CN102279287B - Sub-pixel division coding microscopic imaging device - Google Patents
Sub-pixel division coding microscopic imaging device Download PDFInfo
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Abstract
The invention discloses two sub-pixel division coding microscopic imaging devices, which belong to the optical wave band microscopic detection imaging device. The problem that the conventional near-field optical microscope is slow to image and difficult to control is solved; and the problems that resolution of the conventional microscope cannot be continuously improved under restriction of optical diffraction and the contradiction exists between the resolution and view field range are solved. The device comprises a viewing window, a coding plate, a microscope objective and a plane array photoelectric detector; the coding plate is a quartz glass plate coated with a metal film on the surface or self-supporting metal film; the coated metal film or the self-supporting metal film is fabricated with a sub-wave length hole array; the aperture of each hole is smaller than r valve in Rayleigh criterion. The sub-pixel division and coding is carried out on each pixel in imaging region of the microscope objective, and then the valve of each sub-pixel is decoded from an image obtained by the plane array photoelectric detector; the device has large vision field and high resolution; the inherent contraction between imaging resolution and vision field of the conventional microscope objective is broken.
Description
Technical field
The invention belongs to the micro-detecting and imaging device of optical region.
Background technology
Existing imaging device optical microscope is an information carrier with uncharged photon, and pair cell disturbs very little, is the basic tool of biology and medical research.Although other types microscope; The resolution that has Subnano-class like electron microscope, PSTM already; But because the molecular motion energy of the characteristic energy that electromagnetic wave had of optical region and biological substance is close; Be easy to take place the interaction of certain form, thus the biologically active that can go further to be familiar with these materials and not damage these materials again through this kind interaction.So the characteristic of optical near-field imaging is being made great efforts to explore in many in the world so far advanced laboratories always, so that utilize these characteristics to serve the development of human sciences's technology, this wherein main aspect is exactly optical region super-resolution Detection Techniques.
Existing NFM must be by means of the near field probe of certain pattern; So that (near field exists only in the body surface sub-wavelength nearby to extract the optical near-field signal of the very small region in somewhere in the target surface to be measured near field; This optical near-field of probe induced; And be translated into the other end that keying wave is sent to optical fiber); This zone is generally much smaller than the zone that Rayleigh criterion limited of optical resolution limitations foundation, and this probe can be that porose (logical light) also can be atresia (directly illogical light).The effect of seeing the near field probe from principle of work is: be extracted in super-resolution information entrained the evanescent wave in close-target district; And convert evanescent wave to keying wave through the biography photo structure (optical waveguide fibre) of probe; Pass toward optical system and photoelectric commutator then, obtain corresponding electric signal; The near field probe maintains the spacing of needle point and target to be measured in required near field range under the help of measurement and control unit, and drags probe by two-dimentional scanning mechanism and on target, do two-dimensional scan, thereby accomplishes the detection of the super-resolution optical image of target.Existing NFM (is example with the visible light) mainly is made up of probe, scanning mechanism and control system three parts: probe has nanometer pinpoint; Scanning mechanism keeps probe to be tens nanometers and to drag probe and do two dimension (X-Y direction) with respect to the surface of testing sample to the distance between the sample tested point; Control system guarantees that at each detecting location needle point and sample interval be certain distance (extremely near).At present, this near-field scanning optical microscope of several families manufacturers produce is only arranged in the world, the resolution of its X-Y direction is generally 50nm.There is following problems in existing probe scanning NFM:
(1) the logical optical efficiency of existing probe is low, and the light signal of collecting through probe is difficult to do spectrographic detection through beam splitting system again; The logical light of probe has lacked the detector that will use high sensitivity, will cause not having the service band of photomultiplier (optical region) to be difficult to the signal to noise ratio (S/N ratio) that reaches suitable.
(2) existence of the control system of needle point and sample interval makes that the ability of this microscope tolerance impressed field is very little; And the research impressed field, for example high voltage field or various intensity constant or change electromagnetic field effect cellular change down be human in social development institute's problem of concern jointly.
Because control system control needle point to sample is by control of the spacing of sensing point and scan control, this mechanism still can overcome technological difficulties to flat sample, but uneven sample just almost is difficult to realize the spacing control and the scan control of super close distance.In addition, the scope that probe can scan is very little, and just the visual field is very little.Under this control system and motion condition, image taking speed is also lower.
