CN102310061A - Ultrasonic silicon material cleaning device capable of driving silicon material to rotate - Google Patents
Ultrasonic silicon material cleaning device capable of driving silicon material to rotate Download PDFInfo
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- CN102310061A CN102310061A CN201110188734A CN201110188734A CN102310061A CN 102310061 A CN102310061 A CN 102310061A CN 201110188734 A CN201110188734 A CN 201110188734A CN 201110188734 A CN201110188734 A CN 201110188734A CN 102310061 A CN102310061 A CN 102310061A
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- silicon material
- transmission bracket
- bracket arm
- rotary tray
- cleaning equipment
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Abstract
The invention discloses an ultrasonic silicon material cleaning device capable of driving a silicon material to rotate, which comprises a rack. A cleaning tank and an ultrasonic generator are arranged on the rack, an ultrasonic vibration box is arranged in the cleaning tank, the rack is provided with a transmission bracket device, the transmission bracket device comprises a connecting rod, one end of the connecting rod is fixedly connected with a transmission bracket arm, and the other end of the connecting rod is movably connected with a lifting device; the transmission bracket arm is hinged on a rotating shaft on the rack and is provided with a transmission device, the end of the transmission bracket arm is movably provided with a rotary tray, the rotary tray is arranged in the cleaning tank, the transmission device can drive the rotary tray to rotate, and a silicon material tooling basket is arranged on the rotary tray; and the lifting device is fixedly arranged on the rack, and the lifting device moves up and down to drive the transmission bracket arm to rotate around the rotating shaft. The silicon material cleaning effect and the operating safety of workers are greatly improved.
Description
Technical field
The present invention relates to the ultrasonic cleaning equipment of silicon material.
Background technology
The silicon material is a kind of very important semi-conducting material; Can be used for making multiple components and parts such as diode, triode, luminescent device, pressure cell, solar battery sheet, be widely used in fields such as radio engineering, automatic field, signalling arrangement, power engineering.
Usually there are oxide layer and metal ion in silicon material surface, needs with cleaning removing its surperficial oxide layer and metal ion with acid solution earlier, thereby and then carries out water rinse and reach the purpose that cleans up.The silicon material cleaning device that uses at present, its structure mainly comprises: frame, frame are provided with rinse bath and supersonic generator, are provided with the ultrasonic wave Vibration Box in the rinse bath, are provided with ultrasonic transducer in the ultrasonic wave Vibration Box, are placed with silicon material frock basket in the rinse bath.Silicon material frock basket is the frock of a kind of shape of hollow out as basket, and the workman holds into the silicon material in silicon material frock basket during cleaning, silicon material frock basket is put in the acid solution in the rinse bath again, and acid solution gets into silicon material frock basket and the silicon material in the basket is cleaned.The silicon material is deposited in the silicon material frock basket, the silicon material on silicon stockpile top layer with can be cleaned after acid solution fully contacts totally, and the inner silicon material of silicon stockpile can't fully contact with acid solution, so can't once clean up.Above-mentioned cleaning device, the cleaning performance of silicon material is poor, and cleans and to waste time and energy, and human body directly contacts with acid solution, and acid solution can be corroded skin, and operational danger is higher.
Summary of the invention
The technical problem of solution required for the present invention is: will provide a kind of and can effectively clean the silicon material, and the silicon material ultrasonic cleaning equipment that the silicon material is rotated of avoiding human body and acid solution directly to contact.
The object of the invention is realized through following technical scheme: the silicon material ultrasonic cleaning equipment that the silicon material is rotated; Comprise frame, frame is provided with rinse bath and supersonic generator, is provided with the ultrasonic wave Vibration Box of band ultrasonic transducer in the rinse bath; Frame is provided with the transmission bracket device; The structure of described transmission bracket device comprises: connecting rod, and an end of connecting rod is fixedly connected with the transmission bracket arm, and the other end of connecting rod and lowering or hoisting gear flexibly connect; Described transmission bracket arm is articulated in rotating shaft place on the frame; On the transmission bracket arm transmission device is installed; The end of transmission bracket arm is movably set with Rotary tray; Described Rotary tray is arranged in the rinse bath, and described transmission device can drive Rotary tray and rotate, and silicon material frock basket is installed on the Rotary tray; Described lowering or hoisting gear is fixedly mounted on the frame, and the jacking of lowering or hoisting gear can make the transmission bracket arm rotate around the axis with descending.
Further; The described silicon material ultrasonic cleaning equipment that the silicon material is rotated, wherein, described transmission device comprises: be installed in the rotary electric machine on the transmission bracket arm; The axle of rotary electric machine is provided with driving gear; Driving gear is meshed with some driven gears, and the circumference of described Rotary tray is provided with fluted disc, and fluted disc is meshed with driven gear.
