CN102269985A - Control device of vacuum unit for integrated circuit - Google Patents
Control device of vacuum unit for integrated circuit Download PDFInfo
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- CN102269985A CN102269985A CN2010101918065A CN201010191806A CN102269985A CN 102269985 A CN102269985 A CN 102269985A CN 2010101918065 A CN2010101918065 A CN 2010101918065A CN 201010191806 A CN201010191806 A CN 201010191806A CN 102269985 A CN102269985 A CN 102269985A
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- Prior art keywords
- control
- interface
- vacuum unit
- communication module
- integrated circuit
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Abstract
The invention relates to a control device of a vacuum unit for an integrated circuit. The control device comprises a control unit, a human-computer interface, a switch quantity input/output interface, a communication module and an analog quantity input interface, wherein the control unit is a control core; a digital quantity input end and a digital quantity output end of the control unit are respectively connected with a working state signal and a control signal of the vacuum unit through the switch quantity input/output interface; an analog quantity input end of the control unit is connected with various analog quantity sensors through the analog quantity input interface; and the control unit performs communication and connection by the communication module and an upper computer or a local control box. In the invention, three interface modes such as RS-232, RS-485 and a programmable logic controller (PLC) are compatible with a relay interface, so the remote control of the vacuum unit on arbitrary position in an integrated circuit (IC) production line can be realized, various parameters of the vacuum unit are monitored in real time, the foreseeability of probable-occurrence fault is greatly improved, and the normal running of the vacuum unit in a health environment is ensured.
Description
Technical field
The present invention relates to the integrated device electronics vacuum and obtain the field, specifically a kind of integrated circuit vacuum unit control device.
Background technology
Obtain the field in integrated circuit (IC) equipment vacuum, the control system of vacuum unit is essential.Traditional vacuum unit lacks the necessary control function, as autoprotection function, communication and Remote interface etc.On the IC production line, master control system need be according to various parameter settings, adjusting process flow processs such as pumping speed, vacuum tightness and the unit temperature of vacuum unit, pressure, and in the prior art, above-mentioned parameter can't obtain, not to the security monitoring measure of vacuum unit in operational process.
Summary of the invention
Can't obtain at the parameter that exists in the prior art, not to the defective of the security monitoring measure of vacuum unit in operational process, the technical problem to be solved in the present invention provide a kind of possess multiple parameter monitoring, at the integrated circuit that multiple host computer interface is being provided aspect communication and the Long-distance Control with vacuum unit control device.
For solving the problems of the technologies described above, the technical solution used in the present invention is:
Integrated circuit of the present invention has control module, man-machine interface, switching value IO interface, communication module and analog quantity input interface with vacuum unit control device, wherein control module is the control core, its digital quantity I/O end connects the control signal of the working state signal and the vacuum unit of vacuum unit respectively by the switching value input/output interface, and the analog quantity input end of control module connects all kinds of analog sensors by the analog quantity input interface; Control module carries out communication by communication module with host computer or local control enclosure and is connected.
Described communication module comprises the 1st communication module and the 2nd communication module, and wherein the 1st communication module adopts the RS485 serial ports, is used for the one-to-many Long-distance Control; The 2nd communication module adopts the RS232 serial ports, is used for closely controlling one to one.
Described all kinds of analog sensor comprises transmitter, gas flow transmitter, temperature sensor, water flow sensor, power transducer.
Also have the compatible relay interface of PLC, the control output end of control module optionally connects PLC or relay by the compatible relay interface of PLC.
The present invention has following beneficial effect and advantage:
1. rich interface.The present invention disposes RS-232, RS-485, three kinds of interface modes of the compatible relay interface of PLC make, and the Long-distance Control of vacuum unit optional position on the IC production line is conveniently realized.
2. actual response vacuum unit real-time status.The collection of the pump body temperature of the exhaust port pressure of vacuum unit, the gas flow of nitrogen purging, vacuum unit, the cooling water flow of vacuum unit, vacuum power of the assembling unit various kinds of sensors signals such as (transmitters) itself is established one's own system the vacuum unit, various parameters to the vacuum unit are monitored in real time, possible foresight is taken place in fault improve greatly, guarantee the normally operation under the condition of health of vacuum unit.
3. meet the requirement of IC production equipment control system.The working condition of vacuum unit can in time be reacted to host computer, is convenient to the working condition that the host computer operating personnel grasp whole production line.
Description of drawings
Fig. 1 is a system construction drawing of the present invention.
Embodiment
Integrated circuit of the present invention has control module, man-machine interface, switching value IO interface, communication module and analog quantity input interface with vacuum unit control device, wherein control module is the control core, its digital quantity I/O end connects the control signal of the working state signal and the vacuum unit of vacuum unit respectively by the switching value input/output interface, and the analog quantity input end of control module connects all kinds of analog sensors by the analog quantity input interface; Control module carries out communication by communication module with host computer or local control enclosure and is connected.