(3) cum rights of the LASER Light Source of control system, scanning mechanism and probe itself all takes up room, and makes sample not observed simultaneously by other detection methods again, thereby has the possibility of multi-method coupling hardly.
Existing general microscopical object lens are all followed a rule, and promptly the low power objective visual field is big and resolution is low, and but the visual field is little for high power objective resolution height, also wants the visual field big when wanting resolution high, is impossible.
Summary of the invention
The present invention proposes two kinds of inferior pixel partition encoding microscopic imaging devices, solves the problem that existing NFM image taking speed is slow, control is difficult; Solve simultaneously the general resolution of microscope receive optical diffraction restriction and can not continue to improve, the problem that there is contradiction in resolution and field range.
A kind of inferior pixel partition encoding imaging device of the present invention; Comprise tactic viewfinder, encoding board and face battle array photodetector; Said viewfinder is the rectangle light inlet window; Said encoding board has the quartz glass plate of the sub-wavelength thickness metal coating that can block service band light for the surface or can block the sub-wavelength thickness self-supporting metal film of service band light; Be manufactured with the sub-wavelength array of orifices on metal coating or the self-supporting metal film, in the said sub-wavelength array of orifices, each small aperture is less than the r value in the Rayleigh criterion; It is characterized in that:
Be provided with microcobjective between said encoding board and the face battle array photodetector;
Said sub-wavelength array of orifices adds that by M * N subarrays the necessary P-1 of coding row form; Be the array of the capable N of M * P+P-1 row, an object space pixel of the corresponding microcobjective of each subarray is the array of orifices by P rank circulation s arranged; M=3～1024; N=3～1024 are respectively the line number and the columns of the pixel of final imaging, P=3,7,11,15,19,23,31,35,43,47,63,71,79,83,103,127,255,511 or 1023; Rightmost P-1 row are identical with leftmost P-1 row in the sub-wavelength array of orifices;
Each subarray constitutes identical, all constitutes for the arbitrary row by the 0 and 1 capable P row of the P circulation s matrix formed;
During P=3, first row contains 101,
During P=7, first row contains 1110100,
During P=11, first row contains 11011100010,
During P=15, first row contains 000100110101111,
During P=19, first row contains 1100111101010000110,
During P=23, first row contains 11111010110011001010000,
During P=31, first row contains 0000100101100111110001101110101,
During P=35, first row contains 00100110101000010011101111100011101,
During P=43, first row contains:
1100101001110111110001011100000100011010110，
During P=47, first row contains:
11111011110010101110010011011000101011000010000，
During P=63, first row contains:
00000100001100010100111101000111001
0010110111011001101010111111，
During P=71, first row contains:
11111?11011?10100?11011?10001?10101
10100?01110?10010?10011?10001?00110
10001?00000?0，
During P=79, first row contains:
11101?10011?11010?01011?11110?11000
01100?01010?10101?11001?11100?10000
00101?10100?00110?0100，
During P=83, first row contains:
11011?00101?11100?01100?01010?11111
11010?01110?11001?00011?01000?00001
01011?10011?10000?10110?010，
During P=103, first row contains:
11101?00111?00011?11111?00010?11011
10111?01010?01000?01001?10100?11011
11011?01010?00100?01001?01110?00000
01110?00110?100，
During P=127, first row contains:
000000?10000?0110?00010?10001?11100
100010?11001?1101?01001?11110?10000
111000?10010?0110?11010?11011?11011
00011?01001?01110?11100?11001?01010
11111?11，
During P=225, first row contains:
00000?00101?11000?11101?11100?01011
00110?11000?01111?00111?00001?01011
11111?10010?11110?10010?10000?11011
10110?11111?01011?10100?00011?00101
01010?00110?10110?00110?00001?00101
10110?10100?11010?01111?11011?10011
00111?10110?01000?01000?00011?10010
01001?10001?00111?01010?11010?00100
01010?01000?11111，
Following character corresponding relation: represent Binary Zero 00,001,010,011,100,101,110,111 respectively with scale-of-eight 0,1,2,3,4,5,6,7;
During P=511, first row contains:
00102?14116?25303?36467?10502?55176
62226?77115?23140?14312?15137?64261
65454?74373?50153?33540?55372?52012
25713?56016?35117?27242?20634?13666
32073?60777?01737?05631?01123?55074
76330?52216?15527?04610?4，
During P=1023, first row contains:
00040?22101?44641?12417?27266?60030
15460?53270?67704?36366?64012?05524
