Method for producing biological sensor
CN101219873A (en) * 2007-01-12 2008-07-16 上海船舶工艺研究所 Nano-porous thermal insulating material and method for producing the same
CN101349704A (en) * 2008-09-04 2009-01-21 南京大学 Micro-nano flow control high-efficiency enriching and purifying chip and rapid preparation method thereof
CN101774532A (en) * 2010-01-29 2010-07-14 大连海事大学 Method for machining nanometer channel on microfluid chip

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108231950A (en) * 2016-12-22 2018-06-29 中国科学院上海高等研究院 Semiconductor homo-substrate and preparation method thereof, the preparation method of homogeneity epitaxial layer
CN108231950B (en) * 2016-12-22 2019-12-10 中国科学院上海高等研究院 Semiconductor homogeneous substrate and preparation method thereof, and preparation method of homogeneous epitaxial layer
CN107416759A (en) * 2017-03-21 2017-12-01 东南大学 A kind of nanojet microdriver, its preparation method and its application
CN107416759B (en) * 2017-03-21 2019-03-29 东南大学 A kind of nanojet microdriver, preparation method and its application
CN107356580A (en) * 2017-06-27 2017-11-17 南京大学 A kind of nanometer single hole based on dispersed nano lamella and its preparation method and application
CN107356580B (en) * 2017-06-27 2020-04-03 南京大学 Nano single hole based on monodisperse nanosheet layer and preparation method and application thereof
CN109824012A (en) * 2019-01-18 2019-05-31 广东工业大学 A kind of nano-pore accurate manufacture process
CN109824012B (en) * 2019-01-18 2020-01-17 广东工业大学 Accurate manufacturing method of nano-pore
CN110231334A (en) * 2019-06-14 2019-09-13 福州大学 A kind of method of taper micron openings effective aperture regulation electrochemiluminescence signal
CN110231334B (en) * 2019-06-14 2021-09-28 福州大学 Method for regulating electrochemiluminescence signal by using effective aperture of conical micron hole
CN112034741A (en) * 2020-08-26 2020-12-04 中国科学院重庆绿色智能技术研究院 Liquid-phase micro-nano processing method and equipment
CN112034741B (en) * 2020-08-26 2021-08-10 中国科学院重庆绿色智能技术研究院 Liquid-phase micro-nano processing method and equipment

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Application publication date: 20120118