CN102296360A - Harmonic differential drive device and single crystal furnace using same - Google Patents
Harmonic differential drive device and single crystal furnace using same Download PDFInfo
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- CN102296360A CN102296360A CN2011102197862A CN201110219786A CN102296360A CN 102296360 A CN102296360 A CN 102296360A CN 2011102197862 A CN2011102197862 A CN 2011102197862A CN 201110219786 A CN201110219786 A CN 201110219786A CN 102296360 A CN102296360 A CN 102296360A
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Abstract
The invention relates to a harmonic differential drive device which comprises a drive shaft, an end cover, a left shell, a small space ring, a middle shell, a large rack wheel, a right shell, a harmonic speed reducer, a separation blade, a large space ring, a connection seat, a small motor, an input shaft and a large motor. In the harmonic differential drive device, a simple double-motor structure is adopted, high-precision high-reliability high/low-speed power is provided for a crucible shaft and a seed crystal rope in a single crystal furnace, so that the crucible shaft and the seed crystal rope in a crucible mechanism and a seed mechanism realize high/low-speed rising and descending operations so as to reduce the poor precision phenomenon of a crystal bar. The invention also provides the single crystal furnace using the harmonic differential drive device.
Description
Technical field:
The present invention relates to the silicon single crystal manufacturing apparatus technical field, the single crystal growing furnace of particularly a kind of harmonic wave differential driver and employing harmonic wave differential driver.
Background technology:
Single crystal growing furnace is the indispensable equipment that polysilicon is converted into the silicon single crystal technological process, and silicon single crystal is the basic material of photovoltaic generation and semicon industry.Silicon single crystal is as the critical support material of advanced information society, is one of most important monocrystal material in the world at present, and it is not only the major function material of development computer and unicircuit, also is the major function material that photovoltaic generation utilizes sun power.
Existing single crystal growing furnace all can be used transmission mechanism, and in the silicon single-crystal pulling process, transmission mechanism provides crucible shaft lifting, the high low speed handoff functionality of seed crystal rope lifting, is convenient to the crystallization of single crystal silicon.
Yet, existing transmission mechanism all is to utilize mechanical structure mechanism that realize or pure electromagnetic type, these existing transmission mechanisms exist easily carries out that accuracy of action is poor, sensitivity is not high, complex structure, easily causes the precision bad phenomenon of crystal bar in the course of the work.
Summary of the invention:
In view of this, be necessary to provide a kind of accurate, sensitive and harmonic wave differential driver simple in structure of carrying out action.
Also be necessary to provide a kind of single crystal growing furnace that adopts the harmonic wave differential driver.
A kind of harmonic wave differential driver comprises transmission shaft, end cap, left shell, little spacer ring, middle shell, master wheel, right shell body, harmonic speed reducer, catch, big spacing ring, Connection Block, fractional motor, input shaft, big motor; The transmission shaft front end is engaged on the left shell by bearing, little spacer ring, and the transmission shaft rear end is connected with harmonic speed reducer, and the transmission shaft rear end is provided with the bearing resettlement section, cooperates with input shaft by bearing.End cap is fixed on the left shell, and little spacer ring is installed between end cap and the left shell, so the tolerance clearance of regulating transmission shaft and left shell by end cap, little spacer ring.Harmonic speed reducer cooperates with left shell, right shell body by bearing, catch, big spacing ring.Master wheel is connected with big motor on being installed in right shell body by key, and the gear teeth of master wheel and harmonic speed reducer be connected with a joggle, and master wheel cooperates by bearing with right shell body.The rear end of input shaft is connected with fractional motor on being fixed on Connection Block, and the rear end of input shaft also cooperates by bearing with Connection Block, and the input shaft middle-end cooperates by key with harmonic speed reducer, and the input shaft front end cooperates by bearing with transmission shaft.