37362?26023?10506?67007?43577?10305
56415?26362?66202?11140?26123?54705
76505?66541?46650?16475?15223?40763
46750?52676?04721?65755?10205?12616
37660?43234?47415?66143?67644?50064
31351?32105?46451?06073?36027?12716
73463?52736?62423?30416?27624?63125
17630?65715?32304?56057?25277?64052
27425?73523?34434?37760?07037?56117
43175?31311?1。
Another inferior pixel partition encoding imaging device of the present invention; Comprise tactic viewfinder, encoding board and face battle array photodetector; Said viewfinder is the rectangle light inlet window; Said encoding board has the quartz glass plate of the sub-wavelength thickness metal coating that can block service band light for the surface or can block the sub-wavelength thickness self-supporting metal film of service band light; Be manufactured with the sub-wavelength array of orifices on metal coating or the self-supporting metal film, in the said sub-wavelength array of orifices, each small aperture is less than the r value in the Rayleigh criterion; It is characterized in that:
Be provided with microcobjective between said encoding board and the face battle array photodetector;
Said sub-wavelength array of orifices adds that by M * N subarrays the necessary P-1 of coding row form, and an object space pixel of each subarray correspondence microcobjective is the array of orifices by P rank circulation s arranged; M=3～1024, N=3～1024 are respectively the line number and the columns of the pixel of final imaging, P=15,35,63,255,511 or 1023; Each subarray is K * L array or L * K array, and capable or L is capable by K foldingly constitutes K * L=P by arbitrary row of the 0 and 1 capable P row of the P circulation s matrix formed;
During P=15, first row contains 000100110101111,
During P=35, first row contains 00100110101000010011101111100011101,
During P=63, first row contains:
00000100001100010100111101000111001
0010110111011001101010111111，
During P=225, first row contains:
00000?00101?11000?11101?11100?01011
00110?11000?01111?00111?00001?01011
11111?10010?11110?10010?10000?11011
10110?11111?01011?10100?00011?00101
01010?00110?10110?00110?00001?00101
10110?10100?11010?01111?11011?10011
00111?10110?01000?01000?00011?10010
01001?10001?00111?01010?11010?00100
01010?01000?11111，
Following character corresponding relation: represent Binary Zero 00,001,010,011,100,101,110,111 respectively with scale-of-eight 0,1,2,3,4,5,6,7;
During P=511, first row contains:
00102?14116?25303?36467?10502?55176
62226?77115?23140?14312?15137?64261
65454?74373?50153?33540?55372?52012
25713?56016?35117?27242?20634?13666
32073?60777?01737?05631?01123?55074
76330?52216?15527?04610?4，
During P=1023, first row contains:
00040?22101?44641?12417?27266?60030
15460?53270?67704?36366?64012?05524
37362?26023?10506?67007?43577?10305
56415?26362?66202?11140?26123?54705
76505?66541?46650?16475?15223?40763
46750?52676?04721?65755?10205?12616
37660?43234?47415?66143?67644?50064
31351?32105?46451?06073?36027?12716
73463?52736?62423?30416?27624?63125
17630?65715?32304?56057?25277?64052
27425?73523?34434?37760?07037?56117
43175?31311?1；
When A. submatrix is classified K * L array as, said sub-wavelength array of orifices be (K * M capable (array of row of N * L)+(P-1), wherein, the 1st the capable constituted mode of K of sub-wavelength array of orifices is from left to right:
The 1st subarrays, the 2nd subarrays ... The additional subarray of N subarrays, K * (P-1),
In the 2nd～N subarrays, the J+1 of the last subarray of J behavior of each subarray is capable, and J=1～L when J+1＞L, gets J=1;
Rightmost K during the 1st K is capable * (P-1) each capable element of going together left side neighbour with it of additional subarray satisfies the recurrence relation of P rank circulation s matrix;
The capable constituted mode of the 2nd～a M K of sub-wavelength array of orifices is identical with the 1st the capable constituted mode of K;
When B. submatrix is classified L * K array as, said sub-wavelength array of orifices be (row of L * M) (and the array of row of N * K)+(P-1), wherein, the 1st the capable constituted mode of L of sub-wavelength array of orifices is from left to right:
The 1st subarrays, the 2nd subarrays ... The additional subarray of N subarrays, L * (P-1),
In the 2nd～N subarrays, the J+1 of the last subarray of J behavior of each subarray is capable, and J=1～K when J+1＞K, gets J=1;
Rightmost L during the 1st L is capable * (P-1) each capable element of going together left side neighbour with it of additional subarray satisfies the recurrence relation of P rank circulation s matrix;
The capable constituted mode of the 2nd～a M L of sub-wavelength array of orifices is identical with the 1st the capable constituted mode of L.