Described communication module comprises the 1st communication module and the 2nd communication module, and wherein the 1st communication module adopts the RS485 serial ports, is used for the one-to-many Long-distance Control; The 2nd communication module adopts the RS232 serial ports, is used for closely controlling one to one; Described all kinds of analog sensor comprises transmitter, gas flow transmitter, temperature sensor, water flow sensor, power transducer; Also have the compatible relay interface of PLC, the control output end of control module optionally connects PLC or relay by the compatible relay interface of PLC.，
In the present embodiment, control module adopts microcontroller (MCU), and pressure unit, gas flow transmitter, temperature sensor, water flow sensor, power transducer are respectively exhaust port pressure, the gas flow of nitrogen purging, the pump body temperature of vacuum unit, the cooling water flow of vacuum unit, vacuum power of the assembling unit standard signal (0～5V) the sampled data that MCU provides the vacuum unit; The RS-232 of communication module, RS-485 interface, the compatible relay interface of PLC and MCU carry out both-way communication, on the one hand host computer is assigned the control execution command by a kind of interface protocol wherein to MCU, and MCU also returns various state parameters by this interface to host computer simultaneously; MCU finishes by the switching value IO interface the control and the various switching value signal data acquisition of various switching value performers; The both-way communication of man-machine interface and MCU is realized this locality control of unit.
Claims (4)
1. an integrated circuit is with vacuum unit control device, it is characterized in that: have control module, man-machine interface, switching value IO interface, communication module and analog quantity input interface, wherein control module is the control core, its digital quantity I/O end connects the control signal of the working state signal and the vacuum unit of vacuum unit respectively by the switching value input/output interface, and the analog quantity input end of control module connects all kinds of analog sensors by the analog quantity input interface; Control module carries out communication by communication module with host computer or local control enclosure and is connected.
2. by the described integrated circuit of claim 1 vacuum unit control device, it is characterized in that:
Described communication module comprises the 1st communication module and the 2nd communication module, and wherein the 1st communication module adopts the RS485 serial ports, is used for the one-to-many Long-distance Control; The 2nd communication module adopts the RS232 serial ports, is used for closely controlling one to one.
3. by the described integrated circuit of claim 1 vacuum unit control device, it is characterized in that: described all kinds of analog sensors comprise transmitter, gas flow transmitter, temperature sensor, water flow sensor, power transducer.
4. by the described integrated circuit of claim 1 vacuum unit control device, it is characterized in that: also have the compatible relay interface of PLC, the control output end of control module optionally connects PLC or relay by the compatible relay interface of PLC.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101918065A CN102269985A (en) | 2010-06-04 | 2010-06-04 | Control device of vacuum unit for integrated circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101918065A CN102269985A (en) | 2010-06-04 | 2010-06-04 | Control device of vacuum unit for integrated circuit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102269985A true CN102269985A (en) | 2011-12-07 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010101918065A Pending CN102269985A (en) | 2010-06-04 | 2010-06-04 | Control device of vacuum unit for integrated circuit |
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| CN (1) | CN102269985A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103899523A (en) * | 2012-12-29 | 2014-07-02 | 中国科学院沈阳科学仪器股份有限公司 | Dry pump unified electric control platform system |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4696578A (en) * | 1986-06-19 | 1987-09-29 | International Business Machines Corporation | Single chip thermal tester |
| CN2836057Y (en) * | 2005-08-29 | 2006-11-08 | 浙江大学 | Vacuum printing frame controller |
| CN201035368Y (en) * | 2007-05-25 | 2008-03-12 | 湖南冶金职业技术学院 | Hard sintered alloy vacuum fritting furnace intelligent controller |
| US20090165564A1 (en) * | 2007-12-26 | 2009-07-02 | Renesas Technology Corp. | Semiconductor pressure sensor and data processing device |
| CN201845216U (en) * | 2010-06-04 | 2011-05-25 | 中国科学院沈阳科学仪器研制中心有限公司 | Controller of vacuum set for integrated circuit |
-
2010
- 2010-06-04 CN CN2010101918065A patent/CN102269985A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4696578A (en) * | 1986-06-19 | 1987-09-29 | International Business Machines Corporation | Single chip thermal tester |
| CN2836057Y (en) * | 2005-08-29 | 2006-11-08 | 浙江大学 | Vacuum printing frame controller |
| CN201035368Y (en) * | 2007-05-25 | 2008-03-12 | 湖南冶金职业技术学院 | Hard sintered alloy vacuum fritting furnace intelligent controller |
| US20090165564A1 (en) * | 2007-12-26 | 2009-07-02 | Renesas Technology Corp. | Semiconductor pressure sensor and data processing device |
| CN201845216U (en) * | 2010-06-04 | 2011-05-25 | 中国科学院沈阳科学仪器研制中心有限公司 | Controller of vacuum set for integrated circuit |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103899523A (en) * | 2012-12-29 | 2014-07-02 | 中国科学院沈阳科学仪器股份有限公司 | Dry pump unified electric control platform system |
| CN103899523B (en) * | 2012-12-29 | 2016-02-03 | 中国科学院沈阳科学仪器股份有限公司 | Electrical control plateform system unified by a kind of dry pump |
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Application publication date: 20111207 |