A kind of single crystal growing furnace that adopts the harmonic wave differential driver comprises harmonic wave differential driver, crucible mechanism and seed crystal mechanism.The harmonic wave differential driver comprises transmission shaft, end cap, left shell, little spacer ring, middle shell, master wheel, right shell body, harmonic speed reducer, catch, big spacing ring, Connection Block, fractional motor, input shaft, big motor; The front end of transmission shaft is engaged on the left shell by end cap, bearing, little spacer ring, and the front end of transmission shaft also is connected with crucible mechanism and seed crystal mechanism, so that crucible shaft in the crucible mechanism, seed crystal mechanism and seed crystal rope are realized at a high speed, low speed rises, step-down operation.The rear end of transmission shaft is connected with harmonic speed reducer, and the transmission shaft rear end is provided with the bearing resettlement section, cooperates with input shaft by bearing.End cap is fixed on the left shell, and little spacer ring is installed between end cap and the left shell, so the tolerance clearance of regulating transmission shaft and left shell by end cap, little spacer ring.Harmonic speed reducer cooperates with left shell, right shell body by catch, big spacing ring, bearing.Master wheel is connected with big motor on being installed in right shell body by key, and the gear teeth of master wheel and harmonic speed reducer be connected with a joggle, and master wheel cooperates by bearing with right shell body.The rear end of input shaft is connected with fractional motor on being fixed on Connection Block, and the rear end of input shaft also cooperates by bearing with Connection Block, and the input shaft middle-end cooperates by key with harmonic speed reducer, and the input shaft front end cooperates by bearing with transmission shaft.
In the single crystal growing furnace of harmonic wave differential driver provided by the invention and employing harmonic wave differential driver, this harmonic wave differential driver adopts double motor structure simple in structure to provide the high, low speed power of high precision, high reliability to crucible shaft in the single crystal growing furnace and seed crystal rope, so that crucible shaft in the crucible mechanism, seed crystal mechanism and seed crystal rope are realized at a high speed, low speed rises, step-down operation, and then reduce the precision bad phenomenon of crystal bar.
Description of drawings:
Accompanying drawing 1 is the structural representation of the harmonic wave differential driver of a better embodiment.
Among the figure: harmonic wave differential driver 200, transmission shaft 201, end cap 202, left shell 203, septulum circle 204, middle shell 205, master wheel 206, right shell body 207, harmonic speed reducer 208, catch 209, big spacing ring 210, Connection Block 211, fractional motor 212, input shaft 213, big motor 214, bearing 215, bearing 216, bearing 217, bearing 218, bearing 219
Embodiment:
The present invention is provided with the harmonic wave differential driver in single crystal growing furnace, this harmonic wave differential driver adopts the double motor structure, provide high, low speed power to the crucible mechanism in the single crystal growing furnace, seed crystal mechanism, so that crucible shaft in the crucible mechanism, seed crystal mechanism and seed crystal rope are realized at a high speed, low speed rises, step-down operation.
The structural representation of harmonic wave differential driver 200 as shown in Figure 1, harmonic wave differential driver 200 comprise transmission shaft 201, end cap 202, left shell 203, septulum circle 204, middle shell 205, master wheel 206, right shell body 207, harmonic speed reducer 208, catch 209, big spacing ring 210, Connection Block 211, fractional motor 212, input shaft 213, big motor 214, bearing 215, bearing 216, bearing 217, bearing 218, bearing 219.
First receiving space is accommodated bearing 215, septulum circle 204 and transmission shaft 201, wherein, transmission shaft 201 is fixed in first receiving space by bearing 215, septulum circle 204, the front end of transmission shaft 201 passes from the through hole of end cap 202, and the front end of transmission shaft 201 also is connected with crucible mechanism and seed crystal mechanism.Transmission shaft offers the bearing resettlement section on 201 rear ends, and bearing 216 is arranged in the bearing resettlement section, and transmission shaft 201 rear ends also are connected by bearing 216 and input shaft 213.Wherein can regulate the tolerance clearance of transmission shaft 201 and left shell 203 by end cap 202, septulum circle 204.