Described inferior pixel partition encoding imaging device is characterized in that:
Form in the subarray of said sub-wavelength array of orifices, said aperture end face is shaped as circle, comprises triangle and tetragonal polygon, C shape or W shape; The aperture vertical direction is shaped as round platform, cylinder, terrace with edge, prismatic or stepped hole.
The required area of rectangle light inlet window intercepting imaging is the entire area that corresponding surface battle array photodetector is accepted light signal; It is the corresponding zone of M * N; Flashlight through encoding board is collected by microcobjective; The flashlight that microcobjective will pass through the encoding board partition encoding is imaged onto on the face battle array photodetector, and an object space pixel (not containing additional pixel) of the corresponding microcobjective of each subarray of encoding board is mapped in the responsive unit corresponding on the face battle array photodetector from the illumination of each object space pixel; Through opto-electronic conversion, be sent to that follow up device writes down, signal Processing and imaging.
With the present invention, with sub-pixel segmentation coding method for a Xu image pixel for each sub-pixel segmentation code, and then from the surface to the photodetector array decoded image obtained for each sub-pixel value, thus plane array photodetector get more than the original image given the same amplitude images with high resolution images of the new, that is, received a total of two images, two images of the same magnitude but one of a total pixel image than the other one high n times, n is the number of sub-pixel segmentation, which is an array of subwavelength small order of Confucius.
Just because of this sub-wavelength partition encoding is that each pixel for microcobjective carries out; So when microcobjective is low power objective, just had big visual field; But since the sub-wavelength partition encoding again hereto each pixel of object lens carried out sub-wavelength and cut apart, so when having big visual field, had high resolving power again.This has just broken through the imaging resolution and the relation of the intrinsic contradictions between the visual field of traditional microcobjective.
Distinguishing feature of the present invention is: inferior pixel is cut apart each pixel (each pixel before promptly not cutting apart) that measure spreads all over whole image field; Each pixel before not cutting apart is all implemented cutting apart of same exponent number; Cutting apart of each pixel before not cutting apart all is that the s-matrix of implementing same exponent number is cut apart (in first kind of partitioning scheme and partitioning scheme all be identical).Cutting apart like this can reach the simplest encoding board structure, the simplest coded system, the simplest encoding board processing mode.Such partitioning scheme can reach solution sub-wavelength array of orifices exponent number again and satisfy the requirement of Hadamard transform optical system for the certain limitation that reaction caused of disturbance, promptly adopts the sub-wavelength array of orifices of low exponent number.Such partitioning scheme just can reach and solve resolution can not be high under the present wide visual field of the optical microscope condition the problem inevitable little problem in visual field during high resolving power in other words, promptly adopts the low-power microscope object lens to implement inferior pixel for each pixel of the wide field image that these object lens formed images then and cuts apart so that obtain high resolving power.Such partitioning scheme just possibly reach the desirable requirement of optical microscope of 30 nanometer resolutions of wide visual field.
Description of drawings:
Fig. 1 is a synoptic diagram of the present invention;
The image that Fig. 2 obtains for face battle array photodetector;
Fig. 3 is the variation signal of inferior pixel partitioning scheme;
The high-definition picture that Fig. 4 comes out for decoding;
Fig. 5 classifies 3 * 5 sub-wavelength array of orifices synoptic diagram on 15 rank as for submatrix;
Fig. 6 classifies 3 * 4 sub-wavelength array of orifices synoptic diagram on 15 rank as for submatrix.
Embodiment
Below in conjunction with accompanying drawing and embodiment the present invention is further specified.