Further, the described silicon material ultrasonic cleaning equipment that the silicon material is rotated, wherein, described lifting device structure is: be fixedly mounted on the cylinder on the frame, the top of the piston rod of cylinder and the other end of connecting rod are hinged.
Further, the described silicon material ultrasonic cleaning equipment that the silicon material is rotated, wherein, described Rotary tray is provided with fixture block, fixture block and the clamping mutually of silicon material frock basket.
Further, the described silicon material ultrasonic cleaning equipment that the silicon material is rotated, wherein, described transmission bracket arm is provided with baffle plate, and baffle plate covers in rotary electric machine and driven gear.
Further, the described silicon material ultrasonic cleaning equipment that the silicon material is rotated, wherein, the end of described transmission bracket arm is provided with limit shaft, and described Rotary tray is movably arranged on the limit shaft.
Beneficial effect of the present invention: the silicon material frock basket that the silicon material will be housed is installed on the Rotary tray; Rotary tray drives silicon material frock basket and silicon material wherein rotates together; The silicon material is fully contacted with acid solution, thereby the silicon material is cleaned up, improved the efficient that the silicon material cleans greatly; The workman only need utilize the liter of lowering or hoisting gear or fall, just can the silicon material in the silicon material frock basket that be installed on the Rotary tray be put into or broken away from the acid solution of rinse bath, has avoided contacting of human body and acid solution, has improved the security of operation greatly.
Description of drawings
Fig. 1 is the structural representation that can make the silicon material ultrasonic cleaning equipment of silicon material rotation of the present invention.
Fig. 2 of the present inventionly can make Rotary tray in the silicon material ultrasonic cleaning equipment that the silicon material rotates that silicon material frock basket is sent to the structural representation when cleaning in the rinse bath.
Fig. 3 is the structural representation that can make transmission bracket arm portion in the silicon material ultrasonic cleaning equipment that the silicon material rotates of the present invention.
Fig. 4 is the right TV structure sketch map of Fig. 3.
Among Fig. 1～Fig. 4: 1, frame, 2, rinse bath, 3, supersonic generator, 4, the ultrasonic wave Vibration Box, 5, silicon material frock basket; 6, connecting rod, 7, the transmission bracket arm, 8, cylinder, 81, piston rod, 9, rotating shaft; 10, rotary electric machine, 101, driving gear, 102, first driven gear, 103, second driven gear, the 104, the 3rd driven gear; 11, limit shaft, 12, Rotary tray, 121, fluted disc, 122, fixture block, 13, baffle plate.
The specific embodiment
Below in conjunction with accompanying drawing and specific embodiment the present invention is done further detailed description.
Like Fig. 1～shown in Figure 4; The silicon material ultrasonic cleaning equipment that the silicon material is rotated comprises frame 1, and frame 1 is provided with rinse bath 2 and supersonic generator 3; Be provided with the ultrasonic wave Vibration Box 4 of band ultrasonic transducer in the rinse bath 2; Frame 1 is provided with the transmission bracket device, and the structure of described transmission bracket device comprises: connecting rod 6, and an end of connecting rod 6 is fixedly connected with transmission bracket arm 7; The top of the other end of connecting rod 6 and cylinder 8 upper piston rods 81 is hinged, and described cylinder 8 is fixedly mounted on the frame 1.Transmission bracket arm 7 is articulated in rotating shaft 9 places on the frame 1, and rotary electric machine 10 is installed on the transmission bracket arm 7, and the axle of rotary electric machine 10 is provided with driving gear 101; Driving gear 101 is meshed with first driven gear 102, first driven gear 102 and 103 engagements of second driven gear, second driven gear 103 and 104 engagements of the 3rd driven gear; The end of transmission bracket arm 7 is provided with limit shaft 11; Be movably installed with Rotary tray 12 on the limit shaft 11, the excircle of Rotary tray 12 is provided with fluted disc 121, and fluted disc 121 is meshed with the 3rd driven gear 104; Rotary tray 12 is provided with fixture block 122, fixture block 122 and 5 clampings mutually of silicon material frock basket; Described Rotary tray 12 is arranged in the rinse bath 2; Described transmission bracket arm 7 is provided with baffle plate 13, and baffle plate 13 covers in rotary electric machine 10 and each driven gear; The jacking of the piston rod 81 of cylinder 8 can make transmission bracket arm 79 rotate around the shaft with descending.Be provided with three driven gears among the present invention on the transmission bracket arm 7, the quantity of driven gear can be confirmed according to the distance between rotary electric machine 10 and the Rotary tray 12.