Second receiving space is accommodated harmonic speed reducer 208, catch 209, bearing 217, input shaft 213 and big spacing ring 210, harmonic speed reducer 208 is fixed in second receiving space by bearing 217, catch 209, big spacing ring 210, between the rear end of catch 209 and transmission shaft 201 by screw rod fixed form relative fixed, so so that transmission shaft 201 be fixed in first receiving space.The rear end of input shaft 213 is connected with fractional motor 212 on being fixed on Connection Block 211, the rear end of input shaft 213 also cooperates by bearing 219 with Connection Block 211, input shaft 213 middle-ends and harmonic speed reducer 208 cooperate by key, and input shaft 213 front ends cooperate by bearing 215 with transmission shaft 201.Wherein, bearing 219 is arranged in the through hole of Connection Block 211, and fractional motor 212 is fixed on the Connection Block 211, and the rotating shaft of fractional motor 212 is passed the through hole of Connection Block 211 and is connected with the rear end of input shaft 213.
The 3rd receiving space is accommodated the rotating shaft of master wheel 206, bearing 218 and big motor 214.Master wheel 206 is fixed in the 3rd receiving space by bearing 218, and the gear teeth of master wheel 206 and harmonic speed reducer 208 are connected with a joggle.Big motor 214 is fixed on the right shell body 207, and the rotating shaft of big motor 214 is connected with master wheel 206 by key.
The speed change working process of harmonic wave differential driver 200 is below described:
When being active, driving master wheel 206 and rotate, drive harmonic speed reducer 208 steel wheels by toothing and rotate, motion is transferred on the transmission shaft 201 as big motor 214; As fractional motor 212 initiatively, driving input shaft 213 rotates, connecting drive harmonic speed reducer 208 by key rotates, driving transmission shaft 201 at last rotates, thereby provide high, low speed power to the crucible mechanism in the single crystal growing furnace, seed crystal mechanism, so that crucible shaft in the crucible mechanism, seed crystal mechanism and seed crystal rope are realized at a high speed, low speed rises, step-down operation.Wherein, the big I of harmonic wave differential driver 200 transmission speed ratios is made by oneself by the planner as the case may be.
In the single crystal growing furnace of harmonic wave differential driver 200 provided by the invention and employing harmonic wave differential driver 200, this harmonic wave differential driver 200 adopts double motor structure simple in structure to provide the high, low speed power of high precision, high reliability to crucible shaft in the single crystal growing furnace and seed crystal rope, so that crucible shaft and seed crystal rope are realized at a high speed, low speed rises, step-down operation, and then reduce the precision bad phenomenon of crystal bar.
Claims (4)
1. harmonic wave differential driver is characterized in that: the harmonic wave differential driver comprises transmission shaft, end cap, left shell, little spacer ring, middle shell, master wheel, right shell body, harmonic speed reducer, catch, big spacing ring, Connection Block, fractional motor, input shaft, big motor;
The transmission shaft front end is engaged on the left shell by bearing, little spacer ring, and the transmission shaft rear end is connected with harmonic speed reducer, and the transmission shaft rear end is provided with the bearing resettlement section, cooperates with input shaft by bearing;
End cap is fixed on the left shell, and little spacer ring is installed between end cap and the left shell, so the tolerance clearance of regulating transmission shaft and left shell by end cap, little spacer ring;
Harmonic speed reducer cooperates with left shell, right shell body by bearing, catch, big spacing ring;
Master wheel is connected with big motor on being installed in right shell body by key, and the gear teeth of master wheel and harmonic speed reducer be connected with a joggle, and master wheel cooperates by bearing with right shell body;
The rear end of input shaft is connected with fractional motor on being fixed on Connection Block, and the rear end of input shaft also cooperates by bearing with Connection Block, and the input shaft middle-end cooperates by key with harmonic speed reducer, and the input shaft front end cooperates by bearing with transmission shaft.