As shown in Figure 1; Among the figure; Exciting light 1, sample 2; The present invention includes tactic viewfinder 3, encoding board 4, microcobjective 5 and face battle array photodetector 6, said viewfinder 3 is the rectangle light inlet window, on the gold-plated film of the one side that does not contact with sample on the slide, makes the rectangle light inlet window as view-finder;
Encoding board 4 has the quartz glass plate of the sub-wavelength thickness metal coating that can block service band light for the surface or can block the sub-wavelength thickness self-supporting metal film of service band light; Be manufactured with the sub-wavelength array of orifices on metal coating or the self-supporting metal film; In the said sub-wavelength array of orifices, each small aperture is less than the r value in the Rayleigh criterion;
Said sub-wavelength array of orifices adds that by M * N subarrays the necessary columns of coding forms, and an object space pixel of each subarray correspondence microcobjective is the array of orifices by P rank circulation s arranged; The necessary columns of encoding is P-1.
As shown in Figure 2, the image that face battle array photodetector obtains is made up of 3 * 5 pixels, and each pixel is represented with alphabetical A～O respectively; The sub-wavelength array of orifices adds the necessary 2 row apertures of coding by 3 * 5 subarrays and forms, and each subarray formation is identical, all constitutes for the arbitrary row by 0 and 13 row, the 3 row circulation s matrixes formed; First row contains 101,
When forming the sub-wavelength array of orifices, be the array of 3 row, 17 row:
10110110110110110
10110110110110110
10110110110110110，
Or:
01101101101101101
01101101101101101
01101101101101101，
Or:
11011011011011011
11011011011011011
11011011011011011，
Wherein 1 represent reach through hole, 0 representative is not bored a hole;
A pixel of the image that each subarray 101 obtains corresponding to face battle array photodetector; In fact each row of each row of sub-wavelength array of orifices all are the same partitioning schemes; The configuration of the encoding board of such mode is the simplest; And can high-speed mobile or rotary coding, and then guarantee the rapidity of imaging.Such encoding board sees it also is a complete cycle array of orifices from the angle of observing pixel, sees it then is an implicit cycle array of orifices from the angle of observing inferior pixel.As shown in Figure 3, coded system is: the aperture that whenever moves to left, and the sub-wavelength array of orifices is accomplished an encoded recording, and CCD carries out once light integration simultaneously, obtains piece image.Move three apertures and accomplish a complete encoding operation, obtain three width of cloth images.The data that CCD carries out three light integrations just can decode a pixel each inferior pixel (aperture) see through the light intensity value, as shown in Figure 4, what each pixel among Fig. 2 can decode three inferior pixels sees through the light intensity value, decodes a like A
1a
2a
3, B decodes b
1b
2b
3..., just can obtain a width of cloth through the intensity level that solves whole pixels and improve the image of resolution.
The inferior pixel in above other rank, 7 rank is cut apart similarly, and just the encoded recording number of times is corresponding more.
Embodiment 2, M=3, N=5 forms the submatrix of sub-wavelength array of orifices and classifies 15 rank as, and necessary additional columns P-1=14 encodes; Each subarray constitutes identical, all constitutes first trip 000100110101111 for the arbitrary row by 0 and 1 15 row, the 15 row circulation s matrixes formed; Express for simplifying, following character corresponding relation: represent Binary Zero 00,001,010,011,100,101,110,111 respectively with scale-of-eight 0,1,2,3,4,5,6,7, first trip is 04657;
Forming the sub-wavelength array of orifices is the array of 3 row, 89 row:
04657046570465704657046570465+11
04657046570465704657046570465+11
04657046570465704657046570465+11；
In the above-mentioned array, rightmost two classify binary representation as, and all the other row are octal representation.