As shown in Figure 1, before the cleaning, the piston rod 81 of cylinder 8 is positioned at least significant end, and Rotary tray 12 is positioned at the operating surface position on the rinse bath 2, and operating personnel will load needs the silicon material frock basket 5 of the silicon material of cleaning to be connected on the Rotary tray 12.As shown in Figure 2, piston rod 81 beginning jackings, transmission bracket arm 7 rotates around rotating shaft 9; Until silicon material frock basket 5 all is immersed in the acid solution, open rotary electric machine 10, as shown in Figure 4; Driving gear 101 on 10 of the rotary electric machines drives first driven gear 102 and rotates; First driven gear 102 drives second driven gear 103 and rotates, and second driven gear 103 drives the 3rd driven gear 104 and rotates, and the 3rd driven gear 103 drives Rotary tray 12 and rotates; Rotate the rotation cleaning of beginning silicon material together thereby drive the silicon material frock basket 5 and the silicon material that are installed on the Rotary tray 12.The ultrasonic transducer that the ultrasonic wave that supersonic generator 3 sends in cleaning process drives in the ultrasonic wave Vibration Box 4 produces vibration, helps to clean.To be cleaned finishing; As shown in Figure 1; Piston rod 81 descends; Transmission bracket arm 79 upwards rotates the operating surface of silicon material frock basket 5 being held out to the operator until Rotary tray 12 around the shaft from acid solution, the operator can and clean the silicon material that finishes with silicon material frock basket 5 and take out, and promptly accomplishes one of silicon material and takes turns cleaning.
Beneficial effect of the present invention: the transmission bracket device drives the rotation of the silicon material in the silicon material frock basket on the Rotary tray through transmission devices such as rotary electric machines, thereby carries out ultrasonic waves for cleaning, and the silicon material is fully contacted with acid solution, has improved the cleaning efficiency of silicon material greatly; The transmission bracket device rotates the transmission bracket arm through lowering or hoisting gears such as cylinders in rotating shaft; The silicon material frock basket that the silicon material is housed is sent in the rinse bath cleans; And clean and to leave acid solution after again silicon material frock basket being held up after finishing; Avoided like this that the direct of acid solution contacts in human body and the rinse bath, improved the security of operation greatly.The present invention can be widely used in the cleaning equipment of silicon material.
Claims (7)
1. the silicon material ultrasonic cleaning equipment that the silicon material is rotated; Comprise frame, frame is provided with rinse bath and supersonic generator, is provided with the ultrasonic wave Vibration Box of band ultrasonic transducer in the rinse bath; It is characterized in that: frame is provided with the transmission bracket device; The structure of described transmission bracket device comprises: connecting rod, and an end of connecting rod is fixedly connected with the transmission bracket arm, and the other end of connecting rod and lowering or hoisting gear flexibly connect; Described transmission bracket arm is articulated in rotating shaft place on the frame; On the transmission bracket arm transmission device is installed; The end of transmission bracket arm is movably set with Rotary tray; Described Rotary tray is arranged in the rinse bath, and described transmission device can drive Rotary tray and rotate, and silicon material frock basket is installed on the Rotary tray; Described lowering or hoisting gear is fixedly mounted on the frame, and the jacking of lowering or hoisting gear can make the transmission bracket arm rotate around the axis with descending.
2. the silicon material ultrasonic cleaning equipment that the silicon material is rotated according to claim 1; It is characterized in that: described transmission device comprises: be installed in the rotary electric machine on the transmission bracket arm; The axle of rotary electric machine is provided with driving gear; Driving gear is meshed with some driven gears, and the circumference of described Rotary tray is provided with fluted disc, and fluted disc is meshed with driven gear.
3. the silicon material ultrasonic cleaning equipment that the silicon material is rotated according to claim 1 and 2, it is characterized in that: described lifting device structure is: be fixedly mounted on the cylinder on the frame, the top of the piston rod of cylinder and the other end of connecting rod are hinged.
4. the silicon material ultrasonic cleaning equipment that the silicon material is rotated according to claim 1 and 2, it is characterized in that: described Rotary tray is provided with fixture block, fixture block and the clamping mutually of silicon material frock basket.
5. the silicon material ultrasonic cleaning equipment that the silicon material is rotated according to claim 3, it is characterized in that: described Rotary tray is provided with fixture block, fixture block and the clamping mutually of silicon material frock basket.
6. the silicon material ultrasonic cleaning equipment that the silicon material is rotated according to claim 2, it is characterized in that: described transmission bracket arm is provided with baffle plate, and baffle plate covers in rotary electric machine and driven gear.