2. harmonic wave differential driver according to claim 1 is characterized in that:
End cap and left shell form first receiving space, and end cap is provided with through hole, and end cap is installed on the left shell by the screw rod fixed form; Right shell body and left shell, middle shell, Connection Block relative fixed, right shell body and left shell, middle shell, Connection Block form second receiving space, and second receiving space is communicated with first receiving space, and Connection Block is provided with through hole; Right shell body also forms the 3rd receiving space with middle shell;
First receiving space is accommodated bearing, little spacer ring and transmission shaft, wherein, transmission shaft is fixed in first receiving space by bearing, little spacer ring, the front end of transmission shaft passes from the through hole of end cap, the transmission shaft rear end is connected with harmonic speed reducer in being arranged on second receiving space, offer the bearing resettlement section on the transmission shaft rear end, bearing is arranged on the bearing resettlement section, and the transmission shaft rear end is connected by bearing and input shaft;
Second receiving space is accommodated harmonic speed reducer, catch, bearing, input shaft and big spacing ring, harmonic speed reducer is fixed in second receiving space by bearing, catch, big spacing ring, the rear end of input shaft is connected with fractional motor on being fixed on Connection Block, the rear end of input shaft also cooperates by bearing with Connection Block, the input shaft middle-end cooperates by key with harmonic speed reducer, and the input shaft front end cooperates by bearing with transmission shaft; Wherein, bearing is arranged in the through hole of Connection Block, and fractional motor is fixed on the Connection Block, and the rotating shaft of fractional motor is passed the through hole of Connection Block and is connected with the rear end of input shaft;
The 3rd receiving space is accommodated the rotating shaft of master wheel, bearing and big motor; In the 3rd receiving space, and the gear teeth of master wheel and harmonic speed reducer are connected with a joggle master wheel by bearing fixing; Big motor is fixed on the right shell body, and the rotating shaft of big motor is connected with master wheel by key.
3. single crystal growing furnace that adopts the harmonic wave differential driver, comprise harmonic wave differential driver, crucible mechanism and seed crystal mechanism, it is characterized in that: the harmonic wave differential driver comprises transmission shaft, end cap, left shell, little spacer ring, middle shell, master wheel, right shell body, harmonic speed reducer, catch, big spacing ring, Connection Block, fractional motor, input shaft, big motor;
The front end of transmission shaft is engaged on the left shell by end cap, bearing, little spacer ring, and the front end of transmission shaft also is connected with crucible mechanism and seed crystal mechanism, so that crucible shaft in the crucible mechanism, seed crystal mechanism and seed crystal rope are realized at a high speed, low speed rises, step-down operation;
The rear end of transmission shaft is connected with harmonic speed reducer, and the transmission shaft rear end is provided with the bearing resettlement section, cooperates with input shaft by bearing;
End cap is fixed on the left shell, and little spacer ring is installed between end cap and the left shell, so the tolerance clearance of regulating transmission shaft and left shell by end cap, little spacer ring;
Harmonic speed reducer cooperates with left shell, right shell body by catch, big spacing ring, bearing, and master wheel is connected with big motor on being installed in right shell body by key, and the gear teeth of master wheel and harmonic speed reducer be connected with a joggle, and master wheel cooperates by bearing with right shell body;
The rear end of input shaft is connected with fractional motor on being fixed on Connection Block, and the rear end of input shaft also cooperates by bearing with Connection Block, and the input shaft middle-end cooperates by key with harmonic speed reducer, and the input shaft front end cooperates by bearing with transmission shaft.