Embodiment 3, M=3, N=5 forms the submatrix of sub-wavelength array of orifices and classifies 15 rank as, and the necessary additional columns of encoding is 14;
Each subarray is 5 * 3 arrays, by the first trip 000100110101111 of 0 and 1 15 row, the 15 row circulation s matrixes formed, constitutes by 5 row are folding, and the folding mode of 5 row, 3 row is:
000
100
110
101
111
The 1st 5 row of corresponding sub-wavelength array of orifices made in the following manner:
00010011010111100010011010111
10011010111100010011010111100
11010111100010011010111100010
10111100010011010111100010011
11100010011010111100010011010
Wherein, the 1st 5 capable constituted mode of sub-wavelength array of orifices do, from left to right:
The 1st subarrays, the 2nd subarrays ... The 3rd subarrays, 5 * 14 additional subarrays,
In the 2nd～3 subarrays, the J+1 of the last subarray of J behavior of each subarray is capable, and J=1 when J+1＞3, is got in J=1～3;
Go together with it element of left side neighbour of each row of rightmost 5 * 14 additional subarrays satisfies the recurrence relation of P rank circulation s matrix in the 1st 5 row; The 2nd of sub-wavelength array of orifices～3rd 5 a row constituted mode are identical with the 1st 5 capable constituted mode;
Said sub-wavelength array of orifices is that K * M=15 is capable, the array of N * L+P-1=25 row (additional arrays has been included in interior), and is as shown in Figure 5; Express for simplifying, in the above-mentioned array, rightmost two classify binary representation as, and all the other row are octal representation, represent Binary Zero 00,001,010,011,100,101,110,111 respectively with scale-of-eight 0,1,2,3,4,5,6,7.
This encoding board can be realized five synchronous codings that are arranged in five pixels of delegation.Its mode of operation is the inferior pixel (aperture) that at every turn moves to left, and 14 (p-1) that move to left continuously are inferior, has just accomplished the inferior pixel partition encoding of these five pixels.Decoding comes out must arrive the value of 75 inferior pixels, and each five-element's three row is just corresponding to a divided pixel.The value of 15 inferior pixels of first pixel of separating out and in the arrangement in space shown in following array.The value of the inferior pixel of all the other four pixels is arranged in order in the right of the value of the inferior pixel of first pixel.
Each subarray is 5 * 3 arrays, by the first trip 000100110101111 of 0 and 1 15 row, the 15 row circulation s matrixes formed, constitutes by 5 row are folding, and the folding mode of 5 row, 3 row is:
000
100
110
101
111
The 1st 5 row of corresponding sub-wavelength array of orifices made in the following manner:
00010011010111100010011010
10011010111100010011010111
11010111100010011010111100
10111100010011010111100010
11100010011010111100010011
Wherein, the 1st 5 capable constituted mode of sub-wavelength array of orifices do, from left to right:
The 1st subarrays, the 2nd subarrays ... The 4th subarrays, 5 * 14 additional subarrays,
In the 2nd～4 subarrays, the J+1 of the last subarray of J behavior of each subarray is capable, and J=1 when J+1＞3, is got in J=1～3;
Go together with it element of left side neighbour of each row of rightmost 5 * 14 additional subarrays satisfies the recurrence relation of P rank circulation s matrix in the 1st 5 row; The 2nd of sub-wavelength array of orifices～3rd 5 a row constituted mode are identical with the 1st 5 capable constituted mode;
Said sub-wavelength array of orifices is the array (additional arrays has been included in interior) of the capable N of K * M=15 * L+P-1=26 row, and is as shown in Figure 6; Express for simplifying, in the above-mentioned array, rightmost two classify binary representation as, and all the other row are octal representation, represent Binary Zero 00,001,010,011,100,101,110,111 respectively with scale-of-eight 0,1,2,3,4,5,6,7.