7. the silicon material ultrasonic cleaning equipment that the silicon material is rotated according to claim 1 and 2, it is characterized in that: the end of described transmission bracket arm is provided with limit shaft, and described Rotary tray is movably arranged on the limit shaft.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110188734 CN102310061B (en) | 2011-07-07 | 2011-07-07 | Ultrasonic silicon material cleaning device capable of driving silicon material to rotate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110188734 CN102310061B (en) | 2011-07-07 | 2011-07-07 | Ultrasonic silicon material cleaning device capable of driving silicon material to rotate |
Publications (2)
| Publication Number | Publication Date |
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| CN102310061A true CN102310061A (en) | 2012-01-11 |
| CN102310061B CN102310061B (en) | 2013-03-06 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 201110188734 Expired - Fee Related CN102310061B (en) | 2011-07-07 | 2011-07-07 | Ultrasonic silicon material cleaning device capable of driving silicon material to rotate |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015000199A1 (en) * | 2013-07-01 | 2015-01-08 | 深圳市华星光电技术有限公司 | Ultrasonic cleaning device |
| CN106012006A (en) * | 2016-07-14 | 2016-10-12 | 晶科能源有限公司 | Accommodating cylinder for accommodating polycrystalline silicon material and polycrystalline silicon material cleaning device |
| CN106128981A (en) * | 2016-08-29 | 2016-11-16 | 天津汉德威药业有限公司 | A kind of axial diode acid dip pickle |
| CN108212831A (en) * | 2017-12-07 | 2018-06-29 | 广德盛源电器有限公司 | A kind of cleaning method of silicon materials |
| CN108284101A (en) * | 2017-12-07 | 2018-07-17 | 广德盛源电器有限公司 | A kind of silicon material cleaning device |
| CN108722977A (en) * | 2017-04-20 | 2018-11-02 | 隆基绿能科技股份有限公司 | Raw material cleaning device and material cleaning apparatus |
| CN109701955A (en) * | 2019-01-08 | 2019-05-03 | 敏实汽车技术研发有限公司 | Servo three-dimension type ultrasonic wave battery pack cleaning system and method for battery pack |
| CN115072128A (en) * | 2022-06-23 | 2022-09-20 | 无锡德兴塑料科技有限公司 | Plastic pallet convenient to transfer and stack |
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| CN202162175U (en) * | 2011-07-07 | 2012-03-14 | 苏州赤诚洗净科技有限公司 | Ultrasonic silicon material cleaning device capable of rotating silicon materials |
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2011
- 2011-07-07 CN CN 201110188734 patent/CN102310061B/en not_active Expired - Fee Related
Patent Citations (6)
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| JPH0568952A (en) * | 1991-09-11 | 1993-03-23 | U S Chem:Kk | Method and apparatus for cleaning material to be cleaned |
| JPH10156297A (en) * | 1996-11-27 | 1998-06-16 | Sinto Brator Co Ltd | Ultrasonic cleaning method and its device |
| CN1246082A (en) * | 1997-01-30 | 2000-03-01 | Mob梅尔基施表面装置及容器制造有限公司 | Industrial cleaning facility |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015000199A1 (en) * | 2013-07-01 | 2015-01-08 | 深圳市华星光电技术有限公司 | Ultrasonic cleaning device |
| CN106012006A (en) * | 2016-07-14 | 2016-10-12 | 晶科能源有限公司 | Accommodating cylinder for accommodating polycrystalline silicon material and polycrystalline silicon material cleaning device |
| CN106128981A (en) * | 2016-08-29 | 2016-11-16 | 天津汉德威药业有限公司 | A kind of axial diode acid dip pickle |
| CN106128981B (en) * | 2016-08-29 | 2019-01-29 | 天津汉德威药业有限公司 | A kind of axial diode acid dip pickle |
| CN108722977A (en) * | 2017-04-20 | 2018-11-02 | 隆基绿能科技股份有限公司 | Raw material cleaning device and material cleaning apparatus |
| CN108212831A (en) * | 2017-12-07 | 2018-06-29 | 广德盛源电器有限公司 | A kind of cleaning method of silicon materials |
| CN108284101A (en) * | 2017-12-07 | 2018-07-17 | 广德盛源电器有限公司 | A kind of silicon material cleaning device |
| CN108212831B (en) * | 2017-12-07 | 2019-10-11 | 广德盛源电器有限公司 | A kind of cleaning method of silicon materials |
| CN109701955A (en) * | 2019-01-08 | 2019-05-03 | 敏实汽车技术研发有限公司 | Servo three-dimension type ultrasonic wave battery pack cleaning system and method for battery pack |
| CN115072128A (en) * | 2022-06-23 | 2022-09-20 | 无锡德兴塑料科技有限公司 | Plastic pallet convenient to transfer and stack |
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|---|---|
| CN102310061B (en) | 2013-03-06 |
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