4. the single crystal growing furnace of employing harmonic wave differential driver according to claim 3 is characterized in that:
End cap and left shell form first receiving space, and end cap is provided with through hole, and end cap is installed on the left shell by the screw rod fixed form; Right shell body and left shell, middle shell, Connection Block relative fixed, right shell body and left shell, middle shell, Connection Block form second receiving space, and second receiving space is communicated with first receiving space, and Connection Block is provided with through hole; Right shell body also forms the 3rd receiving space with middle shell;
First receiving space is accommodated bearing, little spacer ring and transmission shaft, wherein, transmission shaft is fixed in first receiving space by bearing, little spacer ring, the front end of transmission shaft passes from the through hole of end cap, the transmission shaft rear end is connected with harmonic speed reducer in being arranged on second receiving space, offer the bearing resettlement section on the transmission shaft rear end, bearing is arranged on the bearing resettlement section, and the transmission shaft rear end is connected by bearing and input shaft;
Second receiving space is accommodated harmonic speed reducer, catch, bearing, input shaft and big spacing ring, harmonic speed reducer is fixed in second receiving space by bearing, catch, big spacing ring, the rear end of input shaft is connected with fractional motor on being fixed on Connection Block, the rear end of input shaft also cooperates by bearing with Connection Block, the input shaft middle-end cooperates by key with harmonic speed reducer, and the input shaft front end cooperates by bearing with transmission shaft; Wherein, bearing is arranged in the through hole of Connection Block, and fractional motor is fixed on the Connection Block, and the rotating shaft of fractional motor is passed the through hole of Connection Block and is connected with the rear end of input shaft;
The 3rd receiving space is accommodated the rotating shaft of master wheel, bearing and big motor; In the 3rd receiving space, and the gear teeth of master wheel and harmonic speed reducer are connected with a joggle master wheel by bearing fixing; Big motor is fixed on the right shell body, and the rotating shaft of big motor is connected with master wheel by key.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110219786.2A CN102296360B (en) | 2011-08-02 | 2011-08-02 | Harmonic differential drive device and single crystal furnace using same |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110219786.2A CN102296360B (en) | 2011-08-02 | 2011-08-02 | Harmonic differential drive device and single crystal furnace using same |
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| Publication Number | Publication Date |
|---|---|
| CN102296360A true CN102296360A (en) | 2011-12-28 |
| CN102296360B CN102296360B (en) | 2014-04-16 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110219786.2A Active CN102296360B (en) | 2011-08-02 | 2011-08-02 | Harmonic differential drive device and single crystal furnace using same |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107405771A (en) * | 2015-01-13 | 2017-11-28 | 库卡罗伯特有限公司 | Driver, electric driver and industrial robot |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2778834Y (en) * | 2005-02-25 | 2006-05-10 | 宁波大学 | Super-low speed lowering device for monocrystal growth |
| CN201610922U (en) * | 2010-01-08 | 2010-10-20 | 北京中技克美谐波传动有限责任公司 | Harmonic gear tandem reducer |
| CN202220218U (en) * | 2011-08-02 | 2012-05-16 | 宁夏日晶新能源装备股份有限公司 | Harmonic differential driving device and mono-crystal furnace adopting same |
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2011
- 2011-08-02 CN CN201110219786.2A patent/CN102296360B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2778834Y (en) * | 2005-02-25 | 2006-05-10 | 宁波大学 | Super-low speed lowering device for monocrystal growth |
| CN201610922U (en) * | 2010-01-08 | 2010-10-20 | 北京中技克美谐波传动有限责任公司 | Harmonic gear tandem reducer |
| CN202220218U (en) * | 2011-08-02 | 2012-05-16 | 宁夏日晶新能源装备股份有限公司 | Harmonic differential driving device and mono-crystal furnace adopting same |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107405771A (en) * | 2015-01-13 | 2017-11-28 | 库卡罗伯特有限公司 | Driver, electric driver and industrial robot |
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| Publication number | Publication date |
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| CN102296360B (en) | 2014-04-16 |
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Address after: Sheng Road Economic Development Zone Shizuishan city the Ningxia Hui Autonomous Region Xin 753000 Patentee after: Ningxia Rijing New Energy Euipment Co., Ltd. Address before: Sheng Road Economic Development Zone Shizuishan city the Ningxia Hui Autonomous Region Xin 753000 Patentee before: Ningxia Rijing New Energy Euipment Co., Ltd. |