Claims (3)
1. inferior pixel partition encoding imaging device; Comprise tactic viewfinder, encoding board and face battle array photodetector; Said viewfinder is the rectangle light inlet window; Said encoding board has the quartz glass plate of the sub-wavelength thickness metal coating that can block service band light for the surface or can block the sub-wavelength thickness self-supporting metal film of service band light; Be manufactured with the sub-wavelength array of orifices on metal coating or the self-supporting metal film, in the said sub-wavelength array of orifices, each small aperture is less than the r value in the Rayleigh criterion; It is characterized in that:
Be provided with microcobjective between said encoding board and the face battle array photodetector;
Said sub-wavelength array of orifices adds that by M * N subarrays the necessary P-1 of coding row form; Be the array of the capable N of M * P+P-1 row, an object space pixel of the corresponding microcobjective of each subarray is the array of orifices by P rank circulation s arranged; M=3～1024; N=3～1024 are respectively the line number and the columns of the pixel of final imaging, P=3,7,11,15,19,23,31,35,43,47,63,71,79,83,103,127,255,511 or 1023; Rightmost P-1 row are identical with leftmost P-1 row in the sub-wavelength array of orifices;
Each subarray constitutes identical, all constitutes for the arbitrary row by the 0 and 1 capable P row of the P circulation s matrix formed;
During P=3, first row contains 101,
During P=7, first row contains 1110100,
During P=11, first row contains 11011100010,
During P=15, first row contains 000100110101111,
During P=19, first row contains 1100111101010000110,
During P=23, first row contains 11111010110011001010000,
During P=31, first row contains 0000100101100111110001101110101,
During P=35, first row contains 00100110101000010011101111100011101,
During P=43, first row contains:
1100101001110111110001011100000100011010110，
During P=47, first row contains:
11111011110010101110010011011000101011000010000，
During P=63, first row contains:
00000100001100010100111101000111001
0010110111011001101010111111，
During P=71, first row contains:
11111?11011?10100?11011?10001?10101
10100?01110?10010?10011?10001?00110
10001?00000?0，
During P=79, first row contains:
11101?10011?11010?01011?11110?11000
01100?01010?10101?11001?11100?10000
00101?10100?00110?0100，
During P=83, first row contains:
11011?00101?11100?01100?01010?11111
11010?01110?11001?00011?01000?00001
01011?10011?10000?10110?010，
During P=103, first row contains:
11101?00111?00011?11111?00010?11011
10111?01010?01000?01001?10100?11011
11011?01010?00100?01001?01110?00000
01110?00110?100，
During P=127, first row contains:
00000?01000?00110?00010?10001?11100
10001?01100?11101?01001?11110?10000
11100?01001?00110?11010?11011?11011
00011?01001?01110?11100?11001?01010
11111?11，
During P=225, first row contains:
00000?00101?11000?11101?11100?01011
00110?11000?01111?00111?00001?01011
11111?10010?11110?10010?10000?11011
10110?11111?01011?10100?00011?00101
01010?00110?10110?00110?00001?00101
10110?10100?11010?01111?11011?10011
00111?10110?01000?01000?00011?10010
01001?10001?00111?01010?11010?00100
01010?01000?11111，
Following character corresponding relation: represent Binary Zero 00,001,010,011,100,101,110,111 respectively with scale-of-eight 0,1,2,3,4,5,6,7;
During P=511, first row contains:
00102?14116?2530?336467?10502?55176
62226?77115?23140?14312?15137?64261
65454?74373?50153?33540?55372?52012
25713?56016?35117?27242?20634?13666
32073?60777?01737?05631?01123?55074
76330?52216?15527?04610?4，
During P=1023, first row contains:
0004?022101?44641?12417?27266?60030
15460?53270?67704?36366?64012?05524
37362?26023?10506?67007?43577?10305
56415?26362?66202?11140?26123?54705
76505?66541?46650?16475?15223?40763
46750?52676?04721?65755?10205?12616
37660?43234?47415?66143?67644?50064
31351?32105?46451?06073?36027?12716
73463?52736?62423?30416?27624?63125
17630?65715?32304?56057?25277?64052
27425?73523?34434?37760?07037?56117
43175?31311?1。
2. inferior pixel partition encoding imaging device; Comprise tactic viewfinder, encoding board and face battle array photodetector; Said viewfinder is the rectangle light inlet window; Said encoding board has the quartz glass plate of the sub-wavelength thickness metal coating that can block service band light for the surface or can block the sub-wavelength thickness self-supporting metal film of service band light; Be manufactured with the sub-wavelength array of orifices on metal coating or the self-supporting metal film, in the said sub-wavelength array of orifices, each small aperture is less than the r value in the Rayleigh criterion; It is characterized in that:
Be provided with microcobjective between said encoding board and the face battle array photodetector;
Said sub-wavelength array of orifices adds that by M * N subarrays the necessary P-1 of coding row form, and an object space pixel of each subarray correspondence microcobjective is the array of orifices by P rank circulation s arranged; M=3～1024, N=3～1024 are respectively the line number and the columns of the pixel of final imaging, P=15,35,63,255,511 or 1023; Each subarray is K * L array or L * K array, and capable or L is capable by K foldingly constitutes K * L=P by arbitrary row of the 0 and 1 capable P row of the P circulation s matrix formed;
During P=15, first row contains 000100110101111,
During P=35, first row contains 00100110101000010011101111100011101,
During P=63, first row contains:
00000100001100010100111101000111001
0010110111011001101010111111，
During P=225, first row contains:
00000?00101?11000?11101?11100?01011
00110?11000?01111?00111?00001?01011
11111?10010?11110?10010?10000?11011
10110?11111?01011?10100?00011?00101
0101?000110?10110?00110?00001?00101
10110?10100?11010?01111?11011?10011
00111?10110?01000?01000?00011?10010
01001?10001?00111?01010?11010?00100
01010?01000?11111，
Following character corresponding relation: represent Binary Zero 00,001,010,011,100,101,110,111 respectively with scale-of-eight 0,1,2,3,4,5,6,7;
During P=511, first row contains:
00102?14116?25303?36467?10502?55176
62226?77115?23140?14312?15137?64261
65454?74373?50153?33540?55372?52012
25713?56016?35117?27242?20634?13666
32073?60777?01737?05631?01123?55074
76330?52216?15527?04610?4，
During P=1023, first row contains:
00040?22101?44641?12417?27266?60030
15460?53270?67704?36366?64012?05524
37362?26023?10506?67007?43577?10305
56415?26362?66202?11140?26123?54705
76505?66541?46650?16475?15223?40763
46750?52676?04721?65755?10205?12616
37660?43234?47415?66143?67644?50064
31351?32105?46451?06073?36027?12716
73463?52736?62423?30416?27624?63125
17630?65715?32304?56057?25277?64052
27425?73523?34434?37760?07037?56117
43175?31311?1；
When A. submatrix is classified K * L array as, said sub-wavelength array of orifices be (row of K * M) (and the array of row of N * L)+(P-1), wherein, the 1st the capable constituted mode of K of sub-wavelength array of orifices is from left to right:
The 1st subarrays, the 2nd subarrays ... The additional subarray of N subarrays, K * (P-1),
In the 2nd～N subarrays, the J+1 of the last subarray of J behavior of each subarray is capable, and J=1～L when J+1＞L, gets J=1;
Rightmost K during the 1st K is capable * (P-1) each capable element of going together left side neighbour with it of additional subarray satisfies the recurrence relation of P rank circulation s matrix;
The capable constituted mode of the 2nd～a M K of sub-wavelength array of orifices is identical with the 1st the capable constituted mode of K;
When B. submatrix is classified L * K array as, said sub-wavelength array of orifices be (row of L * M) (and the array of row of N * K)+(P-1), wherein, the 1st the capable constituted mode of L of sub-wavelength array of orifices is from left to right:
The 1st subarrays, the 2nd subarrays ... The additional subarray of N subarrays, L * (P-1),
In the 2nd～N subarrays, the J+1 of the last subarray of J behavior of each subarray is capable, and J=1～K when J+1＞K, gets J=1;
Rightmost L during the 1st L is capable * (P-1) each capable element of going together left side neighbour with it of additional subarray satisfies the recurrence relation of P rank circulation s matrix;
The capable constituted mode of the 2nd～a M L of sub-wavelength array of orifices is identical with the 1st the capable constituted mode of L.
3. according to claim 1 or claim 2 inferior pixel partition encoding imaging device is characterized in that:
Form in the subarray of said sub-wavelength array of orifices, said aperture end face is shaped as circle, comprises triangle and tetragonal polygon, C shape or W shape; Hole shape is round platform, cylinder, terrace with edge, prismatic or stepped hole.
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| CN101042326A (en) * | 2007-04-16 | 2007-09-26 | 中国科学院物理研究所 | Total reflection near-field microscope combining with magnetic forceps for observing biomacromolecule |
| CN101881786A (en) * | 2010-05-26 | 2010-11-10 | 中国科学院半导体研究所 | Scanning near-field optical microscopy system based on micro-hole laser |
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| CN101042326A (en) * | 2007-04-16 | 2007-09-26 | 中国科学院物理研究所 | Total reflection near-field microscope combining with magnetic forceps for observing biomacromolecule |
| CN101881786A (en) * | 2010-05-26 | 2010-11-10 | 中国科学院半导体研究所 | Scanning near-field optical microscopy system based on micro-hole laser |
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